TWI696756B - Miniature gas transportation device - Google Patents

Abstract

A miniature gas transportation device is disclosed and comprises an inlet plate, a resonant plate, a piezoelectric actuator, an insulating plate and a conductive plate, which are stacked sequentially. The inlet plate has an inlet hole, a converging channel and a converging chamber. The resonant plate has a central hole. A chamber is defined by the piezoelectric actuator and the resonant plate, and the piezoelectric actuator comprises a suspension plate, a frame, a connecting part and a piezoelectric element, wherein the connecting part is connected between the suspension plate and the frame, and a gap is defined for gas discharging. The conductive plate has a conductive pin for electrically coupling with the piezoelectric element. By driving the piezoelectric actuator, gas is introduced by the inlet hole, flows through the converging chamber and the central hole and introduced into the chamber, and finally discharged via the gap, therefore, the gas transportation is achieved.

Description

Miniature gas delivery device

This case relates to a pneumatic power device, especially a miniature ultra-thin and silent micro gas delivery device.

At present, in all fields of medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro pumps, sprayers, inkjet heads, industrial printing devices and other products are included The fluid transport structure is its key technology, so how to break through its technical bottlenecks through innovative structure is an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the volume limitations of these traditional motors and gas valves, it is difficult for such instruments to reduce the volume of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve the purpose of being portable. In addition, the conventional motor and gas valve will also generate noise during operation, resulting in inconvenience and uncomfortable use.

Therefore, how to develop a micro gas delivery device that can maintain certain operating characteristics and flow rates under long-term use is a problem that urgently needs to be solved.

The main purpose of this case is to provide a miniature gas delivery device. The gas enters from the gas inlet of the miniature gas delivery device, and uses the action of the piezoelectric actuator to generate pressure in the designed flow channel and confluence chamber The gradient makes the gas flow at a high speed, so that the micro gas delivery device can achieve the effect of mute, and can also reduce the overall volume and thinness of the micro gas power device, and thus achieve the portable and comfortable portable purpose of the micro gas power device. .

To achieve the above purpose, one of the broader implementation aspects of this case is to provide a miniature gas delivery device, including: an air inlet plate with at least one air inlet hole, at least one busbar hole, and a busbar chamber, at least one of which At least one of the air inlet holes corresponds to at least one of the bus bar holes, at least one of the bus bar holes correspondingly communicates with the bus bar chamber, and guides the gas to flow into the bus bar chamber through at least one of the bus bar holes A resonant sheet, which is assembled and connected to the air inlet plate, has a hollow hole, a movable portion and a fixed portion, the hollow hole is located at the center of the resonant sheet, and is connected to the confluent chamber of the air inlet plate Corresponding; a piezoelectric actuator, which is assembled and combined on the resonant sheet through a filling material to form a chamber space. The piezoelectric actuator includes a suspension plate, an outer frame, at least one connecting portion, and a piezoelectric At least one gap is provided between the suspension plate and the outer frame to provide elastic support, at least one gap is provided between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element It is attached to the suspension board; an insulating sheet is bonded to one side of the piezoelectric actuator; and a conductive sheet is combined with the insulating sheet, and has a conductive inner pin integrally stamped out by the conductive A conductive position extends inwards on either side of the sheet for contacting, positioning and connecting with the surface of the piezoelectric element; wherein, when the piezoelectric actuator is driven, the gas flows from at least one of the inlet plates The air inlet hole is introduced, collected into the confluence chamber through at least one of the bus bar holes, and then introduced into the chamber space through the hollow hole of the resonant sheet, and then the gas is transmitted through resonance action of the piezoelectric actuator.

The embodiments embodying the characteristics and advantages of the present case will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different forms, and they all do not deviate from the scope of this case, and the descriptions and illustrations therein are essentially used for explanation, not for limiting the case.

Please refer to FIG. 1, FIG. 2A, FIG. 2B and FIG. 3A, the micro gas delivery device 1 in this case includes a gas inlet plate 11, a resonance plate 12, and a piezoelectric actuator which are sequentially stacked 13. An insulating sheet 14 and a conductive sheet 15 are assembled.

The air inlet plate 11 has at least one air inlet hole 11a, at least one busbar hole 11b, and a busbar chamber 11c. The number of the air inlet holes 11a and the busbar hole 11b are the same. In this embodiment, the air inlet holes The number 11a and the bus bar holes 11b are exemplified by the number of four, which is not limited to this; the four intake holes 11a respectively penetrate the four bus bar holes 11b, and the four bus bar holes 11b converge to the bus chamber 11c.

The above-mentioned resonance plate 12 can be assembled on the air intake plate 11 through a bonding method, and the resonance plate 12 has a hollow hole 12a, a movable portion 12b and a fixed portion 12c, and the hollow hole 12a is located in the center of the resonance plate 12 And corresponds to the confluence chamber 11c of the air intake plate 11, and the area provided around the hollow hole 12a and opposed to the confluence chamber 11c is the movable portion 12b, which is provided at the outer peripheral portion of the resonance sheet 12 and fixed On the air intake plate 11 is a fixed portion 12c.

The above piezoelectric actuator 13 includes a floating plate 13a, an outer frame 13b, at least one connecting portion 13c, a piezoelectric element 13d, at least one gap 13e and a convex portion 13f; wherein, the floating plate 13a is a square The suspension board has a first surface 131a and a second surface 132a opposite to the first surface 131a. The outer frame 13b surrounds the periphery of the suspension board 13a, and the outer frame 13b has a set of matching surfaces 131b and a lower surface 132b, and penetrates At least one connecting portion 13c is connected between the suspension plate 13a and the outer frame 13b to provide elastically supporting force of the suspension plate 13a, wherein the first surface 131a of the suspension plate 13a and the mating surface 131b of the outer frame 13b form a common The flat surface and the second surface 132a of the suspension plate 13a and the lower surface 132b of the outer frame 13b form a coplanar plane, and the gap 13e is a gap between the suspension plate 13a, the outer frame 13b and the connecting portion 13c for the gas to pass through . In addition, the first surface 131a of the floating plate 13a has a convex portion 13f. In this embodiment, the peripheral edge of the convex portion 13f and the connection portion adjacent to the connecting portion 13c are recessed by an etching process to make the floating plate 13a The convex portion surface 131f of the convex portion 13f is higher than the first surface 131a, forming a stepped structure. In addition, the outer frame 13b is disposed around the outer side of the suspension plate 13a, and has a conductive pin 133b protruding outward for power connection, but not limited to this.

The above-mentioned resonance plate 12 and the piezoelectric actuator 13 are stacked and assembled with each other through a filling material g to form a cavity space 16 between them, and the filling material g may be a conductive adhesive, but not limited to this , So that the depth of the distance h can be maintained between the resonance plate 12 and the convex surface 131f of the convex portion 13f of the piezoelectric actuator 13, and the air flow can be guided to flow more quickly, and the convex portion 13f of the floating plate 13a Maintain an appropriate distance from the resonant plate 12 to reduce contact interference and reduce noise generation; in other embodiments, as shown in FIG. 3B, the resonant plate 12 and the piezoelectric actuator 13 are filled through a The materials g are stacked and assembled with each other to form a chamber space 16 between them, and the suspension plate 13a can also be formed by pressing to make it concave downward, and the depression distance can be formed by the at least one connecting portion 13c on the suspension plate 13a and The outer frame 13b is adjusted so that both the convex surface 131f of the convex portion 13f on the floating plate 13a and the mating surface 131b of the outer frame 13b form a non-coplanar surface, that is, the convex surface 13f of the convex portion 13f will The assembly surface 131b is lower than the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, and the piezoelectric element 13d is attached to the second surface 132a of the suspension plate 13a and the convex portion 13f is oppositely arranged. After the driving voltage is applied to the piezoelectric element 13d, it deforms due to the piezoelectric effect, which in turn drives the suspension plate 13a to vibrate; a small amount of filler g is coated on the assembly surface 131b of the outer frame 13b to apply heat pressure In this way, the piezoelectric actuator 13 is attached to the fixed portion 12c of the resonant sheet 12, so that the piezoelectric actuator 13 can be combined with the resonant sheet 12 in combination. The distance h formed between the first surface 131a of the suspension plate 13a and the resonance plate 12 will affect the transmission effect of the micro gas delivery device 1. Therefore, maintaining a fixed distance h provides stable transmission efficiency for the micro gas delivery device 1. It is very important that the micro gas delivery device 1 of this case uses a stamping method for the piezoelectric actuator 13 to recess the suspension plate 13a downwards, so that both the first surface 131a of the suspension plate 13a and the mating surface 131b of the outer frame 13b are Non-coplanar, that is, the first surface 131a of the suspension plate 13a will be lower than the mating surface 131b of the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, so that the piezoelectric actuation The suspension plate 13a of the actuator 13 is recessed to form a space so as to form an adjustable distance h with the resonance plate 12, and the suspension plate 13a of the piezoelectric actuator 13 is directly formed by forming a recess to form a spacing h. In the future, the required spacing h can be achieved by adjusting the forming distance of the suspension plate 13a of the piezoelectric actuator 13, which effectively simplifies the structural design of adjusting the spacing h, and at the same time achieves the advantages of simplifying the process and shortening the process time.

The above-mentioned insulating sheet 14 and the conductive sheet 15 are both frame-shaped thin sheets, which are stacked and joined to one side of the piezoelectric actuator 13 in sequence. In this embodiment, the insulating sheet 14 is attached to the lower surface 132 b of the outer frame 13 b of the piezoelectric actuator 13, and the conductive sheets 15 are stacked on the insulating sheet 14. And its form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheet 14 is composed of an insulative material, such as plastic, but not limited to this, for insulation purposes; in other embodiments, the conductive sheet 15 is made of conductive Material, such as metal, but not limited to this, for electrical conduction. And, in this embodiment, a conductive pin 151a may also be provided on the conductive sheet 15 for electrical conduction. The piezoelectric element 13d of the piezoelectric actuator 13 drives two electrodes (not shown). The conventional method is nothing more than the use of a conductive wire, which is fixed on the piezoelectric element 13d by soldering to achieve derivation The connection of the electrodes has an electrical effect, but because the electrodes on the piezoelectric element 13d need to be led out, fixtures are needed to fix them, and different alignments are required according to different processes. These greatly cause assembly complexity. To solve this problem, In this case, the conductive sheet 15 is used to provide a conductive inner pin 151b as one of the two electrodes for driving the piezoelectric element 13d. In order to overcome the above-mentioned method of leading the electrode out of the wire, the conductive inner pin 151b is stamped out of the conductive sheet 15 , And the conductive inner pin 151b can extend a conductive position inwardly on either side of the outer frame of the conductive sheet 15, and can be any shape for external connection of the electrode, the conductive inner pin 151b is in the outer frame of the conductive sheet 15 An extension 1511b is bent inward on either side. In this embodiment, the conductive inner pin 151b has a length of 2.0 mm to 6.5 mm and a width of 0.1 mm to 1 mm, and the extension 1511b has an inward bending angle θ of 15 Degree, the bending height H is 1mm, and the extension portion 1511b has a bifurcation portion 1512b, and the bifurcation portion 1512b maintains a bending height H with the outer frame of the conductive sheet 15, the optimal height of the bending height H is the piezoelectric element The thickness of 13d maintains the height of the fit to achieve a good contact effect. In this embodiment, the bending height H is 1mm, so that the branch portion 1512b can adhere to the surface of the piezoelectric element 13d, and the middle of the branch portion 1512b The spacing distance P is 0.1 mm to 0.5 mm, so that the intermediate spacing distance P of the branch portion 1512b is fixed to the surface bonding medium of the piezoelectric element 13d through alloy melting, conductive glue, conductive ink, and conductive resin, etc., to achieve better Then the effect.

Please continue to refer to FIGS. 5A to 5C for the schematic diagram of the operation of the micro gas delivery device 1 shown in FIG. 3A. Please refer to FIG. 5A first. After the driving voltage is applied to the piezoelectric element 13d of the piezoelectric actuator 13, Due to the deformation, the suspension plate 13a is displaced downward, and at the same time, the resonance plate 12 is synchronously displaced downward due to the resonance principle. At this time, the volume of the chamber space 16 is increased, and a negative pressure is formed in the chamber space 16. The external gas of the micro gas delivery device 1 is drawn through the air inlet hole 11a, enters the confluence chamber 11c through the busbar hole 11b, and enters the chamber space 16 through the hollow hole 12a; please refer to FIG. 5B again The element 13d drives the suspension plate 13a to move upward, compressing the chamber space 16, forcing the gas in the chamber space 16 to pass downward through the gap 13e, to achieve the effect of transmitting gas, and the resonance plate 12 is also displaced upward by the suspension plate 13a due to resonance , Synchronously push the gas in the confluence chamber 11c to move toward the chamber space 16, so that the movable portion 12b of the resonance plate 12 is displaced upwards, so that the gas cannot be drawn through the air inlet hole 11a temporarily; finally refer to FIG. 5C, when the suspension plate 13a is driven downwards again, and when the suspension plate 13a is restored to stay in a horizontal position, the movable part 12b of the resonance plate 12 is also driven and displaced downward at the same time, the resonance plate 12 will compress the gas in the chamber space 16 Move to the gap 13e, and increase the volume in the confluence chamber 11c, so that the gas can continue to converge in the confluence chamber 11c through the air inlet hole 11a, the bus bar hole 11b; in this way, by continuously repeating the above 5A to The operation of FIG. 5C enables the micro gas delivery device 1 to continuously enter the gas from the air inlet hole 11a, and then transfer it downward through the gap 13e to continuously draw gas, that is, the transmission gas constituting the micro gas delivery device 1 implementing the present invention. Operation.

In summary, the micro gas delivery device provided in this case mainly enters the gas through the gas inlet of the micro gas delivery device, and uses the action of the piezoelectric actuator to make the gas flow channel and confluence after the design A pressure gradient is generated in the chamber, and the gas flows at a high speed, so that the structure of the micro gas delivery device can achieve the effect of mute, and the overall volume of the micro gas power device can be reduced and thinned, so that the micro gas power device can achieve lightness and comfort It is portable and can be widely used in medical equipment and related equipment.

Even if the case has been described in detail by the above-mentioned embodiments and can be modified by any person skilled in the art as a craftsman, it does not detract from the protection of the patent application.

1: Micro gas delivery device

11: Air intake plate

11a: Air inlet

11b: busbar hole

11c: Confluence chamber

12: Resonance film

12a: Hollow hole

12b: movable part

12c: fixed part

13: Piezo actuator

13a: Suspended board

131a: first surface

132a: second surface

13b: Outer frame

131b: mating surface

132b: lower surface

133b: conductive pin

13c: Connection

13d: Piezo element

13e: clearance

13f: convex part

131f: convex surface

14: Insulation sheet

15: conductive sheet

151a: conductive pin

151b: conductive inner pin

1511b: Extension

1512b: Bifurcation

16: chamber space

g: filler

h: spacing

θ: bending angle

H: bending height

P: intermediate separation distance

Figure 1 is a schematic view of the three-dimensional appearance of the micro gas delivery device in this case. Figure 2A is an exploded schematic view of the front view of the micro gas delivery device of the present case. Figure 2B is an exploded schematic view of the micro gas delivery device of this case viewed from the back side. Figure 3A is a schematic cross-sectional view of the micro gas delivery device of the present case. Figure 3B is a schematic cross-sectional view of another preferred embodiment of the micro gas delivery device of the present invention. Figure 4 is an enlarged partial schematic view of the conductive inner pins of the micro gas delivery device of this case. Figures 5A to 5C are schematic diagrams of the implementation of the micro gas delivery device in Figure 3A.

1: Micro gas delivery device

11: Air intake plate

12: Resonance film

13: Piezo actuator

133b: conductive pin

13a: Suspended board

13c: Connection

13d: Piezo element

13e: clearance

14: Insulation sheet

15: conductive sheet

151a: conductive pin

151b: conductive inner pin

1511b: Extension

1512b: Bifurcation

Claims (16)

A miniature gas delivery device includes: an air inlet plate having at least one air inlet hole, at least one busbar hole and a confluent chamber, wherein at least one of the air inlet holes is for introducing gas, and at least one of the air inlet holes corresponds to at least One of the busbar holes, at least one of the busbar holes correspondingly communicates with the busbar chamber, and guides the gas to converge into the busbar chamber through at least one of the air inlet holes; a resonant sheet, which is assembled and connected to the air inlet plate, It has a hollow hole, a movable part and a fixed part. The hollow hole is located at the center of the resonance plate and corresponds to the confluence chamber of the air inlet plate; a piezoelectric actuator is assembled through a filling material Combined with the resonant sheet to form a chamber space, the piezoelectric actuator includes a suspension plate, an outer frame, at least one connection portion, a piezoelectric element and at least one gap, at least one of the connection portion is connected to the suspension Provides elastic support between the plate and the outer frame, at least one of the gaps is provided between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to the suspension plate; an insulating sheet is combined with the pressure One side of the electric actuator; and a conductive sheet, combined with the insulating sheet, has a conductive inner pin integrally stamped out, the conductive inner pin is bent inward on either side of the conductive sheet The bending angle and a bending height constitute an extension portion, the extension portion has a bifurcation portion, the bifurcation portion and the conductive sheet maintain the height of the bending height, and the bending height and the thickness of the piezoelectric element are maintained The height of the bonding makes the bifurcation part adhere to the surface of the piezoelectric element, and the bifurcation part is combined with the piezoelectric element through a surface bonding medium and then positioned; wherein, when the piezoelectric actuator is driven , So that the gas is introduced from at least one of the air inlet holes of the air inlet plate, is collected into the confluence chamber through at least one of the bus bar holes, and then flows into the cavity space through the hollow hole of the resonant sheet, and then The piezoelectric actuator transmits gas in resonance. The miniature gas delivery device as described in item 1 of the patent application scope, wherein the length of the conductive inner pin is between 2.0 mm and 6.5 mm. The micro gas delivery device as described in item 1 of the patent application scope, wherein the width of the conductive inner pin is 0.1 mm to 1 mm. The micro gas delivery device as described in item 1 of the patent application scope, wherein the bending angle is 15 degrees. The micro gas delivery device as described in item 1 of the patent application scope, wherein the bending height is 1 mm. The micro gas delivery device as described in item 1 of the patent application range, wherein the branching portion has an intermediate separation distance, and the intermediate separation distance penetrates the surface bonding medium to allow the branching portion to be combined with the piezoelectric element. The miniature gas delivery device as described in item 6 of the patent application range, wherein the intermediate separation distance of the branching portion is between 0.1 mm and 0.5 mm. The micro gas delivery device as described in item 1 of the patent application range, wherein the surface bonding medium is one of alloy melting, conductive glue, conductive ink, or conductive resin. The micro gas delivery device as described in item 1 of the patent application range, wherein the suspension plate of the piezoelectric actuator includes a first surface and a second surface, the second surface is opposite to the first surface, and the pressure The electrical component is attached to the second surface of the suspension plate, and the outer frame of the piezoelectric actuator has a set of matching surfaces and a lower surface. The micro gas delivery device as described in item 9 of the patent application scope, wherein both the first surface of the suspension plate and the mating surface of the outer frame form a coplanar surface. The miniature gas delivery device as described in item 9 of the patent application scope, wherein at least one of the connecting portions is stamped and formed between the suspension plate and the outer frame, and the first surface of the suspension plate and the outer frame The mating surface is formed to be non-coplanar, and the distance between the first surface of the suspension plate and the resonant plate can be adjusted by at least one of the connecting portions by stamping. The miniature gas delivery device as described in item 1 of the patent application scope, wherein the movable portion of the resonant sheet is disposed around the hollow hole and opposite to the confluence chamber. The miniature gas delivery device described in item 1 of the patent application scope, wherein the fixing portion of the resonant sheet is provided on the outer peripheral portion of the resonant sheet and is fixed to the air inlet plate. The micro gas delivery device as described in item 1 of the patent scope, wherein the filler is a conductive glue. The micro gas delivery device as described in item 1 of the patent application scope, wherein the outer frame is provided with a conductive pin, and the conductive sheet is provided with a conductive pin for connection for electrical conduction. The miniature gas delivery device as described in item 9 of the patent application scope, wherein the first surface of the suspension plate is provided with a convex portion corresponding to the movable portion of the resonance plate.

Images