CN203771663U - Labyrinth heating tank - Google Patents

Labyrinth heating tank Download PDF

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Publication number
CN203771663U
CN203771663U CN201420087668.XU CN201420087668U CN203771663U CN 203771663 U CN203771663 U CN 203771663U CN 201420087668 U CN201420087668 U CN 201420087668U CN 203771663 U CN203771663 U CN 203771663U
Authority
CN
China
Prior art keywords
heating bath
dish
ringfeder
labyrinth
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420087668.XU
Other languages
Chinese (zh)
Inventor
邬治国
于莉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Original Assignee
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd filed Critical CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority to CN201420087668.XU priority Critical patent/CN203771663U/en
Application granted granted Critical
Publication of CN203771663U publication Critical patent/CN203771663U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a labyrinth heating tank which comprises a heating tank made of fluoroplastic or provided with a fluoroplastic layer, wherein the heating tank is provided with a tank cover and flow guiding plates, the flow guiding plates divide a cavity of the heating tank into a helical liquid flow channel which rotates outwards along the center of the heating tank, and a liquid inlet and a liquid outlet communicated with the liquid flow channel are formed in the heating tank. The labyrinth heating tank has the advantages that the heat exchange area is increased, and the liquid flow direction on a heat exchange contact surface is limited, so that a liquid is heated more sufficiently and uniformly, the liquid flow resistance is reduced due to the helical labyrinth channel, heat exchange is finished in a liquid flowing process, the temperature rise time is short, and the heat efficiency can be improved.

Description

Labyrinth heating bath
Technical field
The utility model relates to a kind of labyrinth heating bath, belongs to heating liquid technical field.
Background technology
For heating the electric heater of corrosive liquids, be that thermo electric material is arranged in stainless steel sleeve pipe, between stainless steel sleeve pipe and heating wire, be provided with burning magnesium, at stainless steel sleeve pipe outer wall, coat polytetrafluoroethylene (PTFE), although electric heater has the feature of corrosion resistance, also there is the defect of the not high and maintaining inconvenience of heating power.
In the chemical attack of semiconductor devices and cleaning, adopt corrosive liquids, cleaning need to heat corrosive liquids, but current heater mostly adopts batch (-type) heating, can not make liquid be rapidly heated and reach temperature required in the short time, and maintaining inconvenience.
Summary of the invention
It is abundant that the purpose of this utility model is to provide a kind of heated liquid, the labyrinth heating bath that the temperature rise time is short.
The further object of the utility model be to provide a kind of maintainability good labyrinth heating bath.
The utility model is that the technical scheme achieving the above object is: a kind of labyrinth heating bath, it is characterized in that: comprise the heating bath of making or have fluoroplastic layer by fluoroplastics, heating bath is provided with Chi Gai and deflector, deflector is separated into the cavity of heating bath along heating bath center extroversion and rotates and form spiral helicine flow channel for liquids, and heating bath is provided with the feed liquor interface communicating with flow channel for liquids and goes out liquid interface.
The utility model is that the technical scheme that reaches above-mentioned further object is: also have by fluoroplastics make or have fluoroplastic layer every dish, every dish, be provided with for the installation cavity of heat-generating disc is installed, installation cavity top has end plate, and its deflector of heating bath being arranged on every dish top is fitted on the end plate of dish.
Wherein: the described THICKNESS CONTROL every upper its end plate of dish is between 0.5~5mm.
The step installed surface that described heating bath is provided with every step surface corresponding to dish, match, heating bath is arranged on dish by securing member, or heating bath and be provided with installing hole every dish, heating bath and be arranged between upper connector and lower connector and connect by securing member every dish, the deflector on heating bath is fitted on the end plate of dish.
Describedly every dish, be provided with stopper slot, the spacing block set on heating bath is arranged in the stopper slot of dish.
Described heating bath is provided with for detection of the temperature sensor that goes out liquid temp in a side that goes out liquid interface.
Described heating bath is provided with the installation of sensors hole of inner small and outside big step, ringfeder is arranged in the installation of sensors hole of heating bath, locking nut is screwed in the macropore place in installation of sensors hole and withstands on ringfeder, temperature sensor is through in the through hole of locking nut and the through hole of ringfeder, and the test side of temperature sensor is arranged in flow channel for liquids, the male cone (strobilus masculinus) of ringfeder withstands on the step place in installation of sensors hole, and ringfeder clamps temperature sensor and seals.
Deflector on the utility model heating bath is separated into spiral helicine flow channel for liquids by the cavity of heating bath, increased heat exchange area, and on the contact-making surface of heat exchange, define the flow direction of liquid, can make heated liquid more fully with even, spiral flow channel for liquids has reduced the resistance of liquid flow, make liquid complete heat exchange in mobile process, the temperature rise time is short, improves the thermal efficiency.The utility model is provided with every dish in heating bath bottom, the deflector of heating bath can be fitted on the end plate of dish, therefore make heating bath there is better maintainability, the utility model heating bath and adopt antiacid, alkali resistant and resistant to elevated temperatures fluorine moulding material every dish, can be for the heating of strong acid and strong base and so on corrosive liquids.The utility model can detect liquid temp online by the temperature sensor being arranged on heating bath, and the signal of exporting by temperature sensor can facilitate the power of regulation heating dish online, accurately to control the temperature that is heated liquid.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
Fig. 1 is the structural representation of labyrinth of the present utility model heating bath.
Fig. 2 is the A-A sectional structure schematic diagram of Fig. 1.
Wherein: 1-heating bath, 1-1-deflector, 1-2-flow channel for liquids, 1-3-feed liquor interface, 1-4-installation of sensors hole, 1-5-go out liquid interface, 1-6-Chi Gai, 1-7-spacing block set, 2-ringfeder, 3-temperature sensor, 4-locking nut, 5-every dish, 5-1-end plate, 5-2-installation cavity, 5-3-stopper slot.
The specific embodiment
See shown in Fig. 1,2, labyrinth of the present utility model heating bath, comprises the heating bath 1 of being made or had fluoroplastic layer by fluoroplastics, and the fluoroplastic layer on heating bath 1 is arranged on periphery, makes heating bath 1 have good decay resistance.As shown in Figure 2, the utility model heating bath 1 is provided with pond lid 1-6 and deflector 1-1, deflector 1-1 is separated into the cavity of heating bath 1 export-orientedly along heating bath center to rotate and form spiral helicine flow channel for liquids 1-2, heating bath 1 is provided with the feed liquor interface 1-3 communicating with flow channel for liquids 1-2 and goes out liquid interface 1-5, the utility model by defining the flow direction of liquid on heat exchange contact face, can make heated liquid more fully with even, and can reduce the resistance of liquid flow, by spiral helicine flow channel for liquids 1-2, liquid is heated immediately, improve the efficiency of heating surface, liquid completes heat exchange in mobile process, can reach the effect of short time temperature rise.
See Fig. 1, shown in 2, the utility model also have by fluoroplastics make or have fluoroplastic layer every dish 5, fluoroplastic layer on dish 5 is arranged on the periphery every dish 5, make to there is good decay resistance every dish 5, every dish 5, be provided with for the installation cavity 5-2 of heat-generating disc is installed, installation cavity 5-2 top has end plate 5-1, end plate 5-1 THICKNESS CONTROL on dish 5 is between 0.5~5mm, be preferably between 0.8~2mm, heating plate is arranged in the installation cavity 5-2 of dish 5, be arranged on every heating bath 1 its deflector 1-1 on dish 5 tops and be fitted on the end plate 5-1 of dish 5, as shown in Figure 2, the step installed surface that the utility model heating bath 1 is provided with matches with step surface corresponding on dish 5, liquid and heating plate are separated, there is good maintainability, the utility model can be arranged on dish 5 by securing member heating bath 1, or heating bath 1 and 3 be provided with installing hole every dish, heating bath 1 and 3 be arranged between upper connector and lower connector and connect by securing member every dish, by heating bath 1 with every dish, 5 be connected.For ease of installing, locating, every dish 5, be provided with stopper slot 5-3, the spacing block set 1-7 on the lid 1-6 of pond is arranged in the stopper slot 5-3 of dish 5.
As shown in Figure 1, the utility model heating bath 1 is provided with for detection of the temperature sensor 3 that goes out liquid temp in a side that goes out liquid interface 1-5, the test side of temperature sensor 3 is arranged in flow channel for liquids 1-2, by temperature sensor 3, accurately detect liquid temp, to facilitate the power of controlling heat-generating disc, regulate the heating-up temperature of liquid.As shown in Figure 1, the utility model heating bath 1 is provided with the installation of sensors hole 1-4 of inner small and outside big step, ringfeder 2 is arranged in the installation of sensors hole 1-4 of heating bath 1, locking nut 4 is screwed in the macropore place of installation of sensors hole 1-4 and withstands on ringfeder 2, temperature sensor 3 is through in the through hole of locking nut 4 and the through hole of ringfeder 2, make the test side of temperature sensor 3 be positioned at flow channel for liquids 1-2, the male cone (strobilus masculinus) of ringfeder 2 withstands on the step place of installation of sensors hole 1-4, ringfeder 2 clamps temperature sensor and seals, when locking nut 4 is screwed on the 1-4 of installation of sensors hole, can make ringfeder 2 move axially, because the male cone (strobilus masculinus) on ringfeder 2 withstands on the step place of installation of sensors hole 1-4, the axial force that locking nut 4 can be acted on ringfeder 2 transfers radial load to, distortion due to ringfeder 2, thereby eliminate the gap between ringfeder 2 and temperature sensor 3 and clamp temperature sensor 3, simultaneously the male cone (strobilus masculinus) of ringfeder 2 also with the sealing at the step place of installation of sensors hole 1-4, reach the effect of long term seal antiseep.

Claims (7)

1. a labyrinth heating bath, it is characterized in that: comprise the heating bath (1) of making or have fluoroplastic layer by fluoroplastics, heating bath (1) is provided with Chi Gai (1-6) and deflector (1-1), deflector (1-1) is separated into the cavity of heating bath (1) along heating bath center extroversion and rotates and form spiral helicine flow channel for liquids (1-2), and heating bath (1) is provided with the feed liquor interface (1-3) communicating with flow channel for liquids (1-2) and goes out liquid interface (1-5).
2. labyrinth according to claim 1 heating bath, it is characterized in that: also have by fluoroplastics make or have fluoroplastic layer every dish (5), every dish (5), be provided with the installation cavity (5-2) for heat-generating disc is installed, installation cavity (5-2) top has end plate (5-1), and its deflector of heating bath (1) (1-1) being arranged on every dish (5) top is fitted on the end plate (5-1) of dish (5).
3. labyrinth according to claim 2 heating bath, is characterized in that: the described THICKNESS CONTROL every upper its end plate (5-1) of dish (5) is between 0.5~5mm.
4. labyrinth according to claim 2 heating bath, it is characterized in that: the step installed surface that described heating bath (1) is provided with every step surface corresponding to dish (3), match, heating bath (1) is arranged on dish (3) by securing member, or heating bath (1) and every dish (3) be provided with installing hole, heating bath (1) and every dish (3) be arranged between upper connector and lower connector and connect by securing member, the deflector (1-1) on heating bath (1) be fitted in every dish (5) end plate (5-1) on.
5. labyrinth according to claim 2 heating bath, is characterized in that: describedly every dish (5), be provided with stopper slot (5-3), the spacing block set (1-7) on heating bath (1) is arranged in the stopper slot (5-3) of dish.
6. labyrinth according to claim 1 heating bath, is characterized in that: described heating bath (1) is provided with for detection of the temperature sensor that goes out liquid temp (3) in a side that goes out liquid interface (1-5).
7. labyrinth according to claim 6 heating bath, it is characterized in that: described heating bath (1) is provided with the installation of sensors hole (1-4) of inner small and outside big step, ringfeder (2) is arranged in the installation of sensors hole (1-4) of heating bath (1), locking nut (4) is screwed in the macropore place in installation of sensors hole (1-4) and withstands on ringfeder (2), temperature sensor (3) is through in the through hole of locking nut (4) and the through hole of ringfeder (2), and the test side of temperature sensor (3) is arranged in flow channel for liquids (1-2), the male cone (strobilus masculinus) of ringfeder (2) withstands on the step place in installation of sensors hole (1-4), ringfeder (2) clamps temperature sensor (3) and seals.
CN201420087668.XU 2014-02-27 2014-02-27 Labyrinth heating tank Expired - Fee Related CN203771663U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420087668.XU CN203771663U (en) 2014-02-27 2014-02-27 Labyrinth heating tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420087668.XU CN203771663U (en) 2014-02-27 2014-02-27 Labyrinth heating tank

Publications (1)

Publication Number Publication Date
CN203771663U true CN203771663U (en) 2014-08-13

Family

ID=51288849

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420087668.XU Expired - Fee Related CN203771663U (en) 2014-02-27 2014-02-27 Labyrinth heating tank

Country Status (1)

Country Link
CN (1) CN203771663U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105597181A (en) * 2015-12-14 2016-05-25 苏州登顶医疗科技有限公司 Fast and precise temperature control heating system for clysis machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105597181A (en) * 2015-12-14 2016-05-25 苏州登顶医疗科技有限公司 Fast and precise temperature control heating system for clysis machine

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140813

Termination date: 20210227