TWM560698U - Rod placement structure and substrate carrier applying the rod placement structure - Google Patents

Abstract

A placement rod structure and a substrate carrier using the placement rod structure, the placement rod comprising: a rod body and a plurality of dividing teeth. The dividing teeth are disposed on the rod body and are arranged along the axial direction of the parallel rod body, and each of the dividing teeth includes a root portion, a top portion and a tooth side surface. The root portion is directly connected to the rod body; the top portion is located away from one end of the rod body, and the width in the axial direction of the parallel rod body is greater than the width of the root portion in the axial direction of the parallel rod body; the tooth side is located at the root portion and the top portion between. Through the implementation of the present invention, the separation teeth can be in point-to-point contact with the substrate, and the substrate carrier using the placement rod structure has a good drainage effect; and the substrate and the separation teeth can not be seriously collided. In addition, the production quality and yield of the substrate can be effectively improved.

Description

Positioning rod structure and substrate carrier using the same

The present invention relates to the technical field of substrate placement, in particular to a placement rod structure which can be in point contact with a substrate to reduce liquid residue, and which can stably support the substrate and avoid collision, and a substrate carrier using the placement rod structure. .

In the common semiconductor or solar cell manufacturing process, the substrate must be placed on a cleaning rack before the subsequent related wet process. For example, in a typical solar cell process, a carrier is used to carry a solar cell substrate, and then the carrier is used to clamp or hang the carrier to perform acid-base etching, cleaning, and cleaning of the solar cell substrate carried in the carrier. Dry and other steps.

However, the structure of the conventional carrier is likely to cause the etching or cleaning liquid to remain in the gap between the substrate and the carrier, causing the area of the pin mark or invalid region to be too large to cause the product defect rate to be too high. Although some companies have adopted a toothed separation/support structure in their substrate carriers to reduce the area of contact or gap between the carrier and the substrate. However, since the spacing between adjacent toothed partitions in the conventional carrier is gradually widened from the edge of the carrier toward the center of the carrier; the size of the substrate must be smaller than the edge spacing of the substrate carrier, and still exist. mistaken difference. Therefore, as shown in FIG. 7, the edge of the substrate 3 accommodated in the conventional substrate carrier is usually at a distance from the toothed partition structure 41 on both sides, and the size of the substrate 3 is inaccurate, so the size is increased. The smaller substrate 3 has a larger distance or gap between the edge and the toothed partition 41. As a result, during the hanging or moving process, the substrate 3 is liable to sway and collide with the toothed partition structure 41 of the substrate carrier and is damaged.

Therefore, how to solve the problems caused by the above-mentioned conventional substrate carrier and the placement rod used therein has become an object of the research and development team of the present case.

In view of this, the present invention provides a placement rod structure comprising: a rod body and a plurality of dividing teeth. The dividing teeth include a root portion, a top portion, and a tooth side surface. The root portion is directly connected to the rod body; the top portion is located away from one end of the rod body, and the width of the top portion in the axial direction of the parallel rod body is greater than the width of the root portion in the direction parallel to the axis of the rod body; The side is located between the root and the top.

Preferably, each of the dividing teeth has two flank sides, and the edges of the two teeth sides away from one end of the rod body are joined to form the top portion, and the top portion is blade-shaped.

Preferably, each of the dividing teeth further comprises a two-toothed end surface, each of the tooth end faces being located between the top portion, the two tooth flanks and the rod body.

Preferably, each of the tooth flanks of each of the partitioning teeth has a plane or a curved surface which is wide and narrow.

Preferably, wherein the root of each of the dividing teeth is parallel The width in the diameter direction of the rod is smaller than the diameter of the rod.

Preferably, the width of the root of each of the dividing teeth in the diameter direction parallel to the rod is equal to the diameter of the rod.

The present invention also provides a substrate carrier, the substrate carrier comprising: two side plates; at least one side rod body, two ends of each side rod body are respectively connected to the outer edge of the two side plates; and at least one bottom rod The two ends of the bottom rod body are respectively connected to the lower edge of the two side plates; wherein the side plates, the side bar body and the bottom bar body together form a receiving space, and the side bar body comprises a rod body And a plurality of partitioning teeth disposed on the rod body and spaced along the axis direction of the rod body and protruding from the surface of the rod body toward the receiving space, each of the dividing teeth comprising: a root portion directly connected to the rod body; a top portion located at one end of the partitioning tooth away from the rod body, and the width of the top portion parallel to the axis of the rod body is greater than the root portion of the rod is parallel a width in the axial direction of the rod; and a tooth side disposed between the root portion and the top portion.

Preferably, the bottom rod body comprises a rod body and a plurality of dividing teeth disposed on the rod body and spaced along the axis direction of the rod body and facing from the rod body surface a space protrusion, each of the dividing teeth comprising a root portion directly connected to the rod body; a top portion located at an end of the separating tooth away from the rod body, and the top portion is parallel to the shaft center of the rod body The width in the direction is greater than the width of the root portion in the direction parallel to the axis of the shaft; and a tooth side is located between the root portion and the top portion.

Preferably, the side edges of the substrate carrier are respectively There is a notch.

Preferably, the substrate carrier further comprises at least one pressing rod body, wherein the two ends of the pressing rod body are removably coupled to the notch.

Preferably, the pressing rod body comprises: a rod body and a plurality of dividing teeth disposed on the rod body and spaced along the axial direction of the rod body and facing from the rod body surface The receiving space is convex, each of the dividing teeth comprises a root portion directly connected to the rod body; a top portion is located at one end of the separating tooth away from the rod body, and the top portion is parallel to the rod body shaft The width in the direction of the core is greater than the width of the root portion in the direction parallel to the axis of the shaft; and a side of the tooth is located between the root portion and the top portion.

Through the implementation of the present invention, the separation teeth can be in point-to-point contact with the substrate, and the substrate carrier using the placement rod structure has good drainage effect; and the substrate and the separation teeth can not be seriously collided. In addition, the production quality and yield of the substrate can be effectively improved.

1‧‧‧ rod body

10‧‧‧Separated teeth

101‧‧‧ tooth root

102‧‧‧ teeth side

103‧‧‧ top

104‧‧‧ tooth end face

2‧‧‧Substrate carrier

21‧‧‧ side panels

11‧‧‧ Side body

12‧‧‧Bottom body

13‧‧‧Press body

22‧‧‧ accommodating space

221‧‧‧ notch

3‧‧‧Substrate

41‧‧‧ toothed separation structure

D‧‧‧diameter

W _a1 , W _a2 ‧ ‧ width

W _d ‧‧‧ radial width

1A to 1D. Fig. 1 is a view showing a first embodiment of the placement rod structure of the present invention.

2A to 2D. Fig. 2 is a view showing a second embodiment of the placement rod structure of the present invention.

3A to 3D are diagrams showing a third embodiment of the placement rod structure of the present invention.

4A to 4D are diagrams showing a fourth embodiment of the placement rod structure of the present invention.

Fig. 5 is a schematic view showing the relative position of the placement rod structure and the substrate of the present invention.

Fig. 6A is a perspective view showing an embodiment of the substrate carrier of the present invention.

Fig. 6B is an enlarged view of the circle in Fig. 6A.

Figure 7 is a schematic view showing the relative position of the substrate carrier placement rod and the substrate.

In order to facilitate the further introduction and disclosure of the purpose, structural composition, application function features and functions of the present creation, the embodiments are described in conjunction with the drawings, which are described in detail as follows: The present invention provides a placement rod structure and application of the placement. A substrate carrier for the rod structure. As shown in FIGS. 1A to 4D, the placement rod includes: a rod body 1, and a plurality of division teeth 10. The spacer teeth 10 are disposed on the rod body 1 and are arranged at intervals along the axial direction of the rod body 1.

Each of the dividing teeth 10 includes a tooth root portion 101, a top portion 103, and a tooth side surface 102. The root portion 101 is directly attached to the rod body 1 to be coupled to the rod body 1 and supports the upper structure of the partitioning teeth 10.

The top portion 103 is located away from one end of the rod body 1 and opposed to the root portion 101. And the top 103 in the width W _a1 line parallel to the axial direction of the shaft 1 is greater than the width W _a2 tooth root portion 101 in the axial direction parallel to the shaft 1, and therefore observation of the partition in the radial direction of the rod member When the teeth 10 are on the side, each of the partitioning teeth 10 has a shape in which the tip end is wide and the root portion is narrow.

There is at least one flank 102 between the root portion 101 of each of the dividing teeth 10 and the top portion 103. The flank 102 can be a curved surface or a flat surface. For example, when the partitioning tooth 10 is a cylindrical or elliptical columnar structure with a thick upper and lower thinner, Its flank 102 is a continuous curved surface between the root 101 and the top 103. The embodiments shown in Figs. 1A to 4D are exemplified by several modeling structures in which each of the partitioning teeth 10 has two flank faces 102.

In a preferred embodiment, the partitioning teeth 10 have two flat or curved flanks 102 that are wide and narrow, and the two flanks 120 are joined away from the edge of one end of the rod 1 to form the top portion 103. The top portion 103 is in the shape of a blade.

Referring also to FIG. 5, since 103 W _a2 was larger than the root width of the teeth 101 on the body 1 in the axial direction parallel to the rod-like top of this blade width W _a1 in parallel to the axial direction of the rod body 1, so when a When the substrate 3 is placed between the adjacent two spaced apart teeth 10, there is only one point of contact between the substrate 3 and any of the dividing teeth 10.

As shown in FIGS. 1A to 2D, in two slightly different preferred embodiments, each of the spaced apart teeth 10 further has a tooth end face 104 at each end. Each of the tooth end faces 104 is a plane or curved surface surrounded by the top portion 103, the two tooth flanks 102, and the rod body 1. Thus, an axe-shaped partitioning tooth 10 is formed.

As shown in FIGS. 3A to 4D, in the other two preferred embodiments, the two ends of each of the partitioning teeth 10 each have two tooth end faces 104. Each of the tooth end faces 104 is also a flat or curved surface formed between the top portion 103, the two tooth side faces 102 and the rod body 1. Both sides of each tooth end surface 104 are in contact with one tooth side surface 102 and the rod body 1, and the remaining one side is in contact with the adjacent other tooth end surface 104.

Such a structure allows the substrate 3 to enter the space between the adjacent two spaced apart teeth 10 even if the position slightly deviates from the two adjacent spaced apart teeth 10 The center can still be properly slid in via the tooth end face 104 having a skew angle with respect to its entry direction, thereby reducing the difficulty in operation and avoiding the occurrence of a collision between the substrate 3 and the flank 102.

As shown in FIG. 1D and FIG. 3D, when the partitioning tooth 10 has two planar flank 102 having an upper width and a lower width, the radial width W _{d of the} root portion 101 in the diameter D direction of the parallel rod body 1 That is, the distance between the two-toothed side 102 and the rod 1 is smaller than the diameter D of the rod 1. Such a design allows the partitioning teeth 10 to have a small volume, thereby reducing the overall weight of the placing rod and saving the manufactured material.

As shown in FIG. 2D and FIG. 4D, when the two flank surfaces 102 of the partitioning teeth 10 are curved in the shape of the upper width and the lower portion and projecting toward the outer side of the partitioning teeth 10, the root portion 101 is parallel to the rod body 1 in diameter D. the radial width W _d direction, i.e. two teeth face 102 in contact with the pitch at the rod body 1 may be equal to the diameter D of the body of the shaft 1.

Such a design allows the flank 102 of the partitioning tooth 10 to form a continuous smooth surface with the circumference of the shaft 1, thereby improving drainage, so that the entire placement rod is less prone to residual process liquid after the wet process. It is also possible to increase the joint area of the root portion 101 of the partitioning tooth 10 with the rod body 1, thereby making the partitioning teeth 10 more securely fixed on the rod body 1.

The embodiment shown in Fig. 6A is an embodiment of the substrate carrier 2 of the present invention. The substrate carrier 2 includes two side plates 21, at least one side rod body 11, and at least one bottom rod body 12. The side plates 21, the side bars 11 and the bottom bar 12 together form a receiving space 22.

In this embodiment, each of the substrate carriers 2 is respectively disposed at two sides of the two side plates 21 adjacent to the outer edge thereof, and the two side rod bodies 11 are respectively connected between the two side plates 21. The side rod body 11 is configured by the aforementioned placement rod. Each of the side rods 11 includes a rod body 1 and a plurality of partitioning teeth 10 which are arranged in parallel with the axial direction of the rod body 1 and project from the surface of the rod body 1 toward the receiving space 22.

The partitioning teeth 10 on the four side rods 11 are correspondingly arranged so that after each of the substrates 3 enters the receiving space 22 of the substrate carrier 2, the two side edges are respectively limited to the four side rods 11 respectively. Four pairs of two adjacent two spaced apart teeth. The bottom end of each of the substrates 3 is in contact with and supported by the bottom body 12.

Since the structures of the rod body 1 and the partitioning teeth 10 of the placing rod structure used in the side rod body 11 have been described in detail above, the detailed description thereof will not be repeated here. The width W _a1 of the top portion 103 of each of the partitioning teeth 10 in the direction parallel to the axial direction of the rod body 1 is larger than the width W _a2 of the root portion 101 in the axial direction of the parallel rod body 1 so that the adjacent two spaced teeth The minimum distance between the 10 points is at the top of the position closest to the center of the cleaning rack.

Therefore, regardless of the size of the substrate 3, as long as it can be placed between the four pairs of mutually corresponding partitioning teeth 10, the range in which the left and right sides can be displaced does not shrink with the size of the substrate 3 or the edge thereof and the rod body 1 The distance between them increases and becomes larger. Therefore, the substrate 3 can be stably placed without causing a large sway during the movement of the substrate carrier 2 or even a severe impact with the separation teeth 10.

Please also refer to FIG. 6B. In a preferred embodiment, the bottom rod body 12 can also adopt the aforementioned placement rod structure. That is, each bottom body 12 is the same A plurality of partitioning teeth 10 projecting toward the receiving space 22 are also provided or formed on the rod body 1 in a direction parallel to the axis thereof in correspondence with the partitioning teeth 10 on the side rails 11. Similarly, since the structure of the placement rod and the structure and function of the separation teeth 10 included therein have been previously described, the detailed description thereof will not be repeated here.

Such a design enables each of the substrate 3 to be placed in the substrate carrier 2, and the bottom edge thereof is supported by the rod body 1 of the bottom rod body 12, and is also limited by the partitioning teeth 10 on both sides. It can be more stably accommodated in the accommodating space 22 of the substrate carrier 2. This provides a better and more stable fixing and protection effect for the substrate 3 which is now more susceptible to deformation due to the increasingly thinner thickness.

In a preferred embodiment, the upper edges of the side plates 21 of the substrate carrier 2 are respectively provided with a corresponding recess 221, and the substrate carrier 2 further includes a pressing rod body 13 at both ends of the pressing rod body 13 Removably coupled and fixed in the notches 221, respectively. After the substrate 3 is loaded into the accommodating space 22 of the substrate carrier 2, the user can combine and fix the pressure bar body 13 in the notches 221 to prevent the substrate 3 from being accidentally loaded from the substrate during the process. With 2 slides out.

In a preferred embodiment, the pressure bar body 13 can also adopt the aforementioned placement rod structure. The effect is the same as that described above for the same placement of the rod structure on the bottom body 12. The difference is only after the spacer teeth (not shown) are disposed on the pressure bar body 13, and the improvement is the limit and protection effect on the top of the substrate 3 accommodated in the accommodating space 22.

It can be seen from the above description that the placement rod structure provided by the embodiment and the substrate carrier 2 using the placement rod structure can ensure that the separation teeth 10 and the substrate 3 are maintained in point-to-point contact ( a point-to-point Contact), greatly reducing the chance of damage to the surface of the substrate 3 due to friction; and the masking area of the substrate 3 during wet processing such as wet chemical etching, cleaning, etc. by the point contact, and the application of the placement rod structure The substrate carrier 2 has a good drainage effect, and the substrate 3 can be etched and cleaned more completely and thoroughly, and the generation of defective products can be more effectively reduced. At the same time, the design of the partitioning teeth 10 of the substrate carrier 2 to which the placement rod structure is applied can also prevent serious collision between the substrate 3 and the partitioning teeth 10, thereby effectively improving the production quality and the yield.

In summary, this creation can indeed achieve the above objectives, in order to comply with the provisions of the Patent Law, and to file a patent application. However, the above is only the preferred embodiment of the present invention, and the scope of the creation of the present invention cannot be limited by this; therefore, the simple equivalent changes and modifications made by the scope of the patent application and the content of the creation specification are All should be within the scope of this creation patent.

Claims (11)

A placement rod structure comprising: a rod body; and a plurality of partitioning teeth disposed on the rod body and spaced along the axis direction of the rod body, each of the partitioning teeth comprising a root portion directly connected to the rod body; a top portion located at one end of the partitioning tooth away from the rod body, and the width of the top portion parallel to the axis of the rod body is greater than the root portion of the root portion Parallel to the width of the shaft in the axial direction; and a tooth side disposed between the root portion and the top portion. The placing rod structure of claim 1, wherein each of the dividing teeth has two sides of the tooth, and the sides of the two teeth facing away from one end of the rod body are joined to form the top portion, so that the top portion is Blade-shaped. The placing rod structure of claim 2, wherein each of the dividing teeth further comprises a two-toothed end surface, each of the tooth end faces being located between the top portion, the two tooth flanks and the rod body. The placing rod structure according to claim 2, wherein each of the tooth flanks of each of the dividing teeth has a plane or a curved surface which is wide and narrow. The placement rod structure of claim 4, wherein a width of the root portion of each of the partition teeth in a diameter direction parallel to the rod body is smaller than a diameter of the rod body. The placing rod structure according to claim 4, wherein each of the separating teeth The width of the root portion in the diameter direction parallel to the rod is equal to the diameter of the rod. A substrate carrier comprising: two side plates; at least one side rod body, each end of each side side rod body being respectively connected to the outer edge of the two side plates; and at least one bottom rod body, each of the bottom rod bodies The two ends are respectively connected to the lower edge of the two side plates; wherein the side plates, the side bar body and the bottom bar body together form a receiving space, and the side bar body comprises a rod body and a plurality of dividing teeth, and the same The partitioning teeth are disposed on the rod body and are arranged at intervals along the axial direction of the rod body and protrude from the surface of the rod body toward the receiving space. Each of the dividing teeth comprises: a root portion, which is directly connected a top portion of the partitioning tooth away from the one end of the rod body, and the width of the top portion in a direction parallel to the axis of the rod body is greater than the root portion of the root portion in a direction parallel to the axis of the rod body a width; and a toothed side located between the root of the tooth and the top. The substrate carrier of claim 7, wherein the bottom body comprises a rod body and a plurality of dividing teeth, the dividing teeth are disposed on the rod body and parallel to the rod body The axial direction is spaced apart and protrudes from the surface of the rod toward the receiving space, each of the dividing teeth includes a root portion directly connected to the rod body; a top portion is located at the separating tooth away from the rod One end of the body, and the width of the top portion in the direction parallel to the axis of the rod body is greater than the width of the root portion in the direction parallel to the axis of the rod body; and a tooth side surface located at the root portion and the top portion between. The substrate carrier of claim 7, wherein the side plate edges of the substrate carrier are respectively provided with a notch. The substrate carrier of claim 9, wherein the substrate carrier further comprises at least one pressure bar body, the two ends of the pressure bar body being removably coupled to the notch. The substrate carrier of claim 10, wherein the pressure bar body comprises: a rod body, and a plurality of dividing teeth, the dividing teeth are disposed on the rod body and spaced along an axis direction parallel to the rod body Arranging and protruding from the surface of the rod toward the receiving space, each of the dividing teeth comprising a root portion directly connected to the rod body; a top portion located at a side of the separating tooth away from the rod body And the width of the top portion in the direction parallel to the axis of the rod body is greater than the width of the root portion in the direction parallel to the axis of the rod body; and a tooth side surface between the root portion and the top portion.