JP2013111671A - Foil making roller inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a foil making roller inspection device that easily detects ruggedness of a foil making roller with high precision, and repairs the same.SOLUTION: The foil making roller inspection device includes polishing means comprising a polishing roller which achieves polishing with abrasives brought into contact with the surface of the foil making roller and abrasive supply means of supplying abrasives to the polishing roller; cleaning means of cleaning the surface of the foil making roller; inspection means of inspecting ruggedness of the surface of the foil making roller; control means of determining whether the surface of the foil making roller needs to be polished according to an inspection result; and moving means of holding an inspection polishing mechanism having the polishing means, cleaning means, and inspection means united movably to and away from the foil making roller, and moving the inspection polishing mechanism between an inspection and repair position where the mechanism comes close to the foil making roller to perform ruggedness inspection on the surface and polishing of the surface and a standby position where the mechanism moves away from the foil making roller to avoid interference with a foil making process.

Description

  The present invention relates to a foil making roller inspection device, and more particularly to a foil making roller inspection device provided with a repair device for repairing the surface of a foil making roller.

  A general method for producing an electrolytic copper foil will be briefly described with reference to FIG. In general, an electrolytic cell 14 (electrolyzer) is formed by a cathode (copper foil roller 12) made of a metal drum chrome-plated on titanium or stainless steel and an anode 15 facing the copper foil roller 12 at a predetermined distance. The electrolyte solution 18 is flowed.

  The electrolytic cell 14 formed by the anode 15 is an arc-shaped metal plate obtained by coating lead, a lead alloy, or titanium with a platinum group oxide or the like, and forms a liquid tank. The surface of the copper foil roller 12 is rotated by rotating the copper foil roller 12 while applying a potential while flowing an electrolytic solution 18 (for example, sulfuric acid copper sulfate solution) between the copper foil roller 12 and the anode 15. Due to the electrolytic action, copper ions in the electrolytic solution gradually deposit (electrodeposit) on the surface of the copper foil roller 12 as the copper foil roller 12 rotates. The copper foil 16 is manufactured by winding and peeling the copper metal (electrodeposit) having a predetermined thickness from the copper foil roller 12 onto a roll or the like successively.

  At this time, when unevenness exists on the surface of the copper foil roller 12, unevenness corresponding to the unevenness is generated on the surface of the manufactured copper foil 16. Therefore, various devices for polishing and repairing the surface of the copper foil roller 12 have been proposed (see, for example, Patent Documents 1 and 2).

JP-A-10-330984 Special table 2003-500228 gazette

  However, in order to detect irregularities present on the surface of the foil-making roller that is the subject of inspection and repair, the conventional method relies on visual detection by the operator, and automatically detects irregularities on the surface of the foil-making roller and repairs them. There is a problem that the load on the operator is large and the detection accuracy cannot be increased.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a foil-making roller inspection device that detects and repairs irregularities on the surface of a foil-making roller easily and with high accuracy.

  The foil-making roller inspection device according to claim 1 is a polishing roller that is immersed in an electrolytic bath and contacts the surface of the foil-making roller for depositing copper foil on the surface and is polished with an abrasive, and the polishing roller is polished. Inspection polishing comprising: polishing means comprising an abrasive supply section for supplying a material; cleaning means for cleaning the surface of the foil making roller; and inspection means for inspecting irregularities on the surface of the rotating foil making roller. A mechanism, control means for determining whether surface polishing of the foil making roller is necessary according to the inspection result of the inspection means, and supporting the inspection polishing mechanism movably in the contact / separation direction with respect to the foil making roller, According to the judgment of the control means, it is moved between an inspection / repair position where the surface irregularity inspection and surface polishing are performed by approaching the foil making roller and a retreating position away from the foil making roller to avoid interference with the foil making process. Transportation means It is characterized in.

  According to the above invention, even when unevenness is present on the surface of the foil-making roller, the unevenness on the surface is detected by moving the inspection and polishing mechanism to the vicinity of the foil-making roller at a time other than the foil-making process, By polishing and removing this, the surface of the foil-making roller can be made into a cylindrical surface with little unevenness, and a copper foil with a uniform thickness can be produced.

  In addition, by detecting the unevenness on the surface of the foil-making roller as an automatic operation by the inspection means, it is not necessary to visually check by the operator, and it is automatically performed at times other than the foil-making process, such as after the completion of the foil-making process. Since it is also possible to perform inspection and repair of the foil-making roller, it is possible to reduce the man-hours and burdens on the operator, and to reduce the inoperable time of the entire foil-making apparatus.

  The foil-making roller inspection device according to claim 2, wherein the polishing means stores a polishing liquid tank that stores a polishing liquid containing an abrasive, a polishing roller that polishes the surface of the foil-making roller with the polishing liquid, A liquid draining blade for squeezing the polishing liquid from the surface of the foil-making roller, and is provided on the upstream side in the rotation direction of the foil-making roller with respect to the cleaning means and the inspection means.

  According to the above invention, the surface of the rotating foil-making roller is polished without a step with the polishing roller, and the foil-making roller can be efficiently inspected and polished by performing it before the cleaning and other steps.

  The foil-rolling roller inspection apparatus according to claim 3, wherein the cleaning means is a water-washing nozzle that sprays cleaning water onto the surface of the foil-making roller, an air knife that blows and removes moisture from the surface of the foil-making roller, and A foil draining blade that squeezes moisture from the surface of the foil making roller, and an exhaust box that houses the washing nozzle and the air knife and prevents mist from spreading during washing and drying. It is provided on the downstream side in the rotation direction and on the upstream side in the rotation direction of the foil-making roller with respect to the inspection means.

  According to the above invention, the surface of the polished foil-making roller can be washed immediately to prevent contamination in the apparatus, and dry dust can be prevented from scattering and affecting the bearings of the rollers.

  The foil-making roller inspection apparatus according to claim 4, wherein the inspection unit images the surface of the rotating foil-making roller and optically detects irregularities from the captured image, and the field of view of the CCD camera. Illuminating means for illuminating, and storage means for storing the shape, size, and position of unevenness present on the surface of the foil-making roller from the image of the CCD camera, and more suitable than the polishing means and the cleaning means. It was provided in the rotation direction downstream of the foil roller.

  According to the above invention, the surface of the rotating foil making roller is detected by detecting the unevenness without affecting the surface of the foil making roller by photographing the surface of the foil making roller and optically detecting the unevenness. Can be inspected again after polishing and cleaning.

  The foil-making roller inspection device according to claim 5, wherein the foil-making roller, the electrolytic bath, the inspection and polishing mechanism, a casing that holds the moving means and shields it from outside air, and the inspection and polishing mechanism inside the casing A storage section for storing the storage section in a standby position, a shutter for sealing the opening of the storage section, and an electrolytic bath for moving the electrolytic bath up and down to a position where the foil-making roller is immersed in an electrolytic solution and a retracted position And an up-and-down means.

  According to the above invention, the opening of the storage portion is sealed by the shutter when the inspection polishing mechanism is in the standby position, and is released when the inspection polishing mechanism moves to the inspection position. By separating the atmosphere in the vicinity of the electrolytic cell and the inspection and polishing mechanism, it is possible to prevent a situation in which they interfere with each other. Moreover, various processes can be performed without moving the roller for copper foil by the electrolytic cell up-and-down means for moving the electrolytic cell.

ADVANTAGE OF THE INVENTION According to this invention, it can be set as the foil making roller test | inspection apparatus which detects and repairs the unevenness | corrugation of the foil making roller surface easily and with high precision.

It is a conceptual diagram which shows the structure of the foil manufacturing roller inspection apparatus which concerns on 1st Embodiment of this invention. It is a conceptual diagram which shows the test | inspection grinding | polishing mechanism of the foil manufacturing roller test | inspection apparatus shown in FIG. It is an enlarged view which shows the surface convex part of the roller for copper foil, and its repair process. It is an enlarged view which shows the surface recessed part of the roller for copper foils, and its repair process. It is a perspective view which shows the foil making process by the foil making roller apparatus shown in FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<First Embodiment>

  FIG. 1 shows a foil-making roller inspection device 10 according to a first embodiment of the present invention.

  As shown in FIG. 1, the foil-making roller inspection apparatus 10 mainly includes a copper foil roller 12, an electrolytic cell 14, and an inspection polishing mechanism 20.

  The copper foil roller 12 is, for example, a cylindrical drum in which chrome plating is applied to titanium or stainless steel, and is supported rotatably about a fixed shaft 12C. Since the outer peripheral area of the copper foil roller 12 is related to the area of the copper foil to be manufactured, the diameter of the copper foil roller 12 is often 2 m or more, and its weight may be difficult to move. Therefore, it is desirable that the peripheral device be movable in the contact / separation direction with respect to the copper foil roller 12.

  That is, an electrolytic cell 14 also serving as an anode is supported directly below the copper foil roller 12 by an electrolytic cell vertical mechanism 70 so as to be movable in the vertical direction. The electrolytic cell 14 is made of, for example, a sulfuric acid copper sulfate solution. When the electrolytic solution 18 is filled and the electrolytic cell 14 moves upward by the electrolytic cell vertical mechanism 70, the copper foil roller 12 is immersed in the electrolytic solution 18. The electrolytic cell vertical mechanism 70 may be, for example, a moving stage driven by a motor, or a jack device using a hydraulic mechanism.

  Here, while rotating the copper foil roller 12 as shown by an arrow 12R in the figure, a voltage is applied by a voltage applying means (DC power supply or the like) (not shown) so that the electrolytic cell 14 becomes an anode and the copper foil roller 12 becomes a cathode. Then, copper ions in the electrolytic solution 18 are deposited (electrodeposited) on the surface of the copper foil roller 12. The copper foil 16 is manufactured by winding and peeling the metal copper (electrodeposit) grown to a predetermined thickness by this process from the roller 12 onto a roll or the like. The copper foil 16 produced as shown in FIG. 5 is taken up by a take-up roll 78 and conveyed to the next process.

  The foil-making roller inspection device 10 includes an inspection / polishing mechanism 20, and the inspection / polishing mechanism 20 can be moved in the contact / separation direction with respect to the copper foil roller 12 by a moving means 72. That is, as shown in FIG. 2, the polishing mechanism 30 (polishing roller 34, liquid draining blade 36, etc.), the cleaning mechanism 40 (water draining blade 44, water washing nozzle 52, air knife 54, etc.), and the inspection mechanism constituting the inspection polishing mechanism 20 60 is integrally supported so as to be movable between an inspection position (indicated by a solid line in the figure) near the copper foil roller 12 and a separated retreat position (indicated by a broken wave line in the figure). .

  If the moving means 72 supports the weight of the inspection and polishing mechanism 20 and can stop at a desired position, the moving means 72 can move in the contact / separation direction with respect to the copper foil roller 12 by, for example, a wheel or gear driven by a motor. Or a moving mechanism using a hydraulic mechanism.

  As shown in FIG. 1, the inspection and polishing mechanism 20 is provided with a polishing mechanism 30 on the upstream side in the rotation direction of the copper foil roller 12 (arrow 12R in the figure).

  A polishing mechanism 30 includes a polishing bath 38 for storing a polishing solution 32 in which various types of polishing materials such as aluminum oxide (alumina) and silicon carbide (silicon carbide) are dispersed in a solution, and a polishing solution 32 on the surface. The surface of the copper foil roller 12 is polished by being pressed against the surface of the roller 12 and rotated, a polishing roller 34 for repairing irregularities, and the surface of the copper foil roller 12 is squeezed to prevent dripping of the polishing liquid 32. A cutting blade 36 is provided.

  The structure of the polishing roller 34 is generally a soft roller made of a soft material such as rubber. However, the structure is not limited to this, and a cloth-like polishing sheet and a hard roller having an abrasive fixed on the surface instead of the polishing liquid 32 are used. And may be used in combination.

  The axial length of the polishing roller 34 generally includes a length that covers the axial length of the copper foil roller 12, but the present invention is not limited to this. The surface of the copper foil roller 12 may be polished while moving in the direction of the rotation axis.

  Further, as shown in FIG. 1, a cleaning mechanism 40 is provided adjacent to the polishing mechanism 30 on the downstream side in the rotation direction of the copper foil roller 12.

  The cleaning mechanism 40 includes a water tank 46 that receives the cleaning water 42, a water distribution pipe 47 that drains the water overflowing from the water tank 46, a draining blade 44 that squeezes the surface of the copper foil roller 12 to prevent dripping of the cleaning water 42, copper The surface of the foil roller 12 is washed with water to wash away the polishing liquid 32, the water supply passage 53 for supplying the washing water to the water washing nozzle 52, and the washing water 42 is removed from the surface of the copper foil roller 12 to dry the surface. An air box 54 for supplying air to the air knife 54, and an exhaust box 50 for preventing mist (mist) generated during washing and drying from being diffused into the containment device.

  The cleaning mechanism 40 is generally provided with a length that covers the axial length of the copper foil roller 12 in the same manner as the polishing mechanism 30, but the short cleaning mechanism 40 is not limited to this. The copper foil roller 12 may be used so as to be movable in the direction of the rotation axis, and the surface of the copper foil roller 12 may be cleaned while moving in the direction of the rotation axis.

  Further, as shown in FIG. 1, an inspection mechanism 60 is provided adjacent to the cleaning mechanism 40 on the downstream side in the rotation direction of the copper foil roller 12.

  The inspection mechanism 60 images the surface of the copper foil roller 12 and detects the size and position of the unevenness, a storage device 64 that stores information on the size and position of the unevenness detected by the CCD camera 62, and the storage device Based on the information of 64, a control unit 66 (not shown) for instructing the movement of the inspection and polishing mechanism 20 and the operation of the polishing mechanism 30 and the cleaning mechanism 40 according to the necessity of repair (polishing) and the polishing position, and the CCD camera 62 The illumination device 68 for illuminating the imaging region is provided.

  The inspection mechanism 60 is generally provided with a length that covers the length of the copper foil roller 12 in the axial direction. However, the present invention is not limited to this, and a short CCD camera 62 and illumination device 68 are provided. It may be configured to be used so as to be movable in the direction of the rotation axis of the copper foil roller 12 and to shoot while moving the surface of the copper foil roller 12 in the direction of the rotation axis.

  Further, the foil-making roller inspection apparatus 10 is formed with a common casing 11 that holds the copper foil roller 12, the electrolytic bath 14 (electrolytic bath vertical mechanism 70), and the inspection polishing mechanism 20 (moving means 72). A storage unit 13 formed in the body 11 for storing the inspection polishing mechanism 20 at the standby position and managing the surrounding atmosphere may be provided.

  In this case, the opening of the storage unit 13 is sealed by the shutter 74 when the inspection polishing mechanism 20 is in the standby position, and the shutter 74 is wound by the winding mechanism 76 when the inspection polishing mechanism 20 moves to the inspection position. If it is set as the structure taken, the situation which interferes mutually can be prevented by isolate | separating the atmosphere of the vicinity of the electrolytic vessel 14, and the test | inspection grinding | polishing mechanism 20 inside.

<Inspection and repair>

  In the present embodiment, the moving means 72 moves the inspection and polishing mechanism 20 from the standby position (indicated by a two-dot chain line) to the inspection time position (indicated by a solid line) as shown in FIG. ), The surface of the copper foil roller 12 is photographed by the CCD camera 62 of the inspection mechanism 60, and the inspection of the unevenness is started. At this time, when the inspection and polishing mechanism 20 is moved to the in-focus position of the CCD camera 62 by the moving means 72, it is desirable that the polishing roller 34 does not contact (separate) the surface of the copper foil roller 12. That is, the photographing position of the CCD camera 62 is farther from the surface of the copper foil roller 12 than the polishing position by the polishing mechanism 30 (polishing roller 34), and is closer to the surface of the copper foil roller 12 at the time of polishing.

  As the inspection process, first, the presence or absence and position of the unevenness on the surface of the copper foil roller 12 is detected by the inspection mechanism 60 while rotating the copper foil roller 12, and the shape, size, and location of the detected unevenness are detected. (Axial position, circumferential position) are stored in the storage device 64, and the control unit 66 rotates the inspection polishing mechanism 20, the moving means 72, the electrolytic cell vertical mechanism 70, and the copper foil roller 12 (not shown). Instructions for movement and driving are given to the means.

  The surface unevenness of the copper foil roller 12 by the CCD camera 62 is detected by, for example, illuminating the surface of the copper foil roller 12 uniformly with an LED array provided as an illumination device 68, and by shadows and reflections caused by the presence of the unevenness. A method is conceivable in which brightness and darkness are detected based on the difference in the amount of reflected light and used as size, shape, and position data.

  Since the copper foil roller 12 has a cylindrical shape, the circumferential position of the irregularities can be replaced with the rotational position of the shaft 12C with respect to the inspection mechanism 60 (CCD camera 62). Further, if the CCD camera 62 has taken images over the axial length of the copper foil roller 12, the axial position of the projections and depressions can be directly digitized as a position map in the image. When photographing is performed by moving the copper foil roller 12 in the axial direction, the position coordinates can be obtained by taking into account the axial position of the CCD camera 62.

  Further, the circumferential distance between the CCD camera 62 and the polishing roller 34 on the surface of the copper foil roller 12 is accurately measured in advance, and the irregularities detected by the CDD camera 62 are accompanied by the rotation of the copper foil roller 12. The timing at which the rotational position (of the copper foil roller 12) that faces the polishing roller 34 is reached can be calculated by the control unit 66.

  When the detected irregularities move to the position facing the polishing roller 34 as the copper foil roller 12 rotates, the moving means 72 moves the inspection polishing mechanism 20 from the inspection position to the copper foil roller 12 as described above. The polishing roller 34, the liquid draining blade 36, and the water draining blade 44 are brought into contact with the surface of the copper foil roller 12.

  Alternatively, a moving mechanism may be further provided for the polishing roller 34, the liquid draining blade 36, and the water draining blade 44 (water tank 46) so as to be movable toward and away from the surface of the copper foil roller 12.

  The polishing roller 34 supplied with the polishing liquid 32 from the polishing liquid tank 38 comes into contact with the surface of the copper foil roller 12, and the polishing roller 34 rotates to polish and repair the unevenness. Dust (metal powder) generated at this time is removed from the surface of the copper foil roller 12 by the cleaning mechanism 40 provided on the downstream side.

  Furthermore, by re-photographing the uneven portion after the repair with the inspection mechanism 60 on the downstream side, it is possible to reconfirm whether or not the repair has been correctly performed and the flatness has been secured.

  Next, the contents of the repair work for the concave and convex portions present on the surface of the copper foil roller 12 will be described below.

  As shown in FIG. 3, when the convex part 12A exists on the surface of the copper foil roller 12, the concave part 16A corresponding to the convex part 12A is also formed on the copper foil 16 deposited on the surface. And the strength may be lost.

  From experience, the average size of the convex portion 12A is about 10 to 100 μm as a planar size, and the protruding height is often about 10 μm. Since the thickness of the manufactured copper foil 16 is about several μm, the presence of the convex portion 12A causes a defect in which a hole is formed in the copper foil 16.

  For the above reasons, it is desirable that the polishing roller 34 is polished to a thickness of at least about 10 μm and polished with a weak pushing force in order to polish only the convex portion 12A. As a result, the flat portion extending around the convex portion 12A is hardly polished and the convex portion 12A can be removed, so that a hole defect in the copper foil 16 can be avoided.

  On the other hand, as shown in FIG. 4, when the concave portion 12B exists on the surface of the copper foil roller 12, the convex portion 16B corresponding to the concave portion 12B is also formed on the copper foil 16 deposited on the surface. In addition, the strength around the convex portion 16B may be lost.

  From experience, the average size of the recesses 12B is about 10 to 100 μm as a planar size, and the depth is often about 10 μm. Since the thickness of the copper foil 16 to be manufactured is about several μm, the presence of the convex portion 12A forms a convex portion 16B exceeding the thickness of the copper foil 16, resulting in a defect.

  For the above reason, it is desirable that the polishing roller 34 is polished with a stronger pressing force than when the convex portion 12A is polished in order to polish the thickness of at least about 10 μm and polish the periphery of the concave portion 12B. As a result, the flat portion extending around the concave portion 12B is thinly polished and the concave portion 12B can be removed, so that a defect in which the convex portion 16B is generated in the copper foil 16 can be avoided. Alternatively, the surface of the copper foil roller 12 can be smoothly polished by controlling the amount of pressing (depth) of the polishing roller 34.

  Since the present invention has the above-described configuration, it was possible to provide an inspection apparatus that detects and repairs irregularities on the surface of the foil-making roller easily and with high accuracy.

<Others>

  As mentioned above, although the Example of this invention was described, it cannot be overemphasized that this invention is not limited to said Example at all, and can implement in a various aspect in the range which does not deviate from the summary of this invention.

  For example, in the above-described embodiment, the inspection mechanism 60 including the CCD camera 62 is used. However, the present invention is not limited thereto, and irregularities generated on the surface of the copper foil roller 12 in a non-contact manner such as laser distance measurement means or ultrasonic distance measurement. Any configuration can be used as long as it can be detected.

  Further, instead of the polishing roller 34 containing the polishing liquid 32, a belt type polishing apparatus or the like may be used, and the surface may be polished by slight vibration instead of rotational movement.

  Furthermore, in the above-described embodiment, the entire inspection and polishing mechanism 20 can be moved in the contact / separation direction with respect to the copper foil roller 12 by the moving means 72. However, the polishing mechanism 30, the cleaning mechanism 40, and the inspection mechanism 60 are independently provided. It may be configured to be movable by dedicated moving means. For example, in this case, the inspection mechanism 60 can detect surface contamination of the copper foil roller 12 and the cleaning mechanism 40 can only perform cleaning.

DESCRIPTION OF SYMBOLS 10 Foil-making roller inspection apparatus 11 Case 12 Copper foil roller 12A Convex part 12B Concave part 12C Shaft 13 Storage part 14 Electrolytic tank 15 Anode 16 Copper foil 16A Concave part 16B Convex part 18 Electrolytic solution 20 Inspection polishing mechanism 30 Polishing mechanism (polishing means) )
32 Polishing liquid 34 Polishing roller 36 Liquid draining blade 38 Polishing liquid tank 40 Cleaning mechanism (cleaning means)
42 Washing water 44 Draining blade 46 Water tank 50 Exhaust box 52 Water washing nozzle 54 Air knife 60 Inspection mechanism (inspection means)
62 CCD camera 64 Storage device 66 Control unit 68 Illumination device 70 Electrolyzer vertical mechanism 72 Moving means 74 Shutter 76 Winding mechanism

Claims (5)

A polishing means comprising a polishing roller immersed in an electrolytic bath and contacting the surface of a foil-making roller for depositing copper foil on the surface and polishing with an abrasive, and an abrasive supply unit for supplying the polishing material to the polishing roller When,
Cleaning means for cleaning the surface of the foil-making roller;
Inspection means for inspecting irregularities on the surface of the rotating foil making roller;
Inspection and polishing mechanism with
Control means for determining the necessity of surface polishing of the foil making roller according to the inspection result of the inspection means;
An inspection / repair position for supporting the inspection / polishing mechanism so as to be movable in the contact / separation direction with respect to the foil-making roller, approaching the foil-making roller according to the judgment of the control means, and performing surface unevenness inspection and surface polishing, Moving means for moving between the retreat position to avoid interference with the foil making process away from the foil making roller;
A foil-making roller inspection device characterized by comprising:   The polishing means is a polishing liquid tank for storing a polishing liquid containing an abrasive, a polishing roller for polishing the surface of the foil making roller with the polishing liquid, and a squeeze of the polishing liquid from the surface of the foil making roller. The foil-making roller inspection device according to claim 1, further comprising a liquid draining blade, and provided on the upstream side of the cleaning means and the inspection means in the rotation direction of the foil-making roller.   The cleaning means includes a water washing nozzle that sprays cleaning water onto the surface of the foil making roller, an air knife that blows and removes water from the surface of the foil making roller, and a draining blade that squeezes water from the surface of the foil making roller. An exhaust box that houses the cleaning nozzle and the air knife and prevents the mist from spreading during washing and drying, and downstream of the polishing means in the rotational direction of the foil-making roller, and more than the inspection means. The foil-making roller inspection device according to claim 1, wherein the foil-making roller inspection device is provided on the upstream side in the rotation direction of the foil-making roller.   The inspection means shoots the surface of the rotating foil-making roller, optically detects irregularities from the photographed image, illumination means for illuminating the visual field of the CCD camera, and the image of the CCD camera. Storage means for storing the shape, size and position of irregularities present on the surface of the foil-making roller, and provided on the downstream side in the rotational direction of the foil-making roller with respect to the polishing means and the cleaning means. The foil-making roller inspection device according to any one of claims 1 to 3, wherein   The foil-making roller, the electrolytic cell, the inspection polishing mechanism, and a casing that holds the moving means and shields it from the outside air, a storage unit that stores the inspection polishing mechanism in a standby position inside the casing, and the storage A shutter that seals the opening of the part, and an electrolytic cell up-and-down means that moves the electrolytic cell up and down to move the foil-making roller to a position where it is immersed in an electrolytic solution and a retracted position. The foil-making roller test | inspection apparatus of any one of Claims 1-4.

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