TWM581593U - Miniature pump - Google Patents

Miniature pump Download PDF

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TWM581593U
TWM581593U TW108203213U TW108203213U TWM581593U TW M581593 U TWM581593 U TW M581593U TW 108203213 U TW108203213 U TW 108203213U TW 108203213 U TW108203213 U TW 108203213U TW M581593 U TWM581593 U TW M581593U
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Taiwan
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air inlet
suspension plate
plate
outer frame
gas
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TW108203213U
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Chinese (zh)
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莫皓然
高中偉
陳世昌
廖家淯
廖鴻信
黃啟峰
韓永隆
蔡長諺
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研能科技股份有限公司
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Priority to TW108203213U priority Critical patent/TWM581593U/en
Publication of TWM581593U publication Critical patent/TWM581593U/en

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Abstract

一種微型泵,包括依序堆疊的設置的進氣板、共振片、壓電致動器、絕緣片及導電片。進氣板具有進氣孔、匯流排孔及匯流腔室。共振片具有中空孔。壓電致動器與共振片之間定義腔室空間,壓電致動器包含懸浮板、外框、連接部及壓電元件,連接部連接於懸浮板及外框之間,並定義間隙以供氣體流通。導電片具有複數個接觸導電端,用以電連接壓電元件。當壓電致動器受驅動時,氣體由進氣孔導入,流經匯流腔室、中空孔導入腔室空間內,再經由間隙排出,以實現氣體之傳輸。A micropump includes an air intake plate, a resonator plate, a piezoelectric actuator, an insulating sheet and a conductive sheet which are arranged in series. The air inlet plate has an air inlet hole, a bus bar hole and a confluence chamber. The resonator piece has a hollow hole. A chamber space is defined between the piezoelectric actuator and the resonator. The piezoelectric actuator comprises a suspension plate, an outer frame, a connecting portion and a piezoelectric element. The connecting portion is connected between the floating plate and the outer frame, and defines a gap. For gas circulation. The conductive sheet has a plurality of contact conductive ends for electrically connecting the piezoelectric elements. When the piezoelectric actuator is driven, the gas is introduced from the air inlet hole, flows through the confluence chamber, and the hollow hole is introduced into the chamber space, and then discharged through the gap to realize gas transmission.

Description

微型泵Micropump

本案係關於一種氣壓動力裝置,尤指一種微型超薄且靜音之微型泵。This case relates to a pneumatic power device, especially a miniature ultra-thin and silent micro pump.

目前於各領域中無論是醫藥、電腦科技、列印、能源等工業,產品均朝精緻化及微小化方向發展,其中微幫浦、噴霧器、噴墨頭、工業列印裝置等產品所包含之流體輸送結構為其關鍵技術,是以,如何藉創新結構突破其技術瓶頸,為發展之重要內容。At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

舉例來說,於醫藥產業中,許多需要採用氣壓動力驅動之儀器或設備,通常採以傳統馬達及氣壓閥來達成其氣體輸送之目的。然而,受限於此等傳統馬達以及氣體閥之體積限制,使得此類的儀器設備難以縮小其整體裝置的體積,即難以實現薄型化之目標,更無法使之達成可攜式之目的。此外,傳統馬達及氣體閥於作動時亦會產生噪音之問題,導致使用上的不便利及不舒適。For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the volume limitations of conventional motors and gas valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, conventional motors and gas valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

因此,如何發展一種能在長期使用下維持微型泵之一定工作特性及流速,實為目前迫切需要解決之問題。Therefore, how to develop a certain operating characteristic and flow rate that can maintain the micro pump under long-term use is an urgent problem to be solved.

本案之一目的在於提供一種微型泵,氣體自微型泵上之進氣孔進入,並利用壓電致動器之作動,使氣體於設計後之流道及匯流腔室中產生壓力梯度,進而使氣體高速流動,如此構成微型泵可達到靜音之功效,更可使微型氣體動力裝置之整體體積減小及薄型化,進而使微型氣體動力裝置達成輕便舒適之可攜式目的。One of the objectives of the present invention is to provide a micropump in which gas enters from the intake port of the micropump and uses a piezoelectric actuator to generate a pressure gradient in the designed flow passage and confluence chamber, thereby The gas flows at a high speed, so that the micropump can achieve the effect of mute, and the overall volume of the micro gas power device can be reduced and thinned, thereby making the micro gas power device portable and portable.

本案之另一目的在於提供一種微型泵,有別於習知壓電元件在電極上所使用焊接導電線來達到導出電極的連接電性作用之方式,本案在壓電元件之電極上使用無焊接之接觸導電端設計,克服上述電極以導線導出之方式,大大減化組裝上的複雜工序,且不施作焊點焊接方式,就無高溫而影響到局部甚至整體壓電元件之壓電特性衰減問題,以及不施作焊點焊接方式,就無焊點及焊接膠體本身的質量及體積而造成微型泵內部無法迴避之空間限制問題及作動不均勻等問題。Another object of the present invention is to provide a micropump, which is different from the conventional method in which a piezoelectric element is used to weld a conductive wire on an electrode to achieve a connection electrical connection function of the lead electrode. In this case, no solder is used on the electrode of the piezoelectric element. The contact conductive end design overcomes the above-mentioned electrode in the form of wire lead-out, greatly reduces the complicated process of assembly, and does not apply the solder joint welding mode, and has no high temperature, which affects the piezoelectric characteristic attenuation of the local or even the entire piezoelectric element. The problem, as well as the method of solder joint welding, there is no problem of the space limitation and the uneven operation of the inside of the micropump without the quality and volume of the solder joint and the welding colloid itself.

為達上述目的,本案之一較廣義實施態樣為提供一種微型泵,包括:一進氣板,具有至少一進氣孔、至少一匯流排孔及一匯流腔室,其中至少一該進氣孔供導入一氣體,至少一該進氣孔對應至少一該匯流排孔,至少一該匯流排孔對應連通該匯流腔室,且引導進入至少一該進氣孔之氣體匯流至該匯流腔室內;一共振片,貼合組接於該進氣板,具有一中空孔、一可動部及一固定部,該中空孔位於該共振片中心處,並與該進氣板之該匯流腔室相對應;一壓電致動器,透過一填充材組接結合於該共振片上構成之間,具有一腔室空間,壓電致動器包含有一懸浮板、一外框、至少一連接部、一壓電元件、至少一間隙,至少一該連接部連接於該懸浮板及該外框之間提供彈性支撐,至少一該間隙設置於該懸浮板及該外框之間以提供氣體流通,而該壓電元件貼合於該懸浮板之一表面;一絕緣片,結合於該壓電致動器之一側;以及一導電片,與該絕緣片相結合,具有複數個接觸導電端及複數個透氣開口,複數個該接觸導電端凸設於該導電片表面,並於該導電片組裝在該壓電致動器上與該壓電元件表面構成緊密預力接觸作為驅動電極之用;其中,該壓電致動器受驅動時,使該氣體由該進氣板之至少一該進氣孔導入,經至少一該匯流排孔匯集至該匯流腔室,再流經該共振片之該中空孔導入該腔室空間內,再經該壓電致動器共振作用傳輸氣體,再由該間隙排出通過該複數個透氣開口排出於外,構成氣體傳輸。In order to achieve the above object, a broader aspect of the present invention provides a micropump comprising: an air inlet plate having at least one air inlet hole, at least one bus bar hole, and a confluence chamber, wherein at least one of the air intakes The hole is for introducing a gas, at least one of the air inlet holes corresponding to at least one of the bus bar holes, at least one of the bus bar holes correspondingly communicating with the bus bar chamber, and the gas guiding into the at least one air inlet hole is merged into the confluence chamber a resonance piece, the bonding group is connected to the air inlet plate, has a hollow hole, a movable portion and a fixing portion, the hollow hole is located at the center of the resonance piece, and is connected with the confluence chamber of the air inlet plate Correspondingly, a piezoelectric actuator is coupled to the resonant plate by a filler member and has a chamber space. The piezoelectric actuator includes a suspension plate, an outer frame, at least one connecting portion, and a a piezoelectric element, at least one gap, at least one of the connecting portions is connected between the floating plate and the outer frame to provide elastic support, and at least one gap is disposed between the floating plate and the outer frame to provide gas circulation, and the The piezoelectric element is attached to the a surface of one of the floating plates; an insulating sheet coupled to one side of the piezoelectric actuator; and a conductive sheet combined with the insulating sheet, having a plurality of contact conductive ends and a plurality of gas permeable openings, the plurality of contacts The conductive end is protruded from the surface of the conductive sheet, and the conductive sheet is assembled on the piezoelectric actuator to form a tight pre-force contact with the surface of the piezoelectric element as a driving electrode; wherein the piezoelectric actuator is subjected to When driving, the gas is introduced into at least one of the inlet holes of the air inlet plate, collected into the confluence chamber through at least one of the bus bar holes, and then introduced into the chamber space through the hollow hole of the resonance plate. And transmitting the gas through the resonance of the piezoelectric actuator, and then discharging the gap through the plurality of ventilation openings to form a gas transmission.

體現本案特徵與優點的實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上係當作說明之用,而非架構於限制本案。Embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

請參閱第1圖、第2A圖、第2B圖及第3A圖所示,本案之微型泵1包含有依序堆疊的一進氣板11、一共振片12、一壓電致動器13、一絕緣片14及一導電片15所組構而成。Referring to FIG. 1 , FIG. 2A , FIG. 2B , and FIG. 3A , the micropump 1 of the present invention includes an air inlet plate 11 , a resonant plate 12 , and a piezoelectric actuator 13 , which are sequentially stacked. An insulating sheet 14 and a conductive sheet 15 are assembled.

上述進氣板11具有至少一進氣孔11a、至少一匯流排孔11b及一匯流腔室11c,上述之進氣孔11a與匯流排孔11b其數量相同,於本實施例中,進氣孔11a與匯流排孔11b以數量4個作舉例說明,但不以此為限;4個進氣孔11a分別貫通4個匯流排孔11b,且4個匯流排孔11b匯流到匯流腔室11c。The air inlet plate 11 has at least one air inlet hole 11a, at least one bus bar hole 11b and a confluence chamber 11c. The air intake hole 11a and the bus bar hole 11b have the same number. In the embodiment, the air inlet hole 11a and the bus bar hole 11b are exemplified by the number of four, but not limited thereto; the four air inlet holes 11a respectively penetrate the four bus bar holes 11b, and the four bus bar holes 11b merge to the confluence chamber 11c.

上述之共振片12,可透過貼合方式組接於進氣板11上,且共振片12上具有一中空孔12a、一可動部12b及一固定部12c,中空孔12a位於共振片12的中心處,並與進氣板11的匯流腔室11c對應,而設置於中空孔12a的周圍且與匯流腔室11c相對應的區域為可動部12b,而設置於共振片12的外周緣部分而貼固於進氣板11上則為固定部12c。The resonator piece 12 is assembled to the air inlet plate 11 through a bonding manner, and the resonator piece 12 has a hollow hole 12a, a movable portion 12b and a fixing portion 12c. The hollow hole 12a is located at the center of the resonance plate 12. And corresponding to the confluence chamber 11c of the air inlet plate 11, and a region provided around the hollow hole 12a and corresponding to the confluence chamber 11c is a movable portion 12b, and is disposed on the outer peripheral portion of the resonance piece 12 The fixing portion 12c is fixed to the air inlet plate 11.

上述之壓電致動器13,包含有一懸浮板13a、一外框13b、至少一連接部13c、一壓電元件13d、至少一間隙13e及一凸部13f;其中,懸浮板13a為一正方形懸浮板,具有第一表面131a及相對第一表面131a的一第二表面132a,外框13b環繞設置於懸浮板13a的周緣,且外框13b具有一組配表面131b及一下表面132b,並透過至少一連接部13c連接於懸浮板13a與外框13b之間,以提供彈性支撐懸浮板13a的支撐力,本實施例中,懸浮板13a的第一表面131a與外框13b的組配表面131b兩者形成共平面,以及懸浮板13a的第二表面132a與外框13b的下表面132b兩者形成共平面,而間隙13e為懸浮板13a、外框13b與連接部13c之間的空隙,用以供氣體通過。此外,懸浮板13a的第一表面131a具有凸部13f,凸部13f於本實施例中係將凸部13f的周緣且鄰接於連接部13c的連接處透過蝕刻製程,使其下凹,來使懸浮板13a的凸部13f的凸部表面131f高於第一表面131a來形成階梯狀結構。另外,外框13b環繞設置於懸浮板13a之外側,且具有一向外凸設之第一導電接腳133b,用以供電性連接之用,但不以此為限。The piezoelectric actuator 13 includes a suspension plate 13a, an outer frame 13b, at least one connecting portion 13c, a piezoelectric element 13d, at least one gap 13e and a convex portion 13f. wherein the suspension plate 13a is a square The suspension plate has a first surface 131a and a second surface 132a opposite to the first surface 131a. The outer frame 13b is disposed around the circumference of the suspension plate 13a, and the outer frame 13b has a plurality of matching surfaces 131b and a lower surface 132b. At least one connecting portion 13c is connected between the suspension plate 13a and the outer frame 13b to provide a supporting force for elastically supporting the suspension plate 13a. In this embodiment, the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b are provided. The two form a coplanar, and the second surface 132a of the suspension plate 13a and the lower surface 132b of the outer frame 13b form a coplanar, and the gap 13e is a gap between the suspension plate 13a, the outer frame 13b and the connecting portion 13c. For the passage of gas. In addition, the first surface 131a of the suspension plate 13a has a convex portion 13f. In the present embodiment, the convex portion 13f passes through the etching process of the peripheral edge of the convex portion 13f and adjacent to the connection portion 13c to be recessed. The convex surface 131f of the convex portion 13f of the suspension plate 13a is higher than the first surface 131a to form a stepped structure. In addition, the outer frame 13b is disposed on the outer side of the suspension plate 13a, and has a first conductive pin 133b protruding outward for power supply connection, but not limited thereto.

上述之共振片12與壓電致動器13係透過一填充材g相互堆疊組接,以構成之間具有一腔室空間16,而填充材g可為一導電膠,但不以此為限,使共振片12與壓電致動器13之間具有一間距h,以使共振片12與壓電致動器13之懸浮板13a上凸部13f的凸部表面131f之間可維持間距h之深度,進而可導引氣流迅速地流動,且因懸浮板13a之凸部13f與共振片12保持適當距離,使彼此接觸干涉減少,促使噪音產生被降低;於另一些實施例中,如第3B圖所示,上述之共振片12與壓電致動器13係透過一填充材g相互堆疊組接,以構成之間具有一腔室空間16,亦可藉由懸浮板13a採以沖壓成形使其向下凹陷,其下陷距離可由至少一連接部13c成形於懸浮板13a與外框13b之間所調整,使在懸浮板13a上的凸部13f的凸部表面131f與外框13b的組配表面131b兩者形成非共平面,亦即凸部13f的凸部表面131f將低於外框13b的組配表面131b,且懸浮板13a的第二表面132a低於外框13b的下表面132b,又壓電元件13d貼附於懸浮板13a的第二表面132a,與凸部13f相對設置,壓電元件13d被施加驅動電壓後,由於壓電效應而產生形變,進而帶動懸浮板13a振動;利用於外框13b的組配表面131b上塗佈少量填充材g,以熱壓接合方式使壓電致動器13貼合於共振片12的固定部12c,進而使得壓電致動器13得以與共振片12組配結合。其中懸浮板13a之第一表面131a與共振片12之間形成間距h會影響微型泵1的傳輸效果,故維持一固定的間距h,對於微型泵1提供穩定的傳輸效率是十分重要,本實施例之微型泵1對懸浮板13a使用沖壓方式,使其向下凹陷,讓懸浮板13a的第一表面131a與外框13b的組配表面131b兩者為非共平面,亦即懸浮板13a的第一表面131a將低於外框13b的組配表面131b,且懸浮板13a的第二表面132a低於外框13b的下表面132b,使得壓電致動器13之懸浮板13a凹陷形成一空間得與共振片12構成一可調整之間距h,直接透過上述壓電致動器13之懸浮板13a採以成形凹陷構成一間距h的結構改良,如此一來,所需的間距h得以透過調整壓電致動器13之懸浮板13a成形凹陷距離來完成,有效地簡化了調整間距h的結構設計,同時也達成簡化製程,縮短製程時間等優點。The resonant plate 12 and the piezoelectric actuator 13 are stacked on each other through a filler g, so as to have a chamber space 16 therebetween, and the filler g can be a conductive adhesive, but not limited thereto. A distance h between the resonator piece 12 and the piezoelectric actuator 13 is maintained to maintain a spacing h between the resonator piece 12 and the convex surface 131f of the convex portion 13f of the suspension plate 13a of the piezoelectric actuator 13. The depth, in turn, can direct the airflow to flow rapidly, and because the convex portion 13f of the suspension plate 13a maintains an appropriate distance from the resonant plate 12, the mutual contact interference is reduced, and the noise generation is reduced; in other embodiments, As shown in FIG. 3B, the above-mentioned resonator piece 12 and the piezoelectric actuator 13 are stacked and connected to each other through a filler g, so as to have a chamber space 16 therebetween, and can also be formed by the suspension plate 13a. It is recessed downward, and the sag distance thereof is adjusted by at least one connecting portion 13c formed between the suspension plate 13a and the outer frame 13b, so that the convex portion surface 13f of the convex portion 13f on the suspension plate 13a and the outer frame 13b are grouped. The matching surface 131b forms a non-coplanar, that is, the convex surface 131f of the convex portion 13f will be lower than The assembly surface 131b of the frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, and the piezoelectric element 13d is attached to the second surface 132a of the suspension plate 13a, opposite to the convex portion 13f. After the driving voltage is applied to the piezoelectric element 13d, deformation occurs due to the piezoelectric effect, thereby causing the suspension plate 13a to vibrate; a small amount of the filler material g is applied to the assembly surface 131b of the outer frame 13b, and is thermally bonded. The piezoelectric actuator 13 is attached to the fixed portion 12c of the resonator piece 12, so that the piezoelectric actuator 13 is combined with the resonator piece 12. The spacing h between the first surface 131a of the suspension plate 13a and the resonant plate 12 affects the transmission effect of the micropump 1, so maintaining a fixed spacing h is important for providing stable transmission efficiency for the micropump 1. For example, the micropump 1 uses a stamping method for the suspension plate 13a to recess it downward so that both the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b are non-coplanar, that is, the suspension plate 13a. The first surface 131a will be lower than the assembly surface 131b of the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, so that the suspension plate 13a of the piezoelectric actuator 13 is recessed to form a space. An adjustable distance h is formed between the resonator plate 12 and the suspension plate 13a of the piezoelectric actuator 13 to form a recess to form a pitch h. Thus, the required pitch h is adjusted. The suspension plate 13a of the piezoelectric actuator 13 is formed by forming a recess distance, which effectively simplifies the structural design of the adjustment pitch h, and also achieves the advantages of simplifying the process and shortening the process time.

上述之絕緣片14及導電片15皆為框型的薄型可撓片體,依序堆疊於壓電致動器13下。於本實施例中,絕緣片14貼附於壓電致動器13之外框13b的下表面132b,而導電片15堆疊於絕緣片14上。且絕緣片14及導電片15形態大致上對應於壓電致動器13之外框13b。於一些實施例中,絕緣片14即由可絕緣之材質所構成,例如:塑膠,但不以此為限,以進行絕緣之用;導電片15即由可導電之可撓材質所構成,例如:金屬片體,但不以此為限,以進行電性導通之用,以及導電片15在本實施例中,導電片15上設置一第二導電接腳15a、複數個接觸導電端15b及複數個透氣開口15c,第二導電接腳15a及複數個接觸導電端15b作為電性導通之用,而複數個透氣開口15c作為微型泵1內部實施傳輸氣體之單向出口之用,而其中複數個接觸導電端15b得由導電片15上直接冲壓成型而凸於導電片15表面,作為壓電致動器13之壓電元件13d的驅動電極之用,有別於習知壓電元件13d在電極上所使用焊接導電線來達到導出電極的連接電性作用之方式,且習知壓電元件13d在電極上施作工序上,因要將壓電元件13d上電極導出,需要使用治具將其固定,且依照不同工序要有不同對位,這些大大造成組裝上的複雜程度,為解決此問題,本案利用導電片15上直接冲壓成型複數個接觸導電端15b,以凸於導電片15表面,並在組裝上預設構成在壓電致動器13上與壓電元件13d表面形成緊密預力接觸作為驅動電極之用,在壓電元件13d隨著懸浮板13a上下振動位移時,仍能保持壓電元件13d表面與接觸導電端15b之接觸導電作用,不受壓電元件13d隨著懸浮板13a上下振動位移影響而失去接觸導電作用(如第4A圖至第4C圖所示微型泵1作動示意圖中壓電元件13d表面與接觸導電端15b始終保持接觸導電作用),如此接觸導電端15b設計以接觸不焊接來克服習知的電極以導線導出之方式,不僅簡化製程,而且不施作焊點焊接方式,就無焊接製程所產生高溫而影響到局部甚至整體壓電元件13d之壓電特性衰減問題,以及不施作焊點及焊接膠體之方式,焊點及焊接膠體本身的質量及體積也不致有造成微型泵1內部無法迴避之空間限制問題及作動不均勻等問題。The insulating sheet 14 and the conductive sheet 15 are all thin frame-shaped flexible sheets, which are sequentially stacked under the piezoelectric actuator 13. In the present embodiment, the insulating sheet 14 is attached to the lower surface 132b of the outer frame 13b of the piezoelectric actuator 13, and the conductive sheet 15 is stacked on the insulating sheet 14. The form of the insulating sheet 14 and the conductive sheet 15 substantially corresponds to the outer frame 13b of the piezoelectric actuator 13. In some embodiments, the insulating sheet 14 is made of an insulating material, such as plastic, but not limited thereto for insulation; the conductive sheet 15 is made of an electrically conductive flexible material, for example a metal plate body, but not limited thereto, for electrical conduction, and the conductive sheet 15 in the embodiment, the conductive sheet 15 is provided with a second conductive pin 15a, a plurality of contact conductive ends 15b and a plurality of venting openings 15c, a second conductive pin 15a and a plurality of contact conductive ends 15b are used for electrical conduction, and a plurality of venting openings 15c are used as a one-way outlet for transmitting gas inside the micropump 1, and wherein the plurality The contact conductive end 15b is directly stamped and formed on the conductive sheet 15 to protrude from the surface of the conductive sheet 15, and serves as a driving electrode of the piezoelectric element 13d of the piezoelectric actuator 13, which is different from the conventional piezoelectric element 13d. The welding conductive wire used on the electrode is used to achieve the connection electrical effect of the lead electrode, and the conventional piezoelectric element 13d is applied to the electrode. Since the electrode on the piezoelectric element 13d is to be led out, it is necessary to use a jig. It is fixed and in accordance with In the same process, there are different alignments, which greatly cause assembly complexity. To solve this problem, in this case, a plurality of contact conductive ends 15b are directly stamped on the conductive sheet 15 to protrude from the surface of the conductive sheet 15, and assembled. The preset configuration forms a tight pre-force contact with the surface of the piezoelectric element 13d on the piezoelectric actuator 13 as a driving electrode, and the piezoelectric element 13d can maintain the piezoelectric element 13d as the piezoelectric element 13d vibrates up and down with the suspension plate 13a. The contact between the surface and the contact conductive end 15b is not affected by the piezoelectric element 13d being affected by the up-and-down vibration displacement of the suspension plate 13a (as shown in FIGS. 4A to 4C). The surface of the component 13d is always in contact with the contact conductive end 15b. The contact of the conductive end 15b is designed to be contacted without soldering to overcome the conventional electrode lead-out method, which not only simplifies the process, but also does not apply the solder joint welding method. The problem of attenuating the piezoelectric characteristics of the partial or even the entire piezoelectric element 13d in the absence of a high temperature generated by the soldering process, and the manner in which the solder joint and the solder paste are not applied, And spot welding quality and volume of the colloid itself is not caused by the micropump have caused an internal space can not avoid the limitations and problems such as uneven actuation.

請繼續參閱第4A圖至第4C圖所示微型泵1的作動示意圖,首先請參閱第4A圖所示,壓電致動器13的壓電元件13d被施加驅動電壓後,以產生形變帶動懸浮板13a向下位移,同時共振片12受到共振原理影響而被同步向下位移,此時連帶增加了腔室空間16的容積提升,於是腔室空間16內形成了負壓,微型泵1外部氣體便經由進氣孔11a汲取,經過匯流排孔11b而進入匯流腔室11c內,再經過中空孔12a進入腔室空間16內;請再參閱第4B圖所示,當壓電元件13d帶動懸浮板13a向上位移,同時共振片12同樣被懸浮板13a因共振而向上位移,同步推擠匯流腔室11c內的氣體往腔室空間16移動,使共振片12的可動部12b向上位移,讓氣體暫時無法經由進氣孔11a汲取,此時腔室空間16內氣體受擠壓,並通過間隙13e向下傳輸,再由複數個透氣開口15c排出於微型泵1外部,達到傳輸氣體的效果;最後請參閱第4C圖所示,當懸浮板13a再被向下帶動,而懸浮板13a恢復水平位置時,此時共振片12的可動部12b也同時被帶動而向下位移,共振片12使腔室空間16內的氣體向間隙13e移動,並且提升匯流腔室11c內的容積,讓氣體能夠持續地通過進氣孔11a、匯流排孔11b再匯聚於匯流腔室11c內;如此透過不斷地重複上述第4A圖至第4C圖之作動,使微型泵1能夠連續將氣體自進氣孔11a進入,再由間隙13e向下傳輸,再由複數個透氣開口15c排出於微型泵1外部,不斷地汲取氣體,即構成實施本案微型泵1傳輸氣體之運作。Please continue to refer to the operation diagram of the micropump 1 shown in FIGS. 4A to 4C. First, as shown in FIG. 4A, the piezoelectric element 13d of the piezoelectric actuator 13 is applied with a driving voltage to generate a deformation-driven suspension. The plate 13a is displaced downward, and the resonator piece 12 is synchronously displaced downward by the resonance principle. At this time, the volume increase of the chamber space 16 is increased, so that a negative pressure is formed in the chamber space 16, and the external gas of the micropump 1 is formed. Then, it is drawn through the air inlet hole 11a, enters the confluence chamber 11c through the bus bar hole 11b, and enters the chamber space 16 through the hollow hole 12a; please refer to FIG. 4B, when the piezoelectric element 13d drives the suspension plate. 13a is displaced upward, and the resonator piece 12 is also displaced upward by the suspension plate 13a due to resonance, and the gas in the confluence chamber 11c is synchronously pushed to move into the chamber space 16, so that the movable portion 12b of the resonance piece 12 is displaced upward to allow the gas to temporarily It cannot be drawn through the air inlet hole 11a. At this time, the gas in the chamber space 16 is squeezed and transmitted downward through the gap 13e, and then discharged from the outside of the micropump 1 by a plurality of ventilation openings 15c to achieve the effect of transmitting gas; As shown in Fig. 4C, when the suspension plate 13a is further driven downward and the suspension plate 13a returns to the horizontal position, the movable portion 12b of the resonator piece 12 is also simultaneously driven to be displaced downward, and the resonance plate 12 makes the chamber The gas in the space 16 moves toward the gap 13e, and the volume in the confluence chamber 11c is raised, so that the gas can be continuously collected in the confluence chamber 11c through the intake hole 11a and the bus bar hole 11b; The operation of the 4A to 4C is such that the micropump 1 can continuously enter the gas from the air inlet hole 11a, and then be transported downward by the gap 13e, and then discharged from the plurality of ventilation openings 15c to the outside of the micropump 1, and continuously sucked. The gas constitutes the operation of the micropump 1 to carry the gas in the present case.

綜上所述,本案所提供之一種微型泵,主要藉由氣體自微型泵上之進氣孔進入,並利用壓電致動器之作動,使氣體於設計後之流道及匯流腔室中產生壓力梯度,進而使氣體高速流動,如此構成微型泵可達到靜音之功效,更可使微型氣體動力裝置之整體體積減小及薄型化,進而使微型氣體動力裝置達成輕便舒適之可攜式目的,並可廣泛地應用於醫療器材及相關設備之中;以及在壓電元件之電極上使用無焊接之接觸導電端設計,克服上述電極以導線導出之方式,有別於習知壓電元件在電極上所使用焊接導電線來達到導出電極的連接電性作用之方式,大大減化組裝上的複雜工序,且不施作焊點焊接方式,就無高溫而影響到局部甚至整體壓電元件之壓電特性衰減問題,以及不施作焊點焊接方式,就無焊點及焊接膠體本身的質量及體積而造成微型泵內部無法迴避之空間限制問題及作動不均勻等問題,極具產業利用性。In summary, a micropump provided in the present invention mainly enters the gas through the air inlet hole of the micro pump, and uses the action of the piezoelectric actuator to make the gas in the designed flow channel and the confluence chamber. The pressure gradient is generated, so that the gas flows at a high speed, so that the micropump can achieve the effect of mute, and the overall volume of the micro gas power device can be reduced and thinned, thereby making the micro gas power device portable and portable. And can be widely used in medical equipment and related equipment; and the use of solderless contact conductive end design on the electrode of the piezoelectric element, overcoming the above-mentioned electrode in the form of wire lead, different from the conventional piezoelectric element The welding conductive wire used on the electrode to achieve the connection electrical effect of the lead electrode greatly reduces the complicated process of assembly, and does not apply the solder joint welding method, and has no high temperature and affects the partial or even the entire piezoelectric element. The problem of piezoelectric characteristics attenuation, and the method of solder joint welding, the quality and volume of the solder joint itself and the size of the solder gel itself are not possible. To avoid the problem of space limitations and problems such as uneven actuation, great industrial applicability.

縱使本案已由上述實施例詳細敘述而可由熟悉本技藝人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and it is intended to be protected as intended by the appended claims.

1‧‧‧微型泵1‧‧‧Micropump

11‧‧‧進氣板 11‧‧‧Air intake plate

11a‧‧‧進氣孔 11a‧‧‧Air intake

11b‧‧‧匯流排孔 11b‧‧‧ bus bar hole

11c‧‧‧匯流腔室 11c‧‧‧ confluence chamber

12‧‧‧共振片 12‧‧‧Resonance film

12a‧‧‧中空孔 12a‧‧‧ hollow hole

12b‧‧‧可動部 12b‧‧‧movable department

12c‧‧‧固定部 12c‧‧‧Fixed Department

13‧‧‧壓電致動器 13‧‧‧ Piezoelectric Actuator

13a‧‧‧懸浮板 13a‧‧‧suspension plate

131a‧‧‧第一表面 131a‧‧‧ first surface

132a‧‧‧第二表面 132a‧‧‧ second surface

13b‧‧‧外框 13b‧‧‧Front frame

131b‧‧‧組配表面 131b‧‧‧ matching surface

132b‧‧‧下表面 132b‧‧‧ lower surface

133b‧‧‧第一導電接腳 133b‧‧‧First conductive pin

13c‧‧‧連接部 13c‧‧‧Connecting Department

13d‧‧‧壓電元件 13d‧‧‧Piezoelectric components

13e‧‧‧間隙 13e‧‧‧ gap

13f‧‧‧凸部 13f‧‧‧ convex

131f‧‧‧凸部表面 131f‧‧‧ convex surface

14‧‧‧絕緣片 14‧‧‧Insulation sheet

15‧‧‧導電片 15‧‧‧Conductor

15a‧‧‧第二導電接腳 15a‧‧‧Second conductive pin

15b‧‧‧接觸導電端 15b‧‧‧Contact conductive end

15c‧‧‧透氣開口 15c‧‧‧ breathable opening

g‧‧‧填充材 g‧‧‧Filling materials

16‧‧‧腔室空間 16‧‧‧Case space

h‧‧‧間距 H‧‧‧ spacing

第1圖為本案微型泵之立體外觀示意圖。 第2A圖為本案微型泵之正面方向視得分解示意圖。 第2B圖為本案微型泵之背面方向視得分解示意圖。 第3A圖為本案微型泵之剖面示意圖。 第3B圖為本案微型泵另一較佳實施例之剖面示意圖。 第4A圖至第4C圖為第3A圖中微型泵之實施作動示意圖。The first picture shows the three-dimensional appearance of the micro pump of the present case. Figure 2A is a schematic exploded view of the front side of the micropump of the present invention. Figure 2B is a schematic exploded view of the back side of the micropump of the present invention. Figure 3A is a schematic cross-sectional view of the micropump of the present invention. FIG. 3B is a schematic cross-sectional view showing another preferred embodiment of the micropump of the present invention. 4A to 4C are schematic views showing the operation of the micropump in Fig. 3A.

Claims (9)

一種微型泵,包括: 一進氣板,具有至少一進氣孔、至少一匯流排孔及一匯流腔室,其中至少一該進氣孔供導入氣體,至少一該進氣孔對應至少一該匯流排孔,至少一該匯流排孔對應連通該匯流腔室,且引導進入至少一該進氣孔之氣體匯流至該匯流腔室內; 一共振片,貼合組接於該進氣板,具有一中空孔、一可動部及一固定部,該中空孔位於該共振片中心處,並與該進氣板之該匯流腔室相對應; 一壓電致動器,透過一填充材組接結合於該共振片上,構成之間具有一腔室空間,該壓電致動器包含有一懸浮板、一外框、至少一連接部、一壓電元件及至少一間隙,至少一該連接部連接於該懸浮板及該外框之間提供彈性支撐,至少一該間隙設置於該懸浮板及該外框之間提供氣體流通,而該壓電元件貼合於該懸浮板之一表面; 一絕緣片,結合於該壓電致動器之一側; 一導電片,與該絕緣片相結合,具有複數個接觸導電端及複數個透氣開口,複數個該接觸導電端凸設於導電片表面,並於該導電片組裝在該壓電致動器上與該壓電元件表面構成緊密預力接觸作為驅動電極之用; 其中,該壓電致動器受驅動時,使該氣體由該進氣板之至少一該進氣孔導入,經至少一該匯流排孔匯集至該匯流腔室,再流經該共振片之該中空孔導入該腔室空間內,再經該壓電致動器共振作用傳輸氣體,再由該間隙排出通過複數個該透氣開口排出於外,構成氣體傳輸。A micropump includes: an air inlet plate having at least one air inlet hole, at least one bus bar hole, and a confluence chamber, wherein at least one of the air inlet holes is for introducing a gas, and at least one of the air inlet holes corresponds to at least one a bus bar hole, at least one of the bus bar holes correspondingly communicating with the bus bar chamber, and a gas guided into the at least one air inlet hole is merged into the confluence chamber; a resonance piece, the bonding group is connected to the air inlet plate, having a hollow hole, a movable portion and a fixing portion, the hollow hole is located at a center of the resonance piece and corresponds to the confluence chamber of the air inlet plate; a piezoelectric actuator is coupled through a filler material Forming a chamber space between the resonators, the piezoelectric actuator includes a suspension plate, an outer frame, at least one connecting portion, a piezoelectric element and at least one gap, at least one of the connecting portions being connected to Providing elastic support between the suspension plate and the outer frame, at least one gap is disposed between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to one surface of the suspension plate; Combined with the piezoelectric actuation One side of the device; a conductive sheet, combined with the insulating sheet, has a plurality of contact conductive ends and a plurality of gas permeable openings, a plurality of the contact conductive ends are protruded from the surface of the conductive sheet, and the conductive sheet is assembled at the pressure The electric actuator is configured to form a tight pre-force contact with the surface of the piezoelectric element as a driving electrode; wherein, when the piezoelectric actuator is driven, the gas is introduced into at least one of the air inlet holes of the air inlet plate And at least one of the bus bar holes is collected into the confluence chamber, and the hollow hole flowing through the resonance piece is introduced into the chamber space, and then the piezoelectric actuator resonates to transmit gas, and then the gap is discharged. The gas is transmitted by being exhausted through a plurality of the gas permeable openings. 如申請專利範圍第1項所述之微型泵,其中該壓電致動器之該懸浮板之表面包括有一第一表面及一第二表面,該第二表面相對該第一表面,而該壓電元件貼合於該懸浮板之該第二表面上,該壓電致動器之該外框具有一組配表面及一下表面。The micropump of claim 1, wherein the surface of the suspension plate of the piezoelectric actuator comprises a first surface and a second surface, the second surface being opposite to the first surface, and the pressure The electrical component is attached to the second surface of the suspension plate, and the outer frame of the piezoelectric actuator has a set of matching surfaces and a lower surface. 如申請專利範圍第2項所述之微型泵,其中該懸浮板之該第一表面與該外框之該組配表面兩者形成共平面。The micropump of claim 2, wherein the first surface of the suspension plate and the assembly surface of the outer frame form a coplanar surface. 如申請專利範圍第2項所述之微型泵,其中至少一該連接部沖壓成形於該懸浮板與該外框之間,並使該懸浮板之該第一表面與該外框之該組配表面形成為非共平面,且使該懸浮板之該第一表面與該共振片之一間距得以利用至少一該連接部沖壓成形來調整。The micropump of claim 2, wherein at least one of the connecting portions is stamped and formed between the suspension plate and the outer frame, and the first surface of the suspension plate is matched with the outer frame. The surface is formed to be non-coplanar, and the distance between the first surface of the suspension plate and the one of the resonator plates is adjusted by at least one of the joint portions. 如申請專利範圍第1項所述之微型泵,其中該共振片之該可動部設置於該中空孔周圍,且與該匯流腔室相對應的區域。The micropump according to claim 1, wherein the movable portion of the resonant piece is disposed around the hollow hole and corresponds to the confluent chamber. 如申請專利範圍第1項所述之微型泵,其中該共振片之該固定部設置於該共振片外周緣部分,而貼固於該進氣板上。The micropump according to claim 1, wherein the fixing portion of the resonator piece is disposed on an outer peripheral portion of the resonator piece and is attached to the air inlet plate. 如申請專利範圍第1項所述之微型泵,其中該填充材為一導電膠。The micropump according to claim 1, wherein the filler is a conductive paste. 如申請專利範圍第1項所述之微型泵,其中該外框設有一第一導電接腳,而該導電片設有一第二導電接腳,供以連接進行電性導通之用。The micropump according to claim 1, wherein the outer frame is provided with a first conductive pin, and the conductive piece is provided with a second conductive pin for connection for electrical conduction. 如申請專利範圍第2項所述之微型泵,其中該懸浮板之該第一表面上設有一凸部,對應到該共振片之該可動部。The micropump according to claim 2, wherein the first surface of the suspension plate is provided with a convex portion corresponding to the movable portion of the resonance piece.
TW108203213U 2019-03-15 2019-03-15 Miniature pump TWM581593U (en)

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