TWM542717U - Rotary valve structure of volatile organic substance treatment system - Google Patents

Description

Rotary valve structure of volatile organic matter processing system

The present invention relates to a volatile organic matter processing system as a whole, and more particularly to a rotary valve structure disposed in a rotary regenerative incineration system.

Processes in the semiconductor and optoelectronics industries often require the use of chemical reactions. Most of these chemical reactions produce many toxic organic waste gases, such as volatile organic compounds (VOCs), which are largely harmful. Hazardous air pollutants (HAPs), which cause long-term exposure to high concentrations of VOCs, can cause poisoning and carcinogenic tumors. In addition, VOCs in the atmosphere produce photochemical reactions that result in elevated concentrations of ozone in the atmosphere and the production of highly oxidizing contaminants. Therefore, these volatile organic compounds must be disposed of before being discharged into the atmosphere.

The volatile organic matter treatment system for the semiconductor, optoelectronics, and surface coating industries uses a rotary heat storage (R-RTO type) combined with a zeolite concentrated rotor system. As shown in Figure 1, the system consists of three parts, respectively. The incinerator 1, the regenerative layer 2, and the rotary valve 3; the rotary valve 3 is composed of a rotor and a stator, and a plurality of weirs are formed in the stator, and the diversion guides are arranged to form intake and exhaust into the incinerator. The gas and the passage for rinsing the purified gas; after the exhaust gas source is adsorbed through the heat storage layer 2, the plurality of heat storage layers and the heat storage tank (not shown) in the incinerator 1 are used for heat exchange to increase the temperature of the exhaust gas and pass through the heat storage layer. (2) Decondensing the concentrated component, and then discharging it into the combustion chamber (not shown) in the incinerator 1, and then discharging it, specifically, the exhaust gas enters the zeolite runner at a temperature of about 25 ° C for adsorption and concentration, and then After the heat storage layer, the temperature of the exhaust gas is about 200-300 ° C, and the concentrated components are desorbed. After desorption, the temperature of the exhaust gas drops to about 40-80 ° C, so it needs to pass through the heat storage layer to raise the temperature to about 700 ° C, to facilitate combustion Heating to 800~900 °C, the harmful substances in the exhaust gas are converted into harmless components; the purpose is to concentrate the low-volume VOCs waste gas into a small air volume and high concentration gas to save the fuel cost in the waste gas incineration process. To save heat and save energy.

However, there is indeed room for improvement in the structure of the conventional rotary valve; for the sake of the job, the applicant has conceived the idea through careful testing and research and a spirit of perseverance in view of the lack of the prior art. Created to provide a preferred rotary valve structure.

In view of the problems of the prior art, the present invention provides a rotary valve structure of a volatile organic matter processing system to change the stator flow configuration to enhance the flow of air in the exhaust gas treatment process.

According to the purpose of the present invention, the present invention provides a rotary valve structure of a volatile organic matter processing system, which includes a valve housing, a rotor and a stator; the valve housing includes an outer ring body and an inner portion disposed inside the outer ring body The inner ring body is provided with an inner box body, and a first air chamber is partitioned between the outer ring body and the inner ring body, and a second air chamber is partitioned between the inner ring body and the inner box body. The inner part of the inner box is a third air chamber; the rotor is disposed inside the air valve housing, and the rotor comprises a tube body and a circular hollow body disposed outside the tube body, and a curved hollow portion is arranged outside the top portion of the tube body a ring body forms a third gas passage communicating with the inside of the pipe body at both ends of the curved hollow ring body, and a region other than the third gas pipe forms a second gas passage communicating with the inside of the circular hollow body, the curved hollow ring The notch region of the body forms a first air enthalpy, and the first air vent is in communication with the first air chamber, the second air vent is in communication with the second air chamber, and the third air vent is in communication with the third air chamber; the stator hood is overlaid on The top edge of the rotor, the stator system is separated by N guide vanes according to the step angle of the rotor, and N 8 to 12, and N is an even number.

In one embodiment, the stator is configured with 10 weirs.

In an embodiment, the angle between the respective weirs is equal or unequal.

In an embodiment, the first air chamber is connected to the outside by the first air vent, the second air chamber is connected to the outside by the second air vent, and the third air chamber is connected to the outside by the third air vent.

In an embodiment, the inner ring body and the inner box system respectively have a through hole, and the tube system is disposed in the inner box body through the through hole of the inner box body, and the circular hollow system is formed by the inner ring body. The inner ring body is inserted so that the rotor is positioned inside the valve housing.

In one embodiment, the outer peripheral ring of the arcuate hollow ring adjacent to the second air pocket is provided with a plurality of air holes to provide a relative air pressure greater than and flowing through the first air, the second air, and the third air. The turbulent airflow forms a gas wall airflow to form a gas wall seal between the second gas cylinder and the stator.

In an embodiment, wherein the outer diameter of the curved hollow ring body is larger than the circular hollow body.

2 is an embodiment of a rotary valve structure of the volatile organic matter processing system of the present invention, and the volatile organic matter processing system of the present invention refers to a rotary regenerative incineration system incorporating a zeolite runner device. (R-RTO Type), the rotary valve structure includes a valve housing 10, a rotor 20, and a stator 30.

The air valve housing 10 includes an outer ring body 11, an inner ring body 12 and an inner box body 13; wherein the inner ring body 12 is disposed inside the outer ring body 11, and the inner box body 13 is disposed inside the inner ring body 12, A first air chamber 14 is partitioned between the outer ring body 11 and the inner ring body 12, and a second air chamber 15 is partitioned between the inner ring body 12 and the inner box body 13, and the inner box body 13 is formed inside. Is a third air chamber 16, and the first air chamber 14 is connected to the outside through a first air vent 17, and the second air chamber 15 is connected to the outside through a second air vent 18, and the third air chamber 16 is A third vent 19 is connected to the outside.

The rotor 20 is disposed inside the valve housing 10, and the rotor 20 includes a tubular body 21 and a circular hollow body 22 disposed outside the tubular body 21. The outer portion of the tubular body 21 is provided with an outer diameter larger than that of the circular hollow body 22. a curved hollow ring body 23, and a third air 埠 233 corresponding to the inner portion of the tubular body 21 is formed at the two ends of the curved hollow ring body 23, and the regions other than the third air 埠 233 Forming a second air 埠 232 communicating with the interior of the circular hollow body 22, the notch region of the curved hollow ring body 23 is formed as a first air 埠 231, wherein the inner ring body 12 and the inner box body 13 are respectively opened The holes (121, 131) are bored so that the tubular body 21 is bored in the inner casing 13 with the through holes 131, and the circular hollow body 22 is bored in the inner ring body 12 by the through holes 121, thereby Positioning the rotor 20 inside the valve housing 10; further, the first air chamber 231 is in communication with the first air chamber 14, the second air chamber 232 is in communication with the second air chamber 15, and the third air chamber 233 is in front of the foregoing The third air chamber 16 is in communication.

Please refer to FIG. 3A-3B at the same time; the stator 30 is covered on the top edge of the rotor 20, and the stator 30 is separated by N guides 31 according to the step angle of the rotor 20, and N is between 8~ 12 and N is an even number; preferably, the stator 30 is provided with 10 guide vanes 31, which are divided into 12 equal parts according to the prior art; and, an angle formed between the guide vanes 31 (θ1, θ2) may be equal or unequal. The author divides it into 10 equal parts to form a gas flow channel with a larger cross-sectional area, thereby changing the rotational speed configuration of the rotary valve, as well as increasing the gas flow rate into the adsorption zone of the zeolite runner and the gas flow rate in the desorption zone.

According to the above, the internal structure of the rotary valve structure is separated by three air flow passages for guiding the exhaust gas flow, the purifying air flow and the flushing air flow respectively, and the three air flow passages of the rotary valve have a good sealing property to block different air flows. Mixed with each other, especially by the second vent 18, the second plenum 15, the second enthalpy 232, and the purified gas flow passage formed by the stator 30 with respect to the heat storage zone 31, which is more important in sealing. , to avoid contamination of the purified airflow discharged therefrom; therefore, a plurality of air holes (not shown) are disposed on the outer circumference ring of the curved hollow ring body 23 adjacent to the second air 埠232 to provide a relative air pressure greater than and flow. Through the air flow of each of the air vents (231, 232, 233) to form a gas wall airflow through the arrangement of the air holes, a gas wall sealing effect is formed between the second air 埠 232 and the stator 30.

The application of the rotary valve structure of the volatile organic matter processing system described in the present application is as follows. The exhaust gas flow is guided into the first gas chamber 14 by the first vent 17 and then relative to the stator 30 via the first gas 231 and the stator 30. The heat guiding zone 31 is preheated into the heat storage tank of the preheating zone, and then burned and purified in the combustion chamber; further, after the combustion purified gas is stored in the heat storage tank of the heat storage zone, the stator 30 is opposite to the heat storage zone. The diversion runner 31 enters the second gas pocket 232 and exits through the second gas chamber 15 and with the second vent 18.

As described above, the air flow passage formed by the third vent 19, the third plenum 16, the third air 233, and the stator 30 with respect to the guide dam 31 of the flushing zone introduces the flushing airflow to the heat storage in the flushing zone. The groove avoids the problem of periodically discharging the untreated exhaust gas in the incinerator; thus, the stepwise rotation of the rotor 20 causes the first gas cylinder 231, the second gas cylinder 232 and the third gas cylinder 233 to rotate stepwise, thereby The regenerator of the regenerative incinerator is periodically switched between the procedures of preheating, heat storage and flushing.

However, the specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of implementation of the present invention, without departing from the spirit and technical scope of the creation. The equivalent changes and modifications made by the present disclosure are still covered by the scope of the patent application described below.

1‧‧‧Incinerator
2‧‧‧ Thermal storage layer
3‧‧‧Rotary valve
10‧‧‧ valve housing
11‧‧‧Outer ring
12‧‧‧ Inner ring
121‧‧‧With holes
13‧‧‧ inner box
131‧‧‧With holes
14‧‧‧First air chamber
15‧‧‧Second chamber
16‧‧‧ Third air chamber
17‧‧‧First vent
18‧‧‧second vent
19‧‧‧ third vent
20‧‧‧Rotor
21‧‧‧ tube body
22‧‧‧Circular hollow body
23‧‧‧Arc-shaped hollow ring
231‧‧‧First gas
232‧‧‧Second gas
233‧‧‧ Third gas
30‧‧‧ Stator
31‧‧‧Wandering angle θ1, θ2‧‧‧ angle

Figure 1 is a schematic diagram showing the structure of a volatile organic matter processing system. Fig. 2 is an exploded perspective view showing the structure of the rotary valve of the present invention. Figure 3A is an embodiment of the flow guide configuration of the rotary valve of the present invention. Figure 3B is another embodiment of the flow guide configuration of the rotary valve of the present invention.

10‧‧‧ valve housing

11‧‧‧Outer ring

12‧‧‧ Inner ring

121‧‧‧With holes

13‧‧‧ inner box

131‧‧‧With holes

14‧‧‧First air chamber

15‧‧‧Second chamber

16‧‧‧ Third air chamber

17‧‧‧First vent

18‧‧‧second vent

19‧‧‧ third vent

20‧‧‧Rotor

21‧‧‧ tube body

22‧‧‧Circular hollow body

23‧‧‧Arc-shaped hollow ring

231‧‧‧First gas

232‧‧‧Second gas

233‧‧‧ Third gas

30‧‧‧ Stator

31‧‧‧Guide

Claims (7)

A rotary valve structure of a volatile organic material processing system, comprising: a gas valve housing comprising an outer ring body and an inner ring body disposed inside the outer ring body, wherein an inner box body is disposed inside the inner ring body, A first air chamber is partitioned between the outer ring body and the inner ring body, and a second air chamber is partitioned between the inner ring body and the inner box body, and the inner box body is a third gas a rotor, which is disposed inside the valve housing, the rotor includes a tube body and a circular hollow body disposed outside the tube body, and a curved hollow ring body is disposed outside the top portion of the tube body. A third air enthalpy is formed at both ends of the curved hollow ring body, and a region other than the third air enthalpy forms a second air vent communicating with the inner portion of the circular hollow body, the curved hollow a notch region of the ring body forms a first air vent, the first air vent communicates with the first air plenum, the second air vent communicates with the second air plenum, and the third air vent communicates with the third air plenum And a stator that covers the top edge of the rotor, the stator being stepped according to the rotor Segments of the flow port of N, N is between 8 and 12, and N is an even number. The rotary valve structure of the volatile organic matter processing system of claim 1, wherein the stator is configured with 10 of the weirs. The rotary valve structure of the volatile organic matter processing system of claim 1, wherein the angle between each of the weirs is equal or unequal. The rotary valve structure of the volatile organic material processing system of claim 1, wherein the first air chamber is connected to the outside by the first air passage, and the second air chamber is connected to the outside world by the second air passage. The third air chamber is connected to the outside by the third vent. The rotary valve structure of the volatile organic material processing system of claim 1, wherein the inner ring body and the inner box system respectively have a through hole, and the tube system is disposed through the through hole of the inner box body. In the inner casing, the circular hollow system is bored in the inner ring body with the through hole of the inner ring body, so that the rotor is positioned inside the valve casing. The rotary valve structure of the volatile organic matter processing system of claim 1, wherein the outer peripheral ring of the arcuate hollow ring adjacent to the second air enthalpy is provided with a plurality of air holes to provide a relative air pressure greater than and flowing through the The first gas, the second gas, and the third gas stream form a gas wall gas flow to form a gas wall seal between the second gas and the stator. The rotary valve structure of the volatile organic matter processing system of claim 1, wherein the curved hollow ring has an outer diameter greater than the circular hollow body.