TWM542718U - Continuous rotary valve of volatile organic substance treatment system - Google Patents

Description

Continuous rotary valve for volatile organics processing systems

The present invention relates to a volatile organic matter processing system as a whole, and more particularly to a rotary valve disposed in a rotary regenerative incineration system.

Processes in the semiconductor and optoelectronics industries often require the use of chemical reactions. Most of these chemical reactions produce many toxic organic waste gases, such as volatile organic compounds (VOCs), which are largely harmful. Hazardous air pollutants (HAPs), which cause long-term exposure to high concentrations of VOCs, can cause poisoning and carcinogenic tumors. In addition, VOCs in the atmosphere produce photochemical reactions that result in elevated concentrations of ozone in the atmosphere and the production of highly oxidizing contaminants. Therefore, these volatile organic compounds must be disposed of before being discharged into the atmosphere.

The volatile organic matter treatment system for the semiconductor, optoelectronics, and surface coating industries uses a rotary regenerative (R-RTO type) combined with a zeolite enrichment runner system that utilizes a plurality of regenerators in the incinerator to alternate absorption and release from the semiconductor. The thermal energy discharged from the process, the regenerator is usually filled with a ceramic material having a high heat transfer coefficient as a heat exchange medium, and a heating chamber is disposed above the regenerator, and the heating chamber device has a heater or a burner to provide a high temperature environment, which is conventionally volatilized The organic matter processing system must periodically switch the airflow channel during operation, so that the direction of the airflow is changed so that the regenerators can take in the absorption and release of thermal energy in turn, and the drive train of the rotary valve is periodically switched by the paddle, due to the number of times of switching. Quite frequently and in the form of picking, it is easy to generate microseismic when the positioning is caused, and the airflow is not smooth to cause knocking; in particular, the exhaust gas to be treated in part to enter the regenerator is extracted when the intake air is switched to the exhaust gas, resulting in a decrease in exhaust gas treatment efficiency. And cause environmental pollution.

For the sake of the job, the applicant has conceived the creation to provide a continuous rotary valve after careful testing and research and a perseverance in view of the lack of knowledge in the prior art.

In view of the problems of the prior art, the present invention provides a continuous rotary valve of a volatile organic matter processing system that improves the efficiency of exhaust gas treatment by changing the transmission mechanism that drives the rotary valve to form a continuous transmission mode.

According to the purpose of the present invention, the present invention provides a continuous rotary valve of a volatile organic matter processing system, comprising a rotary valve body and a transmission device, the rotary valve body comprising a valve housing, a rotor and a stator; the rotor is disposed on the rotor The inside of the gas valve casing includes a pipe body and a circular hollow body disposed outside the pipe body, and one end of the pipe body extends to the outside of the valve casing; the stator cover covers the top edge of the rotor and is provided with a plurality of guides The transmission device is disposed outside the rotary valve body and is coupled to the rotor and includes a gear set and a servo motor reducer. The gear set is connected to the end of the pipe body extending outside the valve casing; the servo motor reducer is powered A gear set is coupled to drive the rotor for directional or timed rotation.

In one embodiment, wherein the servo motor reducer drives the rotor to rotate clockwise or counterclockwise.

In an embodiment, the valve housing comprises an outer ring body and an inner ring body disposed inside the outer ring body, and an inner box body, an outer ring body and an inner ring body are disposed inside the inner ring body. A first air chamber is partitioned, and a second air chamber is partitioned between the inner ring body and the inner box body, and the inner side of the inner box body is a third air chamber.

In an embodiment, a curved hollow ring body is disposed outside the top portion of the pipe body, and a third air vent is formed at both ends of the curved hollow ring body to communicate with the inside of the pipe body, and a region other than the third air enthalpy is formed and circled. a second air passage communicating with the hollow body, the notch region of the curved hollow ring body forming a first air vent, the first air vent communicating with the first air chamber, and the second air vent communicating with the second air chamber, The three gas chambers are connected to the third gas chamber.

In one embodiment, the first air chamber is connected to the furnace by a first vent, the second air chamber is connected to the outside by a second vent, and the third air chamber is connected to the rotary valve by a third vent. Internally, the first vent, the second vent, or the third vent are respectively configured in different axial directions.

In an embodiment, the inner ring body and the inner box system respectively have a through hole, and the tube system is disposed in the inner box body through the through hole of the inner box body, and the circular hollow system is formed by the inner ring body. The inner ring body is inserted so that the rotor is positioned inside the valve housing.

In an embodiment, the outer peripheral ring of the arcuate hollow ring adjacent to the second air pocket is provided with a plurality of air holes to provide a relative air pressure greater than and flowing through the first air, the second air, and the third air. The turbulent airflow forms a gas wall airflow to form a gas wall seal between the second gas cylinder and the stator.

In an embodiment, wherein the outer diameter of the curved hollow ring body is larger than the circular hollow body.

In one embodiment, the stator is configured to separate a plurality of diverters according to the resolution of the servo motor reducer.

In the following, in conjunction with the drawings and the preferred embodiment of the present invention, the technical means adopted by the present creation for the purpose of achieving the intended creation are further explained.

Please refer to FIG. 1 , which shows the structural configuration of the inventive volatile organic matter processing system, including an incinerator 1, a heat storage layer 2, a rotary valve body 3 and a transmission device 4, and the transmission device 4 is used for driving the rotation. The valve body 3 rotates to form a passage for switching the intake air, the exhaust gas, and the flushing purge gas introduced into the incinerator 1; when the exhaust gas source is adsorbed into the heat storage layer 2 via the rotary valve body 3, and then passes through a plurality of incinerators 1 The heat storage layer and the zeolite runner (not shown) are used for heat exchange to increase the temperature of the exhaust gas, and the concentrated component is desorbed through the zeolite runner, and then enters the combustion chamber (not shown) in the incinerator 1 Re-discharging, specifically, the exhaust gas enters the zeolite rotor at a temperature of about 25 ° C for adsorption and concentration, and then after the heat storage layer, the temperature of the exhaust gas is about 200-300 ° C, and the concentrated component is desorbed, after desorption The exhaust gas temperature will drop to about 40~80 °C, so it needs to pass through the heat storage layer 2 to raise the temperature to about 700 °C, so that the combustion chamber can be heated to 800~900 °C, and the harmful substances in the exhaust gas can be converted into harmless. Ingredients; its purpose is to Low concentration of VOCs exhaust air volume concentrated to a small wind amount of the high concentration gas, the exhaust gas incineration process to save the fuel cost for heat recovery and thus save energy.

Please refer to FIG. 2 and FIG. 3 simultaneously, which respectively illustrate the structure of the rotary valve body of the continuous rotary valve of the volatile organic matter processing system of the present invention, and the structural diagram of the rotary valve body combined with the transmission device. The volatile organic matter treatment system described in the present invention refers to a rotary regenerative incineration system (R-RTO Type) combined with a zeolite rotary device, wherein the continuous rotary valve system is composed of the above-mentioned rotary valve body 3 and the transmission device 4, The rotary valve body 3 includes a valve housing 10, a rotor 20 and a stator 30. The transmission 4 includes a gear set 41 and a servo motor reducer 42.

The air valve housing 10 includes an outer ring body 11, an inner ring body 12 and an inner box body 13; wherein the inner ring body 12 is disposed inside the outer ring body 11, and the inner box body 13 is disposed inside the inner ring body 12, A first air chamber 14 is partitioned between the outer ring body 11 and the inner ring body 12, and a second air chamber 15 is partitioned between the inner ring body 12 and the inner box body 13, and the inner box body 13 is formed inside. It is a third air chamber 16, and the first air chamber 14 is connected to the furnace through a first air vent 17, and the second air chamber 15 is connected to the outside through a second air vent 18, and the third air chamber 16 is borrowed. The third vent 19 is connected to the inside of the rotary valve, and the first vent 17, the second vent 18 or the third vent 19 are respectively arranged in different axial directions, although the drawings indicate that they are different axes. The configuration is not limited to this, and the configuration axis is designed according to actual needs.

The rotor 20 is disposed inside the valve housing 10, and the rotor 20 includes a tube body 21 and a circular hollow body 22 disposed outside the tube body 21. One end of the tube body 21 extends outside the valve housing 10; An arcuate hollow ring body 23 having an outer diameter larger than that of the circular hollow body 22 is disposed outside the top portion of the second hollow portion 22, and a corresponding arrangement of the inner portion of the curved hollow ring body 23 is formed at the opposite ends of the curved hollow ring body 23. The third gas cylinder 233, the region other than the third gas cylinder 233 forms a second gas cylinder 232 communicating with the inside of the circular hollow body 22, and the notch region of the curved hollow ring body 23 is formed as a first gas cylinder 231. The inner ring body 12 and the inner box body 13 are respectively provided with through holes (121, 131), so that the tube body 21 is bored in the inner box body 13 through the through hole 131, and the circular hollow body 22 is The through hole 121 is bored in the inner ring body 12 to position the rotor 20 inside the valve housing 10; further, the first air 埠 231 is in communication with the first air chamber 14, and the second air 埠 232 is The second air chamber 15 is in communication, and the third air chamber 233 is in communication with the third air chamber 16 described above.

The transmission device 4 is disposed outside the rotary valve body 3 and fixed to the fixed bracket C of the volatile organic substance processing system, wherein one end of the tube body extending outside the valve housing 10 is connected to the gear set 41, and the servo motor reducer The 42-series power-connected gear set 41 is driven by the gear set 41 to electrically connect the servo motor reducer 42 to drive the rotor 20 for directional and timing continuous rotation, and the rotation angle thereof is considered according to the configuration of the regenerator. The rotation period is designed according to the temperature change of the heat storage bed (for example, the heat storage layer 2), and the transmission device 4 is set and controlled by an external computer program.

According to the above description, the stator 30 is covered on the top edge of the rotor 20, and the stator 30 is divided according to the resolution of the servo motor reducer 42 to partition a plurality of guide rollers 31; preferably, the stator 30 is configured to conduct flow. The number of turns 31 is twelve, and the angle formed between the guide vanes 31 may be equal or unequal.

The internal structure of the rotary valve body 3 of the present invention is separated by three air flow passages for guiding the exhaust gas flow, the purging air flow and the flushing air flow respectively, and the three air flow passages of the rotary valve body 3 have good sealing performance. In order to prevent the different air flows from mixing with each other, in particular, the second air vent 18, the second air chamber 15, the second air chamber 232, and the purging air flow channel formed by the stator 30 with respect to the heat storage region 31, The sealing property is more important to avoid contamination of the purified gas stream discharged therefrom; therefore, a plurality of pores (not shown) are provided on the outer peripheral edge of the curved hollow ring body 23 adjacent to the second gas cylinder 232 to provide The relative air pressure is greater than and flows through the airflows of the respective gas vents (231, 232, 233) to form a configuration of the gas wall airflow through the vents, thereby forming a gas wall sealing effect between the second gas 埠 232 and the stator 30.

The application of the continuous rotary valve of the volatile organic matter processing system described in the present application is as follows. The exhaust gas flow is guided into the first gas chamber 14 by the first vent 17 and then to the stator 30 via the first gas 231. The flow guiding crucible 31 in the preheating zone is preheated into the heat storage tank in the preheating zone, and then burned and purified in the combustion chamber; further, after the combustion and purifying airflow is stored in the heat storage tank of the heat storage zone, the stator 30 is opposite to the heat storage. The deflector 31 of the zone enters the second gas pocket 232 and exits through the second gas chamber 15 and with the second vent 18.

As described above, the air flow passage formed by the third vent 19, the third plenum 16, the third air 233, and the stator 30 with respect to the guide dam 31 of the flushing zone introduces the flushing airflow to the heat storage in the flushing zone. The trough avoids the problem of periodically discharging untreated exhaust gas in the incinerator; thus, the driving of the rotor 20 by the servo motor reducer 42 and the gear set 41 will cause the first gas 231, the second gas 232 and the third gas. The crucible 233 forms a continuous rotation, so that the regenerator of the regenerative incinerator is periodically switched in the procedures of preheating, heat storage and flushing.

However, the specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of implementation of the present invention, without departing from the spirit and technical scope of the creation. The equivalent changes and modifications made by the present disclosure are still covered by the scope of the patent application described below.

1‧‧‧Incinerator
2‧‧‧ Thermal storage layer
3‧‧‧turn valve body
10‧‧‧ valve housing
11‧‧‧Outer ring
12‧‧‧ Inner ring
121‧‧‧With holes
13‧‧‧ inner box
131‧‧‧With holes
14‧‧‧First air chamber
15‧‧‧Second chamber
16‧‧‧ Third air chamber
17‧‧‧First vent
18‧‧‧second vent
19‧‧‧ third vent
20‧‧‧Rotor
21‧‧‧ tube body
22‧‧‧Circular hollow body
23‧‧‧Arc-shaped hollow ring
231‧‧‧First gas
232‧‧‧Second gas
233‧‧‧ Third gas
30‧‧‧ Stator
31‧‧‧Guide
4‧‧‧Transmission
41‧‧‧ Gear Set
42‧‧‧Servo motor reducer
C‧‧‧Fixed bracket

Figure 1 is a schematic diagram showing the structure of the volatile organic matter processing system of the present invention. Fig. 2 is a schematic exploded view showing the structure of the rotary valve body of the present invention. Figure 3 is a schematic view showing the structure of the rotary valve body combined with the transmission device of the present invention.

10‧‧‧ valve housing

20‧‧‧Rotor

21‧‧‧ tube body

30‧‧‧ Stator

4‧‧‧Transmission

41‧‧‧ Gear Set

42‧‧‧Servo motor reducer

Claims (9)

A continuous rotary valve of a volatile organic matter processing system, comprising: a rotary valve body comprising: a gas valve housing; a rotor disposed inside the valve housing, the rotor comprising a tube body and disposed on a circular hollow body outside the pipe body, the pipe body extending to one end of the valve casing at one end; a stator covering the top edge of the rotor and having a plurality of guide rollers; and a transmission device The transmission device is disposed outside the rotary valve body and is electrically coupled to the rotor. The transmission device comprises: a gear set connected to an end of the pipe body extending outside the valve casing; a servo motor reducer electrically connected to the gear The group is driven to rotate the rotor for orientation and timing. A continuous rotary valve of the volatile organic matter processing system of claim 1, wherein the servo motor reducer drives the rotor to rotate clockwise or counterclockwise. The continuous rotary valve of the volatile organic material processing system of claim 1, wherein the valve housing comprises an outer ring body and an inner ring body disposed inside the outer ring body, and a inner ring body is disposed inside the inner ring body The inner box body is separated from the inner ring body by a first air chamber, and a second air chamber is partitioned between the inner ring body and the inner box body, and the inner box body is internal It is a third air chamber. The continuous rotary valve of the volatile organic matter processing system of claim 3, wherein a curved hollow ring body is disposed outside the top portion of the tubular body, and both ends of the curved hollow ring body form a communication with the inner portion of the tubular body. a third air enthalpy, the region other than the third air enthalpy forms a second air vent communicating with the interior of the circular hollow body, the notch region of the curved hollow ring body forming a first air enthalpy, the first air enthalpy The first air chamber is in communication with the second air chamber, and the third air chamber is in communication with the third air chamber. The continuous rotary valve of the volatile organic matter processing system of claim 3, wherein the first plenum is connected to the furnace by a first vent, and the second vent is connected to the outside by a second vent. The third air chamber is connected to the inside of the rotary valve by a third vent, and the first vent, the second vent or the third vent are respectively arranged in different axial directions. The continuous rotary valve of the volatile organic material processing system of claim 3, wherein the inner ring body and the inner box system respectively have a through hole, and the tube system is disposed through the through hole of the inner box body. In the inner casing, the circular hollow system is bored in the inner ring body with the through hole of the inner ring body, so that the rotor is positioned inside the valve casing. The continuous rotary valve of the volatile organic matter processing system of claim 4, wherein the outer peripheral ring of the arcuate hollow ring adjacent to the second gas is provided with a plurality of pores to provide a relative gas pressure greater than and flowing through The first gas, the second gas, and the third gas stream form a gas wall gas flow to form a gas wall seal between the second gas and the stator. The continuous rotary valve of the volatile organic matter processing system of claim 4, wherein the curved hollow ring has an outer diameter greater than the circular hollow body. The continuous rotary valve of the volatile organic matter processing system of claim 1, wherein the stator is configured to separate a plurality of diversion ports according to a resolution of the servo motor reducer.