TWM424614U - LED substrate and LED - Google Patents

LED substrate and LED Download PDF

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Publication number
TWM424614U
TWM424614U TW100210043U TW100210043U TWM424614U TW M424614 U TWM424614 U TW M424614U TW 100210043 U TW100210043 U TW 100210043U TW 100210043 U TW100210043 U TW 100210043U TW M424614 U TWM424614 U TW M424614U
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Taiwan
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light
emitting diode
turning
turning hexagonal
semiconductor layer
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TW100210043U
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Chinese (zh)
Inventor
Bo-Hsiang Tseng
Bo-Wen Lin
Chun-Yen Peng
Wen-Ching Hsu
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Sino American Silicon Prod Inc
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Priority to TW100210043U priority Critical patent/TWM424614U/en
Publication of TWM424614U publication Critical patent/TWM424614U/en
Priority to US13/472,480 priority patent/US8624279B2/en
Priority to JP2012003218U priority patent/JP3177600U/en
Priority to KR2020120004636U priority patent/KR200472973Y1/en

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Abstract

A light emitting diode (LED) substrate includes a sapphire substrate which is characterized by having a surface consisting of hexagonal pyramid (no slant turn), wherein a pitch of the hexagonal pyramids (no slant turn) is less than 10 μm. Each of the hexagonal pyramids (no slant turn) has a first base angle and a second base angle along symmetrical cross-section, wherein the second base angle is larger than the first base angle, and the second base angle is form 50° to 70°. This LED substrate has high light-emitting efficiency.

Description

料24614 極、以及接觸所述第二半導體層的一第二歐姆電極。 在本創作之另一實施例中,上述第一半導體層、“ 層與第二半導體層包括ΙΙΙ·ν族系半導體,如, 導體。 乐牛 θ在本創作之另一實施例中,上述第一與第二歐姆+極 疋含自鎳、鉛、鈷、鐵、鈦、銅、鍺、金、釕、鎢、二、And a second ohmic electrode contacting the second semiconductor layer. In another embodiment of the present invention, the first semiconductor layer, the “layer and the second semiconductor layer comprise a ΙΙΙ·ν family semiconductor, such as a conductor. In another embodiment of the present invention, the above One and two ohms + poles are contained from nickel, lead, cobalt, iron, titanium, copper, ruthenium, gold, rhenium, tungsten, and

銦、鈕、銀及此等之氧化物、氮化物所構成之群 的至少一種合金或多層膜。 σ、出 是含自铑 多層膜 巧創作之另-實施例中’上述第-與第二歐姆電極 一銥、銀、鋁所構成之群中所選出的一種合金或 基於上述’本創作的結構基本上是由多個無轉折 錐體所構·藍寶石基板做為出絲面,所以能藉由無轉 折六角錐體本身的六個面來增加光的散射,以增進基板的 出光效率。At least one alloy or a multilayer film of a group of indium, button, silver, and oxides or nitrides thereof. σ, is an alloy selected from the group consisting of the above-mentioned first and second ohmic electrodes, silver, aluminum, or the structure based on the above-mentioned creation. Basically, a plurality of non-folding cone-shaped sapphire substrates are used as the filament surface, so that the scattering of light can be increased by the six faces of the hexagonal cone without turning, so as to improve the light-emitting efficiency of the substrate.

為讓本創作之上述特徵和優點能更明顯易懂,下文特 舉實施例,並配合所附圖式作詳細說明如下。 【實施方式】 圖1是依照本創作之第一實施例之一種發光二極體基 板的立體示意圖。在圖1中顯示一藍寶石基板 100。這個 藍寶石基板100包括由多個無轉折六角錐體1〇2所構成的 一表面104。所謂的「無轉折六角錐體」是指一種由六個 無轉折的面構成的接近三角錐體的結構。這些無轉折六角 5 M424614 錐體102的週期(pitch) p小於1〇 _,較妓〇 ΐμιη〜3㈣ 之間。所明的「週期」是指每一個無轉折六角錐體102之 間的距離。 而無轉折六角錐體200的對稱剖面具有一第一底角al 以及一第二底角a2,第二底角a2大於第一底角al,且第 二底角a2的角度在50度至70度之間;較佳是在55度至 65度之間。 a 在本實施例中’無轉折六角錐體1〇2的頂部1()2a為尖 端,但是本創作並不侷限於此,無轉折六角錐體1〇2的頂 部102a也可以具有平台表面。而在藍寶石基板1〇〇的表面 104包括(〇〇〇1)面(即圖1中顯示有點狀分佈的面),且(〇〇〇1) 面例如佔此整個表面1〇4之投影面積的1〇%〜60%;較佳是 10%〜30%。當(oooi)面佔整個表面1〇4之投影面積高於 60%時’可能會導致光輸出效率的增益不彰,但是當(〇〇〇1) 面佔整個表面104之投影面積低於10%時,可能會導致蟲 晶遭遇困難。 圖2A顯示第一實施例之單一無轉折六角錐體的立體 示意圖;圖2B是圖2A之無轉折六角錐體的對稱剖面(b_b 線段之剖面)示意圖。 請參照圖2A與圖2B,其中的無轉折六角錐體2〇〇的 最大高度h譬如是與無轉折六角錐體200的週期成正比Q 所謂的「最大高度」是自無轉折六角錐體200的頂部202 到底部的距離’以本實施例而言,無轉折六角錐體2〇〇的 最大高度例如在Ιμιη〜2μιη之間,較佳是在1.5μιη〜2μιη之 M424614 (Light Extraction Efficiency,LEE)與發光效率而言,圖 6 的基板結構都優於傳統平台結構構成的基板。 綜上所述,本創作的發光二極體基板是由多個無轉折 六角錐體所構成的藍寶石基板做為出光表面,所以能藉由 無轉折六角錐體的六個面來增加光的散射。因此,使用這 種發光一極體基板的發光二極體,其出光效率將獲得改善。 雖然本創作已以實施例揭露如上,然其並非用以限定 • 本創作,任何所屬技術領域中具有通常知識者,在不脫離 本創作之精神和範圍内,當可作些許之更動與潤飾,故本 創作之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1疋依照本創作之第一實施例之一種發光二極體基 板的立體示意圖。 一圖2A顯不第一實施例之單一無轉折六角錐體的立體 示意圖。 • 圖2B是圖2A之無轉折六角錐體的對稱剖面示意圖。 圖3A至圖3D顯示第一實施例之發光二極體基板的製 作流程剖面圖。 ® 4疋依妝本創作之第二實施例之一種發光二極體的 剖面示意圖。 圖5是模擬試驗t的傳統平纟結構構成的基板之詳細 尺寸。 圖6是模擬試驗中的無轉折六角錐體所構成的基板之 9 M424614 詳細尺寸。 圖7是模擬試驗之結果曲線圖。 【主要元件符號說明】 100、300 :藍寶石基板 102、200、308 :無轉折六角錐體 102a、202 :頂部 104 :表面 302 :氧化層 304 :硬罩幕 306 :凸型圖案 400 :第一半導體層 402 :發光層 404 ··第二半導體層 406 :第一歐姆電極 408 :第二歐姆電極 al、a2 :底角 h:最大高度 p :週期To make the above-described features and advantages of the present invention more comprehensible, the following detailed description of the embodiments and the accompanying drawings are set forth below. [Embodiment] FIG. 1 is a perspective view of a light-emitting diode substrate according to a first embodiment of the present invention. A sapphire substrate 100 is shown in FIG. This sapphire substrate 100 includes a surface 104 comprised of a plurality of non-turning hexagonal cones 1〇2. The so-called "non-turning hexagonal cone" refers to a structure consisting of six non-turning faces close to a triangular pyramid. The pitch p of these non-turning hexagonal 5 M424614 cones 102 is less than 1 〇 _, which is between 妓〇 ΐμιη and 3 (4). The term "period" is the distance between each non-turning hexagonal cone 102. The symmetrical section of the non-turning hexagonal cone 200 has a first base angle a1 and a second base angle a2, the second base angle a2 is greater than the first base angle a1, and the second base angle a2 is between 50 degrees and 70 degrees. Between degrees; preferably between 55 and 65 degrees. a In the present embodiment, the top 1() 2a of the non-turning hexagonal pyramid 1〇2 is a pointed end, but the present invention is not limited thereto, and the top portion 102a of the non-turning hexagonal pyramid 1〇2 may also have a land surface. On the other hand, the surface 104 of the sapphire substrate includes a (〇〇〇1) plane (that is, a surface which is somewhat distributed in FIG. 1), and the (〇〇〇1) plane accounts for, for example, a projected area of the entire surface of 1〇4. 1% to 60%; preferably 10% to 30%. When the (oooi) plane occupies more than 60% of the entire surface area of 1〇4, the gain of the light output efficiency may be insufficient, but when the (〇〇〇1) plane occupies less than 10 of the entire surface 104. When it is %, it may cause difficulties in insect crystals. Fig. 2A is a perspective view showing a single non-turning hexagonal cone of the first embodiment; Fig. 2B is a schematic view showing a symmetrical section (a section of the line b_b) of the non-turning hexagonal pyramid of Fig. 2A. 2A and 2B, wherein the maximum height h譬 of the non-turning hexagonal cone 2〇〇 is proportional to the period of the non-turning hexagonal cone 200. The so-called “maximum height” is from the non-turning hexagonal cone 200. The distance from the top 202 to the bottom is 'in this embodiment, the maximum height of the non-turning hexagonal cone 2〇〇 is, for example, between Ιμιη~2μιη, preferably at 1.5μιη to 2μιη, M424614 (Light Extraction Efficiency, LEE The substrate structure of Figure 6 is superior to the substrate of the conventional platform structure in terms of luminous efficiency. In summary, the illuminating diode substrate of the present invention is a sapphire substrate composed of a plurality of non-turning hexagonal cones as a light-emitting surface, so that light scattering can be increased by the six faces of the hexagonal pyramid without turning. . Therefore, the light-emitting diode using such a light-emitting monopolar substrate will have improved light extraction efficiency. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any person having ordinary knowledge in the art can make some changes and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a light-emitting diode substrate according to a first embodiment of the present invention. Figure 2A shows a perspective view of a single non-turning hexagonal cone of the first embodiment. • Figure 2B is a schematic cross-sectional view of the non-turning hexagonal cone of Figure 2A. 3A to 3D are cross-sectional views showing the manufacturing process of the light-emitting diode substrate of the first embodiment. ® 4 is a schematic cross-sectional view of a light-emitting diode according to a second embodiment of the present invention. Fig. 5 is a detailed view of a substrate composed of a conventional flat-bottom structure simulating test t. Figure 6 is a detailed view of the 9 M424614 of the substrate formed by the non-turning hexagonal pyramid in the simulation test. Figure 7 is a graph showing the results of a simulation test. [Main component symbol description] 100, 300: sapphire substrate 102, 200, 308: no turning hexagonal cone 102a, 202: top 104: surface 302: oxide layer 304: hard mask 306: convex pattern 400: first semiconductor Layer 402: light-emitting layer 404 · second semiconductor layer 406: first ohmic electrode 408: second ohmic electrode a1, a2: bottom angle h: maximum height p: period

Claims (1)

M424614M424614 κ 1( 六、申請專利範圍: L種發光二極體基板,包括一藍寶石基板,其特徵 在於: 5亥監實石基板包括由多個無轉折六角錐體所構成的一 表面,且該些無轉折六角錐體的週期(pitch)小於ίο μπι, 其中各5亥無轉折六角錐體的對稱剖面具有一第一底角以及κ 1 (6) Patent application scope: L kinds of light-emitting diode substrates, including a sapphire substrate, characterized in that: 5 监 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实The pitch of the non-turning hexagonal cone is smaller than ίο μπι, wherein the symmetric cross section of each of the 5 nautical non-turning hexagonal cones has a first base angle and 一第二底角’該第二底角大於該第-底角,且該第二底角 的角度在50度至7〇度之間。 2. 如申請專利範圍第1項所述之發光二極體基板,其 中該些無轉折六角錐體的週期在〇 1μιη〜3μιη之間。 3. 如申請專利範圍第1項所述之發光二極體基板,其 中該些無轉折六角錐體的最大高度為Ιμιη〜2μιη之間。 4·如申請專利範圍第3項所述之發光二極體基板,其 中該些無轉折六角錐體的最大高度為丨5μπι〜2μιη之間。A second base angle 'the second base angle is greater than the first base angle, and the second base angle is between 50 degrees and 7 degrees. 2. The light-emitting diode substrate according to claim 1, wherein the period of the non-turning hexagonal pyramid is between 〇1 μm and 3 μmη. 3. The light-emitting diode substrate according to claim 1, wherein the maximum height of the non-turning hexagonal cones is between Ιμηη and 2μιη. 4. The light-emitting diode substrate according to claim 3, wherein the maximum height of the non-turning hexagonal cones is between μ5 μm and 2 μmη. 5. 如申請專利範圍第丨項所述之發光二極體基板,其 中各該無轉折六角錐體的頂部為平面或尖端。 6. 如申請專利範圍第1項所述之發光二極體基板,其 中該表面包括(0001)面,且該(〇〇〇1)面佔該表面之投影面積 的10%~60%之間。 ' 7. 如申請專利範圍第6項所述之發光二極體基板,其 中該表面包括(0001)面’且該(0001)面佔該表面之投影面積 的10%〜30%之間。 8. —種發光二極體,包括: 一藍寶石基板’包括由多個無轉折六角錐體所構成的 11 M424614 曰修正 2 滅充 100-H-28 各無轉折六角錐體的週期小於10 μιη,Α中 各該,,,、轉折/、角錐體的對 “ 二底角,該第二底角大”二:"角以及-第 度在5〇度至70度之間;、科—底角,且該第二底角的角 一第一半導體層’配置在該藍寶石基板上; -發光層,配置在該第一半導體層上; f一半導體層’配置在該發光層上; -第:歐姆電極’接觸該第一半導體層;以及 一第二歐姆電極,接觸該第二半導體層。 9’如申叫專利範圍第g項所述之發光二極體,其該 些無轉折六角錐體的週期在〇1哗〜恤之間。 5Λ 10.如申請專利範圍第8項所述之發光二極體,其中該 些無轉折六角錐體的最大高度為1μη1〜2μιη之間、" 二11.如申請專利範圍第10項所述之發光二極體,其中 該些無轉折六角錐體的最大高度為1.5μιη〜2μιη之間。 12. 如申請專利範圍第8項所述之發光二極體,其中各 該無轉折六角錐體的頂部為平面或尖端。 13. 如申請專利範圍第8項所述之發光二極體,其中該 表面包括(0001)面,且該(〇〇〇1)面佔該表面之投影面積^ 10%〜60%。 ' 14. 如申請專利範圍第13項所述之發光二極體,其中 該表面包括(0001)面’且該(0001)面佔該表面之投影面積的 10%〜30〇/〇。 15. 如申請專利範圍第8項所述之發光二極體,其中該 12 M4246145. The light-emitting diode substrate according to claim 2, wherein the top of each of the non-turning hexagonal cones is a flat surface or a tip end. 6. The light-emitting diode substrate of claim 1, wherein the surface comprises a (0001) plane, and the (〇〇〇1) plane occupies between 10% and 60% of a projected area of the surface. . 7. The light-emitting diode substrate of claim 6, wherein the surface comprises a (0001) plane' and the (0001) plane occupies between 10% and 30% of the projected area of the surface. 8. A light-emitting diode comprising: a sapphire substrate comprising: 11 M424614 consisting of a plurality of non-turning hexagonal cones 曰 Correction 2 De-filling 100-H-28 Each non-turning hexagonal cone has a period of less than 10 μm , in the Α 各 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , a bottom corner, and the corner of the second bottom corner - a first semiconductor layer 'on the sapphire substrate; - a light-emitting layer disposed on the first semiconductor layer; f - a semiconductor layer 'on the light-emitting layer; The ohmic electrode 'contacts the first semiconductor layer; and the second ohmic electrode contacts the second semiconductor layer. 9' is the light-emitting diode according to item g of the patent application, wherein the period of the non-turning hexagonal cone is between 〇1哗~shirt. 5. The light-emitting diode according to claim 8, wherein the maximum height of the non-turning hexagonal cone is between 1 μη 1 and 2 μιη, " II 11. As described in claim 10 The light-emitting diodes, wherein the maximum height of the non-turning hexagonal cones is between 1.5 μm and 2 μm. 12. The light-emitting diode of claim 8, wherein the top of each of the non-turning hexagonal cones is planar or pointed. 13. The light-emitting diode of claim 8, wherein the surface comprises a (0001) plane, and the (〇〇〇1) plane occupies a projected area of the surface of from 10% to 60%. 14. The light-emitting diode of claim 13, wherein the surface comprises a (0001) plane and the (0001) plane occupies 10% to 30 Å/〇 of the projected area of the surface. 15. The light-emitting diode according to item 8 of the patent application, wherein the 12 M424614 第一半導體層、該發光層與該第二半導體層包括m-v族 系半導體。 16.如申請專利範圍第15項所述之發光二極體,其中 該III-V族系半導體為氮化鎵系半導體。 Π.如申請專利範圍第8項所述之發光二極體,其中該 第一歐姆電極與該第二歐姆電極是含自鎳、鉛、鈷、鐵、 欽、銅、錄、金、釕、鎢、錯、钥、組、銀及此等之氧化 物、氮化物所構成之群中所選出的至少一種合金或多層膜。 18.如申請專利範圍第S項所述之發光二極體,其中該 第一歐姆電極與該第二歐姆電極是含自鍺、銥、銀、鋁所 構成之群中所選出的一種合金或多層膜。 13 M424614The first semiconductor layer, the light emitting layer and the second semiconductor layer comprise an m-v family semiconductor. 16. The light-emitting diode according to claim 15, wherein the III-V-based semiconductor is a gallium nitride-based semiconductor. The light-emitting diode according to claim 8, wherein the first ohmic electrode and the second ohmic electrode are contained from nickel, lead, cobalt, iron, chin, copper, lan, gold, lanthanum, At least one alloy or multilayer film selected from the group consisting of tungsten, erroneous, molybdenum, group, silver, and oxides and nitrides thereof. 18. The light emitting diode according to claim S, wherein the first ohmic electrode and the second ohmic electrode are an alloy selected from the group consisting of ruthenium, iridium, silver, and aluminum. Multilayer film. 13 M424614 M424614M424614 圖2B 302 M424614Figure 2B 302 M424614 圖3AFigure 3A 308 308 308 308308 308 308 308 圖3D M424614Figure 3D M424614 408408 M424614M424614 圖6 □LEE +功率Figure 6 □LEE + power 圖7 圖8Figure 7 Figure 8
TW100210043U 2011-06-02 2011-06-02 LED substrate and LED TWM424614U (en)

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TW100210043U TWM424614U (en) 2011-06-02 2011-06-02 LED substrate and LED
US13/472,480 US8624279B2 (en) 2011-06-02 2012-05-16 Light emitting diode substrate and light emitting diode
JP2012003218U JP3177600U (en) 2011-06-02 2012-05-30 Light emitting diode substrate and light emitting diode
KR2020120004636U KR200472973Y1 (en) 2011-06-02 2012-06-01 Light emitting diode substrate and light emitting diode

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