CN211743108U

CN211743108U - Wafer basket tool

Info

Publication number: CN211743108U
Application number: CN202020813146.9U
Authority: CN
Inventors: 周飞龙; 张亚飞; 闫岩; 林海亚; 史晓波; 冯敏强
Original assignee: Jiangsu Jicui Institute of Organic Optoelectronics Co Ltd
Current assignee: Jiangsu Jicui Institute of Organic Optoelectronics Co Ltd
Priority date: 2020-05-15
Filing date: 2020-05-15
Publication date: 2020-10-23
Anticipated expiration: 2030-05-15

Abstract

The utility model relates to a semiconductor processing field discloses a wafer basket utensil. Wafer basket utensil includes basket utensil body, and the interval is provided with a plurality of grid posts that are parallel to each other on this internal relative both sides wall of basket utensil, forms the holding tank that is used for holding the wafer between two adjacent grid posts, and the both sides that the holding tank is relative are provided with a plurality of arc structures at the interval on the surface, and basket utensil body is provided with the fretwork groove between two adjacent grid posts. The utility model provides a wafer basket utensil, wafer and the contact of a plurality of arc structures, the damage wafer of having avoided drawing, leave the space between wafer and the grid post, the in close contact between wafer edge and the grid post has been avoided, and simultaneously, the basket utensil body is provided with the fretwork groove between two adjacent grid posts, the solution of being convenient for flows, the solution update rate on wafer edge surface has been accelerated, the bad phenomenon that wafer development is incomplete and sculpture is incomplete has been improved, can develop completely and the sculpture in the process time, the yields of product has been improved.

Description

Wafer basket tool

Technical Field

The utility model relates to a semiconductor processing field especially relates to a wafer basket utensil.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and manufactured on the wafer to form electronic products with specific electrical functions. The surface of the wafer usually has attachments, and before manufacturing, the wafer needs to be placed in a special basket for chemical etching and surface cleaning.

The basket used by the existing groove type developing and wet etching has influence on the developing and etching of the edge of the wafer, and the phenomena of incomplete developing and etching of the edge of the wafer are easy to occur. The reason is that some wafer edges are tightly contacted with the basket, and solution in the groove is not easy to enter the surface of the wafer edge, so that the solution updating speed of the wafer edge surface is low, and the wafer edge surface cannot be completely developed and etched in the process time, so that the yield is low.

SUMMERY OF THE UTILITY MODEL

Based on above problem, an object of the utility model is to provide a wafer basket utensil can avoid the wafer edge inseparable with basket utensil contact for the solution update rate on wafer edge surface improves the yields.

In order to achieve the purpose, the utility model adopts the following technical proposal:

the utility model provides a wafer basket utensil, includes basket utensil body, the interval is provided with a plurality of grid posts that are parallel to each other on this internal relative both sides wall of basket utensil, adjacent two form the holding tank that is used for holding the wafer between the grid post, the interval is provided with a plurality of arc structures on the surface of the relative both sides of holding tank, basket utensil body is adjacent two be provided with the fretwork groove between the grid post.

As the utility model discloses a preferred scheme of wafer basket utensil, the grid post with the cistern has been seted up to the adjacent one side of arc structure, the structural through-hole of having seted up of arc, the through-hole with the cistern intercommunication.

As the utility model discloses a preferred scheme of wafer basket utensil, drain groove is located the grid post is kept away from one side of basket utensil body.

As the utility model discloses a preferred scheme of wafer basket utensil, the through-hole for the cistern is the slope setting.

As the utility model discloses a preferred scheme of wafer basket utensil, the arc structure is the arc arch.

As the utility model discloses a preferred scheme of wafer basket utensil, the arc protruding set up in the holding tank is kept away from the one end of basket utensil body.

As the utility model discloses a preferred scheme of wafer basket utensil is located the holding tank both sides two liang of parallel and level of arc arch.

As the utility model discloses a preferred scheme of wafer basket utensil, the arc structure is the arc recess.

As the utility model discloses a preferred scheme of wafer basket utensil, it is a plurality of the arc structure is followed the length direction evenly distributed of grid post.

As the utility model discloses a preferred scheme of wafer basket utensil, the holding tank is square.

The utility model has the advantages that:

the utility model provides a wafer basket utensil, the interval sets up a plurality of grid posts that are parallel to each other on this internal relative both sides wall of basket utensil, form the holding tank that is used for holding the wafer between two adjacent grid posts, the interval is provided with a plurality of arc structures on the surface of the both sides that the holding tank is relative, wafer and a plurality of arc structure contact, the wafer of having avoided drawing the damage, leave the space between wafer and the grid post, the in close contact between wafer edge and the grid post has been avoided, and simultaneously, the basket utensil body is provided with the fretwork groove between two adjacent grid posts, the solution of being convenient for flows, the solution update rate on wafer edge surface has been accelerated, the bad phenomenon that wafer development is clean and the sculpture is clean has been improved, can develop and the sculpture completely in the process time, the yields of product has been improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

Fig. 1 is a schematic structural view of a wafer basket according to an embodiment of the present invention;

fig. 2 is a schematic partial side view of a wafer basket according to an embodiment of the present invention;

fig. 3 is a first partial cross-sectional view of a wafer basket according to an embodiment of the present invention;

fig. 4 is a second partial cross-sectional view of a wafer basket according to an embodiment of the present invention in a horizontal state;

fig. 5 is a third schematic partial cross-sectional view of a wafer basket according to an embodiment of the present invention;

fig. 6 is a fourth partial cross-sectional view of a wafer basket according to another embodiment of the present invention.

In the figure:

1-basket body; 2-grid columns; 3, accommodating a tank; 4-arc structure; 5-hollowing out the groove; 6-liquid guide groove; 7-a through hole; 100-wafer.

Detailed Description

In order to make the technical problems, technical solutions and technical effects achieved by the present invention more clear, the embodiments of the present invention will be described in further detail with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments, not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The embodiment provides a wafer basket, as shown in fig. 1 to 3, the wafer basket includes a basket body 1, a plurality of grid columns 2 parallel to each other are arranged on two opposite side walls in the basket body 1 at intervals, an accommodating groove 3 for accommodating a wafer is formed between two adjacent grid columns 2, a plurality of arc-shaped structures 4 are arranged on two opposite side surfaces of the accommodating groove 3 at intervals, and a hollow groove 5 is arranged between two adjacent grid columns 2 of the basket body 1. For convenience of processing, optionally, the accommodating groove 3 is square. To avoid wafer wobble, optionally, a plurality of arc-shaped structures 4 are evenly distributed along the length of the grid post 2.

Wafer and the contact of a plurality of arc structures 4, can effectively avoid scratching the loss wafer, leave the space between wafer and the grid post 2, the in close contact between wafer edge and the grid post 2 has been avoided, prevent that the wafer edge from adsorbing on the grid post 2, the solution of being convenient for of setting up of fretwork groove 5 simultaneously flows, the solution update rate on wafer edge surface has been accelerated, the bad phenomenon that the wafer development is incomplete and the sculpture is incomplete has been improved, can develop completely and the sculpture in the process time, the yields of product has been improved.

In order to balance the solution pressure on the two sides of the wafer, as shown in fig. 3 and 4, a liquid guiding groove 6 is optionally formed on one side of the grid column 2 adjacent to the arc-shaped structure 4, a through hole 7 is formed on the arc-shaped structure 4, and the through hole 7 is communicated with the liquid guiding groove 6. Meanwhile, the through hole 7 and the liquid guide groove 6 are beneficial to accelerating the flow speed of the solution on the surface of the wafer. In order to facilitate the solution conduction, optionally, the liquid guide groove 6 is concavely arranged on one side of the grid column 2 far away from the basket body 1. The hollow-out groove 5, the through hole 7 and the liquid guide groove 6 form a channel for solution circulation, so that the solution can be ensured to circulate orderly while the flowing speed of the solution is accelerated, and the wafer is prevented from being damaged. In order to prevent the solution from remaining in the through-hole 7, the through-hole 7 may be inclined with respect to the liquid guide groove 6, and the remaining solution in the through-hole 7 may be quickly flowed into the liquid guide groove 6. Preferably, the cross section of the liquid guide groove 6 can be an inverted trapezoid, so that the solution can be conveniently circulated.

For ease of processing, the arcuate formation 4 is optionally an arcuate projection, as shown in figures 2 to 4. In order to support the wafer, optionally, the arc-shaped protrusion is disposed at an end of the accommodating groove 3 away from the basket body 1. Optionally, the arc-shaped protrusions at both sides of the accommodating groove 3 are aligned two by two. As shown in fig. 5, when the wafer basket is placed horizontally, the arc-shaped protrusions on the two sides of the basket body 1 can stably support the wafer 100, so that the wafer 100 can be kept horizontal and cannot be inclined, the situations that the wafer 100 is damaged by a manipulator and the wafer 100 cannot be taken by the manipulator and a vacuum alarm is given are effectively avoided, and the machine can conveniently grab; the edge of the wafer 100 does not touch the basket body 1, so as to avoid the edge of the wafer 100 from rubbing and colliding with the basket body 1 to damage the wafer 100 during shaking.

Of course, in other embodiments, as shown in fig. 6, in order to reduce the weight of the entire wafer basket, the arc-shaped structure 4 may also be an arc-shaped groove, and preferably, in order to avoid scratching the wafer, a transition fillet is provided at the junction of the grid column 2 and the arc-shaped groove, and the streamline structure not only has the functions of preventing fragments and preventing sticking, but also has no sharp corner or sharp edge on the surface, and does not damage the film layer on the surface of the wafer. Compare for the arc arch with arc structure 4, when arc structure 4 was the arc recess, the solution was remained more easily to the arc recess, so more need will remain the solution and derive. During the use, remain in the solution of arc recess and in time flow into liquid guide groove 6 through-hole 7, avoid remaining, pollute follow-up wafer.

The wafer basket utensil that this embodiment provided, wafer and the contact of a plurality of arc structures 4, can effectively avoid scratching the loss wafer, leave the space between wafer and the grid post 2, the in close contact between wafer edge and the grid post 2 has been avoided, and simultaneously, basket utensil body 1 is provided with fretwork groove 5 between two adjacent grid posts 2, the solution of being convenient for flows, the solution update speed on wafer edge surface has been accelerated, the bad phenomenon that wafer development is not clean and the sculpture is not clean has been improved, can develop completely and the sculpture in the process time, the yields of product has been improved.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments illustrated herein, but is capable of various obvious modifications, rearrangements and substitutions without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. The utility model provides a wafer basket utensil, its characterized in that, includes basket utensil body (1), the interval is provided with a plurality of grid posts (2) that are parallel to each other on the relative both sides wall in basket utensil body (1), adjacent two form holding tank (3) that are used for holding the wafer between grid post (2), the interval is provided with a plurality of arc structures (4) on the surface of the relative both sides of holding tank (3), basket utensil body (1) is adjacent two be provided with fretwork groove (5) between grid post (2).

2. The wafer basket tool according to claim 1, wherein a liquid guiding groove (6) is formed in one side of the grid column (2) adjacent to the arc-shaped structure (4), a through hole (7) is formed in the arc-shaped structure (4), and the through hole (7) is communicated with the liquid guiding groove (6).

3. The wafer basket according to claim 2, wherein the liquid guiding groove (6) is recessed on a side of the grid column (2) away from the basket body (1).

4. The wafer basket according to claim 2, wherein the through holes (7) are inclined with respect to the liquid guide groove (6).

5. The wafer basket according to any one of claims 1 to 4, wherein the arc-shaped structures (4) are arc-shaped protrusions.

6. The wafer basket according to claim 5, wherein the arc-shaped protrusion is disposed at an end of the receiving groove (3) away from the basket body (1).

7. The wafer basket according to claim 6, wherein the arc-shaped protrusions located at both sides of the receiving groove (3) are aligned two by two.

8. The wafer basket according to any one of claims 1 to 4, wherein the arc-shaped structures (4) are arc-shaped grooves.

9. The wafer basket according to claim 1, wherein a plurality of said arc-shaped structures (4) are uniformly distributed along the length direction of said grid column (2).

10. The wafer basket according to claim 1, wherein the receiving groove (3) is square.