M399319 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種檢測影像擷取設備，特別是指一 種結合雷射自動對焦系統，並使用線型電荷耦合裝置 的掃描式自動對焦檢測影像操取設備。 【先前技術】 今曰，在工業自動化檢測程序中，常利用自動光 學檢查設備（Automated Optical Inspection ; AOI)查 驗例如為LCD液晶螢幕面板之平面顯示器（Flat Panel Display ; FPD)之表面瑕疲，包含亮點、暗點 與點瑕疵等。自動光學檢查設備係先利用一影像擷取 單元之電荷耗合裝置（Charge Coupled Device;以下 簡稱CCD)擷取待測平面顯示器之一檢測影像，接著 比對該檢測影像，藉以檢測該待測平面顯示器是否具 有缺陷瑕疵。 在習知技術中，自動光學檢查設備常用的CCD 為陣列式CCD(Array CCD)。在影像擷取過程中，係 使陣列式CCD沿一影像擷取路徑在複數個定點之間 移動，並在每一定點對一單位擷取範圍擷取一單位檢 測影像。該等單位檢測影像係供拼接組合為一完整檢 測影像以進行比對檢測。影像擷取單元更包含一鏡 頭，該鏡頭係在影像擷取單元移動至每一定點並停駐 於該定點時，重新對單位擷取範圍内的待測平面顯示 益對焦’以保證該早位檢測影像清晰不失焦。 然而，隨著廠商對瑕疵檢測的精細程度要求提 高，檢測影像之清晰度也必須有所提昇，以符合高解 析度比對的需求。目前的陣列式CCD由於其單位擷 M399319 面顯，單位_範圍内具 響檢測比對區域無法被清晰呈現，影 曹新科隹^、、，°果。此外，影像擷取單元在每一定點 •…，胃延長影像擷取所耗費之時間。 ’’· 無法式CCD單位擷取範圍較大而 胃占重新域對焦’以及影像操取單元在每一定 善，提出」種新=====的問題加以改 備，可以拮式自動對焦檢測影像擷取設 像中細速 見象，4晰呈現瑕疵區域之影像。 【新型内容】 a有鑒於在習知技術中，存在陣 取範圍較大而無法針對瑕 弋D早位擷 單元在每一定點重：二又庇£域對焦，以及影像擷取 問題，本創作係提出一種掃3 2掏取速度較慢的 取設備’其掃描式㈣焦檢測影像操 以利用其線型電荷平台連續移動’ 連續線型影像；並 時’掃描式影像擷取單元同 而沿一與該平台垂t =又凋焦馬達驅動’ 置。本創作由於在連娣ρ=；；、路徑移動至一對焦位 影像擷取的過程， 擷取面積較小，故該等連續公:口 4置之單位 像可清晰呈現瑕疵區域而不失焦1像所組成之檢測影 本創作為了解決習知姑 採用之技術手段為提供& n之上述問題，所 裡幹4田式自動對焦檢測影 4 M399.319 像操取設備。掃描式自動料 一掃描式影像擷取單元、一；：ί測影像擷取設備包含 及一調焦馬達。其中，掃十”旦/十焦運具處理模組以 頭以及-線型電荷像f取單元包含一鏡 動，以利用線型電荷耗合;置置f^對一平台連續移 連續地操取複數個連續線上之—待測物件 自動對焦運算處理槿細私+ 土 合裝置，以自該性連接線型電荷耗 影像，並將該等連續線型旦4置接收該等連續線型 像。同時，自動對焦運算處一檢測影 制信號。調焦馬達電性連接該=3焦控 對該平台連續移動:二在；影像摘取單元相 垂直之調焦路徑移動至-對焦位置t頭沿—與該平台 元。雷射光源投射一帝击’' 電連接處理單 ^像擷取單元棟L;射射式 早兀；影像分析運曾匿务ή疮二诼卫得廷至该處理 影像並分析該雷射；隹影像：：3收該雷射對焦 據該清晰度計算所對庫之1 =度由計算單元根 根據該對焦位置產生該調焦控制使該處理單元 動，^^义技術中，電荷_合裝置係在定點門 元係相對平a心:像娜叹備乂知描式影像擷取覃 同時進二ΪΪ地移動，並且在連續移動的』：ΐ 丁自勒射焦，可使影像操取過程更加快^中 5 M399319 耦合裝置，單位擷取範圍相、何之陣列式電荷 失焦的情況產生’清晰呈☆二’可避免瑕疵區域 度之檢測比對之情況。見u小缺’適用於高解析 【實施方式】 本創作係關於一種檢測影 描式自動對焦檢測 取；是指 本創作之一較佳實施例 ^有以下茲列舉 藝者皆知此僅為舉例，而並非用以;^熟習此項技 關此較佳實施例之内容詳述如下。u作本身。有 二例中， cr:含本動對焦二圖： 一自動對;運t㈣以4-調焦馬達 f檢測模組5。掃描式影像擷取單元】包二以二一比 —)】2，掃描式f (=〜肛C卿led 動，苴Φ於,, 像城取早凡1受平移馬達4驄 動其令鏡頭11又受調焦馬達2驅動。這，駆 分析f早兀31、一雷射光源32、一影像 异早兀33以及一計算單元 Ί 可為處理器或是具有處理器等 處^早几31 =程運算單…及^ 析運算單元& Αϋ1!' #射光源32、影像分 汁#早7L 34，係皆電性連接處理 6 處理、早凡31更笔性連接於平移馬達 二馬達2，u勿別發送信號控制平移 隹、= 達2驅動掃描式影像擷取單元】與鏡頭^4。一周焦馬 δ月參閱第二圖，其分別係本創作較 掃f式自動對焦檢測影像擷取設備之作中/ 閱第二圖的同時請同時參閱第一圖。如二Ί翏 】1 〇自動/If、檢測影像擷取設備10 0更包；：制：ί 】2〇 ’自動對焦運算模組3中之處理 D知 析運算單元33盥計笞單，兀3】、杉像分 料設置於酬 平σ 1 ] 〇上放置至少—待測糾 影像操取單元！設於平 200 ’掃描式 為例如為液晶顯示器測=2°。可 S1至平移馬達4， 掃描控制信號 S1 描路徑連續移動，線型平t 110沿一掃 像。同時，带身央/也刼取獲數個連續線型影 射光束lV使射 焦影像並傳送至^單取單7^1擷取—雷射對 續線型影ί 1=S合裝置12接收該等連 像，以傳iL比買線型影像組合成檢測影 處理單元:則模細5進行後續彻 單元33，以供影;象田八'對Ί影。像傳送至影像分析運算 像之〜清晰户運异單元33分析雷射對焦影 K亚回傳至處理單元31。處理單元31 M399319 將清晰度傳送至計算單元34 清晰度計算所對應之一對隹吏:十二几根據該 3】：處理單元3"艮據該對焦位置分=== 制化號S2，亚傳送至調焦馬達2。 。。…、才工 調焦馬達2接收調焦控制彳 „ 控制信號S 2在掃描式影像操’亚J據調焦 連續移動的同時，驅動鏡頭n I一 /目對该平台n〇 該對焦位置，藉以擷取清晰地連徑巧駐 〒產生造成檢測影像局部模糊二隹$免， 與平台110互相垂直。 甲η亥6周焦路徑係 藉由上述之本創作實施例可知，本創作 上之利用價值。惟，以上之實施 ^ 1 以=明，舉凡所屬技術領域中 之專利i訌屬於本創作之創作精神及界定 【圖式簡單說明】 第一圖係、本創作較佳實施例中掃描式自動對焦檢測 影像擷取設備之功能方塊圖；以及 弟-圖係、本創作較佳實施例中掃描式自動對焦檢測 影像擷取設備之作動示意圖。 【主要元件符號說明】 掃描式自動對焦檢測影像擷取設備1〇〇 平台110 8 M399319 控制電腦]20 待測物件200 掃描式影像擷取單元1 鏡頭11M399319 V. New description: [New technical field] This creation is about a kind of detection image capturing device, especially a scanning autofocus detection image operation using a laser autofocus system combined with a linear charge coupling device. device. [Prior Art] In the industrial automation test program, Automated Optical Inspection (AOI) is often used to check the surface fatigue of a flat panel display (FPD) such as an LCD panel. Highlights, dark spots and dots. The automatic optical inspection device first uses a charge collection device (Charge Coupled Device (hereinafter referred to as CCD) of an image capture unit to capture one of the detected images of the flat display to be tested, and then compares the detected image to detect the plane to be tested. Does the display have defects? In the prior art, the CCD commonly used in automatic optical inspection equipment is an array CCD. During the image capturing process, the array CCD is moved between a plurality of fixed points along an image capturing path, and a unit detection image is captured for each unit of the capturing range at a certain point. The unit detection images are combined for splicing into a complete detection image for comparison detection. The image capturing unit further includes a lens, which is displayed when the image capturing unit moves to a certain point and stops at the fixed point, and displays the focus on the plane to be tested within the unit capturing range to ensure the early position. The image is detected clearly without loss of focus. However, as manufacturers have increased the level of sophistication required for flaw detection, the sharpness of the detected image must also be increased to meet the high resolution comparison requirements. The current array CCD is not clearly displayed due to its unit 撷 M399319 surface area, and the area of the unit _ range can not be clearly presented. In addition, the image capturing unit spends a certain amount of time at each certain point. ''· The CCD unit can't take a large range and the stomach takes up the re-focusing' and the image manipulation unit proposes a new type of ===== to correct the problem. The image capture image is displayed at a fine speed, and the image is displayed in a clear area. [New content] a In view of the fact that in the prior art, there is a large range of the array, and it is impossible to target the 瑕弋D early 撷 unit at every certain point: the second and the focus, and the image capture problem, this creation The invention proposes a device for sweeping 3 2 slow speeds, whose scanning (four) focus detection image operation uses its linear charge platform to continuously move 'continuous line image; and the time 'scan image capture unit is along with one The platform is t = and then the motor is driven. Due to the fact that in the process of moving the image to a focus image, the capture area is small, so the unit image of the continuous public: port 4 can clearly show the area without defocusing. 1 Image of the detection of the film creation In order to solve the above-mentioned problems of the technology used by the syllabus to solve the above problems, the 4 field-type autofocus detection shadow 4 M399.319 like operation equipment. Scanning automatic material A scanning image capturing unit, a;: 测 image capturing device includes and a focusing motor. Wherein, the sweeping ten-denier/ten-focus tool processing module includes a mirror for the head and the line-type charge image f-taking unit to utilize the line-type charge consumption; placing f^ for a platform to continuously move a plurality of consecutive operations On the continuous line—the object to be tested is auto-focusing processing 槿 fine-grained + earth-moving device to connect the line-type charge-consuming images from the same, and the continuous line type is set to receive the continuous line images. At the same time, the auto-focus operation A detection signal is detected. The focus motor is electrically connected to the =3 focus control to continuously move the platform: two; the vertical focus of the image pickup unit is moved to the - focus position t head edge - and the platform element. The laser source projects a singer'' electrical connection processing single image capturing unit dong L; shooting early 兀; image analysis 曾 匿 ή ή 诼 诼 得 得 至 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该隹Image::3 Receive the laser focus according to the resolution calculation of the library 1 = degree by the calculation unit root according to the focus position to generate the focus control to make the processing unit move, ^^ meaning technology, charge_合The device is relatively flat at the fixed point system: Sighing and squinting image capture, moving in at the same time, and moving continuously: ΐ 自 自 自 自, can make the image acquisition process faster ^ 5 M399319 coupling device, unit capture range Phase and He array charge defocusing results in 'clearness ☆ two' to avoid the detection of 瑕疵 regionality. See u small deficiency 'applicable to high resolution [implementation] This creation is about a detection shadow Illustrated auto-focus detection; refers to a preferred embodiment of the present invention. The following is an example of the art, and is not intended to be used for the purpose of exemplifying the details of the preferred embodiment. As described below, u is itself. In two cases, cr: contains the current focus two maps: one automatic pair; transport t (four) with 4-focus motor f detection module 5. Scanning image capture unit] package two to two A ratio -)] 2, scanning f (= ~ anus C Qing led move, 苴 Φ in,, like the city take early 1 by the translation motor 4 swaying it so that the lens 11 is driven by the focus motor 2. This,駆 analysis f early 31, a laser source 32, an image premature 兀 33, and a calculation unit Ί The processor has a processor, etc., and the number of 31s is the same as that of the operation unit & Αϋ1!' #射光源32, image juice# early 7L 34, all electrical connection processing 6 processing, As early as 31, the pen is connected to the translation motor two motor 2, u do not send the signal control translation 隹, = up to 2 drive scanning image capture unit] and the lens ^4. One week, the focus of the horse is referred to the second picture, For the creation of the f-type AF-based image capture device, please refer to the first picture at the same time. For example, 2 Ί翏Auto/If, Detect image capture device 10 0 More package;: system: ί 】 2 〇 'autofocus operation module 3 processing D analysis unit 33 盥 笞 兀, 兀 3], cedar image set to pay σ 1 ] 〇 placed at least - The image manipulation unit to be tested! It is set at a flat 200' scan type for example, for a liquid crystal display = 2°. S1 to the translation motor 4, the scanning control signal S1 traces the path continuously, and the line type flat t 110 follows a scan image. At the same time, with the body / also get a number of continuous line type mapping beam lV to focus the image and send it to the ^ single take order 7 ^ 1 capture - laser to the continuous line type ί 1 = S combined device 12 receive these The image is combined with the purchase line image into a detection shadow processing unit: then the module 5 is followed by the unit 33 for the shadow; like the Tian Ba's shadow. The image is transmitted to the image analysis operation image, and the clear focus image unit 33 is analyzed and transmitted to the processing unit 31. The processing unit 31 M399319 transmits the sharpness to the computing unit 34. One of the correspondences corresponding to the sharpness calculation: twelve according to the 3]: the processing unit 3" according to the focus position === the chemical number S2, Transfer to the focus motor 2. . . ..., the work focus motor 2 receives the focus control 彳 „ control signal S 2 in the scanning image operation 亚 J according to the continuous focus of the focus, while driving the lens n I / / the platform n 〇 the focus position, By using a clear connection, the local blurring of the detected image is generated, and the platform 110 is perpendicular to the platform 110. The 6-week focal path of the Jiayi is known from the above-mentioned creation embodiment, and the use of the creation is utilized. Value. However, the above implementation ^ 1 to = Ming, the patent in the technical field belongs to the creative spirit of the creation and the definition [simplified description of the drawing] The first picture, the preferred embodiment of the present scanning The function block diagram of the autofocus image capture device; and the schematic diagram of the scan autofocus image capture device in the preferred embodiment of the present invention. [Main component symbol description] Scanning auto focus detection image Capture device 1〇〇 Platform 110 8 M399319 Control computer]20 Object to be tested 200 Scanning image capture unit 1 Lens 11
線型電荷耦合裝置12 調焦馬達2 自動對焦運算模組3 處理單元31 雷射光源32 影像分析運算單元33 計算單元34 平移馬達4 比對檢測模組5 掃描控制信號S1 調焦控制信號S2 雷射光束LB 9Linear charge coupled device 12 Focusing motor 2 Autofocus computing module 3 Processing unit 31 Laser source 32 Image analysis arithmetic unit 33 Calculation unit 34 Translation motor 4 Comparison detection module 5 Scan control signal S1 Focus control signal S2 Laser Beam LB 9