TWM560698U - Rod placement structure and substrate carrier applying the rod placement structure - Google Patents
Rod placement structure and substrate carrier applying the rod placement structure Download PDFInfo
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- TWM560698U TWM560698U TW107201014U TW107201014U TWM560698U TW M560698 U TWM560698 U TW M560698U TW 107201014 U TW107201014 U TW 107201014U TW 107201014 U TW107201014 U TW 107201014U TW M560698 U TWM560698 U TW M560698U
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Abstract
一種置放桿結構及應用該置放桿結構之基板載具,該置放桿包括:桿體以及複數分隔齒。該等分隔齒係設於桿體上且沿平行桿體軸心方向間隔排列,每一分隔齒包括齒根部、頂部及齒側面。齒根部直接連設於桿體;頂部位於遠離桿體之一端,且在平行桿體軸心方向上的寬度係大於齒根部在平行桿體軸心方向上的寬度;齒側面位於齒根部與頂部之間。藉由本創作之實施,可使各分隔齒與基板間呈一點對點接觸,並使應用該置放桿結構之基板載具擁有良好的排水效果;還可使基板與分隔齒間不致發生嚴重碰撞,進而能有效提昇基板的生產品質以及良率。 A placement rod structure and a substrate carrier using the placement rod structure, the placement rod comprising: a rod body and a plurality of dividing teeth. The dividing teeth are disposed on the rod body and are arranged along the axial direction of the parallel rod body, and each of the dividing teeth includes a root portion, a top portion and a tooth side surface. The root portion is directly connected to the rod body; the top portion is located away from one end of the rod body, and the width in the axial direction of the parallel rod body is greater than the width of the root portion in the axial direction of the parallel rod body; the tooth side is located at the root portion and the top portion between. Through the implementation of the present invention, the separation teeth can be in point-to-point contact with the substrate, and the substrate carrier using the placement rod structure has a good drainage effect; and the substrate and the separation teeth can not be seriously collided. In addition, the production quality and yield of the substrate can be effectively improved.
Description
本創作係有關基板置放的技術領域,尤指一種可與基板呈點接觸狀態以減少液體殘留,又可穩固支撐基板、避免碰撞的置放桿結構及應用該置放桿結構之基板載具。 The present invention relates to the technical field of substrate placement, in particular to a placement rod structure which can be in point contact with a substrate to reduce liquid residue, and which can stably support the substrate and avoid collision, and a substrate carrier using the placement rod structure. .
常見的半導體或太陽能電池製造過程中,必須將基板先置放到一個清洗架上,再去進行後續相關的濕式製程。譬如,一般的太陽能電池製程中,會用一載具承載太陽能電池基板,再利用機械手臂夾持或吊掛該載具,以對該載具中承載之太陽能電池基板進行酸鹼蝕刻、清洗與乾燥等步驟。 In the common semiconductor or solar cell manufacturing process, the substrate must be placed on a cleaning rack before the subsequent related wet process. For example, in a typical solar cell process, a carrier is used to carry a solar cell substrate, and then the carrier is used to clamp or hang the carrier to perform acid-base etching, cleaning, and cleaning of the solar cell substrate carried in the carrier. Dry and other steps.
然而,習知載具之結構容易造成蝕刻或清洗之液體殘留於基板與載具之間的縫隙內,造成基板四周之無效區域(pin mark or invalid region)面積過大以致產品不良率過高。雖然有業者在其基板載具中改採齒狀分隔/支撐結構以縮小載具與基板間的接觸或間隙的面積。但由於習知載具中之相鄰齒狀分隔結構間的間距是由載具邊緣起向著載具中央處逐漸變寬;而基板的尺寸卻必須較基板載具之邊緣間距小,並且還存有誤 差。因此,如第7圖所示,習知的基板載具中所容置的基板3之邊緣通常都會離兩側的齒狀分隔結構41一段距離,且因基板3尺寸會有誤差,故尺寸越小的基板3,其邊緣與齒狀分隔結構41間的距離或間隙越大。致使在吊掛或移動的過程中,基板3容易產生晃動,並與基板載具的齒狀分隔結構41發生碰撞因而受損。 However, the structure of the conventional carrier is likely to cause the etching or cleaning liquid to remain in the gap between the substrate and the carrier, causing the area of the pin mark or invalid region to be too large to cause the product defect rate to be too high. Although some companies have adopted a toothed separation/support structure in their substrate carriers to reduce the area of contact or gap between the carrier and the substrate. However, since the spacing between adjacent toothed partitions in the conventional carrier is gradually widened from the edge of the carrier toward the center of the carrier; the size of the substrate must be smaller than the edge spacing of the substrate carrier, and still exist. mistaken difference. Therefore, as shown in FIG. 7, the edge of the substrate 3 accommodated in the conventional substrate carrier is usually at a distance from the toothed partition structure 41 on both sides, and the size of the substrate 3 is inaccurate, so the size is increased. The smaller substrate 3 has a larger distance or gap between the edge and the toothed partition 41. As a result, during the hanging or moving process, the substrate 3 is liable to sway and collide with the toothed partition structure 41 of the substrate carrier and is damaged.
因此,要如何解決上述習知基板載具及其所採用之置放桿所造成的問題便成為本案的研發團隊努力之課題。 Therefore, how to solve the problems caused by the above-mentioned conventional substrate carrier and the placement rod used therein has become an object of the research and development team of the present case.
有鑑於此,本創作提供一種置放桿結構,包括:桿體以及複數分隔齒。分隔齒包括齒根部、頂部及齒側面。齒根部係直接連設於桿體;頂部係位於遠離桿體之一端,且該頂部在平行桿體軸心方向上的寬度係大於該齒根部在平行該桿體軸心方向上的寬度;齒側面係位於齒根部與頂部之間。 In view of this, the present invention provides a placement rod structure comprising: a rod body and a plurality of dividing teeth. The dividing teeth include a root portion, a top portion, and a tooth side surface. The root portion is directly connected to the rod body; the top portion is located away from one end of the rod body, and the width of the top portion in the axial direction of the parallel rod body is greater than the width of the root portion in the direction parallel to the axis of the rod body; The side is located between the root and the top.
較佳實施,其中各該分隔齒具有二該齒側面,且該二齒側面遠離該桿體之一端的邊緣相接形成該頂部,而使該頂部呈刀刃狀。 Preferably, each of the dividing teeth has two flank sides, and the edges of the two teeth sides away from one end of the rod body are joined to form the top portion, and the top portion is blade-shaped.
較佳實施,其中各該分隔齒還包括二齒端面,各該齒端面係位於該頂部、兩該齒側面及該桿體之間。 Preferably, each of the dividing teeth further comprises a two-toothed end surface, each of the tooth end faces being located between the top portion, the two tooth flanks and the rod body.
較佳實施,其中各該分隔齒之各該齒側面呈上寬下窄之平面或曲面狀。 Preferably, each of the tooth flanks of each of the partitioning teeth has a plane or a curved surface which is wide and narrow.
較佳實施,其中各該分隔齒之該齒根部在平行該 桿體直徑方向上的寬度係小於該桿體的直徑。 Preferably, wherein the root of each of the dividing teeth is parallel The width in the diameter direction of the rod is smaller than the diameter of the rod.
較佳實施,其中各該分隔齒之該齒根部在平行該桿體直徑方向上的寬度係等於該桿體的直徑。 Preferably, the width of the root of each of the dividing teeth in the diameter direction parallel to the rod is equal to the diameter of the rod.
本創作還提供一種基板載具,該基板載具包含有:兩側板;至少一側桿體,每一該側桿體之兩端分別連接於該兩側板鄰近外緣處;以及至少一底桿體,各該底桿體之兩端分別連接於該兩側板鄰近下緣處;其中該些側板、該側桿體以及該底桿體共同形成一收容空間,且該側桿體包括一桿體,及複數分隔齒,該等分隔齒係設於該桿體上且沿平行該桿體軸心方向間隔排列並由該桿體表面朝向該收容空間凸伸,每一該分隔齒包括有:一齒根部,其係直接連設於該桿體;一頂部,其係位於該分隔齒遠離該桿體之一端,且該頂部在平行該桿體軸心方向上的寬度係大於該齒根部在平行該桿體軸心方向上的寬度;以及一齒側面,其係位於該齒根部與該頂部之間。 The present invention also provides a substrate carrier, the substrate carrier comprising: two side plates; at least one side rod body, two ends of each side rod body are respectively connected to the outer edge of the two side plates; and at least one bottom rod The two ends of the bottom rod body are respectively connected to the lower edge of the two side plates; wherein the side plates, the side bar body and the bottom bar body together form a receiving space, and the side bar body comprises a rod body And a plurality of partitioning teeth disposed on the rod body and spaced along the axis direction of the rod body and protruding from the surface of the rod body toward the receiving space, each of the dividing teeth comprising: a root portion directly connected to the rod body; a top portion located at one end of the partitioning tooth away from the rod body, and the width of the top portion parallel to the axis of the rod body is greater than the root portion of the rod is parallel a width in the axial direction of the rod; and a tooth side disposed between the root portion and the top portion.
較佳實施,其中該底桿體包括一桿體,及複數分隔齒,該等分隔齒係設於該桿體上且沿平行該桿體軸心方向間隔排列並由該桿體表面朝向該收容空間凸伸,每一該分隔齒包括一齒根部,其係直接連設於該桿體;一頂部,其係位於該分隔齒遠離該桿體之一端,且該頂部在平行該桿體軸心方向上的寬度係大於該齒根部在平行該桿體軸心方向上的寬度;以及一齒側面,其係位於該齒根部與該頂部之間。 Preferably, the bottom rod body comprises a rod body and a plurality of dividing teeth disposed on the rod body and spaced along the axis direction of the rod body and facing from the rod body surface a space protrusion, each of the dividing teeth comprising a root portion directly connected to the rod body; a top portion located at an end of the separating tooth away from the rod body, and the top portion is parallel to the shaft center of the rod body The width in the direction is greater than the width of the root portion in the direction parallel to the axis of the shaft; and a tooth side is located between the root portion and the top portion.
較佳實施,其中該基板載具的該等側板上緣分別 設有一凹口。 Preferably, the side edges of the substrate carrier are respectively There is a notch.
較佳實施,其中該基板載具進一步包含至少一壓桿體,該壓桿體兩端分別可移除地結合於一該凹口中。 Preferably, the substrate carrier further comprises at least one pressing rod body, wherein the two ends of the pressing rod body are removably coupled to the notch.
較佳實施,其中該壓桿體包括:一桿體,及複數分隔齒,該等分隔齒係設於該桿體上且沿平行該桿體軸心方向間隔排列並由該桿體表面朝向該收容空間凸伸,每一該分隔齒包括一齒根部,其係直接連設於該桿體;一頂部,其係位於該分隔齒遠離該桿體之一端,且該頂部在平行該桿體軸心方向上的寬度係大於該齒根部在平行該桿體軸心方向上的寬度;以及一齒側面,其係位於該齒根部與該頂部之間。 Preferably, the pressing rod body comprises: a rod body and a plurality of dividing teeth disposed on the rod body and spaced along the axial direction of the rod body and facing from the rod body surface The receiving space is convex, each of the dividing teeth comprises a root portion directly connected to the rod body; a top portion is located at one end of the separating tooth away from the rod body, and the top portion is parallel to the rod body shaft The width in the direction of the core is greater than the width of the root portion in the direction parallel to the axis of the shaft; and a side of the tooth is located between the root portion and the top portion.
藉由本創作之實施,可使各該分隔齒與基板間呈一點對點接觸,並使應用該置放桿結構之基板載具擁有良好的排水效果;還可使基板與分隔齒間不致發生嚴重碰撞,進而能有效提昇基板的生產品質以及良率。 Through the implementation of the present invention, the separation teeth can be in point-to-point contact with the substrate, and the substrate carrier using the placement rod structure has good drainage effect; and the substrate and the separation teeth can not be seriously collided. In addition, the production quality and yield of the substrate can be effectively improved.
1‧‧‧桿體 1‧‧‧ rod body
10‧‧‧分隔齒 10‧‧‧Separated teeth
101‧‧‧齒根部 101‧‧‧ tooth root
102‧‧‧齒側面 102‧‧‧ teeth side
103‧‧‧頂部 103‧‧‧ top
104‧‧‧齒端面 104‧‧‧ tooth end face
2‧‧‧基板載具 2‧‧‧Substrate carrier
21‧‧‧側板 21‧‧‧ side panels
11‧‧‧側桿體 11‧‧‧ Side body
12‧‧‧底桿體 12‧‧‧Bottom body
13‧‧‧壓桿體 13‧‧‧Press body
22‧‧‧收容空間 22‧‧‧ accommodating space
221‧‧‧凹口 221‧‧‧ notch
3‧‧‧基板 3‧‧‧Substrate
41‧‧‧齒狀分隔結構 41‧‧‧ toothed separation structure
D‧‧‧直徑 D‧‧‧diameter
Wa1、Wa2‧‧‧寬度 W a1 , W a2 ‧ ‧ width
Wd‧‧‧徑向寬度 W d ‧‧‧ radial width
第1A圖~第1D圖 本創作之置放桿結構第一實施例圖。 1A to 1D. Fig. 1 is a view showing a first embodiment of the placement rod structure of the present invention.
第2A圖~第2D圖 本創作之置放桿結構第二實施例圖。 2A to 2D. Fig. 2 is a view showing a second embodiment of the placement rod structure of the present invention.
第3A圖~第3D圖 本創作之置放桿結構第三實施例圖。 3A to 3D are diagrams showing a third embodiment of the placement rod structure of the present invention.
第4A圖~第4D圖 本創作之置放桿結構第四實施例圖。 4A to 4D are diagrams showing a fourth embodiment of the placement rod structure of the present invention.
第5圖 本創作之置放桿結構與基板的相對位置示意圖。 Fig. 5 is a schematic view showing the relative position of the placement rod structure and the substrate of the present invention.
第6A圖 本創作之基板載具的實施例立體圖。 Fig. 6A is a perspective view showing an embodiment of the substrate carrier of the present invention.
第6B圖 第6A圖中圈示處的放大圖。 Fig. 6B is an enlarged view of the circle in Fig. 6A.
第7圖 習知基板載具置放桿與基板的相對位置示意圖。 Figure 7 is a schematic view showing the relative position of the substrate carrier placement rod and the substrate.
為方便對本創作之目的、結構組成、應用功能特徵及其功效,做更進一步之介紹與揭露,茲舉實施例配合圖式,詳細說明如下:本創作提供一種置放桿結構及應用該置放桿結構之基板載具。如第1A圖~第4D圖所示,該置放桿包括:一桿體1,以及複數分隔齒10。該等分隔齒10係設於該桿體1上且沿平行該桿體1軸心方向間隔排列。 In order to facilitate the further introduction and disclosure of the purpose, structural composition, application function features and functions of the present creation, the embodiments are described in conjunction with the drawings, which are described in detail as follows: The present invention provides a placement rod structure and application of the placement. A substrate carrier for the rod structure. As shown in FIGS. 1A to 4D, the placement rod includes: a rod body 1, and a plurality of division teeth 10. The spacer teeth 10 are disposed on the rod body 1 and are arranged at intervals along the axial direction of the rod body 1.
每一分隔齒10包括有:一齒根部101、一頂部103及一齒側面102。齒根部101係直接連設於桿體1上,以與桿體1連接,並支撐分隔齒10的上部結構。 Each of the dividing teeth 10 includes a tooth root portion 101, a top portion 103, and a tooth side surface 102. The root portion 101 is directly attached to the rod body 1 to be coupled to the rod body 1 and supports the upper structure of the partitioning teeth 10.
頂部103係位於遠離桿體1之一端而與齒根部101相對。且頂部103在平行於桿體1軸心方向上的寬度Wa1係大於齒根部101在平行桿體1軸心方向上的寬度Wa2,故而沿著該桿體1之徑向方向觀察該分隔齒10側面時,各該分隔齒10是呈現一頂端寬大、根部細窄的造型結構。 The top portion 103 is located away from one end of the rod body 1 and opposed to the root portion 101. And the top 103 in the width W a1 line parallel to the axial direction of the shaft 1 is greater than the width W a2 tooth root portion 101 in the axial direction parallel to the shaft 1, and therefore observation of the partition in the radial direction of the rod member When the teeth 10 are on the side, each of the partitioning teeth 10 has a shape in which the tip end is wide and the root portion is narrow.
每一個分隔齒10的齒根部101與頂部103之間具有至少一個齒側面102。齒側面102可以是一曲面或一平面。舉例來說:當分隔齒10為一上粗下細的圓柱狀或橢圓柱狀結構時, 其齒側面102就是位於齒根部101與頂部103之間的一個連續曲面。而第1A圖至第4D圖所示之各實施例,則是以每一分隔齒10具有兩個齒側面102的幾種造型結構作為範例的。 There is at least one flank 102 between the root portion 101 of each of the dividing teeth 10 and the top portion 103. The flank 102 can be a curved surface or a flat surface. For example, when the partitioning tooth 10 is a cylindrical or elliptical columnar structure with a thick upper and lower thinner, Its flank 102 is a continuous curved surface between the root 101 and the top 103. The embodiments shown in Figs. 1A to 4D are exemplified by several modeling structures in which each of the partitioning teeth 10 has two flank faces 102.
在一較佳實施中,分隔齒10具有兩個呈上寬下窄之平面或曲面狀之齒側面102,且該二齒側面102遠離該桿體1之一端的邊緣相接形成該頂部103,而使該頂部103呈刀刃狀。 In a preferred embodiment, the partitioning teeth 10 have two flat or curved flanks 102 that are wide and narrow, and the two flanks 120 are joined away from the edge of one end of the rod 1 to form the top portion 103. The top portion 103 is in the shape of a blade.
請同時參閱第5圖,由於此刀刃狀的頂部103在平行於桿體1軸心方向上的寬度Wa1較齒根部101在平行桿體1軸心方向上的寬度Wa2大,因此當一基板3被放置於相鄰的兩個分隔齒10之間時,基板3與其中任一分隔齒10之間只會有一個接觸點。 Referring also to FIG. 5, since 103 W a2 was larger than the root width of the teeth 101 on the body 1 in the axial direction parallel to the rod-like top of this blade width W a1 in parallel to the axial direction of the rod body 1, so when a When the substrate 3 is placed between the adjacent two spaced apart teeth 10, there is only one point of contact between the substrate 3 and any of the dividing teeth 10.
如第1A圖至第2D圖所示,在兩種略有不同的較佳實施中,各該分隔齒10的兩端進一步各具有一個齒端面104。每一齒端面104都是一個由頂部103、兩個齒側面102及桿體1圍繞而成的平面或曲面。如此而構成一斧頭狀的分隔齒10。 As shown in FIGS. 1A to 2D, in two slightly different preferred embodiments, each of the spaced apart teeth 10 further has a tooth end face 104 at each end. Each of the tooth end faces 104 is a plane or curved surface surrounded by the top portion 103, the two tooth flanks 102, and the rod body 1. Thus, an axe-shaped partitioning tooth 10 is formed.
如第3A圖至第4D圖所示,在另兩種較佳實施中,各該分隔齒10的兩端分別各具有兩個齒端面104。每一齒端面104同樣也都是一個位於頂部103、兩齒側面102及桿體1之間而成的平面或曲面。各齒端面104的兩邊分別與一齒側面102及與桿體1相接,剩餘的一邊則與相鄰的另一齒端面104相接。 As shown in FIGS. 3A to 4D, in the other two preferred embodiments, the two ends of each of the partitioning teeth 10 each have two tooth end faces 104. Each of the tooth end faces 104 is also a flat or curved surface formed between the top portion 103, the two tooth side faces 102 and the rod body 1. Both sides of each tooth end surface 104 are in contact with one tooth side surface 102 and the rod body 1, and the remaining one side is in contact with the adjacent other tooth end surface 104.
這樣的結構可以讓基板3在進入相鄰兩分隔齒10之間的空間的過程中,即使位置稍有偏離該兩相鄰分隔齒10之 中央,仍可經由相對於其進入方向有一偏斜角度之齒端面104導引而正確地滑入,因而降低作業上的難度,也可避免基板3與齒側面102發生碰撞而破裂的情況發生。 Such a structure allows the substrate 3 to enter the space between the adjacent two spaced apart teeth 10 even if the position slightly deviates from the two adjacent spaced apart teeth 10 The center can still be properly slid in via the tooth end face 104 having a skew angle with respect to its entry direction, thereby reducing the difficulty in operation and avoiding the occurrence of a collision between the substrate 3 and the flank 102.
而如第1D圖及第3D圖所示,當分隔齒10具有兩個呈上寬下窄之平面狀齒側面102時,齒根部101在平行桿體1直徑D方向上的徑向寬度Wd,也就是兩齒側面102與桿體1相接處的間距是小於該桿體1之直徑D的。這樣的設計可以使分隔齒10具有較小的體積,因而可減輕置放桿的整體重量並節省製造的用料。 As shown in FIG. 1D and FIG. 3D, when the partitioning tooth 10 has two planar flank 102 having an upper width and a lower width, the radial width W d of the root portion 101 in the diameter D direction of the parallel rod body 1 That is, the distance between the two-toothed side 102 and the rod 1 is smaller than the diameter D of the rod 1. Such a design allows the partitioning teeth 10 to have a small volume, thereby reducing the overall weight of the placing rod and saving the manufactured material.
而如第2D圖及第4D圖所示,當分隔齒10的兩個齒側面102為上寬下窄且向分隔齒10外側凸出之曲面狀時,齒根部101在平行桿體1直徑D方向上的徑向寬度Wd,也就是兩齒側面102與桿體1相接處的間距就可以是等於該桿體1之直徑D的。 As shown in FIG. 2D and FIG. 4D, when the two flank surfaces 102 of the partitioning teeth 10 are curved in the shape of the upper width and the lower portion and projecting toward the outer side of the partitioning teeth 10, the root portion 101 is parallel to the rod body 1 in diameter D. the radial width W d direction, i.e. two teeth face 102 in contact with the pitch at the rod body 1 may be equal to the diameter D of the body of the shaft 1.
這樣的設計可以讓分隔齒10的齒側面102與桿體1的週緣形成連續的光滑表面,因而可提高排水性,使得整個置放桿在經過濕製程之後不易發生製程液體殘留的問題。還可增加分隔齒10的齒根部101與桿體1的接合面積,因而使得分隔齒10的在桿體1上固定得更為牢固。 Such a design allows the flank 102 of the partitioning tooth 10 to form a continuous smooth surface with the circumference of the shaft 1, thereby improving drainage, so that the entire placement rod is less prone to residual process liquid after the wet process. It is also possible to increase the joint area of the root portion 101 of the partitioning tooth 10 with the rod body 1, thereby making the partitioning teeth 10 more securely fixed on the rod body 1.
第6A圖所示者為本創作之一基板載具2的實施例。該基板載具2包含有:兩側板21、至少一側桿體11以及至少一底桿體12。該些側板21、側桿體11與底桿體12之間共同形成一收容空間22。 The embodiment shown in Fig. 6A is an embodiment of the substrate carrier 2 of the present invention. The substrate carrier 2 includes two side plates 21, at least one side rod body 11, and at least one bottom rod body 12. The side plates 21, the side bars 11 and the bottom bar 12 together form a receiving space 22.
在本實施例中,每一基板載具2在該兩側板21的兩側鄰近外緣處分別各設有兩側桿體11連接於該兩側板21之間。側桿體11即為採用前述的置放桿結構。每一側桿體11均包括有一桿體1,以及複數沿平行該桿體1軸心方向間隔排列並由該桿體1表面朝向該收容空間22凸伸的分隔齒10。 In this embodiment, each of the substrate carriers 2 is respectively disposed at two sides of the two side plates 21 adjacent to the outer edge thereof, and the two side rod bodies 11 are respectively connected between the two side plates 21. The side rod body 11 is configured by the aforementioned placement rod. Each of the side rods 11 includes a rod body 1 and a plurality of partitioning teeth 10 which are arranged in parallel with the axial direction of the rod body 1 and project from the surface of the rod body 1 toward the receiving space 22.
四支側桿體11上的分隔齒10係對應設置,以令每片基板3在進入基板載具2收容空間22中後,兩側邊緣會分別被限位在四支側桿體11上對應的四對兩兩相鄰之分隔齒10間。而各基板3的底端則與底桿體12相接並受其支撐。 The partitioning teeth 10 on the four side rods 11 are correspondingly arranged so that after each of the substrates 3 enters the receiving space 22 of the substrate carrier 2, the two side edges are respectively limited to the four side rods 11 respectively. Four pairs of two adjacent two spaced apart teeth. The bottom end of each of the substrates 3 is in contact with and supported by the bottom body 12.
由於側桿體11所採用的置放桿結構的桿體1及分隔齒10等各部位構造已詳述於前,此處便不再重複贅述。利用各分隔齒10之頂部103在平行於桿體1軸心方向上的寬度Wa1大於齒根部101在平行桿體1軸心方向上的寬度Wa2之特殊形狀設計,使得相鄰兩分隔齒10間距離最小處是在頂端最靠近清洗架中央的位置。 Since the structures of the rod body 1 and the partitioning teeth 10 of the placing rod structure used in the side rod body 11 have been described in detail above, the detailed description thereof will not be repeated here. The width W a1 of the top portion 103 of each of the partitioning teeth 10 in the direction parallel to the axial direction of the rod body 1 is larger than the width W a2 of the root portion 101 in the axial direction of the parallel rod body 1 so that the adjacent two spaced teeth The minimum distance between the 10 points is at the top of the position closest to the center of the cleaning rack.
因此,不論基板3大小,只要可被放入前述四對相互對應的分隔齒10間,則其左右兩側能夠產生位移的範圍均不會隨著基板3的尺寸縮小或其邊緣與桿體1之間的距離增加而變大。因此基板3可被穩固安置而不致在基板載具2被移動的過程中產生大幅度的晃動甚至與分隔齒10發生嚴重撞擊。 Therefore, regardless of the size of the substrate 3, as long as it can be placed between the four pairs of mutually corresponding partitioning teeth 10, the range in which the left and right sides can be displaced does not shrink with the size of the substrate 3 or the edge thereof and the rod body 1 The distance between them increases and becomes larger. Therefore, the substrate 3 can be stably placed without causing a large sway during the movement of the substrate carrier 2 or even a severe impact with the separation teeth 10.
請同時參閱第6B圖,在一較佳實施中,底桿體12也同樣可以採用前述的置放桿結構。也就是每一底桿體12同樣 也在桿體1上沿著平行其軸心的方向與各側桿體11上之該等分隔齒10對應地設置或形成有複數個朝向該收容空間22凸伸的分隔齒10。同樣地,由於該置放桿結構及其所包含之分隔齒10的構造與功效前面均已有說明,故此處也不再重複贅述。 Please also refer to FIG. 6B. In a preferred embodiment, the bottom rod body 12 can also adopt the aforementioned placement rod structure. That is, each bottom body 12 is the same A plurality of partitioning teeth 10 projecting toward the receiving space 22 are also provided or formed on the rod body 1 in a direction parallel to the axis thereof in correspondence with the partitioning teeth 10 on the side rails 11. Similarly, since the structure of the placement rod and the structure and function of the separation teeth 10 included therein have been previously described, the detailed description thereof will not be repeated here.
這樣的設計,可以使得每片基板3在被置入基板載具2後,其底部邊緣除受到底桿體12之桿體1的支撐外,同時也受到兩側分隔齒10的限位,因而可更穩固地被容置在基板載具2的收容空間22中。這對現今因厚度日益薄化而導致更容易變形的基板3而言,能夠提供更好、更穩固的固定及保護效果。 Such a design enables each of the substrate 3 to be placed in the substrate carrier 2, and the bottom edge thereof is supported by the rod body 1 of the bottom rod body 12, and is also limited by the partitioning teeth 10 on both sides. It can be more stably accommodated in the accommodating space 22 of the substrate carrier 2. This provides a better and more stable fixing and protection effect for the substrate 3 which is now more susceptible to deformation due to the increasingly thinner thickness.
在一較佳實施中,該基板載具2的該等側板21上緣分別設有一彼此對應的凹口221,且該基板載具2進一步包含有一壓桿體13,該壓桿體13兩端分別可移除地結合、固定於該等凹口221中。使用者可在將基板3裝入到基板載具2的收容空間22中之後,再將壓桿體13結合、固定於該等凹口221中,以防止基板3在製程中意外地從基板載具2中滑出。 In a preferred embodiment, the upper edges of the side plates 21 of the substrate carrier 2 are respectively provided with a corresponding recess 221, and the substrate carrier 2 further includes a pressing rod body 13 at both ends of the pressing rod body 13 Removably coupled and fixed in the notches 221, respectively. After the substrate 3 is loaded into the accommodating space 22 of the substrate carrier 2, the user can combine and fix the pressure bar body 13 in the notches 221 to prevent the substrate 3 from being accidentally loaded from the substrate during the process. With 2 slides out.
在一較佳實施中,壓桿體13也可同樣採用前述的置放桿結構。其功效就如同前述在底桿體12上採用同樣置放桿結構一樣。差別只在於壓桿體13上設置分隔齒(圖未示)之後,改善的是對收容空間22中容置的基板3頂部的限位與保護效果。 In a preferred embodiment, the pressure bar body 13 can also adopt the aforementioned placement rod structure. The effect is the same as that described above for the same placement of the rod structure on the bottom body 12. The difference is only after the spacer teeth (not shown) are disposed on the pressure bar body 13, and the improvement is the limit and protection effect on the top of the substrate 3 accommodated in the accommodating space 22.
由以上的說明可知:本實施例所提供之置放桿結構及應用該置放桿結構之基板載具2確實可令各該分隔齒10與基板3兩者之間維持在一點對點之接觸(a point-to-point contact),大幅降低因摩擦而損傷基板3表面的機會;且藉由此點接觸令進行濕式化學蝕刻、清洗等濕製程時對基板3的遮蔽面積減小,並令應用該置放桿結構之基板載具2擁有良好的排水效果,而可使基板3蝕刻、清洗進行得更為完整、徹底,能更有效降低不良品之產生。同時,應用該置放桿結構之基板載具2的分隔齒10設計還可使基板3與分隔齒10間不致發生嚴重碰撞,進而能有效提昇生產品質以及良率。 It can be seen from the above description that the placement rod structure provided by the embodiment and the substrate carrier 2 using the placement rod structure can ensure that the separation teeth 10 and the substrate 3 are maintained in point-to-point contact ( a point-to-point Contact), greatly reducing the chance of damage to the surface of the substrate 3 due to friction; and the masking area of the substrate 3 during wet processing such as wet chemical etching, cleaning, etc. by the point contact, and the application of the placement rod structure The substrate carrier 2 has a good drainage effect, and the substrate 3 can be etched and cleaned more completely and thoroughly, and the generation of defective products can be more effectively reduced. At the same time, the design of the partitioning teeth 10 of the substrate carrier 2 to which the placement rod structure is applied can also prevent serious collision between the substrate 3 and the partitioning teeth 10, thereby effectively improving the production quality and the yield.
綜上所述,本創作的確可達成前述目的,實以符合專利法之規定,爰提出專利申請。惟以上所述者,僅為本創作之較佳實施例而已,當不能以此限定本創作實施之範圍;故,凡依本創作申請專利範圍及創作說明書內容所作之簡單的等效變化與修飾,皆應屬本創作專利涵蓋之範圍內。 In summary, this creation can indeed achieve the above objectives, in order to comply with the provisions of the Patent Law, and to file a patent application. However, the above is only the preferred embodiment of the present invention, and the scope of the creation of the present invention cannot be limited by this; therefore, the simple equivalent changes and modifications made by the scope of the patent application and the content of the creation specification are All should be within the scope of this creation patent.
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CN109216244A (en) * | 2018-09-19 | 2019-01-15 | 安徽宏实自动化装备有限公司 | Carrier and its working method in a kind of wet type board slot |
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CN109216244A (en) * | 2018-09-19 | 2019-01-15 | 安徽宏实自动化装备有限公司 | Carrier and its working method in a kind of wet type board slot |
CN109216244B (en) * | 2018-09-19 | 2023-11-17 | 国网浙江省电力有限公司台州供电公司 | Wet-type machine in-groove carrier and working mode thereof |
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