TWM587751U - Probe module suitable for multiple to-be-tested units with inclined conductive contacts - Google Patents

Abstract

A probe module is used to simultaneously detect two units to be tested adjacent to each other at a side edge, and the two units to be tested each have a junction point adjacent to a second main edge and an adjacent side edge; the probe module includes A probe base and a plurality of boundary probes provided on the probe base. When the probe module detects the waiting unit, the first main edge of each unit to be tested is closer to the probe base than the second main edge. These junction probes are extended by the cantilever segment above the first main edge of the unit under test to the junction junction and then touch the junction junction with their touch points; thus, these junction probes can be avoided Too close to each other or interfere with each other.

Description

Probe module suitable for multiple units under test with inclined conductive contacts

This creation is related to the probe module of the probe card, and particularly relates to a probe module suitable for a multi-UUT with inclined conductive contacts.

Please refer to FIG. 1, which shows a unit under test (UUT) with inclined conductive contacts. The unit under test 10 may be an unpackaged die or a packaged chip. The unit under test 10 has a plurality of first conductive contacts 11 arranged in one or more rows for output signals, and a plurality of second conductive contacts 12 arranged in one row for input signals, such as shown in FIG. 1 The unit under test 10 has three rows of first conductive contacts 11 arranged from a first long side 131 of a substrate 13 toward a second long side 132 and a row of first conductive contacts 11 arranged along the second long side 132 of the substrate 13. Two conductive contacts 12, the first and second conductive contacts 11, 12 are arranged in a plurality of rows, and the arrangement direction of each row is substantially parallel to an imaginary dividing axis L perpendicular to the first and second long sides 131 and 132 And is close to the imaginary boundary axis L, such as the one included in an intermediate block 14 in FIG. 1, where the long sides 111, 121 of the first and second conductive contacts 11, 12 are substantially parallel to the imaginary boundary Axis L, and the first and second conductive contacts 11 and 12 in the row farther from the imaginary boundary axis L To incline the conductive contact, it is closer to one end of the first long side 131 of the substrate 13 and closer to the imaginary boundary axis L, and one end farther from the first long side 131 of the substrate 13 is further away from the imaginary boundary axis L, that is, The inclined conductive contacts are tilted from top to bottom and from the inside to the outside as viewed in the direction of FIG. 1, and the first and second conductive contacts 11 and 12 that are farther from the imaginary boundary axis L are relative to the imaginary boundary axis L The larger the angle is, for example, the angles θ1 and θ2 of the long sides 111 and 121 of the first and second conductive contacts 11 and 12 included in the two outer blocks 15 and 16 in FIG. 1 with respect to the imaginary boundary axis L are the largest.

The aforementioned unit under test 10 can be detected by using a probe card with a cantilever probe. In order to simplify the diagram, only a probe 17 corresponding to the leftmost second conductive contact 12 is schematically shown in FIG. Each of the conductive contacts 11 and 12 corresponds to a probe. The cantilever section 171 of the probe 17 can extend from a probe base 18 located above the second long side 132 of the unit under test 10 to the conductive contact. 12 above, so that a touch section (not shown) of one of the probes 17 extending downward from the end of the cantilever section 171 can touch the corresponding conductive contact 12.

However, since the unit under test 10 has inclined conductive contacts with inconsistent tilt angles, the probes required for its detection are difficult to configure on the probe base, especially for the detection of multiple units under test, that is, detecting at least two of the units to be tested simultaneously. There is a concern that the probes 17 interfere with each other in the testing unit 10, so there is currently no applicable testing device.

In view of the above-mentioned shortcomings, the main purpose of this creation is to provide a probe module that is suitable for the detection of many units under test with inclined conductive contacts as described above to avoid the probes being too close to each other or even interfering with each other.

In order to achieve the above purpose, the probe module provided in this creation is used to simultaneously detect a plurality of units under test, each of the units under test has a first main edge, a second main edge, a connection between the first main edge and the One of the second main edge, a first side edge and a second side edge, and a plurality of conductive contacts. The plurality of units under test includes a first unit under test and a second unit under test. The first unit under test. The second side edge is adjacent to the first side edge of the second unit under test. The conductive contact of the first unit under test includes a second main edge and a second side adjacent to the first unit under test. The first junction junction at the edge, and the conductive junction of the second unit under test includes a second junction junction adjacent to the second main edge and the first side edge of the second unit under test.

The probe module includes at least one probe base and a plurality of probes, each of which includes a cantilever segment and a one-point contact segment, the cantilever segment has a fixing portion fixedly connected to the probe base, and a connection The touch portion is connected to the exposed portion at the fixed portion and extending from an inner side surface of the probe base. The at least one probe base includes a first probe base, and the plurality of probes includes a plurality of boundary probes disposed on the first probe base. When the probe module detects the waiting unit, The first main edge of each unit under test is closer to the first probe base than the second main edge, and at least part of the boundary probe of the probe module passes through the first of the waiting unit with its cantilever segment. The main edge extends above the first junction junction and the second junction junction, and then touches the first junction junction and the second junction junction with its touch points.

In other words, this creation is aimed at the conductive contact where the adjacent side edge of the adjacent unit under test is close to the second main edge, that is, the junction between the first and second junctions. The probe extended from the first probe base of the first main edge of the measuring unit spans a relatively long distance and touches the first and second junctions adjacent to the second main edge. The probe configuration used by the probe module to touch other conductive contacts of the waiting unit is not limited.

With this, even if the extension directions of the first and second junctions toward the second main edge are close to each other, the exposed portions of the cantilever sections of these junction probes can still cooperate with the first direction The extension direction of the two junction contacts to avoid the probe from accidentally sliding onto non-corresponding conductive contacts during the spot measurement, that is, the exposed part of the cantilever section of these junction probes gradually from the first probe base. Close to the adjacent side edge of the unit under test (that is, the second side edge of the first unit to be tested and the first side edge of the second unit to be tested), and only extend to the corresponding first and second junctions respectively Above, so the junction probes will not be too close to or even across the adjacent side edges, so that the junction probes can be prevented from being too close to each other or even interfering with each other.

The detailed structure, characteristics, assembly or use method of the probe module provided in this creation and applicable to a plurality of units under test with inclined conductive contacts will be described in the detailed description of the subsequent embodiments. However, those with ordinary knowledge in the field of creation should be able to understand that the detailed descriptions and the specific embodiments listed in the implementation of this creation are only used to illustrate this creation and are not intended to limit the scope of patent applications for this creation.

The applicant first explains here that in the embodiments and drawings to be described below, the same reference numerals represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for convenience of illustration and are not drawn according to the actual scale and quantity, and if implementation is possible, the features of different embodiments can be applied interactively.

Please refer to FIGS. 3 to 7. The probe module 20 provided in the first preferred embodiment of the present invention mainly includes a first probe holder 21, a second probe holder 22, and a plurality of probes 30 a to f. .

Each of the probes 30a to f is a straight needle made of a conductive material (such as metal) and is bent by machining. As shown in FIG. 4, each of the probes 30a to f includes a cantilever section 31 and a contact point. 32. The cantilever segment 31 has a fixing portion 311 fixedly connected to the first probe holder 21 or the second probe holder 22, and a fixing portion 311 connected to the fixing portion 311 and from one of the first probe holders 21. An inner side surface 221 of the side surface 211 or one of the second probe bases 22 extends out of the exposed portion 312. As shown in Figs. 3 and 5 ~ 7, the cantilever section 31 of some of the probes 30a ~ f has not been bent so that the fixed portion 311 and the exposed portion 312 are in line, and the cantilever section of the other probes 30a ~ f 31 is bent so that the fixing portion 311 and the exposed portion 312 are not aligned. As shown in FIG. 4, the contact segments 32 of each of the probes 30 a to f extend downward from the ends of the exposed portions 312.

The first probe base 21 and the second probe base 22 are made of an insulating material (for example, black plastic). The first and second probe bases 21 and 22 face each other with their inner sides 211 and 221 facing each other. Set, and is usually fixed to the bottom surface 41 of a circuit board 40 (as shown in FIG. 4), so that the circuit board 40, the first and second probe holders 21, 22, and the probes 30 a to f are combined into one probe. Pin card.

In the embodiment of the present creation, the fixing portions 311 of each of the probes 30a to f are located in the first or second probe holders 21 and 22, and the fixing method is to use black glue to simultaneously use the same needle layer (detailed in Below) the probe is set at a predetermined position on the probe base, and then the black glue is dried to fix the probe on the probe base. However, the fixing portions 311 of each of the probes 30a to f can also be fixed to the outer surfaces of the first or second probe holders 21 and 22 by an adhesive. Each of the probes 30a-f may further have a connecting section (not shown) extending from an outer side surface 212 of the first probe base 21 or an outer side surface 222 of the second probe base 22 to The connection section is electrically connected to a conductive contact (not shown) on the bottom surface 41 of the circuit board 40.

Specifically, the fixed portion 311 of the tilt probe 30a to f (the exposed portion 312 is inclined) in this embodiment includes an inner portion 311a connected to the exposed portion 312, and an extending portion from the inner portion 311a to The outer side of the probe base is connected to the outer section 311b, the inner section 311a is inclined in line with the exposed portion 312, and the outer section 311b is aligned with and perpendicular to the aforementioned connection section. The inner and outer sides of the probe base (that is, parallel to the untilted probe). In such a way that the probe is tilted, a straight line is first drawn according to the corresponding extension direction D2 of the conductive contact (detailed below). The needle is placed on the probe base and the inner section 311a of the fixing portion 311 is fixed with black glue to fix the exposed portion 312 of the probe at a desired angle (that is, parallel to the extension direction of the corresponding conductive contact) D2) At this time, the probe has been fixed on the probe base, and then the fixing portion 311 is bent so that the outer section 311b and the connecting section are perpendicular to the inner and outer sides of the probe base, and then fixed with black glue. Outer section 311b, in this way can facilitate the bending operation Line and the bending angle can be difficult to probe the fixed good rebound.

The created probe module is used to detect multiple units under test, that is, to detect multiple units under test at the same time. For example, the probe module 20 of this embodiment is used to simultaneously detect a first unit under test 50A. And a second unit under test 50B. The unit under test in the embodiment of this creation is the same as the unit under test 10 (shown in Figure 1) described in the prior art, but in order to more clearly describe the characteristics of this creation, different descriptions are used in the embodiments. The method is further explained with reference to different component numbers in FIG. 1.

As shown in FIG. 3 and FIG. 4, an upper surface 56 of each of the units under test 50A and 50B has first and second main edges 51 and 52 (usually long sides) facing in opposite directions, and connects the first and second main edges. 51, 52 and first and second side edges 53, 54 (usually short sides) facing in opposite directions, and a plurality of conductive contacts 55a-f, the second side edge 54 of the first unit 50A to be tested is connected to the first The first side edges 53 of the two units under test 50B are adjacent. When the probe module 20 detects the waiting units 50A and 50B, the first and second probe seats 21 and 22 are located above the outside of the first main edge 51 and the second major edge of the units 50A and 50B, respectively. Above the outside 52, in other words, the first main edge 51 of each of the units under test 50A, 50B is closer to the first probe base 21 than the second main edge 52, and the second main edge of each of the units under test 50A, 50B 52 is closer to the second probe base 22 than the first main edge 51. The probe module 20 is moved downwards (together with the aforementioned circuit board 40) and then touches the probes with the probes 30a ~ f, respectively. Equivalent conductive contacts 55a ~ f.

What needs to be explained here is that in this creation, the touch direction D1 of the probes 30a ~ f (as shown in Figure 4) is defined as downward, and the directivity of other features (such as up and down) is described on this basis. , Top, bottom, etc.), for example, the upper surface 56 of each of the units under test 50A, 50B provided with conductive contacts 55a-f is the surface facing the opposite direction of the touch direction D1. The bottom surface 41 on which the first and second probe bases 21 and 22 are fixed is the surface facing the touch direction D1. However, the aforementioned directivity only describes that each feature tends to the touch direction D1 (for example, downward) or the opposite direction (for example, upward) of the touch direction D1, and does not conform to the touch direction D1 or The direction of the touch direction D1 is the opposite direction. For example, the touch points 32 of the probes 30a to f each extend downward from the end of the exposed portion 312. The meaning may include that the touch point 32 is toward the touch direction D1. Extending, or as shown in FIG. 4, the touch section 32 is inclined toward the touch direction D1 as shown in FIG. 4.

In each of the units under test 50A, 50B, each of the conductive contacts 55a-f has a first end 551 facing the first main edge 51 and a second end 552 facing the second main edge 52, for simplicity In the drawing, only the first end 551 and the second end 552 of the three second conductive contacts in FIG. 5 are marked, and each of the conductive contacts 55a-f can define a first from the first end 551 to the second The extending direction D2 of the end 552. As shown in FIG. 3, in this embodiment, each of the units under test 50A, 50B can define an imaginary boundary axis A1, and between the imaginary border axis A1 of each of the units under test 50A, 50B and the first side edge 53. The extending direction D2 of the conductive contacts 55a ~ e is parallel to the imaginary boundary axis A1 (for example, the conductive contact located in the middle block 57 indicated in FIG. 5) or closer to the first side edge 53 relative to the imaginary The boundary axis A1 is inclined (for example, the conductive contact located on the left block 58 shown in FIG. 5), and the conductive contact 55 a between the imaginary boundary axis A1 and the second side edge 54 of each of the units under test 50A, 50B ~ The extending direction D2 of d and 55f is parallel to the imaginary delimitation axis A1 (for example, the conductive contact located in the middle block 57 marked in FIG. 5) or close to the second side edge 54 relative to the imaginary delimitation axis A1. Inclined (for example, the conductive contact located on the right block 59 marked in FIG. 5). More specifically, the extension direction D2 of the conductive contacts 55a to d (those located in the middle block 57) near the imaginary boundary axis A1 is parallel to the imaginary boundary axis A1, and the further away from the imaginary boundary axis A1 is the conductive The contact points 55a to f are more inclined with respect to the imaginary boundary axis A1.

As shown in FIG. 3, in each of the units under test 50A, 50B, the conductive contacts 55a-f are divided into first conductive contacts 55a-c adjacent to the first main edge 51, and adjacent to the second The second conductive contacts 55d ~ f of the main edge 52, wherein the first conductive contacts 55a are arranged in a first row L1 along the first main edge 51 substantially parallel to a horizontal imaginary axis A2 (as shown in FIG. 5). (Shown), the first conductive contact 55b is substantially parallel to the horizontal imaginary axis A2 in a second line L2 (as shown in FIG. 6) next to the first line L1, and the first conductive contact 55c is Substantially parallel to the horizontal imaginary axis A2, a third line L3 (as shown in FIG. 7) next to the second line L2 is arranged, and the first to third lines L1 to L3 are sequentially from the first main The edge 51 is aligned in the direction of the second main edge 52. As shown in FIG. 3, the second conductive contacts 55d to f of each of the units under test 50A, 50B are substantially parallel to the horizontal imaginary axis A2 in a row along the second main edge 52, which includes a distance from the first , The plural intermediate indirect points 55d which are farther away from the two-side edges 53, 54, the three first-side contact points 55e located between the intermediate indirect points 55d and the first lateral edge 53, and the intermediate indirect points 55d Three second side contacts 55f with the second side edge 54. Since the second side edge 54 of the first unit under test 50A is adjacent to the first side edge 53 of the second unit under test 50B, the second side contact 55f of the first unit under test 50A is defined as the first A junction point 61 is defined as the second junction point 62 of the first side contact point 55e of the second unit under test 50B.

Please refer to FIG. 2, which shows that the first and second units 50A and 50B are provided with the first and second junctions 61 and 62, a part of the second probe base 22 and two imaginary probes. 63. As shown in FIG. 2, if the probes 63 corresponding to the first junction point 61 and the second junction point 62 are provided in the second probe base 22, the probes 63 are too close to each other or even each other Concerns of interference, this embodiment is set to the three second conductive contacts closest to each of the first and second side edges 53, 54 may cause this doubt, so the first and second side contacts of each unit under test 50A, 50B 55e and 55f each have three, however, the number of the first and second side contacts 55e and 55f of each unit 50A and 50B to be tested can be at least one, and the remaining second conductive contacts are all intermediate points 55d. In other words, the number of the first and second junctions 61 and 62 may be at least one each.

The probes 30a ~ f of the probe module 20 are divided into first probes 30a ~ c which are disposed on the first probe base 21 and are used to touch the first conductive contacts 55a ~ c (see FIG. 5). To FIG. 7), a second probe 30 d (as shown in FIG. 3) provided on the second probe base 22 and used to touch these indirect points 55 d, and provided on the first probe base 21 and It is used to touch the boundary probes 30e and 30f of the first and second side contacts 55e and 55f (as shown in FIG. 3). As shown in FIGS. 4 and 5, the first probes 30 a are arranged in a row on an imaginary horizontal plane P1 in an arrangement manner substantially corresponding to the first conductive contacts 55 a. As shown in FIGS. 4 and 6, the first probes 30 b are arranged in a row on an imaginary horizontal plane P2 higher than the imaginary horizontal plane P1 in an arrangement manner substantially corresponding to the first conductive contacts 55 b. As shown in FIGS. 4 and 7, the first probes 30 c are arranged in a row on an imaginary horizontal plane P3 higher than the imaginary horizontal plane P2 in an arrangement manner substantially corresponding to the first conductive contacts 55 c. In other words, the first probes 30a ~ c are arranged in three rows (the same number of rows as the first conductive contacts 55a ~ c), and the order is from bottom to top corresponding to the first conductive contacts 55a ~ c. The order of the first to third lines L1 to L3. As shown in FIG. 4, the boundary probes 30e, 30f are located on an imaginary horizontal plane P4 higher than the imaginary horizontal plane P3, that is, higher than the first probes 30a ~ c.

In other words, the first probe base 21 is provided with four needle layers respectively located on the imaginary horizontal planes P1 to P4. The probes with higher needle positions are used to touch the conductive contacts further away from the first probe base 21. Points, and the higher the cantilever segment of the needle layer, the longer the cantilever segment, so the number of probes from the first to the third needle layer (sequentially located on the imaginary plane P1 to P3) from the bottom to the top corresponds to the first to The first conductive contacts 55a ~ c of the third row L1 ~ L3, the boundary probes 30e ~ f are located at the highest needle layer of the first probe base 21, and are used to touch the distance from the first probe base 21 Among the farthest row of conductive contacts 55d ~ f, the first and second junction contacts 55e ~ f, and the conductive row 55d on the same row as the first and second junction contacts 55e ~ f are determined by the second probe. The probe 30d of a needle layer provided in the needle base 22 is touched.

When the probe module 20 detects the waiting-to-be-measured units 50A, 50B, the first probes 30a extend over the first main edge 51 of the waiting-to-be-measured units 50A, 50B with their cantilever segments 31 and extend to the Above the first conductive contact 55 a (as shown in FIG. 5), the touch points 32 touch the first conductive contacts 55 a, and the first probes 30 b pass through the waiting unit with their cantilever sections 31. The first main edges 51 of 50A and 50B extend above the first conductive contacts 55b (as shown in FIG. 6), and then touch the first conductive contacts 55b with their touch segments 32, and the first A probe 30c extends with its cantilever section 31 above the first main edge 51 of the waiting unit 50A, 50B to the first conductive contacts 55c (as shown in FIG. 7), and then touches its section 32 points touch the first conductive contacts 55c, and the second probes 30d extend with their cantilever segments 31 above the second main edge 52 of the waiting test unit 50A, 50B to the intermediate indirect points 55d. (As shown in FIG. 3) and then touch the intermediate point 55d with its touch section 32, and the boundary probes 30e and 30f pass through the cantilever section 31 The measurement units 50A and 50B extend above the first main edge 51 and extend above the first and second side contacts 55e and 55f (as shown in FIG. 3), and then touch the first and second points with their touch points 32. The side contacts 55e and 55f.

In this embodiment, the direction in which the exposed portions 312 of each of the probes 30a to f extend from the probe bases 21 and 22 is substantially corresponding to the conductive contacts 55a to f to which the probes 30a to f will touch. The extending direction D2 of the “substantially corresponding” means that the direction in which the exposed portion 312 extends from the probe bases 21 and 22 does not have to be the same or opposite to the extending direction D2 of the corresponding conductive contacts 55a to f. , But when viewed from above (that is, in the directions of FIGS. 3 and 5 to 7), the exposed portion 312 is almost parallel to the extending direction D2 of its corresponding conductive contact 55a to f, so that the probes 30a to f can be avoided The point contact section 32 deviates beyond the corresponding conductive contacts 55a-f during the point contact, thereby causing the problem of inaccurate point contact.

In other words, the inclination angle arrangement of the exposed portions 312 of the probes 30a to f is similar to the inclination angle arrangement of the conductive contacts 55a to f. In detail, each of the probe seats 21 and 22 can define a first imaginary dividing line L4 perpendicular to one of its inner and outer sides 211, 212, 221, and 222, and respectively located on the first imaginary dividing line L4. A first (left) and a second (right) second imaginary boundary line L5 (which coincides with the imaginary boundary axis A1 of the first unit 50A to be measured) and a third imaginary boundary line L6 (which is identical to the second The imaginary boundary axis A1 of the unit under test 50B coincides), the first imaginary boundary line L4 divides each of the probe bases 21 and 22 into a part (left half) corresponding to the first unit 50A and a second For the part (right half) of the unit to be tested 50B, the second imaginary boundary line L5 and the third imaginary boundary line L6 are the boundaries of the inclination angle configuration of the probes of the left half and the right half, for example As shown in FIG. 3, the second imaginary dividing line L5 divides the left half of the first probe base 21 into a first area AR1 which is not adjacent to the first imaginary dividing line L4 and a first imaginary dividing line. The second area AR2 of the boundary line L4, the third imaginary boundary line L6, the right half of the first probe base 21 Into a first virtual boundary line adjacent to the third region AR3 L4 and a non-adjacent to the first virtual boundary line of the fourth region AR4 L4. Furthermore, for the probes provided on the left half of the first probe base 21 (that is, the first area AR1 and the second area AR2), the direction in which the exposed portion 312 extends from the inner side surface 211 is parallel. It is inclined with respect to the second imaginary boundary line L5 at the second imaginary boundary line L5 (for example, the probe corresponding to the middle block 57 indicated in FIG. 5) or away from the second imaginary boundary line L5 (for example, corresponding to FIG. 5 The probes on the left and right blocks 58, 59); for the probes provided on the right half of the first probe holder 21 (ie, the third area AR3 and the fourth area AR4), the exposed portion 312 The direction extending from the inner side surface 211 is parallel to the third imaginary dividing line L6 (for example, a probe corresponding to the middle block 57 marked in FIG. 5) or away from the third imaginary dividing line L6 with respect to the third The imaginary dividing line L6 is inclined (for example, the probes corresponding to the left and right blocks 58 and 59 indicated in FIG. 5). Conversely, for the probe provided on the left half of the second probe base 22, the direction in which the exposed portion 312 extends from the inner side surface 221 is parallel to the second imaginary dividing line L5 (for example, corresponding to the label shown in FIG. 5) The probe of the middle block 57) or inclined toward the second imaginary boundary line L5 relative to the second imaginary boundary line L5 (for example, the probes corresponding to the left and right blocks 58 and 59 as shown in FIG. 5) ); For the probe provided in the right half of the second probe base 22, the direction of the exposed portion 312 extending from the inner side surface 221 is parallel to the third imaginary dividing line L6 (for example, corresponding to the one shown in FIG. 5) The probe of the middle block 57) or inclined toward the third imaginary boundary line L6 relative to the third imaginary boundary line L6 (for example, the probes corresponding to the left and right blocks 58 and 59 indicated in FIG. 5) .

With the probe configuration of the probe module created by the present invention, the above-mentioned effect of ensuring the accurate touch of the probe can still be achieved under the premise that so many probes are arranged in the probe base at an appropriate distance. In addition, in this embodiment, the outer sections 311b of the fixing portions 311 of the probes 30a to f are substantially parallel to each other, so it is more convenient to arrange the probes in the probe holder; however, with this creation The probe module of the probe module can also facilitate the arrangement of the probes (such as the probes 30d to 30f shown in FIG. 8) that are substantially in line with the fixed portion 311 and the exposed portion 312, which can further simplify The bending process of the probe.

More importantly, as shown in FIG. 3, although the extending direction D2 of the first junctions 61 is inclined toward the second side edge 54 of the first unit 50A to be measured, the first The extending direction D2 of the second junction contact 62 is also inclined toward the ground of the first side edge 53 of the second unit 50B to be measured. However, the probe module 20 of this creation is obtained from the first probe base. 21 The extended boundary probes 30e and 30f touch the first and second boundary contacts 61 and 62, even if they are used to touch the exposed portions 312 of the boundary probes 30e and 30f of the first and second boundary contacts 61 and 62. The direction extending from the first probe base 21 corresponds to the extending direction D2 of the corresponding first and second junctions 61 and 62, and the exposed portion 312 of the cantilever section 31 of these junction probes 30e and 30f is from the first A probe base 21 gradually approaches the adjacent side edge of the unit under test (ie, the second side edge 54 of the first unit under test 50A and the first side edge 53 of the second unit under test 50B), and only extends to The corresponding first and second junctions 61, 62 are above, so the junction probes 30e, 30f will not be too close or even span the adjacent sides Edge, so the junction to avoid such probes 30e, 30f are too close to each other or interfere with each other even.

It is conceivable that when the first side edge 53 of the first unit under test 50A and the second side edge 54 of the second unit 50B are also adjacent to other units under test (that is, there are four side by side) The unit to be tested), the leftmost three-junction probe 30e and the rightmost three-junction probe 30f can also exert the aforementioned effects. In the case where the first side edge 53 of the first unit 50A and the second side edge 54 of the second unit 50B are not adjacent to other units under test, the first The side contact 55e and the second side contact 55f of the second unit 50B to be tested can also be spot-tested by a second probe extended from the second probe base 22, that is, as shown in FIG. 9A, the first A probe base 21 is not provided with the left-most three-boundary probe 30e and the right-most three-boundary probe 30f in FIG. The probe 30d touches the first side contact 55e of the first unit under test 50A and the second side contact 55f of the second unit 50B under test. In addition, the probe module of this creation is not limited to being provided in the second region AR2 and the third region AR3 of the first probe base 21 as shown in FIG. 3 and FIG. 9A with the first imaginary dividing line L4 being symmetrical. The boundary probes 30e, 30f which are symmetrically arranged on the axis can be, for example, as shown in FIG. 9B. The first probe base 21 is provided with the boundary probe 30e only in the third area AR3, for spotting adjacent second The second boundary probe 62 of the first side edge 53 of the unit under test 50B, and the first boundary probe 61 adjacent to the second side edge 54 of the first unit 50A to be tested extends from the second probe base 22 The second probe 30d is used for spot measurement, or may be in the state shown in FIG. 9C. The first probe base 21 is provided with a boundary probe 30f only in the second area AR2 for spot measurement adjacent to the first unit under test. The first boundary probe 61 of the second side edge 54 of 50A, and the second boundary probe 62 adjacent to the first side edge 53 of the second unit 50B to be tested extends from the second probe base 22 The probe 30d performs spot measurement.

Please refer to FIG. 10 and FIG. 11. The probe module 20 ′ provided in the second preferred embodiment of the present invention is used to simultaneously detect the first to fourth units to be tested 50A to D in a matrix arrangement. In the lower left and lower right first and second units under test 50A and 50B in FIG. 10, the probe module 20 ′ uses a probe configuration similar to the probe module 20 of the first preferred embodiment, in order to simplify the diagram The probes in this section are not shown in Figure 10. For the third and fourth units to be tested 50C, 50D in the upper left and upper right in FIG. 10, the second main edge 52 of the third unit 50C is in phase with the first main edge 51 of the first unit 50A. Next, the second main edge 52 of the fourth unit under test 50D is adjacent to the first main edge 51 of the second unit under test 50B, and the conductive contacts 55a ~ f of the third and fourth units under test 50C and 50D are adjacent. All of them are closer to the first probe base 21 than the first conductive contacts 55a ~ c of the first and second units 50A and 50B, so the conductive contacts 55a ~ f of the third and fourth units 50C and 50D to be tested All can be touched by the probes 30g ~ j provided on the first probe base 21, and four rows of probes 30g ~ j can be added to the first probe base 21, as shown in FIG. 11, the four rows The probes 30g ~ j are located below the first probes 30a ~ c for touching the first and second units 50A and 50B, and they are used to touch the third and fourth standbys in order from top to bottom, respectively. The second conductive contacts 55d ~ f of the measurement units 50C and 50D and the third to first rows L3 ~ L1 of the first conductive contacts 55a ~ c. In order to simplify the drawing, only the probe 30g for touching the second conductive contacts 55d to f of the third and fourth units 50C and 50D to be tested is shown in FIG.

Finally, it must be stated again that the constituent elements disclosed in the previously disclosed embodiments of this creation are merely examples, and are not intended to limit the scope of this case. The replacement or change of other equivalent elements should also be the scope of this application for patents. Covered.

[Prior art]
10‧‧‧Unit to be tested

11‧‧‧ the first conductive contact
111‧‧‧long side

12‧‧‧Second conductive contact
121‧‧‧long side

13‧‧‧ substrate
131‧‧‧first long side

132‧‧‧Second long side
14‧‧‧ Intermediate Block

15, 16‧‧‧ outside block
17‧‧‧ Probe

171‧‧‧ cantilever
18‧‧‧ Probe Block

L‧‧‧imaginary boundary axis θ1, θ2‧‧‧angle

A, B‧‧‧partial

[Example]
20, 20'‧‧‧ Probe Module

21‧‧‧ (first) probe holder
211‧‧‧ inside

212‧‧‧ outside
22‧‧‧ (second) probe holder

221‧‧‧ inside
222‧‧‧ Outside
30a ~ c‧‧‧ (first) probe

30d‧‧‧ (second) probe
30e, 30f‧‧‧ (junction) probe

30g ~ j‧‧‧probe
31‧‧‧ cantilever section

311‧‧‧Fixed section
311a‧‧‧ inside section

311b‧‧‧outside section
312‧‧‧Exposed

32‧‧‧ touch segment
40‧‧‧Circuit Board

41‧‧‧ underside
50A ~ D‧‧‧The first to the fourth unit under test

51‧‧‧first main edge
52‧‧‧Second main edge

53‧‧‧ first side edge
54‧‧‧ second side edge

55a ~ c‧‧‧ (first) conductive contact
55d‧‧‧ (second) conductive contact (middle point)
55e‧‧‧ (second) conductive contact (first side contact)
55f‧‧‧ (second) conductive contact (second side contact)
551‧‧‧first end

552‧‧‧second end
56‧‧‧ Top surface

57‧‧‧ Intermediate Block
58‧‧‧Left block

59‧‧‧Right block
61‧‧‧First Junction Junction

62‧‧‧Second Junction Junction
A1‧‧‧imaginary dividing line

A2‧‧‧Horizontal imaginary axis
D1‧‧‧Touch direction

D2‧‧‧ extension direction
L1 ~ L3‧‧‧ first ~ third line

P1 ~ P4‧‧‧imaginary horizontal plane
L4 ~ L6‧‧‧‧First to third imaginary dividing line
AR1 ~ AR4‧‧‧First ~ Fourth Area

FIG. 1 is a schematic top view of a unit under test with a slanted conductive contact, a probe, and a probe base.
FIG. 2 is a schematic top view of two parts of the unit under test, a part of a probe base, and two imaginary probes.
FIG. 3 is a schematic top view of a probe module, a first unit to be tested and a second unit to be tested provided in a first preferred embodiment of the invention, but the first A probe.
FIG. 4 is a right side view of FIG. 3, but a first probe of the probe module and a circuit board are further shown.
FIG. 5 is similar to FIG. 3 except that the probe shown therein is only a part of the first probe.
FIG. 6 is similar to FIG. 5 except that the probe shown therein is only the first probe of another part.
FIG. 7 is similar to FIG. 6 except that the probe shown therein is only a part of the first probe.
FIG. 8 is similar to FIG. 3 except that the fixed portion and the exposed portion of the probe in FIG. 8 are aligned.
FIG. 9A is similar to FIG. 3, but the probes corresponding to the three first side contacts of the first unit under test and the third second side contacts of the second unit to be tested are shown in FIG. 3 Different.
FIG. 9B is similar to FIG. 9A, except that the probes corresponding to the third and second side contacts of the first unit under test in FIG. 9B are different from those shown in FIG. 9A.
FIG. 9C is similar to FIG. 9A, but the probes corresponding to the three first side contacts of the second unit under test in FIG. 9C are different from those shown in FIG. 9A.
FIG. 10 is a schematic top view of the probe module and the first to fourth units under test provided in a second preferred embodiment of the invention, but the probes shown therein are only a part of the probes.
FIG. 11 is a right side view of FIG. 10 except that other probes of the probe module are further shown.

Claims (20)

A probe module suitable for a plurality of units under test with inclined conductive contacts is used to detect a plurality of units under test at the same time, each unit under test has a first main edge, a second main edge, and is connected to the first A main edge, a first side edge and a second side edge of the second main edge, and a plurality of conductive contacts, the plurality of units under test includes a first unit under test and a second unit under test, the The second side edge of the first unit under test is adjacent to the first side edge of the second unit under test. The conductive contact of the first unit under test includes a second main unit adjacent to the first unit under test. The first junction point of the edge and the second side edge, and the conductive contact point of the second unit under test includes a second junction point adjacent to the second main edge and the first side edge of the second unit under test; The probe module contains:
At least one probe base; and a plurality of probes, each of which includes a cantilever segment and a one-point contact segment, the cantilever segment having a fixing portion fixedly connected to the probe base, and a connecting portion connected to the fixing portion and from the An inner side surface of the probe base extends to an exposed portion, and the touch section is connected to the exposed portion;
The at least one probe base includes a first probe base, and the plurality of probes includes a plurality of boundary probes disposed on the first probe base. When the probe module detects the waiting unit, The first main edge of each unit under test is closer to the first probe base than the second main edge, and at least part of the boundary probe of the probe module passes through the first of the waiting unit with its cantilever segment. The main edge extends above the first junction junction and the second junction junction, and then touches the first junction junction and the second junction junction with its touch points. The probe module applicable to a plurality of units under test with inclined conductive contacts as described in item 1 of the scope of patent application, wherein the conductive contacts of each unit under test include a plurality of first adjacent to the unit under test. The first conductive contact on the main edge; the probe of the probe module includes a plurality of first probes arranged on the first probe base; when the probe module detects the waiting unit, the first A probe is extended by its cantilever section above the first main edge of the waiting unit to the first conductive contacts and then touches the first conductive contacts with its touch section; The needle is located above the first probes. As described in item 2 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the first conductive contacts of each unit under test are substantially parallel to a horizontal imaginary axis Line up along the first major edge; the first probes are lined up on an imaginary horizontal plane in an arrangement substantially corresponding to the first conductive contacts; the interface probes are located on another imaginary On a horizontal plane. As described in item 2 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the first conductive contacts of each unit under test are substantially parallel to a horizontal imaginary axis Arranged in a plurality of rows, the order of which is from the first main edge toward the second main edge; the first probes are arranged on a plurality of imaginary horizontal planes in a manner substantially corresponding to the first conductive contacts. Arranged into a plurality of rows, the order of which corresponds to the order of the plurality of rows of the first conductive contact from bottom to top; the boundary probes are located on another imaginary horizontal plane. As described in item 1 of the scope of the patent application, the probe module applicable to a plurality of units under test with inclined conductive contacts, wherein the conductive contacts of each unit under test include a plurality of second units adjacent to the unit under test. A second conductive contact on the main edge, the second conductive contacts including a plurality of indirect points, at least one first side contact located between the middle indirect point and the first side edge, and at least one The second side contact between the intermediate point and the second side edge, the first junction point of the first unit under test is the second side contact, and the second side contact of the second unit under test The junction contact point is the first side contact point; at least one probe base of the probe module further includes a second probe base, and the probe of the probe module includes a plurality of probes disposed on the second probe base. The second probe of the needle base, when the probe module detects the waiting unit, the second main edge of each unit to be tested is closer to the second probe base than the first main edge. At least part of the second probe of the group passes through the first main unit and the second main side of the second unit under test with its cantilever segment It extends above the indirect point among the first unit under test and the second unit under test, and then touches the indirect point between the first unit under test and the second unit under test with its touch point. As described in item 5 of the scope of patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein when the probe module detects the waiting unit, part of the probe module The two probes extend over the second main edge of the first unit under test and the second main unit of the second unit under test with their cantilever segments to the first side contact of the first unit under test and the first Above the two side contacts, the first side contact of the first unit to be tested and the second side contact of the second unit to be tested are touched with their touch points. As described in item 5 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein when the probe module detects the waiting unit, a part of the probe module The boundary probe is extended by the cantilever segment above the first main edge of the waiting unit to the first side contact of the first unit under test and the second side contact of the second unit under test. The touch section touches a first side contact of the first unit under test and a second side contact of the second unit under test. As described in item 5 of the scope of the patent application, the probe module applicable to a plurality of units under test with inclined conductive contacts, wherein the second probe holder can define a first imaginary dividing line perpendicular to its inner side. A second imaginary dividing line and a third imaginary dividing line. The second imaginary dividing line and the third imaginary dividing line are respectively located on a first side and a second side of the first imaginary dividing line. The direction in which the exposed portion of the probe on the first side of the first imaginary dividing line extends from the inner side is parallel to the second imaginary dividing line or close to the second imaginary dividing line with respect to the second imaginary dividing line. It is inclined, and the direction in which the exposed portion of the probe on the second side of the first imaginary dividing line extends from the inner side is parallel to the third imaginary dividing line or close to the third imaginary dividing line with respect to the The third imaginary dividing line is inclined. The probe module applicable to a plurality of units to be tested having inclined conductive contacts as described in the first scope of the patent application, wherein the first probe base can define a first imaginary dividing line perpendicular to its inner side. A second imaginary dividing line and a third imaginary dividing line. The second imaginary dividing line and the third imaginary dividing line are respectively located on a first side and a second side of the first imaginary dividing line. The direction in which the exposed portion of the probe on the first side of the first imaginary boundary line extends from the inner side is parallel to the second imaginary boundary line or away from the second imaginary boundary line, relative to the second imaginary boundary line. The direction in which the exposed portion of the probe on the second side of the first imaginary dividing line extends from the inner side is parallel to the third imaginary dividing line or away from the third imaginary dividing line with respect to the third The imaginary dividing line is inclined. As described in item 9 of the scope of the patent application, the probe module applicable to a plurality of units under test with inclined conductive contacts, wherein the fixed portion and the exposed portion of each of the probes are substantially aligned. As described in item 9 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the fixed part of each probe includes an inner section and an outer section, and each of the probes The inner section of the fixed part of the needle is connected to the exposed part and is substantially in line with the exposed part. The outer sections of the fixed part of the probes are substantially parallel to each other. The probe module applicable to a plurality of units under test with inclined conductive contacts as described in the first scope of the patent application, wherein the plurality of units under test further includes a third unit under test and a fourth unit under test , The second main edge of the third unit under test is adjacent to the first main edge of the first unit under test, and the second main edge of the fourth unit under test is adjacent to the first main unit of the second unit The main edges are adjacent; when the probe module detects the waiting unit, the conductive contacts of the third unit under test and the fourth unit under test are all touched by a probe set on the first probe base. As described in item 1 of the scope of patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the first probe seat is provided with a plurality of needle layers from the bottom up, and the needles with higher positions are provided. The probe of the layer is used to touch the conductive contact farther from the first probe seat, and the higher the cantilever section of the probe of the higher needle layer is, the higher the probe of the needle layer is. Junction probe. As described in item 13 of the scope of the patent application, the probe module applicable to a plurality of units under test with inclined conductive contacts, wherein the at least one probe base further includes a second probe base. When the group detects the waiting unit, the second main edge of each unit to be tested is closer to the second probe base than the first main edge, and the second probe base is provided with at least one needle layer for touching the proximity At least one row of conductive contacts of the second probe base. A probe module suitable for a plurality of units under test with inclined conductive contacts is used to detect a first unit under test and a second unit under test, the first unit under test and the second unit under test The unit has a first main edge, a second main edge, a first side edge and a second side edge connected to the first main edge and the second main edge, and a plurality of conductive contacts. The second side edge of the unit under test is adjacent to the first side edge of the second unit under test. The conductive contacts of the first unit under test and the second unit under test include a row adjacent to its second main edge. Conductive contacts, the row of conductive contacts includes a first junction contact adjacent to a second side edge of the first unit under test and a second junction contact adjacent to a first side edge of the second unit under test ; The probe module contains:
A first probe base and a second probe base; and a plurality of probes, which are arranged on the first probe base and the second probe base, and form a plurality of needle layers on the first probe base and The second probe base forms at least one needle layer, and the probe located at the highest needle layer of the first probe base is used to touch the first junction junction and the second junction junction, which are located at the second junction. One of the probe bases, the probe of the needle layer is used to touch the conductive contacts in the same row as the first junction contact and the second junction contact. The probe module applicable to a plurality of units under test with inclined conductive contacts as described in item 15 of the scope of patent application, wherein each of the probes includes a cantilever section, and the cantilever section has a first probe base. An inner side surface of one of the second probe bases or an inner side surface of the second probe base extends, and at least one of the needle layers has a part of the outer exposed portion of the probe perpendicular to the protruding inner side surface and a part of the The exposed part of the needle is inclined not perpendicular to the protruding inner side surface. A probe module suitable for a plurality of units under test with inclined conductive contacts, comprising:
At least one probe base; and a plurality of probes disposed on the at least one probe base, each of the probes including a cantilever segment having an exposed portion extending from an inner side of the probe base;
Wherein, the at least one probe base includes a first probe base, and the first probe base can define a first imaginary boundary line, a second imaginary boundary line, and a third imaginary line perpendicular to the inner side surface thereof. The dividing line, the second imaginary dividing line and the third imaginary dividing line are respectively located on a first side and a second side of the first imaginary dividing line, and the second imaginary dividing line locates the first probe seat A portion of the first side of the first imaginary dividing line is divided into a first region that is not adjacent to the first imaginary dividing line and a second region that is adjacent to the first imaginary dividing line, and is located between the first region and the second region. The direction that the exposed portion of the probe extends from the inner side is parallel to the second imaginary dividing line or inclined away from the second imaginary dividing line with respect to the second imaginary dividing line. The third imaginary dividing line will The portion of the first probe seat located on the second side of the first imaginary dividing line is divided into a third region adjacent to the first imaginary dividing line and a fourth region not adjacent to the first imaginary dividing line. Zone and the fourth zone probe The direction in which the exposed portion extends from the inner side is parallel to the third imaginary dividing line or inclined away from the third imaginary dividing line relative to the third imaginary dividing line. The second region and the third region are at least One of the provided probes includes at least one boundary probe, and the length of the exposed portion of the cantilever segment of the at least one boundary probe is greater than the length of the exposed portion of the cantilever segment of the other probes. As described in item 17 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the first probe base is provided with a plurality of needle layers from the bottom to the top, and the needles with higher positions are provided. The longer the exposed part of the cantilever section of the probe of the layer is, the probe of the needle layer with the highest position is the at least one boundary probe. As described in item 17 of the scope of the patent application, a probe module suitable for a plurality of units under test with inclined conductive contacts, wherein the second area and the third area are provided with boundary probes, and the boundary probes The needles are symmetrically arranged with the first imaginary dividing line as a symmetry axis. As described in item 17 of the scope of patent application, the probe module applicable to a plurality of units under test with inclined conductive contacts, wherein the at least one probe holder further includes a second probe holder, the second probe The seat can define one of the first imaginary dividing line, a second imaginary dividing line, and a third imaginary dividing line perpendicular to the inner side thereof. The second imaginary dividing line and the third imaginary dividing line are respectively located in the first A first side and a second side of one of the imaginary dividing lines, and the direction in which the exposed portion of the probe on the first side of the first imaginary dividing line extends from the inner side is parallel to the second imaginary dividing line or toward The second imaginary dividing line is inclined close to the second imaginary dividing line. The direction of the exposed portion of the probe on the second side of the first imaginary dividing line extending from the inner side is parallel to the third. The imaginary boundary line is inclined toward the third imaginary boundary line with respect to the third imaginary boundary line.