TWI595264B - Microscopy imaging apparatus with angle-adjustable lens - Google Patents

Description

Microscopic image capturing device capable of adjusting the lens in multiple directions

The present invention relates to a system for inspecting conductive particles of an anisotropic conductive paste, and more particularly to a microscopic image taking device for image taking in the system.

The use of anisotropic conductive film (ACF) to assemble a flexible circuit board or wafer onto a liquid crystal panel or printed circuit board has been widely used in the manufacture of liquid crystal panels and printed circuit boards. For example, a tape carrier package (TCP), a chip on film (COF), a chip on glass (COG) that directly assembles a driver wafer to a glass substrate, and a direct wafer A circuit board (COB), etc., which is assembled to a printed circuit board, is mostly performed by an anisotropic conductive paste.

The anisotropic conductive adhesive is composed of conductive particles and insulating rubber material, and has the characteristics of vertical conduction and left and right insulation. However, when the hot pressing process is performed, if the pressure of the anisotropic conductive adhesive is uneven or insufficient, The number of deformable conductive particles that cause conduction is insufficient, resulting in poor conductivity. In addition, when the density distribution of the conductive particles is uneven, the conductivity is also poor. Therefore, in the case of using an anisotropic conductive paste, it is usually necessary to check the state, number and distribution of the conductive particle indentation to determine the conductivity. The Taiwan Patent No. 583403 shows the use for such inspection. An automatic detection system for conductive particle compression.

The system adopts an image inspection technology, which uses an image capturing module with an optical microscope to capture a digital image of a wafer pin that has been pressed, and transmits the digital image to an image processing module for processing. The processing result is used for analysis to determine whether the conductive state of the conductive particles is good. A similar technology can be found in Taiwan Public Publication No. 200910484.

Since the above-mentioned conductive particles are very small, if the lens of the optical microscope is slightly deviated and the area to be imaged on the target is not directly, or the vertical distance between the lens and the image capturing area is slightly insufficient or slightly too large, The image is not clear enough to increase the difficulty of subsequent image processing and the correctness of the analysis. Therefore, it is imperative to provide a new type of microscopic image capturing device that ensures the image resolution is within an acceptable range.

In view of the above, the present invention provides a microscopic image capturing apparatus for taking an image capturing area of a target. The microscopic image capturing apparatus generally includes an x-axis transfer device, and a z-axis transfer device is driven by the x-axis transfer device to be movable along the x-axis, and a laser tracking module is disposed on the z-axis A z-axis carrier on the transfer device and a micro-mirror lens are mounted on the z-axis carrier.

The laser tracking module has a laser displacement detecting module that is facing the image capturing area of the target object; and the microscopic image capturing group has a shooting area of the target facing the object. The laser tracking module is movable along the x-axis by the x-axis transfer device, and detects a vertical distance change between the image capturing area of the object and the lens while moving. The z-axis carrier plate is movable along the x-axis by the x-axis transfer device, and the z-axis transfer device can finely adjust the z-axis carrier plate according to the detection result of the laser displacement detecting module. Height position.

In addition, the laser tracking module further includes a first z-axis adjustment mechanism coupled to the z-axis carrier and an x-axis adjustment mechanism coupled to the first z-axis adjustment mechanism and carrying the laser displacement detector Test module. The first z-axis adjustment mechanism is configured to adjust a position of the laser displacement detecting module on the z-axis, and the x-axis adjusting mechanism is configured to adjust a position of the laser displacement detecting module on the x-axis. . The micromirror group further includes a second z-axis adjustment mechanism coupled to the z-axis carrier and a horizontal angle adjustment mechanism coupled to the second z-axis adjustment mechanism and carrying the microscopic image capture mode group. The second z-axis adjustment mechanism is configured to adjust a position of the micro-image capturing module on the z-axis, and the horizontal angle adjusting mechanism is configured to adjust an angular position of the micro-image capturing module to enable the The focal plane of the lens is parallel to the image capturing area of the target.

Preferably, the microscopic image capturing apparatus further comprises a y-axis transfer device disposed on the z-axis carrier by a y-axis transfer device. The y-axis transfer device includes a board, a set of y-axis rails, a y-axis carrier, and a y-axis drive unit. The seat plate is disposed on the z-axis carrier. The set of y-axis tracks are disposed on the seat plate and extend along the y-axis for a length. The y-axis The carrier plate is slidably disposed on the set of y-axis tracks and carries the microscopic image capturing module. The y-axis driving unit is disposed on the seat plate and is configured to drive the y-axis carrier to move along the set of y-axis tracks.

Preferably, the first z-axis adjustment mechanism comprises a slide and a z-axis adjustment bolt. The carrier is placed face to face against the z-axis carrier. The z-axis adjusting bolt is screwed on the z-axis carrier and abuts against the carrier from bottom to top. The x-axis adjustment mechanism includes a movable plate and two x-axis adjustment bolts. The movable panel is placed face to face on the carrier and carries the laser displacement detecting module. The two x-axis adjusting bolts are respectively screwed on opposite sides of the slide piece and respectively respectively abut against opposite side edges of the movable plate in the x-axis direction.

Preferably, the seat plate of the y-axis transfer device has a first piece and a second piece that are perpendicularly connected to each other. The first piece of the system is abutted against the z-axis carrier. The second z-axis adjustment mechanism includes an adjustment bolt. The adjustment bolt is screwed on the z-axis carrier and abuts from the bottom to the top. The bottom edge of the first sheet.

Preferably, the y-axis carrier has a second surface facing away from the seat plate, and the horizontal angle adjusting mechanism comprises a shaft column, a front and rear swing seat and two adjusting bolts. The shaft is disposed on the surface of the y-axis carrier. The front and rear swinging seats have a first piece and a second piece that are perpendicularly connected to each other. The first piece is abutted against the surface of the y-axis carrier, and the first body has a shaft hole corresponding to the shaft, so that the first body can be the same on the surface. The shaft is swung back and forth. The two adjusting bolts are screwed on the y-axis carrier, wherein an adjusting bolt is located higher than the shaft and is opposite to the upper portion of the front side of the first body, and the position of the other adjusting bolt is lower than The shaft column is pushed against the lower portion of the front side of the first sheet.

Preferably, the horizontal angle adjusting mechanism comprises a left and right swinging seat and two adjusting bolts. The left and right swinging seat carries the microscopic image capturing module and has a shaft block, and the shaft block is mounted in a shaft groove on the second piece of the front and rear swinging seat, so that the left and right swinging seat can be a shaft block Shake left and right for the axis. The two adjusting bolts are screwed on the second piece of the front and rear swinging seats, wherein an adjusting bolt is positioned higher than the shaft block and abuts against an upper portion of one side of the left and right swinging seats, and another adjustment The bolt is positioned lower than the axle block and abuts the lower portion of the side of the left and right swing seats.

1‧‧‧x-axis transfer device

10‧‧‧ long strip

11‧‧‧x-axis orbit

12‧‧‧x axle carrier

13‧‧‧x-axis drive unit

13a‧‧‧stator

13b‧‧‧ mover

2‧‧‧z-axis transfer device

20‧‧‧z axis orbit

21‧‧‧z axle carrier

22‧‧‧z-axis drive unit

220‧‧‧Servo motor

3‧‧‧Laser tracking module

30‧‧‧Laser Displacement Detection Module

31‧‧‧Laser adjustment components

32‧‧‧First z-axis adjustment mechanism

320‧‧‧ slides

321‧‧‧z axis adjustment bolt

322‧‧‧ §

323‧‧‧ wing

324‧‧‧Long guide hole

325‧‧‧ Guide

326‧‧‧

327‧‧‧Long class hole

328‧‧‧ Guide bolt

33‧‧‧x-axis adjustment mechanism

330‧‧‧ activity board

331‧‧‧x axle adjustment bolt

332‧‧‧ §

336‧‧‧ lead

337‧‧‧Long guide hole

4‧‧‧y-axis transfer device

40‧‧‧ seat board

400‧‧‧ first piece

401‧‧‧Second body

41‧‧‧y-axis orbit

42‧‧‧y axle carrier

43‧‧‧y-axis drive unit

43a‧‧‧ Stator

43b‧‧‧ mover

5‧‧‧Microscope image group

50‧‧‧Microscopic image capture module

501‧‧‧ lens

51‧‧‧Mirror adjustment components

52‧‧‧Second z-axis adjustment mechanism

520‧‧‧Adjustment bolt

521‧‧‧ board

522‧‧‧ §

523‧‧‧ Guide bolt

524‧‧‧Long guide hole

53‧‧‧Horizontal angle adjustment mechanism

530‧‧‧ shaft column

531‧‧‧ swinging seat

531a‧‧‧first body

531b‧‧‧Second body

531c‧‧‧Axis hole

531d‧‧‧ shaft slot

532‧‧‧ pedestal

533‧‧‧Adjusting bolts

534‧‧‧ §

535‧‧‧Arc-shaped guide holes

535a‧‧‧Tip

Swinging seat around 536‧‧

536a‧‧‧Upper board

536b‧‧‧ lower board

536c‧‧‧立板

536d‧‧‧ axle block

537‧‧‧Adjustment bolt

538‧‧‧ §

539‧‧‧ pedestal

540‧‧‧Support bolt

541‧‧‧Arc-shaped guide holes

8‧‧‧ Targets

80‧‧‧ wafer

801‧‧‧ first half

The second half of 802‧‧

9‧‧‧Adsorption platform

The first figure is a perspective exploded view of the microscopic image capturing apparatus of the present invention.

The second drawing is a partially enlarged schematic view showing the three-dimensional structure of the microscopic image capturing apparatus of the present invention.

The third drawing is a front view of the microscopic image taking apparatus of the present invention.

The fourth drawing is a side view of the microscopic image taking apparatus of the present invention.

The fifth figure is a path diagram of the scanning and imaging of a substrate by the microscopic image capturing apparatus of the present invention.

Figure 6 is a perspective exploded view of the laser adjustment assembly of the microscopic image taking device of the present invention.

The seventh figure is a three-dimensional structure diagram of a laser focusing module and an adjusting component thereof of the microscopic image capturing apparatus of the present invention.

The eighth drawing is a front view of the laser focusing module of the microscopic image capturing apparatus of the present invention and its adjusting assembly.

The ninth drawing is a perspective exploded view of the microscopic image taking group of the microscopic image capturing apparatus of the present invention and its adjusting assembly.

The tenth drawing is a schematic view showing the three-dimensional structure of the microscopic image taking group of the microscopic image capturing apparatus of the present invention and its adjusting assembly.

The eleventh drawing is a perspective exploded view of the adjustment assembly of the microscopic image taking lens set of the microscopic image capturing apparatus of the present invention.

Twelfth is a schematic perspective view showing the adjustment structure of the microscopic image taking lens set of the microscopic image capturing apparatus of the present invention.

Figure 13 is a partial side elevational view of the adjustment assembly of the microscopic image taking set of the microscopic image taking device of the present invention.

Figure 14 is a partial front elevational view of the adjustment assembly of the microscopy lens assembly of the microscopic image taking device of the present invention.

The first figure shows a preferred embodiment of the microscopic image capturing apparatus of the present invention, which comprises a laser tracking module 3 and a microscopic lens assembly 5, and the two are shown in the second figure. Target 8 is subjected to microscopic imaging.

As shown in the second figure, in this example, the target 8 is a liquid crystal panel placed on an adsorption stage 9, which is held by the adsorption stage 9 and fixed, and its adjacent one The long side and a short side protrude from the outside of the adsorption stage 9. The liquid crystal panel also has There are a plurality of wafers 80 which are hot pressed onto the liquid crystal panel by chip on glass (COG), that is, using an anisotropic conductive film (ACF). a plurality of conductive metal pads (not shown) on a top surface, wherein a wafer 80 is adjacent to and parallel to the short side of the liquid crystal panel, and the remaining wafers 80 are adjacent to the long side of the liquid crystal panel and are parallel Arranged in a straight line on the long side. It should be noted that the number of wafers 80 corresponding to each side is not limited to the foregoing.

A bottom surface of the object 8 further has a plurality of image capturing regions. In this example, each of the image capturing regions is located just below the respective wafers 80, and each of the image capturing regions is substantially the same size as the corresponding wafer. The bottom surface area of 80. Since the wafers 80 occupy a transparent portion of the liquid crystal panel, the image capturing regions of the microscopic image capturing module 50 of the microscopic image capturing lens group 5 can be imaged by using a lens 501 of the microscopic image capturing module 50. . The obtained image data can show the indentation caused by the conductive particles of the anisotropic conductive paste on the conductive metal pad. The image data is then transmitted to an image analysis judging unit (not shown) for image processing and analysis, and the quality of the conductive connection between each wafer 80 and the corresponding conductive metal pad is determined based on the analysis result. The type and quantity of the items referred to by the target 8 are not limited to the liquid crystal panel. For example, one or more circuit boards or other types of articles may be respectively placed on one or more adsorption stages 9 .

As shown in the third and fourth figures, both the laser tracking module 3 and the micro-mirror group 5 have been manually adjusted to obtain a clear image of the object 8 by its own adjustment mechanism (described later in detail). Position (clear image capture means that the captured image clarity is within an acceptable range), and the target 8 has been rotated by the rotation of the adsorption stage 9 such that its long side is indeed parallel to the microscopic take Like the movement path of the mirror group 5. The laser tracking module 3 is capable of moving along the x-axis and detecting a change in the vertical distance between the image capturing area of the object 8 and the lens 501 while moving. The micro-mirror group 5 can move along the x-axis along with the laser-tracking module 3, and can detect the result of the laser-detecting module 30 according to the laser-tracking module 3, and the mine The shot tracking module 3 finely adjusts the height position along the z axis so that the lens 501 of the micro image capturing module 50 and the laser displacement detecting module 30 are always in the same position when moving along the x axis. The object 8 is clearly positioned to ensure that the sharpness of the captured image meets the requirements. Thus, even if the image capturing area of the object 8 has irregularities such that the vertical distance (focal length) between the lens 501 and the image capturing area is slightly insufficient or slightly too large, the laser displacement detecting mode can be used. The group 30 is detected, and the height position of the laser tracking module 3 and the micro-mirror group 5 is finely adjusted according to the detection result, so that the vertical distance between the lens 501 and the image capturing area is The (focal length) is maintained at a predetermined value to ensure that the laser displacement detecting module 30 and the lens 501 can still clearly image the object 8 there.

As shown in the third and fifth figures, when the lens 501 at an original position moves from the point A to the end point B as the micro-mirror group 5 moves, the micro-image capturing module 50 passes through the lens 501. The line scan acquires image data of each of the image capturing areas (i.e., the bottom surface of each wafer 80) adjacent to the long side of the object 8, and transmits them to the image analysis judging unit. In this example, since the image capturing range of the lens 501 is small, the obtained image data is only the image of the front half 801 of the image capturing area, and therefore, the microscopic image capturing lens group 5 also has a movement along the y axis. Capability, when the lens 501 reaches the end point B, the micro-mirror group 5 is moved forward slightly relative to the laser-tracking module 3 (ie, moving toward the adsorption stage 9) so that the lens 501 is along the y-axis. Move forward to enable the image capture range to cover the second half 802 of the capture zones. Next, the micro-mirror group 5 is moved in the opposite direction along the x-axis, so that the lens 501 is moved from the end point B to the starting point A. During the movement, the micro-image capturing module 50 is scanned by the lens 501. The image data of the second half 802 of each image capturing area adjacent to the long side of the object 8 is obtained by the aiming method, and transmitted to the image analysis judging unit. When the lens 501 returns to the starting point A, the micro-mirror group 5 is slightly moved backward relative to the laser-tracking module 3 to move the lens 501 back in the y-axis back to the original position. Up to this point, the microscopic image capturing apparatus of the present invention completes the microscopic image capturing operation of the image capturing area adjacent to the long side of the object 8. In this example, after the lens 501 returns to the original position, the adsorption stage 9 is rotated by 90 degrees so that the image capturing area adjacent to the short side of the target 8 is located in the positive direction of the laser displacement detecting module 30 and the lens 501. Above, the microscopic image capturing apparatus of the present invention performs microscopic image capturing operation on the image capturing area adjacent to the short side of the object 8, which is substantially the same as the foregoing, and is not described herein.

As can be seen from the above description, the laser tracking module 3 and the micro-mirror group 5 have the ability to move along the x-axis and move along the z-axis together, and the micro-mirror group 5 also has a separate y-axis. The ability to move. The laser tracking module 3 and the micro-mirror lens group 5 move together along the x-axis to enable the lens 501 to acquire the image data of the image capturing area of the object 8 in a scanning manner according to a predetermined route. The micro-mirror lens group 5 itself moves along the y-axis in order to change the area covered by the image capturing range of the lens 501, which is a function required when the image capturing range of the lens 501 is small, and is not necessary. As for the laser tracking module 3 and the micro-mirror group 5 moving along the z-axis, it is to adjust the height position of the two at any time, so that the lens 501 can be kept clear to the target 8 during the movement. Take the location of the image. The following further illustrates that the laser tracking module 3 and the micro-mirror group 5 can be implemented as described above. A preferred embodiment of the mobility capability, but not limited thereto.

As shown in the first figure, the microscopic image capturing apparatus of the present invention further includes an x-axis transfer device 1, a z-axis transfer device 2 driven by the x-axis transfer device 1 and movable along the x-axis, and A y-axis transfer device 4 that is driven by the z-axis transfer device 2 to move up and down along the z-axis. The z-axis transfer device 2 carries the laser tracking module 3, and the y-axis transfer device 4 carries the micro-mirror group 5. However, the micro-mirror group 5 can also be selected to be carried directly by the z-axis transfer device 2, in which case the y-axis transfer device 4 is not required.

The x-axis transfer device 1 can be selected from the configuration shown in the first figure, and includes a long seat 10, a set of x-axis rails 11 are attached to the elongated base 10 and extend along the x-axis for a length, an x-axis. The carrier 12 is slidably disposed on the x-axis rail 11 and an x-axis driving unit 13 is attached to the elongated base 10 and connected to the x-axis carrier 12. Preferably, the x-axis drive unit 13 can be selected from existing linear motors. The stator 13a of the linear motor is shown in Figs. 4 and 4, and the mover 13b slid in the stator 13a is connected to the x-axis carrier 12. Thus, the x-axis driving unit 13 can drive the x-axis carrier 12 to move left and right along the x-axis rail 11.

The z-axis transfer device 2 can be selected from the configuration shown in the first figure, and includes a set of z-axis rails 20 which are arranged on the x-axis carrier 12 and extend along the z-axis for a length, and a z-axis carrier 21 can be A z-axis drive unit 22 is slidably disposed on the z-axis rail 20 and on the x-axis carrier 12. Preferably, the z-axis drive unit 22 can be selected from existing products, such as a conventional servo drive module including a servo motor 220 and a set of precision lead screw mechanisms (not shown). Thus, the z-axis drive unit 22 can drive the z-axis carrier 21 to move up and down along the z-axis track 20.

The laser focusing module 3 and the micro-mirror group 5 are disposed on the z-axis carrier 21, and the z-axis carrier 21 is slidably disposed on the x-axis carrier 12, and thus is driven by the x-axis driving unit 13. Next, the laser tracking module 3, the micro-mirror group 5 and the z-axis carrier 21 can move together along the x-axis, as shown in the third figure, driven by the z-axis driving unit 22, the laser The chasing module 3 and the micro-mirror group 5 can move up and down along the z-axis together, as shown in the fourth figure.

The micro-mirror group 5 can be selectively connected directly to the z-axis carrier 21, preferably via a y-axis transfer device 4 to the z-axis carrier 21. The y-axis transfer device 4 can be selected from the configuration shown in the first figure, and includes a plate 40 attached to the z-axis carrier 21, and a set of y-axis rails 41 attached to the seat plate 40 and extending along the y-axis. The length, a y-axis carrier plate 42 is slidably disposed on the y-axis track 41, and a y-axis drive unit 43 is attached to the seat plate 40 and connected to the y-axis carrier. Board 42. Preferably, the y-axis driving unit 43 can select an existing linear motor. The stator 43a of the linear motor shown in the first and third figures is fixed on the seat plate 40 and extends along the y-axis for a length, and is slid in the stator 43a. The sub-43b is connected to the y-axis carrier 42. In this way, the y-axis driving unit 43 can drive the y-axis carrier 42 to move back and forth along the y-axis track 41, so that the micro-mirror group 5 disposed on the y-axis carrier 42 moves back and forth, thereby enabling the lens 501 to The laser displacement detecting module 30 moves back and forth along the y axis.

In order to enable the laser tracking module 3 and the micro-mirror group 5 to be manually and quickly adjusted to the position where the object 8 can be clearly imaged by its own adjustment mechanism, as shown in the sixth to eighth images, the laser The tracking module 3 further includes a laser adjustment component 31. As shown in the ninth through eleventh, the microscopy lens assembly 5 further includes a lens adjustment assembly 51.

6 to 8 show a preferred embodiment of the laser adjustment assembly 31, which is provided on the z-axis carrier 21 with a first z-axis adjustment mechanism 32 and on the first z-axis adjustment mechanism 32. An x-axis adjustment mechanism 33 carrying the laser displacement detecting module 30 is provided.

The first z-axis adjustment mechanism 32 is configured to adjust the vertical displacement of the laser displacement detecting module 30 relative to the z-axis carrier 21. In this example, the first z-axis adjustment mechanism 32 selects the configuration shown in the drawing, which includes at least one slide 320, two z-axis adjustment bolts 321 (may also be one or more), and one stop. Pieces 322. The carrier 320 is abutted against the z-axis carrier 21 facing each other, and the two z-axis adjusting bolts 321 are respectively screwed on opposite sides of the z-axis carrier 21 and respectively abut the carrier 320 from the bottom to the top, preferably The two z-axis adjusting bolts 321 are screwed on the two side plates 210 of the z-axis carrier 21 and abut against the side flaps 323 of the carrier 320. The stop member 322 is secured to the z-axis carrier plate 21 through an elongate member aperture 327 of the carrier sheet 320 for retaining the carrier sheet 320 so that it remains in abutment without detachment. Thus, when the two z-axis adjustment bolts 321 are rotated, the slide piece 320 can be moved up or down in the z-axis direction. The first z-axis adjustment mechanism 32 further includes a plurality of guide pins 328 and two guide plates 325. The guide pins 328 are disposed on the z-axis carrier 21 and are respectively located corresponding to the slides 320. The plurality of guide plates 325 are disposed on the z-axis carrier plates 21 and abut the opposite sides of the carrier 320, respectively.

The x-axis adjustment mechanism 33 is configured to adjust the left and right movement of the laser displacement detecting module 30 with respect to the z-axis carrier 21. In this example, the x-axis adjustment mechanism 33 selects the configuration shown in the drawings, which includes at least one movable plate 330, two x-axis adjustment bolts 331, and two stops 332 (may also be one or more). The movable plate 330 is placed face to face on the slide 320, and the two x-axis adjusting bolts 331 The two x-axis adjusting bolts 331 are screwed on the opposite side plates 326 of the carrier 320, and are respectively screwed on opposite sides of the carrier 320 and respectively abutted against the left side and the right side of the movable plate 330. The top is abutted against the left side and the right side of the middle portion of the movable panel 330. The stop member 332 is fixed to the carrier 320 for blocking the movable plate 330 so that it remains in contact without being detached. In this way, the left x-axis adjusting bolt 331 is rotated by one hand to push it to the right side of the movable plate 330, and the other hand reversely rotates the right x-axis adjusting bolt 331 to retreat to the right, so that the movable plate 330 can be made. move to the right. The action of adjusting the movement of the movable plate 330 to the left is similar to that described above, except that the operation of rotating the two x-axis adjusting bolts 331 is reversed, and will not be described again. In order to ensure that the movable plate 330 can move horizontally to the left and right, the x-axis adjusting mechanism 33 further includes a plurality of guiding pins 336 disposed on the slide 320 and corresponding to the plurality of lateral long guides located on the movable plate 330 respectively. Inside the hole 337.

As shown in the eighth figure, the slide 320 can be moved up and down by rotating the two adjustment bolts 321 to move the laser displacement detecting module 30 up and down to a desired height position. The movable plate 330 can be displaced to the left and right by rotating the two adjusting bolts 331 to move the laser displacement detecting module 30 to the left and right to the desired position.

9 to 10 show a preferred embodiment of the lens assembly assembly, comprising a second z-axis adjustment mechanism 52 disposed on the z-axis carrier 21 and a horizontal angle adjustment mechanism disposed on the y-axis carrier 42 53. The second z-axis adjustment mechanism 52 is used to adjust the height position of the micro image capturing module 50. The horizontal angle adjusting mechanism 53 carries the microscopic image capturing module 50 for adjusting the microscopic image capturing module 50 such that its focal plane is parallel to the image capturing area of the object 8.

In this example, the seat plate 40 of the y-axis transfer device 4 has a first piece 400 and a second piece 401 which are formed integrally and perpendicularly to each other. The first piece 400 is placed face to face against the z-axis. On the board 21.

In this example, the second z-axis adjustment mechanism 52 selects the configuration shown in the drawings, which includes at least one adjustment bolt 520 (may also be multiple) and a stop 522. The adjusting bolt 520 is screwed on a bolt plate 521 of the z-axis carrier 21 and abuts against the bottom edge of the first sheet 400 from bottom to top. The flap 522 blocks one side of the first body 400 such that it remains in abutment and does not disengage. Thus, the height position of the y-axis transfer device 4 and the micro-image capturing module 50 can be adjusted together by simply rotating the adjusting bolt 520. In order to ensure that the seat plate 40 can move vertically up and down, the z-axis adjustment mechanism 52 further includes a plurality of guide pins 523 disposed on the z-axis carrier 21 and corresponding to the first piece of the seat plate 40, respectively. A plurality of turns of the body 400 are in the long guide holes 524.

As shown in the eleventh and twelfth drawings, in this example, the horizontal angle adjusting mechanism 53 selects the configuration shown in the drawing, which includes at least a front and rear swinging seat 531, two adjusting bolts 533, and a stopper 534. The front and rear swinging seats 531 have a first body 531a and a second body 531b which are perpendicular to each other. The first body 531a is abutted against and pivoted on the y-axis carrier 42. Preferably, the first The body 531a has a shaft hole 531c corresponding to a shaft column 530 disposed on the y-axis carrier 42 so that the front and rear swing seats 531 can swing back and forth with the shaft 530 as an axis. A stopper 534 is provided on the y-axis carrier 42 for blocking one side of the first body 531a so that it remains in contact without being detached. The two adjusting bolts 533 are screwed on the y-axis carrier plate 42, for example, corresponding to the bolt seat 532 which is screwed on the front side of the y-axis carrier plate 42. One of the adjusting bolts 533 is located higher than the shaft post 530 (ie, the rotating shaft center of the first sheet body 531a), and the other adjusting bolt 533 is positioned lower than the shaft post 530 for respectively pushing against the first sheet body 531a. The upper and lower sides of the side are used to adjust the front and rear swinging seats 531 to swing back and forth. As shown in the thirteenth figure, when the higher adjustment bolt 533 is rotated by one hand and moved forward and pushed against the first piece 531a, the other hand reversely rotates the lower adjustment bolt 533 to move it backward, The front and rear swinging seats 531 can be swung forward with the shaft 530 as an axis. As for the adjustment of the swinging seat 531 backward and backward, the action of swinging backward is similar to that described above, and the only difference is that the operation of rotating the two adjusting bolts 533 is reversed, and will not be described again. Therefore, the micro image capturing module 50 can be adjusted to swing forward to the desired angular position by rotating the two adjusting bolts 533. In order to ensure that the front and rear swinging seats 531 can smoothly swing back and forth, the horizontal angle adjusting mechanism 53 further includes a plurality of guiding bolts 535a, which are disposed on the y-axis carrier 42 and respectively corresponding to the first body 531a. A plurality of curved guide holes 535 are included.

The horizontal angle adjusting mechanism 53 further includes a left and right swinging seat 536, two other adjusting bolts 537, and two blocking members 538 (which may also be one or more). The left and right swinging seats 536 have an upper plate 536a, a lower plate 536b and a vertical plate 536c. The upper and lower sides of the vertical plate 536c are respectively connected to the upper and lower plates 536a and 536b, and the upper and lower plates 536a and 536b are connected to the microscopic image capturing module 50. The vertical plate 536c abuts against the second plate 531b of the front and rear swinging seats 531 and has a shaft block 536d. The shaft block 536d is mounted in a shaft groove 531d on the second body 531b, so that the left and right swinging seats 536 can The shaft block 536d is pivoted left and right. The blocking member 538 is disposed on the second piece 531b for blocking one side of the vertical plate 536c so as to remain in abutment and not to be disengaged. The other two adjusting bolts 537 are screwed to the second plate body 531b of the front and rear swinging seats 531, for example, correspondingly to the two bolt seats 539 which are provided on one side of the second piece body 531b of the front and rear swinging seats 531. One of the adjustment bolts 537 The position of the other adjusting bolt 537 is lower than that of the shaft block 536d, and is corresponding to the upper and lower portions of the right side of the vertical plate 536c, thereby adjusting the left and right swings. Block 536 swings left and right. As shown in Fig. 14, when the upper adjusting bolt 537 is rotated by one hand and moved to the left and pushed to the upper side of the right side of the vertical plate 536c, the other hand reversely rotates the lower adjusting bolt 537 to move it backward. The left and right swinging seats 536 can be swung leftward about the shaft block 536d. As for the action of adjusting the left and right swinging seats 536 to the right, the difference is only that the action of rotating the two adjusting bolts 537 is reversed, and will not be described again. Therefore, the micro image capturing module 50 can be adjusted to swing to the left or right to the desired angular position by rotating the two adjusting bolts 537. In order to ensure that the left and right swinging seats 536 can swing smoothly to the left and right, the horizontal angle adjusting mechanism 53 further includes a plurality of guiding bolts 540, and the guiding bolts 540 are disposed on the second body 531b of the front and rear swinging seats 531 and respectively corresponding to the standing The plurality of arcuate guide holes 541 of the plate 536c.

As can be seen from the above description, the microscopic image capturing apparatus of the present invention can perform microscopic image capturing of the target object 8 by the laser focusing module 3 and the microscopic image capturing lens group 5, and can perform the above image capturing operation. Before, the position of the laser displacement detecting module 30 in the x-axis direction and the position in the z-axis direction are manually adjusted by the two adjusting mechanisms of the two, and then the microscopic image capturing mode is quickly adjusted. The position of the group 50 in the z-axis direction and the horizontal angular position, so that the laser displacement detecting module 30 and the lens 501 of the microscopic image capturing module 50 can be positioned at an appropriate height, and the microscopic image can be captured. The focal plane of the lens 501 of the module 50 is parallel to the imaging area of the target 8, thereby ensuring that the sharpness in the microscopic image is within an acceptable range.

In any event, anyone can obtain sufficient teaching from the description of the above examples, and it is understood that the present invention is indeed different from the prior art, and is industrially usable and progressive. It is the invention that has indeed met the patent requirements and has filed an application in accordance with the law.

1‧‧‧x-axis transfer device

12‧‧‧x axle carrier

13‧‧‧x-axis drive unit

13a‧‧‧stator

13b‧‧‧ mover

2‧‧‧z-axis transfer device

20‧‧‧z axis orbit

21‧‧‧z axle carrier

22‧‧‧z-axis drive unit

220‧‧‧Servo motor

3‧‧‧Laser tracking module

30‧‧‧Laser Displacement Detection Module

4‧‧‧y-axis transfer device

40‧‧‧ seat board

41‧‧‧y-axis orbit

42‧‧‧y axle carrier

43‧‧‧y-axis drive unit

43a‧‧‧ Stator

43b‧‧‧ mover

5‧‧‧Microscope image group

50‧‧‧Microscopic image capture module

501‧‧‧ lens

Claims (7)

A microscopic image capturing device for taking an image capturing area of a target and including an x-axis transfer device, and a z-axis transfer device is driven by the x-axis transfer device along the x-axis a laser, a laser tracking module is disposed on a z-axis carrier of the z-axis transfer device, and a micro-mirror lens assembly is disposed on the z-axis carrier; the laser tracking mode The group has a laser displacement detecting module, which is facing the image capturing area of the target, the microscopic image capturing group includes a microscopic image capturing module, and the microscopic image capturing module has a lens The image capturing area of the target object; the laser tracking module is movable along the x axis by the x-axis transfer device, and detects the image capturing area of the target while moving a vertical distance change between the lenses; the z-axis carrier plate together with the laser tracking module and the micro-mirror lens group are movable along the x-axis by the x-axis transfer device, the z The axis transfer device can finely adjust the height position of the z-axis carrier according to the detection result of the laser displacement detecting module, so that the laser focusing module and the micro-mirror group thereon are also Synchronize When the microscopic image capturing module and the laser displacement detecting module move synchronously along the x-axis to image the image capturing area of the target, the lens of the microscopic image capturing module is The vertical distance between the image capturing areas of the target is maintained at a predetermined value, wherein the laser tracking module further includes a first z-axis adjusting mechanism coupled to the z-axis carrier and an x-axis The adjusting mechanism is disposed on the first z-axis adjusting mechanism and carries the laser displacement detecting module, wherein the first z-axis adjusting mechanism is configured to adjust a position of the laser displacement detecting module on the z-axis. The x-axis adjustment mechanism is configured to adjust a position of the laser displacement detecting module on the x-axis; and The micromirror group further includes a second z-axis adjustment mechanism coupled to the z-axis carrier, and a horizontal angle adjustment mechanism coupled to the second z-axis adjustment mechanism and carrying the microscopic image capture a second z-axis adjustment mechanism for adjusting a position of the microscopic image capturing module on the z-axis, wherein the horizontal angle adjusting mechanism is configured to adjust an angular position of the microscopic image capturing module. So that the focal plane of the lens is parallel to the image capturing area of the target. The microscopic image capturing apparatus according to claim 1, comprising a y-axis transfer device, wherein the micro-mirror lens set is disposed on the z-axis carrier by a y-axis transfer device, The y-axis transfer device comprises: a plate disposed on the z-axis carrier; a set of y-axis tracks disposed on the seat plate and extending along the y-axis for a length; a y-axis carrier slidable Positioning on the set of y-axis tracks and carrying the microscopic image capturing module; and a y-axis driving unit is disposed on the seat plate and configured to drive the y-axis carrier to move along the set of y-axis tracks . The microscopic image capturing apparatus of claim 1 or 2, wherein the first z-axis adjustment mechanism comprises: a carrier that faces the z-axis carrier plate face to face; and a z-axis adjustment a bolt is disposed on the z-axis carrier and abuts against the carrier from bottom to top; wherein the x-axis adjustment mechanism comprises: a movable plate that is placed face to face on the carrier and carries the lightning Shooting displacement detection module; and Two x-axis adjusting bolts are respectively screwed on opposite sides of the slide piece and respectively respectively abut against opposite sides of the movable plate in the x-axis direction. The dynamic microscopic image capturing apparatus of claim 2, wherein the seat plate of the y-axis transfer device has a first piece and a second piece that are perpendicularly connected to each other, the first piece system Facing the z-axis carrier plate face-to-face, the second z-axis adjustment mechanism includes an adjustment bolt, and the adjustment bolt is screwed on the z-axis carrier plate and abuts against the first body from bottom to top. Bottom edge. The dynamic microscopic image capturing apparatus of claim 4, wherein the y-axis carrier has a second sheet having a surface facing away from the seat plate, the horizontal angle adjusting mechanism comprising: a shaft column disposed at On the surface of the y-axis carrier; a front and rear swinging seat having a first body and a second body perpendicularly connected to each other, the first piece of the system facing the surface of the y-axis carrier facing the surface And the first piece has a shaft hole corresponding to the shaft column, so that the first piece can swing back and forth on the surface with the shaft as an axis; and two adjusting bolts are screwed on the y-axis a position of one of the adjusting bolts is higher than the shaft column and is opposite to the upper portion of the front side of the first sheet body, and the position of the other adjusting bolt is lower than the shaft column and is pushed against the first sheet body The lower part of the front side. The dynamic microscopic image capturing apparatus of claim 5, wherein the horizontal angle adjusting mechanism comprises: a left and right swinging seat, which carries the microscopic image capturing module and has a shaft block, the shaft block is installed The left and right swing seats are swingable left and right with the shaft block as an axis in a shaft groove on the second piece of the front and rear swinging seats; Two adjusting bolts are screwed on the second piece of the front and rear swinging seats, wherein an adjusting bolt is positioned higher than the axle block and abuts against an upper portion of one side of the left and right swinging seats, and another adjustment The bolt is positioned lower than the axle block and abuts the lower portion of the side of the left and right swing seats. A microscopic image capturing device for taking an image capturing area of a target and comprising a laser focusing module and a microscopic image capturing lens group; the laser focusing module has a laser The displacement detecting module is facing the image capturing area of the target, the microscopic image capturing group has a lens facing the image capturing area of the target; the laser tracking module can move along the x axis And detecting a vertical distance change between the image capturing area of the target and the lens while moving; the microscopic image capturing group can move along the x axis together with the laser displacement detecting module, And can move along the y-axis separately, and according to the detection result of the laser displacement detecting module, fine-tune the height position along the z-axis together with the laser displacement detecting module, so that the micro-mirror group The distance between the lens and the image capturing area of the object is maintained at a predetermined value at any time.