TWM453851U - Block cleaner and prober device - Google Patents

Abstract

A prober device includes a detecting moving stage, at least one probe stage, a cleaning stage, and a block cleaner. The detecting moving stage is for loading a sample. The probe stage is disposed on a platform, and the probe stage includes at least one probe. The block cleaner is disposed on the cleaning stage. The thickness of the block cleaner is about 3 mm~6 mm. Therefore, the probe can insert to the block cleaner and a plurality of attachments on the probe can be stuck by the block cleaner and be removed from the probe.

Description

Cleaning block and spotting device

This creation is about a spotting device.

After the probe of the general spotting device is used for a period of time, the probe may adhere to some objects due to long-term contact with the object to be tested, and these attachments may affect the result of the spot test. For example, when measuring the electrical properties of the test object, the current applied to the probe may be disturbed by the deposit; or when the light property of the test object is spotted, the deposit on the probe may be the object to be tested. The emitted light produces an adverse effect of shading. Therefore, the operator must clean the probe regularly to avoid this.

However, in the cleaning sheet sold on the market, when cleaning, the operator rubs the probe tip to achieve the purpose of removing the deposit. However, the sharpened tip may be subject to wear and tear, so that the cleaned probe can no longer be used in some point-of-care tests where the probe is extremely required. On the other hand, the cleaning sheet can only clean the probe tip, and it is impossible to remove the attachment on the probe needle side in all directions, which is inconvenient.

One aspect of the present invention is to provide a cleaning block for removing a plurality of attachments to which at least one probe is attached. The cleaning block contains the body. The body has a thickness of about 3 mm to 6 mm, allowing the probe to be inserted into the body and thereby allowing the body to adhere to the attachment to which the probe is attached.

In one or more embodiments, the body has a Shore hardness of from about 0 A to 20 A.

In one or more embodiments, the cleaning block has a surface such that when the cleaning block cleans the probe, the surface covers a portion of the tip of the probe.

In one or more embodiments, a portion of the tip of the surface covered by the surface has a depth of between about 1 mm and 4 mm.

Another aspect of the present invention is to provide a spotting device comprising a detection moving platform, at least one probe holder, a cleaning platform and a cleaning block. The mobile platform is detected to carry a test object. The probe holder is disposed on a carrier platform, and the probe holder includes at least one probe. The cleaning block is placed on the cleaning platform. The thickness of the cleaning block is about 3 mm to 6 mm, allowing the probe to be inserted into the cleaning block, which in turn allows the cleaning block to adhere to the plurality of attachments to which the probe is attached. Wherein, when the spotting device is in a detecting mode, the detecting moving platform will move into a detecting area, detecting the moving platform to move the object to be tested relative to the probe for spotting; and detecting the moving when the spotting device is in a cleaning mode The platform will move out of the inspection area, and the cleaning platform will move into the detection area, which cleans the cleaning block against the probe for cleaning.

In one or more embodiments, the cleaning block has a Shore hardness of from about 0 A to 20 A.

In one or more embodiments, when the spotting device is in the cleaning mode, the detecting mobile platform and the cleaning platform can be displaced in synchronization.

In one or more embodiments, the cleaning block has a surface such that when the cleaning block cleans the probe, the surface covers a portion of the tip of the probe.

In one or more embodiments, a portion of the tip of the surface covered by the surface has a depth of between about 1 mm and 4 mm.

In one or more embodiments, the spotting device further includes a light collecting device. The light collecting means can be an integrating sphere, a microscope, a solar panel or a charge coupled component.

In the following, a plurality of embodiments of the present invention will be disclosed in the drawings, and for the sake of clarity, many practical details will be described in the following description. However, it should be understood that these practical details are not applied to limit the creation. That is to say, in the implementation part of this creation, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

FIG. 1 is a schematic diagram of a cleaning block 100 and a probe 410 according to an embodiment of the present invention. As shown in FIG. 1, the cleaning block 100 is used to remove a plurality of attachments 412 to which at least one probe 410 is attached. The cleaning block 100 includes a body 110. The thickness H1 of the body 110 is about 3 mm to 6 mm, so that the probe 410 can be inserted into the body 110, and the body 110 is thereby visibly removed from the attachment 412 to which the probe 410 is attached.

The probe 410 described above is mainly used in a spotting device to contact the object to be tested to measure the electrical or optical properties of the object to be tested. However, the result of the probe 410 being in contact with the object to be tested multiple times may cause some substances on the object to be tested to adhere to the probe 410 to become the attachment 412 on the probe 410. These attachments 412 can cause different variations in the probe 410, thereby affecting the electrical or optical properties measured by the pointing device, so the probe 410 needs to be cleaned from time to time to ensure the reliability of the probe 410 measurement. However, most of the commercially available cleaning sheets can only remove the attachment 412 located at the tip end portion of the probe 410, and cannot be removed. The attachment 412 on the needle side of the probe 410 greatly affects the cleaning effect. In view of this, the thickness H1 of the cleaning block 100 of the present embodiment is about 3 mm to 6 mm, so that the probe 410 can be sufficiently inserted into the cleaning block 100. In this way, the cleaning block 100 can not only clean the attachment 412 of the tip portion of the probe 410, but also further remove the attachment 412 of the probe 410 near the needle side of the needle tip, and thus has better performance than the commercially available cleaning sheet. Cleaning effect. On the other hand, commercially available cleaning sheets mostly remove the attached matter 412 by rubbing the tip of the needle, and the probe 410 is more susceptible to damage while being rubbed. In contrast, the cleaning block 100 of the present embodiment removes the attachment 412 of the probe 410 in a viscous manner, so that the probe 410 is not easily damaged by cleaning, and its service life can be greatly extended.

In detail, please refer to FIG. 2 , which illustrates a side view of the cleaning block 100 of FIG. 1 when the probe 410 is cleaned. The cleaning block 100 has a surface 120. When the probe 410 is cleaned using the cleaning block 100, the probe 410 is inserted into the cleaning block 100 such that the surface 120 can cover a portion of the tip of the probe 410, and the attachment 412 on the probe 410 can thus be adhered by the cleaning block 100. Leave the probe 410 to achieve a cleansing effect.

Wherein, the depth H2 of the part of the needle tip covered by the surface 120 is about 1 mm to 4 mm, so that the cleaning block 100 can cover the area where the probe 410 is more likely to adhere to the attachment 412 as much as possible. However, the depth H2 described above is merely an example. In fact, the depth H2 of a portion of the tip of the surface covered by the surface 120 may vary depending on the type of the probe 410 or the area of the attachment 412 on the probe 410. limit.

When the probe 410 is inserted into the cleaning block 100, the probe 410 may be broken due to the material of the cleaning block 100, and the deeper the probe 410 When entering the cleaning block 100, the probability of breaking is greater. Therefore, the Shore hardness of the body 110 of the cleaning block 100 can be appropriately selected so that the cleaning block 100 can offset the force that the probe 410 is inserted into the cleaning block 100 when cleaning the probe 410. In one or more embodiments, the Charpy hardness of the body 110 of the cleaning block 100 can be selected from about 0 A to 20 A. It should be understood that the values of the above-mentioned Xiao hardness are merely illustrative and are not intended to limit the creation. Those skilled in the art to which the present invention pertains should flexibly select the Xiao hardness of the main body 110 according to actual needs.

In one or more embodiments, the material of the cleaning block 100 may be selected as a soft rubber such as ThermoPlastic Rubber (TPR) to meet the aforementioned Shore hardness requirements. The thermoplastic rubber is a non-toxic soft rubber which has plasticity and stickiness and can cover the tip of the probe 410 and remove the adhering substance 412 during needle cleaning. In addition, the thermoplastic rubber does not have the problem of back-staining, so the original properties of the probe 410 are not affected after the cleaning is completed. On the other hand, thermoplastic rubber can be directly adhered to a cleaning platform, which has the advantage of convenient installation. However, this creation is not limited to this material.

Therefore, the cleaning block 100 described above can be applied to a spotting device having at least one probe 410. It should be noted that in the following description, the details of the cleaning block 100 which has been mentioned in the above embodiments will not be described again, but only the changes of the following embodiments will be described in detail.

FIG. 3 is a schematic diagram of the spotting device of the present embodiment in a cleaning mode. The spotting device includes a cleaning block 100, a detection mobile platform 300, a probe holder 400, a probe 410, a cleaning platform 500, and a carrier platform 800. The detecting mobile platform 300 is configured to carry a DST 310. The probe base 400 is disposed on the carrying platform 800 and includes at least one probe 410. The cleaning block 100 Placed on the cleaning platform 500. The thickness H1 of the cleaning block 100 (as shown in FIG. 1) is about 3 mm to 6 mm, so that the probe 410 can be inserted into the cleaning block 100, and then the cleaning block 100 is adhered to the probe 410 in a sticky manner. Attachment 412 (as shown in Figure 1). For details, please refer to Figures 3 and 4 at the same time. FIG. 4 is a schematic diagram showing the pointing device of the present embodiment in a detection mode. Please refer to FIG. 4 first. Actual operation When the spotting device is in the detecting mode, the detecting moving platform 300 will move into the detecting area 810, and then the moving platform 300 is detected to move up and down, so that the object to be tested 310 can be probed 410. Relative movement for spot testing. Referring to FIG. 3, when the spotting device is in the cleaning mode, the detecting moving platform 300 will move out of the detecting area 810, and the cleaning platform 500 will move into the detecting area 810, and the cleaning platform 500 will move up and down, so that The cleaning block 100 moves relative to the probe 410 to perform a cleaning action, which enables the probe 410 to be inserted into the cleaning block 100, and thereby allows the cleaning block 100 to remove the plurality of attachments to which the probe 410 is attached in a sticky manner. Object 412. It should be particularly noted that when the spotting device is in the cleaning mode, the detecting mobile platform 300 and the cleaning platform 500 can be synchronously displaced, that is, when the moving platform 300 is detected to move out of the detecting region 810, the cleaning platform 500 can be synchronized to move into the detecting region 810. Preferably. Of course, the displacement can also be performed in stages, so that the detection mobile platform 300 can be moved out of the detection area 810 first, and then the cleaning platform 500 can be moved into the detection area 810, depending on actual needs. Detecting the mobile platform 300 can enable the detection of the mobile platform 300 itself and the cleaning platform 500 to perform horizontal, up and down movement functions.

In this way, since the cleaning platform 500 is located on the side of the detecting mobile platform 300, the probe 410 is measured on the detecting mobile platform 300. After the object 310 is tested, the needle cleaning device can be performed at the same measuring device without stopping the measuring device, which can greatly reduce the steps and time for clearing the needle. On the other hand, the cleaning block 100 of the present embodiment is self-adhesive, so it can be fixed directly on the cleaning platform 500, and no additional installation steps are required. It should also be noted that although the shape of the probe 410 is a curved needle in all of the drawings to which the present description is incorporated, this does not limit the creation. Those of ordinary skill in the art to which the present invention pertains should flexibly select the shape of the probe 410 as needed.

The number of the probes 410 described above may be plural, for example, four, to facilitate processing of the multiplex program in the spotting device. The cleaning block 100 of the present embodiment can facilitate cleaning of the plurality of probes 410 at a time because it has a certain thickness H1 (as shown in FIG. 1). In detail, since the probe 410 needs to be inserted into the cleaning block 100 for cleaning purposes, the thickness H1 of the cleaning block 100 is related to the number of simultaneously cleanable probes 410. However, since the depth H2 of the probe 410 inserted into the cleaning block 100 (as shown in FIG. 2) is limited, for example, in the present embodiment, the depth H2 is about 1 mm to 4 mm, and if the cleaning block 100 is too thick, the cleaning effect is There is no substantial help, and the cleaning block 100 may therefore not fit into the spotting device. Therefore, in one or more embodiments, the thickness H1 of the cleaning block 100 can be selected to be about 3 mm to 6 mm for more effectively cleaning the plurality of probes 410 at the same time.

Please refer to Figure 4 below. The probe 410 can be used to measure the electrical or optical properties of the object to be tested 310 when the spotting device is in the detection mode. In the mode of electrical detection, the object to be tested 310 can be, for example, a die. At least two probes 410 may first contact the object to be tested 310, and then the spotting device provides a test current from one of the probes 410 to the object to be tested 310 to measure the difference between the two probes 410. Voltage difference. Therefore, if any of the probes 410 has an attachment 412 (as shown in FIG. 1), since the attachment 412 itself also has a resistance value, the measured voltage difference is no longer accurate. What is more, if the attachment 412 of the probe 410 is removed by friction using a commercially available cleaning sheet, the surface area of the probe 410 may also change, so that the resistance value of the probe 410 also changes. However, the cleaning block 100 of the present embodiment can avoid the above-mentioned situation by clearing the needle in a sticky manner.

Please continue to refer to Figure 4. In one or more embodiments, the spotting device can also be used to measure the lightness of the object to be tested 310, that is, the object to be tested 310 can be a light emitting element. The spotting device may further include a light collecting device 700. The light collecting device 700 is disposed above the light emitting element for detecting light emitted by the light emitting element. In detail, when the spotting device is in the mode of photodetection, the probe 410 is located between the light collecting device 700 and the light emitting element for providing a voltage to the light emitting element to cause the light emitting element to emit light. It is therefore necessary to ensure that the probe 410 does not affect the light collection by the light-receiving device 700, i.e., the probe 410 does not obscure the light emitted by the light-emitting elements. However, if the probe 410 is adhered to the attachment 412 (as shown in FIG. 1), especially the attachment 412 attached to the needle side of the probe 410, the attachment 412 of this portion is more likely to cover the light-emitting element. Light. The cleaning of the probe 410 by the cleaning block 100 of the present embodiment can not only easily remove the attachment 412 on the needle side of the probe 410, but also has no problem of foreign matter smearing, so the probe for use in optical measurement is used. For 410, cleaning with cleaning block 100 is a better choice. In addition, since the light-receiving intensity of the light-receiving device 700 and its light-receiving distance (in this embodiment, the distance between the light-emitting element and the light-receiving device 700), the light-receiving distance must be Keep the same to facilitate uniform compensation of the light intensity of subsequent data. Such a The height of the probe 410 at the time of photometric measurement must be maintained the same (for example, 3 mm in the present embodiment), that is, the tip of the probe 410 is not allowed to wear, and the cleaning block 100 can be used to avoid the above situation.

In one or more embodiments, the light collecting device 700 may be an integrating sphere, a microscope, a solar panel, or a Charge-Coupled Device (CCD) or any combination thereof. On the other hand, the light-emitting element can be a light-emitting diode, and the present invention is not limited thereto.

Next, the effect of the cleaning block of one embodiment of the present invention on actual use will be described with experimental data. Experiment 1 is to examine the back-staining condition of the cleaning block, that is, to inspect the probe cleaned with the cleaning block, and whether the foreign matter of the cleaning block is adhered to the needle body. The experimental procedure is as follows: First, a new probe is used to spot a grain. The diameter of the tip is 6.5 μm, the thickness of the cleaning block is 6 mm, and the depth of the probe inserted into the cleaning block is 1.5 mm to 2 mm. After completing the spot test 120 times, the needle is cleaned once, and each time the needle is inserted into the cleaning block 5, this is defined as one time. This experiment 1 was repeated 10 times in total to examine the effect of cleaning the probe using a cleaning block. Table 1 shows the voltage data of each of the three times after cleaning the probe after each cleaning, and the test current is 20 mA.

It can be seen from the data in Table 1 that the electrical properties of the probe remain substantially the same after each needle cleaning, so it can be inferred that the probe has no back-staining. Furthermore, after 10 points of spotting and needle cleaning, the probe still maintains its electrical reliability, which means that even if the probe is cleaned 10 times using a cleaning block, the cleaning block will not damage the probe. It is inferred that the use of a cleaning block allows the probe to have a long service life.

Experiment 2 is a review of the cleaning efficacy of the cleaning block, that is, the probe cleaned with the cleaning block, and whether the attachment on the needle body can be completely removed. Please refer to Fig. 5 and Fig. 6, at the same time, Fig. 5 is a micrograph of the probe tip and the needle side after the spot measurement is completed, and Fig. 6 is a micrograph of the probe tip and the needle side after the needle is completed. . The experimental procedure is as follows: First, a probe is used to spot a grain. The diameter of the tip is 6.5 μm, the thickness of the cleaning block is 6 mm, and the depth of the probe inserted into the cleaning block is 1.5 mm to 2 mm. After completing the spot test 2000 times, the needle is cleaned once, and each time the needle is inserted into the cleaning block 5, this is defined as one time. This embodiment was repeated a total of 1800 times to examine the effect of cleaning the probe using the cleaning block. The current during the spot test is 30 mA.

As shown in Figure 5, after the spot test, the probe tip and the needle side portion They all stick to some attachments. However, after the needle is removed, the attachment of the probe tip and the needle side portion in Fig. 6 no longer exists. What is more, no foreign matter is peeled back in Fig. 6, and it can be proved that the cleaning block has a good cleaning effect on the probe.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any person skilled in the art can make various changes and refinements without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

100‧‧‧cleaning block

110‧‧‧ Subject

120‧‧‧ surface

410‧‧‧Probe

412‧‧‧ Attachments

300‧‧‧Detecting mobile platforms

310‧‧‧Test object

400‧‧‧ probe holder

500‧‧‧cleaning platform

700‧‧‧Lighting device

800‧‧‧bearing platform

810‧‧‧Detection area

H1‧‧‧ thickness

H2‧‧ depth

FIG. 1 is a schematic view of a cleaning block and a probe according to an embodiment of the present invention.

Figure 2 is a side elevational view of the cleaning block of Figure 1 when cleaning the probe.

FIG. 3 is a schematic diagram of the spotting device of the present embodiment in a cleaning mode.

FIG. 4 is a schematic diagram showing the pointing device of the present embodiment in a detection mode.

Figure 5 is a photomicrograph of the probe tip and the needle side after the spot test is completed.

Figure 6 is a photomicrograph of the probe tip and the needle side after the needle is removed.

100‧‧‧cleaning block

110‧‧‧ Subject

120‧‧‧ surface

410‧‧‧Probe

412‧‧‧ Attachments

H2‧‧ depth

Claims (10)

A cleaning block for removing a plurality of attachments attached to at least one probe, the cleaning block comprising: a body having a thickness of about 3 mm to 6 mm, so that the probe can be inserted into the body, and further Allowing the body to remove the attachments to which the probe is attached in a sticky manner. The cleaning block of claim 1, wherein the body has a Shore hardness of about 0 A to 20 A. A cleaning block according to claim 1, wherein the cleaning block has a surface such that when the cleaning block cleans the probe, the surface covers a portion of the tip of the probe. The cleaning block of claim 3, wherein the portion of the tip covered by the surface has a depth of about 1 mm to 4 mm. A spot measuring device comprising: a detecting mobile platform for carrying a test object; at least one probe holder disposed on a carrying platform, comprising at least one probe; a cleaning platform; and a cleaning block disposed thereon On the cleaning platform, the cleaning block has a thickness of about 3 mm to 6 mm, so that the probe can be inserted into the cleaning block, and then the The cleaning block can remove a plurality of attachments attached to the probe in a sticky manner; and wherein, when the pointing device is in a detection mode, the detection mobile platform moves into a detection area, the detection mobile platform enables the The test object moves relative to the probe for spotting; when the spotting device is in a cleaning mode, the detecting moving platform will move out of the detecting area, and the cleaning platform will move into the detecting area, and the cleaning platform makes the The cleaning block moves relative to the probe for cleaning. The spotting device of claim 5, wherein the cleaning block has a Shore hardness of about 0 A to 20 A. The spotting device of claim 5, wherein the detecting mobile platform and the cleaning platform are simultaneously displaceable when the pointing device is in the cleaning mode. The spotting device of claim 5, wherein the cleaning block has a surface such that when the cleaning block cleans the probe, the surface covers a portion of the tip of the probe. The spotting device of claim 8, wherein the portion of the tip covered by the surface has a depth of about 1 mm to 4 mm. The spotting device of claim 5, further comprising a light collecting device, wherein the light collecting device is selected from the group consisting of an integrating sphere, a microscope, a solar panel, and a charge coupled device.