TWM539148U - Lens casing assembly of wafer inspection equipment - Google Patents

Description

Lens housing assembly for wafer inspection equipment

This creation relates to wafer inspection equipment, and in particular to a lens housing assembly of a wafer inspection apparatus.

For wafer back scribe inspection, when many inspection machines detect scribe lines from the back side of the wafer, they will not be able to obtain clear images due to the dicing tape on the back side of the wafer, and thus cannot accurately detect crystals. Cutting path defects on the back of the circle. In this regard, the technology of the Republic of China application 101147513 has overcome the problem of image unclearness, which uses the refractive index of the immersion liquid and the refractive index matching of the blue film to achieve a clear image. In addition, the technology of the Republic of China Application No. 102119748 patent allows the testing machine to have sufficient immersion liquid at the time of detection and to discharge excess immersion liquid.

However, when the inspection machine using the above technology detects the wafer from the back side of the wafer, there is still room for improvement, as follows:

1. The wafer to be inspected is the wafer that has been cut, and the dicing line is only where the blue film itself is and no wafer is attached. As shown in Figs. 1-3 of the application No. 102119748, the immersion liquid flows from the first gap 21 to the second gap 31 to cover the transparent sheet 30 while also contacting the blue film 80. Actually, since the immersion liquid system is pressurized, Therefore, after the immersion liquid flows out of the second gap 31, pressure is applied to the blue film 80, so that the localized position of the pressure of the immersed liquid (about the size of the transparent sheet 30) is swelled by the immersion liquid, causing the wafer to be detached from the blue film due to localized protrusion. Or, adjacent wafers collide because the surrounding local position protrusions are close to each other.

2. Since the infiltrating liquid will remain on the blue film after contacting the blue film, it is necessary to further dispose the infiltrating liquid remaining on the blue film to prevent the residual infiltrating liquid from dripping in the testing machine to cause the risk of detecting machine failure or corrosion.

In view of the foregoing problems, the purpose of the present invention is to provide a lens housing assembly of a wafer inspection apparatus, which reduces the wafers on the wafer under test from being detached from the blue film or colliding with each other.

In addition, another object of the present invention is to provide a lens housing assembly of a wafer inspection apparatus capable of reducing residual liquid on a blue film after detecting a wafer.

In order to achieve the above object, the present invention provides a lens housing assembly of a wafer inspection apparatus, comprising an outer casing having a top portion, the outer casing having a first hole at the top, the outer casing having a groove at the periphery; a transparent sheet disposed on the outer casing and covering the first hole; an outer cover disposed on the outer casing, the outer cover having a second hole and a third hole, and the outer cover and the outer cover Forming a first gap between the bodies, the first gap communicating with the second hole and the third hole: and a frame sleeved on the outer casing or the outer cover, the frame being located above the groove body The frame has a top edge that is positioned higher or higher than the outer cover.

When using a wafer inspection machine equipped with a combination of the lens housings provided by this creation, the range of the wetting liquid distribution will be the range surrounded by the frame, which will be larger than the range of the prior art about the size of the transparent sheet, thus reducing the locality. The extent to which the area is raised to reduce the wafers on the wafer under test from the blue film or colliding with each other. In addition, when the detecting machine performs the detecting operation, the frame contacts the blue film on the back surface of the tested wafer, and the infiltrating liquid system is scattered in the frame. As the lens moves, the frame will scrape the blue film. The remaining liquid can reduce the residual liquid on the blue film after the wafer is detected.

In addition, a second gap may be formed between the frame and the outer cover for liquid to flow from the second gap into the groove.

More preferably, the frame body has a scraping wall portion at the top end of the scraping wall portion, and the scraping wall portion has elasticity for keeping the scraping wall portion in contact with the blue film.

Further, the frame body has a scraping wall portion, and the top edge is located at a top end of the scraping wall portion, and the scraping wall portion forms a sloped surface at the periphery of the top edge to reduce the contact of the blue film by the scraping wall portion when the lens moves. Frictional resistance.

1-4, a lens housing assembly of a wafer inspection apparatus includes an outer casing 11, a transparent sheet 12, an outer cover 13, and a frame 14.

The outer casing 11 has a top portion 111 which is a tapered protrusion. The outer casing 11 has a first hole 112 at the top portion 111. When the lens used for the detecting machine is disposed inside the outer casing 11, An image outside the hole is captured through the first hole 112. The outer casing 11 has a groove body 113 at the periphery thereof, and the groove body 113 is opened upward for collecting the wetting liquid.

The transparent sheet 12 is disposed on the outer casing 11 and covers the first hole 112, so that the lens mounted in the outer casing 11 passes through the transparent sheet 12 and captures images outside the first hole 112. And preventing foreign matter, such as a wetting liquid, from entering the outer casing 11 through the first hole 112.

The outer cover 13 is disposed on the outer casing 11. The outer cover 13 has a second hole 131 and a third hole 132, and a first gap 133 is formed between the outer cover 13 and the outer casing 11. The first gap 133 communicates with the second hole 131 and the third hole 132. It should be noted that, in this embodiment, the second hole 131 is for inputting a immersion liquid into the pipeline, and the immersion liquid overflows the outer cover 13 from the third hole 132 after flowing through the first gap 133, and allows the infiltration to be infiltrated. The liquid covers the transparent sheet 12. The third hole 132 allows an image outside the hole of the third hole 132 to penetrate from the transparent sheet 12 into the outer casing 11.

The housing 14 is sleeved on the outer casing 11 or the outer cover 13. In the embodiment, the outer cover 13 is sleeved, but not limited thereto, and the outer casing 13 can be sleeved on the outer casing. Body 11. The frame 14 is positioned above the trough 113, so that the infiltrating liquid can smoothly flow from the frame 14 into the trough 113. In addition, the frame body 14 has a top edge 141 which is positioned higher or higher than the outer cover 13 to ensure that the frame 14 is opposite to the outer cover 13 due to the top edge 141 when the detecting machine is in operation. The positional relationship enables continuous contact with the blue film.

It is to be noted that, in this embodiment, a second gap 142 is formed between the frame body 14 and the outer cover 13 for the infiltration liquid to flow from the second gap 142 into the groove body 113. If the second gap 142 is not provided, the immersion liquid will overflow from the frame body 14, and the frame body 14 may not continuously contact the blue film, and the frame body 14 may be scraped off to scrape the remaining liquid on the blue film. effect.

In addition, in the embodiment, the frame body 14 has a scraping wall portion 143 at the top end of the scraping wall portion 143, and the scraping wall portion 143 has elasticity, thereby reducing the frame body 14 from continuously contacting the blue body. The condition of the membrane. Moreover, the scraping wall portion 143 forms a slope 144 on the periphery of the top edge 141 for reducing the frictional resistance caused by the scraping wall portion 143 contacting the blue film when the lens is moved.

11‧‧‧Outer casing

111‧‧‧ top

112‧‧‧ first hole

113‧‧‧

12‧‧‧Transparent film

13‧‧‧ Cover

131‧‧‧second hole

132‧‧‧ third hole

133‧‧‧First gap

14‧‧‧ frame

141‧‧‧Top edge

142‧‧‧Second gap

143‧‧‧Scratch

144‧‧‧Bevel

Figure 1 is a perspective view of an embodiment of the present invention. Figure 2 is a side view of the present embodiment. Figure 3 is a cross-sectional view of the present embodiment. Figure 4 is a schematic cross-sectional view of the present embodiment.

11‧‧‧Outer casing

113‧‧‧

12‧‧‧Transparent film

13‧‧‧ Cover

14‧‧‧ frame

Claims (4)

A lens housing assembly of a wafer inspection apparatus, comprising: an outer casing having a top portion, the outer casing having a first hole at the top, the outer casing having a groove body at the periphery; a transparent sheet disposed at the An outer casing covering the first hole; an outer cover disposed on the outer casing, the outer cover having a second hole and a third hole, and the first cover and the outer casing form a first a gap, the first gap communicates with the second hole and the third hole: and a frame is sleeved on the outer casing or the outer cover, the frame is located above the trough, and the frame has a top edge The top edge position is the same as the height or height of the outer cover. The lens housing assembly of the wafer inspection apparatus of claim 1, wherein a second gap is formed between the frame and the outer cover for liquid to flow from the second gap into the groove. The lens housing assembly of the wafer inspection apparatus according to claim 1, wherein the frame body has a scraping wall portion, and the top edge is located at a top end of the scraping wall portion, and the scraping wall portion has elasticity. The lens housing assembly of the wafer inspection apparatus of claim 1 or 3, wherein the frame has a scraping wall portion, the top edge is located at a top end of the scraping wall portion, and the scraping wall portion is at a periphery of the top edge Form a slope.