CN112619333A - Plasma exhaust-gas treatment equipment - Google Patents
Plasma exhaust-gas treatment equipment Download PDFInfo
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- CN112619333A CN112619333A CN202011139391.7A CN202011139391A CN112619333A CN 112619333 A CN112619333 A CN 112619333A CN 202011139391 A CN202011139391 A CN 202011139391A CN 112619333 A CN112619333 A CN 112619333A
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- waste gas
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
Abstract
The invention discloses a plasma waste gas treatment device which comprises a reaction cavity, a plasma generator, a spraying cavity, a washing tower and an exhaust device. The reaction cavity is provided with an air collecting port. The plasma generator is arranged at the upper end of the reaction cavity and communicated with the reaction cavity so as to input high-temperature plasma into the reaction cavity. The spraying cavity is sleeved outside the reaction cavity and communicated with the bottom of the reaction cavity, and at least one first spraying head is arranged in the spraying cavity. The washing tower is communicated with the spraying cavity, and at least one second spray head is arranged in the washing tower to spray liquid into the washing cavity. The exhaust device is communicated with the washing tower, an electron generator is arranged in the exhaust device to spray electron beams into the exhaust device, and the exhaust device is provided with an air outlet to discharge purified waste gas. The plasma waste gas treatment equipment can fully crack polluting particles in the waste gas and fully wash the waste gas, thereby achieving a better purification effect.
Description
Technical Field
The invention relates to the technical field of waste gas purification, in particular to plasma waste gas treatment equipment.
Background
The waste gas refers to toxic and harmful gas discharged by human in the production process. Especially in the industries of semiconductors, electronics, medical treatment, chemical industry and the like, a large amount of waste gas is generated, and serious consequences are generated on human life and health. Therefore, a purification process is required for exhaust gas emission.
The device function that present exhaust purification used is comparatively single, and the majority adopts open collection to handle, and the treatment effect is poor, and generally simple filter screen adsorbs, or modes such as gas burning washing, can not reach good purifying effect. The adsorption treatment mode is difficult to continuously manage at the later stage, for example, the filter element needs to be replaced regularly.
The gas combustion method cannot satisfy the temperature for treating the exhaust gas containing complex compounds. The gas burning mode has the risk of fire or explosion. Especially, perfluoro compound waste gas and combustible organic waste gas generated by electronic chemical enterprises can not be effectively treated, and secondary or regenerative pollution can be generated after the waste gas is discharged.
Therefore, in order to solve the above-mentioned problems, it is necessary to develop an exhaust gas treatment device with high safety and high effectiveness.
Disclosure of Invention
In order to overcome the defects in the prior art, embodiments of the present invention provide a plasma waste gas treatment apparatus, which can fully crack the pollutant particles in the waste gas and fully wash the waste gas, thereby achieving a better purification effect.
The invention discloses a plasma waste gas treatment device, which comprises:
the upper end of the reaction cavity is provided with an air collecting port for collecting waste gas;
the plasma generator is arranged at the upper end of the reaction cavity, an air inlet used for injecting medium gas is formed in the upper end of the plasma generator, a cathode electrode and an anode electrode are arranged in the plasma generator, the cathode electrode and the anode electrode are coaxially arranged, at least part of the cathode electrode is arranged in the anode electrode, and high voltage can be generated between the cathode electrode and the anode electrode, so that the medium gas in the plasma generator is ionized into high-temperature plasma; the lower end of the plasma generator is provided with a plasma channel communicated with the reaction cavity so as to input high-temperature plasma into the reaction cavity and further act on waste gas in the reaction cavity;
the spraying cavity is sleeved outside the reaction cavity and communicated with the bottom of the reaction cavity so that waste gas in the reaction cavity can enter the spraying cavity, and at least one first spraying head is arranged in the spraying cavity to spray liquid into the spraying cavity;
the washing tower is communicated with the spraying cavity so that waste gas in the spraying cavity can enter the washing tower, and at least one second spray head is arranged in the washing tower so as to spray liquid into the washing cavity; and
the exhaust device is communicated with the washing tower to collect the waste gas in the washing tower, an electron generator is arranged in the exhaust device to jet electron beams into the exhaust device so as to further purify the waste gas in the exhaust device, and the exhaust device is provided with an air outlet to discharge the purified waste gas.
Preferably, the scrubbing tower comprises a scrubbing cavity and an airflow channel arranged in the scrubbing cavity, the upper end of the airflow channel is communicated with the spraying cavity, the bottom end of the airflow channel extends to a position close to the bottom end of the scrubbing cavity and is communicated with the scrubbing cavity, so that waste gas in the spraying cavity can enter the scrubbing cavity, and the second spraying head is arranged in the scrubbing cavity.
Further preferably, at least one speed reducing disc is arranged in the washing cavity, the airflow channel penetrates through the speed reducing disc, any one speed reducing disc is connected with the inner wall of the washing cavity, and a plurality of through holes are formed in any one speed reducing disc in the vertical direction, so that waste gas in the washing cavity can circulate.
Further preferably, the upper end of the airflow channel is communicated with the spraying cavity through a cyclone dust collector, so that the waste gas in the spraying cavity can enter the airflow channel through the cyclone dust collector.
Preferably, a water cooling circulation system is arranged at the cathode electrode and the anode electrode of the plasma generator.
Preferably, at least one discharge rod is arranged in the electron generator to excite electrons, wherein one discharge rod comprises a cathode tube and an anode filter element arranged in the cathode tube, the cathode tube is electrically connected with a negative electrode of a power supply, and the anode filter element is electrically connected with a positive electrode of the power supply, so that an arc area is formed between the anode filter element and the inner wall of the cathode tube.
Preferably, the plasma waste gas treatment equipment further comprises a circulating unit, wherein the circulating unit comprises a liquid storage tank and a circulating pipeline, and the liquid storage tank is communicated with the first spray header and the second spray header through the circulating pipeline so as to input liquid into the first spray header and the second spray header.
The invention has the following beneficial effects:
according to the plasma waste gas treatment equipment, the ion generator is arranged, so that high-temperature plasma can be input into the reaction cavity and acts on waste gas in the reaction cavity, the waste gas can be rapidly heated in the reaction cavity by the action of the high-temperature plasma on the waste gas, and under the dual actions of high temperature and high potential, pollutant particles in the waste gas are ionized and completely cracked, so that the effect of purifying the waste gas is achieved.
According to the plasma waste gas treatment equipment, the spraying cavity is arranged outside the reaction cavity in a sleeved mode, the first spraying is arranged in the spraying cavity to spray liquid into the spraying cavity, so that waste gas can be washed, waste gas can be better purified, and liquid can be sprayed towards the periphery side of the outer wall of the reaction cavity. And then the interior of the reaction cavity is cooled to prevent the high-temperature reaction in the reaction cavity from damaging equipment.
The plasma waste gas treatment equipment provided by the invention is provided with the electron generator in the exhaust device to jet the electron beam into the exhaust device, so that the polluting particles in the waste gas are cracked, and the waste gas is further purified.
The plasma waste gas treatment equipment can effectively treat perfluorinated compounds and organic combustible waste gas, destroy and purify waste gas molecules, and has a good purification effect. The equipment has small volume and large treatment capacity, can be directly installed near a waste gas generating source, can accurately classify various gas types, can accurately set the treatment conditions of various waste gases, can monitor the state of the reactor in real time in the treatment process, and accurately control various parameter indexes.
In order to make the aforementioned and other objects, features and advantages of the invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of a plasma exhaust gas treatment apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a generating device according to an embodiment of the present invention;
FIG. 3 is a schematic view of the structure of a plasma generator according to an embodiment of the present invention;
FIG. 4 is a schematic view showing the structure of a discharge rod in the electron generator according to the embodiment of the present invention;
FIG. 5 is a schematic view showing the structure of a reduction gear in a washing chamber according to an embodiment of the present invention;
reference numerals of the above figures:
1-a reaction chamber; 2-a plasma generator; 3-spraying the cavity; 4-a first spray header; 5-cyclone dust collector; 6-an airflow channel; 7-a washing chamber; 8-a reduction gear; 9-water filtering sieve; 10-an exhaust; 11-an electron generator; 12-a liquid storage tank; 13-a gas collection port; 14-a gas outlet;
201-air inlet; 202-a cathode electrode; 203-anode electrode; 204-plasma channel;
801-through holes; 802-mounting holes;
1101-an anode filter element; 1102-cathode tube; 1103-shaft body;
1201-a waste valve; 1202-liquid inlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention discloses a plasma waste gas treatment device, which comprises:
the upper end of the reaction cavity 1 is provided with an air collecting port 13 for collecting waste gas;
the plasma generator 2 is arranged at the upper end of the reaction cavity 1, an air inlet 201 for injecting medium gas is arranged at the upper end of the plasma generator 2, a cathode electrode 202 and an anode electrode 203 are arranged inside the plasma generator 2, the cathode electrode 202 and the anode electrode 203 are coaxially arranged, at least part of the cathode electrode 202 is arranged inside the anode electrode 203, and high voltage can be generated between the cathode electrode 202 and the anode electrode 203, so that the medium gas in the plasma generator 2 is ionized into high-temperature plasma; the lower end of the plasma generator 2 is provided with a plasma channel 204 communicated with the reaction cavity 1 so as to input high-temperature plasma into the reaction cavity 1 and further act on the waste gas in the reaction cavity 1;
the spraying cavity 3 is sleeved outside the reaction cavity 1, the spraying cavity 3 is communicated with the bottom of the reaction cavity 1 so that waste gas in the reaction cavity 1 can enter the spraying cavity 3, and at least one first spraying head 4 is arranged in the spraying cavity 3 to spray liquid into the spraying cavity 3;
the washing tower is communicated with the spraying cavity 3 so that the waste gas in the spraying cavity 3 can enter the washing tower, and at least one second spray head is arranged in the washing tower so as to spray liquid into the washing cavity 7; and
the exhaust device 10 is communicated with the washing tower to collect the waste gas in the washing tower, an electron generator 11 is arranged in the exhaust device 10 to inject electron beams into the exhaust device 10 to further purify the waste gas in the exhaust device 10, and the exhaust device 10 is provided with an air outlet to discharge the purified waste gas.
Referring to fig. 1 to 5, the present embodiment discloses a plasma waste gas treatment device, which comprises a generating device, wherein the generating device comprises a reaction cavity 1, a plasma generator 2 and a spraying cavity 3. The plasma waste gas treatment equipment further comprises a washing tower, an exhaust device 10 and a circulating unit.
The reaction cavity 1 is arranged inside the spraying cavity 3. The upper end of the reaction cavity 1 is provided with a gas collecting port 13, and waste gas to be treated can enter the reaction cavity 1 through the gas collecting port 13. A plasma generator 2 is arranged at the upper end of the reaction chamber 1.
The upper end of the plasma generator 2 is provided with a gas inlet 201 for injecting a medium gas, and nitrogen is selected as the medium gas in the present embodiment. The plasma generator 2 is provided with a cathode electrode 202 and an anode electrode 203 inside. The cathode electrode 202 and the anode electrode 203 are coaxially arranged, at least part of the cathode electrode 202 is arranged inside the anode electrode 203, the cathode electrode 202 is electrically connected with the negative pole of a power supply, and the anode electrode 203 is electrically connected with the positive pole of the power supply. A high voltage can be generated between the cathode electrode 202 and the anode electrode 203, so that nitrogen gas in the plasma generator 2 is ionized into high-temperature plasma. The lower end of the plasma generator 2 is provided with a plasma channel 204 communicated with the reaction cavity 1 so as to input high-temperature plasma into the reaction cavity 1, and further act on the waste gas in the reaction cavity 1, the high-temperature plasma acts on the waste gas to enable the temperature of the waste gas to be rapidly raised in the reaction cavity 1, and under the dual action of high temperature and high potential, pollutant particles in the waste gas are ionized and completely cracked.
The cathode electrode 202 and the anode electrode 203 of the plasma generator 2 are both provided with a water cooling circulation system, and the water cooling circulation system can cool the plasma generator 2 to protect the device. Namely, the cathode electrode 202 and the anode electrode 203 are both provided with an isolation cavity, and the isolation cavity is connected with a circulating water pipe so as to continuously inject cold water into the isolation cavity and continuously discharge hot water heated in the isolation cavity, thereby cooling the cathode electrode 202 and the anode electrode 203.
The spraying cavity 3 is sleeved outside the reaction cavity 1. The spraying cavity 3 is communicated with the bottom of the reaction cavity 1, so that waste gas after purification treatment in the reaction cavity 1 can enter the spraying cavity 3 from the bottom of the spraying cavity 3, and eight first spraying heads 4 are arranged in the spraying cavity 3 to spray liquid into the spraying cavity 3.
The plasma generator 2 can generate thousands of high-temperature reactions during operation, which easily causes the inside of the device to be damaged, so that eight first spray heads 4 are arranged around the outer peripheral side of the reaction cavity 1, and liquid can be uniformly sprayed towards the outer peripheral side of the reaction cavity 1. And then the interior of the reaction cavity 1 is cooled to prevent the high-temperature reaction in the reaction cavity 1 from damaging the equipment.
The liquid that sprays in the chamber 3 can act on the waste gas that flows out in the reaction cavity 1 to wash waste gas, with better purification waste gas. Waste gas flows to the upper end that sprays chamber 3 from the bottom that sprays chamber 3, and the liquid that sprays in the chamber 3 moves down to waste gas flow direction is opposite with the liquid flow direction, can make waste gas and liquid better carry out the heat exchange, and improves transfer efficiency, and then improves the washing effect.
The waste gas after washing and cooling in the spraying cavity 3 is discharged from a gas outlet 14 at the upper end of the spraying cavity 3 and then enters the washing tower for washing again. The scrubber tower comprises a scrubbing chamber 7 and a gas flow channel 6 arranged in the scrubbing chamber 7. The upper end of gas flow channel 6 and the gas outlet 14 department intercommunication that sprays chamber 3, the bottom of gas flow channel 6 extend to the bottom that is close to washing chamber 7 and communicate with washing chamber 7 to the waste gas that sprays in the chamber 3 can get into washing chamber 7 from washing chamber 7's bottom, is equipped with eight second shower heads in washing chamber 7, and eight second shower heads enclose the periphery side of locating gas flow channel 6, in order to spray liquid and then further wash the purification to waste gas in spraying chamber 3.
Three reduction discs 8 are arranged in the washing chamber 7, the three reduction discs 8 being arranged one after the other in the longitudinal direction. Any one of the speed reducing discs 8 is connected with the inner wall of the washing cavity 7, and a plurality of through holes 801 are formed in any one of the speed reducing discs 8 along the vertical direction, so that exhaust gas in the washing cavity 7 can flow through the through holes 801 in the speed reducing discs 8. The airflow passage 6 is provided through the reduction disk 8. The bottom end of the air flow passage 6 passes through the bottom end of the speed reduction disk 8 positioned at the lowest layer, so that the exhaust air discharged from the air flow passage 6 can be circulated upward from the bottom end of the speed reduction disk 8 positioned at the lowest layer.
The middle part of the speed reducing disk 8 is provided with a mounting hole 802, and the diameter of the mounting hole 802 is matched with the outer diameter of the airflow channel 6, so that the airflow channel 6 penetrates through the mounting hole 802 and is connected with the mounting hole 802.
The setting of speed reducing disk 8 can slow down the speed that waste gas flows to make liquid and waste gas can more abundant mixture, and then improve the washing effect. The waste gas flows from the bottom end of the washing cavity 7 to the upper end of the washing cavity 7, and the liquid sprayed in the washing cavity 7 moves downwards, so that the flow direction of the waste gas is opposite to the flow direction of the liquid, the waste gas and the liquid can be better subjected to heat exchange, and the transfer efficiency is improved. The gas-liquid two-phase countercurrent is arranged, so that the waste gas and the liquid can be contacted more sufficiently, and the washing effect is improved.
The upper end of the airflow channel 6 is communicated with the spraying cavity 3 through the cyclone dust collector 5, so that the waste gas in the spraying cavity 3 can enter the airflow channel 6 through the cyclone dust collector 5. The cyclone 5 is provided to swirl the introduced exhaust gas, thereby separating particles from gas in the exhaust gas to improve the purification effect. The separated particles sink to the bottom of the washing tower due to gravity and are removed by liquid flushing.
The exhaust gas washed by the scrubber is further discharged by the exhaust device 10. The exhaust device 10 is communicated with the washing tower, a water filtering screen 9 is communicated between the exhaust device 10 and the washing tower, and a drying agent is arranged in the water filtering screen 9 to remove moisture in the gas.
An electron generator 11 is provided in the exhaust device 10 to inject an electron beam into the exhaust device 10, thereby further purifying the exhaust gas in the exhaust device 10. Three discharge rods are provided in the electron generator 11 to excite electrons. One of the discharge rods includes a cathode tube 1102 and an anode filter cartridge 1101 disposed within the cathode tube 1102. A portion of the anode filter element 1101 is distributed over the inside wall of the cathode tube 1102. An axial body 1103 is arranged in the cathode tube 1102 along the axial direction thereof, and a part of the anode filter element 1101 is uniformly distributed on the axial body 1103. The cathode tube 1102 is electrically connected to the negative side of the power supply and the anode filter element 1101 is electrically connected to the positive side of the power supply to form an arc zone between the anode filter element 1101 and the cathode tube 1102 to further act on the exhaust gas to crack the contaminating particles in the exhaust gas, thereby further purifying the exhaust gas.
The plasma exhaust gas treatment apparatus of the present embodiment further includes a circulation unit. The circulation unit includes a reservoir 12 and a circulation line. The liquid storage tank 12 is communicated with both the first spray header 4 and the second spray header through a circulation pipeline so as to input liquid into the first spray header 4 and the second spray header. The liquid in the reservoir 12 may be any detergent dedicated to exhaust gas scrubbing, and in this embodiment water is the choice. The bottom ends of the spray chamber 3 and the wash chamber 7 are both in communication with the sump 12 to enable liquid to flow back into the sump 12. A drain valve 1201 is provided in the side wall of the reservoir 12 to drain contaminated liquid. The upper end of the reservoir 12 is provided with a liquid inlet 1202 for injecting new liquid.
The principle and the implementation mode of the invention are explained by applying specific embodiments in the invention, and the description of the embodiments is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (7)
1. A plasma exhaust gas treatment apparatus, comprising:
the upper end of the reaction cavity is provided with an air collecting port for collecting waste gas;
the plasma generator is arranged at the upper end of the reaction cavity, an air inlet used for injecting medium gas is formed in the upper end of the plasma generator, a cathode electrode and an anode electrode are arranged in the plasma generator, the cathode electrode and the anode electrode are coaxially arranged, at least part of the cathode electrode is arranged in the anode electrode, and high voltage can be generated between the cathode electrode and the anode electrode, so that the medium gas in the plasma generator is ionized into high-temperature plasma; the lower end of the plasma generator is provided with a plasma channel communicated with the reaction cavity so as to input high-temperature plasma into the reaction cavity and further act on waste gas in the reaction cavity;
the spraying cavity is sleeved outside the reaction cavity and communicated with the bottom of the reaction cavity so that waste gas in the reaction cavity can enter the spraying cavity, and at least one first spraying head is arranged in the spraying cavity to spray liquid into the spraying cavity;
the washing tower is communicated with the spraying cavity so that waste gas in the spraying cavity can enter the washing tower, and at least one second spray head is arranged in the washing tower so as to spray liquid into the washing cavity; and
the exhaust device is communicated with the washing tower to collect the waste gas in the washing tower, an electron generator is arranged in the exhaust device to jet electron beams into the exhaust device so as to further purify the waste gas in the exhaust device, and the exhaust device is provided with an air outlet to discharge the purified waste gas.
2. The plasma waste gas treatment equipment according to claim 1, wherein the scrubber tower comprises a scrubbing chamber and a gas flow channel arranged in the scrubbing chamber, the upper end of the gas flow channel is communicated with the spraying chamber, the bottom end of the gas flow channel extends to be close to the bottom end of the scrubbing chamber and is communicated with the scrubbing chamber, so that waste gas in the spraying chamber can enter the scrubbing chamber, and the second spray header is arranged in the scrubbing chamber.
3. The plasma waste gas treatment equipment as claimed in claim 2, wherein at least one speed reducing disc is arranged in the washing chamber, the gas flow channel is arranged through the speed reducing disc, any one speed reducing disc is connected with the inner wall of the washing chamber, and a plurality of through holes are formed in any one speed reducing disc along the vertical direction, so that waste gas in the washing chamber can flow through.
4. The plasma exhaust gas treatment apparatus according to claim 2, wherein an upper end of the gas flow passage communicates with the shower chamber through a cyclone so that the exhaust gas in the shower chamber can enter the gas flow passage through the cyclone.
5. The plasma exhaust gas treatment device according to claim 1, wherein a water cooling circulation system is provided at each of the cathode electrode and the anode electrode of the plasma generator.
6. The plasma exhaust gas treatment device according to claim 1, wherein at least one discharge rod is provided in the electron generator to excite electrons, wherein one of the discharge rods includes a cathode tube and an anode filter element provided in the cathode tube, the cathode tube is electrically connected to a negative power supply, and the anode filter element is electrically connected to a positive power supply, thereby forming an arc zone between the anode filter element and an inner wall of the cathode tube.
7. The plasma exhaust gas treatment device according to claim 1, further comprising a circulation unit, wherein the circulation unit comprises a liquid storage tank and a circulation pipeline, and the liquid storage tank is communicated with the first spray header and the second spray header through the circulation pipeline so as to input liquid into the first spray header and the second spray header.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011139391.7A CN112619333A (en) | 2020-10-22 | 2020-10-22 | Plasma exhaust-gas treatment equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011139391.7A CN112619333A (en) | 2020-10-22 | 2020-10-22 | Plasma exhaust-gas treatment equipment |
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| CN112619333A true CN112619333A (en) | 2021-04-09 |
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| CN202011139391.7A Pending CN112619333A (en) | 2020-10-22 | 2020-10-22 | Plasma exhaust-gas treatment equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113477043A (en) * | 2021-06-30 | 2021-10-08 | 北京京仪自动化装备技术股份有限公司 | Exhaust gas treatment system |
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Application publication date: 20210409 |