1279170 九、發明說明： 【發明之技術領域】 本發明係有關多火炬多快速接頭之模組化電肢應裝置，特 別是，本發明提出K炬多快速接頭電聚反應裝置，其使用多 ^ 火炬日林僅可迅速更換其巾—火炬，亦可讓«反應裝置不 ^ 受更換作業干擾，保持正常運行。 【先前技術】 % 在半導體製私中’腐姓氣體常被應用於敍刻晶片上所沉積的薄 膜’但隨順在製程巾常使用的化學物f及其製程巾產生的副產物 皆為有害環境、有害工作人員。因此，處理製程後所產生的廢氣，使 其形成可溶於水的產物婦處理或是粉末不錄直錄逸於空氣中危 害％境及工作人員。其中，過氟化物(perflu⑽—_pQunds ; pFC)於 半導體工業製&巾應用廣泛，但其具有極長之生命期能可停留在大氣 層中相當長時間。對於過氟化物目前所知的是全球溫暖化潛勢指數值 # (Global Warming Potential or GWP)高過二氧化碳千倍。如何在製 程中使用過氟化物過後，在廠務端將剩餘的過氟化物氣體處理掉，以 免過氟化物散逸至空氣中是半導體工業製程中重要的課題。尤其在 1992年6月計有123個國家的代表在巴西里約共同簽署「氣候變化綱要 公約」，針對全球溫室效應問題進行有關的管制與規範，以避免大氣系 統繼續遭受破壞，危及生態環境。受公約管制之人為溫室氣體排放包 括六種/類：1.二氧化碳(COO、2·甲烷(CH0、3·氧化亞氮(腿）、4·氫 氟碳化物（HFCs)、5.全氟化碳(PFCs)、6.六氟化硫(证6)。 1279170 其處理過氟化物方法中，有使用化學過濾、器（chemical filter)使 廢氣吸附於過翻上，也有使用吸純的物質先將賴吸附後再進行 燃燒以轉換成對環境無害的產物，但此些方法的花費過高。其中，氧 化法結合水洗方式來處理廢氣，此廢氣處理方式具有花費便 宜，且方便系統維護之優點。此法亦是目前最廣為半導體高科 技廠商使用。氧化法結合水洗方式也就是利用高溫（火焰燃燒、 熱電耦或電锻方式加熱氣體）使氣體達到氧化所需的溫度，形 成較沒有危害性或可處理之廢氣、固體顆粒或水溶性廢氣後， 再讓廢氣產物通過水槽。如此，水溶性廢氣便可溶於水中，加 水來洗·：廢氣。 其流程如圖一所示，在一個密閉式的電漿反應器（plasma react〇r) 中，用感應偶合、平行板電極偶合、電桿或微波方式產生高熱電漿。 引入過氟化物於密閉的反應器中，反應器中含有些許的水氣和氧氣之 在電漿的環境下產生離子化反應而裂解形成較無害的產物如二氧化矽 (Si〇2)和氟化氫（冊）等之產物。其反應方程式如下·· C2F6 + 4 H2O —> 6 HF + 2 CO2 + H2 S1H4 + 2〇2 ---> S1O2 + 2 H2O CF4 + 2H2O ---> 4HF+ C〇2 CHFs + 2 H2O ---> 3 HF + C〇2 + H21279170 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a modular electric limb device for a multi-torch multi-fast connector. In particular, the present invention proposes a K-jux multi-fast connector electro-polymerization device, which is used in many cases. Torch Rilin can only change its towel-torch quickly, and it can also make the reaction device not interfere with the replacement operation and keep it running normally. [Prior Art] % In the semiconductor manufacturing industry, the 'sulphur gas is often used to describe the film deposited on the wafer', but the chemicals produced by the process towel and the by-products produced by the process towel are harmful environments. Harmful staff. Therefore, the exhaust gas generated after the treatment process is treated to form a water-soluble product, or the powder is not recorded in the air and is in danger of being exposed to the air. Among them, perfluoride (perflu(10)-_pQunds; pFC) is widely used in semiconductor industry & towel, but it has a very long life and can stay in the atmosphere for a long time. What is currently known for perfluorinated substances is that the Global Warming Potential or GWP is thousands of times higher than carbon dioxide. How to treat the remaining perfluorinated gas at the factory end after using the perfluoric acid in the process to avoid the escape of fluoride into the air is an important issue in the semiconductor industry. In particular, in June 1992, representatives of 123 countries signed the “Climate Change Framework Convention” in Rio, Brazil, to regulate and regulate the global greenhouse effect to avoid the destruction of the atmospheric system and endanger the ecological environment. The greenhouse gas emissions controlled by the Convention include six categories/classes: 1. Carbon dioxide (COO, 2. methane (CH0, 3. Nitrous oxide (legs), 4. Hydrofluorocarbons (HFCs), 5. Perfluorinated Carbon (PFCs), 6. Hexafluoride hexafluoride (Certificate 6) 1279170 In the method of treating fluoride, there is a chemical filter to adsorb the exhaust gas over the overturn, and also to use the substance that is pure. The adsorption is carried out and then burned to be converted into an environmentally harmless product, but the cost of such methods is too high. Among them, the oxidation method combines with the water washing method to treat the exhaust gas, and the exhaust gas treatment method has the advantages of being inexpensive and convenient for system maintenance. This method is also the most widely used by semiconductor high-tech manufacturers. The oxidation method combined with the water washing method is to use the high temperature (flame combustion, thermocouple or electric forging method to heat the gas) to make the gas reach the temperature required for oxidation, forming no harm. After the exhaust gas, solid particles or water-soluble waste gas can be treated, the waste gas product can be passed through the water tank. Thus, the water-soluble waste gas can be dissolved in water, and water is added to wash the exhaust gas. It is shown that in a closed plasma reactor, a high thermal plasma is generated by inductive coupling, parallel plate electrode coupling, electric pole or microwave. Introducing perfluoride in a closed reactor, reaction The device contains a small amount of water vapor and oxygen to produce an ionization reaction in the plasma environment and cracks to form products of less harmful products such as cerium oxide (Si〇2) and hydrogen fluoride (volume). The reaction equation is as follows: · C2F6 + 4 H2O —> 6 HF + 2 CO2 + H2 S1H4 + 2〇2 ---> S1O2 + 2 H2O CF4 + 2H2O ---> 4HF+ C〇2 CHFs + 2 H2O ---> 3 HF + C〇2 + H2
2H2 +〇2 ->2 H2O 接著，反應器尾端連接一洗滌槽，讓反應完後的廢氣通過一洗滌 6 Ϊ279170 J欠槽）’如此㈣降溫廢氣的反應產物巾水溶性的廢氣產物會溶於 =槽中。反應完後的廢氣中在經過水槽洗務後仍含有固態的 物4又；在水槽後連接著洗膝塔讓剩餘的廢氣通過， 做再一次的過濾動作，將固態廢氣產物濾除。 此洗胁内部填有向表面積填充物，廢氣產物在經過此洗務塔 時’其夾帶之固體物，例如，含養末等，可以被洗淨滤除，同時可 再-次氟化氫吸收水雜的航產魏體。如此通過麟塔後的廢氣 僅含少量水氣並連接至尾氣處理管線。 至於水槽中的含氟廢水可由廢水處理場統一處理之，水槽之儲水 可做批次排放或連續排放至廢水處理場即可。 如月ίΐ文所述的氧化法結合水洗方式的缺點在於反應器本身的 使用壽命短及更換反應器的維護時間長。因為在反應器中廢氣在 進行離子化的過程中會形成粉末狀的二氧切，舰前所述的設計中 二氧切會在洗祕帽除，但有部分的二氧化⑦在反應器中離子化 後會直接沉積在反應器的管壁上，因而降低反應器本身的壽命、需提 則更換反應H。本氧化結合水洗方法中，第—步财廢氣完全離子化 效能是極為重要的一環，因此，電漿火炬安裝的位置益發重要，一般 在安裝反應器時所花在校準電漿火炬位置佔安裝時間的75%以上。 半導體工業為求降低生產成本，一般而言，製程的生產時間皆為 24小時不間斷以提供最佳的產能利用率。停止生產時間用來更換反應 器對生產廠商而言皆是增加生產成本的動作。本發明提供一反應器設 7 1279170 計用以增加反應器本身的壽命，並縮短更換反應器的時間，用以解決 上述問題。 本發明之主要目的在於提出一模組化電漿反應裝置，使電漿火炬 以垂直於上反應腔腔壁方式固定，使高溫氣流在進行將廢氣離子化的 過程中，一方面可洗刷反應器内壁，將原本附著在反應腔内壁的固體 小分子清除。 【發明内容】 本發明之主要目的在於提出一模組化電漿反應裝置，使電漿火炬 以垂直於上反應腔腔壁方式固定，使高溫氣流在進行將廢氣離子化的 過轾中，一方面可洗刷反應器内壁，將原本附著在反應腔内壁的固體 小分子清除。 本發明之另一目的在於提出一模組化電漿反應裝置，其數個電漿 火炬間以對稱方式排列，提供_均勻之高溫反鱗境，使離子化效率 達至最佳。 本發明之又-目的在於提出—模組化錄反應裝置，可藉一鎖環 快速連接電漿火炬與上反應腔，不需進行鮮動作即可使電聚火炬^ 生的高熱氣流置中流進反應器中。 本發明之再-目的在於提出—模組化電狀應農置，藉啟動—關 斷裝置切斷-電狀炬與上反應腔之連接後，可快速解_環進行電 漿火炬之組裝、更換、維修，此時其他電漿火炬仍可繼續運作 ^ 而 1279170 本發明之另-目的在於提出—化賴反練置，其複數個電 聚火炬、上反應腔、下反舰、冰水器、水槽、_、冷卻盤管、 風車間皆以鎖環方式快速進行連接，亦可快速解除連接。相以傳 統螺絲微之連接方式，可大量節省㈣、更換、維修之人工與時2H2 +〇2 ->2 H2O Next, the tail end of the reactor is connected to a washing tank, and the exhaust gas after the reaction is passed through a washing tank of 6 Ϊ 279,170 J. The water-soluble exhaust gas product of the reaction product of the exhaust gas is cooled. Dissolved in the = tank. After the reaction, the exhaust gas still contains the solid matter 4 after being washed by the water tank; after the water tank, the knee-washing tower is connected to allow the remaining exhaust gas to pass through, and another filtering operation is performed to filter out the solid waste gas product. The inside of the waist is filled with a surface area filler, and the exhausted product is 'entrained solids when passing through the washing tower, for example, containing nutrients, etc., can be washed and filtered, and at the same time, the hydrogen fluoride can be absorbed again. The aviation production of the body. The exhaust gas after passing through the lining tower contains only a small amount of water and is connected to the exhaust gas treatment line. As for the fluorine-containing waste water in the water tank, it can be uniformly treated by the wastewater treatment plant, and the water storage of the water tank can be batch discharged or continuously discharged to the wastewater treatment plant. The disadvantages of the oxidation process combined with the water washing method as described in the month of the article are that the reactor itself has a short service life and a long maintenance time for the replacement of the reactor. Because the exhaust gas in the reactor will form a powdery dioxo prior to ionization, the design described in the ship will be removed in the scrub cap, but some of the dioxide dioxide will be in the reactor. After ionization, it will deposit directly on the tube wall of the reactor, thus reducing the life of the reactor itself and requiring replacement of the reaction H. In this oxidation combined with water washing method, the complete ionization efficiency of the first step is an extremely important part. Therefore, the position of the plasma torch installation is important, and the calibration time is usually taken when the reactor is installed. More than 75%. In order to reduce production costs, the semiconductor industry generally produces 24 hours of continuous production to provide optimal capacity utilization. Stopping production time to replace the reactor is an increase in production costs for the manufacturer. The present invention provides a reactor set 7 1279170 for increasing the life of the reactor itself and shortening the time required to replace the reactor to solve the above problems. The main object of the present invention is to provide a modular plasma reaction device for fixing the plasma torch in a manner perpendicular to the wall of the upper reaction chamber, so that the high temperature gas stream can be used in the process of ionizing the exhaust gas, and the reactor can be washed on the one hand. The inner wall removes solid small molecules originally attached to the inner wall of the reaction chamber. SUMMARY OF THE INVENTION The main object of the present invention is to provide a modular plasma reactor that allows the plasma torch to be fixed perpendicular to the wall of the upper reaction chamber, so that the high temperature gas stream is in the process of ionizing the exhaust gas. In the aspect, the inner wall of the reactor can be washed to remove solid small molecules originally attached to the inner wall of the reaction chamber. Another object of the present invention is to provide a modular plasma reactor in which a plurality of plasma torches are arranged in a symmetrical manner to provide a uniform high temperature anti-scale to optimize ionization efficiency. The invention further aims to provide a modular recording reaction device, which can quickly connect the plasma torch and the upper reaction chamber by a lock ring, so that the high-heat air flow generated by the electric gathering torch can be placed in the middle flow without performing fresh action. Into the reactor. A further object of the present invention is to provide a modular electrical configuration, which can be quickly assembled to the assembly of the plasma torch after the connection between the electric torch and the upper reaction chamber by the start-stop device. Replacement and maintenance, at this time, other plasma torches can continue to operate ^ and 1279170 Another object of the present invention is to propose a chemistry-resolving set, a plurality of electric gathering torches, an upper reaction chamber, a lower anti-ship, and an ice water heater. The sink, _, cooling coil, and wind workshop are all connected in a quick-locking manner, and can be quickly disconnected. Compared with the traditional screw connection method, it can save a lot of money (4), replacement, maintenance labor and time
本發明係制下列步驟來達到上述之各項目的：首先，廢氣與電 躁火炬進人反應腔’ _餘解，其魏在反應财因錄提供高能 量瞬間被熱解形成廢氣產物（氣體分子和固體小分子）。由於電梁火炬 與上反應㈣賴直，如此，電漿產生之高熱紐速度撕生之力垂 直於上反應腔腔壁方式進人反應腔。難生的驗可洗撕述反應器 内壁’將_在所述反應如壁的所述隨小分子清除。而後，氣體 刀子✓谷入水槽。濕式吸附J：合處理剩餘之所述氣態分子和固體小分子。 廢氣產物在經過此一濕式洗滌塔時，其夾帶之固體物，例如，含矽粉 末等，可以被洗淨濾除，同時氟化氫在此也被吸收，剩餘的廢氣產物 中僅剩無害的氣體可通至尾氣處理管線，其中為快速固定電漿火炬於 上反應腔的位置並使該電疲火炬可置中產生高熱氣流，本發明以鎖環 方式固定電漿火炬於該上反應腔腔壁。 【實施方式】 本發明可運用在工廠為處理全氟化物（PFC)之廢氣時，提供一反 應器設計用以增加反應器本身的壽命，並縮短更換反應器的時間。本 發明的電漿火炬所處的位置可使引入氣體形成氣流用以清洗在燃燒全 1279170 氟化物（PFC)過程中會附著於反應腔内壁之產物。 本發明模組化電漿反應裝置焚化處理方法與一般廢氣燃燒爐焚化 處理雷同，係先引入廢氣與電漿直接混合，再進入反應腔内處理，引 入一濕式洗滌塔處理後予以排放，且此一濕式洗滌塔之循環用水設有 一水槽供應之。為解決反應腔中二氧化矽沉積於管壁的問題，如圖二 所不’本發明的反應器巾其電漿火炬所在的位置可使引人氣體形成氣 /’il用以/月洗在燃燒PFC過程中會附著於反應腔内壁之產物之固體小分 子(Si〇2)。本發_重點在於反應器本身，·實施射也僅詳細敎述 模組化電漿處理裝置的運作及其結構，在其運作方式如下： 反應器10包括廢氣進口卜電漿火炬2、一上反應腔3和一下反 應腔4 ’其巾上反應腔3和下反應腔4内部係以耐火斷麟料構築而 成’在魏火炬2加熱下，可形成高溫環境者。毒性氣體廢氣由廢氣 進口 1進人上反應腔3，通過電敎炬2之極高溫錄核，毒性氣體 廢氣在上反應腔3及下反應腔4中，因電騎提供之高熱，廢氣瞬間 «解、原子化或離子化’其化學_而被瓦解摧毀，形成一些簡單 易於處理的分子或原子域、—氧化碳、二氧化碳和氟彳_，並產 生易吸附於瞻表面之固體小分子如二氧化轉含碎粉末。 本發明的電敎炬2可騎個或複數個。若反應器1Q之電聚火炬 2為單個時’其電|火炬2與上反應腔3腔麵直，倘若火炬2 為複數個N· ’其電敎炬2之間彼此所轉之肖度相同且賴稱排列， 使反應器10内部達到均勻的高溫環境。 1279170 詳細的說：當兩個電漿火炬2、2a時，其電漿火炬2、2a之間相 距180度，三個電漿火炬時，其電漿火炬2之間相距120度，其他以 此類推。電漿火炬2、2a位置使電漿產生之高熱氣體進入反應器1〇中， 藉由其引入高熱氣體的速度場所生之力洗刷反應器及其隨後通道之内 壁。如此，在燃燒的過程中，可一邊清除之前反應過程中吸附在内腔 表面之固體分子，增加反應器10的使用壽命。為了使反應器10形成 均勻的高溫環境，產生最有效率的離子化。為使洗刷反應器10的效果 達到最佳，電漿火炬2和2a會與上反應腔3之腔壁成垂直。但當電漿 火炬2以對稱排列並同時與上反應腔3腔壁、下反應腔4腔壁垂直時(如 僅偶數個電漿火炬在對稱排列的狀況下，如圖二所示，兩個電漿火炬2 和2a彼此的電漿火炬位於對面），電漿火炬2、2a所產生的高熱氣體 會彼此對衝。如此的高熱氣體對衝，降低了利用高熱氣體的速度場所 生之力洗刷反應器10及其隨後通道之内壁的功效。 如圖三所示，此時，本發明模組化電漿反應裝置為達到均勻高溫 的反應環境及刷洗反應器10内壁等功效，其電漿火炬5和5a可位於 上反應腔3上其他的位置仍與上反應腔3成垂直，使高熱氣體的速度 場所生之力不與下反應腔4成垂直狀態，而與下反應腔4腔壁成10〜95 度。如此，在燃燒的過程中，可一邊清除之前反應過程中吸附在内腔 表面之固體分子，增加反應器10的使用壽命。 為使電漿火炬2、2a、5、5a產生的高熱氣體完全進入反應器1〇 中達到最均勻且咼溫環境，使有毒氣體離子化的效能達至最高，其電 11 1279170 及火炬2、2a、5、5a除了與上反應腔3成垂直進入外，電漿火炬2、 2a 5、5a本身亦要進行校準(aHgnment)動作。實際製作過程中，如 圖四所不’上反應腔3腔體上會有電漿火炬入口⑽使高熱氣體由電 &火炬入口 120之正中心122進人’而入口 12G的其他空間充填著防 火斷熱材料121。其校準卫作若有不確實之處，大部分的高熱氣體不會 直接進入上反應腔3之巾，而會直麟向防火斷騎料121，除了降低 毒性氣體離子㈣效能，亦減少反應器1G本身的使用壽命。 其杈準動作為了讓高熱氣體集中從電漿火炬2的中心完全進入上 反應腔3中，而不會逸散至防火斷熱材料121降低高熱氣體速度場所 生的力。-般使用螺絲固定電裝火炬2，由於使用螺絲鎖緊時，難以精 確固定每個螺絲賴定深度，如此，賴火炬2中心位置會有些偏離， 需花大量咖火炬2真正置中。因此，麵行裝設新的毒性氣 體裝置或更換反應ϋ 1G時，往往花在校準賴火矩2的角度及方位需 3〜4小時。 本發明實施例取代以往使明絲固定電敎炬2的位置，改採用 鎖環20之配備加速鮮電敎炬2的位置，其安裝時間僅需^小時。 如圖五所示，其舰24包含有—個鎖22和三個或多個環節21設計； 所用來固定鎖環大小，多個環節21設計使鎖環能與電裝火炬2之形狀 相符合，本發财施财的電t火炬2為餘，因此，本實施例鎖環 24的設計亦為_。此鎖環24的設計隨順錄火炬2的外觀而變，以 符合«火炬2為宗旨。此外，為固定電社炬2與上反應腔3之相 12 1279170 對位置’如圖六所示，鎖環25設計成内凹模式23直接箝制住電漿火 炬2於上反應腔3上。當使用鎖環25扣緊電漿火炬2，不需做任何校 準動作電漿火炬2所產生的高熱氣體自然置中。 圖七係本發明模組化電漿反應裝置示意圖，圖中之箭頭表示毒性 氣體處理中之移動方向。如圖七所示，本發明模組化電漿反應裝置中， 複數個電漿火炬12之接頭i2a係與上反應腔13之複數個第一接頭13a 分別相容，藉一鎖環20，即可快速地將電漿火炬12與上反應腔13進 行連接，不需進行校準動作即可使電漿火炬12產生的高熱氣流置中流 進反應器中；亦可快速地將電漿火炬12與上反應腔13解除連接。相 較於以傳賴_定之連接方^，本發賴組傾漿反應裝置可大量 節省組裝、更換、維修之人工與時間。此外，維修時間愈短代表產 生微塵（particles) _寺間愈短，即愈能符合高科技產業之無塵標 準。 其次’上反應腔13之第二接頭13b亦與下反應腔14之第一接頭 14a相容’藉-鎖環3〇，即可快速將上反應腔13與下反應腔Μ進行 連接(上反應腔13與下反應腔14亦可組成一反應器而不需以鎖環3〇 連接）。同樣道理，下反應腔14之第二接頭施與冰水器15之第一接 頭⑸相容’藉-鎖環4〇，即可快速將下反應腔14與冰水器Μ進" 連接；冰水器15之第二接頭15b與水槽16之第—接頭服相容^ -鎖環50 ’即可快速將冰水器15與水槽16進行連接；水㈣之第: 接頭他與議π之第—接頭17a相容，藉_鎖額，即可快轉 13 1279170 ’灑水器17之第二接頭17b與冷卻盤管The invention adopts the following steps to achieve the above-mentioned items: First, the exhaust gas and the electric torch enter the reaction chamber ' _ residual solution, and the Wei is pyrolyzed to form an exhaust gas product (gas molecule) in response to the high energy supply of the resource. And solid small molecules). Because the electric beam torch and the upper reaction (4) are straight, the force of the high heat of the plasma generated by the plasma is perpendicular to the upper reaction cavity wall and enters the reaction cavity. Difficult to test washable tear the inner wall of the reactor to remove the small molecules in the reaction such as the wall. Then, the gas knife ✓ Valley into the sink. Wet adsorption J: The remaining gaseous molecules and solid small molecules are processed together. When the exhaust gas product passes through the wet scrubber, the entrained solids, for example, cerium-containing powder, can be washed and filtered, and the hydrogen fluoride is also absorbed therein, and only the harmless gas remains in the remaining exhaust gas products. The utility model can be passed to an exhaust gas treatment pipeline, wherein a position of the plasma torch in the upper reaction chamber is quickly fixed and the electric fatigue torch can be placed to generate a high hot air flow, and the invention fixes the plasma torch to the upper reaction cavity wall by a lock ring method. . [Embodiment] The present invention can be applied to a reactor for treating perfluorinated (PFC) exhaust gas, and a reactor design is provided to increase the life of the reactor itself and shorten the time for replacing the reactor. The plasma torch of the present invention is positioned such that the incoming gas forms a gas stream for cleaning the product that will adhere to the inner wall of the reaction chamber during the combustion of all 1279170 fluoride (PFC). The incineration treatment method of the modular plasma reaction device of the invention is similar to the general incineration treatment of the exhaust gas combustion furnace, and the first introduction of the exhaust gas and the plasma is directly mixed, and then enters the reaction chamber for treatment, and is introduced into a wet scrubber to be discharged, and The circulating water of the wet scrubber is supplied with a water tank. In order to solve the problem that the cerium oxide is deposited on the pipe wall in the reaction chamber, as shown in FIG. 2, the position of the plasma torch of the reactor towel of the present invention can cause the gas to be formed into gas/'il for/month washing. A solid small molecule (Si〇2) that will adhere to the product of the inner wall of the reaction chamber during the combustion of the PFC. This issue _ focus on the reactor itself, · implementation of the shot is only a detailed description of the operation of the modular plasma processing device and its structure, in its operation as follows: The reactor 10 includes the exhaust gas inlet slurry torch 2 The reaction chamber 3 and the lower reaction chamber 4' are formed by the fire-resistant breaking material in the reaction chamber 3 and the lower reaction chamber 4 of the towel. The heat chamber can be heated under the heating of the Wei torch 2 to form a high temperature environment. The toxic gas exhaust gas enters the reaction chamber 3 from the exhaust gas inlet 1 and passes through the extremely high temperature recording of the electric torch 2. The toxic gas exhaust gas is in the upper reaction chamber 3 and the lower reaction chamber 4, and the exhaust gas is instantaneous due to the high heat provided by the electric ride. Solution, atomization or ionization 'its chemistry _ is destroyed by disintegration, forming some simple and easy to handle molecules or atomic domains, - carbon oxides, carbon dioxide and fluoranthene _, and producing solid small molecules such as two that are easily adsorbed on the surface. Oxidation conversion contains crushed powder. The electric torch 2 of the present invention can be riding one or more. If the electrothermal torch 2 of the reactor 1Q is single, the electric torch|the torch 2 and the upper reaction chamber 3 face are straight, if the torch 2 is a plurality of N·', the electric torch 2 has the same degree of rotation And relying on the arrangement, the inside of the reactor 10 reaches a uniform high temperature environment. 1279170 In detail: When two plasma torches 2, 2a, the plasma torches 2, 2a are 180 degrees apart, and when three plasma torches are used, the plasma torches 2 are 120 degrees apart. analogy. The position of the plasma torch 2, 2a causes the high-heat gas generated by the plasma to enter the reactor 1 to scrub the inner wall of the reactor and its subsequent passages by the force at which it is introduced into the hot gas. Thus, during the combustion process, the solid molecules adsorbed on the surface of the inner cavity during the previous reaction can be removed, thereby increasing the service life of the reactor 10. In order to create a uniform high temperature environment for reactor 10, the most efficient ionization is produced. In order to optimize the effect of the scrubbing reactor 10, the plasma torches 2 and 2a will be perpendicular to the wall of the upper reaction chamber 3. However, when the plasma torch 2 is arranged symmetrically and at the same time perpendicular to the cavity wall of the upper reaction chamber 3 and the lower chamber 4 (if only a few plasma torches are arranged symmetrically, as shown in FIG. 2, two The plasma torches of the plasma torches 2 and 2a are located opposite each other, and the high heat gases generated by the plasma torches 2, 2a are opposed to each other. Such high hot gas hedging reduces the effectiveness of scrubbing the inner wall of reactor 10 and its subsequent passages with the use of high heat gases. As shown in FIG. 3, at this time, the modular plasma reactor of the present invention has the functions of achieving a uniform high temperature reaction environment and brushing the inner wall of the reactor 10, and the plasma torches 5 and 5a can be located on the upper reaction chamber 3. The position is still perpendicular to the upper reaction chamber 3, so that the force of the high-heat gas velocity is not perpendicular to the lower reaction chamber 4, and is 10 to 95 degrees with the lower reaction chamber 4. Thus, during the combustion process, the solid molecules adsorbed on the surface of the inner cavity during the previous reaction can be removed, thereby increasing the service life of the reactor 10. In order to make the high-heat gas generated by the plasma torches 2, 2a, 5, 5a completely enter the reactor 1 达到 to achieve the most uniform and temperate environment, the toxic gas ionization efficiency is maximized, and the electric 11 1279170 and the torch 2 In addition to the vertical entry of 2a, 5, 5a with the upper reaction chamber 3, the plasma torch 2, 2a 5, 5a itself is also subjected to a calibration (aHgnment) action. In the actual production process, as shown in Figure 4, there will be a plasma torch inlet (10) on the cavity of the reaction chamber. The high-heat gas is filled by the positive center 122 of the electric torch inlet 120 and the other space of the inlet 12G is filled. Fire and heat insulation material 121. If there is any uncertainty in the calibration of the Guardian, most of the high-heat gas will not directly enter the towel of the upper reaction chamber 3, but will directly hit the flame-proof material 121, in addition to reducing the toxic gas ion (4) efficiency, also reduce the reactor The service life of 1G itself. The quasi-acting action is such that the high-heat gas concentrates completely from the center of the plasma torch 2 into the upper reaction chamber 3 without dissipating to the fire-resistant heat-dissipating material 121 to reduce the force generated by the high-heat gas velocity. Generally, the electric torch 2 is fixed by screws. It is difficult to accurately fix the depth of each screw when it is locked by screws. Therefore, the center position of the torch 2 will be slightly deviated, and it takes a lot of coffee torch 2 to be truly centered. Therefore, when installing a new toxic gas device or replacing the reaction ϋ 1G, it is often necessary to calibrate the angle and orientation of the igniter 2 for 3 to 4 hours. In the embodiment of the present invention, instead of the position where the wire is fixed to the electric torch 2, the position of the lock ring 20 is used to accelerate the position of the fresh electric torch 2, and the installation time is only required for hours. As shown in Figure 5, the ship 24 includes a lock 22 and three or more links 21 design; used to fix the size of the lock ring, and multiple links 21 are designed to match the shape of the electric torch 2 The power t-torch 2 of the present financial operation is surplus. Therefore, the design of the lock ring 24 of the present embodiment is also _. The design of the lock ring 24 varies with the appearance of the torch 2 to conform to the «Torch 2'. Further, in order to fix the phase of the electric torch 2 and the upper reaction chamber 3 12 1279170 to the position ', as shown in Fig. 6, the lock ring 25 is designed to be in the concave mode 23 to directly clamp the plasma torch 2 to the upper reaction chamber 3. When the plasma torch 2 is fastened by using the lock ring 25, the high-heat gas generated by the plasma torch 2 is naturally not required to be calibrated. Figure 7 is a schematic view of a modular plasma reactor of the present invention, the arrows in the figure indicating the direction of movement in the treatment of toxic gases. As shown in FIG. 7, in the modular plasma reactor of the present invention, the joint i2a of the plurality of plasma torches 12 is compatible with the plurality of first joints 13a of the upper reaction chamber 13, respectively, by a lock ring 20, The plasma torch 12 can be quickly connected to the upper reaction chamber 13, and the high thermal current generated by the plasma torch 12 can be flowed into the reactor without performing a calibration operation; the plasma torch 12 can also be quickly The upper reaction chamber 13 is disconnected. Compared with the connection method of the _ _ _ _ _ , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , In addition, the shorter the repair time, the more particles are produced. The shorter the interval between the temples, the better the dust-free standards of the high-tech industry. Secondly, the second joint 13b of the upper reaction chamber 13 is also compatible with the first joint 14a of the lower reaction chamber 14 by the 'borrowing-locking ring 3', so that the upper reaction chamber 13 and the lower reaction chamber can be quickly connected (upper reaction) The chamber 13 and the lower reaction chamber 14 may also constitute a reactor without being connected by a lock ring 3). By the same token, the second joint of the lower reaction chamber 14 is applied to the first joint (5) of the chiller 15 to be compatible with the 'borrowing-locking ring 4', so that the lower reaction chamber 14 can be quickly connected to the ice water container; The second joint 15b of the ice water device 15 is compatible with the first joint garment of the water tank 16 - the lock ring 50' can quickly connect the ice water device 15 with the water tank 16; the water (four) of the first: the joint he and the π The first joint 17a is compatible, and the first joint 17b of the sprinkler 17 and the cooling coil can be quickly rotated by the _ lock amount.
盤管18與風車19進行連接。 水槽16與濃水器17進行連接；灑^ 18之接頭I8a相容，藉一鎖環，The coil 18 is connected to the windmill 19. The water tank 16 is connected with the water tanker 17; the joint 188 of the sprinkling 18 is compatible, and a lock ring is used.
則不必/、、;'相同關鍵僅在於鎖環2〇所連接之電滎火炬12之接頭咖 係與上反應腔13之第-接頭13a必須相容，鎖環3()所連接之上反應 腔13之第二接頭13b與下反應腔14之第-接頭14a亦必須相容，於 類推，從而構成依照上述方式，以鎖環2〇、3〇、4〇、5〇、60、70、80 將複數個㈣火炬12、上反應腔13、下反應腔14、冰水器15、水槽 16、灑水器17、冷卻盤管18與截水器18d、風車19間快速進行或解 除連接之本發明模組化電漿反應裝置。 尤有進者，如圖七所示，本發明模組化電漿反應裝置中，上反應 腔13之第一接頭13a後方更設有一關斷裝置13c。當鎖環20將電漿火炬 12與上反應腔13進行快速連接後，若啟動關斷裝置i3c可切斷上反應腔 13與電漿火炬12之連接。此時上反應腔13被隔離，不再透過其第一接 頭13a與外界連通。隔離電漿火炬12後，即可打開鎖環20快速解除電漿 火炬12與上反應腔13之連接，並可快速地以鎖環20連接更換、維修後 之電漿火炬12與上反應腔13。接著再打開關斷裝置13c，即可重新連通 電漿火炬12與上反應腔13，將更換、維修後之電漿火炬12簟新投入 14 1279170 運作。上述這段時間内，其他電漿火炬12仍可繼續運作，完全不需停 機。由於上反應腔13内呈負壓狀態，因此若缺少關斷裝置13c，則無法 與腔外隔絕，會破壞腔内之負壓狀態而被迫停機繼續運作。 如上所述，當廢氣被電漿瞬間熱解、原子化或離子化所形成之簡 單分子或原子（如氫、一氧化碳、二氧化碳和氟化氫等）通過下反應腔 Η降溫、續進入冰水器15冷卻後，即可進入有灑水器16c之水槽16。此 日守大部分簡單分子或原子與灑水器16c所產生之水粉塵作用後可溶解 於水中（如氫氟酸HF等）並可降低廢氣之溫度。溶解於水中之氫氟酸HF 可自水槽16下方排出。正因水槽16之水含氫氟酸HF等，故無法重複使 用’必須自下方排出。相反的，冰水器15除可降低廢氣之溫度，其冷 卻水亦可回收、重複使用。因此有了冰水器15就可減少水槽16之用水 量’達到節約水資源的效益。 剩餘廢氣接著進入灑水器17，灑水器17中產生之水氣對廢氣進行 再次降溫與洗滌，洗務出含氬氟酸HF等之洗滌水向下流入水槽Μ，故 灑水器17與水槽16共用同一水源。離開灑水器17之廢氣繼續向上進入 冷卻盤管18進一步降溫後，進入截水器I8d。截水器I8d對廢氣作乾燥 處理，使進入風車19的廢氣不至於因太潮濕而腐蝕風車19，故截水器 18d可增加風車19之壽命。廢氣通過截水器i8d後便進入風車IQ，由風 車19自廢氣出口 19b排出本發明模組化電漿反應裝置。 本發明之一重點在於使用電漿提供熱源的同時，可使電裝氣體產 生速度場所生之力洗刷反應器及其隨後通道之内壁。另一重點在於提 15 1279170 供-鎖環裝置代替以往螺絲固定霞火_作，具有自動置中的功 效。如此之模組化電漿反應裝置的電漿火炬將可達到最有效的使用， 且由於安裝或更換模組化反隸置晴敎幅減少，相對的增加 產線上的生產_。至於電漿火炬之數目或是鎖環之設置模式隨順毒 性氣體廢氣燃燒爐焚化處理裝置之需求而定，在本發明之實施例中僅 將本發明之理;t置人於基本之毒性氣體廢氣機爐焚化處理裝置中。 本發明之又一重點在於上反應腔上設有與複數個電漿火炬分別相 對應之複數個關斷裝置。只要保持與欲使用之任意個電漿火炬相對應 之關斷裝置處於開狀態，並保持與其他不欲使用之其他電漿火炬關斷 裝置置處於關狀態，即可啟動該任意個電漿火炬來使用本發明模組化 電衆反應裝置。-旦當使财之—電漿火炬中發生故㈣需要維修， 可即刻啟動與該電漿火炬相對應之關斷裝置，切斷該電漿火炬並與腔 外隔絕。接著可快速解除鎖環，移除該故障或需要維修之電漿火炬並 進行必要的維修。其他運作中之電漿火炬仍可繼續使用，完全不影響 本發明模組化電漿反應裝置之運行。此時若可迅速完成電漿火炬之 維修，則又可快速地將維修好之電漿火炬與相對應之上反應腔以鎖環 進行連接，再啟動此一電漿火炬並將原來關閉之關斷裝置打開，迅速 的回復至原使用狀態。因此，自關閉關斷裝置至打開關斷裝置之一段 時間，除可藉解除鎖環快速移除需維修之電漿火炬並將維修後之電漿 火炬迅速的以鎖環再進行連接並回復使用，可保證其他運作中之電漿 火炬繼續運作，完全不影響本發明模組化電漿反應裝置之運行。萬 16 1279170 -等待不及«火轉修，亦可迅速更換—新絲烧，再以上述方 式回復該«火炬之運作。如果上反應腔丨3、下反應腔丨4、冰水器】5、 水槽16、激7X器17、冷卻盤管18與截水器18d、風車19中之任一者 發生故障或需雜，亦可藉相制之鎖躲速解除連接，並可立刻將 更換之部分藉械應之鎖賴速進行連接錢續使^因此本發明模 組化«反應裝置可長年持續運行，不會因故障或需維修，造 成停機之具大損失。It is not necessary to /,;; the same key is only that the connector of the electric torch 12 connected to the lock ring 2 is compatible with the first joint 13a of the upper reaction chamber 13, and the reaction of the lock ring 3 () is connected. The second joint 13b of the cavity 13 and the first joint 14a of the lower reaction chamber 14 must also be compatible, and so on, so as to constitute the lock ring 2〇, 3〇, 4〇, 5〇, 60, 70, according to the above manner. 80 Quickly or unconnecting the plurality of (four) torches 12, the upper reaction chamber 13, the lower reaction chamber 14, the ice water unit 15, the water tank 16, the sprinkler 17, the cooling coil 18, the water interceptor 18d, and the windmill 19. The modular plasma reaction device of the invention. In particular, as shown in Fig. 7, in the modular plasma reactor of the present invention, a shut-off device 13c is further disposed behind the first joint 13a of the upper reaction chamber 13. When the lock ring 20 quickly connects the plasma torch 12 to the upper reaction chamber 13, the connection of the upper reaction chamber 13 to the plasma torch 12 can be cut off by activating the shut-off device i3c. At this time, the upper reaction chamber 13 is isolated and is no longer in communication with the outside through its first joint 13a. After the plasma torch 12 is isolated, the lock ring 20 can be opened to quickly release the connection between the plasma torch 12 and the upper reaction chamber 13, and the plasma torch 12 and the upper reaction chamber 13 can be quickly replaced and replaced by the lock ring 20. . Then, by switching the switch device 13c, the plasma torch 12 and the upper reaction chamber 13 can be reconnected, and the replaced and repaired plasma torch 12 is newly put into operation 14 1279170. During the above period, other plasma torches 12 can continue to operate without stopping the machine at all. Since the upper reaction chamber 13 is in a negative pressure state, if the shut-off device 13c is absent, it cannot be isolated from the outside of the chamber, and the negative pressure state in the chamber is destroyed and the operation is stopped. As described above, when the exhaust gas is instantaneously pyrolyzed, atomized or ionized by the plasma, simple molecules or atoms (such as hydrogen, carbon monoxide, carbon dioxide, hydrogen fluoride, etc.) are cooled by the lower reaction chamber, and continue to enter the ice water unit 15 to be cooled. After that, the water tank 16 having the sprinkler 16c can be accessed. This day, most of the simple molecules or atoms and the water dust generated by the sprinkler 16c can be dissolved in water (such as hydrofluoric acid HF) and the temperature of the exhaust gas can be lowered. Hydrofluoric acid HF dissolved in water can be discharged from below the water tank 16. Since the water in the water tank 16 contains hydrofluoric acid HF or the like, it cannot be reused and must be discharged from below. Conversely, the chiller 15 can reduce the temperature of the exhaust gas, and the cooling water can be recycled and reused. Therefore, with the chiller 15, the water consumption of the water tank 16 can be reduced to achieve the benefit of saving water resources. The remaining exhaust gas then enters the sprinkler 17, and the water gas generated in the sprinkler 17 cools and washes the exhaust gas again, and the washing water containing argon fluoride HF or the like flows down into the water tank Μ, so the sprinkler 17 and The sinks 16 share the same water source. The exhaust gas leaving the sprinkler 17 continues upwards. After the cooling coil 18 is further cooled, it enters the water interceptor I8d. The water interceptor I8d dries the exhaust gas so that the exhaust gas entering the windmill 19 does not corrode the windmill 19 because it is too humid, so the water interceptor 18d can increase the life of the windmill 19. After the exhaust gas passes through the water interceptor i8d, it enters the windmill IQ, and the wind turbine 19 discharges the modular plasma reactor of the present invention from the exhaust gas outlet 19b. One of the focuses of the present invention is that while the plasma is used to provide a heat source, the electrified gas can be generated at a velocity site to scrub the reactor and its inner walls. Another important point is that the 1 1279170 supply-locking ring device replaces the previous screw-fixed fireworks and has an automatic centering effect. The plasma torch of such a modular plasma reactor will achieve the most efficient use, and the installation of or replacement of the modular anti-grain clearing is reduced, and the production on the production line is relatively increased. As for the number of plasma torches or the setting mode of the lock ring, depending on the requirements of the toxic gas exhaust gas combustion furnace incineration treatment device, in the embodiment of the present invention, only the rationale of the present invention is set; In the furnace incineration treatment device. A further important point of the present invention is that a plurality of shut-off devices corresponding to a plurality of plasma torches are respectively disposed on the upper reaction chamber. The arbitrary plasma torch can be started as long as the shut-off device corresponding to any of the plasma torches to be used is kept open and kept in contact with other plasma torch shut-off devices that are not intended to be used. The modularized electric consumer reaction apparatus of the present invention is used. Once the fuel is generated in the plasma torch (4), it needs to be repaired, and the shut-off device corresponding to the plasma torch can be started immediately, and the plasma torch is cut off and isolated from the cavity. The lock ring can then be quickly removed to remove the fault or the need to repair the plasma torch and perform the necessary repairs. The plasma torch in other operations can still be used without affecting the operation of the modular plasma reactor of the present invention. At this time, if the maintenance of the plasma torch can be completed quickly, the repaired plasma torch can be quickly connected with the corresponding upper reaction chamber by a lock ring, and then the plasma torch is turned on and the original is turned off. The breaking device is turned on and quickly returns to the original use state. Therefore, from the time when the shut-off device is turned off to the time when the switch-off device is turned off, the plasma torch that needs to be repaired can be quickly removed by releasing the lock ring, and the repaired plasma torch is quickly connected and re-used with the lock ring. It can ensure that the plasma torch in other operations continues to operate without affecting the operation of the modular plasma reactor of the present invention. 10,000 16 1279170 - Can't wait for «Fire to repair, can also be quickly replaced - new silk, and then reply to the operation of the torch in the above way. If the upper reaction chamber 3, the lower reaction chamber 4, the ice water device 5, the water tank 16, the 7X device 17, the cooling coil 18, the water interceptor 18d, and the windmill 19 malfunction or need to be mixed, It can also be detached by the lock of the phase system, and the replacement part can be connected to the lock speed immediately. Therefore, the modular device of the present invention can be continuously operated for a long time without failure. Or need to be repaired, resulting in a large loss of downtime.
以上所述僅為本發明之較佳實施例，不應用於侷限本發明之可實 施範圍’凡根縣發明之内料狀部份修改，而未射本發明之精 神時’皆闕本㈣之細者。科，本發申請前蘇曾見^ 何公開場合或值，目此_具「恤、輸及進步 發明專利要件，故絲__之帽。析請_允 間惠允審查並早賜與專利為禱。 -、撥時The above is only the preferred embodiment of the present invention, and should not be used to limit the scope of the invention. The internal material-like part of the invention of the Fangen County is modified, and the spirit of the invention is not taken. Fine. Branch, before the application for the application of Su, I saw the public occasion or value, the purpose of this _ with "shirts, losers and progressive invention patents, so the silk __ hat. Analysis _ Yunjian Hui Yun review and early patents Praying. -, dialing
17 1279170 【圖示簡單說明】 圖一係習用技術毒性氣體廢氣處理流程。 圖二係本發明實施例毒性氣體處理中反應器裝置圖。 圖三係本發明實施例毒性氣體處理中反應器裝置圖。 圖四係本發明實施例電漿火炬裝置圖。 圖五係本發明實施例鎖環裝置圖。 圖六係本發明實施例鎖環裝置圖。 圖七係本發明模組化電漿處理裝置示意圖。 【圖號說明】 ίο -反應器 1 -廢氣進口 2、2a、5、5a、12 -電漿火炬 120 -電漿火炬入口 121 -火斷熱材料 122 -中心 3 -上反應腔 4 -下反應腔 12a、18a、18b、19a -接頭 13 -上反應腔 1279170 13a、14a、15a、16a、17a -第一接頭 13b、14b、15b、16b、17b -第二接頭 13c -關斷裝置 14 -下反應腔 ’ 15 -冰水器 ‘ 16 -水槽 16c -複數個喷水頭 # 17 -灑水器 18 -冷卻盤管 18d -截水器 19 風車 19b -廢氣出口 20、24、25、30、40、50、60、70、80 -鎖環 21 -環節 齡 22 -鎖 23 -内凹模式 1917 1279170 [Simple description of the diagram] Figure 1 shows the process of toxic gas exhaust gas treatment. Figure 2 is a diagram of a reactor apparatus in a toxic gas treatment according to an embodiment of the present invention. Figure 3 is a diagram of a reactor apparatus in a toxic gas treatment of an embodiment of the present invention. Figure 4 is a diagram of a plasma torch device in accordance with an embodiment of the present invention. Figure 5 is a diagram of a lock ring device of an embodiment of the present invention. Figure 6 is a diagram of a lock ring device of an embodiment of the present invention. Figure 7 is a schematic view of a modular plasma processing apparatus of the present invention. [Description of the number] ίο - Reactor 1 - Exhaust gas inlet 2, 2a, 5, 5a, 12 - Plasma torch 120 - Plasma torch inlet 121 - Fire-breaking material 122 - Center 3 - Upper reaction chamber 4 - Lower reaction Cavity 12a, 18a, 18b, 19a - joint 13 - upper reaction chamber 1279170 13a, 14a, 15a, 16a, 17a - first joint 13b, 14b, 15b, 16b, 17b - second joint 13c - shut-off device 14 - lower Reaction chamber '15 - Ice water' 16 - Sink 16c - Multiple sprinkler heads # 17 - Sprinkler 18 - Cooling coil 18d - Water interceptor 19 Windmill 19b - Exhaust gas outlets 20, 24, 25, 30, 40 , 50, 60, 70, 80 - lock ring 21 - link age 22 - lock 23 - recessed mode 19