TWM483941U - Closing the wafer transfer box - Google Patents

Description

Closed wafer transfer box

This creation relates to a wafer-loading device, and more particularly to a closed wafer cassette that can be opened and closed for handling or moving between a semiconductor process workstation and a workstation.

The wafer is a germanium wafer when the semiconductor integrated circuit is fabricated. After the wafer is cut and polished, it is rounded and formed into a thin sheet. According to different sizes, it can be divided into 6吋, 8吋, 12吋, because the wafer is very thin. During transportation, the wafer is adhered and fixed to the wafer frame by a film, placed in a wafer transfer cassette, and transported through a wafer transfer cassette carrying a plurality of wafer frames.

According to the current wafer transfer cassette, there is no design cover. When handling between the workstation/machine station of the semiconductor process and the workstation/machine, it is easy to have fine dust on the wafer to make the subsequent wafers in use. The upper yield is reduced.

The purpose of this creation is to provide a closed wafer transfer cassette that allows the wafer cassette inside the wafer cassette to be protected from operation during the process of sealing to opening or opening to sealing. The stress is damaged, which in turn destroys the structure of the wafer.

For the above purposes, the technical means of the creation is: a box body having a receiving space for accommodating a plurality of wafer frames; a guiding member fixed on one surface of the casing and having at least one guiding groove; a body having at least one pivoting sliding portion, wherein the at least one pivoting sliding portion is slidable and pivotable The method is received in at least one guiding groove in the guiding element to slide and pivot the piece relative to the at least one guiding groove; a cover is pivotally connected to the piece Combining and selectively sealing the accommodating space of the casing; and at least one supporting block fixed on one side of the casing and having a recess, wherein the piece is made by the at least one pivoting sliding portion The body slides and pivots in the at least one guiding groove to separate the box from the cover, and one side of the cover is stably placed on the recess of the at least one supporting block, so that the box is opened At the same time, ensure that the pivoting space of the cover during the opening process does not touch the surrounding precision machine or instrument.

1‧‧‧Box

11‧‧‧Guide elements

111‧‧‧Long block

112‧‧‧ guiding slot

1120‧‧‧ pivot joint

1120'‧‧‧ pivot joint

1121‧‧‧stops

113‧‧‧ tablets

114‧‧‧Support bumps

115‧‧‧fasteners

1151‧‧‧hook

1152‧‧‧Connecting parts

1153‧‧‧ slider

1154‧‧‧ key

1155‧‧‧Locks

1156‧‧‧Active connecting rod

116‧‧‧Support film

2‧‧‧ cover

21‧‧‧First elastic clamp

210‧‧‧ spacer

211‧‧‧ gap

212‧‧‧ notch

213‧‧‧ convex

3‧‧‧ wafer

4‧‧‧ Wafer Frame

5‧‧‧film

H‧‧ Direction

W1, w2‧‧‧ width

H‧‧‧distance

117‧‧‧Second elastic clamp

118‧‧‧Restrictions

1 is a perspective view of a closed wafer transfer cassette (closed state) of the preferred embodiment of the present invention; and FIGS. 2A-2C are plan views of the closed wafer transfer cassette of the preferred embodiment of the present invention, respectively The position at which the cover is actuated; the third is a perspective view of the closed wafer transfer cassette (open state) of the preferred embodiment; and the fourth to fourth embodiments of the present invention are the closed wafer transfer cassette of the preferred embodiment. A plan view and a perspective view of the accommodating space; FIG. 4D is a closed wafer transfer box of the preferred embodiment of the present invention, FIG. 5A-5B is a plan view and a perspective view of a closed wafer transfer cassette of the preferred embodiment of the present invention, in which a wafer state is placed in an internal housing space; FIGS. 6A-6C are The first type of fastener used in the closed wafer transfer cassette of the preferred embodiment of the present invention has a planar actuation diagram; and the seventh embodiment of the present invention is the first embodiment of the closed wafer transfer cassette of the preferred embodiment. Two kinds of fasteners, the three-dimensional actuation diagram thereof; and the eighth embodiment of the present invention are the interlocking locks used in the closed wafer cassette of the preferred embodiment, and the three-dimensional actuation diagram.

In order to facilitate your review committee to have a better understanding and understanding of the technical means and operation process of this creation, the following examples are combined with the drawings, which are described in detail below.

Referring to FIG. 1 , a closed wafer transfer cassette provided by the preferred embodiment of the present invention includes a case 1 and a cover 2, wherein the case 1 has a plurality of wafer frames (wafer). The accommodating space and the opening of the frame 2 selectively cover the opening of the casing 1 so that the accommodating space of the casing 1 is in a sealed state.

One of the casings 1 has a guiding member 11 which is formed by two parallel blocks 111 which are parallel to each other and which are fixed to the surface of the casing 1. The elongated blocks 111 are recessed with two guiding grooves 112 on both sides of the longitudinal body. Further, a restricting portion 118 may be further protruded at one end of the elongated block 111.

The casing 1 has a body 113, and the body 113 has two pivoting sliding portions 1120 fixed at one end thereof away from the cover 2, please refer to FIGS. 2A-2C. These pivotal slides The moving portion 1120 is cylindrical and is respectively received in the guiding groove 112, so that the sheet body 113 is bidirectionally slid by the guiding of the pivoting sliding portion 1120 along the guiding groove 112. Moreover, since the pivotal sliding portion 1120 has a cylindrical structure, the sheet body 113 is pivoted relative to the guiding groove 112.

The casing 1 has a plurality of supporting protrusions 114 fixed to both sides of the sheet body 113 and adjacent to the joint of the box body 1 and the cover 2.

The cover 2 and the body 113 can be coupled to each other in a pivotable manner by at least one bearing. After the cover 2 covers the opening of the casing 1, the cover 1 can be firmly fixed to the opening of the casing 1 by at least one fastener 115. As shown in FIG. 1, the casing 1 is The accommodation space is sealed.

Please refer to FIGS. 2A-2C for a plan view of the closed wafer transfer cassette provided by the preferred embodiment of the present invention. The cover 2 is fixed with a first elastic clamping member 21 corresponding to the inner side surface of the casing 1. The structural features will be described in the following paragraphs. In addition, the surface of the support projection 114 has a recess as a support after the cover 2 is opened, and a detailed embodiment thereof will be described later.

As shown in FIG. 2A, when the cover 2 is to be opened to take or take the wafer in the casing 1, the pivoting sliding portion 1120 of the sheet 113 can be firstly moved away from the casing 1 in the horizontal direction. Pushing a predetermined distance h forward to further push the cover 2 in a unidirectional manner so that the inner side surface of the cover 2 is away from the opening of the casing 1 along the sliding direction of the sheet 113, wherein the predetermined distance h The length is determined by the minimum pivoting space that the sheet can accept in the actual working environment. It should be noted that the sheet body 113 has a retracted section of a width w2, that is, a notch is respectively formed on both sides of a specific area of the sheet body 113 to form the sheet. The indented section, as shown in Fig. 1, is such that the width w2 of the indented section is less than the width w1 of the sheet 113 in the non-indented section. Since the cover 2 is closed and not pushed, the retracted section of the width w2 and the restricting portion 118 are not aligned with each other such that the restricting portion 118 blocks the pivoting of the cover 2 when the sheet 113 is moved by the sheet 113 The cover 2 is pushed forward to the predetermined distance h to align the recess of the retracted section with the restricting portion 118, and the cover 2 can directly pivot the corresponding action of the case 1. Further, a stopper portion 1121 may be further disposed between the elongated blocks 111 to prevent the sheet 113 from being pushed forward by an excessive distance.

Then, as shown in FIG. 2B, after the case 1 and the cover 2 are pushed open, the piece The body 113 can further pivotally move the cover 2 up to one side of the casing 1 by the pivoting sliding portion 1120 of the guiding groove 112.

As shown in FIG. 2C, when the cover 2 is moved up to one side of the case 1, By sliding the sliding portion 1120 of the sheet 113, the sheet 113 can be slid in a reverse direction H to the other end of the guiding groove 112 (ie, smooth from the original position of the pivoting sliding portion 1120). The sliding portion 1120' is placed in a new position to firmly place one side of the cover 2 on the recess of the supporting protrusion 114, so that the sealed wafer container is in an open state.

Referring to FIG. 3, the symmetrical inner walls of the casing 1 have a plurality of mutual Parallel support pieces 116. After the closed wafer transfer cassette is in an open state, the wafer frame (or wafer) can be inserted into the cassette 1 along the support sheets 116.

Please refer to FIGS. 4A to 4C, which are a plan sectional view (FIG. 4A) and a perspective cross-sectional view (FIGS. 4B and 4C) in which the sealed wafer transfer cassette is sealed.

Referring to FIGS. 4A to 4D, the symmetry of the inner wall of the casing 1 further has a plurality of second elastic clamping members 117 which may be constructed of curved elastic sheets or elastic blocks. The second elastic clamping member 117 has a wavy and elastic surface for holding the wafer frame (as shown in FIG. 5A). In addition, the cover 2 is fixed with a first elastic clamping member 21 corresponding to the inner side surface of the casing 1, and the first elastic clamping member 21 has the structural features as shown in FIG. 4D, which is composed of a plurality of spacer strips 210. The horizontal array is configured, wherein each side of the spacer 210 presents a V-shaped opening to guide and abut against the opposite side of each wafer frame 4 relative to the inner surface of the cover 2, as shown in FIG. 5A. Between the two adjacent spacer strips 210, there is a gap 211 of a predetermined length between the spacer strips 210 for elastically contacting the opposite sides of each wafer frame, and two adjacent sides of the two adjacent spacer strips 210. A plurality of notches 212 are formed in each of the gaps 211 and a plurality of protrusions 213 corresponding to the notches 212 are formed. The protrusions 213 are used to guide and position each wafer frame. Placed within the V-shaped opening instead of the gap 211.

Please refer to Figures 5A to 5B, which are the closed wafer transfer The box has a closed cross-sectional view (Fig. 5A) and a perspective cross-sectional view (Fig. 5B), and includes a plurality of accommodating spaces in which the wafer frame 4 is placed. Each wafer frame 4 is adhered and fixed to the wafer frame 4 by a film 5 as shown in FIGS. 5A and 5B.

The wafer frames 4 are mainly supported by the support sheets 116. An accommodation space disposed in the casing 1. In order to prevent the wafer frames 4 from sliding in the direction of the support sheets 116 during the handling, the first elastic clamping members 21 and the second elastic clamping members 117 provide clamping in other directions. At the same time, by providing cushioning by elasticity, the wafer frame 4 is prevented from being damaged by excessive stress during transportation.

Since the support sheets 116, the first elastic holding members 21 and the second elastic holding members 117 do not contact the wafers 3, the appearance of the wafers 3 is protected from damage.

Please refer to Figure 1 and Figure 6A to Figure 6C for the closed wafer transfer. The at least one fastener 115 used for the delivery box can be a two-stage pivoting movable fastener, which is composed of a hook 1151 and a connecting member 1152. The hook 1151 is pivotally connected with The connector 1152 is coupled, and the connector 1152 is pivotally coupled to the cover 2, whereby the hook 1151 selectively hooks the case 1 and the cover 2 to a fixed or Released state.

Please refer to Figure 1 and Figure 7A to Figure 7C for the closed wafer transfer. The at least one fastener 115 used in the delivery box can be replaced by a slider, which is provided with two sliding rails (not labeled) respectively disposed on the surface of the casing 1 and the cover 2, and a slide The slider 1153 is operated on the rail, and the slider 1153 selectively latches the slider 1 and the slide rail on the cover 2 to be in a fixed or loose state.

Please refer to Figure 1 and Figure 8A to Figure 8B for the closed wafer transfer. In addition to the at least one fastener 115, the delivery box may also adopt a linkage lock disposed inside the cover 2, which is composed of a key 1154, a set of locking pieces 1155 for resisting the casing 1, and a A set of movable links 1156 that connect the lock pieces 1155 are formed. The key 1154 can selectively drive the movable links 1156 to control the locking pieces 1155 against the casing 1 to be in a fixed or loose state. In addition, the material used for the closed wafer transfer cassette disclosed in the present invention may be at least one selected from the group consisting of plastic, aluminum, and metal alloy.

The detailed description above is specific to the possible embodiments of this creation. It is to be understood that the examples are not intended to limit the scope of the patents of the present invention, and that equivalents or modifications may be included in the scope of the patent.

1‧‧‧Box

11‧‧‧Guide elements

111‧‧‧Long block

112‧‧‧ guiding slot

113‧‧‧ tablets

114‧‧‧Support bumps

115‧‧‧fasteners

118‧‧‧Restrictions

2‧‧‧ cover

W1‧‧‧Width

W2‧‧‧Width

Claims (13)

The invention relates to a closed wafer transfer cassette, comprising: a box body having an accommodating space for accommodating a plurality of wafer frames; a guiding element fixed on one side of the box body and having at least one guide a slot having at least one pivotal sliding portion, the at least one pivoting sliding portion being slidably and pivotally received in the at least one guiding slot in the guiding element, such that The sheet slides and pivots relative to the at least one guiding slot; and a cover pivotally engages the sheet and selectively seals the receiving space of the box. The closed wafer transfer cassette of claim 1, wherein the inner side of the cover is provided with a plurality of first elastic clamping members, and the inner side of the casing is provided with a plurality of second elastic clamping members and a plurality of supports The wafer frames are firmly accommodated by the first elastic clamping members and the second elastic clamping members, and the supporting of the supporting sheets In the box. The closed wafer transfer cassette of any one of claims 1 to 2, wherein the joint between the cover and the case is provided with at least one for fixing or releasing the cover and the case. The active fastener of the connected state. The closed wafer transfer cassette of claim 3, wherein the movable fastener is composed of a hook and a connecting member, and the hook is pivotally connected to the connecting member. In combination, the connector is pivotally coupled to the cover, whereby the hook selectively hooks the case and the cover to a fixed or loose shape state. The closed wafer transfer cassette of any one of claims 1 to 2, wherein the joint between the cover and the case is provided with at least one for fixing or releasing the cover and the case. The slider of the connection state. The closed wafer transfer cassette of claim 5, wherein the slide fastener is provided by two slide rails respectively disposed on the cover body and the cover surface, and a slide that can be run on the slide rails. The button is formed by the slider selectively locking the box and the slide rail on the cover to achieve a fixed or loose state. The closed wafer transfer cassette of any one of claims 1 to 2, wherein the cover has a interlocking lock for fastening or releasing the connection between the cover and the case. The closed wafer transfer cassette of claim 7, wherein the interlocking lock is a key, a set of locking pieces for abutting the box, and a set of movable links connecting the locking pieces. Composition. The key selectively drives the movable links to control the locking tabs against the casing to achieve a fixed or loose state. The closed wafer transfer cassette of claim 1, further comprising at least one support block for firmly placing one side of the cover on the recess of the at least one support block to open the case . The closed wafer transfer cassette of claim 2, wherein the first elastic holding member comprises a plurality of spacer strips, wherein a side of each of the spacer strips presents a V-shaped opening to guide and abut the same Each wafer frame has a gap with respect to an inner side of the inner surface of the cover, and a gap is formed between the two adjacent spacer strips for the spacer strips to elastically contact the wafer frame The opposite side of the frame. The closed wafer transfer cassette of claim 10, wherein two adjacent sides of the two adjacent spacer strips are recessed with a plurality of recesses and corresponding recesses along the gap. A plurality of convex protrusions are protruded, and each convex portion is used to guide and position each of the wafer frames. The closed wafer transfer cassette according to claim 1, wherein the material of the closed wafer transfer cassette is selected from at least one selected from the group consisting of plastic, aluminum, and metal alloy. The closed wafer transfer cassette of claim 1, wherein the sheet is further provided with a retracting section, and the retracted section is respectively recessed on both sides thereof for respectively aligning the protrusions At one of the guiding elements of the guiding element.