TWM481485U - A sealed wafer transfer box - Google Patents

Description

Closed wafer transfer box

This creation relates to a wafer-loading device, and more particularly to a closed wafer cassette that can be opened and closed for handling or moving between a semiconductor process workstation and a workstation.

The wafer is a germanium wafer when the semiconductor integrated circuit is fabricated. After the wafer is cut and polished, it is rounded and formed into a thin sheet. According to different sizes, it can be divided into 6吋, 8吋, 12吋, because the wafer is very thin. During transportation, the wafer is adhered and fixed to the wafer frame by a film, placed in a wafer transfer cassette (Wafer frame cassette), and transported through a wafer transfer cassette carrying a plurality of wafer frames.

According to the current wafer transfer cassette, there is no design cover, and it is easy to have fine dust adhered to the wafer during transportation to reduce the yield of subsequent wafers.

The present invention provides a closed wafer transfer cassette, which is composed of a box body, a cover body, at least one pivot structure and at least one limit buckle. The box system has an accommodation space, and One side of the casing has an opening through which the plurality of wafer frames are placed in the casing; wherein the wafer frame placed in the casing is adhered to the wafer by a film On the wafer frame; the cover system is disposed at the opening and corresponding to the opening, Covering the opening, the box body is in a closed box body; the pivoting structure is disposed on the cover body and pivotally connected to one end of the opening of the box body to pivotally connect the pivot structure The box body is corresponding to the cover body; the limit is fastened at one end of the box body and located at the opening for cooperating with the pivotal structure, so that the limit buckle can be coupled with the pivot structure The assembly is unattached, and the cover is covered on the casing to prevent fine dust from flowing into the casing during transportation, thereby improving the yield of the wafer in the casing.

The technical means for achieving the above object is: a closed wafer transfer cassette comprising: a casing having an accommodating space, and opening an opening on one side of the casing for a plurality of wafers via The opening is disposed in the casing; a cover is disposed at the opening, and corresponds to the opening for covering the opening, so that the casing is in a closed box; at least one pivotal connection The structure is disposed on the cover body and pivotally connected to one end of the opening of the box body, so that the pivoting structure pivotally connects the box body to the cover body; and at least one limit buckle It is disposed at one end of the box and located at the opening for cooperating with the pivoting structure to enable the limit buckle to be uncoupled from the pivoting structure.

The pivoting structure includes a first rotating shaft and a second rotating shaft disposed in parallel with the first rotating shaft; the two ends of the first rotating shaft are respectively connected to the two ends of the second rotating shaft, and the shaft of the first rotating shaft The surface and the shaft surface of the second rotating shaft are not in contact with each other; the first rotating shaft is detachably pivotally connected to the limiting buckle; and the second rotating shaft is pivotally connected to the cover.

The inner surface of the cover body is provided with a first elastic clamping member; the second elastic clamping member and the third elastic clamping member are disposed in the casing, and the second and third elastic clamping members are The The first elastic clamping members are oppositely disposed; the surfaces of the first, second, and third elastic clamping members that are in contact with the wafer frames are elastic and are in a wave shape for fastening the wafer frames. .

The joint between the cover body and the casing is provided with at least one movable buckle for fastening or loosening the connection state between the cover body and the casing.

The movable latch includes a movable connecting shaft and a buckle; one end of the movable connecting shaft is rotatably connected to the cover, and the other end of the movable connecting shaft is rotatably connected to the locking buckle One end of the latch; the other end of the latch is detachably coupled to the case.

The joint between the cover body and the casing is provided with at least one sliding buckle for fastening or loosening the connection state between the cover body and the casing.

In the above, the sliding latch comprises a long sliding rail, a short sliding rail and a sliding buckle; the long sliding rail is disposed on the cover body or the casing, and the short sliding rail is disposed relative to the long sliding rail And corresponding to the box body or the cover body; the cover body and the box body are fastened, the slide buckle is slidably coupled with the long slide rail and the short slide rail: the cover body and the box The slider is slidably coupled to the long slide rail in a loose state.

The cover body is provided with a rotary lock for fastening or loosening the connection state between the cover body and the case body.

The rotary latch includes a rotating member and a plurality of connecting rods disposed in conjunction with the rotating member; the rotating member is disposed on an outer surface of the cover; the connecting rods are disposed on an inner surface of the cover, and Each end of the connecting rod is provided with a hook; the box body is provided with a groove matching the hooks.

[this creation]

1‧‧‧Closed wafer cassette

11‧‧‧Box

112‧‧‧ trench

12‧‧‧ Cover

13‧‧‧ pivot structure

131‧‧‧First shaft

132‧‧‧second shaft

14‧‧‧ Limit button

2‧‧‧ Wafer Frame

3‧‧‧ wafer

4‧‧‧First elastic clamp

40‧‧‧ spacer

41‧‧‧ gap

42‧‧‧ Notch

43‧‧‧ convex

5‧‧‧Second elastic clamping parts

6‧‧‧ Third elastic clamp

7‧‧‧Activity lock

71‧‧‧Activity connection shaft

711‧‧‧Activities connect one end of the shaft

712‧‧‧ movable connection to the other end of the shaft

72‧‧‧Lock

721‧‧‧The other end of the buckle

8‧‧‧Sliding lock

81‧‧‧Long rails

82‧‧‧Short slide rails

83‧‧‧Slipper

9‧‧‧Spinning lock

91‧‧‧Rotating parts

92‧‧‧ linkage

921‧‧‧Hook

FIG. 1 is a schematic structural view of a novel closed wafer transfer cassette.

Fig. 2 is a schematic view showing the structure of a separate type of closed wafer transfer cassette.

FIG. 3 is a schematic structural view showing a structure in which a pivotal structure of a closed wafer transfer cassette is combined with a casing.

Fig. 4 is a structural schematic view showing the pivotal structure and the splitting of the casing in a closed type of wafer transfer cassette.

Fig. 5 is a plan view showing the inside of a novel closed wafer transfer cassette.

Fig. 6 is a schematic view showing the inside of a novel closed wafer transfer cassette in a state where a wafer is loaded.

7a to 7c are schematic diagrams showing the operation of the movable latch in the closed wafer transfer cassette of the present invention.

Figure 8 is a schematic view showing the structure of a sliding lock in a closed wafer transfer cassette of the present invention.

Fig. 9 is a partial structural view showing the sliding lock of the sealed wafer transfer cassette in a closed state.

Figure 10 is a schematic view showing the structure of a rotary lock in a closed wafer transfer cassette of the present invention.

Figure 11 is a schematic view showing the structure of a rotating member and a connecting rod in a closed type wafer transfer cassette.

Fig. 12 is a partial schematic view showing the structure of a screw-type lock in a closed wafer transfer box in a fastened state.

Fig. 13 is a partial structural view showing the rotary lock of the closed type wafer transfer cassette in a loose state.

Figure 14 is a schematic view showing the structure of a first elastic holding member of a novel closed wafer transfer case.

In order to facilitate your review committee to have a better understanding and understanding of the technical means and operation process of this creation, the following examples are combined with the drawings, which are described in detail below.

Referring to FIGS. 1 to 13 , a closed wafer transfer cassette 1 is composed of a casing 11 , a cover 12 , at least one pivot structure 13 and at least one limit buckle 14 .

The casing 11 has an accommodating space, and an opening is formed on one side of the casing 11 for a plurality of openings to be inserted into the casing 11 through the opening; wherein the casing 11 is placed in the casing 11 The wafer 2 can be a wafer 2 having a wafer frame 3 on the outer edge (as shown in FIG. 6); the cover 12 is disposed at the opening and corresponds to the opening for covering In the opening, the box body 11 is formed as a sealed box body. The pivoting structure 13 is disposed on the cover body 12 and pivotally connected to the open end of the box body 11 to make the pivot structure 13 The box body 11 is pivotally connected to the cover body 12; the position buckle 14 is disposed at one end of the box body 11 and located at the opening for cooperating with the pivoting structure 13 to make the limit position The buckle 14 can be detachably connected to the pivot structure 13 . The cover body 12 is covered on the casing 11 through the pivot structure 13 . When the wafer 2 is placed in the casing 11 , the cover 12 can reduce the risk of dust or particles in the air floating into the casing 11 and improve the risk. The yield of the wafer 2 in the casing 11.

In this embodiment, the pivoting structure 13 includes a first rotating shaft 131 and a second rotating shaft 132 disposed in parallel with the first rotating shaft 131. The two ends of the first rotating shaft 131 and the two ends of the second rotating shaft 132 are respectively Connecting, and in order to avoid the generation of fine particles, the shaft surface of the first rotating shaft 131 and the shaft surface of the second rotating shaft 132 are not in contact with each other; the first rotating shaft 131 and the limiting buckle 14 are detachably pivoted The limit buckle 14 has a spherical curved surface to pivotally connect the first rotating shaft 131; The second rotating shaft 132 is pivotally connected to the cover 12 . The first rotating shaft 131 is pivotally connected to the limiting buckle 14 and the second rotating shaft 132 is pivotally connected to the cover body 12. When the cover 12 is opened, the cover 12 can be more smoothly placed on the casing 11 and double The pivotal structure 13 of the shaft structure makes the opening and closing between the casing 11 and the cover 12 smoother.

In this embodiment, the inner surface of the cover 12 is provided with a first elastic clamping member 4; the second elastic clamping member 5 and the third elastic clamping member 6 are disposed in the casing 11, and the second elastic The clamping member 5 and the third elastic clamping member 6 are respectively disposed opposite to the first elastic clamping member 4; the first elastic clamping member 4, the second elastic clamping member 5, and the third elastic clamping member 6 The surfaces in contact with the wafer frames are both elastic and have a wave shape for clamping the wafer frames 3. After the wafer 2 is placed in the casing 11 and the cover 12 is closed, the first elastic clamping member 4 and the second elastic clamping member 5 and the third elastic clamping member 6 are held by the first elastic clamping member 4 located on the inner surface of the cover 12. The first elastic clamping member 4, the second elastic clamping member 5 and the third elastic clamping member 6 having the elastic and wavy surface structure provide cushioning and damping effects when the closed wafer transfer cassette is moved. To avoid damage to the wafer 2 due to shock during moving. It is worth mentioning that the structural features of the first elastic clamping member 4 are as shown in FIG. 14 , which are formed by a plurality of spacer strips 40 in a horizontal array manner, wherein a side of each spacer strip 40 presents a V-shaped opening. To guide and abut against the opposite side of each wafer frame 3 relative to the inner surface of the cover 12 (as shown in Figures 5-6), and a predetermined length between the two adjacent spacers 40 a gap 41 for the spacers 40 to elastically contact the opposite sides of each of the wafer frames 3, and two adjacent sides of the two adjacent spacers 40, a plurality of notches 42 are recessed along the gaps 41 and A plurality of protrusions 43 corresponding to the recesses 42 are formed, wherein the protrusions 43 are used to guide and position each wafer frame without being mistakenly placed in the V-shaped opening instead of the gap 41.

In this embodiment, at least one movable latch 7 for fastening or loosening the connection state between the cover 12 and the casing 11 is provided at the joint between the cover 12 and the casing 11. When the lid body 12 is closed with the casing 11, it can be fastened by the movable buckle 7 to avoid loosening.

In this embodiment, the movable latch 7 includes a movable connecting shaft 71 and a latch 72. One end 811 of the movable connecting shaft 71 is rotatably coupled to the cover 12, and the movable connecting shaft 71 is The other end 712 is rotatably coupled to one end of the latch 72; the other end 721 of the latch 72 is detachably coupled to the case 11; the latch 72 is abutted against the cover through the movable connecting shaft 71 In the state of 12, the other end of the latch 72 is fastened to the casing 11 (see FIG. 7a); the latch 72 is separated from the cover 12 by the movable connecting shaft 71. The other end of the latch 72 is loosened from the connection with the casing 11 (see FIG. 7b); when the cover 12 is to be opened, the latch 72 is moved to move the latch 72 away from the movable connecting shaft 71. The cover body 12 causes the lock box 72 to release the case body 11 (as shown in the seventh, a, b, and c drawings); when the cover body 12 is to be closed, the other end 721 of the lock block 72 is first fastened to the case body. After 11 , the latch 72 is again moved to move the latch 72 along with the movable connecting shaft 71 to the cover 12, so that the latch 72 is fastened to the casing 11 (as shown in the seventh, c, b, and a drawings).

Referring to FIGS. 8-9, in the embodiment, the joint between the cover 12 and the casing 11 is provided with at least one for fastening or loosening the connection between the cover 12 and the casing 12. Slide lock 8. When the lid body 12 is closed with the casing 11, it can be fastened by the sliding lock 8 to avoid loosening.

In the embodiment, the sliding latch 8 includes a long sliding rail 81, a short sliding rail 82 and a sliding buckle 83. The long sliding rail 93 is disposed on the cover body 12 or the casing 11, and the short The sliding rail 82 is disposed on the corresponding casing 11 or the cover body 12 with respect to the long sliding rail 81; the sliding body 83 and the long sliding rail 81 are fastened by the cover body 12 and the casing 11 The short slide rails 82 are slidably coupled to each other (as shown in FIG. 9): the cover body 12 and the box body 11 are in a loose state, and the slider 83 is slidably coupled with the long slide rail 81 (eg, In the state in which the slider 83 is slidably coupled to the long slide rail 81 and the short slide rail 82, the cover body 12 is fastened to the casing 11 through the slider 83 ( As shown in FIG. 9; in the state in which the slider 83 is only slidably coupled to the long slide rail 81, the cover body 12 and the casing 11 are loosened. Status (as shown in Figure 8).

Referring to FIGS. 10-13, in the embodiment, the cover 12 is provided with a rotary latch 9 for fastening or loosening the connection state of the cover 12 and the casing 11. When the lid body 12 is closed with the casing 11, it can be fastened by the rotation of the buckle 9 to avoid loosening.

In this embodiment, the rotary latch 9 includes a rotating member 91 and a plurality of connecting rods 92 disposed in conjunction with the rotating member 91; the rotating member 91 is disposed on an outer surface of the cover 12; 92 is disposed on the inner surface of the cover body 12, and each end of the connecting rod 92 is provided with a hook 921; the box body 11 is provided with a groove 112 matching with the hooks 921; the rotating member 91 In a state in which the hooks 921 are inserted into the corresponding grooves 112 in the reverse direction, the cover 12 is fastened to the casing 11 (as shown in FIG. 12); the rotating member 91 is compliant. In a state in which the hooks are driven away from the corresponding grooves, the cover body and the casing are released (as shown in FIG. 13).

In summary, the present invention is to provide a closed wafer transfer cassette, which is composed of a box body and a cover body, wherein the box body has an accommodating space, and one side of the box body is provided with one for Inserting a plurality of wafers with a wafer frame into the opening of the accommodating space; the cover body is disposed at the opening and matched with the box body; the cover body passes through the at least one pivoting structure and the box body The frame body is provided with a limit buckle matched with the pivotal structure, and the pivotal structure is detachably connected to the limit buckle, and the cover body is covered on the box body to avoid Fine dust floats into the case during handling, which in turn increases the yield of the wafer inside the case. In addition, the material used for the closed wafer transfer cassette disclosed in the present invention may be at least one selected from the group consisting of plastic, aluminum, and metal alloy.

The detailed description above is a detailed description of the possible embodiments of the present invention, but the embodiment is not intended to limit the scope of the patents of the present invention, and is not deviated from the spirit of the present invention. The implementation or change shall be included in the patent scope of this case.

1‧‧‧Closed wafer cassette

11‧‧‧Box

12‧‧‧ Cover

13‧‧‧ pivot structure

14‧‧‧ Limit button

Claims (11)

The invention relates to a closed wafer cassette, which comprises: a box body having an accommodating space, and an opening is formed on one side of the box body, wherein a plurality of wafer frames are inserted into the box body through the opening a cover body is disposed at the opening and corresponding to the opening for covering the opening, so that the box body is a closed box body; at least one pivoting structure is disposed on the cover body And being pivotally connected to one end of the opening of the box body, so that the pivoting structure pivotally connects the box body to the cover body; and at least one limit buckle is disposed at one end of the box body and located at The opening is configured to cooperate with the pivoting structure to enable the limiting buckle to be uncoupled from the pivoting structure. The closed wafer transfer cassette of the first aspect of the invention, wherein the pivoting structure comprises a first rotating shaft and a second rotating shaft disposed in parallel with the first rotating shaft; The first rotating shaft is detachably connected to the limiting buckle; the second rotating shaft is pivotally connected to the cover. The closed wafer transfer cassette of claim 2, wherein the inner surface of the cover is provided with a first elastic clamping member; the second elastic clamping member and the third elastic body are disposed in the casing a clamping member, and the second and third elastic clamping members are disposed opposite to the first elastic clamping member; the first, second, and third elastic clamping members are in contact with the wafer frame The surface is elastic and wavy. A closed wafer transfer cassette according to any one of claims 1 to 3, wherein the joint between the cover and the case is provided with at least one for fastening or loosening the cover. A movable latch that is connected to both of the cases. The closed wafer transfer cassette of claim 4, wherein the movable latch comprises a movable connecting shaft and a buckle; one end of the movable connecting shaft is rotatably connected to the The other end of the movable connecting shaft is rotatably connected to one end of the buckle; the other end of the buckle is detachably connected to the casing. A closed wafer transfer cassette according to any one of claims 1 to 3, wherein the joint between the cover and the case is provided with at least one for fastening or loosening the cover. A slide lock that is connected to both of the cases. The closed wafer transfer cassette of the sixth aspect of the invention, wherein the slide lock comprises a long slide rail, a short slide rail and a slide buckle; the long slide rail is disposed on the cover body or the And the short slide rail is disposed on the corresponding box body or the cover body relative to the long slide rail; the cover body and the box body are fastened, the slide buckle and the long slide rail, The short slide rails are slidably coupled to each other: when the cover body and the box body are in a loose state, the slide buckle is slidably coupled to the long slide rail. The closed wafer transfer cassette of any one of claims 1 to 3, wherein the cover is provided with a state for fastening or loosening the connection between the cover and the case. Rotate the lock. The closed wafer transfer cassette of claim 8, wherein the rotary lock comprises a rotating member and a plurality of connecting rods disposed in conjunction with the rotating member; the rotating member is disposed on the cover The outer surface is disposed on the inner surface of the cover body, and each end of the connecting rod is provided with a hook; the box body is provided with a groove matched with the hooks. The closed wafer transfer cassette of claim 3, wherein the first elastic clamping member comprises a plurality of spacer strips, wherein the sides of the spacer strips present a V-shaped opening for guiding and abutting A gap is formed between the two adjacent spacer strips, and a gap is formed between the two adjacent spacer strips for the spacer strips to elastically contact the opposite sides of the wafer frame. A closed wafer transfer cassette according to claim 1, wherein the material of the closed wafer transfer cassette is selected from at least one selected from the group consisting of plastic, aluminum, and metal alloy.