M441750 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種監測裝置，尤指一種藉由干涉儀原 理來L測滾珠螺桿因溫度上昇而產生熱變位的情形，其隸 屬於光學檢測應用之技術領域範疇。 Ύ、 【先前技術】 按’目前業界所使用的工具機常藉心袞珠螺桿來進行 動及定位’因此’滾珠螺桿是否能準確地進行使用對 於:具機的操作有著相當的影響，現有滾珠螺桿在長時間 及冋速的使用了 ’容易因滾珠與螺桿摩擦而產生溫度上升 备見象使康珠螺桿隨著溫度的上升而產生熱變位的現 ’其中當滾珠螺桿在熱變位的情況進行使用時，則容易 使工具機無法平順且進墟 ― 旱確地進仃移動及定位，使工具機在 呆乍上產生偏差，進而影響其準確性； 當滾珠螺桿因熱產生變位時，雖可藉由一應變規對於 螺桿的熱變位量進行量測，‘然而，藉由應變規進行量 Μ寺不4堇而對於滾珠螺桿進行接觸式的量測，且其量測 :精準度亦受限於應變規的規格，無法方便且準確地對於 珠螺桿變位量進行量測，誠有加以改進之處》 【新型内容】 的 本創作有鏗於既有應變規量測滾珠螺桿熱變位 種非接足’特經過不斷的試驗與研究，終於發展出一 隹接觸式、方便監測且準確性高之本創作。 «41750 本創作之主要目的在於提供一種滾珠螺 裝置，其係可方便且準杨對於滾珠螺桿㈠=監測 測，藉以避免工具機因滾珠螺桿熱變位而影變：：監 之目的者。 〜響#作準確性 基於上述目的’本創作之主要技術手段在於提供 凌珠螺桿熱變位監測裝4 ’其係組設於一滾珠螺桿固 及螺帽法蘭間且包含有-光源組、—㈤^_干涉儀及 一訊號處理系統，其中：M441750 V. New description: [New technical field] This creation is about a monitoring device, especially a case where the ball screw is thermally deformed due to temperature rise by the principle of interferometer, which belongs to optical detection. The technical field of application. Ύ, [Prior Art] According to the 'tools used in the industry, the bead screw is often used for moving and positioning'. Therefore, whether the ball screw can be used accurately has a considerable influence on the operation of the machine. Existing balls The screw is used for a long time and idle speed. 'It is easy to cause temperature rise due to friction between the ball and the screw. It is seen that the Kangzhu screw will generate thermal displacement with the rise of temperature." When the ball screw is in thermal displacement When the situation is used, it is easy for the machine tool to be unsmooth and enter the market. The movement and positioning of the machine tool will cause the machine tool to be biased, which will affect its accuracy. When the ball screw is displaced due to heat, Although the thermal displacement of the screw can be measured by a strain gauge, ' however, the contact measurement of the ball screw is performed by the strain gauge, and the measurement is accurate. The degree is also limited by the specifications of the strain gauge, and it is not convenient and accurate to measure the amount of displacement of the bead screw. It is necessary to improve it. [The new content] This creation is contrary to the existing Gauge measuring the thermal displacement of the ball screw kind contactless foot 'Laid through continuous testing and research, and finally developed a short-tailed contact, with high accuracy and to facilitate the monitoring of this creation. «41750 The main purpose of this creation is to provide a ball screw device that is convenient and accurate for the ball screw (a) = monitoring to avoid the machine tool being affected by the thermal displacement of the ball screw:: the purpose of supervision. ~响# for accuracy based on the above objectives' The main technical means of this creation is to provide the Lingzhu screw thermal displacement monitoring device 4' which is set between a ball screw and a nut flange and includes a light source group. - (5) ^_ interferometer and a signal processing system, wherein:
該光源組係用以固設於該滾珠螺桿的固定座上且由— 氦氖雷射提供光源； 該Fabry-Perot干涉儀係用以設於該滾珠螺桿的固定 座上且設有一固定式的第一分光鏡、一反射鏡及一移動式 的角耦稜鏡，該第一分光鏡係用以接受該光源組的光源’ 而該反射鏡係設在該第一分光鏡異於該光源組的側邊而 該角耦稜鏡係組設於該滾珠螺桿的螺帽法蘭上且與該第一 分光鏡呈一直線排列並與該反射鏡相面對，其中該角輕棱 鏡在與該反射鏡相面對的側面上係局部鍍有一反射膜；以 及 β亥sfl ϊ虎處理糸統係用以接收該光源組的光源經該 Fab「y-Perot干涉儀所產生的干涉條纹且設有一第二分光 鏡、兩位置檢測器及一訊號處理器，其中該第二分光鏡係 用以接收該Fabry-Perot干涉儀第一分光鏡所產生的干涉 條紋並將其均分為兩道光，而兩位置檢測器係分別接收由 該第二分光鏡分出的兩道光，該訊號處理器係將兩位置檢 5 M441750 測器所產生的訊號進行處理，藉以確 銳的干涉條紋。 付β晰且細 進 步’該兩^立晉；丨W。ηη /、J盗間的相位差係為9〇度，拉 產生一正交訊號。 又精以 析。再進一步’該訊號處理器係設於一電腦令進行訊號分 較佳地’該反射鏡的尺寸較該第-分光鏡小。 藉由上述之技術丰Jn_ 孜何手#又，本創作滾珠螺桿熱變位監 置，可透過裝設於滚珠螺桿移動座上的角輕稜鏡相對第 ，即可明顯觀察出干涉條紋清晰或模糊 y化再經由接觸的量測方式，即可方便且準確地 f於滚珠螺桿的熱變位進行監測，進而有效地避免工 因滾珠螺桿熱變位而影響操作準確性。 〃 【實施方式】 為能詳細瞭解本創作的技術特徵及實用功效，並可依 t說明書的内容來實施，玆進—步以如圖式所示的較佳實 :例’砰細就明如A ’請參閱如第一至三圖所示，本創作 二珠累柃熱交位li測裝置，其係組設於一滾珠螺桿50的固 疋座51及螺帽法蘭52間且包含有一光源組1〇、一干涉儀 2〇及一訊號處理系統,其中： 一该光源組10係由一氦氖雷射（He_Ne Laser)”來提供 光源且固設於該滾珠螺桿50的固定座51上，較佳地，該 ^雷射11的真空波長U)為632奈米（nm); i干以儀2 〇係用以接收該光源組10的光源且組設於 M441750 ι滾珠螺;^ 50的固；^座5 j上，較佳地，該干涉儀2〇係為 一 干涉儀且設有-固定式的第-分光鏡21、The light source group is fixed on the fixing seat of the ball screw and is provided by a laser beam. The Fabry-Perot interferometer is disposed on the fixing base of the ball screw and is provided with a fixed type. a first beam splitter, a mirror and a movable angular coupling, the first beam splitter is configured to receive the light source of the light source group, and the mirror is disposed on the first beam splitter different from the light source group And the angular coupling mechanism is disposed on the nut flange of the ball screw and arranged in line with the first beam splitter and facing the mirror, wherein the angular prism is opposite to the reflection The mirror-facing side surface is partially plated with a reflective film; and the β海sfl ϊ 糸 糸 system is used to receive the light source of the light source group through the Fab "y-Perot interferometer generated interference fringes and is provided with a a second beam splitter, a two-position detector and a signal processor, wherein the second beam splitter is configured to receive the interference fringes generated by the first beam splitter of the Fabry-Perot interferometer and divide the light into two lights, and The two position detectors are respectively received by the second beam splitter The two lights, the signal processor will process the signal generated by the two position detection 5 M441750 detector, so as to confirm the sharp interference fringe. Pay β clear and fine progress 'The two ^ Li Jin; 丨 W. ηη / The phase difference between the J and the thief is 9 degrees, which produces an orthogonal signal. It is further analyzed. Further, the signal processor is set in a computer to make the signal better. It is smaller than the first-splitting mirror. With the above-mentioned technology, Jn_ 孜何手#, the created ball screw thermal displacement monitor can be placed through the corner of the ball screw moving seat. It is obvious that the interference fringes are clear or fuzzy, and then the contact measurement method can conveniently and accurately monitor the thermal displacement of the ball screw, thereby effectively avoiding the thermal displacement of the ball screw and affecting the operation accuracy. 。 [Embodiment] In order to understand the technical features and practical functions of this creation in detail, and to implement according to the contents of the specification, it is better to show the example as shown in the figure: As shown in A 'Please refer to the first As shown in the three figures, the creation of the two-bead thermal transfer position measuring device is set between a solid seat 51 and a nut flange 52 of a ball screw 50 and includes a light source group 1 and an interferometer. 2〇 and a signal processing system, wherein: the light source group 10 is provided by a He-Ne Laser to provide a light source and is fixed on the fixing base 51 of the ball screw 50. Preferably, the The vacuum wavelength U of the laser 11 is 632 nanometers (nm); the dry light is used to receive the light source of the light source group 10 and is set in the M441750 ι ball screw; ^ 50 solid; Preferably, the interferometer 2 is an interferometer and is provided with a fixed-type dichroic mirror 21,
一反射鏡22及-移動式的角耦棱鏡23,其中該第一分光鏡 :、接又該光源組1 〇的光源，而該反射鏡2 2係設在 人务刀光鏡21異於該光源組1 〇的側邊且尺寸較該第一 刀光鏡21小’而該角耦稜鏡23係組設於該滾珠螺桿50的 螺帽法蘭52上且與該第-分光鏡21呈一直線排列並與該 反射鏡22相面對，其中該角輕棱鏡23在與該反射鏡22相 面對的側面上係局部鍍有一反射膜231 ;以及 該訊號處理系統30係用以接收該光源組彳〇光源經該 干涉儀20所產生的干涉條紋且設有一第二分光鏡31、兩位 置檢測态（Position Sensitive Detector ; PSD) 32 及一訊 號處理器33 ’其t該第二分光鏡31係、用以接收該干涉儀 20第一分光鏡21所產生的干涉條紋並將其均分為兩道 光，而兩位置檢測器32係分別接收由該第二分光鏡31分 出的兩道光，較佺地，兩位置檢測器32間的相位差為9〇 度，藉以產生一正交訊號，該訊號處理器33係將兩位置檢 測器32所產生的訊號進行處理，藉以確認是否取得清晰且 細銳的干涉條紋，較佳地，該訊號處理器33係設於一電腦 (圖未示）中進行訊號分析。 本創作於使用時請配合參看如圖3所示，於使用時係 將該氦氖雷射11的光束由該光源組1 〇端射出，並穿過該 第一分光鏡21为射至5亥角輕棱鏡23的反射膜231上，使 該反射膜231同時產生反射與透射，其中反射的光束係射 7 M441750 向該第一分光鏡21,並經由該第一分光鏡21而反射進入該 訊號處理糸統30的第二分光鏡31中，而穿透該反射膜231 的光束係射入該角耦稜鏡23中，並由該角耦稜鏡23以18〇 度反射至位於該第一分光鏡21上的反射鏡22中，並由該 反射鏡22反射回該角耦稜鏡23再經由該反射膜231再度 產生反射與透射，其中透射過該反射膜231的光束射向該 第一分光鏡21並反射射入該訊號處理系統3〇的第二分光 鏡中31，而反射光束係經過該角耦稜鏡23以彳8〇度反射 至。亥反射鏡2 2上，如此的無限循環，直到光束衰退至一對 系統無影響的極小值，其中先、後經該第一分光鏡21反射 至戎第二分光鏡31的光束會形成一干涉條紋，並經由兩位 置檢測器32產生一正交訊號至該訊號處理器33中進行處 理’即可得知該干涉條紋之細銳值； 其中，當該滾珠螺桿50藉由一馬達53進行作動時， 位於該滾珠螺桿50移動座54上的該螺帽法蘭52及該角耦 棱鏡23 ’會相對兩分光鏡21 ’ 31產生移動，此時，當該 滾珠螺桿50因熱產生變位時，會使該滾珠螺桿5〇的移動 座54相對該固定座51產生偏移，而隨著該移動座54相對 該固定座51偏移時，會讓該干涉儀20的干涉條紋產生模 糊不清的現象，因此可透過分析干涉條紋細銳值的非接觸 量測方式，即可方便且隼確地判斷滾珠螺桿5〇熱變位的情 形（其中光學解析度可準確至（i/2)；^3!6膽），因此可有效地 避免工具機因滾珠螺桿熱變位而影響操作的準確性。 【圖式簡單說明】 圖1係本創作組設 同9及丄 /衰珠螺桿上的立俨也 圖2係本創作組設於滚珠螺桿=硯示意圖。 圖3係本創作乎玻 °體外硯示意圖。 意圖 。 作/衰珠螺#熱m測裝s之監測操作示a mirror 22 and a movable angular coupling prism 23, wherein the first beam splitter: is connected to the light source of the light source group 1 ,, and the mirror 2 2 is disposed on the hand knife mirror 21 The side of the light source group 1 is smaller than the first mirror 21, and the angular coupling 23 is disposed on the nut flange 52 of the ball screw 50 and is opposite to the first beam splitter 21 Arranging a line and facing the mirror 22, wherein the corner prism 23 is partially plated with a reflective film 231 on a side facing the mirror 22; and the signal processing system 30 is configured to receive the light source The group of light sources are subjected to interference fringes generated by the interferometer 20 and are provided with a second beam splitter 31, a Position Sensitive Detector (PSD) 32 and a signal processor 33'. The second beam splitter 31 And receiving the interference fringes generated by the first beam splitter 21 of the interferometer 20 and dividing the two into two lights, and the two position detectors 32 respectively receive the two lights separated by the second beam splitter 31. More desirably, the phase difference between the two position detectors 32 is 9 degrees, thereby generating an orthogonal signal. The signal processor 33 processes the signal generated by the two position detectors 32 to confirm whether clear and fine interference fringes are obtained. Preferably, the signal processor 33 is connected to a computer (not shown). Perform signal analysis in the middle. When the creation is used, please refer to FIG. 3, in use, the light beam of the laser beam 11 is emitted from the end of the light source group 1 and passes through the first beam splitter 21 to shoot at 5 On the reflective film 231 of the corner light prism 23, the reflective film 231 is simultaneously reflected and transmitted, wherein the reflected light beam is directed to the first beam splitter 21, and is reflected by the first beam splitter 21 into the signal. Processing the second beam splitter 31 of the system 30, and the light beam penetrating the reflective film 231 is incident on the corner coupler 23, and is reflected by the angle coupler 23 at 18 degrees to the first The mirror 22 on the beam splitter 21 is reflected by the mirror 22 back to the corner coupler 23 and then re-reflected and transmitted through the reflective film 231, wherein the light beam transmitted through the reflective film 231 is directed toward the first The beam splitter 21 reflects and enters the second beam splitter 31 of the signal processing system 3, and the reflected beam is reflected by the angle coupler 23 at 8 degrees. On the mirror 2 2, such an infinite loop until the beam decays to a minimum value that the system does not affect, wherein the beam that is reflected by the first beam splitter 21 to the second beam splitter 31 will form an interference. Stripes, and an orthogonal signal is generated by the two-position detector 32 to be processed in the signal processor 33 to obtain a fine value of the interference fringe; wherein the ball screw 50 is actuated by a motor 53 The nut flange 52 located on the moving seat 54 of the ball screw 50 and the angular coupling prism 23' will move relative to the two beamsplitters 21' 31. At this time, when the ball screw 50 is displaced due to heat, The moving seat 54 of the ball screw 5 产生 is offset from the fixed seat 51, and the interference fringe of the interferometer 20 is blurred as the moving seat 54 is offset from the fixed seat 51. Therefore, the non-contact measurement method for analyzing the fine value of the interference fringe can be used to easily and accurately determine the thermal displacement of the ball screw 5 (where the optical resolution can be accurate to (i/2); ^3!6 gallbladder), so it can be effective Free tool due to thermal displacement of a ball screw affect the accuracy of operation. [Simple description of the diagram] Figure 1 is a set of the same set of 9 and 丄 / 珠 beads on the screw also Figure 2 is the creation of the team set on the ball screw = 砚 schematic. Fig. 3 is a schematic diagram of the invention. Intention. Operation / decline bead snail #热m measurement s monitoring operation
【主要元件符號說明】 1〇光源組 20干涉儀 22反射鏡 231反射膜 31第二分光鏡 33訊號處理器 51固定座 53 馬達 11氦氖雷射 21第一分光鏡 2 3角.耗棱鏡 30訊號處理系統 32位置檢測器 50滾珠螺桿 52螺帽法蘭 54移動座[Main component symbol description] 1 〇 light source group 20 interferometer 22 mirror 231 reflection film 31 second beam splitter 33 signal processor 51 fixed seat 53 motor 11 氦氖 laser 21 first beam splitter 2 3 angle. Signal Processing System 32 Position Detector 50 Ball Screw 52 Nut Flange 54 Moving Block