M350714 八、新型說明： 【新型所屬之技術領域】 本創作係關於-種具有多重影像輪出元件之顯微鏡及 其積體電路測試裝置，特別係關於一種具有可連續變焦及 自動對焦之多重影像輸出元件的顯微鏡及其積體=路^ 裝置。 电'、丨。1 【先前技術】 光學顯微鏡已被廣泛地應用於觀看在玻片上之物件， 其光學系統通常可提供該物件在焦面上之影像。該光與顯 微鏡之光學元件主要包含二種取像鏡片（即目鏡與物鏡认 -聚光鏡，該目鏡與該物鏡係用以放大該物件之影像，並 將放大影像投射至觀看者之視網膜或照像機之底片，而嗲 聚光鏡之功能則係用以將入射光聚集於該物件上。為了^ 供該入射光，該光學顯微鏡照射系統可包含一入射光源或 導引一外部自然光或人造光至該聚光鏡。此外，該光學顯 微鏡亦可選擇性地使用提昇影像對比之光學元件。再者、 該光學顯微鏡亦可使用一可動平台，其可承載該物件至今 光料徑，並容許該物件在其聚焦平面上移入移出，甚至/ 沿著光軸右移、左移或旋轉。 美國專利公開案2005/0094021 A1揭示一種光學系统 ，錢合具有内建放大光學鏡片之自動對焦照像機，因而 可猎由Wc型底座輕易地_合至任何光學取像线。然而 ^〇05/_彻A1揭示之光學♦統的缺點在於其僅有單一 光學路徑，因而僅可提供單一影像。 133153.doc M350714 【新型内容】 本創作提供一種且右夕 穑俨雷玖⑴ 重影像輸出元件的顯徽铲及盆 積體電路測試裝置，其可連續 的Μ鏡及其 本創作之顯微鏡之一實施人^ 數個影像輪出元件。該物像分享二：一物像分享器及複 光至-物件之第-分光器、=用以導引-照射 將該反射光聚焦於該第一分w物件之反射光並 射光分i $ > 态之正透鏡、一用以將該反 射先刀派至腹數個光學路徑之第 於令去興乂及複數個设置 像;:二Γ上且用以形成該物件之影像的負透鏡，該影 像輪出兀件耗以從則透鏡接㈣物件之影像。 本創作之積體電路測試裝置之—麻 用以接觸一積體電路之 2 ，，匕3至^一 ^ 的探針以及一顯微鏡。該顯微 鏡包含：物像分享器及複數個影像輸出元件，該物像分享 益糸用以導引—照射光至—敎區域，並將該預定區域之 反射光分派至複數個光學路徑，#中該探針係在該預定區 /接觸。接塾。該複數個影像輸出^件係設置於該光學路 桎上且用以從該物像分享器接收該預定區域之影像。 上文已經概略地敍述本創作之技術特徵及優點，俾使 下文之本創作詳細描述得以獲得較佳瞭解。構成本創作之 申明專利範圍軚的之其它技術特徵及優點將描述於下文。 本創作所屬技術領域中具有通常知識者應可瞭解，下文揭 不之概念與特定實施範例可作為基礎而相當輕易地予以修 改或設計其它結構或製程而實現與本創作相同之目的。本 創作所屬技術領域中具有通常知識者亦應可瞭解，這類等 133153.doc M350714 效的建構並無法脫離後附之申請專利範圍所提出之本創作 的精神和範圍。 【實施方式】 圖1例示本創作之顯微鏡1〇。該顯微鏡1〇包含一用以發 射—照射光16之光源14、一物像分享器3〇及複數個用以接 收影像之影像輪出元件20。該物像分享器3〇包含一用以導 引該照射光16至一物件12之第一分光器32、一用以收集該 物件12之反射光18並將該反射光18聚焦於該第—分光器u 之正透鏡34、一用以將該反射光18分派至複數個光學路徑 42之第二分光器36以及複數個設置於該光學路徑上且用 以形成該物件12之影像的負透鏡38,該影像輪出元件刊則 係用以從該負透鏡3 8接收該物件12之影像。 ^較佳地，該第一分光器32、該正透鏡34及該第二分光 器36係設置於一光轴4〇上，且該物像分享器3〇係用以導引 該照射光16經由該光軸40而照射於該物件12。特而古之， 該正透鏡3 4容許該照射光丨6穿透而照射於該物件丨2並容許 該反射光18穿透而照射於該第—分光器32，該第一分光^ 32容許該反射光18穿透而照射於該第：分光器36。較_ ，该複數個影像輸出元件2G可為照像機，其包含複數個用 以放大該物件12之影像的聚焦鏡22以及—影像感測以， 其係用以擷取該物件12在不同焦距下之影像。 聚焦鏡22亦具有連續變焦及自動對焦功能，因此該複數個 影像輸出元件20可個別予以設定以擷取該物件以在不 距下之影像。 5焦 133153.doc M350714 圖2例示本創作之積體電路測試裝置7〇。 試裝置7°可為測試機台，其具有-可安裝一；卡5二 顯微㈣之平台。該測試卡观含至少二及該 ^ OA 3 v 用以接觸一積體 6〇之接塾62的探針52。該顯微鏡1〇係用以擷取一預定 區域72之影像，該探針52係在㈣定區域72接觸該接㈣ °特而言之’該_鏡1()可同時提供該 影像’且各影像可設定在不同焦距，如此該觀tilM350714 VIII. New Description: [New Technology Field] This is a series of microscopes and integrated circuit test devices with multiple image wheel-out components, especially for a multiple image output with continuous zoom and auto focus. The microscope of the component and its integrated body = road ^ device. Electricity ', 丨. 1 [Prior Art] Optical microscopy has been widely used to view objects on a slide, and its optical system usually provides an image of the object on the focal plane. The optical component of the light and microscope mainly comprises two kinds of image taking lenses (ie, an eyepiece and an objective lens-concentrating mirror, the eyepiece and the objective lens are used to enlarge the image of the object, and project the enlarged image to the viewer's retina or photo. The film of the machine, and the function of the concentrating lens is used to concentrate the incident light on the object. In order to provide the incident light, the optical microscope illumination system may include an incident light source or guide an external natural light or artificial light to the Condenser. In addition, the optical microscope can also selectively use optical components for enhancing image contrast. Further, the optical microscope can also use a movable platform, which can carry the object to the light path and allow the object to be in focus. Moving in and out of the plane, even / moving right, left, or rotating along the optical axis. US Patent Publication No. 2005/0094021 A1 discloses an optical system, which has an autofocus camera with built-in magnifying optical lenses, and thus can be hunted. The Wc-type base is easily spliced to any optical image taking line. However, the disadvantage of the optical system disclosed by A〇05/_A1 is that it has only a single light. Learning path, thus only a single image is available. 133153.doc M350714 [New content] This creation provides a shovel and pot circuit test device for the right-night 穑俨 Thunder (1) heavy image output component, which can be continuous One of the microscopes and one of the microscopes of the present invention implements several image wheel-out components. The object image is shared by two: an object-like sharer and a re-lighting-object-phase splitter, = for guiding-illumination Focusing the reflected light on the reflected light of the first object, and irradiating the positive lens of the state of i $ > a state for the reflection of the first knife to the optical path of the abdomen a plurality of setting images: a negative lens on the second surface and used to form an image of the object, and the image wheel output device is used to receive an image of the object from the lens. The integrated circuit testing device of the present invention is used for hemp To contact a probe of an integrated circuit 2, a probe of 3 to ^1, and a microscope, the microscope includes: an object image sharing device and a plurality of image output elements, which are used to guide and illuminate the image. Light to the 敎 area, and the opposite of the predetermined area The light is distributed to a plurality of optical paths, wherein the probe is in the predetermined area/contact. The plurality of image output devices are disposed on the optical path and are configured to receive the image from the object image sharer. The image of the predetermined area. The technical features and advantages of the present invention have been described in detail above, so that the detailed description of the present invention will be better understood. Other technical features and advantages constituting the scope of the patent claim of the present invention will be described. In the following, it should be understood by those of ordinary skill in the art that the concept and specific embodiments of the present invention can be modified or designed with other structures or processes as a basis for achieving the same purpose as the present invention. It is also understood by those of ordinary skill in the art to which this invention pertains that the construction of such 133153.doc M350714 effects cannot be separated from the spirit and scope of the present invention as set forth in the appended claims. [Embodiment] Fig. 1 illustrates a microscope 1 of the present invention. The microscope 1 includes a light source 14 for emitting light-illuminating light 16, an object image sharing device 3, and a plurality of image wheeling elements 20 for receiving images. The object image sharing device 3 includes a first beam splitter 32 for guiding the illumination light 16 to an object 12, a reflected light 18 for collecting the object 12, and focusing the reflected light 18 on the first surface. a positive lens 34 of the beam splitter u, a second beam splitter 36 for distributing the reflected light 18 to the plurality of optical paths 42, and a plurality of negative lenses disposed on the optical path for forming an image of the object 12 38. The image wheeling component is for receiving an image of the object 12 from the negative lens 38. Preferably, the first beam splitter 32, the positive lens 34 and the second beam splitter 36 are disposed on an optical axis 4〇, and the object image sharing device 3 is used to guide the illumination light 16 The object 12 is illuminated via the optical axis 40. In particular, the positive lens 34 allows the illumination diaphragm 6 to penetrate and illuminate the object 丨 2 and allows the reflected light 18 to penetrate and illuminate the first beam splitter 32. The first beam split 32 allows The reflected light 18 penetrates and is incident on the first: splitter 36. The plurality of image output elements 2G can be a camera, and include a plurality of focusing mirrors 22 for magnifying the image of the object 12 and image sensing for capturing the object 12 differently. Image under focal length. The focusing mirror 22 also has a continuous zoom and auto focus function so that the plurality of image output elements 20 can be individually set to capture the image at a distance. 5 coke 133153.doc M350714 Fig. 2 illustrates the integrated circuit test device 7 of the present invention. The test device 7° can be a test machine with a platform that can be mounted one; card 5 two micro (4). The test card contains at least two and the probe 52 of the ^ OA 3 v for contacting the connector 62 of an integrated body 6 . The microscope 1 is used to capture an image of a predetermined area 72. The probe 52 is in contact with the (four) fixed area 72. The 'mirror 1' can provide the image simultaneously and each The image can be set at different focal lengths, so the view til
用者即可同時觀察該預定區域72在不同焦距下之影像。此 外，該顯微鏡10亦可藉由自動對焦功能而容許各影像具有 連續且分離之焦距。因&，該顯微鏡1{)可完全滿足當該探 針52移動時及/或當焦點改變時，個別調整焦距之需求。 本創作之技術内容及技術特點已揭示如上，然而本創 作所屬技術領域中具有通常知識者仍可能基於本創作之教 示及揭示而作種種不背離本創作精神之替換及修飾。因此 ，本創作之保護範圍應不限於實施範例所揭示者，而應包 括各種不背離本創作之替換及修飾，並為以下之申請專利 範圍所涵蓋。 【圖式簡單說明】 藉由參照前述說明及下列圖式，本創作之技術特徵及 優點得以獲得完全瞭解。 圖1例示本創作之顯微鏡；以及 圖2例示本創作之積體電路測試裝置。 【主要元件符號說明】 10 顯微鏡 133153.doc M350714 12 物件 14 光源 16 照射光 18 反射光 20 影像輸出元件 22 聚焦鏡 24 影像感測器 30 物像分享器 32 第一分光器 34 正透鏡 36 第二分光器 38 負透鏡 40 光軸 42 光學路徑 50 測試卡 52 探針 60 積體電路 62 接墊 70 積體電路測試裝置 72 預定區域 133153.doc 10The user can simultaneously observe the image of the predetermined area 72 at different focal lengths. In addition, the microscope 10 can also allow each image to have a continuous and separate focal length by the autofocus function. Because of &, the microscope 1{) can fully satisfy the need to individually adjust the focal length when the probe 52 moves and/or when the focus changes. The technical content and technical features of the present invention have been disclosed as above, but those having ordinary knowledge in the technical field of the present invention may still make various substitutions and modifications without departing from the spirit of the present invention based on the teachings and disclosures of the present invention. Therefore, the scope of protection of this creation should not be limited to those disclosed in the examples, but should include various substitutions and modifications that do not depart from the present invention and are covered by the following patent applications. BRIEF DESCRIPTION OF THE DRAWINGS The technical features and advantages of the present invention are fully understood by referring to the foregoing description and the following drawings. Fig. 1 illustrates a microscope of the present invention; and Fig. 2 illustrates an integrated circuit test apparatus of the present invention. [Main component symbol description] 10 Microscope 133153.doc M350714 12 Object 14 Light source 16 Illumination light 18 Reflected light 20 Image output element 22 Focusing mirror 24 Image sensor 30 Object image sharing unit 32 First beam splitter 34 Positive lens 36 Second Beam splitter 38 Negative lens 40 Optical axis 42 Optical path 50 Test card 52 Probe 60 Integrated circuit 62 Pad 70 Integrated circuit test device 72 Predetermined area 133153.doc 10