TWM515103U - Variable light source Raman spectroscopy capture apparatus - Google Patents

Variable light source Raman spectroscopy capture apparatus Download PDF

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TWM515103U
TWM515103U TW104209377U TW104209377U TWM515103U TW M515103 U TWM515103 U TW M515103U TW 104209377 U TW104209377 U TW 104209377U TW 104209377 U TW104209377 U TW 104209377U TW M515103 U TWM515103 U TW M515103U
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Taiwan
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light source
spectrometer
linear
extraction device
variable
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TW104209377U
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Chinese (zh)
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xiang-chen Cui
song-yan Zhuang
Hua-Xian Liao
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Univ Nat Cheng Kung
Enli Technology Co Ltd
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Publication of TWM515103U publication Critical patent/TWM515103U/en

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Description

可變光源拉曼光譜擷取設備 Variable light source Raman spectroscopy extraction device

本創作係有關一種拉曼光譜擷取設備,特別是指一種可供快速變換不同激發光源的可變光源拉曼光譜擷取設備。 This creation relates to a Raman spectroscopic extraction device, in particular to a variable source Raman spectroscopic extraction device for rapidly changing different excitation sources.

按,拉曼(Raman)光譜學是用來研究晶格及分子的振動模式、旋轉模式和在一系統裡的其他低頻模式的一種分光技術,實為使用於材料光譜分析的主要技術之一;例如,目前當紅的光電材料-石墨烯(Graphene)就需要拉曼光譜的量測。 According to Raman spectroscopy, a spectroscopic technique used to study the vibration modes, rotation modes and other low-frequency modes of a crystal lattice and molecules is one of the main techniques used in spectral analysis of materials; For example, the current photovoltaic material, Graphene, requires the measurement of Raman spectroscopy.

當激發光照射到物質上時會產生散射現象,而有散射光的產生,在散射光中有與原激發光相同的波長的光,這是在散射光中有與原激發光相同的波長的光,這是由於激發光與物質作彈性散射而產生,稱作Rayliegh散射,在散射光中還有比激發光波長長的和短的成分,這是由於激發光與物質作非彈性散射而產生,此即為Raman散射。 When the excitation light is irradiated onto the substance, a scattering phenomenon occurs, and the scattered light is generated. In the scattered light, there is light of the same wavelength as the original excitation light, which is the same wavelength as the original excitation light in the scattered light. Light, which is caused by the elastic scattering of excitation light and matter, called Rayliegh scattering. There is also a component in the scattered light that is longer and shorter than the wavelength of the excitation light. This is due to the inelastic scattering of the excitation light and the substance. This is the Raman scattering.

一般把Rayleigh散射和Raman散射合起來所形成的光譜稱為拉曼(Raman)光譜,拉曼(Raman)光譜中的頻率、強度及偏振等均帶有散射物質的性質,從這些資料可以得知物質的性質, 從這些資料可以得知物質的結構,而這就是拉曼(Raman)光譜具有廣泛應用的原因。 Generally, the spectrum formed by combining Rayleigh scattering and Raman scattering is called Raman spectroscopy. The frequency, intensity and polarization in the Raman spectrum are all characterized by scattering materials. The nature of matter, The material structure can be known from these materials, and this is why Raman spectroscopy is widely used.

已知,可透過分光儀將同一位置之激發光光源導引投射至樣品上,再將掃描於樣品上的光訊號回傳至一光譜儀收集處理,甚至可同步將可視光傳送至一影像擷取裝置,供透過影像訊號檢視整個拉曼(Raman)光譜之擷取、分析操作過程。 It is known that the excitation light source of the same position can be guided to the sample through the spectrometer, and the optical signal scanned on the sample can be returned to a spectrometer for collection and processing, and the visible light can be simultaneously transmitted to an image capture. The device is configured to view and analyze the operation process of the entire Raman spectrum through the image signal.

再者,對於物質結構特性尚未明確的樣品而言,非常有可能需要使用到數種不同激發光源,方得以完成預期的檢測項目;然而,類似習用拉曼光譜擷取設備多係在機台上配置單一激發光源,若遇有需要使用到不同的激發光源時,則必須更換不同的光源裝置,或是將樣品移置其他機台操作,如此不但耗費相當多的時間,且整個換裝、移置過程亦相對複雜繁瑣,更會因為不當的位移、震動而對檢測結果造成影響。 Furthermore, for samples with unclear structural properties, it is highly probable that several different excitation sources will be required to complete the desired test; however, similar Raman spectroscopy extraction devices are attached to the machine. Configure a single excitation light source. If you need to use different excitation light sources, you must replace different light source devices, or move the sample to other machine operations. This not only takes a lot of time, but also changes and moves. The process is relatively complicated and cumbersome, and it will affect the test results due to improper displacement and vibration.

有鑑於此,本創作即在提供一種可供快速變換不同激發光源的可變光源拉曼光譜擷取設備,為其主要目的者。 In view of this, the present invention is to provide a variable source Raman spectroscopy extraction device for rapidly changing different excitation light sources, which is its main purpose.

為了達到上述目的,本創作之可變光源拉曼光譜擷取設備,基本上包括有:一光源產生模組、一載台、一分光儀,以及一光譜儀;其中:該光源產生模組,係具有至少兩個供於通電後產生預先設定激發光源的光電元件,全數光電元件係以其出光路徑朝同一方向平行照射的方式保持預先設定之間距,另有一 反射鏡係以可於全數光電元件之出光路徑之間往復位移的型態安裝全數光電元件之出光方向處;該載台,係設有供將欲進行掃描之受測樣品固定的定位組件;該分光儀,係設有一與該載台對應配置的物鏡,另於該物鏡與該反射鏡之間設有一分光鏡;該光譜儀,係設於與該分光儀之分光鏡對應的位置,供透過該分光鏡擷取掃描至受測樣品之後回傳的光訊號。 In order to achieve the above object, the variable light source Raman spectroscopy acquisition device of the present invention basically comprises: a light source generating module, a loading stage, a spectrometer, and a spectrometer; wherein: the light source generating module There are at least two photoelectric elements for generating a preset excitation light source after being energized, and all of the photoelectric elements are maintained in a predetermined distance by parallel illumination of the light exiting paths in the same direction, and another The mirror is mounted at a light-emitting direction of all of the photovoltaic elements in a pattern that is reciprocally displaceable between light-emitting paths of all of the photovoltaic elements; the stage is provided with a positioning assembly for fixing the sample to be scanned; The spectrometer is provided with an objective lens corresponding to the stage, and a spectroscope is disposed between the objective lens and the mirror; the spectrometer is disposed at a position corresponding to the spectroscope of the spectrometer for transmitting The beam splitter captures the optical signal that is transmitted back to the sample under test.

利用上述結構特徵,本創作之可變光源拉曼光譜擷取設備,主要透過反射鏡將其中一光電元件所產生的激發光源導引進入分光儀;必要時,可藉由簡單移動反射鏡之方式,變換其他光電元件之激發光源進入分光儀,達到快速對受測樣品之同一點施以不同波長之激發光源掃描,以獲取更多量測值之目的;尤其,可完全避免外在震動或其他人為因素碰觸而造成受測樣品位置偏移誤差,可獲致相對較為準確的量測結果。 Using the above structural features, the variable light source Raman spectroscopic extraction device of the present invention mainly guides the excitation light source generated by one of the photoelectric elements into the spectrometer through a mirror; if necessary, by simply moving the mirror The excitation light source that converts other photoelectric elements enters the spectrometer, so as to quickly scan the excitation light source of different wavelengths at the same point of the sample to be obtained, so as to obtain more measurement values; in particular, external vibration or other can be completely avoided. The human error causes the position error of the sample to be measured, which results in relatively accurate measurement results.

依據上述結構特徵,所述可變光源拉曼光譜擷取設備,係設有一橫跨於全數光電元件之出光路徑之間的線性滑軌,該反射鏡係以可沿著該線性滑軌往復位移的型態,安裝於該線性滑軌上。 According to the above structural feature, the variable light source Raman spectroscopy extracting device is provided with a linear slide rail spanning between the light exit paths of all the photoelectric elements, and the mirror is reciprocally movable along the linear slide rail. The type is mounted on the linear slide.

依據上述結構特徵,所述可變光源拉曼光譜擷取設備,另設有一可供水平往復位移的第一線性平台,於該第一線性平台上設有一可供垂直往復位移的第二線性平台,該載台係設於該第二線性平台上。 According to the above structural feature, the variable light source Raman spectroscopy extracting device is further provided with a first linear platform for horizontal reciprocating displacement, and a second vertical vertical reciprocating displacement is provided on the first linear platform. A linear platform, the stage being disposed on the second linear platform.

依據上述結構特徵,所述光源產生模組,係具有一 供於通電後產生405nm波長激發光源的第一光電元件、一供於通電後產生532nm波長激發光源的第二光電元件、一供於通電後產生632.8nm波長激發光源的第三光電元件。 According to the above structural feature, the light source generating module has a A first photovoltaic element for generating a 405 nm wavelength excitation source after energization, a second photovoltaic element for generating a 532 nm wavelength excitation source after energization, and a third photovoltaic element for generating a 632.8 nm wavelength excitation source after energization.

依據上述結構特徵,所述可變光源拉曼光譜擷取設備,係設有一橫跨於全數光電元件之出光路徑之間的線性滑軌,該反射鏡係以可沿著該線性滑軌往復位移的型態,安裝於該線性滑軌上;另設有一可供水平往復位移的第一線性平台,於該第一線性平台上設有一可供垂直往復位移的第二線性平台,該載台係設於該第二線性平台上;該光源產生模組,係具有一供於通電後產生405nm波長激發光源的第一光電元件、一供於通電後產生532nm波長激發光源的第二光電元件、一供於通電後產生633nm波長激發光源的第三光電元件。 According to the above structural feature, the variable light source Raman spectroscopy extracting device is provided with a linear slide rail spanning between the light exit paths of all the photoelectric elements, and the mirror is reciprocally movable along the linear slide rail. a type mounted on the linear slide; a first linear platform for horizontal reciprocating displacement, and a second linear platform for vertical reciprocating displacement on the first linear platform, the load The stage is disposed on the second linear platform; the light source generating module has a first photoelectric element for generating a 405 nm wavelength excitation light source after being energized, and a second photoelectric element for generating a 532 nm wavelength excitation light source after being energized. A third photovoltaic element for generating a 633 nm wavelength excitation source after being energized.

上述可變光源拉曼光譜擷取設備,係進一步設有一供帶動該反射鏡沿著該線性滑軌往復位移的第一驅動元件、一供驅動該第一線性平台位移的第二驅動元件、一供驅動該第二線性平台位移的第三驅動元件;另設有一與該第一驅動元件、該第二驅動元件、該第三驅動元件、該第一光電元件、該第二光電元件、該第三光電元件及該光譜儀電氣連接的控制電路。 The variable light source Raman spectroscopy extracting device further includes a first driving component for driving the mirror to reciprocate along the linear sliding rail, and a second driving component for driving the displacement of the first linear platform, a third driving element for driving the displacement of the second linear platform; and a first driving element, the second driving element, the third driving element, the first photoelectric element, the second photoelectric element, A third optoelectronic component and a control circuit electrically connected to the spectrometer.

所述光譜儀係透過一光纖耦合器接收來自該分光鏡之光訊號。 The spectrometer receives an optical signal from the beam splitter through a fiber coupler.

具體而言,本創作所揭露之可變光源拉曼光譜擷取設備,可藉由簡單移動反射鏡之方式,變換其他光電元件之激發 光源進入分光儀,達到快速對受測樣品之同一點施以不同波長之激發光源掃描,以獲取更多量測值;尤其,可完全避免外在震動或其他人為因素碰觸而造成受測樣品位置偏移誤差,可獲致相對較為準確的量測結果。 Specifically, the variable light source Raman spectroscopic extraction device disclosed in the present invention can transform the excitation of other photoelectric elements by simply moving the mirror. The light source enters the spectrometer to quickly scan the excitation light source with different wavelengths at the same point of the sample to obtain more measured values; in particular, the external vibration or other human factors can be completely avoided to cause the sample to be tested. The positional offset error can result in relatively accurate measurement results.

A‧‧‧受測樣品 A‧‧‧samples tested

10‧‧‧光源產生模組 10‧‧‧Light source generation module

11‧‧‧第一光電元件 11‧‧‧First Optoelectronics

12‧‧‧第二光電元件 12‧‧‧Second optoelectronic components

13‧‧‧第三光電元件 13‧‧‧ Third optoelectronic component

14‧‧‧反射鏡 14‧‧‧Mirror

20‧‧‧載台 20‧‧‧ stage

30‧‧‧分光儀 30‧‧‧Spectrometer

31‧‧‧物鏡 31‧‧‧ Objective lens

32‧‧‧分光鏡 32‧‧‧beam splitter

40‧‧‧光譜儀 40‧‧‧ Spectrometer

41‧‧‧光纖耦合器 41‧‧‧Fiber coupler

51‧‧‧第一線性平台 51‧‧‧First linear platform

52‧‧‧第二線性平台 52‧‧‧Second linear platform

60‧‧‧線性滑軌 60‧‧‧Linear slides

71‧‧‧第一驅動元件 71‧‧‧First drive element

72‧‧‧第二驅動元件 72‧‧‧Second drive components

73‧‧‧第三驅動元件 73‧‧‧ Third drive component

80‧‧‧控制電路 80‧‧‧Control circuit

第1圖係為本創作之可變光源拉曼光譜擷取設備基本組成架構方塊示意圖。 The first picture is a block diagram of the basic composition of the variable light source Raman spectroscopy acquisition device.

第2圖係為本創作之可變光源拉曼光譜擷取設備於反射鏡改變位置後之狀態示意圖。 Figure 2 is a schematic diagram of the state of the variable light source Raman spectroscopy acquisition device after the mirror is changed position.

本創作主要提供一種可供快速變換不同激發光源的可變光源拉曼光譜擷取設備,如第1圖所示,本創作之可變光源拉曼光譜擷取設備,基本上包括有:一光源產生模組10、一載台20、一分光儀30,以及一光譜儀40,請同時配合參照第2圖所示,其中:該光源產生模組10,係具有至少兩個供於通電後產生預先設定激發光源的光電元件,在本實施例中,所述光源產生模組10基本上具有一供於通電後產生405nm波長激發光源的第一光電元件11、一供於通電後產生532nm波長激發光源的第二光電 元件12、一供於通電後產生632.8nm波長激發光源的第三光電元件13,全數光電元件(第一光電元件11、第二光電元件12及第三光電元件13)係以其出光路徑朝同一方向平行照射的方式保持預先設定之間距,另有一反射鏡14係以可於全數光電元件(第一光電元件11、第二光電元件12及第三光電元件13)之出光路徑之間往復位移的型態安裝全數光電元件(第一光電元件11、第二光電元件12及第三光電元件13)之出光方向處。 The present invention mainly provides a variable light source Raman spectroscopy extraction device for rapidly changing different excitation light sources. As shown in Fig. 1, the variable light source Raman spectroscopy extraction device of the present invention basically comprises: a light source The generating module 10, a loading table 20, a spectrometer 30, and a spectrometer 40 are also referred to in FIG. 2, wherein the light source generating module 10 has at least two for generating electricity in advance. In the embodiment, the light source generating module 10 basically has a first photoelectric element 11 for generating a 405 nm wavelength excitation light source after being energized, and a 532 nm wavelength excitation light source for energization. Second photoelectric Element 12, a third optoelectronic component 13 for generating a 632.8 nm wavelength excitation source after energization, all of the optoelectronic components (first optoelectronic component 11, second optoelectronic component 12, and third optoelectronic component 13) having the same light exiting path The direction of the parallel illumination is maintained at a predetermined distance, and a mirror 14 is reciprocally displaceable between the light paths of the total number of photovoltaic elements (the first photovoltaic element 11, the second photovoltaic element 12, and the third photovoltaic element 13). The light-emitting directions of the entire photovoltaic elements (the first photovoltaic element 11, the second photovoltaic element 12, and the third photovoltaic element 13) are mounted in a pattern.

該載台20,係設有供將欲進行掃描之受測樣品A固定的定位組件(圖略);於實施時,整體可變光源拉曼光譜擷取設備,係可以另外設有一可供水平往復位移的第一線性平台51,於該第一線性平台51上設有一可供垂直往復位移的第二線性平台52,該載台20則係設於該第二線性平台52上,可透過第一、第二線性平台51、52之往復位移,達到調整受測樣品A被掃描點之目的。 The stage 20 is provided with a positioning component (not shown) for fixing the sample A to be scanned; in practice, the overall variable source Raman spectrum extraction device may be additionally provided with a horizontal level. a first linear platform 51 reciprocally displaced, and a second linear platform 52 for vertically reciprocating displacement is disposed on the first linear platform 51, and the loading platform 20 is disposed on the second linear platform 52. Through the reciprocating displacement of the first and second linear platforms 51, 52, the purpose of adjusting the scanned point of the sample A to be tested is achieved.

該分光儀30,係設有一與該載台20對應配置的物鏡31,另於該物鏡31與該反射鏡14之間設有一分光鏡32;主要利用分光鏡32將反射鏡14所反射的激發光源引導至載台20處以對載台20上的受測樣品A進行掃描,同時將受測樣品A所回傳的光訊號引導至光譜儀40。 The spectrometer 30 is provided with an objective lens 31 corresponding to the stage 20, and a beam splitter 32 is disposed between the objective lens 31 and the mirror 14; the excitation of the mirror 14 is mainly used by the beam splitter 32. The light source is directed to the stage 20 to scan the sample A under test on the stage 20 while guiding the optical signal returned by the sample A to the spectrometer 40.

該光譜儀40,則係設於與該分光儀30之分光鏡32對應的位置,供透過該分光鏡32擷取掃描至受測樣品A之後回傳的光訊號;於實施時,所述光譜儀40係可透過一光纖耦合器41 接收來自該分光鏡32之光訊號,以供量測受測樣品A之拉曼光譜現象。 The spectrometer 40 is disposed at a position corresponding to the beam splitter 32 of the spectrometer 30, and is used to extract the optical signal transmitted back to the sample A after being transmitted through the beam splitter 32; in practice, the spectrometer 40 Through a fiber coupler 41 The optical signal from the beam splitter 32 is received for measuring the Raman spectrum phenomenon of the sample A under test.

原則上,本創作之可變光源拉曼光譜擷取設備,於使用時,係將欲進行掃描之受測樣品A固定於載台20上,且先選定要以哪一個光電元件所產生之激發光源對受測樣品A,當選定光電元件後,即將反射鏡14移動至與該光電元件對應的位置,在第1圖所示之實施例中,係選定第三光電元件13之激發光源對受測樣品A進行掃描,因此將反射鏡14移動至與該第三光電元件13對應的位置。 In principle, the variable light source Raman spectroscopy extraction device of the present invention, when in use, fixes the sample A to be scanned to the stage 20, and first selects which one of the photovoltaic elements is to be excited. When the light source is selected for the sample A, after the photoelectric element is selected, the mirror 14 is moved to a position corresponding to the photoelectric element. In the embodiment shown in Fig. 1, the excitation light source of the third photoelectric element 13 is selected. The sample A is scanned, so that the mirror 14 is moved to a position corresponding to the third photovoltaic element 13.

當第三光電元件13啟動運作後,透過反射鏡13將第三光電元件13所產生的激發光源導引進入分光儀30,在分光儀30之作用下,將第三光電元件13所產生之激發光源導引投射至受測樣品A上,再將掃描於受測樣品A上的光訊號回傳至光譜儀40以供掃描及量測受測樣品之拉曼光譜現象。 After the third photoelectric element 13 is activated, the excitation light source generated by the third photoelectric element 13 is guided into the spectrometer 30 through the mirror 13, and the excitation generated by the third photoelectric element 13 is generated by the spectrometer 30. The light source is guided onto the sample A to be tested, and the optical signal scanned on the sample A is returned to the spectrometer 40 for scanning and measuring the Raman spectrum phenomenon of the sample to be tested.

必要時,可藉由簡單移動反射鏡之方式,變換其他光電元件之激發光源進入分光儀30,例如將反射鏡14移動至與該第二光電元件12對應的位置(如第2圖所示),且改由啟動第二光電元件12運作,即可變換由第二光電元件12所產生之激發光源對受測樣品A進行掃描,達到快速對受測樣品A之同一點施以不同波長之激發光源掃描,以獲取更多量測值之目的;尤其,可完全避免外在震動或其他人為因素碰觸而造成受測樣品A位置偏移誤差,可獲致相對較為準確的量測結果。 If necessary, the excitation light source of the other photoelectric element can be converted into the spectrometer 30 by simply moving the mirror, for example, the mirror 14 is moved to a position corresponding to the second photoelectric element 12 (as shown in FIG. 2). And the operation of the second photoelectric element 12 is started, and the excitation light source generated by the second photoelectric element 12 can be converted to scan the sample A to achieve rapid excitation of the same point of the sample A to be applied at different wavelengths. The light source is scanned for the purpose of obtaining more measured values; in particular, the positional offset error of the sample A to be tested may be completely avoided by external shock or other human factors, and a relatively accurate measurement result may be obtained.

本創作之可變光源拉曼光譜擷取設備,於實施時,係可進一步設有一橫跨於全數光電元件(第一光電元件11、第二光電元件12及第三光電元件13)之出光路徑之間的線性滑軌60,該反射鏡14係以可沿著該線性滑軌60往復位移的型態,安裝於該線性滑軌60上,以增加反射鏡14位移之穩定性。 The variable light source Raman spectroscopy extraction device of the present invention can be further provided with a light-emitting path spanning all of the photovoltaic elements (the first photovoltaic element 11, the second photovoltaic element 12, and the third photoelectric element 13). Between the linear slides 60, the mirror 14 is mounted on the linear slide 60 in a reciprocating manner along the linear slide 60 to increase the stability of the displacement of the mirror 14.

當然,整體可變光源拉曼光譜擷取設備,係以設有一橫跨於全數光電元件之出光路徑之間的線性滑軌60,該反射鏡14係以可沿著該線性滑軌60往復位移的型態,安裝於該線性滑軌60上;另設有一可供水平往復位移的第一線性平台51,於該第一線性平台51上設有一可供垂直往復位移的第二線性平台52,該載台20係設於該第二線性平台52上;該光源產生模組,係具有一供於通電後產生405nm波長激發光源的第一光電元件11、一供於通電後產生532nm波長激發光源的第二光電元件12、一供於通電後產生632.8nm波長激發光源的第三光電元件13之結構型態呈現為佳。 Of course, the overall variable source Raman spectroscopy acquisition device is provided with a linear slide 60 spanning between the light exit paths of the full number of photovoltaic elements, the mirror 14 being reciprocally displaceable along the linear slide 60 a type of the first linear platform 51 for horizontal reciprocating displacement, and a second linear platform for vertical reciprocating displacement on the first linear platform 51. 52, the stage 20 is disposed on the second linear platform 52; the light source generating module has a first photoelectric element 11 for generating a 405 nm wavelength excitation light source after being energized, and a 532 nm wavelength for energization. Preferably, the second photovoltaic element 12 of the excitation source, and the third photovoltaic element 13 for generating a 632.8 nm wavelength excitation source after energization, preferably exhibit a structural form.

再者,本創作之可變光源拉曼光譜擷取設備,係可進一步設有一供帶動該反射鏡14沿著該線性滑軌60往復位移的第一驅動元件71、一供驅動該第一線性平台51位移的第二驅動元件72、一供驅動該第二線性平台52位移的第三驅動元件73;另設有一與該第一驅動元件71、該第二驅動元件72、該第三驅動元件73、該第一光電元件11、該第二光電元件12、該第三光電元件13及該光譜儀40電氣連接的控制電路80。 Furthermore, the variable light source Raman spectroscopy acquisition device of the present invention may further be provided with a first driving element 71 for driving the mirror 14 to reciprocate along the linear sliding rail 60, and for driving the first line. a second driving component 72 displaced by the platform 51, a third driving component 73 for driving the displacement of the second linear platform 52, and a first driving component 71, the second driving component 72, and the third driving The element 73, the first optoelectronic element 11, the second optoelectronic element 12, the third optoelectronic element 13, and a control circuit 80 electrically connected to the spectrometer 40.

據以,整體可變光源拉曼光譜擷取設備,即可透過控制電路80、第一驅動元件71、第二驅動元件72、第三驅動元件73、第一光電元件11、第二光電元件12、第三光電元件13及光譜儀40之整合運作,有效達到自動化控制的目標,有效提升量測的速度及品質。 Accordingly, the overall variable light source Raman spectroscopy acquisition device can pass through the control circuit 80, the first driving element 71, the second driving element 72, the third driving element 73, the first photovoltaic element 11, and the second photovoltaic element 12. The integrated operation of the third optoelectronic component 13 and the spectrometer 40 effectively achieves the goal of automatic control and effectively improves the speed and quality of the measurement.

與傳統習用結構相較,本創作所揭露之可變光源拉曼光譜擷取設備,可藉由簡單移動反射鏡之方式,變換其他光電元件之激發光源進入分光儀,達到快速對受測樣品之同一點施以不同波長之激發光源掃描,以獲取更多量測值;尤其,可完全避免外在震動或其他人為因素碰觸而造成受測樣品位置偏移誤差,可獲致相對較為準確的量測結果。 Compared with the conventional structure, the variable light source Raman spectroscopy extraction device disclosed in the present invention can change the excitation light source of other photoelectric components into the spectrometer by simply moving the mirror to achieve rapid measurement of the sample to be tested. At the same point, the excitation light source with different wavelengths is scanned to obtain more measured values; in particular, the positional deviation error of the sample to be tested can be completely avoided by external vibration or other human factors, and a relatively accurate amount can be obtained. Test results.

綜上所述,本創作提供一較佳可行之可變光源拉曼光譜擷取設備,爰依法提呈新型專利之申請;本創作之技術內容及技術特點已揭示如上,然而熟悉本項技術之人士仍可能基於本創作之揭示而作各種不背離本案創作精神之替換及修飾。因此,本創作之保護範圍應不限於實施例所揭示者,而應包括各種不背離本創作之替換及修飾,並為以下之申請專利範圍所涵蓋。 In summary, the present invention provides a preferred and feasible variable source Raman spectroscopy acquisition device, and submits a patent application according to law; the technical content and technical features of the creation have been disclosed above, but are familiar with the technology. Persons may still make substitutions and modifications based on the disclosure of this creation without departing from the spirit of the creation of the case. Therefore, the scope of the present invention is not limited to the embodiments disclosed, but includes various alternatives and modifications that do not depart from the present invention and are covered by the following claims.

A‧‧‧受測樣品 A‧‧‧samples tested

10‧‧‧光源產生模組 10‧‧‧Light source generation module

11‧‧‧第一光電元件 11‧‧‧First Optoelectronics

12‧‧‧第二光電元件 12‧‧‧Second optoelectronic components

13‧‧‧第三光電元件 13‧‧‧ Third optoelectronic component

14‧‧‧反射鏡 14‧‧‧Mirror

20‧‧‧載台 20‧‧‧ stage

30‧‧‧分光儀 30‧‧‧Spectrometer

31‧‧‧物鏡 31‧‧‧ Objective lens

32‧‧‧分光鏡 32‧‧‧beam splitter

40‧‧‧光譜儀 40‧‧‧ Spectrometer

41‧‧‧光纖耦合器 41‧‧‧Fiber coupler

51‧‧‧第一線性平台 51‧‧‧First linear platform

52‧‧‧第二線性平台 52‧‧‧Second linear platform

60‧‧‧線性滑軌 60‧‧‧Linear slides

71‧‧‧第一驅動元件 71‧‧‧First drive element

72‧‧‧第二驅動元件 72‧‧‧Second drive components

73‧‧‧第三驅動元件 73‧‧‧ Third drive component

80‧‧‧控制電路 80‧‧‧Control circuit

Claims (7)

一種可變光源拉曼光譜擷取設備,包括:一光源產生模組、一載台、一分光儀,以及一光譜儀;其中:該光源產生模組,係具有至少兩個供於通電後產生預先設定激發光源的光電元件,全數光電元件係以其出光路徑朝同一方向平行照射的方式保持預先設定之間距,另有一反射鏡係以可於全數光電元件之出光路徑之間往復位移的型態安裝全數光電元件之出光方向處;該載台,係設有供將欲進行掃描之受測樣品固定的定位組件;該分光儀,係設有一與該載台對應配置的物鏡,另於該物鏡與該反射鏡之間設有一分光鏡;該光譜儀,係設於與該分光儀之分光鏡對應的位置,供透過該分光鏡擷取掃描至受測樣品之後回傳的光訊號。 A variable light source Raman spectroscopy extracting device comprises: a light source generating module, a loading stage, a spectrometer, and a spectrometer; wherein: the light source generating module has at least two for generating electricity in advance The photoelectric element of the excitation light source is set, and all the photoelectric elements maintain a preset distance by parallel illumination of the light exiting path in the same direction, and another mirror is mounted in a form that can reciprocally shift between the light exit paths of all the photoelectric elements. a light-emitting direction of all the photoelectric elements; the stage is provided with a positioning component for fixing the sample to be scanned; the spectrometer is provided with an objective lens corresponding to the stage, and the objective lens is A spectroscope is disposed between the mirrors; the spectrometer is disposed at a position corresponding to the spectroscope of the spectrometer, and is configured to obtain an optical signal that is returned after being scanned to the sample to be tested through the spectroscope. 如請求項1所述之可變光源拉曼光譜擷取設備,其中,該可變光源拉曼光譜擷取設備,係設有一橫跨於全數光電元件之出光路徑之間的線性滑軌,該反射鏡係以可沿著該線性滑軌往復位移的型態,安裝於該線性滑軌上。 The variable light source Raman spectroscopic extraction device of claim 1, wherein the variable source Raman spectroscopic extraction device is provided with a linear slide rail spanning between light exit paths of all the photovoltaic elements, The mirror is mounted on the linear slide in a pattern that is reciprocally displaceable along the linear slide. 如請求項1所述之可變光源拉曼光譜擷取設備,其中,該可變光源拉曼光譜擷取設備,另設有一可供水平往復位移的第一線性平台,於該第一線性平台上設有一可供垂直往復位移的第二線性平台,該載台係設於該第二線性平台上。 The variable light source Raman spectroscopic extraction device of claim 1, wherein the variable source Raman spectroscopic extraction device further comprises a first linear platform for horizontal reciprocating displacement, the first line The second platform is provided on the platform with a vertical reciprocating displacement, and the stage is disposed on the second linear platform. 如請求項1所述之可變光源拉曼光譜擷取設備,其中,該光源產生模組,係具有一供於通電後產生405nm波長激發光源的第一光電元件、一供於通電後產生532nm波長激發光源的第二光電元件、一供於通電後產生632.8nm波長激發光源的第三光電元件。 The variable light source Raman spectroscopic extraction device according to claim 1, wherein the light source generating module has a first photoelectric element for generating a 405 nm wavelength excitation light source after being energized, and a 532 nm for supplying electricity. The second optoelectronic component of the wavelength excitation source, and a third optoelectronic component for generating a 632.8 nm wavelength excitation source after energization. 如請求項1所述之可變光源拉曼光譜擷取設備,其中,該可變光源拉曼光譜擷取設備,係設有一橫跨於全數光電元件之出光路徑之間的線性滑軌,該反射鏡係以可沿著該線性滑軌往復位移的型態,安裝於該線性滑軌上;另設有一可供水平往復位移的第一線性平台,於該第一線性平台上設有一可供垂直往復位移的第二線性平台,該載台係設於該第二線性平台上;該光源產生模組,係具有一供於通電後產生405nm波長激發光源的第一光電元件、一供於通電後產生532nm波長激發光源的第二光電元件、一供於通電後產生633nm波長激發光源的第三光電元件。 The variable light source Raman spectroscopic extraction device of claim 1, wherein the variable source Raman spectroscopic extraction device is provided with a linear slide rail spanning between light exit paths of all the photovoltaic elements, The mirror is mounted on the linear slide rail in a reciprocating manner along the linear slide rail; and a first linear platform for horizontally reciprocating displacement, and a first linear platform is disposed on the first linear platform a second linear platform for vertical reciprocating displacement, the stage is disposed on the second linear platform; the light source generating module has a first photoelectric component for generating a 405 nm wavelength excitation light source after being energized, and a After energization, a second optoelectronic component that produces a 532 nm wavelength excitation source, and a third optoelectronic component that produces a 633 nm wavelength excitation source after energization are generated. 如請求項5所述之可變光源拉曼光譜擷取設備,其中,該可變光源拉曼光譜擷取設備,係進一步設有一供帶動該反射鏡沿著該線性滑軌往復位移的第一驅動元件、一供驅動該第一線性平台位移的第二驅動元件、一供驅動該第二線性平台位移的第三驅動元件;另設有一與該第一驅動元件、該第二驅動元件、該第三驅動元件、該第一光電元件、該第二光電元件、該第三光電元件及該光譜儀電氣連接的控制電路。 The variable light source Raman spectroscopy extraction device of claim 5, wherein the variable source Raman spectroscopy extraction device is further provided with a first one for driving the mirror to reciprocate along the linear slide a driving component, a second driving component for driving the displacement of the first linear platform, a third driving component for driving the displacement of the second linear platform; and a first driving component, the second driving component, The third driving element, the first photovoltaic element, the second photovoltaic element, the third photovoltaic element, and a control circuit electrically connected to the spectrometer. 如請求項1至5其中任一項所述之可變光源拉曼光譜擷取設備,其中,該光譜儀係透過一光纖耦合器接收來自該分光鏡之光訊號。 The variable light source Raman spectroscopic pick-up apparatus of any one of claims 1 to 5, wherein the spectrometer receives an optical signal from the spectroscope through a fiber coupler.
TW104209377U 2015-06-11 2015-06-11 Variable light source Raman spectroscopy capture apparatus TWM515103U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI601950B (en) * 2016-08-24 2017-10-11 旭東機械工業股份有限公司 Bubble defect inspection system and method for an infrared cut-off filter
CN110501319A (en) * 2019-08-29 2019-11-26 中国科学院长春应用化学研究所 The Raman super-resolution micro imaging method of multi-path Structured Illumination

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI601950B (en) * 2016-08-24 2017-10-11 旭東機械工業股份有限公司 Bubble defect inspection system and method for an infrared cut-off filter
CN110501319A (en) * 2019-08-29 2019-11-26 中国科学院长春应用化学研究所 The Raman super-resolution micro imaging method of multi-path Structured Illumination

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