、/二 ( 專利說明_ (本說明書格式、順序，嗜勿紅备 ※申請案號：仲2σ/上？/。，更動，※記號部分請勿填寫), / 2 (Patent Description _ (This specification format, order, do not want to prepare for red ※ application number: zhong 2σ / on? /., change, ※ mark part do not fill out)
※申請曰：抑2 X 7<r' ~上 ※”。分類：上β γ/σ 一、新型名稱：（中文/英文） 溼式製程加熱裝置 heating apparatus for wet process 二、 中文新型摘要： ^種溼式製程加熱裝置，包括：一容器用以容置一化學藥液；以及一 電熱膜形成並崎於容器之—外表面。射容S可為觀、管體或是桶體， 且桶體可具有-套管或—通孔。本創作係將電誠直接附著於容器外表面 或是通孔或套管内表面，並藉由直接傳導的方式將熱能直接對容器内的化 學藥液加熱，可充分發揮加熱效率。 三、 英文新型摘要： A heating apparatus for wet process is provided. The present invention includes a container for containing a chemical solution; and an electrothermal film formed and attached on an external surface of the container. Additionally, the container can be a trough, a tube or a pail and the pail can have a sleeve or a through hole penetrating through. In the present invention, the electrothermal film is directly attached on the external surface of the container or on the inner surface of the through hole or the sleeve, and thereby the heat energy can be directly transmitted through the container to the chemical solution therein to maximize the thermal efficiency of the electrothermal film. 100年6月30日^正替換頁 100年6月30日^正替換頁※Application曰: 2X 7<r' ~上※”. Classification: Upper β γ/σ I. New Name: (Chinese/English) Wet Process Heating Apparatus for wet process II. Chinese Abstract: ^ The wet process heating device comprises: a container for accommodating a chemical liquid; and an electric heating film formed on the outer surface of the container. The projecting volume S can be a view, a tube body or a barrel body, and the barrel The body can have a sleeve or a through hole. This creation directly attaches the electric directly to the outer surface of the container or the inner surface of the through hole or the sleeve, and directly heats the chemical liquid in the container by direct conduction. A heating apparatus for wet process is provided. The present invention includes a container for containing a chemical solution; and an electrothermal film formed and attached on an external surface of the container. , the container can be a trough, a tube or a pail and the pail can have a sleeve or a through hole penetrating through. In the presen t invention, the electrothermal film is directly attached on the external surface of the container or on the inner surface of the through hole or the sleeve, and the heat of the through hole or the sleeve, and the heat energy can be directly transmitted through the container to the chemical solution therein to maximize the thermal It is the replacement page of the ninth
特別是一種應用 以對一化學藥液 五、新型說明： 【新型所屬之技術領域】 本創作係有關一種溼式製程加熱裝置 在充滿化學流體環境的溼式製程加熱^置 控溫。 【先前技術】 在渔式製程中’產品需藉由重複經過不同液體的浸泡， 以逐步完成多層的電路。而根據不同的製程需求，#__麵 體必須藉由加熱到某-特定溫度下’其製程效果方可達到最 佳化。_，在濕式製程元件所在的環境都是充滿酸性 鹼性或是腐純等氣體，因此加熱裝置對酸驗性㈣受度、 加熱裝置本身的加熱功率等都是選擇加熱裝置所要考 素。 -般加熱容器的加熱元件在傳統上多使用電熱鶴絲、貼 附式加熱器、齒素石英燈管等。加熱元件的電熱轉換過程中， 將電能轉化成熱能與光能，且熱能又包妹射熱能及傳導執 此，由於傳統加熱元件的形狀可變性不高，因此加熱元件與 ，加熱容器無法完全貼合，導致部分的熱能會被氣體吸收、 :際預加熱的液體僅能吸收少部份的熱能，造成能量散失。 y般為了彌補這-部分的散失，通常會提高加熱㈣的功率 以補&熱散失。然；，若提高傳統的加熱^件的功率會產生 加熱7L件溫度過高或是造成熱量集中在電熱元件，使得加熱 凡件本身糾更㊣溫熾熱，而在熾熱狀態下使用，這一類屬 2氧式的傳統加熱元件，很容易產生氧化，使電胆鶴絲越 來越細，越來義，最終造成斷路。因此傳統加熱器在有限 月30日修正替換頁 空間條件下，都有其功率的上限，以確保其壽命。 ^常’ -般常見的液體加熱元件有兩種：石英燈管與陶 &鶴絲。其中石英燈管其結構是將加熱鶴絲密封於石英 ε内而石英官内則抽真空後再加人微量的惰性氣體，這一 =加熱元件的傳熱方式主要是姻㈣方式加熱容器内的液 “，因此不一樣的被加熱物體需要不同的波長方可提高其效 率。此外，輻射波所經過的路徑上，也會 =射及反射，進而產生能量的耗損。這種加熱元件= :表面溫度不均勻造成燈管破裂，因此燈管表面必須保持乾 淨且處於向/JItt狀態時，若是接觸到低溫液體，會因為溫度 劇烈變化而破裂。另外，陶£加熱鶴絲這種加熱元件係將^ 絲直接纏繞在陶Ή ’利料絲發熱，將熱能傳遞至石英容 器内的液體，此類加熱鎢絲加熱溫度並不均勻，因此需要在 ，安農空間持續加入適當氣體’以均勻其加熱溫度，延長其 壽命。雖然這種方法可以使其加熱溫度均勾，但此類加熱器 屬於耗氧式加熱元件，因此這種加熱元件容易因為鶴絲的氧 化而損壞。其加熱效率也較差。 【新型内容】 。為了解決上述問題，本創作目的之一係提供一種溼式製 程加熱裝置’採用電熱膜此種面狀發熱材料 成最大限度的導熱面，使得熱阻少、導熱快。此外，電、= 自身溫度^高’輻射熱損失小。再者，電_屬於非耗氧性 且不a產生明火，因此奇命較傳統加熱元件長。 為了達到上述目的，本創作一實施例之溼式製程加熱裝 置，應用在充滿化學流體環境中，溼式製程加熱裝置包括： 一容器用以容置一化學藥液；以及一電熱膜形成並附著於容 器之一外表面。 以下 【實施方式】 WO年6月30日修正替換頁 其詳細說明如下 定本創作。 所述較佳實施例僅做一說明非用以限 本創作之座式製程加熱裝置包括：-容器以及一電孰 其中容器係用以容置-化學藥液，且電熱膜可以適當方 式，例如電鍍方式、化鑛方式或是化學氣相沉積（CVD, Chemical Vapor Dep〇siti〇n)形成並附著於容器之一外表面。 首先’請參考圖i，圖丨為本創作—實施例之料製程加孰 裝置的不意圖。於此實施例中，容器係為一槽體ι〇〇且電埶 膜200可同時附著於槽體1〇〇之一外壁自⑽與槽體刚^ 一底部104 ;亦或者單獨附著於槽體1〇〇之外壁面1〇2或是 槽體100之底部104。於此實施例中，電熱膜綱係直接附 著於被加熱化學驗300的容器上來達成漫式製程中化學藥 液300的加熱，由於電熱膜2〇〇直接附著於容器上，電熱膜 2〇〇與容器之間無其他介質存在，使得電熱膜2〇〇的熱可完 全利用直接傳導的方式傳遞至容器内的化學藥⑯3〇〇 ’以減 少能源的浪費並且降低元件使用時所需要的成本支出。 於又-實施例中，如圖2所示，圖2為本創作—實施例 之座式裝程加熱裝置的剖視圖。如圖所示，容器亦可為一管 體110，且管體110具有兩液體進出口 112、H4用作化學藥 液300之出入口。其中電熱膜21〇係以適當方式，例如電鍍 方式、化鍍方式或是化學氣相沉積，形成並附著於管體11〇 之一外壁面111，使其電熱膜210的熱可直接透過管體11〇 100年6月30日修正替換頁 傳至其内的化學藥液300以達到升溫的效果。可以理解的 是’管體110可不以兩個液體進出口 H2、114為限制，依據 不同加熱裝置結構，管體亦可依需求設計成多個液體進出口 以符合實際使用，此亦不脫離本創作之精神所在。 再來，於又一實施例中，如圖3A及圖3B所示，圖3A 及圖3B分別為為本創作不同實施例之溼式製程加熱裝置的 剖視圖。於此實施例中，容器係為一桶體12〇，且桶體12〇 具有兩液體進出口 122、124用作化學藥液300之出入口。且 此溼式製程加熱裝置包括至少一套管125(如圖3A所示）或至 少—通孔126(如圖3B所示）貫穿桶體120，且電熱膜220係 附著於套管125或通孔126之一内表面。當化學藥液3〇〇流 經桶體120，套管125内或者通孔126内的電熱膜220開始 加熱’利用桶内加熱的形式將化學藥液3〇〇加熱至所需溫度 以進行後續其他製程。 接續上述，於又一實施例中，更可在桶體120的外表面 再鍍上電熱膜222，如圖4A及圖4B所示，以内外加熱的方 式來對化學藥液3〇〇進行加溫。其中於上述實施例中，電熱 犋皆可配合電路上的需求，將電熱膜設計成單相或三相控制 的加熱方式。可以理解的是，其他利用電熱膜加熱方式應用 於溼式製程者，皆涵括於本創作精神之内。 本創作係利用電熱膜來進行溼式製程中的化學藥液之加 熱程序，其中電熱膜加熱方式與習知加熱方式與加熱元件比 較表如表一及表二： 加熱方式 ——---一 财化 性 熱轉 換效 率 熱傳 導效 率 安裝 空間 明火 耗氧 性 熱響 應時 間 沉入式加熱 器 、 ----S 差 中 中 大 有 是 慢 M361190 • ·In particular, it is an application to a chemical liquid. 5. New type of description: [New technical field] This is a kind of wet process heating device. It is controlled by a wet process in a chemical fluid environment. [Prior Art] In the fishing process, the product is required to gradually complete the multilayer circuit by repeatedly immersing through different liquids. Depending on the process requirements, the #__face must be heated to a certain temperature to achieve optimum process results. _, in the environment where the wet process components are filled with gas such as acid alkaline or rot, the heating device is required to select the heating device for the acidity (4) and the heating power of the heating device itself. The heating element of the conventional heating container has conventionally used an electric heating wire, an attached heater, a tooth quartz lamp, and the like. During the electrothermal conversion process of the heating element, the electrical energy is converted into thermal energy and light energy, and the thermal energy is combined with the thermal energy and conduction. Since the shape variability of the conventional heating element is not high, the heating element and the heating container cannot be completely attached. In combination, some of the heat energy is absorbed by the gas, and the preheated liquid can only absorb a small amount of heat energy, resulting in energy loss. In order to compensate for the loss of this part, the power of heating (4) is usually increased to compensate for & heat loss. However, if the power of the conventional heating element is increased, the temperature of the heated 7L piece is too high or the heat is concentrated on the electric heating element, so that the heating element itself is corrected to be more positive and hot, and is used in a hot state. 2 Oxygen traditional heating elements, it is easy to produce oxidation, so that the electric gallbladder wire is getting thinner and thinner, and more and more, eventually causing an open circuit. Therefore, conventional heaters have an upper limit of their power to ensure their lifespan when the replacement page space is corrected for a limited period of 30 days. ^ often' There are two common types of liquid heating elements: quartz tubes and ceramic & The structure of the quartz lamp tube is to seal the heated crane wire in the quartz ε and the vacuum inside the quartz official to add a small amount of inert gas. This heat transfer mode of the heating element is mainly in the heating method of the (4) heating container. Liquid ", therefore, different heated objects need different wavelengths to improve their efficiency. In addition, the path through which the radiation waves pass will also be shot and reflected, resulting in energy loss. This heating element = : surface The uneven temperature causes the lamp to rupture, so the surface of the lamp must be kept clean and in the /JItt state, if it is exposed to the cryogenic liquid, it will be broken due to the temperature change. In addition, the heating element will be heated. ^ The wire is directly wrapped around the pottery Ή 'The filament is heated, and the heat is transferred to the liquid in the quartz container. The heating temperature of the heated tungsten wire is not uniform, so it is necessary to continuously add the appropriate gas in the Anon space to evenly heat it. Temperature, prolonging its life. Although this method can make its heating temperature hook, such heaters are oxygen-consuming heating elements, so this heating element It is easy to be damaged by the oxidation of the crane wire. Its heating efficiency is also poor. [New content] In order to solve the above problems, one of the purposes of the present invention is to provide a wet process heating device that uses an electric heating film to form a maximum of such a planar heating material. The limited thermal conduction surface makes the thermal resistance less and the heat conduction fast. In addition, the electric, the temperature of the self is high, and the radiant heat loss is small. Furthermore, the electricity _ is non-oxygen-consuming and does not produce an open flame, so the odd-life is more than the traditional heating element. In order to achieve the above object, the wet process heating device of one embodiment of the present invention is applied in a chemical fluid filled environment, and the wet process heating device comprises: a container for accommodating a chemical liquid; and an electric heating film forming And attached to the outer surface of one of the containers. The following [Embodiment] The revised replacement page of June 30, WO will be described in detail below. The preferred embodiment only describes the seat type process which is not limited to the creation of the present invention. The heating device comprises: a container and an electric kettle, wherein the container is used for accommodating the chemical liquid, and the electric heating film can be in an appropriate manner, for example, electroplating. The method or chemical vapor deposition (CVD, Chemical Vapor Dep〇siti〇n) is formed and attached to the outer surface of one of the containers. First, please refer to Figure i, which is the creation of the material processing device of the embodiment. It is not intended. In this embodiment, the container is a tank ι and the electric film 200 can be attached to one of the outer walls of the tank 1 from the (10) and the bottom 104 of the tank; or separately attached In the outer wall surface 1〇2 of the tank body 1 or the bottom portion 104 of the tank body 100. In this embodiment, the electrothermal film system is directly attached to the container of the heated chemical test 300 to achieve the chemical liquid in the diffusing process. The heating of 300, since the electric heating film 2〇〇 is directly attached to the container, no other medium exists between the electric heating film 2〇〇 and the container, so that the heat of the electric heating film 2〇〇 can be completely transmitted to the container by direct conduction. Chemicals 163' to reduce energy waste and reduce the cost of components used. In the embodiment, as shown in Fig. 2, Fig. 2 is a cross-sectional view showing the seat type heating device of the present invention. As shown, the container may also be a tubular body 110 having a two liquid inlet and outlet 112, H4 serving as an inlet and outlet for the chemical liquid 300. The electrothermal film 21 is formed and adhered to the outer wall surface 111 of the tube body 11 by a suitable method, such as electroplating, chemical plating or chemical vapor deposition, so that the heat of the electrothermal film 210 can directly pass through the tube body. On June 30, 100, 100, the chemical liquid 300 passed to the replacement page was corrected to achieve the effect of temperature rise. It can be understood that the pipe body 110 can be restricted by the two liquid inlets and outlets H2 and 114. According to different heating device structures, the pipe body can also be designed into a plurality of liquid inlet and outlet according to requirements to meet the actual use, and this does not deviate from the present. The spirit of creation. Further, in still another embodiment, as shown in Figs. 3A and 3B, Figs. 3A and 3B are cross-sectional views of the wet process heating apparatus of the different embodiments of the present invention, respectively. In this embodiment, the container is a barrel 12 〇, and the barrel 12 〇 has two liquid inlets and outlets 122, 124 for use as an inlet and outlet for the chemical liquid 300. The wet process heating device includes at least one sleeve 125 (shown in FIG. 3A) or at least - a through hole 126 (shown in FIG. 3B) extending through the barrel 120, and the electric heating film 220 is attached to the sleeve 125 or through. The inner surface of one of the holes 126. When the chemical liquid 3 flows through the barrel 120, the electric heating film 220 in the sleeve 125 or in the through hole 126 starts to heat. The chemical liquid 3 is heated to the desired temperature in the form of heating in the barrel for subsequent operation. Other processes. Following the above, in another embodiment, the electric heating film 222 may be further plated on the outer surface of the barrel 120, as shown in FIG. 4A and FIG. 4B, and the chemical liquid 3 is added by heating inside and outside. temperature. In the above embodiments, the electric heating can be matched with the requirements on the circuit, and the electric heating film is designed to be a single-phase or three-phase controlled heating mode. It can be understood that other applications using electrothermal film heating methods for wet processes are included in the spirit of this creation. The author uses the electric heating film to carry out the heating process of the chemical liquid in the wet process, wherein the heating film heating method and the conventional heating method and the heating element comparison table are shown in Table 1 and Table 2: Heating method——--- Fiscal heat conversion efficiency heat transfer efficiency installation space open flame oxygen consumption thermal response time submersible heater, ----S difference in medium and large is slow M361190 •
100年6月30日修正替換頁 貼附式加熱 器 中 差 差 小 益 4 »»> 是 慢 隔水加熱 優 差 差 大 無 是 慢 不改 電熱膜直接 加熱容器 優 優 優 變物 體尺 #»·> 否 快 寸 表一 加熱元件 而才化 性 熱轉 換效 率 熱傳 導效 率 安裝 空間 明火 耗氧 性 執響 ”、、a 應時 間 石英燈管 優 優 中 大 有 是 快 陶瓷加熱鶴 絲 差 差 差 大 有 是 慢 不改 電熱膜 優 優 優 變物 體尺 無 否 快 寸 表二 # 如表一、表二所示，由於電熱膜本身耐磨性良好，且由 於電熱膜與絕緣基材生成為一體，故一般製程使用中的磨擦 對電熱膜係毫無影響。此外，電熱膜響應速度快，其熱轉換 啟動速度非常迅速，此為一般加熱元件所無法達到的。再者， 因電熱膜加熱屬於非耗氧性加熱方式且不會產生明火，故其 壽命也較傳統加熱元件長，在溼式製程充滿化學流體的環境 中，特別是容易揮發、易燃燒的有機氣體環境中，使用電熱 膜相對上也是比較安全的。 根據上述，本創作特徵之一係利用電熱膜做為溼式製程 中的加熱元件，其中電熱膜之尺寸外型可依照被加熱容器變 100年6月30日修正替換頁 二故製程上相當彈性。且電熱膜的厚度可遠小於〇 〇ι一 *可在不改變被加熱容器大小的前提下，達到渔式製程的 加熱程序。並由於電熱膜係直接附著於被加熱容器或套管 上，α因此電熱膜的熱能可以完全利用直接傳導的方式傳遞至 今器内的化學藥液中’其所發揮的效率可達96〇/。以上，因此 可減少成源的浪費’並且降低元件使用時所需要的成本支 出。更者’於本創作中，電熱膜皆可配合電路上的需求，將 電熱膜设計成單相或三相控制的加熱方式。 綜合上述，本創作提供一種溼式製程加熱裝置，其採用 電熱膜此種面狀發熱材料以與被加熱獅成最大限度的導熱 面’使得熱阻少、導熱快。此外，電熱膜自身溫度不高，輻 射熱，失小。再者，電熱膜屬於非耗氧性且不會產生明火， 因此壽命較傳統加熱元件長。 以上所述之實施例僅係為說明本創作之技術思想及特 點’其目的在使熟習此項技藝之人士能夠瞭解本創作^内容 並據以實施，當不能以之限定本創作之專利範圍，即大凡依 本創作所揭示之精神所作之均等變化或修飾，仍應涵蓋在本 創作之專利範圍内。 【圖式簡單說明】 圖1所示為根據本創作之溼式製程加熱裝置之—實施例之示 意圖。 圖2為本創作又一實施例之溼式製程加熱裝置的剖視圓。 圖3Α及圖3Β分別為本創作不同實施例之渥式製程加熱裝 置的剖視圖。 圖4Α及圖4Β為本創作又一實施例之溼式製程加熱裝置的剖On June 30, 100, the replacement page is attached to the heater. The difference is 4»»> It is the slow water heating, the difference is big, the difference is not slow, the electric heating film is directly heated, the container is excellent and the object is adjustable. #» ·> No speed meter, heating element, heat transfer efficiency, heat transfer efficiency, installation space, open flame, oxygen consumption, ", a, time, quartz tube, excellent, medium, large, fast, ceramic, heating, crane, difference There is a slow change of the electric film, excellent and excellent, and the object is not fast. Table 2, as shown in Table 1 and Table 2, because the electric heating film itself has good wear resistance, and since the electric heating film and the insulating substrate are integrated, The friction in the general process has no effect on the electric heating film system. In addition, the electric heating film has a fast response speed, and the thermal conversion starting speed is very fast, which is unachievable by the general heating element. Furthermore, the heating film heating is non-consumable. Oxygen heating method does not produce open flame, so its life is longer than traditional heating elements, and it is filled with chemical fluid in wet process. In the environment, especially in the environment of organic gases which are easily volatile and flammable, it is relatively safe to use an electric heating film. According to the above, one of the creative features is to use an electric heating film as a heating element in a wet process, in which electric heating The size of the film can be quite flexible according to the method of the heated container changing the replacement page on June 30, and the thickness of the electric heating film can be much smaller than that of 〇〇ι** without changing the size of the heated container. Under the heating process of the fishing process, and because the electrothermal film is directly attached to the heated container or the casing, the thermal energy of the electrothermal film can be completely transferred to the chemical liquid in the device by direct conduction. The efficiency can reach 96〇/., so it can reduce the waste of source and reduce the cost of components. In addition, in this creation, the electric film can meet the needs of the circuit, The electric heating film is designed to be a single-phase or three-phase controlled heating method. In summary, the present invention provides a wet process heating device using an electric heating film. The heat-generating material has the largest heat conduction surface with the heated lion', so that the heat resistance is small and the heat conduction is fast. In addition, the temperature of the electric heating film itself is not high, and the radiant heat is lost. Further, the electric heating film is non-oxygen-consuming and does not An open flame is generated, and thus the life is longer than that of a conventional heating element. The embodiments described above are merely illustrative of the technical idea and features of the present invention. The purpose of the present invention is to enable a person skilled in the art to understand the contents of the present invention and implement it accordingly. When it is not possible to limit the scope of the patents of this creation, that is, the equivalent changes or modifications made by the spirit of the creation of this creation should still be covered by the scope of the patent of this creation. [Simple description of the diagram] Figure 1 shows A schematic of an embodiment of the wet process heating apparatus of the present invention. 2 is a cross-sectional view of a wet process heating apparatus according to still another embodiment of the present invention. 3A and 3B are cross-sectional views of the 制-type process heating apparatus of the different embodiments of the present invention, respectively. 4A and FIG. 4B are cross-sectional views of a wet process heating device according to still another embodiment of the present invention.