TWM506283U - Fast three-dimensional conjugate focus spectrum imaging device - Google Patents

Description

Fast three-dimensional conjugate focal length imaging device

This creation is about a fast three-dimensional conjugate focal-spectrum imaging device.

The fast three-dimensional conjugate focal-spectrum imaging device can be applied to structural analysis, defect analysis, bonding analysis, etc. of materials, and materials that can be analyzed include solar photovoltaic materials, photoelectric semiconductor materials, polymer materials, etc., conventional conjugated focal spectroscopy Imaging devices can usually only be tested at a specific point (one-dimensional) of the test sample. If a large-scale (two-dimensional or three-dimensional) test is required, it takes a lot of time to repeat the measurement to complete the required test.

In view of this, the present invention provides a fast three-dimensional conjugate focal-spectrum imaging device for solving the above problems, which can effectively shorten the test time.

The fast three-dimensional conjugate focal-focus spectral imaging device of the present invention comprises a first light source, a second light source, an objective lens, an optical spectrum analyzer, a photomultiplier tube detector and a charge coupled component. The first light source emits a first light beam directed toward a test sample, and a portion of the first light beam is reflected by the test sample, causing a first reflected light beam to exit the test sample, and the test sample can be excited to emit one of the Raman scattered light. The second light source is disposed on one side of the first light source, the second light source emits a second light beam to the test sample, and part of the second light beam is reflected by the test sample to emit a second reflected light beam testing sample. The objective lens is disposed on one side of the test sample, so that the first beam and the second beam first penetrate the objective lens and then enter the test sample, and the objective lens can move back and forth along the forward direction of the first beam. The spectrum analyzer is disposed on one side of the first light source for receiving Raman scattered light to measure a Raman scattering spectrum of one of the test samples. The photomultiplier tube detector is disposed between the first light source and the spectrum analyzer for receiving the first reflected light beam to measure a conjugate focal image of the test sample. The charge coupled component is disposed on one side of the second light source for receiving the first reflected beam or the second reflected beam.

Wherein the test sample can be excited by the second light source to emit a fluorescent light.

The first light source is a visible light laser.

The first source is a near-infrared laser.

The second light source is a white light source.

The second light source is a red light emitting diode (LED), or a green light emitting diode (LED), or a blue light emitting diode (LED).

The fast three-dimensional conjugate focal-focus imaging device of the present invention further includes a 2-D Galvanometer Scanner, which is disposed in the optical path of the first beam. The first beam, the first reflected beam, and the Raman scattered light are incident on the 2-D Galvanometer Scanner to change the optical paths of the first beam, the first reflected beam, and the Raman scattered light.

The method further includes a scanning lens and an adjusting lens disposed in the optical path of the first beam, so that the first light beam reflected by the 2-D Galvanometer Scanner penetrates the scanning lens and then penetrates and adjusts a lens that can move back and forth in a direction perpendicular to the forward direction of the first beam, the adjustment lens being movable back and forth along the forward direction of the first beam.

The fast three-dimensional conjugate focal-focus imaging device of the present invention further includes an edge filter disposed on one side of the spectrum analyzer and located in an optical path of the first beam, the boundary filter (Edge Filter) The first beam and the first reflected beam are reflected, but the Raman scattered light is allowed to pass through and then incident on the spectrum analyzer.

The fast three-dimensional conjugate focal-focus imaging device of the present invention further comprises a pinhole disposed on one side of the spectrum analyzer, so that the Raman scattered light passes through the pinhole and then enters the spectrum analyzer, and the aperture size of the pinhole can be adjusted. .

The fast three-dimensional conjugate focal-spectrum imaging device of the present invention further comprises a pinhole disposed on one side of the photomultiplier tube detector (PMT Detector), so that the first reflected beam passes through the pinhole first and then enters the photomultiplier tube to detect PMT Detector, the aperture size of the pinhole can be adjusted.

100‧‧‧fast three-dimensional conjugate focal-spectrum imaging device

10‧‧‧First light source

20‧‧‧second light source

30‧‧‧Photomultiplier Tube Detector

40‧‧‧Spectrum Analyzer

50‧‧‧Charge-coupled components

61‧‧‧Mirror

62‧‧‧beam splitter

63‧‧‧Boundary Filters

64‧‧‧Mirror

65‧‧‧beam splitter

66‧‧‧beam splitter

67‧‧‧Two-dimensional scanning galvanometer

68‧‧‧Scan lens

69‧‧‧ lens

70‧‧‧Adjustment lens

71‧‧‧ pinhole

72‧‧‧ pinhole

81‧‧‧ objective lens

82‧‧‧Mobile platform

91‧‧‧Test samples

92‧‧‧Mobile platform

10T‧‧‧First beam

10R‧‧‧First reflected beam

SRS‧‧‧ Raman scattered light

20T‧‧‧second beam

20F‧‧‧Fluorescent

Figure 1 is a schematic illustration of one embodiment of a fast three-dimensional conjugate focal-focus imaging device of the present invention.

Fig. 2 is a schematic view showing the optical path of the first light beam emitted by the first light source of Fig. 1.

Figure 3 is a schematic illustration of the optical path of Raman scattered light in one embodiment of the fast three-dimensional conjugate focal-focus imaging apparatus of the present invention.

Figure 4 is a schematic illustration of the optical path of a conjugate focal image of one embodiment of the fast three-dimensional conjugate focal-focus imaging device of the present invention.

Figure 5 is a schematic illustration of the optical path of the fluorescent light of one embodiment of the fast three-dimensional conjugate focal-focus imaging device of the present invention.

Please refer to Figure 1. Figure 1 shows the fast three-dimensional conjugate focal-focus imaging of this creation. A schematic diagram of one embodiment of the device. The fast three-dimensional conjugate focal-spectrum imaging device 100 includes a first light source 10, a second light source 20, a photomultiplier tube detector (PMT Detector) 30, a spectrum analyzer 40, and a charge coupled device (CCD) 50. A mirror 61, a beam splitter 62, an edge filter 63, a mirror 64, a beam splitter 65, a beam splitter 66, and a 2-D Galvanometer Scanner 67 A scanning lens 68, a lens 69, an adjustment lens 70, a pinhole 71, a pinhole 72, an objective lens 81, a moving platform 82 and a moving platform 92. The first light source 10 can be a visible light laser, or can be a near infrared light laser. The first light source 10 emits a first light beam (not shown), and the first light beam (not shown) is finally directed to a test. Sample (not shown). The second light source 20 can be a white light source, or can be a red light emitting diode (LED), or can be a green light emitting diode (LED), or can be a blue light emitting diode (LED). The second light source 20 emits a second light beam (not shown) which is ultimately directed toward the test sample (not shown). The 2-D Galvanometer Scanner 67 can be rotated using two mirrors to achieve the purpose of scanning the incident beam in a plane (ie 2-D scan). The dichroic mirror 62 is movable in the vertical direction as shown in Fig. 1. The scanning lens 68 is movable in the vertical direction as shown in Fig. 1. The adjustment lens 70 is movable in the vertical direction as shown in Fig. 1. The aperture size of the pinhole 71 and the pinhole 72 can be adjusted according to measurement requirements. The moving platform 82 is for placing the objective lens 81 and is movable in the X-axis, Y-axis, and Z-axis directions in the space, and moves the objective lens 81 in the X-axis, Y-axis, and Z-axis directions in the space. The moving platform 92 is for placing a test sample (not shown) and is movable in the X-axis, the Y-axis, and the Z-axis direction in the space, so that the test sample (not shown) is in the X-axis, the Y-axis, and the Z in the space. Move in the direction of the axis.

The process of measuring the conjugate focal length spectrum and the conjugate focal image and the corresponding optical path of the fast three-dimensional conjugate focal-spectrum imaging apparatus 100 will be further described in detail below.

Please refer to FIG. 2, which is the first light emitted by the first light source of FIG. Schematic diagram of the optical path of the beam. When the conjugate focal length spectrum or the conjugate focal image of the test sample is to be measured, a test sample 91 is first placed on the moving platform 92 to activate the first light source 10, and the first light source 10 emits a first light beam 10T. A beam 10T is first incident on the mirror 61, reflected by the mirror 61, and then directed to the edge filter 63. The edge filter 63 will reflect the incident first beam 10T and re-shoot. To the 2-D Galvanometer Scanner 67, the 2-D Galvanometer Scanner 67 will reflect the incident first beam 10T, then strike the scanning lens 68 and penetrate the scanning lens 68. And then reflected by the mirror 64, reflected by the mirror 64, and then directed to the adjustment lens 70 and penetrated the adjustment lens 70, and then directed to the beam splitter 66, then partially reflected by the beam splitter 66, and then directed to the objective lens 81 and penetrated The objective lens 81 is finally incident on the test sample 91. The test sample 91 can partially reflect the incident first light beam 10T, and a first reflected light beam 10R is emitted from the test sample 91, then enters the objective lens 81 and penetrates the objective lens 81, and then faces the beam splitter 66 and partially penetrates the beam splitter. 66, after being directed to the beam splitter 65, partially reflected by the beam splitter 65, then directed toward the lens 69 and penetrating through the lens 69, and finally incident on the charge coupled device (CCD) 50, which can be tested by the charge coupled device (CCD) 50. The image of the sample 91, by adjusting the position of the moving platform 92, causes the first beam 10T to accurately enter the position to be illuminated.

When the first light beam 10T as shown in Fig. 2 is irradiated to the test sample 91, the test sample 91 is thus excited by the first light beam 10T to a Raman scattered light SRS. Please refer to FIG. 3, which is a schematic diagram of the optical path of Raman scattered light in one embodiment of the fast three-dimensional conjugate focal-focus imaging device of the present invention. The forward direction of the Raman scattered light SRS is opposite to the direction in which the first beam 10T is incident on the test sample 91, which will first penetrate the objective lens 81, and then partially reflect through the beam splitter 66, and then be directed to the adjustment lens 70 and penetrate the adjustment lens 70. And then reflected by the mirror 64, then directed to the scanning lens 68 and penetrates the scanning lens 68, and then directed to the 2-D Galvanometer Scanner 67 and It is reflected by a 2-D Galvanometer Scanner 67, then directed to an Edge Filter 63 and penetrates the Edge Filter 63, penetrates the pinhole 72, and finally enters. The spectrum analyzer 40, that is, the spectrum of the Raman scattered light excited by a certain point (position) of the test sample 91 can be measured by the spectrum analyzer 40, if the moving platform 82 is moved in the horizontal direction as shown in FIG. By moving, the objective lens 81 is also moved in the horizontal direction as shown in Fig. 3, and the conjugated focal Raman scattered light spectrum of the different depths of the test sample 91 can be measured. To measure the spectrum of the Raman scattered light excited by a certain range of the test sample 91, the scanning function of the 2-D Galvanometer Scanner 67 can be activated to make the incident first beam 10T flat. The scanning (ie, 2-D scanning) is further combined with the scanning lens 68 and the adjusting lens 70 to move in the vertical direction as shown in FIG. 3, so that the first beam 10T scans a certain range of the test sample 91, which can be analyzed by spectral analysis. The meter 40 measures the spectrum of the Raman scattered light excited by a certain range of the test sample 91. At this time, if the moving platform 82 is moved in the horizontal direction as shown in FIG. 3, the objective lens 81 is also along the third level. In the horizontal direction shown in the figure, the conjugated focal Raman scattered light spectrum of a certain depth of a certain range of the test sample 91 can be measured, that is, the 3-dimensional conjugated focal Raman scattered light spectrum of the test sample 91.

Please refer to FIG. 4, which is a schematic diagram showing the optical path of the conjugate focal image of one embodiment of the fast three-dimensional conjugate focal-focus imaging device of the present invention. After the measurement of the Raman scattered light spectrum of the test sample 91 is completed, the beam splitter 62 can be moved to the position shown in FIG. 4 at the position shown in FIG. 3 to capture the conjugate focus of the test sample 91. image. When the first light beam 10T as shown in FIG. 4 is finally focused and irradiated to the test sample 91 via the objective lens 81, the test sample 91 can partially reflect the incident first light beam 10T, and the first reflected light beam 10R is emitted from the test sample 91. The object 81 is incident on the objective lens 81 and penetrates the objective lens 81, and then partially reflected by the beam splitter 66, and then directed to the adjustment lens 70 and penetrates the adjustment lens 70, and then reflected by the mirror 64, and then directed to the scanning lens 68 and penetrates the scanning lens. 68, and then directed to a 2-D Galvanometer Scanner 67 and reflected by a 2-D Galvanometer Scanner 67, and then directed to an Edge Filter 63, boundary filter The edge filter 63 reflects the first reflected beam 10R and then reflects the beam to the spectroscope 62. The spectroscope 62 reflects a portion of the first reflected beam 10R to penetrate the pinhole 71, and finally enters the photomultiplier tube. A detector (PMT Detector) 30, which can capture a conjugate focal image of a certain point (position) of the test sample 91 by a photomultiplier tube detector (PMT Detector) 30, if the mobile platform 82 is as in the fourth The horizontal movement shown in the figure causes the objective lens 81 to also move in the horizontal direction as shown in Fig. 4, and the conjugate focal image of the different depths of the test sample 91 can be measured. If a certain range of conjugate focal images of the test sample 91 are to be measured, the scanning function of the 2-D Galvanometer Scanner 67 can be activated to scan the incident first beam 10T in a plane (ie, 2- D scan), in conjunction with the scanning lens 68 and the adjustment lens 70 in the vertical direction as shown in FIG. 4, so that the first beam 10T scans a certain range of the test sample 91, that is, the photomultiplier tube detector ( The PMT Detector 30 measures a range of conjugate focal images of the test sample 91. If the moving platform 82 is moved in the horizontal direction as shown in FIG. 4, the objective lens 81 is also shown as shown in FIG. In the horizontal direction, the conjugate focal image of a certain depth of a certain range of the test sample 91 that can be measured is the 3-dimensional conjugate focal image of the test sample 91.

The fast three-dimensional conjugate focal-focus imaging device of this creation can also be used to measure fluorescent images. Please refer to FIG. 5, which is a schematic diagram of the optical path of the fluorescent light of one embodiment of the fast three-dimensional conjugate focal-focus imaging device of the present invention. The second light source 20 emits a second light beam 20T, and then sequentially passes through the beam splitter 65, the beam splitter 66, the objective lens 81, and finally irradiates the test sample 91, and the test sample 91 is excited to emit a fluorescent light 20F, the fluorescent light 20F The forward direction is opposite to the direction in which the second beam 20T is incident on the test sample 91, which will first penetrate the objective lens 81 and then partially penetrate the beam splitter 66, and then The beam is directed to the beam splitter 65, and then partially reflected by the beam splitter 65, and then directed toward the lens 69 and penetrates the lens 69. Finally, the charge coupled device (CCD) 50 is incident, and the test sample 91 can be measured by the charge coupled device (CCD) 50. The fluorescent image, when the second light source 20 is a red light emitting diode (LED), the red fluorescent image of the test sample 91 can be measured, and when the second light source 20 is a green light emitting diode (LED) When the green light fluorescence image of the test sample 91 is measured, when the second light source 20 is a blue light emitting diode (LED), the blue fluorescent image of the test sample 91 can be measured. If the second light source 20 is a white light source, the test sample 91 can reflect part of the white light, but cannot be excited by the fluorescent light. At this time, the visible light image of the test sample 91 is measured by the charge coupled device (CCD) 50. .

Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and any person having ordinary knowledge in the technical field can make some changes without departing from the spirit and scope of the present invention. And the retouching, therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached.

100‧‧‧fast three-dimensional conjugate focal-spectrum imaging device

10‧‧‧First light source

20‧‧‧second light source

30‧‧‧Photomultiplier Tube Detector

40‧‧‧Spectrum Analyzer

50‧‧‧Charge-coupled components

61‧‧‧Mirror

62‧‧‧beam splitter

63‧‧‧Boundary Filters

64‧‧‧Mirror

65‧‧‧beam splitter

66‧‧‧beam splitter

67‧‧‧Two-dimensional scanning galvanometer

68‧‧‧Scan lens

69‧‧‧ lens

70‧‧‧Adjustment lens

71‧‧‧ pinhole

72‧‧‧ pinhole

81‧‧‧ objective lens

82‧‧‧Mobile platform

92‧‧‧Mobile platform

Claims (11)

A fast three-dimensional conjugate focal-focus spectral imaging apparatus includes: a first light source, the first light source emits a first light beam directed toward a test sample, and a portion of the first light beam is reflected by the test sample to make a first reflection The light beam emits the test sample, the test sample can be excited to emit one of the Raman scattered light; a second light source is disposed on one side of the first light source, and the second light source emits a second light beam to the test sample, the second light source The second light beam is reflected by the test sample, and a second reflected light beam is emitted from the test sample; an objective lens is disposed on one side of the test sample, so that the first light beam and the second light beam first penetrate the objective lens Re-injecting the test sample, the objective lens can move back and forth along the forward direction of the first light beam; a spectrum analyzer is disposed on one side of the first light source for receiving the Raman scattered light to measure the test sample a Raman scattering spectrum; a photomultiplier tube detector (PMT Detector) is disposed between the first light source and the spectrum analyzer for receiving the first reflected beam to measure one of the test samples Image; and a charge coupled device (CCD) is provided on a side of the second light source, for receiving the first reflected beam or the second reflected beam. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, wherein the test sample is excited by the second light source to emit fluorescence. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, wherein the first light source is a visible light laser. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, wherein the first light source is a near-infrared laser. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, wherein the second light source is a white light source. The fast three-dimensional conjugate focal-spectrum imaging device of claim 1, wherein the second light source is a red light emitting diode (LED) or a green light emitting diode (LED), or It is a blue light emitting diode (LED). The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, further comprising a 2-D Galvanometer Scanner, the 2-D Galvanometer Scanner setting In the optical path of the first light beam, the first light beam, the first reflected light beam, and the Raman scattered light are incident on the two-dimensional scanning galvanometer (2-D Galvanormeter Scanner), and the first light beam is changed. A reflected beam and an optical path of the Raman scattered light. The fast three-dimensional conjugate focal-focus imaging device of claim 7, further comprising a scanning lens and an adjustment lens disposed in the optical path of the first beam, such that the two-dimensional scanning galvanometer (2) -D Galvanometer Scanner) the first beam reflected first penetrates the scanning lens and then penetrates the adjustment lens, and the scanning lens can move back and forth along a direction perpendicular to the forward direction of the first beam, the adjustment lens can be along The first beam is moved forward and backward before the forward direction. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, further comprising an edge filter disposed on one side of the optical spectrum analyzer and located in an optical path of the first light beam. The edge filter reflects the first beam and the first reflected beam, but allows the Raman scattered light to pass through and then enter the spectrum analyzer. The fast three-dimensional conjugate focal-focus spectral imaging device of claim 1, further comprising a pinhole disposed on one side of the spectrum analyzer, wherein the Raman scattered light passes through the pinhole and then enters the hole. The spectrum analyzer has an adjustable aperture size. The fast three-dimensional conjugate focal-spectrum imaging device of claim 1, further comprising a pinhole disposed on one side of the photomultiplier detector (PMT Detector), so that the first reflected beam passes first The pinhole is then incident on the photomultiplier tube detector (PMT Detector), and the aperture size of the pinhole can be adjusted.