M439771 五、新型說明： 【新型所屬之技術領域】 /本創作係-種可連續式無塵室再生空氣遽淨裝置，其 係利用加熱方式’而使吸附單元脫附後再次利用 ，進而可 連續性遽淨無塵室中微量氣態分子污染物。 【先前技術】 P㈣半導體與光f精”歡快速演進，趨使無塵室 籲環境之潔淨度要求日趨嚴苛；對於製程環境的污染控制的 需求，焦點從微顆粒污染轉移至更小的氣相分子污染物 (Airborne Molecular Contamination，AMC)，在國際半導體 技術發展藍圖（International Technology Roadmap for Semiconductor, ITRS)中，便提到有關AMC於製程環境中 所造成的影響與製程缺陷。為大幅提昇產品良率，AMC的 控制技術與防治將成為元件良率與可靠度之關鍵。 目前無塵室中常見的氣態分子污染物的種類可分為酉曼 性（Acids)、驗性（Bases)、凝結物（Condensables)或換 雜物質（Dopants)四類，現今常見處理無塵室微量氣態分 子污染物方式，其係利用一具有化學濾網的處理裝置，化 學濾網係吸附氣態分子污染物，但隨著吸附時間的增加， 化學濾網會聚積相當程度之氣態分子污染物，化學濾網的 吸附能力或效率會隨著時間的增加，而急遽下降，直至& 學濾網無法吸附任何氣態分子污染物，此時則要停止該處 理裝置的運作，以更換新的化學濾網。 如上所述，現有的化學濾網仍有其缺點所在，其—為 3 M439771 化學濾網的吸附能力或效率會隨著時間的增加，而急遽下 降；另一為化學濾網的吸附容量有限，故需要常常更換， 而且耗時、耗工、耗費；又一為更換化學濾網時，處理裝 置要停止運轉，其會無形中降低整體無塵室的使用狀態與 效率。 【新型内容】 有鑑於上述之缺點，本創作之目的在於提供一種可連 續式無塵室再生空氣濾淨裝置，其係利用加熱再生的方法 與裝置，而使吸附單元得以重複使用，提高空氣濾淨系統 之去除效能與系統使用年限。 為了達到上述之目的，本創作之技術手段在於提供一 種可連續式無塵室再生空氣濾淨裝置，其包含有： 一可轉動之吸附單元； 一再生加熱單元，其係設於該吸附單元的一側；以及 一排氣單元，其係設於該吸附單元的另一側，並且相 對於該再生加熱單元。 本創作復提供一種可連續式無塵室再生空氣濾淨裝 置，其包含有： 多個吸附單元； 多個再生加熱單元，各再生加熱單元係_接各吸附單 元； 一送氣單元，其係耦接各吸附單元； 多個送氣閥，各送氣閥係分別設於各吸附單元與送氣 單元之間； M439771 一第一排氣單元，其係耦接各吸附單元； 多個第一排氣閥，各第一排氣閥係設於該第一排氣單 元與各吸附單元之間；以及 多個第二排氣閥，各第二排氣閥係耦接各吸附單元。 本創作復提供一種可連續式無塵室再生空氣濾淨裝 置，其包含有： 一轉動單元； 多個吸附單元，其係設於該轉動單元中； • 一再生加熱單元，其係耦接該轉動單元，並且相對於 其一吸附單元； 一第一排氣單元係耦接該轉動單元，並且相對於該再 生加熱單元；以及 一送氣單元，其係耦接該轉動單元，並且相對於其一 吸附單元。 綜合上述，送氣單元能夠將一無塵室中之氣態分子污 染物提供給吸附單元，當吸附單元吸附至相當程度後，再 • 生加熱單元對吸附單元進行加熱脫附再生，以使吸附單元 所吸附的氣態分子污染物脫離吸附單元，而使吸附單元得 以再次重覆進行吸附，進而可延長吸附單元使用年限與壽 命，同時維持吸附濾除效率於高效率狀態。 【實施方式】 以下係藉由特定的具體實施例說明本創作之實施方 式，所屬技術領域中具有通常知識者可由本說明書所揭示 之内容，輕易地暸解本創作之其他優點與功效。 5 M439771 請配合參考圖丨所示，本創作係—種無塵室再生空氣 濾淨ΐ置之第一實施例，其包含有-吸附單元1〇、-再生 加熱單元11與一抽氣單元12。 吸附單το 10為一轉輪’轉輪係為活性碳或活性碳纖維 口。所製成’吸附單元1G係被—驅動單元所驅動，以使吸附 單元10能_動，驅動單元能夠為—馬達…驅動皮帶、 一變速齒輪箱或一變頻馬達。 印再生加熱單元11係設於吸附單元1〇的一側，再生加 熱單兀11能夠為高週波加熱裝置、微波加熱裝置或紅外線 力…、裝置％附單元1〇面對再生加熱單元丨丨的區域係形 成:再生加熱區’吸附單元1G進—步具有—冷卻區，冷卻 區係相鄰於再生加熱區，吸附單元10除去再生加熱區與冷 卻區之區域係為吸附區1 〇〇。 排氣單元12係設於吸附單元10#另一側，並且相對 於再生加熱單元11，排氣單元12能夠為一抽風機。 送氣單元將無塵t之氣態分子^^物之廢氣提 供給吸附單元10，吸附單元1Q的吸附區⑽係吸附氣態 分子污染物，經過吸附的氣體則回到無塵室中。 再生加熱單元11對吸附單元1G之再生加熱區進行加 熱，以使氣態分子污染物脫離吸附單元10，排氣單元12 則將脫離之氣態分子污㈣排離㈣單元1G，如上所述， 氣態分子污染物則可送入焚化爐t燃燒或直接排放至外部 空氣中，而後吸附單元1(M系轉動，先前被加熱之再生加敎 區則形成冷卻區，而制單元1G轉動至對應再生加熱單元 11之區域卿成再生加熱區，而單A 1G轉動時， M439771 前述之冷卻區則成為吸附區100，故當吸附單元10轉動 時，吸附單元10能夠依序形成吸附區100、再生加熱區與 冷卻區。 請配合參考圖2所示，本創作之無塵室再生空氣滤淨 裝置之第二實施例，其包含有多個吸附單元20、多個再生 加熱單元21、一送氣單元22、一第一排氣單元23、一第 二排氣單元24、多個送氣閥25、多個第一排氣閥26與多 個第二排氣閥27。 # 各再生加熱單元21係耦接各吸附單元20，再生加熱 單元21與吸附單元20如第一實施例所述。 送氣單元22與第一排氣單元23係分別耦接各吸附單 元20,送氣閥25係分別設於各吸附單元20與送氣單元22 之間，第一排氣閥26係設於第一排氣單元23與各吸附單 元20之間，送氣單元22能夠為一送風機。 第二排氣單元24係為一選擇性構件，第二排氣單元 24係耦接各吸附單元20，第二排氣閥27設於第二排氣單 • 元24與各吸附單元20之間。 當為多個吸附單元20時，可將吸附單元20區分為吸 附中或再生中，假如為吸附中之吸附單元20，則對應該吸 附單元20之送氣閥25與第二排氣閥27為開啟，對應該吸 附單元20之第一排氣閥26為關閉，送氣單元22將無塵室 之具有氣態分子污染物之廢氣提供給吸附中之吸附單元 20，以使吸附單元20吸附氣態分子污染物，第二排氣單元 24將經過吸附的氣體送回至無塵室中，而對應再生中之吸 附單元20的送氣閥25與第二排氣闊27為關閉。 7 M439771 對應再生之吸附單元20的第一排氣閥26為開啟，再 生加熱單元21則加熱吸附單元20，以使氣態分子污染物 脫離吸附單元20，第一排氣單元23係將脫離之氣態分子 污染物排離吸附單元20，綜合前述，藉由第一排氣閥26、 送氣閥25與第二排氣閥27的開啟或關閉，以決定何者吸 附單元20為再生中或吸附中，而經過再生加熱之吸附單元 20則可再次使用。 請配合參考圖3所示，本創作之無塵室再生空氣濾淨 裝置之第三實施例，其包含有一轉動單元30、多個吸附單 元31、一再生加熱單元32、一第一排氣單元、一送氣單元 與一第二排氣單元。 吸附單元31係設於轉動單元30中，轉動單元30能夠 為一可轉動之框架，而轉動單元30能夠轉動係透夠一驅動 單元的驅動而轉動，再生加熱單元32係耦接轉動單元30， 並且相對於其一吸附單元31。 第一排氣單元係耦接轉動單元30，並且相對於再生加 熱單元32。 送氣單元係耦接轉動單元30，並且相對於其一吸附單 元3卜 第二排氣單元係為一選擇性構件，第二排氣單元係耦 接轉動單元30，並且相對於送氣單元。 送氣單元係將將無塵室之具有氣態分子污染物之廢氣 提供給吸附單元31，以使吸附單元31吸附氣態分子污染 物，第二排氣單元將經過吸附的氣體送回至無塵室中。 對應再生加熱單元30之吸附單元31，則被再生加熱M439771 V. New description: [New technical field] / This creative department - a continuous clean room regeneration air purification device, which uses the heating method to desorb the adsorption unit and reuse it, and then continuously A trace of gaseous molecular pollutants in a clean room. [Prior Art] P (four) semiconductor and light f fine "fast evolution", the cleanliness of the clean room environment is becoming more and more demanding; for the pollution control needs of the process environment, the focus shifts from microparticle pollution to less gas Airborne Molecular Contamination (AMC), in the International Technology Roadmap for Semiconductor (ITRS), mentions the impact and process defects of AMC in the process environment. Yield, AMC control technology and prevention will become the key to component yield and reliability. Currently, the types of gaseous molecular pollutants commonly found in clean rooms can be classified into Acids, Bases, and Condensation. Condensables or Dopants, which are commonly used to treat trace gaseous gaseous pollutants in clean rooms. They use a chemical filtration device that absorbs gaseous molecular pollutants, but As the adsorption time increases, the chemical filter will accumulate a considerable amount of gaseous molecular pollutants, which are adsorbed by chemical filters. The force or efficiency will increase sharply with time, until the & filter can not absorb any gaseous molecular pollutants, then stop the operation of the treatment device to replace the new chemical filter. The existing chemical filter still has its shortcomings. The adsorption capacity or efficiency of the 3 M439771 chemical filter will decrease sharply with time. The other is that the adsorption capacity of the chemical filter is limited, so it is often necessary. Replacement, and time-consuming, labor-intensive, and expensive; another, in order to replace the chemical filter, the processing device should stop running, which will invisibly reduce the use state and efficiency of the overall clean room. [New content] In view of the above shortcomings The purpose of the present invention is to provide a continuous clean room regeneration air filtering device which utilizes a heating regeneration method and device to re-use the adsorption unit to improve the removal efficiency and system life of the air filtration system. In order to achieve the above objectives, the technical means of the present invention is to provide a continuous clean room regeneration air filtering device, which comprises The invention comprises: a rotatable adsorption unit; a regenerative heating unit disposed on one side of the adsorption unit; and an exhaust unit disposed on the other side of the adsorption unit and opposite to the regenerative heating unit The present invention provides a continuous clean room regeneration air filtering device comprising: a plurality of adsorption units; a plurality of regenerative heating units, each regenerative heating unit being connected to each adsorption unit; and a gas supply unit Coupling each adsorption unit; a plurality of air supply valves, each of which is disposed between each adsorption unit and the air supply unit; M439771 a first exhaust unit coupled to each adsorption unit; a plurality of first exhaust valves Each of the first exhaust valves is disposed between the first exhaust unit and each of the adsorption units; and a plurality of second exhaust valves, each of the second exhaust valves being coupled to each of the adsorption units. The present invention provides a continuous clean room regeneration air filtering device, comprising: a rotating unit; a plurality of adsorption units disposed in the rotating unit; • a regenerative heating unit coupled to the Rotating unit, and relative to one of the adsorption units; a first exhaust unit coupled to the rotating unit, and relative to the regenerative heating unit; and a gas supply unit coupled to the rotating unit, and relative to the first Adsorption unit. In summary, the air supply unit can supply the gaseous molecular pollutants in the clean room to the adsorption unit. After the adsorption unit is adsorbed to a certain extent, the heating unit reheats and desorbs the adsorption unit to make the adsorption unit The adsorbed gaseous molecular pollutants are separated from the adsorption unit, so that the adsorption unit can be repeatedly re-adsorbed, thereby prolonging the service life and life of the adsorption unit while maintaining the adsorption filtration efficiency in a high efficiency state. [Embodiment] The following describes the implementation of the present invention by a specific embodiment, and those skilled in the art can easily understand other advantages and effects of the present invention by the contents disclosed in the present specification. 5 M439771 Please refer to the reference figure ,, the first embodiment of the clean room regeneration air filter device, which comprises an adsorption unit 1〇, a regeneration heating unit 11 and a pumping unit 12 . The adsorption single το 10 is a rotary wheel. The reel is an activated carbon or activated carbon fiber port. The resulting adsorption unit 1G is driven by a drive unit to enable the adsorption unit 10 to be actuated, and the drive unit can be a motor, a drive belt, a shifting gearbox or a variable frequency motor. The printing and regenerating heating unit 11 is disposed on one side of the adsorption unit 1〇, and the regenerative heating unit 11 can be a high-frequency heating device, a microwave heating device or an infrared force..., the device is attached to the unit 1〇 facing the regenerative heating unit丨丨The zone system is formed: the regeneration heating zone 'adsorption unit 1G has a cooling zone adjacent to the regeneration heating zone, and the adsorption zone 10 removes the zone of the regeneration heating zone and the cooling zone as the adsorption zone 1 〇〇. The exhaust unit 12 is provided on the other side of the adsorption unit 10#, and with respect to the regenerative heating unit 11, the exhaust unit 12 can be an exhaust fan. The air supply unit supplies the exhaust gas of the gaseous substance of the dust-free t to the adsorption unit 10, and the adsorption zone (10) of the adsorption unit 1Q adsorbs gaseous molecular pollutants, and the adsorbed gas returns to the clean room. The regenerative heating unit 11 heats the regenerative heating zone of the adsorption unit 1G to desorb the gaseous molecular contaminants from the adsorption unit 10, and the exhaust unit 12 removes the gaseous molecular contamination (4) from the (4) unit 1G, as described above, the gaseous molecules The pollutants can be sent to the incinerator for combustion or directly discharged to the outside air, and then the adsorption unit 1 (the M system rotates, the previously heated regeneration zone forms a cooling zone, and the unit 1G rotates to the corresponding regeneration heating unit). The region of 11 is a regenerative heating zone, and when the single A 1G rotates, the aforementioned cooling zone of M439771 becomes the adsorption zone 100, so when the adsorption unit 10 rotates, the adsorption unit 10 can sequentially form the adsorption zone 100, the regeneration heating zone and Cooling zone. Referring to FIG. 2, a second embodiment of the clean room regeneration air filtering device of the present invention comprises a plurality of adsorption units 20, a plurality of regeneration heating units 21, an air supply unit 22, and a cooling unit. The first exhaust unit 23, the second exhaust unit 24, the plurality of air supply valves 25, the plurality of first exhaust valves 26, and the plurality of second exhaust valves 27. Each of the regenerative heating units 21 is coupled to each of the adsorbents single The regenerative heating unit 21 and the adsorption unit 20 are as described in the first embodiment. The air supply unit 22 and the first exhaust unit 23 are respectively coupled to the adsorption units 20, and the air supply valves 25 are respectively disposed in the adsorption units 20 and Between the air supply units 22, the first exhaust valve 26 is disposed between the first exhaust unit 23 and each of the adsorption units 20, and the air supply unit 22 can be a blower. The second exhaust unit 24 is an optional member. The second exhaust unit 24 is coupled to each of the adsorption units 20, and the second exhaust valve 27 is disposed between the second exhaust unit and the adsorption unit 20. When the plurality of adsorption units 20 are used, the adsorption can be performed. The unit 20 is divided into adsorption or regeneration. If it is the adsorption unit 20 in the adsorption, the air supply valve 25 and the second exhaust valve 27 corresponding to the adsorption unit 20 are opened, and the first exhaust valve corresponding to the adsorption unit 20 is corresponding. 26 is closed, the air supply unit 22 supplies the exhaust gas having the gaseous molecular pollutants in the clean room to the adsorption unit 20 in the adsorption, so that the adsorption unit 20 adsorbs the gaseous molecular pollutants, and the second exhaust unit 24 passes the adsorbed gas. Returned to the clean room, corresponding to the regeneration The air supply valve 25 and the second exhaust air width 27 of the adsorption unit 20 are closed. 7 M439771 The first exhaust valve 26 corresponding to the regenerated adsorption unit 20 is turned on, and the regenerative heating unit 21 heats the adsorption unit 20 to make the gaseous molecules The pollutants are separated from the adsorption unit 20, and the first exhaust unit 23 discharges the detached gaseous molecular pollutants from the adsorption unit 20, which is integrated by the first exhaust valve 26, the air supply valve 25 and the second exhaust valve 27. Turning on or off to determine which adsorption unit 20 is in regeneration or adsorption, and the regenerative heating unit 20 can be reused. Referring to FIG. 3, the clean room regeneration air filter device of the present invention is used. The third embodiment comprises a rotating unit 30, a plurality of adsorption units 31, a regenerative heating unit 32, a first exhaust unit, a gas supply unit and a second exhaust unit. The adsorption unit 31 is disposed in the rotating unit 30. The rotating unit 30 can be a rotatable frame, and the rotating unit 30 can rotate and drive through the driving of a driving unit. The regenerative heating unit 32 is coupled to the rotating unit 30. And relative to one of the adsorption units 31. The first exhaust unit is coupled to the rotating unit 30 and is opposite to the regenerative heating unit 32. The air supply unit is coupled to the rotating unit 30 and is a selective member with respect to one of the adsorption units 3, and the second exhaust unit is coupled to the rotating unit 30 and is opposite to the air supply unit. The air supply unit supplies the exhaust gas having the gaseous molecular pollutants in the clean room to the adsorption unit 31, so that the adsorption unit 31 adsorbs the gaseous molecular pollutants, and the second exhaust unit returns the adsorbed gas to the clean room. . Corresponding to the adsorption unit 31 of the regenerative heating unit 30, it is regenerated and heated.