M412809 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種可對基板表面均勻地進行加工的直 立式基板濕製程浸泡裝置。 【先前技術】M412809 V. New description: [New technical field] This creation is about a vertical substrate wet process soaking device that can evenly process the surface of the substrate. [Prior Art]
應用在電路板、玻璃基板或晶等基板上，利用化學 樂液對該等基板進行加工的基板濕製程加工作業，包含利 用顯影劑在一基板上顯示出預設電路的保護層、利用姓刻 液對該基板上未設有保護層的銅箔部位進行姓刻，使該& 板上的銅箔呈現出電路的圖樣、以及利用清洗液洗淨該基 板上的蝕刻液…等，可使預設的電路形成在基板表面，以 利後續元件之裝配及電性連接。 其中’以利用#刻液對基板進行飯刻之步驟為例，為 了避免因為钱刻液聚積在基板上而造成過钱現象，其令一 種現有技術所採用的方式是將該基板以直立的方式輪送進 入一蝕刻槽甲，利用該蝕刻槽内設置於基板兩側的噴管來 對該基板喷灑蝕刻液，由於該基板採直立方式移動，因此 蝕刻液會自然地向下流動而蓄積於該蝕刻槽中，藉此解決 姓刻液會聚積於基板上的問題。 、 然而，也由於該蝕刻液會向下流動的特性，使得當噴 管同時對基板上的各部位同時喷灌蝕刻液，而錢於：板 上側的㈣液進-步向下流動時，往往會造成靠近基板下 側的線路產生過㈣現象，故現有技術之以直立方式來對 基板進行濕製程的裝置仍有待進一步改良之處。 3 M412809 【新型内容】 有鑑於前述現有技術所存在的問題，本創作提供一種 直立式基板濕製程浸泡裝置，希藉此設計解決在現有技術 之直立式基板濕製程加工裝置中對基板直接喷灑化學藥 液’會使該基板下側的線路產生過蝕現象的缺點。 為了達到上述的創作目的，本創作所利用的技術手段 係使一直立式基板濕製程浸泡裝置包括： 一主箱體’其兩相對側分別形成一入口及一出口，該 主箱體的中段處設有一加工槽，該加工槽底側設有一與該 加工槽相連通的集液槽，另於該主箱體上設有二承架，該 承架橫向架設於該主箱體之入口與出口之間，且分別位於 靠近該主箱體之頂部及底部處； 一輸送輪組’其係架設於該主箱體之二承架上，該輸 送輪組包括複數個傳動輪軸以及複數個調整輪軸，該傳動 輪轴與調整輪轴係可轉動地垂直架設於該二承架之間，且 間隔排列設置於該主箱體之入口與出口間，傳動輪轴與調 整輪轴的兩端分別穿設於該二承架，且每一調整輪軸對應 一傳動輪軸；以及 二喷流組件，其係設於該主箱體之加工槽中，且分別 位於該傳動輪轴與調整輪軸的兩側，每一喷流組件包含_ 外側板、一内側板與二擋水板，該外側板與内側板間隔設 置，該外側板與内側板之間在周緣處形成封閉並相互結 合’二者之間形成一分流空間，又，該外側板上設有至少 一輸液管，該輸液管的一端與該分流空間相連通，另一端 經由一汲液裝置與該集液槽相連通，該内側板面對該傳動 4 M412809 IS:整輪軸，該内側板上密佈有複數個嘴流孔，該擋 7八’陡，其係分別沿縱向固設於該相結合之外 曰 板的兩側’且分別貼靠於相對應之傳動輪 上述輪送輪組可進-步包括一 =上。 鏟動妯趙動轴該驅動轴係可 轉動地k向架設於該主箱體之入口與出口之間且… 中-承架的旁側，該驅動軸上間隔設有複數個蜗桿部，； 驅動轴的一端連接-馬達，該馬達可帶動該驅動轴轉動： 上达母-傳動輪轴上靠近端部處可套設有—輸人齒輪與一A substrate wet processing process for processing a substrate by using a chemical liquid on a substrate such as a circuit board, a glass substrate or a crystal, comprising using a developer to display a protective layer of a predetermined circuit on a substrate, using a surname The liquid is pasted on the copper foil portion of the substrate where the protective layer is not provided, so that the copper foil on the & plate exhibits a circuit pattern, and the etching liquid on the substrate is cleaned by a cleaning liquid, etc. A preset circuit is formed on the surface of the substrate to facilitate assembly and electrical connection of subsequent components. In the example of the step of engraving the substrate with the engraving liquid, in order to avoid the phenomenon of excessive money caused by the accumulation of money engraving on the substrate, one prior art adopts the method of erecting the substrate in an upright manner. The etchant is sprayed into an etched slot, and the etchant is sprayed on the substrate by the nozzles provided on both sides of the substrate in the etched groove. Since the substrate moves in an upright manner, the etchant naturally flows downward and accumulates. In the etching bath, the problem that the surname liquid accumulates on the substrate is solved. However, due to the characteristic that the etching liquid will flow downward, when the nozzle simultaneously sprinkles the etching liquid on each part on the substrate, the money is often: when the (four) liquid on the upper side flows downwardly, it tends to The phenomenon that the circuit near the lower side of the substrate is caused by the (four) phenomenon, the prior art device for performing the wet process on the substrate in an upright manner still needs further improvement. 3 M412809 [New Content] In view of the problems of the prior art mentioned above, the present invention provides an upright substrate wet process soaking device, which is designed to solve the problem of directly spraying the substrate in the prior art vertical substrate wet processing device. The chemical solution 'has the disadvantage of over-etching on the underside of the substrate. In order to achieve the above-mentioned creative purposes, the technical means utilized in the present invention is that the vertical substrate wet process soaking apparatus comprises: a main tank 'the opposite sides thereof respectively form an inlet and an outlet, and the middle section of the main tank A processing tank is disposed, the bottom side of the processing tank is provided with a liquid collecting tank communicating with the processing tank, and the main tank is provided with two brackets, and the bracket is horizontally mounted on the inlet and the outlet of the main tank Between the top and bottom of the main box, respectively, a conveyor wheel set is erected on the second frame of the main box, the transport wheel set includes a plurality of transmission wheel axles and a plurality of adjusting axles The transmission wheel axle and the adjusting wheel axle are rotatably vertically disposed between the two brackets, and are arranged at intervals between the inlet and the outlet of the main casing, and the two ends of the transmission axle and the adjusting axle are respectively worn. The second carrier is disposed, and each of the adjusting axles corresponds to a transmission axle; and the two jetting assemblies are disposed in the machining slots of the main casing, and are respectively located on the two sides of the transmission axle and the adjusting axle. Each jet group Including _ outer side plate, an inner side plate and a second water baffle, the outer side plate is spaced apart from the inner side plate, and the outer side plate and the inner side plate are closed at the peripheral edge and are combined with each other to form a shunting space therebetween, The outer plate is provided with at least one infusion tube, one end of the infusion tube is connected to the diverting space, and the other end is connected to the sump via a sputum device, the inner plate facing the transmission 4 M412809 IS: a whole wheel axle, the inner side plate is densely covered with a plurality of nozzle flow holes, and the block is 7'8' steep, which are respectively fixed in the longitudinal direction on the two sides of the combined outer plate and respectively abut the corresponding transmission The wheel of the above-mentioned wheel set can further include one = up. The drive shaft is rotatably disposed between the inlet and the outlet of the main casing and is located at the side of the carrier, and the drive shaft is spaced apart from the plurality of worm portions. One end of the drive shaft is connected to the motor, and the motor can drive the drive shaft to rotate: the top of the parent-drive wheel shaft can be sleeved near the end - the input gear and the
輸出齒輪’各傳動輪轴之輸人齒輪分別對應並與該驅動轴 之堝桿部唾合相接，上述每—調整輪軸上靠近端部處可設 有一傳動齒輪，各調整輪軸之傳動齒輪分別對應並與該傳 動輪轴之輸出齒輪唾合相接。 上述每一承架上可間隔穿設有複數個滑移槽，該滑移 槽貫穿該承架之一側邊而形成有一開口，每一滑移槽的長 軸延伸方向與該主箱體之入口與出口的連線方向垂直； 上述輸送輪組可進一步包括複數個滑移塊，該滑移塊 係可移動但不可轉動地分別設置於該二承架之滑移槽間， 且位於靠該滑移槽之開口端的一側，上述傳動輪轴的兩端 分別枢設於該承架上且位於相對應的滑移槽中，上述調整 輪軸的兩端分別樞設於該滑移塊； 上述直立式基板濕製程浸泡裝置可進一步包括二彈性 推頂組件，該彈性推頂組件分別設於該承架之旁側，每一 彈性推頂組件包含至少一擋塊、複數固定桿與複數推移 桿’該擋塊設於該承架的一側，且對應該滑移槽之開口， 該固定桿的兩端分別與該擋塊及承架相互固接，該推移桿 5 M412809 的兩端分別與該擋塊及滑移塊相互固接，每一推移^ 設有一彈簧，彈簧的兩端分別把頂私兮讲仏 干营 刀另J抵頂於該擋塊以及該滑移塊。 上述輸送輪組可進一步白扛、每 步包括複數個輸送輪，該輸送輪 係可轉動地間隔設置於靠近主箱 王相體底部的承架上，並突 至該傳動輪轴與調整輪轴之間，該輸送輪之轴向心主箱 體之入口與出口的連線方向以及該傳動輪轴之轴向均呈相 互垂直。 π 上述輸送輪組之每一輪读齡 ’输送輪上可環繞成型有一限位 糟0 本創作之直立式基板濕製程浸泡裝置在使用時，係於 該二噴流組件之間注滿化學藥液，當一待加工的基持 於該傳動輪軸與調整輪轴之間移動，從而進入該二喷流組 件之間後’係呈浸泡於化學藥 、 字樂液中的狀態，故可使該化學 2液對該基板表面的各部位均勾地進行化學作用，其中， 當該化學藥液由該輸液管注入該外、内側板之間，再由該 内側板之喷流孔流入該二噴流組件之間時’會在各喷产孔 $同時產生喷射狀的水流，以進一步加強該化學藥液：基 =部位加工之效果’而且不致使基板某些部位產生過蝕 現象。 【實施方式】 以下配合圖式及本創作之較佳實施例，進一步闡述本 作為達成預定創作目的所採取的技術手段。 參見圖1、2及5所示，本創作之吉古— ㈣作之直立式基板濕製程浸 裝置包括-主箱體1〇、一輸送輪組2〇、二彈性推頂組件 以及—喷流組件40，其中： 6 M412809 主箱體10的兩相對側分別形成一入口彳】及一出口 12’該主箱體1〇的中段處設有一加工槽13，該加工槽η 底側設有一與該加工槽13相連通的集液槽15，該集液槽 15係用以盛裝化學藥液，另於該主箱體1〇上設有二承架 14,該承架14橫向架設於該主箱體1〇之入口與出口 12之間，且分別位於靠近該主箱體1〇之頂部及底部處每 一承架14上間隔穿設有複數個滑移槽141，該滑移槽141 呈長槽狀’並貫穿該承架14之一側邊而形成有一開口，每 一滑移槽141的長軸延伸方向與該主箱體1〇之入口 11與 出口 12的連線方向垂直； 輸送輪組20架設於該主箱體1〇之二承架14上，該輸 送輪組20包括一驅動軸21、複數個傳動輪軸22 A、22B ' 複數個滑移塊23、複數個調整輪軸24A、24B以及複數個 輸送輪2 5 ; 該驅動軸21係可轉動地橫向架設於該主箱體1〇之入 口 11與出口 12之間’且位於其中一承架14的旁側，該驅 動轴21上間隔設有複數個蝸桿部211，該驅動軸21的一 端連接一馬達26，該馬達26可帶動該驅動軸21轉動； 配合參見圖6及7所示’該傳動輪軸22A ' 22B係可 轉動地垂直架設於該二承架14之間，且間隔排列設置於該 主相體10之入口 q與出口 12間，傳動輪軸22A、mb的 兩端分別樞設於該二承架上且位於相對應的滑移槽141 中’又’每一傳動輪軸22A、22B上靠近端部處套設有一輸 入齒輪221A、221B與一輸出齒輪222B，各傳動輪軸22A、 9 9 β 之輸入齒輪221A、221 Β分別對應並與該驅動軸21之 7 蝸桿部211嚙合相接，使該驅動轴21玎進一步帶動該傳動 輪軸22A、22B轉動； 該滑移塊23係可移動但不可轉動地分別設置於該二承 架14之滑移槽141間，且位於靠該滑移槽141之開口端的 —側； 該調整輪軸24 A、24 B垂直架設於該二承架14之間， 且間隔排列設置於該主箱體10之入口 11與出口 12間，調 整輪轴24 A、24 B的兩端分別可轉動地框設於該滑移塊23 中，而可隨該滑移塊23 —同沿該滑移槽141移動，每一調 整輪轴24A、24B對應一傳動輪軸22A、22B，又，每一調 整輪軸24A、24B上靠近端部處設有一傳動齒輪241B，各 調整輪軸24A、24B之傳動齒輪241B分別對應並與該傳動 輪軸22A、22B之輸出齒輪222B唾合相接，使該傳動輪轴 22A、22B還可進-步帶動該調整輪軸24A、24b轉動； 該輸送輪25係可轉動地間隔設置於靠近主箱體1〇底 部的承架14上’並突伸至該傳動輪轴22a、22b與調整輪 轴24A、24B之間，該輸送輪25之轴向與該主箱體10之 11與出σ 12的連線方向以及該傳動輪軸、咖 ^向均呈相互垂直’每—輪送輪25上環繞成型有一限位 槽 251 ; 配。參見圖6所示，彈性推频件扣分別設於該承架 :之旁側’每-彈性推頂組件3〇包含至少一撞塊 :固定…複數推移桿33,該擔塊Μ設於該承架Μ =二對應該滑移槽141之開口，該固定桿32的兩端 刀別與該推塊31及承架14相互固接，以固定該擔塊31之 M412809 位置，該推移桿33的一端穿設該擋塊31，另一端分別與該 滑移塊23相互固接，又，每一推移桿33上套設有一彈簧 34 ’彈簧34的兩端分別抵頂於該擋塊μ以及該滑移塊 23 ’並經由該滑移塊23推移該調整輪軸24A、24B，使該 調整輪轴24A、24B可常態性地與相對應的傳動輪轴22A、 22B相互貼靠； 配合參見圖3、4及8所示，噴流組件40設於該主箱 體10之加工槽13中，且分別位於該傳動輪轴22B與調整 輪輪24B的兩側，每一喷流組件40包含一外側板41、一 内側板42與二擋水板44，該外側板41與内側板42間隔 設置，且該外側板41與内側板42之間在周緣處形成封閉， 使該外、内側板41、4 2相互結合，並於二者之間形成一分 流空間401，又’該外側板41上設有至少一輸液管43，該 輸液管43的一端與該分流空間401相連通，另一端經由一 汲液裝置45與該集液槽15相連通，該没液裝置45可抽取 該集液槽15中的化學藥液，再經由該輸液管43注入該分 流空間401之中，該内側板42面對該傳動輪軸22B與調整 輪轴24B，該内側板42上密佈有複數個喷流孔421，該擋 水板44具彈性，其係分別沿縱向固設於該相結合之外、内 側板41、42的兩側，且分別貼靠於相對應之傳動輪軸22B 與調整輪軸24B上。 藉由如上所述之設計，本創作之直立式基板濕製程浸 泡裝置在使用時，係於該二喷流組件40之間注滿化學藥 液，並藉該檔水板44以減少該化學藥液洩漏，使該化學藥 液充滿於該喷流組件40與擋水板44間以及該噴流組件4〇 9 M412809 之分流空間401中，至於洩漏的化學藥液則會向下流入並 蓄積於該集液槽15之中；The output gears of the respective transmission wheel shafts respectively correspond to and are connected to the mast portion of the drive shaft, and each of the adjustment wheel shafts may be provided with a transmission gear near the end portion, and the transmission gears of the respective adjustment wheel shafts are respectively Corresponding to and connected to the output gear of the transmission axle. Each of the above-mentioned racks may be provided with a plurality of sliding grooves, and the sliding grooves are formed through an edge of one of the brackets to form an opening, and the long axis extending direction of each of the sliding grooves and the main box The connecting wheel and the outlet are perpendicular to the connecting direction; the transporting wheel set may further include a plurality of sliding blocks, the sliding blocks are respectively movably but non-rotatably disposed between the sliding grooves of the two frames, and are located a side of the open end of the sliding groove, the two ends of the transmission wheel shaft are respectively pivoted on the frame and located in the corresponding sliding groove, and the two ends of the adjusting wheel shaft are respectively pivoted on the sliding block; The upright substrate wet process soaking device may further comprise two elastic ejector assemblies respectively disposed on the side of the rack, each elastic ejector assembly comprising at least one stop, a plurality of fixed rods and a plurality of shift rods 'The stopper is disposed on one side of the bracket, and corresponding to the opening of the sliding slot, the two ends of the fixing rod are respectively fixed to the stopper and the bracket, and the two ends of the shifting rod 5 M412809 are respectively The block and the slip block are fixed to each other, ^ A passage provided with a spring, the top ends of the spring are private Xi stresses Fo J dry camp knife abut against the other of the stopper and the sliding block. The conveying wheel set may be further white, each step includes a plurality of conveying wheels, the conveying wheel is rotatably spaced apart from the frame near the bottom of the main box king body body, and protrudes between the transmission wheel shaft and the adjusting wheel shaft The connecting direction of the inlet and the outlet of the axial main box of the conveying wheel and the axial direction of the transmission shaft are perpendicular to each other. π Each round of the above-mentioned transport wheel set can be formed with a limit stop on the transport wheel. The vertical substrate wet process soaking device of the present invention is filled with chemical liquid between the two jet components. When a base to be processed is moved between the transmission wheel shaft and the adjustment wheel shaft, and then enters between the two jet flow components, the system is immersed in the chemical medicine and the word liquid, so the chemical 2 can be The liquid chemically acts on each part of the surface of the substrate, wherein the chemical liquid is injected into the outer and inner plates from the liquid supply tube, and then flows into the two jet flow components from the spray holes of the inner plate. At the same time, a spray-like water flow will be generated at each of the spray holes to further strengthen the chemical liquid: the effect of the base portion processing and does not cause over-etching in some parts of the substrate. [Embodiment] Hereinafter, the technical means adopted for achieving the intended purpose of creation are further explained in conjunction with the drawings and the preferred embodiment of the present invention. Referring to Figures 1, 2 and 5, the vertical substrate wet process dipping apparatus of the present invention consists of - a main casing 1 〇, a conveyor wheel set 2 〇, a two elastic ejector assembly, and a jet stream. The assembly 40, wherein: 6 M412809, the opposite sides of the main casing 10 respectively form an inlet port and an outlet 12'. The middle portion of the main casing 1 is provided with a machining groove 13, and the bottom side of the machining groove η is provided with a The sump 15 is connected to the sump 13 for connecting the chemical liquid, and the second casing 14 is disposed on the main casing 1 , and the frame 14 is horizontally mounted on the main tank Between the inlet and the outlet 12 of the casing 1 and each of the brackets 14 adjacent to the top and bottom of the main casing 1 respectively, a plurality of sliding grooves 141 are formed, and the sliding grooves 141 are formed. a long groove shape 'and a side opening of one of the brackets 14 is formed with an opening, and a longitudinal direction of each of the sliding grooves 141 extends perpendicularly to a line connecting the inlet 11 and the outlet 12 of the main casing 1; The wheel set 20 is mounted on the second frame 14 of the main box body. The transport wheel set 20 includes a drive shaft 21 and a plurality of transmission wheel shafts 22 A. 22B' a plurality of slip blocks 23, a plurality of adjusting axles 24A, 24B and a plurality of conveying wheels 25; the driving shaft 21 is rotatably erected transversely between the inlet 11 and the outlet 12 of the main casing 1' And a plurality of worm portions 211 are spaced apart from the drive shaft 21, and one end of the drive shaft 21 is connected to a motor 26, and the motor 26 can drive the drive shaft 21 to rotate; The transmission axles 22A' 22B are rotatably mounted between the two brackets 14 and are arranged at intervals between the inlet q and the outlet 12 of the main phase body 10, and the transmission axles 22A, mb. The two ends are respectively pivotally disposed on the two brackets and are located in the corresponding sliding grooves 141. Further, each of the transmission wheel axles 22A, 22B is provided with an input gear 221A, 221B and an output gear 222B near the end. The input gears 221A, 221 各 of the respective transmission axles 22A, 9 9 β respectively correspond to and mesh with the worm portion 211 of the drive shaft 21, so that the drive shaft 21 玎 further drives the transmission axles 22A, 22B to rotate; The slip block 23 is separately movable but non-rotatably set The sliding brackets 141 of the two brackets 14 are located on the side of the opening end of the sliding slot 141. The adjusting axles 24 A, 24 B are vertically disposed between the two brackets 14 and are arranged at intervals. Between the inlet 11 and the outlet 12 of the main casing 10, the two ends of the adjusting axles 24 A, 24 B are rotatably framed in the sliding block 23, respectively, and the sliding block 23 can be along the same The sliding groove 141 moves, each adjusting wheel axle 24A, 24B corresponds to a transmission wheel axle 22A, 22B, and each of the adjusting axle axles 24A, 24B is provided with a transmission gear 241B near the end, and the transmission axles 24A, 24B are driven. The gears 241B respectively correspond to and are coupled to the output gears 222B of the transmission wheel axles 22A, 22B, so that the transmission axles 22A, 22B can further drive the adjustment axles 24A, 24b to rotate; the conveyor wheels 25 can be rotated The ground spacing is disposed on the frame 14 near the bottom of the main casing 1 and protrudes between the transmission wheel axles 22a, 22b and the adjusting axles 24A, 24B. The axial direction of the conveying wheel 25 and the main casing The direction of the connection between 10-11 and σ 12 and the axis of the transmission wheel and the direction of the coffee are perpendicular to each other. Surround molding 25 has a limiting groove 251; ligand. Referring to FIG. 6 , the elastic pushing member buckles are respectively disposed on the side of the rack: the side of each of the elastic ejector units 3 〇 includes at least one bumper block: fixed... a plurality of shifting rods 33, and the stacking blocks are disposed on The frame Μ = the opening of the pair of sliding grooves 141, the two ends of the fixing rod 32 are fixed to the pushing block 31 and the bracket 14 to fix the position of the M412809 of the load block 31, the shifting rod One end of the 33 is inserted through the stopper 31, and the other end is fixed to the sliding block 23, and each of the sliding rods 33 is sleeved with a spring 34. The two ends of the spring 34 respectively abut against the stopper. And the sliding block 23' and the adjusting axles 24A, 24B are moved by the sliding block 23, so that the adjusting axles 24A, 24B can normally abut against the corresponding transmission axles 22A, 22B; As shown in Figures 3, 4 and 8, the jet flow assembly 40 is disposed in the machining slot 13 of the main housing 10 and is located on each side of the transmission axle 22B and the adjustment wheel 24B. Each jet assembly 40 includes a The outer side plate 41, the inner side plate 42 and the second water baffle 44 are spaced apart from the inner side plate 42 and between the outer side plate 41 and the inner side plate 42 The outer edge and the inner side plates 41, 4 2 are combined with each other to form a shunting space 401 therebetween, and the outer side plate 41 is provided with at least one infusion tube 43 for the infusion tube 43 One end communicates with the diverting space 401, and the other end communicates with the sump 15 via a sputum device 45. The liquid eliminating device 45 can extract the chemical liquid in the sump 15 and then pass through the infusion tube 43. Injecting into the diverting space 401, the inner side plate 42 faces the transmission wheel axle 22B and the adjusting wheel axle 24B. The inner side plate 42 is densely covered with a plurality of jet holes 421, and the water retaining plate 44 has elasticity, and the The longitudinal direction is fixed on the two sides of the inner side plates 41, 42 outside the combination, and respectively abuts against the corresponding transmission wheel shaft 22B and the adjusting wheel shaft 24B. With the above design, the vertical substrate wet process soaking device of the present invention is filled with chemical liquid between the two jet flow assemblies 40, and the water deflector 44 is used to reduce the chemical. The liquid leaks so that the chemical liquid is filled between the jet flow assembly 40 and the water deflector 44 and the flow dividing space 401 of the jet flow assembly 4〇9 M412809, and the leaked chemical liquid flows downward and accumulates therein. In the liquid collection tank 15;
當一待加工的基板50由主箱體1〇之入口彳彳移動進入 本創作之直立式基板濕製程浸泡裝置中時，該基板5〇的底 邊係設置於該輸送輪25之限位槽251之間，隨著馬達26 依序帶動該驅動轴21、傳動輪軸22A' 22B與調整輪軸 24A、24B轉動’可帶動該基板5〇穩定地朝主箱體1〇之出 口 12方向移動，在移動的過程中，該基板汕會依序推移 各調整輪軸24A、24B，同時藉該彈簧34之彈力而夹持於 該傳動輪軸22A、22B與調整輪軸24A、24日之間； 當該基板50移動進入該二喷流組件4〇之間後，係呈 浸泡於化學藥液中的狀態，故可使該化學藥液對該基板50 表面的各部位均句地進行化學作用，叾中，當該化學藥液 由該輸液管43注入該外、内側板41、42之間的分流空間 ，再由該内側板42之喷流孔421流入該二喷流組件4〇 之間時，會在各喷流孔421處同時產生喷射狀的水流，以 進-步加強該化學藥液對基板5〇各部位加工之效果，而且 還有不致使基板50某些部位產生過蝕現象的優點。 以上所述僅是本創作的較佳實施例而已，並非對本創 作作任何形式上的限制，雖然本創作已以較佳實施例揭露 =，然而並非用以限定本創作’任何熟悉本專業的技術 _ ，在不脫離本創作技術方案的範圍内，當可利用上述 揭不的技術内容作出些許更動或修#為等同變化的等效實 施例，’但凡是未脱離本創作技術方案的内容，依據本創作 的技術實質對以上實施例所作的任何簡單修改、$同變化 M412809 與修飾，均仍屬於本創作技術方案的範圍内。 【圖式簡單說明】 圖1為本創作之側視圖。 圖2為本創作省略噴流組件之側視示意圖。 圖3為本創作之噴流組件的立體外觀圖。 圖4為本創作之噴流組件的另一立體外觀圖。 圖5為本創作放大之部分元件立體外觀圖。 圖6為本創作放大之上視部分元件剖面圖。When the substrate 50 to be processed is moved from the inlet of the main casing 1 into the vertical substrate wet process soaking device of the present invention, the bottom edge of the substrate 5 is disposed in the limiting slot of the conveying wheel 25. Between 251, as the motor 26 sequentially drives the drive shaft 21, the transmission wheel shaft 22A' 22B and the adjustment wheel shafts 24A, 24B to rotate, the substrate 5 can be stably moved toward the outlet 12 of the main casing 1 ,. During the movement, the substrate 推移 will sequentially move the adjusting axles 24A, 24B, and is clamped between the transmission axles 22A, 22B and the adjusting axles 24A, 24 by the elastic force of the spring 34; After moving into the second jet assembly 4〇, it is immersed in the chemical liquid, so that the chemical liquid can chemically act on all parts of the surface of the substrate 50. The chemical liquid is injected into the diverting space between the outer and inner plates 41 and 42 by the infusion tube 43 and flows into the two jet modules 4〇 through the jet holes 421 of the inner plate 42. At the same time, a jet-like water flow is generated at the jet hole 421 to further strengthen the Learning effect for each portion of the substrate liquid 5〇 for processing, but also does not result in some parts of the substrate 50 produced a advantage of cavitation. The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Although the present invention has been disclosed in the preferred embodiment, it is not intended to limit the present invention to any technology that is familiar with the subject. _ , without departing from the scope of the present technical solution, when the above-mentioned technical content can be used to make a few changes or modifications, equivalent embodiments change, 'but without the content of the creative technical solution, Any simple modification, the same change M412809 and the modification of the above embodiment according to the technical essence of the present invention are still within the scope of the technical solution of the present invention. [Simple description of the drawing] Figure 1 is a side view of the creation. Figure 2 is a side elevational view of the present invention omitting the jet flow assembly. Figure 3 is a perspective view of the jet assembly of the present invention. Figure 4 is another perspective view of the jet assembly of the present invention. Figure 5 is a perspective view of a part of the components of the enlarged work. Fig. 6 is a cross-sectional view showing the upper part of the upper part of the creation.
圖7為本創作之端視部份元件剖面圖。 圖8為本創作另一放大之上視部分元件剖面Figure 7 is a cross-sectional view of a portion of the end view of the present invention. Figure 8 is another enlarged top view component cross section of the creation
【主要元件符號說明】 1 〇主箱體 12 出口 14承架 15集液槽 21驅動軸 22A、22B傳動輪軸 222B輸出齒輪 24A、24B調整輪軸 25輸送輪 26馬達 31擋塊 3 3推移桿 40喷流組件 11入口 13加工槽 141滑移槽 20輸送輪組 211蝸桿部 221A、221B輸入齒輪 2 3滑移塊 241B傳動齒輪 251限位槽 3 0彈性推頂組件 32固定桿 34彈簧 401分流空間 M412809 41 外側板 42 421 喷流孔 43 44 擋水板 45 50 基板 内側板 輸液管 汲液裝置[Main component symbol description] 1 〇 main box 12 outlet 14 carrier 15 sump 21 drive shaft 22A, 22B transmission axle 222B output gear 24A, 24B adjustment axle 25 delivery wheel 26 motor 31 stop 3 3 push rod 40 spray Flow assembly 11 inlet 13 machining slot 141 slip slot 20 transport wheel set 611 worm portion 221A, 221B input gear 2 3 slip block 241B drive gear 251 limit slot 3 0 elastic ejector assembly 32 fixed rod 34 spring 401 split space M412809 41 outer plate 42 421 jet hole 43 44 baffle 45 50 substrate inner plate infusion tube sputum device
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