TWM512796U - Magnetic core inductor preform - Google Patents

Magnetic core inductor preform Download PDF

Info

Publication number
TWM512796U
TWM512796U TW104210223U TW104210223U TWM512796U TW M512796 U TWM512796 U TW M512796U TW 104210223 U TW104210223 U TW 104210223U TW 104210223 U TW104210223 U TW 104210223U TW M512796 U TWM512796 U TW M512796U
Authority
TW
Taiwan
Prior art keywords
preform
core inductor
connecting portion
magnetic core
main body
Prior art date
Application number
TW104210223U
Other languages
Chinese (zh)
Inventor
Min-Ho Hsiao
Pang-Yen Lee
Yen-Hao Tseng
Original Assignee
Wafer Mems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wafer Mems Co Ltd filed Critical Wafer Mems Co Ltd
Priority to TW104210223U priority Critical patent/TWM512796U/en
Priority to CN201520599133.5U priority patent/CN204884759U/en
Publication of TWM512796U publication Critical patent/TWM512796U/en

Links

Description

磁芯電感器的預形體Core inductor pre-form

本新型是有關於一種預形體(preform),特別是指一種磁芯電感器的預形體。The present invention relates to a preform, and more particularly to a preform of a magnetic core inductor.

目前市面上的磁芯電感器,主要可分為薄膜式(thin film)、積層式(multilayer)及繞線式(wire wound)。如台灣第TW 201440090 A早期公開號發明專利案(以下稱前案1)所公開的一種積層式磁芯電感器1(magnetic-core inductor,見圖1)及其製造方法(見圖2至圖7)。Current magnetic core inductors are mainly classified into thin film, multilayer, and wire wound. For example, a magnetic-core inductor (see FIG. 1) disclosed in Taiwan's TW 201440090 A early publication patent case (hereinafter referred to as the first case 1) and a manufacturing method thereof (see FIG. 2 to FIG. 7).

該積層式磁芯電感器1的製造方法,包含以下步驟:(A)由下而上依序積層壓接一第一電路陶瓷母片110、一第二電路陶瓷母片120、一第三電路陶瓷母片130,及一第四電路陶瓷母片140(如圖2所示);(B)令一表面塗佈有一焊墊電極(bonding pad)1501陣列的載膜150,面向該第一電路陶瓷母片110的一第一預定電路圖案1120陣列設置(如圖3所示);(C)將該焊墊電極1501陣列轉印至該第一電路陶瓷母片110上的第一預定電路圖案1120陣列從而構成一第一電路圖案112陣列(如圖4所示);(D)剝離該載膜150(如圖5所示);(E)燒結該等電路陶瓷母片110、120、130、140以構成一集合基板100(如圖6所示);及(F)以一刻劃 具160對該集合基板100施予刻劃,令該集合基板100被分割成多數個積層體10,且令集合基板100內的第一電路圖案112陣列被分割成多數個第一電路圖案112並構成如圖1所示的積層式磁芯電感器1。The manufacturing method of the laminated core inductor 1 comprises the following steps: (A) sequentially laminating a first circuit ceramic mother chip 110, a second circuit ceramic mother chip 120, and a third circuit from bottom to top. a ceramic mother chip 130, and a fourth circuit ceramic mother chip 140 (shown in FIG. 2); (B) a surface coated with a carrier film 150 of an array of bonding pads 1501 facing the first circuit A first predetermined circuit pattern 1120 of the ceramic mother substrate 110 is arranged in an array (as shown in FIG. 3); (C) an array of the pad electrode 1501 is transferred to the first predetermined circuit pattern on the first circuit ceramic mother substrate 110. The array of 1120 thus constitutes an array of first circuit patterns 112 (as shown in FIG. 4); (D) stripping the carrier film 150 (as shown in FIG. 5); (E) sintering the circuit ceramic master chips 110, 120, 130 , 140 to form a collective substrate 100 (as shown in FIG. 6); and (F) to scribe a The assembly substrate 100 is scribed such that the collective substrate 100 is divided into a plurality of laminated bodies 10, and the array of first circuit patterns 112 in the collective substrate 100 is divided into a plurality of first circuit patterns 112. A laminated core inductor 1 as shown in FIG. 1 is constructed.

如圖1所示,經該步驟(F)所刻劃出的該積層式磁芯電感器1由下而上依序包含:一第一電路陶瓷片11、一第二電路陶瓷片12、一第三電路陶瓷片13,及一第四電路陶瓷片14。該第一電路陶瓷片11具有一非磁性體111,及該配置於該第一電路陶瓷片11之非磁性體111中的第一電路圖案112。該第二電路陶瓷片12與該第三電路陶瓷片13分別具有一磁性體121、131,及一分別配置於其磁性體121、131中的第二電路圖案122與第三電路圖案132。該第四電路陶瓷片14具有一非磁性體141,及一配置於該第四電路陶瓷片14之非磁性體141中的第四電路圖案142。As shown in FIG. 1 , the laminated core inductor 1 delineated by the step (F) is sequentially included from bottom to top: a first circuit ceramic piece 11 , a second circuit ceramic piece 12 , and a first circuit ceramic piece 11 . The third circuit ceramic piece 13, and a fourth circuit ceramic piece 14. The first circuit ceramic piece 11 has a non-magnetic body 111 and a first circuit pattern 112 disposed in the non-magnetic body 111 of the first circuit ceramic piece 11. The second circuit ceramic piece 12 and the third circuit ceramic piece 13 respectively have a magnetic body 121, 131, and a second circuit pattern 122 and a third circuit pattern 132 respectively disposed in the magnetic bodies 121, 131 thereof. The fourth circuit ceramic piece 14 has a non-magnetic body 141 and a fourth circuit pattern 142 disposed in the non-magnetic body 141 of the fourth circuit ceramic piece 14.

該積層式磁芯電感器1是利用該等電路陶瓷片11、12、13、14的電路圖案112、122、132、142以共同構成一內繞式的線圈,並配合該等磁性體121、131以形成該積層式磁芯電感器1的一磁芯。然而,詳細地來說,於執行該步驟(A)之前,是依序對多數陶瓷母片(圖未示)貫孔以於各陶瓷母片形成多數通孔、於各通孔內填置導電糊以形成多數導通導體,以及在各陶瓷母片上塗置導電糊以形成各電路圖案112、122、132、142等多道程序,才可製得各電路陶瓷母片110、120、130、140。此外,在執行完該步驟(E)的燒結處理與該步驟(F)之刻畫後才可取得各積層式 磁芯電感器1之積層體10的外觀面。就製程面來說,前案1的程序相當繁瑣,使製造成本提升。另外,因為積層體10是經堆疊燒結該等電路陶瓷母片110、120、130、140並施予刻劃後所取得,使該積層式磁芯電感器1體積也隨之提高,而不利於安排至電路板上的布局。The laminated core inductor 1 is formed by using the circuit patterns 112, 122, 132, and 142 of the circuit ceramic sheets 11, 12, 13, and 14 to form an inner winding type coil, and is matched with the magnetic bodies 121, 131 to form a magnetic core of the laminated core inductor 1. However, in detail, before performing this step (A), a plurality of ceramic mother sheets (not shown) are sequentially formed to form a plurality of through holes for each ceramic mother sheet, and conductive holes are filled in the respective through holes. The circuit ceramic masters 110, 120, 130, 140 can be prepared by forming a plurality of conductive conductors and applying a conductive paste on each of the ceramic mother sheets to form a plurality of circuits such as circuit patterns 112, 122, 132, and 142. . In addition, after the sintering process of the step (E) and the drawing of the step (F) are performed, the laminated layers can be obtained. The design surface of the laminated body 10 of the magnetic core inductor 1. As far as the process surface is concerned, the procedure of the previous case 1 is rather cumbersome, which increases the manufacturing cost. In addition, since the laminated body 10 is obtained by stacking and sintering the circuit ceramic mother chips 110, 120, 130, and 140, the volume of the laminated core inductor 1 is also increased, which is disadvantageous. Arrange to the layout on the board.

經上述說明可知,簡化磁芯電感器之外觀面的製作方法以降低製作成本,是此技術領域的相關技術人員所待突破的難題。It can be seen from the above description that simplifying the manufacturing method of the appearance surface of the magnetic core inductor to reduce the manufacturing cost is a difficult problem to be solved by those skilled in the technical field.

因此,本新型之目的,即在提供一種磁芯電感器的預形體。Accordingly, it is an object of the present invention to provide a preform for a magnetic core inductor.

於是,本新型磁芯電感器的預形體,是連接於一磁性基板的一基座,該基座具有一輪廓面,且該基座之輪廓面包括相反設置的一第一側緣及一第二側緣。該磁芯電感器的預形體包含:一主體部與至少一連接部。Therefore, the preform of the novel magnetic core inductor is a base connected to a magnetic substrate, the base has a contoured surface, and the contour surface of the base includes a first side edge and a first oppositely disposed Two side edges. The preform of the magnetic core inductor comprises: a main body portion and at least one connecting portion.

該主體部具有一輪廓面,該主體部之輪廓面包括相反設置的一第一側緣及一第二側緣。該連接部具有一輪廓面,該連接部的輪廓面包括相反設置的一第一端與一第二端。該連接部的第一端是連接於該基座的第二側緣,且是自該基座的第二側緣朝該主體部的第一側緣的一第一方向延伸,以使該連接部的第二端連接於該主體部的第一側緣,並令該連接部的輪廓面銜接於該主體部的輪廓面與該基座的輪廓面。在本新型中,該主體部與該連接部是由一相同於該磁性基板的材質所構成,且該主體部與該連接 部為一體者(unity)。The main body portion has a contoured surface, and the contoured surface of the main body portion includes a first side edge and a second side edge disposed oppositely. The connecting portion has a contoured surface, and the contoured surface of the connecting portion includes a first end and a second end disposed oppositely. The first end of the connecting portion is connected to the second side edge of the base, and extends from a second side edge of the base toward a first direction of the first side edge of the main body portion to enable the connection The second end of the portion is connected to the first side edge of the main body portion, and the contour surface of the connecting portion is coupled to the contour surface of the main body portion and the contour surface of the base portion. In the present invention, the main body portion and the connecting portion are formed by a material similar to the magnetic substrate, and the main body portion is connected thereto. The unity is unity.

本新型之功效在於,藉由該磁芯電感器的預形體預先成形於該磁性基板,無須機械刻畫,並利用該等連接部連接於各基座,使各主體部便於被折斷,因而有利於量產化且製程簡化。另外,相較多層陶瓷母片燒結,該磁芯電感器的預形體為一體結構,因而具有較高的結構強度。The utility model has the advantages that the preform of the magnetic core inductor is pre-formed on the magnetic substrate without mechanical drawing, and the connecting portions are connected to the bases, so that the main body portions are easily broken, thereby facilitating the cutting. Mass production and simplified process. In addition, since a plurality of ceramic mother sheets are sintered, the preform of the magnetic core inductor has an integral structure and thus has high structural strength.

2‧‧‧磁芯電感器的預形體2‧‧‧Preform of magnetic core inductor

20‧‧‧磁性基板20‧‧‧Magnetic substrate

200‧‧‧基座200‧‧‧Base

201‧‧‧上表面201‧‧‧ upper surface

2011‧‧‧部分區域2011‧‧‧Partial area

2012‧‧‧剩餘區域2012‧‧‧ remaining area

202‧‧‧下表面202‧‧‧lower surface

203‧‧‧輪廓面203‧‧‧ contour surface

204‧‧‧第一側緣204‧‧‧First side edge

205‧‧‧第二側緣205‧‧‧second side edge

21‧‧‧主體部21‧‧‧ Main body

210‧‧‧輪廓面210‧‧‧ contour surface

211‧‧‧第一側緣211‧‧‧ first side edge

212‧‧‧第二側緣212‧‧‧Second side edge

213‧‧‧溝槽213‧‧‧ trench

214‧‧‧穿孔214‧‧‧Perforation

22‧‧‧連接部22‧‧‧Connecting Department

220‧‧‧輪廓面220‧‧‧ contour surface

221‧‧‧第一端221‧‧‧ first end

222‧‧‧第二端222‧‧‧ second end

2221‧‧‧凹槽2221‧‧‧ Groove

3‧‧‧光阻層3‧‧‧ photoresist layer

31‧‧‧預定圖案31‧‧‧Prescribed pattern

310‧‧‧外觀形狀310‧‧‧ appearance shape

311‧‧‧基座部311‧‧‧Base section

312‧‧‧橋接部312‧‧ ‧Bridge

3121‧‧‧缺口3121‧‧ ‧ gap

313‧‧‧本體部313‧‧‧ Body Department

4‧‧‧模具4‧‧‧Mold

41‧‧‧模穴41‧‧‧ cavity

X‧‧‧第一方向X‧‧‧ first direction

Y‧‧‧第二方向Y‧‧‧second direction

本新型之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一立體分解圖,說明由台灣第TW 201440090 A早期公開號發明專利案所公開的一種積層式磁芯電感器;圖2是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(A);圖3是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(B);圖4是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(C);圖5是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(D);圖6是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(E);圖7是一截面圖,說明該積層式磁芯電感器的製造方法的一步驟(F); 圖8是一俯視示意圖,說明本新型磁芯電感器的預形體的一第一實施例;圖9是一俯視示意圖,說明本新型磁芯電感器的預形體的一第二實施例;圖10是一俯視示意圖,說明該第二實施例之磁芯電感器的預形體之一主體部形成有複數溝槽的一態樣;圖11是一俯視示意圖,說明該第二實施例之磁芯電感器的預形體之主體部形成有複數穿孔的另一態樣;圖12是一俯視示意圖,說明本新型磁芯電感器的預形體的一第三實施例;圖13是一沿圖12的直線XⅢ-XⅢ所取得的剖視示意圖;圖14是一俯視示意圖,說明本新型磁芯電感器的預形體之第一量產方法之一步驟(a1);圖15是一沿圖14的直線XV-XV所取得的剖視示意圖;圖16是一俯視示意圖,說明該第一量產方法的一步驟(b1);圖17是一沿圖16的直線XVⅡ-XVⅡ所取得的剖視示意圖;圖18是一俯視示意圖,說明該第一量產方法的一步驟(c1);圖19是一俯視示意圖,說明該第一量產方法的一步驟(d1); 圖20是一立體示意圖,說明本新型磁芯電感器的預形體之第二量產方法之一步驟(a2)的一模具;圖21是一剖視示意圖,說明該第二量產方法的該步驟(a2);圖22是一剖視示意圖,說明該第二量產方法之一步驟(b2)。Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 is an exploded perspective view showing a layer disclosed by the Taiwan Patent Publication No. TW 201440090 A. Magnetic core inductor; FIG. 2 is a cross-sectional view showing a step (A) of the manufacturing method of the laminated magnetic core inductor; FIG. 3 is a cross-sectional view showing the manufacturing method of the laminated magnetic core inductor a step (B); FIG. 4 is a cross-sectional view illustrating a step (C) of the method of manufacturing the laminated core inductor; and FIG. 5 is a cross-sectional view illustrating the method of manufacturing the laminated core inductor a step (D); FIG. 6 is a cross-sectional view illustrating a step (E) of the method of manufacturing the laminated core inductor; and FIG. 7 is a cross-sectional view illustrating the method of manufacturing the laminated core inductor One step (F); Figure 8 is a top plan view showing a first embodiment of the preform of the novel magnetic core inductor; Figure 9 is a top plan view showing a second embodiment of the preform of the novel magnetic core inductor; Figure 10 It is a top view showing a state in which a main body portion of a preform of the magnetic core inductor of the second embodiment is formed with a plurality of grooves; FIG. 11 is a top plan view showing the core inductance of the second embodiment. Figure 12 is a top plan view showing a third embodiment of the preform of the novel magnetic core inductor; Figure 13 is a line along the line of Figure 12; FIG. 14 is a top plan view showing a first step (a1) of the first mass production method of the preform of the novel magnetic core inductor; FIG. 15 is a line XV along FIG. -XV is a schematic cross-sectional view; FIG. 16 is a top plan view illustrating a first step (b1) of the first mass production method; and FIG. 17 is a cross-sectional view taken along line XVII-XVII of FIG. 18 is a top view showing one of the first mass production methods Step (C1); FIG. 19 is a top plan schematic view illustrating a first production step of the method (D1); Figure 20 is a perspective view showing a mold of one step (a2) of the second mass production method of the preform of the novel magnetic core inductor; Figure 21 is a schematic cross-sectional view showing the second mass production method Step (a2); Fig. 22 is a schematic cross-sectional view showing one step (b2) of the second mass production method.

在本新型被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

參閱圖8,本新型磁芯電感器的預形體2的一第一實施例,是連接於一磁性基板20的一基座200,該基座200具有一輪廓面203,且該基座200之輪廓面203包括相反設置的一第一側緣204及一第二側緣205。該磁芯電感器的預形體2包含一主體部21與兩個連接部22。Referring to FIG. 8, a first embodiment of the preform 2 of the novel magnetic core inductor is a base 200 connected to a magnetic substrate 20. The base 200 has a contoured surface 203, and the base 200 The contoured surface 203 includes a first side edge 204 and a second side edge 205 that are oppositely disposed. The preform 2 of the magnetic core inductor comprises a main body portion 21 and two connecting portions 22.

該主體部21具有一輪廓面210,該主體部21之輪廓面210包括相反設置的一第一側緣211及一第二側緣212。The body portion 21 has a contoured surface 210. The contoured surface 210 of the body portion 21 includes a first side edge 211 and a second side edge 212 disposed oppositely.

各連接部22具有一輪廓面220,各連接部22的輪廓面220包括相反設置的一第一端221與一第二端222。如圖8所示,各連接部22的第一端221是連接於該基座200的第二側緣205,且是自該基座200的第二側緣204朝該主體部21的第一側緣211的一第一方向X延伸,以使各連接部22的第二端222連接於該主體部21的第一側緣211,並令各連接部22的輪廓面220銜接於該主體部21的輪 廓面210與該基座200的輪廓面203。該等連接部22是沿一與該第一方向X夾一預定角度的第二方向Y彼此間隔設置。在本新型該第一實施例中,該預定角度是以90度為例作說明,但不以此為限。Each of the connecting portions 22 has a contoured surface 220. The contoured surface 220 of each connecting portion 22 includes a first end 221 and a second end 222 disposed oppositely. As shown in FIG. 8, the first end 221 of each connecting portion 22 is connected to the second side edge 205 of the base 200, and is the first side from the second side edge 204 of the base 200 toward the main body portion 21. A first direction X of the side edge 211 extends to connect the second end 222 of each connecting portion 22 to the first side edge 211 of the main body portion 21, and the contour surface 220 of each connecting portion 22 is coupled to the main body portion 21 round The profile 210 and the contoured surface 203 of the base 200. The connecting portions 22 are spaced apart from each other along a second direction Y that is a predetermined angle with the first direction X. In the first embodiment of the present invention, the predetermined angle is exemplified by 90 degrees, but is not limited thereto.

更具體地來說,在本新型該第一實施例中,該基座200的輪廓面203是由如圖8所示之該基座200的一頂面區、一底面區、一左側面區、一右側面區、一前面區與一背面區所共同定義而成;該主體部21的輪廓面210是由如圖8所示之該主體部21的一頂面區、一底面區、一左側面區、一右側面區、一前面區與一背面區所共同定義而成;各連接部22的輪廓面220是由如圖8所示之各連接部22的一頂面區、一底面區、一前面區與一背面區所共同定義而成;此外,該主體部21與該連接部22是由一相同於該磁性基板20的材質所構成。較佳地,該材質是選自一如鐵(Fe)、鈷(Co)、鎳(Ni)之磁性金屬,或一磁性陶瓷,如具有反尖晶石結構(inverse spinel structure)的鐵氧磁體(ferrite;Fe3 O4 )。經前述說明可知,本新型該第一實施例之各連接部22的輪廓面220可銜接該基座200的輪廓面203與該主體部21的輪廓面210;此外,基於該主體部21與該等連接部22是由相同於該磁性基板20的材質所構成,且該主體部21與該等連接部22為一體者,以致該預形體2之主體部21的整體結構強度高,不像圖1所示之積層式磁芯電感器1般,於該等電路陶瓷片11、12、13、14相鄰界面間存在有強度不足的問題。More specifically, in the first embodiment of the present invention, the contour surface 203 of the susceptor 200 is a top surface area, a bottom surface area, and a left side area of the susceptor 200 as shown in FIG. a right side area, a front area and a back area are defined together; the contour surface 210 of the main body portion 21 is a top surface area, a bottom surface area, and a bottom surface area of the main body portion 21 as shown in FIG. The left side area, the right side area, the front area and the back area are defined together; the contour surface 220 of each connecting portion 22 is a top surface and a bottom surface of each connecting portion 22 as shown in FIG. The area, a front area and a back area are defined together; in addition, the main body portion 21 and the connecting portion 22 are formed of a material similar to the magnetic substrate 20. Preferably, the material is selected from a magnetic metal such as iron (Fe), cobalt (Co), nickel (Ni), or a magnetic ceramic such as a ferrite magnet having an inverse spinel structure. (ferrite; Fe 3 O 4 ). According to the foregoing description, the contour surface 220 of each connecting portion 22 of the first embodiment of the present invention can engage the contour surface 203 of the base 200 and the contour surface 210 of the main body portion 21; further, based on the main body portion 21 and the The connecting portion 22 is made of the same material as the magnetic substrate 20, and the main body portion 21 is integral with the connecting portions 22, so that the overall structural strength of the main body portion 21 of the pre-shaped body 2 is high, unlike the figure. In the laminated core inductor 1 shown in Fig. 1, there is a problem that the strength is insufficient between the adjacent interfaces of the circuit ceramic sheets 11, 12, 13, and 14.

整合本新型該第一實施例上述詳細說明,簡單地來說,本新型於上面所述之一體者,是被定義為一體結構。此外,所謂的一體結構,是指該主體部21是經由噴砂、蝕刻或沖壓一塊材(bulk matter)所成形取得,以致於該主體部21結構強度高,且內部不存在有層間剝離的問題。該塊材可以是一板狀的塊材,如,鐵氧磁體基板(ferrite wafer)或鎳基板。The above detailed description of the first embodiment of the present invention is integrated. Briefly, the present invention is defined as an integral structure as described above. In addition, the so-called integral structure means that the main body portion 21 is formed by sandblasting, etching, or punching a bulk material, so that the main body portion 21 has high structural strength and there is no problem of interlayer peeling inside. The block may be a plate-like block such as a ferrite wafer or a nickel substrate.

此處須補充說明的是,本新型磁芯電感器的預形體2主要是透過微機電系統(MEMS)的製程來量產化。關於本新型磁芯電感器的預形體2的相關量產方法,則容後說明。進一步地來說,本新型磁芯電感器的預形體2也同樣可透過MEMS製程以簡易地於預形體2的主體部21上製作出磁芯電感器所需的線路。It should be added here that the preform 2 of the novel magnetic core inductor is mainly mass-produced through a microelectromechanical system (MEMS) process. The related mass production method of the preform 2 of the novel magnetic core inductor will be described later. Further, the preform 2 of the novel magnetic core inductor can also be permeable to the MEMS process to easily form the wiring required for the magnetic core inductor on the main body portion 21 of the preform 2.

參閱圖9,本新型磁芯電感器的預形體2的一第二實施例,大致相同於該第一實施例,其不同之處在於各連接部22的一寬度是沿該第一方向X遞減。本新型該第二實施例之預形體2中的各連接部22寬度沿該第一方向X遞減的目的,是配合本新型磁芯電感器的預形體2的量產方法,其詳細目的與用途則容後說明。Referring to FIG. 9, a second embodiment of the preform 2 of the novel magnetic core inductor is substantially the same as the first embodiment, except that a width of each connecting portion 22 is decreased along the first direction X. . The purpose of reducing the width of each connecting portion 22 in the preform 2 of the second embodiment in the first direction X is the mass production method of the preform 2 of the novel magnetic core inductor, and the detailed purpose and use thereof Then explain later.

參閱圖10與圖11,為了於該主體部21上進行特殊線路布局以構成電感元件,該預形體2還能透過MEMS製程在該主體部21上形成複數自該主體部21之輪廓面210的頂面區延伸至其底面區的溝槽213(如圖10示),或是複數貫穿該主體部21之輪廓面210的頂面區與底面區的穿孔 214(如圖11所示)。但此處需補充說明的是,當構成該磁性基板20之材質是選自該磁性金屬,且欲透過MEMS製程在該預形體2之主體部21的該等溝槽213或該等穿孔214上完成繞線線路時,則需在完成繞線線路前鍍覆上一絕緣層(insulator)以防止短路問題產生。具體地說,該預形體2之主體部21在透過MEMS製程來完成繞線線路後,則可做為一磁芯電感器。Referring to FIG. 10 and FIG. 11 , in order to form a special circuit layout on the main body portion 21 to form an inductance element, the pre-shaped body 2 can also form a plurality of contour surfaces 210 of the main body portion 21 on the main body portion 21 through a MEMS process. The top surface region extends to a groove 213 (shown in FIG. 10) of the bottom surface region thereof, or a plurality of perforations extending through the top surface area and the bottom surface area of the contour surface 210 of the main body portion 21. 214 (as shown in Figure 11). However, it should be additionally noted that when the material constituting the magnetic substrate 20 is selected from the magnetic metal and is to be processed by the MEMS process on the grooves 213 or the through holes 214 of the main body portion 21 of the preform 2 When the winding circuit is completed, an insulator is required to be applied before the winding circuit is completed to prevent the short circuit problem. Specifically, the main body portion 21 of the preform 2 can be used as a magnetic core inductor after completing the winding circuit through the MEMS process.

參閱圖12與圖13,本新型磁芯電感器的預形體的一第三實施例,大致相同於該第二實施例,其不同之處在於各連接部22的第二端222具有至少一凹槽2221。各連接部22的凹槽2221是自各連接部22之輪廓面220的頂面區及其底面區兩者其中之一者向其頂面區及其底面區兩者其中另一者延伸,且是自各連接部22之輪廓面220之背面區沿該第二方向Y凹陷。在本新型該第三實施例中,各連接部22的凹槽2221數量是兩個,各連接部22之該兩凹槽2221之其中一者(見顯示於圖13之上方凹槽2221)是自其輪廓面220之頂面區朝其底面區延伸,且各連接部22的該兩凹槽2221之其中另一者(見顯示於圖13之下方凹槽2221)則是自其輪廓面220的底面區朝其頂面區延伸。Referring to Figures 12 and 13, a third embodiment of the preform of the novel magnetic core inductor is substantially identical to the second embodiment except that the second end 222 of each connecting portion 22 has at least one recess. Slot 2221. The groove 2221 of each connecting portion 22 is extended from one of the top surface area of the contour surface 220 of each connecting portion 22 and the bottom surface area thereof to the other of the top surface area and the bottom surface area thereof, and is The back surface region of the contoured surface 220 of each of the connecting portions 22 is recessed in the second direction Y. In the third embodiment of the present invention, the number of the grooves 2221 of each connecting portion 22 is two, and one of the two grooves 2221 of each connecting portion 22 (see the groove 2221 shown in FIG. 13) is The top surface of the contoured surface 220 extends toward the bottom surface region thereof, and the other of the two recesses 2221 of each connecting portion 22 (see the lower recess 2221 shown in FIG. 13) is from the contour surface 220 thereof. The bottom surface area extends toward the top surface area.

此處值得補充說明的是,於圖12中所顯示的各凹槽2221是沿該第二方向Y凹陷以貫穿各連接部22之輪廓面220的前面區與背面區,但該等凹槽2221並不限於圖12所示的態樣,各凹槽2221也可以是未貫穿各連接部22之輪廓面220的前面區與背面區。各凹槽2221的目的是配 合本新型磁芯電感器的預形體2的量產方法,因此,各凹槽2221的詳細目的與用途,亦容後說明。It should be added here that the grooves 2221 shown in FIG. 12 are recessed in the second direction Y to penetrate the front and back regions of the contour surface 220 of each connecting portion 22, but the grooves 2221 Not limited to the embodiment shown in FIG. 12, each of the grooves 2221 may be a front area and a back side area that do not penetrate the contoured surface 220 of each of the connecting portions 22. The purpose of each groove 2221 is to match The mass production method of the preform 2 of the novel magnetic core inductor, therefore, the detailed purpose and use of each recess 2221 will also be described later.

參閱圖14至圖17,本新型磁芯電感器的預形體之一第一量產方法是以MEMS製程來實施,其依序包含一步驟(a1)與一步驟(b1)。Referring to FIG. 14 to FIG. 17, a first mass production method of the preform of the novel magnetic core inductor is implemented by a MEMS process, which sequentially includes a step (a1) and a step (b1).

參閱圖14與圖15,該步驟(a1)是於該磁性基板20的一上表面201與一下表面202上各形成一具有一預定圖案31的光阻層3。各預定圖案31具有一覆蓋該磁性基板20之上表面201與下表面202的陣列,各陣列具有複數外觀形狀310,且各外觀形狀310沿該第一方向X依序具有彼此連接的一基座部311、兩橋接部312與一本體部313。該等外觀形狀310之本體部313是沿該第一方向X或沿該第二方向Y彼此間隔排列,且該等外觀形狀310之基座部311是沿該第一方向X或沿該第二方向Y彼此連接。在該第一量產方法中,各光阻層3之該等外觀形狀310是如圖14所示,沿該第一方向X彼此間隔排列,且該等光阻層3之預定圖案31的該等外觀形狀310是如圖15所示,彼此上下對準;該等外觀形狀310之本體部313是沿該第二方向Y彼此間隔排列,該等外觀形狀310之基座部311是沿該第二方向Y彼此連接;各外觀形狀310之橋接部312的一寬度是沿該第一方向X遞減,且各外觀形狀310之該等橋接部312是沿該第二方向Y彼此間隔設置;形成於該磁性基板20之上表面201與下表面202的光阻層3之各外觀形狀310的各橋接部312於鄰近其本體部313處形成有一 缺口3121,且各缺口3121是自其橋接部312的一周緣沿該第二方向Y凹陷,以令各橋接部312與各本體部313彼此斷開。Referring to FIG. 14 and FIG. 15, the step (a1) is to form a photoresist layer 3 having a predetermined pattern 31 on an upper surface 201 and a lower surface 202 of the magnetic substrate 20. Each of the predetermined patterns 31 has an array covering the upper surface 201 and the lower surface 202 of the magnetic substrate 20, each array having a plurality of external shapes 310, and each of the external shapes 310 sequentially has a base connected to each other along the first direction X. The portion 311, the two bridge portions 312 and a body portion 313. The body portions 313 of the outer shape 310 are spaced apart from each other along the first direction X or along the second direction Y, and the base portion 311 of the outer shape 310 is along the first direction X or along the second The directions Y are connected to each other. In the first mass production method, the outer shape 310 of each photoresist layer 3 is arranged along the first direction X as shown in FIG. 14, and the predetermined pattern 31 of the photoresist layers 3 is The outer shape 310 is vertically aligned with each other as shown in FIG. 15; the body portions 313 of the outer shape 310 are spaced apart from each other along the second direction Y, and the base portion 311 of the outer shape 310 is along the first The two directions Y are connected to each other; a width of the bridge portion 312 of each appearance shape 310 is decreased along the first direction X, and the bridge portions 312 of the respective appearance shapes 310 are spaced apart from each other along the second direction Y; Each of the bridge portions 312 of the outer shape 310 of the upper surface 201 of the magnetic substrate 20 and the photoresist layer 3 of the lower surface 202 is formed adjacent to the body portion 313 thereof. The notch 3121 is formed, and each of the notches 3121 is recessed from the peripheral edge of the bridge portion 312 in the second direction Y so that the bridge portions 312 and the main body portions 313 are disconnected from each other.

簡單地來說,各外觀形狀310的圖形輪廓(即,基座部311、橋接部312與本體部313),是相同於如圖12所示之該第三實施例之預形體2的基座200之輪廓面203的頂面區、預形體2之連接部22之輪廓面220的頂面區與預形體2之主體部21之輪廓面210的頂面區。此外,構成該步驟(a1)之磁性基板20之材質已說明於前,於此不再多加贅述。Briefly, the graphic outline of each of the external shapes 310 (i.e., the base portion 311, the bridge portion 312, and the body portion 313) is the same as the base of the preform 2 of the third embodiment as shown in FIG. The top surface area of the contoured surface 203 of 200, the top surface area of the contoured surface 220 of the connecting portion 22 of the preform 2, and the top surface area of the contoured surface 210 of the body portion 21 of the preform 2. In addition, the material of the magnetic substrate 20 constituting the step (a1) has been described above, and will not be further described herein.

再參閱圖15並配合參閱圖16與圖17,該步驟(b1)是以濕式蝕刻、乾式蝕刻或噴砂移除裸露於該等光阻層3之預定圖案31之陣列外的磁性基板20,並從而形成複數如圖12所示之基座200與複數對應連接於各基座200之如圖12所示之磁芯電感器的預形體2。Referring to FIG. 15 and referring to FIG. 16 and FIG. 17, the step (b1) is to remove the magnetic substrate 20 exposed outside the array of the predetermined patterns 31 of the photoresist layers 3 by wet etching, dry etching or sand blasting. Thus, a plurality of preforms 2, such as the base 200 shown in FIG. 12, and a plurality of magnetic core inductors as shown in FIG. 12, which are connected to the respective susceptors 200, are formed.

再參閱圖17並配合參閱圖18與圖19,較佳地,該第一量產方法於該步驟(b1)後,還包含一步驟(c1)與一步驟(d1)。該步驟(c1)是移除該等光阻層3,以於該磁性基板20上留下如圖18所示之預形體2的陣列,與沿該第二方向Y彼此連接之基座200的陣列。該步驟(d1)於該步驟(c1)之後,且是於該等磁芯電感器的預形體2的該等連接部22處,由上而下或由下而上分別施予一外力,使各磁芯電感器的預形體2之連接部22的第二端222自各預形體2之主體部21的第一側緣211斷裂,從而令各磁芯電感器的預 形體2之主體部21自各連接部22脫離,以量產出該等預形體2之主體部21。Referring to FIG. 17 and referring to FIG. 18 and FIG. 19, preferably, the first mass production method further comprises a step (c1) and a step (d1) after the step (b1). The step (c1) is to remove the photoresist layers 3 to leave an array of the preforms 2 as shown in FIG. 18 on the magnetic substrate 20, and the susceptors 200 connected to each other along the second direction Y. Array. The step (d1) is after the step (c1), and at the connecting portions 22 of the preform 2 of the core inductors, an external force is applied from top to bottom or from bottom to top, respectively. The second end 222 of the connecting portion 22 of the preform 2 of each magnetic core inductor is broken from the first side edge 211 of the main body portion 21 of each pre-form 2, thereby pre-setting each magnetic core inductor The body portion 21 of the body 2 is detached from each of the connecting portions 22 to produce the body portion 21 of the preforms 2 in an amount.

經前述量產方法的詳細說明可知,位於各光阻層3之外觀形狀310之橋接部312處的該等缺口3121是用來使該磁性基板20於執行步驟(b1)之濕式蝕刻、乾式蝕刻或噴砂後,可形成如圖12所顯示之各預形體2之連接部22的凹槽2221,而顯示於圖12中的凹槽2221甚或顯示於圖9中之寬度遞減的連接部22,其目的則是令該第一量產方法於執行該步驟(d1)時,有利於受該外力所折斷以達量產化的效用。值得一提的是,各凹槽2221亦可於該步驟(b1)形成出各預形體2的連接部22後,另以一切割器(scriber)或另外以蝕刻方式形成於各預形體2的連接部22上。According to the detailed description of the mass production method, the notches 3121 located at the bridging portions 312 of the outer shape 310 of the photoresist layers 3 are used for performing the wet etching and dry etching of the magnetic substrate 20 in the step (b1). After etching or sand blasting, the grooves 2221 of the connecting portions 22 of the preforms 2 as shown in FIG. 12 can be formed, and the grooves 2221 shown in FIG. 12 or even the width-decreased connecting portions 22 in FIG. The purpose is to make the first mass production method beneficial to the utility of breaking the external force to achieve mass production when performing the step (d1). It should be noted that each of the grooves 2221 may be formed in the step (b1) after the connecting portion 22 of each preform 2, and then formed in each of the preforms 2 by a scriber or another etching method. On the connecting portion 22.

此處需補充說明的是,雖然該第一量產方法是用來量產磁芯電感器的預形體2,但就如同前述磁芯電感器的預形體2之各實施例所說明般,該磁芯電感器的預形體2可透過MEMS製程於其主體部21上製作出磁芯電感器所需的繞線線路;因此,該第一量產方法的步驟(d1)亦可在形成完磁芯電感器所需之繞線線路後才實施。It should be additionally noted here that although the first mass production method is a preform 2 for mass production of a magnetic core inductor, as explained in the respective embodiments of the preform 2 of the magnetic core inductor described above, The preform 2 of the magnetic core inductor can form a winding circuit required for the magnetic core inductor on the main body portion 21 through the MEMS process; therefore, the step (d1) of the first mass production method can also be completed. The winding circuit required for the core inductor is implemented.

詳細地來說,本新型磁芯電感器的預形體2的第一量產方法,僅需透過該步驟(a1)與該步驟(b1)即可完成磁芯電感器的預形體2的輪廓面,無需如同前案1所述般,各陶瓷母片尚需先經過貫孔、填置與塗佈導電糊等程序以形成電路陶瓷母片110、120、130、140後,並經過燒結處理與刻劃處理等程序後才可取得如圖7所示之各積層式 磁芯電感器1之積層體10的外觀面。再者,本新型磁芯電感器的預形體2中的主體部21與連接部22為一體者,該主體部21的整體結構強度高,不像如圖1所示之積層式磁芯電感器1般,於該等電路陶瓷片11、12、13、14相鄰界面間存在有強度不足的問題。In detail, the first mass production method of the preform 2 of the novel magnetic core inductor only needs to pass through the step (a1) and the step (b1) to complete the contour surface of the preform 2 of the magnetic core inductor. It is not necessary to process the ceramic mother sheets through the through holes, filling and coating the conductive paste to form the circuit ceramic mother sheets 110, 120, 130, 140, and after sintering, as described in the previous paragraph 1. After the process such as scribing and processing, each layered type as shown in Fig. 7 can be obtained. The design surface of the laminated body 10 of the magnetic core inductor 1. Furthermore, the main body portion 21 of the preform 2 of the novel magnetic core inductor is integrated with the connecting portion 22, and the overall structural strength of the main body portion 21 is high, unlike the laminated core inductor shown in FIG. In general, there is a problem of insufficient strength between adjacent interfaces of the circuit ceramic sheets 11, 12, 13, and 14.

參閱圖20圖21與圖22,本新型磁芯電感器的預形體之一第二量產方法是以一模具4透過沖壓來實施,其依序包含一步驟(a2)、一步驟(b2)、一步驟(b2’),與一步驟(c2)。Referring to FIG. 20, FIG. 21 and FIG. 22, a second mass production method of the preform of the novel magnetic core inductor is implemented by punching a mold 4, which comprises a step (a2) and a step (b2) in sequence. One step (b2'), and one step (c2).

參閱圖20與圖21,該步驟(a2)是令該模具4的一模穴41陣列面向該磁性基板20之上表面201或下表面202設置,以使該磁性基板20的一部分區域2011是面向該模穴41陣列。在該第二量產方法中,該模具4之模穴41陣列是面向該磁性基板20的上表面201,但本新型並不以此為限。Referring to FIG. 20 and FIG. 21, the step (a2) is such that an array of the mold holes 41 of the mold 4 faces the upper surface 201 or the lower surface 202 of the magnetic substrate 20 such that a portion of the area of the magnetic substrate 20 is facing The array of mold holes 41. In the second mass production method, the array of the mold holes 41 of the mold 4 faces the upper surface 201 of the magnetic substrate 20, but the present invention is not limited thereto.

較佳地,構成該步驟(a2)之磁性基板20的材質是選自該磁性金屬或一磁性陶瓷生坯(green)。在該第二量產方法中,構成該步驟(a2)之磁性基板20的材質是選自該磁性陶瓷生坯,如鐵氧磁體生坯。Preferably, the material of the magnetic substrate 20 constituting the step (a2) is selected from the magnetic metal or a magnetic ceramic green. In the second mass production method, the material of the magnetic substrate 20 constituting the step (a2) is selected from the magnetic ceramic green body, such as a ferrite magnet green body.

參閱圖22,該步驟(b2)是用該模具4沖斷該磁性基板20之上表面201與下表面202,以使該磁性基板20的該部分區域2011置入該模穴41陣列內,且移除該磁性基板20之面對該模穴41陣列外之一剩餘區域2012,並從而成形出如圖18所示之基座200陣列與預形體2陣列。該 預形體2陣列的各預形體2是對應連接於該基座200陣列的各基座200,且該等預形體2之主體部21是沿該第一方向X或沿該第二方向Y彼此間隔排列。如圖18所示,在該第二量產方法中,該等預形體2之主體部21是沿該第二方向Y彼此間隔排列。Referring to FIG. 22, the step (b2) is to punch the upper surface 201 and the lower surface 202 of the magnetic substrate 20 with the mold 4, so that the partial region 2011 of the magnetic substrate 20 is placed in the array of the mold holes 41, and A remaining area 2012 of the magnetic substrate 20 facing the array of the mold holes 41 is removed, and an array of the susceptor 200 and the array of pre-forms 2 as shown in FIG. 18 are formed. The Each of the preforms 2 of the array of preforms 2 is corresponding to each of the susceptors 200 connected to the array of susceptors 200, and the body portions 21 of the preforms 2 are spaced apart from each other along the first direction X or along the second direction Y. arrangement. As shown in FIG. 18, in the second mass production method, the main body portions 21 of the preforms 2 are spaced apart from each other along the second direction Y.

詳細地來說,該第二量產方法是量產出如圖9所示之磁芯電感器之預形體2,為了進一步形成如圖18所示的各凹槽2221,在實施完該步驟(b2)後,可另以前述切割器或以蝕刻方式於各預形體2的連接部22上形成各凹槽2221。值得一提的是,該預形體2陣列中的各預形體2也可以是如圖8所示之磁芯電感器之預形體2,或是如圖10或圖11所示之磁芯電感器的預形體2。In detail, the second mass production method is to mass-produce the preform 2 of the magnetic core inductor shown in FIG. 9. In order to further form the recesses 2221 as shown in FIG. 18, the step is performed ( After b2), each of the grooves 2221 may be formed on the connecting portion 22 of each of the preforms 2 by the aforementioned cutter or by etching. It is worth mentioning that each preform 2 in the array of preforms 2 may also be a preform 2 of a magnetic core inductor as shown in FIG. 8 or a magnetic core inductor as shown in FIG. 10 or FIG. Preform 2.

該步驟(b2’)是燒結構成該磁性基板20之材質的磁性陶瓷生坯,令該磁性陶瓷生坯緻密化(densification),從而使該基座200陣列與該預形體2陣列整體結構強度提升。然而,此處需補充說明的是,當構成該第二量產方法之該磁性基板20的材質是選自該磁性金屬時,是可以省略該步驟(b2’)。在該第二量產方法中,實施該步驟(b2’)與否,是決定於該材質的選用。The step (b2′) is to sinter the magnetic ceramic green body constituting the material of the magnetic substrate 20 to densify the magnetic ceramic green body, thereby improving the overall structural strength of the array of the susceptor 200 and the array of the preform 2 . However, it is to be noted here that when the material of the magnetic substrate 20 constituting the second mass production method is selected from the magnetic metal, the step (b2') may be omitted. In the second mass production method, whether the step (b2') is carried out or not depends on the selection of the material.

再參閱圖18,該步驟(c2)是相同於該第一量產方法之步驟(d1),將各磁芯電感器的預形體2之主體部21自各連接部22脫離,此處不再多加贅述。Referring to FIG. 18, the step (c2) is the same as the step (d1) of the first mass production method, and the main body portion 21 of the preform 2 of each magnetic core inductor is detached from each connecting portion 22, and no more is added here. Narration.

詳細地來說,本新型磁芯電感器之預形體2的各量產方法,僅需透過該步驟(a1)與該步驟(b1)或該步驟 (a2)與該步驟(b2),即可完成磁芯電感器之預形體2的輪廓面,無需如同前案1所述般,各陶瓷母片尚需先經過貫孔、填置與塗佈導電糊等程序以形成電路陶瓷母片110、120、130、140後,並經過燒結處理與刻劃處理等程序後才可取得如圖7所示之各積層式磁芯電感器1之積層體10的外觀面。再者,本新型磁芯電感器的預形體2中的主體部21與連接部22為一體者,主體部21的整體結構強度高,不像如圖1所示之積層式電感器1般,於該等電路陶瓷片11、12、13、14相鄰界面間存在有強度不足的問題。In detail, the mass production method of the preform 2 of the novel magnetic core inductor only needs to pass through the step (a1) and the step (b1) or the step. (a2) and the step (b2), the contour surface of the preform 2 of the magnetic core inductor can be completed, and it is not necessary to pass through the through hole, fill and coat each ceramic master as described in the previous case 1. After the conductive paste or the like is formed to form the circuit ceramic mother sheets 110, 120, 130, and 140, and after the processes such as sintering processing and scribing processing, the laminated body of each laminated core inductor 1 shown in FIG. 7 can be obtained. 10 appearance surface. Furthermore, in the preform 2 of the novel magnetic core inductor, the main body portion 21 and the connecting portion 22 are integrated, and the overall structural strength of the main body portion 21 is high, unlike the laminated inductor 1 shown in FIG. There is a problem of insufficient strength between adjacent interfaces of the circuit ceramic sheets 11, 12, 13, and 14.

綜上所述,本新型磁芯電感器的預形體2,可令呈陣列排列設置的該等連接部22分別對應連接於該等基座200,且該等連接部22中的凹槽2221設計,令各主體部21在透過MEMS製程完成磁芯電感器所需線路後,使各主體部21便於被折斷,有利於量產化且製程簡化;此外,該磁芯電感器的預形體2之連接部22與主體部21為一體結構,因而主體部21的整體結構強度高,故確實能達成本新型之目的。In summary, the preform 2 of the core inductor of the present invention can be connected to the bases 200 correspondingly in the array, and the grooves 2221 in the connecting portions 22 are designed. After the main body portion 21 completes the line required for the magnetic core inductor through the MEMS process, the main body portion 21 is easily broken, which is advantageous for mass production and simplified process; further, the preform 2 of the magnetic core inductor Since the connecting portion 22 and the main body portion 21 are integrally formed, the overall structural strength of the main body portion 21 is high, and the object of the present invention can be achieved.

惟以上所述者,僅為本新型之實施例而已,當不能以此限定本新型實施之範圍,即凡是依本新型申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本新型專利涵蓋之範圍內。However, the above is only the embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still It is within the scope of this new patent.

2‧‧‧磁芯電感器的預形體2‧‧‧Preform of magnetic core inductor

20‧‧‧磁性基板20‧‧‧Magnetic substrate

200‧‧‧基座200‧‧‧Base

203‧‧‧輪廓面203‧‧‧ contour surface

204‧‧‧第一側緣204‧‧‧First side edge

205‧‧‧第二側緣205‧‧‧second side edge

21‧‧‧主體部21‧‧‧ Main body

210‧‧‧輪廓面210‧‧‧ contour surface

211‧‧‧第一側緣211‧‧‧ first side edge

212‧‧‧第二側緣212‧‧‧Second side edge

22‧‧‧連接部22‧‧‧Connecting Department

220‧‧‧輪廓面220‧‧‧ contour surface

221‧‧‧第一端221‧‧‧ first end

222‧‧‧第二端222‧‧‧ second end

2221‧‧‧凹槽2221‧‧‧ Groove

X‧‧‧第一方向X‧‧‧ first direction

Y‧‧‧第二方向Y‧‧‧second direction

Claims (5)

一種磁芯電感器的預形體,是連接於一磁性基板的一基座,該基座具有一輪廓面,且該基座之輪廓面包括相反設置的一第一側緣及一第二側緣,該磁芯電感器的預形體包含:一主體部,具有一輪廓面,該主體部之輪廓面包括相反設置的一第一側緣及一第二側緣;及至少一連接部,具有一輪廓面,該連接部的輪廓面包括相反設置的一第一端與一第二端,該連接部的第一端是連接於該基座的第二側緣,且是自該基座的第二側緣朝該主體部的第一側緣的一第一方向延伸,以使該連接部的第二端連接於該主體部的第一側緣,並令該連接部的輪廓面銜接於該主體部的輪廓面與該基座的輪廓面;其中,該主體部與該連接部是由一相同於該磁性基板的材質所構成,且該主體部與該連接部為一體者。 A preform of a magnetic core inductor is a base connected to a magnetic substrate, the base has a contoured surface, and the contoured surface of the base includes a first side edge and a second side edge disposed oppositely The preform of the magnetic core inductor includes: a main body portion having a contoured surface, the contoured surface of the main body portion includes a first side edge and a second side edge disposed oppositely; and at least one connecting portion having a a contoured surface, the contoured surface of the connecting portion includes a first end and a second end disposed oppositely, the first end of the connecting portion is connected to the second side edge of the base, and is the The two side edges extend toward a first direction of the first side edge of the main body portion such that the second end of the connecting portion is coupled to the first side edge of the main body portion, and the contoured surface of the connecting portion is coupled to the The contour surface of the main body portion and the contour surface of the base; wherein the main body portion and the connecting portion are formed of a material similar to the magnetic substrate, and the main body portion and the connecting portion are integrated. 如請求項1所述的磁芯電感器的預形體,其中,該連接部的數量為兩個,各連接部的一寬度是沿該第一方向遞減,且該等連接部是沿一與該第一方向夾一預定角度的第二方向彼此間隔設置。 The preform of the magnetic core inductor according to claim 1, wherein the number of the connecting portions is two, a width of each connecting portion is decreased along the first direction, and the connecting portions are along the same The second direction in which the first direction is sandwiched by a predetermined angle is spaced apart from each other. 如請求項2所述的磁芯電感器的預形體,其中,各連接部的第二端具有至少一凹槽,各凹槽是自各連接部之輪廓面的一頂面區與一底面區其中之一者向其頂面區與其底面區其中另一者延伸,且是自各連接部的輪廓面沿 該第二方向凹陷。 The preform of the magnetic core inductor according to claim 2, wherein the second end of each connecting portion has at least one groove, each groove being a top surface area and a bottom surface area of the contour surface of each connecting portion. One of the extensions to the other of the top surface area and the bottom surface area thereof, and is from the contour surface of each connection portion The second direction is recessed. 如請求項3所述的磁芯電感器的預形體,其中,各連接部的凹槽數量是兩個,各連接部的該兩凹槽之其中一者是自其輪廓面之頂面區朝其底面區延伸,且各連接部的該兩凹槽之其中另一者是自其輪廓面之底面區朝其頂面區延伸。 The preform of the magnetic core inductor according to claim 3, wherein the number of the grooves of each connecting portion is two, and one of the two grooves of each connecting portion is from the top surface of the contour surface thereof The bottom surface region extends, and the other of the two grooves of each connecting portion extends from the bottom surface region of the contoured surface toward the top surface region thereof. 如請求項1至4任一請求項所述的磁芯電感器的預形體,其中,該材質是選自一磁性金屬或一磁性陶瓷。 The preform of the magnetic core inductor of any one of claims 1 to 4, wherein the material is selected from a magnetic metal or a magnetic ceramic.
TW104210223U 2015-06-25 2015-06-25 Magnetic core inductor preform TWM512796U (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW104210223U TWM512796U (en) 2015-06-25 2015-06-25 Magnetic core inductor preform
CN201520599133.5U CN204884759U (en) 2015-06-25 2015-08-11 Preform for magnetic core inductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104210223U TWM512796U (en) 2015-06-25 2015-06-25 Magnetic core inductor preform

Publications (1)

Publication Number Publication Date
TWM512796U true TWM512796U (en) 2015-11-21

Family

ID=54829109

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104210223U TWM512796U (en) 2015-06-25 2015-06-25 Magnetic core inductor preform

Country Status (2)

Country Link
CN (1) CN204884759U (en)
TW (1) TWM512796U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI629694B (en) * 2015-06-25 2018-07-11 威華微機電股份有限公司 Mass production method of preform of magnetic core inductor
TWD194956S (en) 2018-02-02 2018-12-21 台達電子工業股份有限公司 Protion of base of magnetic component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI629694B (en) * 2015-06-25 2018-07-11 威華微機電股份有限公司 Mass production method of preform of magnetic core inductor
TWD194956S (en) 2018-02-02 2018-12-21 台達電子工業股份有限公司 Protion of base of magnetic component

Also Published As

Publication number Publication date
CN204884759U (en) 2015-12-16

Similar Documents

Publication Publication Date Title
JP5585740B1 (en) Multilayer inductor element and communication device
TWI431646B (en) Laminated coil
TWI566264B (en) Manufacturing method of surface mounted multiphase inductors
TWI592956B (en) Core inductor production methods
TW201431452A (en) Method for manufacturing electronic component-embedded substrate and electronic component-embedded substrate
TWM511111U (en) Magnetic core inductor
TWI629694B (en) Mass production method of preform of magnetic core inductor
TWI592955B (en) Embedded passive components and methods of mass production
TWM512796U (en) Magnetic core inductor preform
WO2020087972A1 (en) Mems solenoid inductor and manufacturing method therefor
TWI623247B (en) Mass production method of preform of passive component
TWM511120U (en) Preform of passive component
TWI623002B (en) Mass production method of high frequency inductor
JP5294287B1 (en) Coil element manufacturing method
TWI555044B (en) A method for producing a passive element with a terminal electrode
JP6132027B2 (en) Manufacturing method of multilayer inductor element and multilayer inductor element
TWM511122U (en) Internally-embedded passive device
JP5682342B2 (en) Manufacturing method of multilayer ceramic electronic component
JP6750603B2 (en) Winding core manufacturing method and winding core assembly
TWI685858B (en) Mass production method of thin choke
CN111333020B (en) Spiral inductor with ferromagnetic core and preparation method thereof
CN206212269U (en) MEMS microphone package structure
TWM511121U (en) Passive component with the terminal electrode
JP6119843B2 (en) Method for manufacturing multilayer inductor element, multilayer inductor element, and multilayer body
TWM511110U (en) High frequency inductor

Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees