M430477 五、新型說明： 【新型所屬之技術領域】 本創作是有關於一種氣體喷灑頭，且特別是有關於一 種可以噴灑兩種以上氣體，且能達到均勻混合效果的氣體 噴灑頭。 【先前技術】 隨著鍍膜製程的發展，在化學氣相沈積的反應過程 中’如何將氣體均勻地噴灑到腔室中便成為重要的問題。 對此’氣體分佈模組（gas distribution module)，特別是 氣體噴灑頭（gas showerhead)扮演了重要的角色。 針對氣體分佈模組或氣體喷灑頭的設計與結構，已經 有數種專利提出。美國專利US 7138336 B2與美國專利US 7641939 B2採用喷灑頭進氣、腔室側邊抽氣的方式控制氣 體進出。美國專利US 6921437揭露一種可預先混合先驅 氣體的氣體分佈模組，但不適用於先驅氣體不可預先混合 的製程。美國專利US 6478872揭露一種將氣體輸送至腔 至的方法，以及用於輸送氣體的噴灑頭。然而該設計的構 造複雜，且製造成本昂貴。 【新型内容】 本創作提供一種氣體噴灑頭，可以喷灑兩種以上氣 體’且達到均勻混合的效果。 本創作提出一種氣體喷灑頭，包括一喷灑頭主體，其 3 M430477 $徵在於：噴灑頭主體具有氣體作用表面與位於氣體作用 的多個進氣孔，其中各進氣孔包括第—進氣道與開 。又於弟—進氣道周圍的至少一第二進氣道，且 的進氣面積與第二進氣道的進氣面積之比例在^5〜 1^.5之間。在進氣孔的進氣方向上，第—進氣道的長度比 弟一進氣道的長度多 0.5 mm〜1.5 mm。 f本創作之—實施例中，上述之第—進氣道的進氣面 積例如在1.8 1111112〜2.1„1„12之間。 在本創作之一實施例中，上述之第二進氣道的進氣面 積例如在3.6 mm2〜4.2 mm2之間。 在本創作之一實施例中，上述之第二進氣道之進氣方 向例如與第—進氣道之進氣方向平行。 在本創作之一實施例中，上述之第二進氣道之進氣方 向與第一進氣道之進氣方向例如成一夾角。 在本創作之一實施例中，上述之進氣孔還包括錐形開 口 ’與第一進氣道以及第二進氣道相連通。 7幵 在本創作之一實施例中，上述之第一進氣道與噴灑 主體例如為一體成型。 在本創作之一實施例中，上述之第一進氣道例如是 用螺接或緊密配合的方式連接於噴灑頭主體上。 在本創作之一實施例中，氣體噴灑頭更包括位於氣體 作用表面的中心位置的中央排氣口。 在本創作之一實施例中，上述之中央排氣口例如θ 多個排氣孔所構成。 疋由 M430477 在本創作之一實施例中，上述之中央排氣口之排氣面 積與進氣孔之總進氣面積的比例例如為0 03〜0.04。 在本創作之一實施例中，上述之中央棑氣口之排氣面 積與進氣孔之總進氣面積的比例例如小於〇 Q3。 在本創作之一實施例中，上述之噴灑頭主體更包括至 少一環狀排氣口，環狀排氣口例如是以中央排氣口為中 心，呈同心圓狀配置。 在本創作之一實施例中，上述之環狀排氣口包括由多 個排氣孔所構成。 ^ 基於上述，本創作的氣體噴灑頭由於其第一進氣道與 第一進氣道具有優化的進氣面積比例，在喷灑氣體時，能 使其均勻地混合。 為讓本創作之上述特徵能更明顯易懂，下文特舉實施 例’並配合所附圖式作詳細說明如下。 【實施方式】 圖jA疋依照本創作第一實施例所綠示的氣體喷灑頭 的示意圖。圖1B是依照本創作第-實施例所繪示的 風體喷擺顯正視圖。圖丨以圖1B的進氣孔的局部放大 圖。=1〇是沿著圖iC的線所繪示的剖面圖。 ⑽H轉照圖1A與圖1B’第—實_的氣體喷灑頭 二2麗頭主體1〇2。喷灑頭主體1〇2具有氣體作用表 面枝/、位於氣體作用表面1〇4上的多個進氣孔1〇6。 請參照® 1C，各進氣孔106包括第—進氣道魏與 5 M430477 環繞開設於第一進氣道l〇6a周圍的環狀第二進氣道 106b。在本實施例中，第一進氣道i〇6a的進氣面積與第二 進氣道106b的進氣面積之比例在1:1.5〆1:2·5之間。在進 氣孔的進氣方向上，第一進氣道的長度比第二進氣道的長 度多0.5 mm〜1.5 mm。第一進氣道1〇釦的進氣面積例如 可在1.8 mm2〜 2.1mm2之間，而第二進氟道106b的面積例 如可在3.6 mm〜4.2 mm2之間。 請參照圖1D，在第一實施例中，第〆進氣道10以的 進氣方向與第二進氣道l〇6b的進氣方勿彡相平行。 圖2A是依照本創作第二實施例所繪示的進氣孔正視 圖。圖2B是沿著圖2A的C-C連線所繪米的剖面圖。請 一併參照圖2A與圖2B。在第二實施例中，進氣孔20〇包 括第一進氣道20〇a與環繞第一進氣道2〇〇a開設的六個第 二進氣道200b，然而，本創作並不以此為限，還可依照貫 際尺寸設計更少或更多個第二進氣道。另外，在圖2B中， 第二進氣道200b的進氣方向與第一進氣道200a的進氣方 向成一夾角Θ。 圖3A與圖3B分別是依照本創作第三實施例繪示的兩 種進氣孔之剖面圖。 請先參照圖3A，進氣孔30〇具有第〆進氣道300a、 開設於第一進氣道3〇〇a周圍的第二進氣道300b ’以及錐 形開口 300c。錐形開口 3〇〇c與第一進氣道300a與第一進 氣道300b相連通。 然後請參照圖3B，本圖與圖3A相似，不同者在於， 6 M430477 第一進氣道300a的進氣方向與第二進氣道3〇〇b的進氣方 向成一夾角Θ。在此需指出，進氣道3〇〇b的進氣面積是如 圖3A與圖3B所示的A。 圖4是依照本創作第四實施例所繪示的氣體喷灑頭的 正視圖。請參照圖4。在第四實施例中，氣體喷灑頭400 具有喷灑頭主體402。喷灑頭主體402包括氣體作用表面 404以及位於其上的多個進氣孔4〇6。進氣孔4〇6例如與第 一實施例的進氣孔106相同。在第四實施例中，氣體喷灑 頭400還包括位於氣體作用表面404之中心位置的中央排 氣口 408。中央排氣口 408包括多個排氣孔408a。在本實 施例中，中央排氣口 408的排氣面積與進氣孔4〇6的總進 氣面積的比例為0.03〜〇.〇4。 圖5疋依照本創作第五實施例所繪示的氣體喷灑頭的 正視圖。請參照圖5。在第五實施例的氣體噴灑頭5〇〇中， 噴灑頭主體502、氣體作用表面5〇4、進氣孔5〇6與中央排 氣口 508與第五實施例相似。所不同者在於，在第.五實施 例中，中央排氣口 508的排氣面積與進氣孔5〇6的總進氣 面積的比例小於0.03。為了平衡排氣與進氣，在本實施例 中，於氣體作用表面504上再設置環狀排氣口 51〇。環狀 排氣口 5H)包括多個排氣孔她，且是以中央排氣口姻 為中心，呈同心圓狀配置。 …本創作的氣體噴灑頭還可參考中華民國專利公開號 第2〇1111545遗(專利名稱:氣體分佈板及其裝置)所揭露之 氣體分佈板以及中華民國專利中請號第_27734號所揭 7 M430477 露之氣體噴灑頭的部份特徵，在此將前述兩案以引用的方 ，併入本文之中’以供參考。例如，在本創作中，第一進 氣道可與0M·灑頭主體一體成形。另外，第一進氣道例如也 可以=接或緊密配合的方式連接於噴灌頭主體。在本創作 的，貝施例中，氣體噴麗頭還可包括至少一流量計（未繪 不用以控制令央排氣口及，或環狀排氣口的排氣量。 植^上f述，本創作的氣體嘴灑頭包括第-進氣道與環 的第二進氣道，兩進氣道可供應不同氣 ==制第—進氣道的進氣面積與第二進氣道 二率與擴r 頭還可包括錐形開口=；；=。本創作的氣體喷灑 合，再自進氣孔喷出，=而*门=錐形開口中先行混 創作的氣體喷灑頭還可的，合。另外，t 由同時進行排氣與進氣，使借^口及壤狀排氣口’藉 的氣體濃度更趨向一致且=體嗔灑頭的製程腔室内 產物先行抽離，提昇製程良率還可將製程反應中產生的副 本創作，任何所屬技然其並非用以限定 本創作之精神和範圍内，杏可&此k吊知識者，在不脫離 創作之保護範圍當視後附^請專準故本 【圖式簡單說明】 的立Hi依&本創作第一實施例所綠示的氣體嗔灌頭 M430477 圖1B是依照本創作第一實施例所繪示的氣體喷灑頭 的正視圖。 圖1C是圖1B的氣體喷灑頭的進氣孔局部放大圖。 圖1D是沿著圖1C的BB線的剖面圖。 圖2A是依照本創作第二實施例所繪示的進氣孔的正 視圖。 圖2B是沿著圖2A的C-C連線的剖面圖。 圖3A是依照本創作第三實施例所繪示的一種進氣孔 的剖面圖。 圖3B是依照本創作第三實施例所繪示的另一種進氣 孔的剖面圖。 圖4是依照本創作第四實施例所繪示的氣體喷灑頭的 正視圖。 圖5是依照本創作第五實施例所繪示的氣體喷灑頭的 正視圖。 【主要元件符號說明】 100、400、500 :氣體喷灑頭 102、402、502 :喷灑頭主體 1〇4、404、504 :氣體作用表面 106、200、300、406、506 :進氣孔 106a、200a、300a :第一進氣道 106b、200b、300b :第二進氣道 300c :錐形開口 9 M430477 408、508 :中央排氣口 408a、510a ··排氣孔 510 :環狀排氣口M430477 V. New description: [New technical field] This creation is about a gas sprinkler head, and in particular, it relates to a gas sprinkler that can spray two or more gases and achieve uniform mixing effect. [Prior Art] As the coating process progresses, how to uniformly spray a gas into a chamber during a chemical vapor deposition reaction becomes an important problem. This has played an important role in the gas distribution module, especially the gas showerhead. Several patents have been proposed for the design and construction of gas distribution modules or gas sprinklers. U.S. Patent No. 7,138,336 B2 and U.S. Patent No. 7,641,939 B2 use a sprinkler head intake and chamber side suction to control gas ingress and egress. U.S. Patent No. 6,921, 437 discloses a gas distribution module which is capable of premixing a precursor gas, but is not applicable to a process in which the precursor gas is not premixed. U.S. Patent No. 6,478,872 discloses a method of delivering a gas to a chamber, and a showerhead for delivering a gas. However, the design of the design is complicated and expensive to manufacture. [New content] This creation provides a gas sprinkler that can spray two or more gases' and achieve uniform mixing. The present invention proposes a gas sprinkler head comprising a sprinkler head body, the 3 M430477$ sign: the sprinkler head body has a gas-acting surface and a plurality of air inlet holes located in the gas, wherein each of the air intake holes includes a first-inlet Airway and opening. And at least one second intake port around the intake port, and the ratio of the intake area to the intake area of the second intake port is between ^5 and 1^.5. In the intake direction of the intake port, the length of the first intake port is 0.5 mm to 1.5 mm longer than the length of the intake port. In the present embodiment, the intake area of the first inlet port is, for example, between 1.8 1111112 and 2.1 „1 „12. In an embodiment of the present invention, the intake area of the second intake passage is, for example, between 3.6 mm 2 and 4.2 mm 2 . In an embodiment of the present invention, the intake direction of the second intake passage is parallel, for example, to the intake direction of the first intake passage. In an embodiment of the present invention, the intake direction of the second intake passage is at an angle to the intake direction of the first intake passage, for example. In one embodiment of the present invention, the air intake aperture further includes a tapered opening ' in communication with the first air inlet and the second air intake. In one embodiment of the present invention, the first inlet passage and the spray body are integrally formed, for example. In one embodiment of the present invention, the first inlet port is coupled to the showerhead body, for example, by screwing or mating. In one embodiment of the present invention, the gas showerhead further includes a central exhaust port located at a central location of the gas active surface. In one embodiment of the present invention, the central exhaust port described above is formed, for example, by a plurality of vent holes. M M430477 In an embodiment of the present invention, the ratio of the exhaust area of the central exhaust port to the total intake area of the intake port is, for example, 0 03 to 0.04. In one embodiment of the present invention, the ratio of the exhaust area of the central helium port to the total intake area of the intake port is, for example, less than 〇 Q3. In an embodiment of the present invention, the sprinkler head body further includes at least one annular exhaust port, and the annular exhaust port is disposed concentrically, for example, centering on the central exhaust port. In an embodiment of the present invention, the annular exhaust port includes a plurality of exhaust holes. ^ Based on the above, the gas sprinkler of the present invention has an optimum ratio of the intake air area due to its first intake port and the first intake port, and can uniformly mix the gas when it is sprayed. In order to make the above-described features of the present invention more comprehensible, the following detailed description is made in conjunction with the accompanying drawings. [Embodiment] Fig. jA is a schematic view of a gas shower head shown in green in accordance with a first embodiment of the present invention. Fig. 1B is a front elevational view of the wind body according to the first embodiment of the present invention. Fig. 1 is a partial enlarged view of the intake hole of Fig. 1B. =1 is a cross-sectional view taken along the line of Figure iC. (10) H is transferred to the gas sprinkler head of Fig. 1A and Fig. 1B'. The sprinkler head body 1〇2 has a gas-acting surface branch/, and a plurality of intake holes 1〇6 on the gas-acting surface 1〇4. Referring to ® 1C, each of the intake holes 106 includes a first intake port and a 5 M430477 surrounding an annular second intake port 106b formed around the first intake port 16a. In the present embodiment, the ratio of the intake area of the first intake port i〇6a to the intake area of the second intake passage 106b is between 1:1.5〆1:2·5. In the intake direction of the intake hole, the length of the first intake passage is 0.5 mm to 1.5 mm longer than the length of the second intake passage. The intake area of the first intake passage 1 may be, for example, between 1.8 mm 2 and 2.1 mm 2 , and the area of the second intake passage 106 b may be between 3.6 mm and 4.2 mm 2 , for example. Referring to Fig. 1D, in the first embodiment, the intake direction of the second intake port 10 is parallel to the intake side of the second intake port 16b. Fig. 2A is a front elevational view of the intake port in accordance with a second embodiment of the present invention. Fig. 2B is a cross-sectional view taken along line C-C of Fig. 2A. Please refer to FIG. 2A and FIG. 2B together. In the second embodiment, the intake port 20〇 includes a first intake port 20〇a and six second intake ports 200b that surround the first intake port 2〇〇a. However, this creation does not To this end, fewer or more second intake ports can be designed in accordance with the continuous dimensions. Further, in Fig. 2B, the intake direction of the second intake passage 200b is at an angle Θ to the intake direction of the first intake passage 200a. 3A and 3B are cross-sectional views of two intake holes, respectively, according to a third embodiment of the present invention. Referring first to Fig. 3A, the intake port 30A has a third intake port 300a, a second intake port 300b' which is formed around the first intake port 3A, and a tapered opening 300c. The tapered opening 3〇〇c communicates with the first intake passage 300a and the first intake passage 300b. Referring to Fig. 3B, the figure is similar to Fig. 3A except that the intake direction of the 6 M430477 first intake passage 300a is at an angle Θ to the intake direction of the second intake passage 3〇〇b. It is to be noted here that the intake area of the intake port 3〇〇b is A as shown in Figs. 3A and 3B. Figure 4 is a front elevational view of a gas showerhead in accordance with a fourth embodiment of the present invention. Please refer to Figure 4. In the fourth embodiment, the gas shower head 400 has a showerhead main body 402. The sprinkler head body 402 includes a gas-acting surface 404 and a plurality of intake holes 4〇6 located thereon. The intake holes 4〇6 are, for example, the same as the intake holes 106 of the first embodiment. In the fourth embodiment, the gas spray head 400 further includes a central exhaust port 408 located at a central location of the gas acting surface 404. The central exhaust port 408 includes a plurality of exhaust holes 408a. In the present embodiment, the ratio of the exhaust area of the central exhaust port 408 to the total intake area of the intake port 4〇6 is 0.03 to 〇.〇4. Figure 5 is a front elevational view of a gas showerhead in accordance with a fifth embodiment of the present invention. Please refer to Figure 5. In the gas shower head 5 of the fifth embodiment, the shower head main body 502, the gas acting surface 5〇4, the air intake opening 5〇6 and the central air discharge port 508 are similar to the fifth embodiment. The difference is that in the fifth embodiment, the ratio of the exhaust area of the central exhaust port 508 to the total intake area of the intake port 5〇6 is less than 0.03. In order to balance the exhaust gas and the intake air, in the present embodiment, an annular exhaust port 51 is provided on the gas acting surface 504. The annular exhaust port 5H) includes a plurality of exhaust holes, and is arranged concentrically around the central exhaust port. ... The gas sprinkler head of this creation can also be referred to the gas distribution plate disclosed in the Republic of China Patent Publication No. 2111115 (patent name: gas distribution plate and its device) and the Republic of China Patent No. _27734 </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; For example, in the present creation, the first air inlet can be integrally formed with the 0M sprinkler body. Alternatively, the first intake passage may be connected to the sprinkler head body, for example, in abutting or tight fitting manner. In the present invention, the gas spray head may further include at least one flow meter (not depicted to control the exhaust port of the central exhaust port or the annular exhaust port). The gas nozzle sprinkler of the present invention includes a second inlet port of the first inlet port and the ring, and the two inlet ports can supply different gas== system-intake area of the intake port and the second inlet port 2 The rate and the expanded head may also include a tapered opening=;;=. The gas spray of the present creation is sprayed from the air inlet hole, and the gas sprinkler head of the first mixing of the *gate=conical opening is also In addition, t is carried out by exhausting and inhaling at the same time, so that the gas concentration borrowed by the borrowing port and the ground exhaust port is more uniform and the product in the process chamber is first drawn away. Enhancing the process yield can also create a copy of the process response, any of which is not intended to limit the spirit and scope of the creation, apricot can not be separated from the scope of creation protection Please refer to the attached post ^Please refer to the original book [Simple Description of the Drawings] Li Hi & The gas shown in the green of the first embodiment of this creation Head M430477 Figure 1B is a front elevational view of the gas sprinkler head in accordance with the first embodiment of the present invention. Figure 1C is a partial enlarged view of the gas inlet port of the gas sprinkler head of Figure 1B. Figure 1D is a cross-sectional view of the gas sprinkler head of Figure 1B. Figure 2A is a front elevational view of the intake port in accordance with the second embodiment of the present invention. Figure 2B is a cross-sectional view taken along line CC of Figure 2A. Figure 3A is a third view in accordance with the present invention. FIG. 3B is a cross-sectional view of another air intake hole according to a third embodiment of the present invention. FIG. 4 is a cross-sectional view of a fourth embodiment of the present invention. Figure 5 is a front elevational view of a gas sprinkler head according to a fifth embodiment of the present invention. [Main component symbol description] 100, 400, 500: gas sprinkler heads 102, 402 502: sprinkler head body 1〇4, 404, 504: gas acting surfaces 106, 200, 300, 406, 506: air intake holes 106a, 200a, 300a: first air inlet passages 106b, 200b, 300b: second Intake port 300c: tapered opening 9 M430477 408, 508: central exhaust port 408a, 510a · · exhaust hole 510: annular exhaust