TWM482838U - Polishing apparatus with dustproof structure - Google Patents

Description

Grinding device with dustproof structure

The present invention relates to a grinding device, and more particularly to a grinding device having a dustproof structure.

"Grinding" is a precision technology in industrial manufacturing. For example, in the semiconductor manufacturing process, as the line width is gradually reduced, in order to smoothly construct a multilayer wiring structure, chemical mechanical polishing (CMP) is used in a multilayer wiring structure. The flattening of the surface of each layer has become an indispensable key process.

For example, in Taiwan Invention No. 397,734, a chemical mechanical polishing machine includes a plurality of polishing tables disposed on a rotating base and rotating in one direction; a plurality of polishing pads disposed on each of the polishing tables; a wafer placed on the polishing pad, and a front surface of the wafer is in contact with the polishing pad; a plurality of dispensing tubes disposed above each polishing pad for conveying a slurry to each polishing pad; a discharge pipe; a throttle valve for regulating the circulation of the discharge pipe; and a discharge pump connected to the discharge pipe for pumping the used slurry on the rotary seat to the row In the conduit; and a controller that controls the throttle. Accordingly, when the polishing process is stopped, the throttle valve is closed by the controller to prevent the polishing pad from being excessively dried, which affects the quality of the wafer to improve the yield.

However, conventional chemical mechanical polishing machines are susceptible to dust generated by grinding after use, and are exposed to many unnecessary particles. For example, dust may adhere to the polishing head due to air due to structural design. a gap, and when the polishing head is polished next time, it falls from the gap on the polished wafer, affecting the quality of the grinding, so that the polishing head must be cleaned frequently, increasing the complexity of the operation, and improving Necessary.

The main purpose of the novel is to solve the conventional grinding machine table, in which the grinding head has a gap in the structure, which is easy to adhere to dust, and has to be cleaned frequently, which affects the quality of the grinding.

To achieve the above object, the present invention provides a polishing apparatus having a dustproof structure, comprising a drive shaft, a polishing head and a dust cover. The polishing head is coupled to the drive shaft and includes a base and a grinding portion, the base includes a top side adjacent to the drive shaft and a bottom side away from the top side, the grinding portion is coupled to the base Forming a connection gap between the bottom side and the base; the dust cover covers the polishing head, and includes a body attached to the top side and a crotch portion extending from the body toward the polishing portion, The ankle covers the connection gap.

In this way, the present invention covers the connection gap by the arrangement of the dust cover, prevents dust from entering the connection gap, affects the grinding quality of the grinding device, and, when the dust cover is contaminated by dust, can directly The dust cover is replaced or cleaned to avoid a complicated operation of cleaning the polishing head.

10‧‧‧ polishing head

11‧‧‧Base

12‧‧‧ Grinding Department

121‧‧‧Abrasive

13‧‧‧Connection gap

20‧‧‧ dust cover

21‧‧‧ body

211‧‧‧Perforation

22‧‧‧檐

221‧‧‧ inner edge

30‧‧‧Drive shaft

1A is a schematic exploded view showing the structure of an embodiment of the present invention.

FIG. 1B is a perspective view showing the appearance of an embodiment of the present invention.

2 is a cross-sectional view showing the structure of a dust cover according to an embodiment of the present invention.

The detailed description and technical content of this new model are described below with the following diagram:

Please refer to FIG. 1A, FIG. 1B and FIG. 2, and FIG. 1A and FIG. 1B are respectively a structural exploded view and an external perspective view of the present invention. FIG. 2 is a new type. A schematic cross-sectional view of a dust cover of an embodiment, the present invention is a polishing device having a dustproof structure, comprising a drive shaft 30, a polishing head 10 and a dust cover 20. The drive shaft 30 is coupled to the polishing head 10 to control the rotation of the polishing head 10 for a grinding operation.

The grinding head 10 is coupled to the drive shaft 30 and includes a base 11 and a grinding portion 12. The base 11 includes a top side and a bottom side, the top side being adjacent to the drive shaft 30, and the bottom side is The top side is away from the transmission shaft 30. In this embodiment, the transmission shaft 30 is coupled to the top side to control the rotation of the polishing head 10.

The polishing portion 12 is connected to the bottom side of the base 11 and forms a recessed connection slot 13 with the base 11. In this embodiment, the polishing portion 12 further includes an abrasive sheet 121. The sheet 121 is disposed on a side of the polishing portion 12 away from the susceptor 11 for performing a polishing operation for contacting a wafer.

The dust cover 20 covers the polishing head 10 and includes a body 21 and a crotch portion 22 attached to the top side of the base 11. In the embodiment, the body 21 further has a The drive shaft 30 passes through a through hole 211 that connects the top side. The cymbal portion 22 extends from the body 21 toward the polishing portion 12, and covers the connection slit 13. However, the length of the cymbal portion 22 extends not to exceed the polishing sheet 121, thereby avoiding affecting the polishing operation, and In this embodiment, the crotch portion 22 further includes an inner edge 221 formed by an inner surface of the crotch portion 22 projecting inwardly and extending into the connecting slit 13.

Thus, when the polishing head 10 performs the polishing operation, since the dust cover 20 has covered the connection slit 13, a dust generated by the polishing operation cannot be easily attached to the connection slit 13, and further The dust cover 20 further has the inner edge 221 extending into the connecting slit 13, which not only further prevents the dust from intruding into the connecting slit 13, but also has a function of stably fitting the dust cover 20 to the polishing head 10.

In summary, since the present invention covers the dust cover with the polishing head, it has the following advantages:

1. Avoiding the adhesion of the dust generated by the polishing operation to the connection gap, thereby affecting the quality of the polishing head to perform the polishing operation next time.

2. The inner edge of the dust cover can further block the intrusion of the dust, and the dust cover can be appropriately fitted to the polishing head.

3. When the dust cover is contaminated by dust, the dust cover can be replaced or cleaned to avoid complicated work of cleaning the polishing head.

Therefore, this new type is highly progressive and meets the requirements for applying for a new type of patent. It is required to apply in accordance with the law, and the Bureau of Health will grant patents as soon as possible.

The present invention has been described in detail above, but the above is only a preferred embodiment of the present invention, and the scope of the present invention is not limited. That is, the equal changes and modifications made in accordance with the scope of this new application shall remain within the scope of the patent of this new type.

10‧‧‧ polishing head

11‧‧‧Base

12‧‧‧ Grinding Department

121‧‧‧Abrasive

13‧‧‧Connection gap

20‧‧‧ dust cover

21‧‧‧ body

211‧‧‧Perforation

22‧‧‧檐

221‧‧‧ inner edge

30‧‧‧Drive shaft

Claims (5)

[Item 1] A grinding device with a dustproof structure, comprising:
a drive shaft;
a polishing head coupled to the drive shaft and including a base and a polishing portion, the base includes a top side adjacent to the drive shaft and a bottom side away from the top side, the grinding portion being coupled to the base Forming a connection gap between the bottom side and the base; and a dust cover covering the polishing head, the dust cover including a body attached to the top side and a body extending from the body toward the polishing portion The crotch portion covers the connection gap. [Item 2] A grinding apparatus with a dustproof structure according to the above aspect of the invention, wherein the body has a perforation through which the transmission shaft passes. [Item 3] A polishing apparatus with a dustproof structure according to claim 1, wherein the dam portion includes an inner edge that protrudes inwardly and protrudes into the connection slit. [Item 4] A polishing apparatus having a dustproof structure according to claim 1, wherein the polishing section comprises an abrasive sheet located on a side of the polishing section away from the base. [Item 5] A polishing apparatus having a dustproof structure according to claim 4, wherein the dam portion extends from the body toward the polishing portion to cover the connection slit without exceeding the abrasive sheet.