TWM486631U - Structure of cartridge - Google Patents
Structure of cartridge Download PDFInfo
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- TWM486631U TWM486631U TW102224922U TW102224922U TWM486631U TW M486631 U TWM486631 U TW M486631U TW 102224922 U TW102224922 U TW 102224922U TW 102224922 U TW102224922 U TW 102224922U TW M486631 U TWM486631 U TW M486631U
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- holes
- movable fixing
- card
- hole
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- 239000000945 filler Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Packaging Frangible Articles (AREA)
Description
本創作係有關於一種卡匣結構,尤指針對一種用於承載至少一基板(如:太陽能晶圓)之卡匣結構。 The present invention relates to a cassette structure, in particular to a cassette structure for carrying at least one substrate (eg, a solar wafer).
現在科技日新月異,惟各種高科技所運用之製造技術亦係由各種基礎工業堆疊而成,而發明了許多工業產品與電子科技產品,使人類生活更加方便,造福了許多人民,而許多工業產品與電子產品於技術上面,尤其是針對半導體製造等技術方面之需求日益增加,而針對於半導體研發合理的製造方法與用於製造所需應用之裝置,才能投入實際應用。 Nowadays, technology is changing with each passing day. However, the manufacturing technologies used in various high-tech industries are also stacked by various basic industries. Many industrial products and electronic technology products have been invented, making human life more convenient and benefiting many people, and many industrial products and The demand for electronic products in technology, especially for semiconductor manufacturing, is increasing, and the application of reasonable manufacturing methods for semiconductors and devices for manufacturing required applications can be put into practical use.
目前半導體的製程中,在晶圓、玻璃基板或其他基板製成之後,基於後續製程之間須要搬運該些基板,大多會利用機械手臂或人力將製程後的晶圓、玻璃基板或其他基板置入一容器中,以藉容器載運大量的基板於各製程間,以避免該些基板於搬運過程中產生碰撞。 In the current semiconductor manufacturing process, after the wafer, glass substrate or other substrate is fabricated, the substrates need to be transported between subsequent processes, and most of the wafers, glass substrates or other substrates are processed by robot arm or manpower. Into a container, to carry a large number of substrates between the various processes by the container to avoid collision of the substrates during the handling process.
目前利用一卡匣結構承載該些基板,卡匣結構係由複數桿體與二框片組合而成,而該些桿體固定於二框片係利用熔接方式,此種卡匣結構承載基板後,於運送過程中卡匣結構會產生晃動,使設置於卡匣結構之基板於卡匣結構內產生位移,而當基板產生位移時,基板與該些桿體產生碰撞,所以該些桿體因與基板碰撞產生 磨耗。當該些桿體發生嚴重磨損時,則必須更換該些桿體,但該些桿體與二框片係利用熔接方式組合而成,導致無法單獨更換磨耗嚴重的桿體,必需將整組之卡匣結構汰換。將整組之卡匣結構汰換則會提升成本。 At present, the substrate is carried by a card structure, and the card structure is formed by combining a plurality of rod bodies and two frame pieces, and the rod bodies are fixed to the two frame pieces by a welding method, and the card structure is carried by the substrate. During the transportation process, the structure of the cassette may be shaken, so that the substrate disposed on the cassette structure is displaced in the cassette structure, and when the substrate is displaced, the substrate collides with the rod bodies, so the rod bodies are caused by Collision with the substrate Wear. When the rods are severely worn, the rods must be replaced, but the rods and the two frame sheets are combined by welding, which makes it impossible to replace the worn rods separately, and the whole group must be replaced. The structure of the card is replaced. The replacement of the entire group of card structures will increase costs.
再者,卡匣結構於利用於太陽能相關等製程時,連接桿上用於置放基板之卡槽結構易於積存水分,於使用時須將該些水分排乾,否則會對晶片造成影響,不利於製程。 Furthermore, when the cassette structure is used in a process related to solar energy, the card slot structure for placing the substrate on the connecting rod is easy to accumulate moisture, and the moisture must be drained during use, which may affect the wafer, which is disadvantageous. In the process.
故,本創作針對以上習知技術之缺點做進一步之改良,本創作提供一種卡匣結構,卡匣結構之至少一連接桿透過活動固定柱組裝於二側板,另外,該活動固定柱之一端具有一凹槽,利用該凹槽能卸下該活動固定柱,進而該使連接桿可從二側板卸下,如此當連接桿產生嚴重磨損時,只要進行替換連接桿即可,而不須將整組之卡匣結構汰換,另外,該連接桿之部分設有向下旋轉之功能,以增強排水功能,以利於製程之進行,此為一種具有進步性及新穎性之創作。 Therefore, the present invention further improves the shortcomings of the above conventional techniques. The present invention provides a cassette structure in which at least one connecting rod of the cassette structure is assembled to the two side plates through the movable fixing column, and the movable fixing column has one end. a groove by which the movable fixing column can be removed, so that the connecting rod can be removed from the two side plates, so that when the connecting rod is severely worn, it is only necessary to replace the connecting rod without The structure of the card is replaced, and the part of the connecting rod is provided with a downward rotation function to enhance the drainage function to facilitate the process, which is a progressive and novel creation.
本創作之主要目的,在於提供一種卡匣結構,卡匣結構之複數連接桿透過複數活動固定柱組裝於二側板,如此當連接桿產生嚴重磨損時,只要卸下該些活動固定柱,即可從該二側板上卸下該些連接桿,並更換新的連接桿,而不須將整組之卡匣結構汰換。 The main purpose of the present invention is to provide a cassette structure in which a plurality of connecting rods of the cassette structure are assembled to the two side plates through a plurality of movable fixing columns, so that when the connecting rods are severely worn, the movable fixing columns can be removed. The connecting rods are removed from the two side panels and the new connecting rods are replaced without having to replace the entire stack of the structure.
本創作之次要目的,在於提供一種卡匣結構,該卡匣結構之該些連接桿透過該些活動固定柱組設於二側板,以避免該些連接桿脫離二側板,使該卡匣結構具有良好的連結強度及穩定性。 The second object of the present invention is to provide a latching structure, wherein the connecting rods of the latching structure are disposed on the two side panels through the movable fixing columns to prevent the connecting rods from being separated from the two side panels, so that the latching structure Has good joint strength and stability.
為達上述所指稱之主要目的之功效,本創作提供一種卡匣結構,其包含:二側板,其分別具有複數孔洞,每一側板之側邊具有複數卡榫孔,每一卡榫孔貫穿對應之該孔洞的側壁;複數連接桿,每一連接桿之二端分別組設於該二側板之該二孔洞,該連接桿與該二孔洞連接之該二端部分別具有一貫穿孔,該貫穿孔對應該卡榫孔;以及複數活動固定柱,每一活動固定柱之一端穿設於對應之該卡榫孔,並貫穿該貫穿孔,而該活動固定柱之另一端設有一凹槽,其中,該凹槽係用於拆卸該活動固定柱。 In order to achieve the above-mentioned main purpose, the present invention provides a cassette structure comprising: two side plates each having a plurality of holes, each side plate having a plurality of card holes on each side, each card hole correspondingly a side wall of the hole; a plurality of connecting rods, two ends of each connecting rod are respectively disposed on the two holes of the two side plates, and the two ends of the connecting rod and the two holes respectively have a consistent perforation, the through hole And a plurality of movable fixing columns, one end of each movable fixing column is disposed through the corresponding through hole and penetrates the through hole, and the other end of the movable fixing column is provided with a groove, wherein This groove is used to remove the movable fixing column.
10‧‧‧側板 10‧‧‧ side panels
110‧‧‧孔洞 110‧‧‧ hole
120‧‧‧卡榫孔 120‧‧‧Card hole
121‧‧‧卡榫槽 121‧‧‧ card slot
20‧‧‧連接桿 20‧‧‧ Connecting rod
210‧‧‧貫穿孔 210‧‧‧through holes
220‧‧‧連接件 220‧‧‧Connecting parts
230‧‧‧桿體 230‧‧‧ rod body
240‧‧‧組裝孔 240‧‧‧Assembled holes
30‧‧‧活動固定柱 30‧‧‧ activity fixed column
310‧‧‧凹槽 310‧‧‧ Groove
311‧‧‧螺紋結構 311‧‧‧Thread structure
40‧‧‧填充件 40‧‧‧Filling parts
410‧‧‧螺紋表面 410‧‧‧ thread surface
50‧‧‧容置空間 50‧‧‧ accommodating space
60‧‧‧卡固件 60‧‧‧ card firmware
第一圖:其係為本創作之第一實施例之卡匣結構之立體圖;第二A圖:其係為本創作之第一實施例之卡匣結構之組裝圖;第二B圖:其係為本創作之第二A圖之A區域之放大圖;第三A圖:其係為本創作之第一實施例之連接桿結構之示意圖;第三B圖:其係為本創作之第二實施例之連接桿結構示意圖;以及第三C圖:其係為本創作之第三實施例之連接桿結構之示意圖。 The first figure is a perspective view of the card structure of the first embodiment of the present invention; the second A picture is an assembly diagram of the card structure of the first embodiment of the creation; the second B picture: It is a magnified view of the A area of the second A picture of the creation; the third A picture: it is a schematic diagram of the connecting rod structure of the first embodiment of the creation; the third B picture: it is the first of the creation 2 is a schematic view showing the structure of the connecting rod of the second embodiment; and FIG. 3 is a schematic view showing the structure of the connecting rod of the third embodiment of the present invention.
為使 貴審查委員對本創作之特徵及所達成之功效有更進一步之瞭解與認識,謹佐以較佳之實施例及配合詳細之說明,說明如後:習知卡匣結構之複數桿體係直接焊接於二框片上,導致該些桿體無法更換,當該些桿體之其中一者嚴重磨損時,必須汰換整組之卡匣結構,導致成本的提升。有鑒於上述問題,本創作提供一種卡匣結構,透過複數活動固定柱固定複數連接桿於二側板之間, 然,每一活動固定柱之一端設有凹槽,以方便卸除該些活動固定柱,進而拆卸該些連接桿,使每一連接桿可個別更換,且,本創作之卡匣結構係利用該些活動固定柱固定該些連接桿於該二側板之間,以避免該些連接桿脫離該二側板,使卡匣結構具有良好的連結強度及穩定性。 In order to enable the reviewing committee to have a better understanding and understanding of the characteristics of the creation and the effects achieved, please refer to the preferred embodiment and the detailed description to illustrate the following: direct welding of the complex rod system of the conventional card structure On the two frame sheets, the rods cannot be replaced. When one of the rods is severely worn, the entire stack of the cassette structure must be replaced, resulting in an increase in cost. In view of the above problems, the present invention provides a cassette structure for fixing a plurality of connecting rods between two side plates through a plurality of movable fixing columns. However, one end of each movable fixing column is provided with a groove for conveniently removing the movable fixing columns, thereby disassembling the connecting rods, so that each connecting rod can be individually replaced, and the card structure of the present invention is utilized. The movable fixing posts fix the connecting rods between the two side plates to prevent the connecting rods from being separated from the two side plates, so that the click structure has good joint strength and stability.
請參閱第一圖、第二A圖及第二B圖,其係為本創作之第一實施例之卡匣結構之立體圖、組裝圖及第二A圖之A區域之放大圖;如圖所示,本創作主要包含二側板10、複數連接桿20與複數活動固定柱30,該二側板10分別具有複數孔洞110與複數卡榫孔120,於該連接桿20之二端部分別具有一貫穿孔210,而該些活動固定柱30之其中一端分別設有一凹槽310,其中,該凹槽310係用於拆卸該活動固定柱30。 Please refer to the first drawing, the second A drawing and the second B drawing, which are a perspective view, an assembly drawing and an enlarged view of the A area of the second A picture of the first embodiment of the present invention; The present invention mainly includes two side plates 10, a plurality of connecting rods 20 and a plurality of movable fixing columns 30, and the two side plates 10 respectively have a plurality of holes 110 and a plurality of card holes 120, and the two ends of the connecting rods 20 have consistent perforations respectively. 210, and one end of each of the movable fixing columns 30 is respectively provided with a groove 310, wherein the groove 310 is used for disassembling the movable fixing column 30.
承上所述,本創作之該二側板10之相對應之二表面分別設有該些孔洞110,而該些卡榫孔120設置於每一側板10之側邊,並分別對應該些孔洞110,且貫穿對應之該孔洞110的側壁。然該些連接桿20之二端部分別接設於該二側板10之該二孔洞110,每一連接桿20之該貫穿孔210對應貫穿該孔洞110之該卡榫孔120,如此該貫穿孔210與該卡榫孔120內形成一通道。最後將每一活動固定柱30之一端穿設於對應之該卡榫孔120,並順勢貫穿該貫穿孔210,即該活動固定柱30沿著該貫穿孔210與該卡榫孔120所形成之通道插入,以固定該些連接桿20於該二側板10上,此時,該二側板10與該些連接桿20之間產生一容置空間50,該容置空間50可容置複數基板,例如:太陽能晶圓。此外,每一活動固定柱30之另一端設有該凹槽310,其中,利用一工具插設於該凹槽310,該工具利用 轉動或拉動可將該活動固定柱30從該卡榫孔120拆卸下來。 As described above, the corresponding two surfaces of the two side panels 10 of the present invention are respectively provided with the holes 110, and the plurality of the latching holes 120 are disposed at the side of each of the side plates 10, and respectively correspond to the holes 110. And extending through the corresponding sidewall of the hole 110. The two ends of the connecting rods 20 are respectively connected to the two holes 110 of the two side plates 10, and the through holes 210 of each connecting rod 20 correspond to the latching holes 120 of the holes 110, so that the through holes 210 forms a channel with the card opening 120. Finally, one end of each of the movable fixing posts 30 is disposed through the corresponding through hole 210, and the movable fixing post 30 is formed along the through hole 210 and the latching hole 120. The accommodating space 50 is configured to receive a plurality of substrates, and the accommodating space 50 is disposed between the two side plates 10 and the connecting rods 20, and the accommodating space 50 can accommodate a plurality of substrates. For example: solar wafers. In addition, the other end of each movable fixing column 30 is provided with the groove 310, wherein the tool is inserted into the groove 310 by using a tool, and the tool utilizes Rotating or pulling can detach the movable fixing post 30 from the latching hole 120.
然每一孔洞110之側壁更具有一卡榫槽121,該卡榫槽121對應貫穿該孔洞110之側壁的該卡榫孔120,如此該卡榫孔120、該貫穿孔210與該卡榫槽121形成一通道,使每一活動固定柱30能貫穿該卡榫孔120與該貫穿孔210,進而貫穿至該卡榫槽121內,以確保該活動固定柱30已固定該連接桿20固定於該側板10上。 The sidewall of each of the holes 110 further has a latching groove 121 corresponding to the latching hole 120 extending through the sidewall of the hole 110, such as the latching hole 120, the through hole 210 and the latching slot The 121 forms a channel, so that each movable fixing post 30 can penetrate the latching hole 120 and the through hole 210 and penetrate into the latching slot 121 to ensure that the movable fixing post 30 is fixed and the connecting rod 20 is fixed to the connecting rod 20 The side panel 10 is on.
再者,當該活動固定柱30設於該卡榫孔210時,位於該活動固定柱30之另一端的該凹槽310更設置一填充件40,該填充件40係將該凹槽310填滿,如此以防止該卡匣結構於清洗時,清洗液會殘留於該些活動固定柱30之該些凹槽310內。本創作之該凹槽310內設有一螺紋結構311,而該填充件40具有對應該螺紋結構311之一螺紋表面410,使該填充件40能螺合於該凹槽310內,另外,本創作之該凹槽310內也並非限定設置為該螺紋結構311,而該填充件40也並非限定為該螺紋表面410,該凹槽310之目的在於方便將該些活動固定柱30抽出拆卸下來,而該填充件40之目的在於填滿該凹槽310,以上述目的為本創作之技術手段,使該凹槽310內也可設置卡勾件(未圖示)用於勾取該活動固定柱30,而該填充件40為對應該卡勾件之結構而用於填滿該凹槽310,故,本創作並不限定該凹槽310內之結構與該填充件40之結構變化,其隨使用者之需求做改變。 In addition, when the movable fixing column 30 is disposed on the latching hole 210, the recess 310 at the other end of the movable fixing post 30 is further provided with a filling member 40, and the filling member 40 fills the recess 310. When so as to prevent the structure from being cleaned, the cleaning liquid may remain in the grooves 310 of the movable fixing posts 30. The groove 310 of the present invention is provided with a threaded structure 311, and the filling member 40 has a threaded surface 410 corresponding to the threaded structure 311 so that the filling member 40 can be screwed into the groove 310. The groove 310 is not limited to the thread structure 311, and the filler member 40 is not limited to the thread surface 410. The purpose of the groove 310 is to facilitate the removal and removal of the movable fixing posts 30. The purpose of the filler 40 is to fill the recess 310. The above-mentioned purpose is the technical means of the present invention, and a hook member (not shown) may be disposed in the recess 310 for hooking the movable fixing post 30. The filler member 40 is configured to correspond to the structure of the hook member for filling the recess 310. Therefore, the present invention does not limit the structure of the recess 310 and the structural change of the filler member 40. The needs of the people make changes.
請一併參閱第三A圖到第三C圖,其係為本創作之第一到三實施例之連接桿結構之示意圖;如圖所示,於此詳細說明本創作之該連接桿20的結構,該連接桿20具有二連接件220及一桿體230,該二連接件220分別設置於該桿體230之兩端,其中該桿體230之兩端 分別具有一組裝孔240,該二連接件220分別插設於該桿體230之該二組裝孔240,如此該二連接件220相當於該連接桿20之二端部,所以每一連接件220具有該貫穿孔210,且該連接件220之形狀係對應於該孔洞110之形狀,而該桿體230之表面具有複數卡固件60,該些卡固件60分別為角錐狀,如第三B圖之B與第三C圖之C,該些卡固件60為線性排列於該桿體230之表面,而該些卡固件60係朝向該二側板10與該些連接桿20間之該容置空間50,以卡設複數基板於該容置空間50內,其中本創作之該桿體230係由塑膠管體包覆金屬圓柱條。當然本創作之該些卡固件60也可為其他形狀,只要能固定該些基板於該容置空間50即可。且更進一步該桿體230能進行旋轉,使該固定件60之結構不易積存水分,以增強排水功能,另外,該連接件220與該桿體230可為一體成形之結構,其加強該連接桿20之強度。 Please refer to the third to third C drawings, which are schematic diagrams of the connecting rod structure of the first to third embodiments of the present invention; as shown in the figure, the connecting rod 20 of the present invention is described in detail herein. The connecting rod 20 has two connecting members 220 and a rod 230. The two connecting members 220 are respectively disposed at two ends of the rod 230, wherein the two ends of the rod 230 The two connecting members 220 are respectively inserted into the two assembling holes 240 of the rod body 230, such that the two connecting members 220 correspond to the two ends of the connecting rod 20, so each connecting member 220 The through hole 210 has a shape corresponding to the shape of the hole 110, and the surface of the rod 230 has a plurality of fasteners 60, and the fasteners 60 are respectively pyramid-shaped, as shown in the third B-picture. The B and the C of the third C, the fasteners 60 are linearly arranged on the surface of the rod 230, and the fasteners 60 are oriented toward the accommodating space between the two side plates 10 and the connecting rods 20 50. The plurality of substrates are disposed in the accommodating space 50, wherein the rod body 230 of the present invention is covered with a metal tubular strip by a plastic tube body. Of course, the card firmware 60 of the present invention may have other shapes as long as the substrates can be fixed in the accommodating space 50. Furthermore, the rod body 230 can be rotated, so that the structure of the fixing member 60 is not easy to accumulate moisture to enhance the drainage function. In addition, the connecting member 220 and the rod body 230 can be integrally formed, and the connecting rod is strengthened. 20 strength.
綜上所述,本創作提供一種卡匣結構,其該些連接桿分別透過該些活動固定柱組設於該二側板,而該些連接桿可承載基板。本創作利用位於該活動固定柱之另一端的該凹槽,以將該活動固定柱從該卡榫孔拆卸下來,進而讓該連接桿可從該二側板上卸下,並更換新的連接桿進行組裝,如此僅須將因與基板摩擦而發生損壞之連接桿從該二側板上卸下,而不需將整組的卡匣結構汰換,有效節省成本。另外,該連接桿之該桿體能向下旋轉,增強該連接桿之排水功能,使該連接桿不易積存積水,而影響太陽能製程 In summary, the present invention provides a cassette structure in which the connecting rods are respectively disposed on the two side plates through the movable fixing columns, and the connecting rods can carry the substrate. The creation utilizes the recess at the other end of the movable fixing post to detach the movable fixing post from the latching hole, thereby allowing the connecting rod to be removed from the two side panels and replacing the new connecting rod The assembly is performed, so that only the connecting rod damaged by the friction with the substrate needs to be removed from the two side plates, and the entire set of the cassette structure is not required to be replaced, thereby saving cost. In addition, the rod body of the connecting rod can rotate downward to enhance the drainage function of the connecting rod, so that the connecting rod is less likely to accumulate water and affect the solar energy process.
故本創作實為一具有新穎性、進步性及可供產業上利用者,應符合我國專利法專利申請要件無疑,爰依法提出創作專利申請,祈鈞局早日賜至准專利,至感為禱。 Therefore, this creation is a novelty, progressive and available for industrial use. It should be consistent with the patent application requirements of China's patent law. It is undoubtedly a patent application for the creation of patents. The Prayer Council will grant the patents as soon as possible. .
惟以上所述者,僅為本創作一較佳實施例而已,並非用來限定本創作實施之範圍,故舉凡依本創作申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本創作之申請專利範圍內。 However, the above description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Therefore, the shape, structure, characteristics and spirit described in the scope of the patent application are equally changed. Modifications shall be included in the scope of the patent application of this creation.
10‧‧‧側板 10‧‧‧ side panels
110‧‧‧孔洞 110‧‧‧ hole
120‧‧‧卡榫孔 120‧‧‧Card hole
121‧‧‧卡榫槽 121‧‧‧ card slot
20‧‧‧連接桿 20‧‧‧ Connecting rod
210‧‧‧貫穿孔 210‧‧‧through holes
30‧‧‧活動固定柱 30‧‧‧ activity fixed column
310‧‧‧凹槽 310‧‧‧ Groove
311‧‧‧螺紋結構 311‧‧‧Thread structure
40‧‧‧填充件 40‧‧‧Filling parts
410‧‧‧螺紋表面 410‧‧‧ thread surface
Claims (10)
Priority Applications (1)
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TW102224922U TWM486631U (en) | 2013-12-31 | 2013-12-31 | Structure of cartridge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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TW102224922U TWM486631U (en) | 2013-12-31 | 2013-12-31 | Structure of cartridge |
Publications (1)
Publication Number | Publication Date |
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TWM486631U true TWM486631U (en) | 2014-09-21 |
Family
ID=51945295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW102224922U TWM486631U (en) | 2013-12-31 | 2013-12-31 | Structure of cartridge |
Country Status (1)
Country | Link |
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TW (1) | TWM486631U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615335B (en) * | 2017-03-24 | 2018-02-21 | 奇景光電股份有限公司 | Wafer cassette and a method of forming the same |
-
2013
- 2013-12-31 TW TW102224922U patent/TWM486631U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615335B (en) * | 2017-03-24 | 2018-02-21 | 奇景光電股份有限公司 | Wafer cassette and a method of forming the same |
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