CN202057027U - Heater for corrosive liquid - Google Patents

Heater for corrosive liquid Download PDF

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Publication number
CN202057027U
CN202057027U CN2011201713154U CN201120171315U CN202057027U CN 202057027 U CN202057027 U CN 202057027U CN 2011201713154 U CN2011201713154 U CN 2011201713154U CN 201120171315 U CN201120171315 U CN 201120171315U CN 202057027 U CN202057027 U CN 202057027U
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CN
China
Prior art keywords
water tank
upper cover
inner cap
heater
metallic conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011201713154U
Other languages
Chinese (zh)
Inventor
金海涛
吉保国
卞福良
段小楠
沈俊然
黄宏君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Wuxi China Resources Microelectronics Co Ltd
Original Assignee
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Wuxi China Resources Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd, Wuxi China Resources Microelectronics Co Ltd filed Critical CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority to CN2011201713154U priority Critical patent/CN202057027U/en
Application granted granted Critical
Publication of CN202057027U publication Critical patent/CN202057027U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Heat-Pump Type And Storage Water Heaters (AREA)

Abstract

The utility model relates to a heater for corrosive liquid. The heater comprises a water tank, a heating component, an upper inner cover, a lower inner cover and a water temperature sensor, wherein the water tank is a cylinder with openings at two ends; a fluorine plastic layer is arranged on the inner wall of the water tank or the water tank is made of fluorine plastics; a liquid outlet and a liquid inlet are respectively arranged on the upper side and the lower side of the water tank; the heating component comprises a metal conductor with a fluorine plastic layer on the peripheral wall and more than two electric heating rods; each electric heating rod is installed in the metal conductor; the upper inner cover and the lower inner cover provided with fluorine plastic layers on the peripheral wall or made of fluorine plastics are installed at the two ends of the metal conductor and are respectively and hermetically connected with the water tank; electrodes of the electric heating rods hermetically penetrate out of the upper inner cover or the lower inner cover; a liquid cavity is arranged between the periphery of the metal conductor and the inner wall of the water tank; a sensor seat is installed at the upper part of the water tank; and the water temperature sensor is arranged at the liquid outlet of the water tank. The heater has the advantages of reliable operation, uniform liquid heating temperature and small volume and is convenient to repair and maintain.

Description

The heater that is used for corrosive liquids
Technical field
The utility model relates to a kind of heater that is used for corrosive liquids, belongs to the liquid technical field of heating.
Background technology
Electric heater mostly adopts pottery or quartz, and this heating material is not only easily broken, and the efficiency of heating surface is not high, and can not add the corrosive liquids of strong oxidizers such as hot acid, alkali.Some electric heaters that are used to heat corrosive liquids are that thermo electric material is arranged in the metal sleeve, be provided with burning magnesium between metal sleeve and the heating wire, coat polytetrafluoroethylene (PTFE) at the metal sleeve outer wall, though electric heater has the characteristics of corrosion resistance, but therefore the defective that also has the not high and maintaining inconvenience of heating power is not suitable for the requirement that industrialization produces in the chemical attack of semiconductor devices and the cleaning.For satisfying the semiconductor devices industrial production requirement, liquid heater adopts four fluoroplastics screw rods to be connected the back with four connecting rods and forms frame structure at present, the heating wire that is coated with fluoroplastics is wrapped on the fluoroplastics screw rod, improve the temperature homogeneity that adds liquid and the reliability of use with this, but the heating wire of this kind structure can't make its diameter keep identical in making and installation process, so or existence is generated heat inhomogeneous and power is not high and the bigger problem of volume electric heater.
Summary of the invention
The purpose of this utility model provides a kind of reliable operation, even to the liquid heating-up temperature, is convenient to maintaining, the heater that is used for corrosive liquids that volume is little.
The utility model is that the technical scheme that achieves the above object is: a kind of heater that is used for corrosive liquids, it is characterized in that: comprise water tank, heating component and inward upper cover, following inner cap and water temperature sensor, described water tank is the cylindrical shell of both ends open, and the inwall of water tank has fluoroplastic layer or water tank is made by fluoroplastics, and the both sides up and down of water tank are respectively equipped with liquid outlet and inlet; Described heating component comprises that periphery wall has the metallic conductor and the plural electrically heated rod of fluoroplastic layer, each electrically heated rod is installed in the metallic conductor, the two ends of metallic conductor have fluoroplastic layer with periphery wall or are connected with following inner cap by the inward upper cover that fluoroplastics are made, and inward upper cover is connected with tank seal respectively with following inner cap, the electrode sealing of electrically heated rod passes inward upper cover or following inner cap, is provided with sap cavity between metallic conductor periphery wall and the tank inner wall; Liquid outlet place on the described water tank is equipped with the water temperature sensor.
The utility model adopts plural electrically heated rod and is arranged in the metallic conductor, so can increase the power of heater, the heat of electrically heated rod is by heating liquid again behind the metallic conductor, heated liquid is more even, because corrosive liquids does not contact with electrically heated rod, has improved the dependability of heater yet.Water tank of the present utility model, inward upper cover and inner cap and metallic conductor all adopt antiacid, alkali resistant and resistant to elevated temperatures fluoroplastic layer down, the use that has improved heater is reliable, because heating component is arranged in the water tank, can not only reduce the volume of heater, and be one with water tank and heater collection, can make heater realize modularization, make things convenient for the technology adjustment.The utility model is installed in the water tank two ends with inward upper cover and the sealing of following inner cap, convenient care and maintenance to heater.The utility model is provided with the water temperature sensor at the liquid outlet place of water tank, can not only conveniently regulate the power of heater, and can play a protective role to heater.
Description of drawings
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the plan structure schematic diagram of Fig. 1.
Wherein: 1-loam cake, 2-sealing ring, 3-inward upper cover, 4-heat conduction temperature sensor, 5-electrically heated rod, the 6-metallic conductor, 7-sap cavity, 8-water tank, 8-1-liquid outlet, 8-2-inlet, inner cap under the 9-, 10-lower cover, 11-water temperature sensor, 12-sensor holder, 13-holder.
The specific embodiment
See shown in Fig. 1,2 that the heater that is used for corrosive liquids of the present utility model comprises water tank 8, heating component and inward upper cover 3, following inner cap 9 and water temperature sensor 11.Water tank 8 of the present utility model is the cylindrical shell of both ends open, and the inwall of water tank 8 has fluoroplastic layer or water tank 8 and is made by fluoroplastics, make water tank 8 have the advantage of acid-fast alkali-proof, the both sides up and down of this water tank 8 are respectively equipped with liquid outlet 8-1 and inlet 8-2, liquid outlet 8-1 and inlet 8-2 are equipped with screwed hole, and liquid pipe connection can be screwed in the liquid outlet 8-1 and the inlet 8-2 place of casing.See Fig. 1, shown in 2, the utility model heating component comprises that periphery wall has the metallic conductor 6 and the plural electrically heated rod 5 of fluoroplastic layer, can be as Fig. 1, shown in 2, can adopt three electrically heated rods 5, electrically heated rod 5 heatings of energising back, each electrically heated rod 5 is installed in the metallic conductor 6, and uniform being installed on the metallic conductor 6, this metallic conductor 6 can adopt the high copper of thermal conductivity factor or and alloy material, the two ends of metallic conductor 6 have fluoroplastic layer with periphery wall or are connected with following inner cap 9 by the inward upper cover 3 that fluoroplastics are made, and inward upper cover 3 and following inner cap 9 are tightly connected with water tank 8 respectively by the sealing ring 2 that is installed on the metallic conductor 6, the utility model is installed inner cap 3 and following inner cap 9 for convenience, metallic conductor 6 two ends are respectively equipped with male and fomale(M﹠F), and also be provided with the male and female face of correspondence on inward upper cover 3 and the following inner cap 9, male and female face on male and fomale(M﹠F) on metallic conductor 6 two ends and inward upper cover 3 and the following inner cap 9 joins, the utility model is at inward upper cover 3 or be provided with the installing hole that electrically heated rod 5 is located on the inner cap 9 down, securing member is installed in inward upper cover 3 and following inner cap 9 at the two ends of metallic conductor 6, water tank 8 two ends also are equipped with loam cake 1 and lower cover 10, this loam cake 1 and lower cover 10 cover on respectively on inward upper cover 3 and the following inner cap 9, be provided with sap cavity 7 between metallic conductor 6 periphery walls and the tank inner wall, when being heated liquid and heated by metallic conductor 6 by this sap cavity 7.
See shown in Fig. 1,2, the utility model is a heating-up temperature of in time understanding liquid, the liquid outlet 8-1 place of water tank 8 is equipped with on the sensor holder 12, the liquid outlet 8-1 place of water tank 8 is equipped with sensor holder 12, this sensor holder 12 is screwed on the installing hole of water tank 8, and water temperature sensor 11 is inserted on the sensor holder 12 by holder 13.See shown in Fig. 1,2; the utility model is also established heat conduction temperature sensor 4 on metallic conductor 6; heat conduction temperature sensor 4 is positioned at the same side of electrically heated rod 5; and the sealing of the holding wire of heat conduction temperature sensor 4 passes inward upper cover 3 or following inner cap 9, and the utility model plays two protective effects by 4 pairs of heaters of heat conduction temperature sensor of water temperature sensor 11.

Claims (5)

1. heater that is used for corrosive liquids, it is characterized in that: comprise water tank (8), heating component and inward upper cover (3), following inner cap (9) and water temperature sensor (11), described water tank (8) is the cylindrical shell of both ends open, and the inwall of water tank (8) has fluoroplastic layer or water tank (8) is made by fluoroplastics, and the both sides up and down of water tank (8) are respectively equipped with liquid outlet (8-1) and inlet (8-2); Described heating component comprises that periphery wall has metallic conductor of fluoroplastic layer (6) and plural electrically heated rod (5), each electrically heated rod (5) is installed in the metallic conductor (6), the two ends of metallic conductor (6) have fluoroplastic layer with periphery wall or the inward upper cover (3) made by fluoroplastics is connected with following inner cap (9), and inward upper cover (3) and following inner cap (9) are tightly connected with water tank (8) respectively, the electrode sealing of electrically heated rod (5) passes inward upper cover (3) or following inner cap (9), is provided with sap cavity (7) between metallic conductor (6) periphery wall and water tank (8) inwall; Liquid outlet (8-1) on the described water tank (8) locates to be equipped with water temperature sensor (11).
2. the heater that is used for corrosive liquids according to claim 1, it is characterized in that: the two ends of described metallic conductor (6) join by the male and female face on male and fomale(M﹠F) and inward upper cover (3) and the following inner cap (9) respectively, and inward upper cover (3) or following inner cap (9) are provided with the installing hole to electrically heated rod (5) location, and securing member is installed in inward upper cover (3) and following inner cap (9) at the two ends of metallic conductor (6).
3. the heater that is used for corrosive liquids according to claim 1, it is characterized in that: also establish heat conduction temperature sensor (4) on the described metallic conductor (6), and heat conduction temperature sensor (4) is positioned at the same side of electrically heated rod (5), and the holding wire sealing of heat conduction temperature sensor (4) passes inward upper cover (3) or following inner cap (9).
4. the heater that is used for corrosive liquids according to claim 1 is characterized in that: described water tank (8) two ends also are equipped with loam cake (1) and lower cover (10) and cover on respectively on inward upper cover (3) and the following inner cap (9).
5. the heater that is used for corrosive liquids according to claim 1, it is characterized in that: the liquid outlet (8-1) of described water tank (8) locates to be equipped with sensor holder (12), and water temperature sensor (11) is inserted on the sensor holder (12) by holder (13).
CN2011201713154U 2011-05-26 2011-05-26 Heater for corrosive liquid Expired - Lifetime CN202057027U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011201713154U CN202057027U (en) 2011-05-26 2011-05-26 Heater for corrosive liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201713154U CN202057027U (en) 2011-05-26 2011-05-26 Heater for corrosive liquid

Publications (1)

Publication Number Publication Date
CN202057027U true CN202057027U (en) 2011-11-30

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ID=45016999

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011201713154U Expired - Lifetime CN202057027U (en) 2011-05-26 2011-05-26 Heater for corrosive liquid

Country Status (1)

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CN (1) CN202057027U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252417A (en) * 2011-05-26 2011-11-23 常州瑞择微电子科技有限公司 Heater for corrosive liquid
CN102705977A (en) * 2012-05-30 2012-10-03 苏州市金翔钛设备有限公司 Heating device
CN103574902A (en) * 2012-08-09 2014-02-12 昆山联华印务有限公司 Heater sealing and fixing structure

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252417A (en) * 2011-05-26 2011-11-23 常州瑞择微电子科技有限公司 Heater for corrosive liquid
CN102252417B (en) * 2011-05-26 2013-03-06 常州瑞择微电子科技有限公司 Heater for corrosive liquid
CN102705977A (en) * 2012-05-30 2012-10-03 苏州市金翔钛设备有限公司 Heating device
CN103574902A (en) * 2012-08-09 2014-02-12 昆山联华印务有限公司 Heater sealing and fixing structure
CN103574902B (en) * 2012-08-09 2016-07-06 昆山联华印务有限公司 Heater seals and fixed structure

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20111130

Effective date of abandoning: 20130306

RGAV Abandon patent right to avoid regrant