M37457U 五、新型說明： it 【新型所屬之技術領域】 更詳而言之係指一種 本創作係與基板測試機構有關 轉盤式基板測試機構。 【先前技術】 專利公告苐5 4 8 413號「基板檢 係揭露於-旋轉桌上依預定間隔 /保持裝置，用以穩固地保持被檢查基板，龙 ==驅動裳置驅動旋轉桌旋轉，使該旋轉桌上之基 板保持裝置上之被檢查基板㈣序能帶彳丨至-搬入位置、 -位置偏差檢測位置一檢純置及—搬纽置，以由設 置於搬入位置上之i人裝置，將被檢查基板搬移至位在 搬入位置之基板保持I置上，而由設置於位置偏差檢測位 置上之—位置偏差檢測裝置，對位於此—位置之被檢查基 板之位置騎位置偏差量之㈣，再由設置於檢查位置之 一檢查裝置，對位於檢查位置之被檢查基板配線進行檢查 作業，再由位於搬出位置之一搬出裝置將位於搬出位置之 被檢查基板進行搬離旋轉點之作業，藉以由旋轉桌於搬入 位置、位置偏差檢測位置、檢查位置與搬出位置間之分段 旋轉’而能持續地進行基板之測試作業。 然而，上述之機構必須將搬入位置及搬出位置分別獨 立為一區域，即旋轉桌除位置偏差位置及檢查位置外，更 M374570 必須停靠於搬入位置及搬出位置上，而愈多位置之停靠則 必然使機構上之設計更為複雜、製造成本更為高昂。况且， 由於搬入位置及搬出位置分別位於獨立之區域上，因此旋 轉桌旋轉一圈（對單一基板進行搬入、偏差量量測、配線 檢查、搬出）之時間則相對較長’自然有著測試效率不張 之問題。再者，必須於搬入位置及搬出位置分別設置不同 作用之搬入裝置及搬出裝置亦必須增加製造上之成本。因 此如何更有效率地進行基板測試及減少機構之成本與複雜 • 度，便為目前業界所需解決之課題。 【新型内容】 有鑑於此，本創作之主要目的乃在提供一種轉盤式其 板測試機構，係能有效增進測試基板之效率。 本創作之另一主要目的乃在提供一種轉盤式基板測試 機構，係能有效減少所需之構件，以減低製造成本支出。 # 緣此，本創作乃提供一種轉盤式基板測試機構，包含 有一旋轉桌具有至少三依等間距設置之開孔，能進行圓周 運動，且該圓周運動能經過一進、出料位置、一對位位置 及一電測位置、一置板平台係設置於進、出料位置上，並 位於該轉桌下方，供複數個基板放置、至少三組基板失臂， 係分別依等間距設置於旋轉桌上，並能進行開啟狀態及夾 合狀態間之移動；複數载料架，係供基板放置者、一進料 吸盤組件，係可依預定路徑移動並於進、出料位置進行進 M374570 料作業、-出料吸盤組件，係可依預定路徑移動並於進、 ㈣位置進行出料作業、-CCD對位檢測裝置，係設置於 對位位置上，用以對位於對位位置之基板進行取像以計算 位置偏差值、一基板電測裝置，係設置於電測位置上用 以對位於電測位置之基板進行接觸式測試，以判讀該基板 為正常基板或不正常基板；藉以增進測試基板之效率。 【實施方式】 鲁 為使貴審查委貝能對本創作之特徵與特點有更進一 步之了解與認同，茲列舉以下較佳實施例並配合圖式說明 如下： 請參閱第一圖至第五圖，係本創作一較佳實施例所提 供一種轉盤式基板測試機構1 〇 〇，其主要包含有一旋轉 桌1 0、至少三組基板夾臂2 0、一旋轉桌驅動裝置（圖 中未示）、一置板平台3 0、一進料吸盤組件4 0、一出料 • 吸盤組件5 0、複數個載料架6 0、一 CCD對位檢測裝置 7 0及一基板電測裝置8 〇 ;其中： • 凊參閱第一圖’該旋轉桌10係設置於一旋轉轴11 上’且該旋轉桌1 0之周邊形成至少三等間距、以同一圓 心排列設置之開孔1 2。 請參閱第一圖，該等基板夾臂2 0係依等間距、等角 度設置於該旋轉桌1 0之周邊位置上’用以夾持一基板， 且該等基板夾臂2 〇係分別正位於開孔1 2上方。 JVU/4570 請參閱第一圖，該旋轉桌驅動裝置係用以驅動該旋轉 軸1 1進行同一圓心之圓周運動，使該旋轉桌i 〇至少能 於一進、出料位置、一對位位置及一電測位置進行預定時 間之停靠，且於該進、出料位置、對位位置及電測位置進 行預定時間停靠時，該旋轉桌i 〇上之該等基板失臂2 〇 係恰正位於該進、出料位置、對位位置及電測位置上。 請參閱第二圖，該置板平台3 〇 ,係設置於該進、出 料位置上，並位於該旋轉桌X 〇下方，用以供複數待測試 基板依序平放者。 請參閱第二圖，該進料吸盤組件4〇，係設置於進、 出料位置上’可沿-預定之路徑移動，並能藉由真空吸力 加以吸附基板者。 請參閱第二圖，該出料吸盤組件5 〇，係設置於進、 出料位置上’可沿-預定之路徑移動，並能藉由真空吸力 加以吸附基板者。 # 請參閱第一圖， - 入料位置上，並位方 5 0之移動路徑上， y圖，該等載料架60,係設置於鄰近該進、 並位於該進料吸盤組件4 0與出料吸盤組件 置之載料架、供測試完成且為不正 請參閱第- 可界m戟完成且為正t基板放 正常基板放置之載料架。M37457U V. New description: it [New technical field] In more detail, it refers to a rotating substrate test mechanism related to the substrate testing organization. [Prior Art] Patent Publication No. 5 4 8 413 "The substrate inspection system is exposed on a rotating table according to a predetermined interval/holding device for stably holding the substrate to be inspected, and the dragon == driving the skirt to drive the rotating table to rotate, so that The substrate to be inspected on the substrate holding device of the rotating table can be brought to the loading position, the positional deviation detecting position, the detecting position, and the holding position, so as to be installed by the loading device. The substrate to be inspected is moved to the position where the substrate is placed in the loading position, and the positional deviation detecting device disposed at the positional deviation detecting position is positioned to offset the position of the substrate to be inspected at the position. (4) The inspection device is installed at one of the inspection positions to inspect the inspection substrate wiring at the inspection position, and the substrate to be inspected at the carry-out position is moved away from the rotation point by the carry-out device at the carry-out position. The substrate can be continuously measured by the rotation of the rotating table at the loading position, the position deviation detecting position, and the inspection position and the carrying position. However, the above-mentioned mechanism must separate the loading position and the unloading position into one area, that is, the rotating table except the position deviation position and the inspection position, the M374570 must be docked at the loading position and the moving out position, and the more positions are docked. Inevitably, the design of the mechanism is more complicated and the manufacturing cost is higher. Moreover, since the loading position and the unloading position are respectively located in separate areas, the rotating table rotates once (the single substrate is moved in, the deviation amount is measured, The time for wiring inspection and unloading is relatively long. 'There is naturally a problem of inefficiency in testing. In addition, it is necessary to increase the manufacturing cost of the loading device and the unloading device that have different functions in the loading position and the moving out position. How to conduct substrate testing more efficiently and reduce the cost and complexity of the organization is a problem that the industry needs to solve. [New content] In view of this, the main purpose of this creation is to provide a turntable type board test. The mechanism can effectively improve the efficiency of the test substrate. The objective is to provide a rotary substrate test mechanism that can effectively reduce the number of components required to reduce manufacturing costs. # Accordingly, the present invention provides a rotary substrate test mechanism including a rotary table having at least three An equally spaced opening can perform a circular motion, and the circular motion can be disposed at an infeed and discharge position through an infeed and discharge position, a pair of position and an electrical measurement position, and a plate platform is disposed at the inlet and outlet positions, and Located at the bottom of the turntable, for a plurality of substrates to be placed, at least three sets of substrates are lost, and are respectively arranged on the rotating table at equal intervals, and can be moved between an open state and a sandwiched state; a plurality of loading racks are provided for The substrate placer and a feed suction cup assembly are movable according to a predetermined path and are fed into the M374570 material operation and the discharge suction cup assembly at the infeed and discharge positions, and can be moved according to a predetermined path and discharged at the (4) position. The operation and the CCD alignment detecting device are disposed at the alignment position for taking the image of the substrate at the alignment position to calculate the position deviation value and a substrate electrical measuring device. The device is disposed at the electrical measurement position to perform a contact test on the substrate at the electrical measurement position to determine whether the substrate is a normal substrate or an abnormal substrate; thereby improving the efficiency of the test substrate. [Embodiment] Lu Wei has made the review committee better understand and agree with the characteristics and characteristics of this creation. The following preferred embodiments are listed below with the following description: Please refer to the first to fifth figures. A preferred embodiment of the present invention provides a rotary substrate test mechanism 1 〇〇, which mainly includes a rotary table 10, at least three sets of substrate clamp arms 20, a rotary table drive device (not shown), a plate platform 30, a feed suction cup assembly 40, a discharge device, a suction cup assembly 50, a plurality of carrier racks 60, a CCD alignment detecting device 70, and a substrate electrical measuring device 8; • 第一 第一 ' ' ' ' ' ' ' ' ' ' ' ' ' ' 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Referring to the first figure, the substrate clamping arms 20 are disposed at equal intervals and equiangularly at the peripheral position of the rotating table 10 for holding a substrate, and the substrate clamping arms 2 are respectively positive Located above the opening 1 2 . JVU/4570 Referring to the first figure, the rotary table driving device is used to drive the rotating shaft 1 1 to perform circular motion of the same center, so that the rotating table i 〇 can at least enter, discharge position, and a pair of positions And an electrical measurement position is stopped for a predetermined time, and when the feeding, discharging position, the alignment position and the electrical measurement position are stopped for a predetermined time, the substrate loss arm 2 on the rotating table i is correct Located at the infeed and discharge positions, the alignment position, and the electrical measurement position. Referring to the second figure, the plate platform 3 〇 is disposed at the feeding and discharging position and is located below the rotating table X , for sequentially arranging the plurality of substrates to be tested. Referring to the second figure, the feed chuck assembly 4 is disposed at the inlet and outlet positions to be movable along a predetermined path and capable of adsorbing the substrate by vacuum suction. Referring to the second figure, the discharge suction cup assembly 5 〇 is disposed at the inlet and outlet positions to move along a predetermined path and is capable of adsorbing the substrate by vacuum suction. # Please refer to the first figure, - on the feeding position, and on the moving path of the square 50, the y map, the loading rack 60 is disposed adjacent to the inlet and located at the feeding suction cup assembly 40 The loading tray is placed on the loading tray for testing and is not correct. Please refer to the carrier that is completed and placed on the normal substrate.
該對位位置上，用以對基板進行位置 置之偏差值。 請參閱第一圖，該基板電測裝置8 〇，係設置於該電 測位置上，用以料 ^ ^ , A板進行接觸式之配線檢查，以判讀取 付錄:為正常基板或不正常基板。 制二二ί述即為本創作所提供較佳實施例轉盤式基板 本創作之蚀0的各部構件及其組裝方式介紹，接著再將 本創作之❹㈣ 料2料進、出料位置之基板夾臂2 Q呈開啟狀態， 使該進料吸盤组杜 = 4 〇月匕穿入於位在進、出料位置之開孔 二圖所置板平台3 0上之待測試基板加以吸附（如第 。Γ ㈣待測試基板她於進、㈣位置之基板 &仃失合狀態而加以夹持’此時該進料吸盤組件 二已:離於該開孔1 2外已完成進料作業，接著該旋轉 、 失持待測試基板之基板夾臂2 0旋轉至對位 位置上（如第一圖所示），以由該CCD對位檢測裝置7 〇 對該待測試基板進行位置之取像，並得出位置之偏差值， 、由〜基板夾’ 2 Q進行夾持位置之調整，接著該旋轉桌 1 〇再將夾持已完成對位賴之待測試基板之基板夾臂2 0旋轉至電;貝J位置上（如第一圖所示），以由該基板電測裝 置8 0 乂接觸式之方式對該待檢測基板進行電路配線之探 測’而判讀出該基板為正常基板或為不正常基板接著該 旋轉桌1 0再將夹持已完成測試基板之基板夾臂2 〇旋轉 至進ώ料位置上（如第一圖所示），並由出料吸盤組件5 0加以吸取（如第三圖所示），並沿移動路徑（如第四圖所 示）將待測試基板依測試結果放置於正常基板载料架或不 正吊基板載料架中（如第五圖所示），如此便能持續地由進 料吸盤件4 0與出料吸盤組件5 〇於同一進、入料位置分 別進行將待測試基板放置於基板夾臂2 0上或將已完成測 試之基板加以吸取放置於預定之載料架6 〇中，並由各個 基板夾臂2 0依序地將所夾持之基板進行對位檢查、電測 仏查旋轉至進、出料位置上，而能持續地進行基板測試。 其-人，如第六圖所示，該出料吸盤組件5 〇亦能行預 定角f間之旋轉（1 8 〇度），以增進使用時之便利性。 疋以’本創作藉由進料吸盤組件4〇與出料吸盤組件The position of the alignment position for biasing the substrate. Referring to the first figure, the substrate electrical measuring device 8 设置 is disposed at the electrical measuring position, and is used for material contact inspection of the A ^ , A board for reading and recording: for a normal substrate or an abnormal substrate . The second chapter is the introduction of the components of the eclipse of the preferred embodiment of the turntable substrate and the assembly method of the present invention, and then the substrate of the present invention (4) material feed and discharge position of the substrate clip The arm 2 Q is opened, so that the feeding suction cup group Du = 4 〇月匕 penetrates into the substrate to be tested on the plate platform 30 of the opening and discharging position of the opening and discharging position (for example,四 (4) The substrate to be tested is clamped in the substrate & 仃 仃 仃 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The substrate clamp arm 20 of the rotating and missing substrate to be tested is rotated to the alignment position (as shown in the first figure) to take a position image of the substrate to be tested by the CCD alignment detecting device 7 And obtaining the deviation value of the position, adjusting the clamping position by the substrate holder '2 Q, and then rotating the table 1 〇 to rotate the substrate clamping arm 20 of the substrate to be tested Electric; Bay J position (as shown in the first figure), by the substrate electrical measuring device 80 乂Touching the detection of the circuit wiring of the substrate to be inspected, and determining that the substrate is a normal substrate or an abnormal substrate, and then rotating the table 10 and rotating the substrate clamp arm 2 of the completed test substrate to At the feed position (as shown in the first figure), and sucked by the discharge suction cup assembly 50 (as shown in the third figure), and along the moving path (as shown in the fourth figure), the substrate to be tested is The test results are placed in a normal substrate carrier or a non-suspension substrate carrier (as shown in the fifth figure), so that the feed suction member 40 and the discharge suction cup assembly 5 can be continuously fed in and out. The material position is respectively placed on the substrate clamp arm 20 or the substrate that has been tested is sucked and placed in a predetermined carrier 6 ,, and sequentially clamped by each substrate clamp arm 20 The substrate is subjected to the alignment inspection, the electrical inspection, and the rotation to the infeed and discharge positions, and the substrate test can be continuously performed. The person, as shown in the sixth figure, the discharge suction cup assembly 5 can also Rotation between predetermined angles f (1 8 〇) to enhance Convenience in use. Cloth to 'by the creation of the present chuck assembly 4〇 feed and discharge chuck assembly
，使旋轉 更能減少機構之複雜度，並能 對位位置及電測位置即可， 進行基板測試作業，不僅能 有效降低製造所需之成本支出。Therefore, the rotation can reduce the complexity of the mechanism, and the position of the alignment and the position of the electrical measurement can be performed, and the substrate testing operation can not only effectively reduce the cost of manufacturing.
已，並非用 知的改變，仍應屬本創作涵蓋 本技術領域内的一般技術人 ，以及本領域内技術人員熟 的範圍。 M374570 【圖式簡單說明】 第一圖係本創作一較佳實施例之構件配置示意圖。 第二〜六圖係第一圖所示實施例之作動示意圖。 【主要元件符號說明】 轉盤式基板測試機構1 旋轉桌1 0 開孔1 2 置板平台3 0 出料吸盤組件5 0 CCD對位檢測裝置7 0 0 0 旋轉軸1 1 基板夾臂2 0 進料吸盤組件4 0 載料架6 0 基板電測裝置8 0It is to be understood that the present invention is intended to cover a wide range of skill in the art, as well as those skilled in the art. M374570 [Simple Description of the Drawings] The first drawing is a schematic diagram of the components of a preferred embodiment of the present invention. The second to sixth figures are schematic diagrams of the actuation of the embodiment shown in the first figure. [Main component symbol description] Rotary substrate test mechanism 1 Rotating table 1 0 Opening 1 2 Plate platform 3 0 Discharge cup assembly 5 0 CCD registration device 7 0 0 0 Rotary axis 1 1 Substrate arm 2 0 Suction cup assembly 4 0 carrier 6 0 substrate electrical measuring device 8 0