Claims (1)
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κ 1( 六、申請專利範圍: L種發光二極體基板,包括一藍寶石基板,其特徵 在於: 5亥監實石基板包括由多個無轉折六角錐體所構成的一 表面,且該些無轉折六角錐體的週期(pitch)小於ίο μπι, 其中各5亥無轉折六角錐體的對稱剖面具有一第一底角以及κ 1 (6) Patent application scope: L kinds of light-emitting diode substrates, including a sapphire substrate, characterized in that: 5 监 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实The pitch of the non-turning hexagonal cone is smaller than ίο μπι, wherein the symmetric cross section of each of the 5 nautical non-turning hexagonal cones has a first base angle and
一第二底角’該第二底角大於該第-底角,且該第二底角 的角度在50度至7〇度之間。 2. 如申請專利範圍第1項所述之發光二極體基板,其 中該些無轉折六角錐體的週期在〇 1μιη〜3μιη之間。 3. 如申請專利範圍第1項所述之發光二極體基板,其 中該些無轉折六角錐體的最大高度為Ιμιη〜2μιη之間。 4·如申請專利範圍第3項所述之發光二極體基板,其 中該些無轉折六角錐體的最大高度為丨5μπι〜2μιη之間。A second base angle 'the second base angle is greater than the first base angle, and the second base angle is between 50 degrees and 7 degrees. 2. The light-emitting diode substrate according to claim 1, wherein the period of the non-turning hexagonal pyramid is between 〇1 μm and 3 μmη. 3. The light-emitting diode substrate according to claim 1, wherein the maximum height of the non-turning hexagonal cones is between Ιμηη and 2μιη. 4. The light-emitting diode substrate according to claim 3, wherein the maximum height of the non-turning hexagonal cones is between μ5 μm and 2 μmη.
5. 如申請專利範圍第丨項所述之發光二極體基板,其 中各該無轉折六角錐體的頂部為平面或尖端。 6. 如申請專利範圍第1項所述之發光二極體基板,其 中該表面包括(0001)面,且該(〇〇〇1)面佔該表面之投影面積 的10%~60%之間。 ' 7. 如申請專利範圍第6項所述之發光二極體基板,其 中該表面包括(0001)面’且該(0001)面佔該表面之投影面積 的10%〜30%之間。 8. —種發光二極體,包括: 一藍寶石基板’包括由多個無轉折六角錐體所構成的 11 M424614 曰修正 2 滅充 100-H-28 各無轉折六角錐體的週期小於10 μιη,Α中 各該,,,、轉折/、角錐體的對 “ 二底角,該第二底角大”二:"角以及-第 度在5〇度至70度之間;、科—底角,且該第二底角的角 一第一半導體層’配置在該藍寶石基板上; -發光層,配置在該第一半導體層上; f一半導體層’配置在該發光層上; -第:歐姆電極’接觸該第一半導體層;以及 一第二歐姆電極,接觸該第二半導體層。 9’如申叫專利範圍第g項所述之發光二極體,其該 些無轉折六角錐體的週期在〇1哗〜恤之間。 5Λ 10.如申請專利範圍第8項所述之發光二極體,其中該 些無轉折六角錐體的最大高度為1μη1〜2μιη之間、" 二11.如申請專利範圍第10項所述之發光二極體,其中 該些無轉折六角錐體的最大高度為1.5μιη〜2μιη之間。 12. 如申請專利範圍第8項所述之發光二極體,其中各 該無轉折六角錐體的頂部為平面或尖端。 13. 如申請專利範圍第8項所述之發光二極體,其中該 表面包括(0001)面,且該(〇〇〇1)面佔該表面之投影面積^ 10%〜60%。 ' 14. 如申請專利範圍第13項所述之發光二極體,其中 該表面包括(0001)面’且該(0001)面佔該表面之投影面積的 10%〜30〇/〇。 15. 如申請專利範圍第8項所述之發光二極體,其中該 12 M4246145. The light-emitting diode substrate according to claim 2, wherein the top of each of the non-turning hexagonal cones is a flat surface or a tip end. 6. The light-emitting diode substrate of claim 1, wherein the surface comprises a (0001) plane, and the (〇〇〇1) plane occupies between 10% and 60% of a projected area of the surface. . 7. The light-emitting diode substrate of claim 6, wherein the surface comprises a (0001) plane' and the (0001) plane occupies between 10% and 30% of the projected area of the surface. 8. A light-emitting diode comprising: a sapphire substrate comprising: 11 M424614 consisting of a plurality of non-turning hexagonal cones 曰 Correction 2 De-filling 100-H-28 Each non-turning hexagonal cone has a period of less than 10 μm , in the Α 各 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , a bottom corner, and the corner of the second bottom corner - a first semiconductor layer 'on the sapphire substrate; - a light-emitting layer disposed on the first semiconductor layer; f - a semiconductor layer 'on the light-emitting layer; The ohmic electrode 'contacts the first semiconductor layer; and the second ohmic electrode contacts the second semiconductor layer. 9' is the light-emitting diode according to item g of the patent application, wherein the period of the non-turning hexagonal cone is between 〇1哗~shirt. 5. The light-emitting diode according to claim 8, wherein the maximum height of the non-turning hexagonal cone is between 1 μη 1 and 2 μιη, " II 11. As described in claim 10 The light-emitting diodes, wherein the maximum height of the non-turning hexagonal cones is between 1.5 μm and 2 μm. 12. The light-emitting diode of claim 8, wherein the top of each of the non-turning hexagonal cones is planar or pointed. 13. The light-emitting diode of claim 8, wherein the surface comprises a (0001) plane, and the (〇〇〇1) plane occupies a projected area of the surface of from 10% to 60%. 14. The light-emitting diode of claim 13, wherein the surface comprises a (0001) plane and the (0001) plane occupies 10% to 30 Å/〇 of the projected area of the surface. 15. The light-emitting diode according to item 8 of the patent application, wherein the 12 M424614
第一半導體層、該發光層與該第二半導體層包括m-v族 系半導體。 16.如申請專利範圍第15項所述之發光二極體,其中 該III-V族系半導體為氮化鎵系半導體。 Π.如申請專利範圍第8項所述之發光二極體,其中該 第一歐姆電極與該第二歐姆電極是含自鎳、鉛、鈷、鐵、 欽、銅、錄、金、釕、鎢、錯、钥、組、銀及此等之氧化 物、氮化物所構成之群中所選出的至少一種合金或多層膜。 18.如申請專利範圍第S項所述之發光二極體,其中該 第一歐姆電極與該第二歐姆電極是含自鍺、銥、銀、鋁所 構成之群中所選出的一種合金或多層膜。 13 M424614The first semiconductor layer, the light emitting layer and the second semiconductor layer comprise an m-v family semiconductor. 16. The light-emitting diode according to claim 15, wherein the III-V-based semiconductor is a gallium nitride-based semiconductor. The light-emitting diode according to claim 8, wherein the first ohmic electrode and the second ohmic electrode are contained from nickel, lead, cobalt, iron, chin, copper, lan, gold, lanthanum, At least one alloy or multilayer film selected from the group consisting of tungsten, erroneous, molybdenum, group, silver, and oxides and nitrides thereof. 18. The light emitting diode according to claim S, wherein the first ohmic electrode and the second ohmic electrode are an alloy selected from the group consisting of ruthenium, iridium, silver, and aluminum. Multilayer film. 13 M424614
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圖2B 302 M424614Figure 2B 302 M424614
圖3AFigure 3A
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圖3D M424614Figure 3D M424614
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圖6 □LEE +功率Figure 6 □LEE + power
圖7 圖8Figure 7 Figure 8