TWM519551U - Circulating vortex water device for preventing dust - Google Patents

Description

Dust-proof circulating vortex water equipment

The utility model provides an anti-dust circulation vortex water device, in particular to a dust-proof circulating vortex water device which directly prevents dust from adhering to a pipe wall by using an annular vortex.

According to the production process of semiconductor fabs, photovoltaic power plants and other products, harmful exhaust gases are usually generated. In the case of a semiconductor fab, the diffusion and deposition processes require the application of a large amount of reactive gas, but only a part of these gases react with the wafer, and most of the other gas is formed. The main component of these exhaust gases is monodecane (SiH ₄ ). , such as dichlorosilane (SiH ₂ Cl ₂ ), nitrogen trifluoride (NF ₃ ), chlorine (Cl ₂ ) or perfluoro-compounds (PFC), which cannot be directly discharged due to the highly toxic gases The exhaust gas must be sent to an exhaust gas treatment device to remove its toxicity to meet industrial exhaust emission standards to avoid environmental pollution.

However, in the process of exhaust gas treatment, the means of decomposing harmful substances by means of heat radiation or purifying exhaust gas by flame combustion is very common, but it is also easy to leave or attach dust particles in the main road, so it is common to set a scraper group on the main road. To scrape the attached dust particles and then discharge them. The heating source of the exhaust gas treatment device that needs to do this is outside the tube, so that the tube wall temperature is higher than the pipe and easy to adhere to the pipe wall, and only rely on the scraper and the scraped water flow to solve the problem, but the palliative is not a cure. A slow and unhelpful way.

Therefore, how to solve the problem and lack of exhaust gas treatment equipment, and even directly prevent the residual and adhesion of dust particles, is the direction of the applicants and related manufacturers engaged in this industry.

Therefore, in view of the above-mentioned shortcomings, the applicants of this new type have collected relevant information, and through multi-party evaluation and consideration, and through years of experience in the industry, through continuous trial and modification, they have designed this kind of use of circular eddy current directly. A new patent holder for dust-proof circulating vortex water equipment that prevents dust from adhering to the pipe wall.

The main purpose of the novel is to avoid dust adhesion directly at the first time of dust generation by using annular vortex circulation on the pipe wall, thereby improving exhaust gas treatment effect, increasing equipment life, and prolonging equipment cleaning time interval.

Another main purpose of the present invention is to form an annular vortex on the wall surface of the heating conduction zone so that the water and fire coexist and do not interfere with each other.

In order to achieve the above object, the structure of the present invention comprises: at least one air inlet for introducing the exhaust gas, and the air inlet is connected to a heating conduction region to cause the exhaust gas to separate the dust in the heating conduction region, and in the heating conduction region a vortex wall is disposed therein, and at least one water injection port located at the side of the air inlet is disposed on the vortex wall, and an annular vortex is generated on the vortex wall to prevent dust from adhering to the vortex wall, and finally The heating conduction zone is connected to an output port for the flow of the dust-laden water; when the user introduces the exhaust gas from the air inlet into the heating conduction zone, the chemical reaction occurs due to the high temperature environment of the exhaust gas, and the dust particles are separated. Before contacting the vortex wall, it will first contact the high-speed water stream emitted from the water injection port, and the water flow system circulates around the vortex wall to completely block the chance of dust particles adhering to the wall surface, and directly take the dust particles out of the output. The mouth is closed to the vortex wall by the annular eddy current system, and does not interfere with the heat source of the heating conduction zone, thereby improving the exhaust gas treatment effect.

According to the above technique, it is possible to achieve breakthroughs in the problem that the wall of the conventional exhaust gas treatment device is likely to adhere to dust particles, the dust must be removed by the scraping action, and the exhaust gas treatment effect is poor, thereby achieving the practical progress of the above advantages.

1‧‧‧air inlet

2, 2a‧‧‧heating conduction zone

21, 21a‧‧‧ heating device

3‧‧‧ vortex wall

4, 4b‧‧‧ water inlet

42b‧‧‧Nitrogen port

5, 5a‧‧‧ output

The first figure is a schematic view of the structure of the preferred embodiment of the present invention.

The second diagram is a schematic diagram of the action of the preferred embodiment of the present invention (1).

The third figure is a schematic diagram of the action of the preferred embodiment of the present invention (2).

The fourth diagram is a diagram showing the state of use of the preferred embodiment of the present invention.

The fifth figure is a schematic diagram of the implementation of still another embodiment of the present invention.

Figure 6 is a schematic view showing the implementation of still another embodiment of the present invention.

In order to achieve the above objects and effects, the technical means and structure adopted by the present invention are described in detail in the preferred embodiment of the present invention, and the features and functions thereof are as follows.

Please refer to the first figure, which is a schematic structural view of a preferred embodiment of the present invention. It can be clearly seen from the figure that the novel system includes at least one air inlet 1 for introducing exhaust gas and one communicating with the air inlet. The heating conduction zone 2 of the first embodiment causes the exhaust gas to be separated from the dust. The heating conduction zone 2 includes a pair of heating devices 21 heated centrally by the vortex wall 3 for isolating the dust in the exhaust gas, and the heating device 21 Heating by one of flame combustion, electric heating or plasma heating; a vortex wall 3 disposed in the heating conduction zone 2; at least one disposed on the vortex wall 3 and located at the side of the inlet 1 a water injection port 4, and the water injection port 4 is obliquely disposed on the vortex wall 3 to generate an annular vortex on the vortex wall 3 to prevent dust from adhering to the vortex wall 3, and the water injection port 4 side A pressurizing device (not shown) is provided for enhancing the injection water pressure; and an output port 5 communicating with the heating conducting zone 2 is provided for the flow of water entrained with dust.

According to the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the advantage of directly preventing the dust from adhering to the pipe wall by the annular vortex can be achieved, and the detailed explanation will be described below.

Please refer to the first to fourth figures at the same time, which is a schematic structural diagram, an operation schematic diagram (1), an operation schematic diagram (2) and a usage state diagram of the preferred embodiment of the present invention. It can be clearly seen from the figure that the present invention is a partial device on the main road in the exhaust gas treatment device, mainly for heating the exhaust gas, and using the annular vortex to prevent the dust particles isolated from the exhaust gas from adhering to the pipe wall. Avoid reducing the exhaust gas treatment effect or the life of the exhaust gas treatment device.

In actual operation, the exhaust gas is guided from the air inlet 1 into the heating conduction zone 2, and the heating conduction zone 2 has a heating device 21 disposed on the side of the air inlet 1 (this embodiment is a flame burning) By heating in a manner, but not limited thereto, the heating device 21 heats the center of the vortex wall 3 to isolate dust particles in the exhaust gas, and the toxic substances in the exhaust gas cannot be completely processed by filtration. It must be treated by thermal decomposition or water solubility. For example, carbon tetrafluoride (CF ₄ , also known as tetrafluoromethane) entrained in exhaust gas contains toxic F ₂ because CF bonds can be as high as 515 kJ.mol-1, like other fluorohydrocarbons. Very stable, so it does not react with acids and hydroxides. By thermal decomposition, it produces highly toxic gases such as carbon fluorinated carbon (COF) and carbon monoxide (CO). If water is present, it is soluble in water to produce hydrogen fluoride (HF). ).

Therefore, when the heating device 21 separates the dust particles in the exhaust gas, or the exhaust gas itself is entrained with dust particles, it generally adheres to the inner wall of the main pipe, but the present invention uses a pressurizing device to spray the water from the water injection port 4, The water flows on the vortex wall 3 to form an annular vortex, and because the water flow is circulated around the vortex wall 3 at a high speed, the dust particles cannot directly contact the wall surface, and some dust particles are dissolved in the water, or other dust particles are allowed to flow. Take out the output port 5. Furthermore, the heating device 21 heats the center of the vortex wall 3, and the water flow flows on the vortex wall 3. The water does not evaporate due to the high temperature, and the fire does not extinguish due to the water flow. Therefore, the design does not interfere with each other. The exhaust gas treatment effect is better, and the anti-dust effect of the annular vortex water is matched, the cleaning time interval of the exhaust gas treatment equipment is prolonged, the shutdown probability caused by the cleaning of the exhaust gas treatment equipment of the mainframe is reduced, and the downtime of the mainframe is shortened. It can further extend the life of the new model and even the life of the entire exhaust gas treatment equipment.

Please refer to the fifth embodiment at the same time, which is a schematic diagram of the implementation of the further embodiment of the present invention. It can be clearly seen from the figure that the embodiment is similar to the above embodiment, and only the setting position of the heating device 21a is changed. On the side of the output port 5a, at this time, the heating conduction zone 2a can also obtain the high temperature for separating the exhaust gas through the heat convection, and the exhaust gas which has not been processed in the heating conduction zone 2a can be concentrated and heated therein. The vortex still surrounds the periphery of the heating device 21a. Accordingly, in addition to preventing the adhesion of dust particles, the exhaust gas treatment effect is further enhanced.

Please also refer to the sixth figure, which is a schematic diagram of another embodiment of the present invention. It can be clearly seen from the figure that the embodiment has a nitrogen port 42b on the side of the water injection port 4b, which avoids The dust particles float to the water injection port 4b before coming into contact with the annular vortex, and the water injection port 4b is blocked for a long time. Therefore, the nitrogen gas output from the nitrogen gas port 42b is used to prevent the dust particles from adhering to the water injection port 4b.

However, the above description is only the preferred embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, all the simple modifications and equivalent structural changes that are made by using the present specification and the drawings are the same. It is included in the scope of this new patent and is given to Chen Ming.

Therefore, please refer to all the drawings, when the new model is used, compared with the conventional technology, it is actually Column advantages:

First, in the first time of dust generation, that is, using the annular vortex circulation on the pipe wall to flush, directly avoid dust adhesion, improve the exhaust gas treatment effect, increase the life of the equipment, and prolong the time interval of equipment cleaning.

Second, the annular eddy current is formed on the wall surface of the heating conduction zone 2, so that the water and fire coexist and do not interfere with each other.

In summary, the dust prevention circulating vortex water device of the present invention can achieve its efficacy and purpose when used, so the novel is a new type of application with excellent practicability, which is in accordance with the requirements of the new patent application. To apply, I hope that the trial committee will grant this new type as soon as possible to protect the applicant's hard work. If there is any doubt in the trial committee, please do not hesitate to give instructions, the creator will try his best to cooperate and feel good.

1‧‧‧air inlet

2‧‧‧heating conduction zone

21‧‧‧ heating device

3‧‧‧ vortex wall

4‧‧‧Water inlet

5‧‧‧Outlet

Claims (9)

A dust-proof circulating vortex water device comprising: at least one air inlet for introducing an exhaust gas; a heating conduction region communicating with the air inlet for separating the dust from the exhaust gas; and being disposed in the heating conduction region a vortex wall; at least one water injection port disposed on the vortex wall and located at the side of the air inlet, generating an annular vortex on the vortex wall to prevent dust from adhering to the vortex wall; and communicating with the heating The outlet of the zone is for the flow of water with entrained dust. The dust-proof circulating vortex water device of claim 1, wherein the water injection port side has a nitrogen gas port for introducing nitrogen gas. The dust-proof circulating vortex water device according to claim 1, wherein the water injection port side has a pressing device for enhancing the injection water pressure. The dust-proof circulating vortex water device of claim 1, wherein the water injection port is obliquely disposed on the vortex wall. The anti-dust cycle vortex water device of claim 1, wherein the heating conduction zone comprises a pair of heating devices centrally heated by the vortex wall for isolating dust in the exhaust gas. The dust-proof circulating vortex water device of claim 5, wherein the annular vortex is surrounded by a fire source generated by the heating device without contacting. The dust-proof circulating vortex water device of claim 5, wherein the heating device is disposed on a side of the air inlet. The dust-proof circulating vortex water device of claim 5, wherein the heating device is disposed on one side of the outlet. The dust-proof circulating vortex water device of claim 5, wherein the heating device is heated by one of flame combustion, electric heating or plasma heating.