M341200 八、新型說明： 【新型所屬之技術領域】 本創作係有關一種自動光學檢測設備，特別是指一種複合式自動光學 檢測設備。 【先前技術】 AOI (automatics optical inspection，自動光學檢測設備）之主要操作 -原理係主要藉由電腦程式驅動下，透過攝像鏡頭對檢測物進行自動掃瞄， 採集圖像，並將圖像與資料庫中的合格參數進行比較分析，經過圖樣處理 •後，檢測出檢測物上的缺陷，並透過顯示器或自動標誌把缺陷顯示/標示出 鲁來，以供維修人員進行修整，因此A0|除了能檢測出目檢無法查出的缺陷 外，還能把生產過程中所出現的缺陷類型加以收集，產生統計資料，以供 製程控制人員分析和管理。 ^綜上所述，A0丨相較於傳統檢測方式，具有精密度高，沒有人工目測 受^]元件微小化的限制，再者檢測速度快，能夠有效節省人工成本，與具 有資料儲存魏，可供後續分析管理。因此Α〇丨設備已普遍細於各種產 業的檢測作業上，尤其是在半導體（丨C)、平面顯示器（FDP)、印刷電路 板（PCB)、印刷電路板組裝（PCBA)等領域中。 ❿就薄膜電晶體液晶顯示H而言，AOI設備的檢測幾乎應用於所有製 •程步驟中，舉例來說在TFT圖形陣列版、彩色濾光片、LCD面板組裝、 LCD模組組裝等製程中需要八〇丨設備進行檢測，而已完成的tft圖形陣 歹J版與彩色慮光片在運送至LCD面板組裝站點前、偏光板運送至lcd面 板組裝站點前、LCD面板組裝後進行LCD模組組裝前，以及lCD模組組 裝後也皆需要利用AOI進行檢測。 在LCD面板組裝之站點後，所需進行的A〇丨檢測，包含有如第ia圖 所示之利用掃瞄式攝像鏡頭1(mLCD面板12進行污染粒子檢測(partjc|e inspection)與如第1B圖所示之利用量測用的量測攝像鏡頭ι4對LCD面 板12進行對組精度量測。但是上述A〇丨設備皆為獨立機台設備，因此造 5 M341200 ΐίί至？使用與配置受到限制，再者，為配置這三套A01設備與設備所 二運逆L LD) 7卸載（ULD)區域’縣據減室相當A的空間，而相對 生導引無人搬運車(AGV)或有軌式搬運車⑽▽)的動 LCD t 面板組裝之站點後，習知係侧人卫以放大鏡祀對於 这樣的* 膠寬量測⑽加⑽，如第1C圖所示，伸 k樣=方式，在対到操作人員身高限制及衍生安全性的問題。 有鐘於此，本創作遂針對上述習 光學檢·備，以有效克服上述之料_。—種I式自動 |【新型内容】M341200 VIII. New description: [New technical field] This creation is about an automatic optical inspection equipment, especially a composite automatic optical inspection equipment. [Prior Art] The main operation of AOI (automatic optical inspection equipment) - principle is mainly driven by computer program, automatic scanning of the detected object through the camera lens, image acquisition, and image and data The qualified parameters in the library are compared and analyzed. After the pattern processing, the defects on the detected objects are detected, and the defects are displayed/marked by the display or the automatic sign for the maintenance personnel to trim, so A0| In addition to detecting defects that cannot be detected by visual inspection, the types of defects that occur during the production process can be collected to generate statistical data for analysis and management by process control personnel. In summary, A0丨 has higher precision than traditional detection methods, and there is no manual visual measurement limited by the miniaturization of components. Moreover, the detection speed is fast, which can effectively save labor costs, and has data storage Wei, For subsequent analysis management. Therefore, germanium equipment has been generally used in inspections in various industries, especially in the fields of semiconductor (丨C), flat panel display (FDP), printed circuit board (PCB), and printed circuit board assembly (PCBA). ❿In the case of thin film transistor liquid crystal display H, the detection of AOI equipment is used in almost all process steps, for example, in TFT pattern array, color filter, LCD panel assembly, LCD module assembly, etc. Eight-point equipment is required for inspection, and the completed tft graphics array J and color filters are transported to the LCD panel assembly site, the polarizer is transported to the lcd panel assembly site, and the LCD panel is assembled. Before assembly, and after assembly of the lCD module, it is also necessary to use AOI for testing. After the assembly of the LCD panel, the required A〇丨 detection includes the use of the scanning type imaging lens 1 (mLCD panel 12 for contamination particle detection (partjc|e inspection) and the like The measurement camera lens ι4 for measurement using the measurement shown in FIG. 1B measures the group accuracy of the LCD panel 12. However, the above-mentioned A〇丨 devices are independent machine devices, so that the use and configuration are 5 M341200 ΐίί Restriction, in addition, in order to configure these three sets of A01 equipment and equipment, the second-hand reverse L LD) 7 unloading (ULD) area 'county according to the reduction room is equivalent to A space, while the relative lead-free automated guided vehicle (AGV) or After the assembly of the moving LCD t panel of the rail-mounted truck (10) ,), the conventional side is equipped with a magnifying glass 祀 for such * glue width measurement (10) plus (10), as shown in Figure 1C, stretch k = way, in the case of operator height restrictions and derived security issues. With this in mind, this creation is aimed at the above-mentioned optical inspection and preparation to effectively overcome the above-mentioned materials. —I type automatic | [new content]
Lrntf作之/要目的在提供—種複合式自動光學檢測設備，1同時且有 伽則、框膠線寬量測檢測與對組精度檢測的功用。八 -個載入（LD) /卸種複料自動鮮_，其僅需配置 測、污染粒子檢測盥對即可具有LCD面板框膠線寬量測檢 基板顺備，其能使運送 限制更具雜。 林佩搬運車（RGV)動線的配置 行，其能避免進 有-載入彳铜物之载人區域；—卸餅^自^學檢顺備’其包含 與卸載區域間的掃晦式攝像鏡頭；一用以S3,；裝設於載入區域 的影像並記錄的瑕峨主機;以及式攝像鏡頭所摘取出 呈現或比較分析並記錄的鱗檢查主機。將里嶋像鏡顯擷取之影像 兹為使貴審查委員對本創作之結構 之瞭解與職，謹佐啸佳之實施_及岭詳細步 6 M341200 【實施方式】 本創作之精神所在乃針對在LCD面板組裝之站點後，所需進行的對組 精度量測與污染粒子檢測（particleinspection)之A0丨設備整合形成一嶄 新的複合式自動光學檢測設備，並將習知需透過人工以放大鏡進行觀測膠 寬的檢測部分，利用本創作複合式自動光學檢測設備進行，而使創作之複 合式自動光學檢測設備達到多用途之目的。 再者’藉由本創作之複合式自動光學檢測設備的設置，僅需一個載入 (LD)/卸載（uld)區域，因此相對的能夠大幅度縮小自動光學檢測設備 -在無塵室的佔用率，進而使得無塵室的空間能更有有效地應用，不在受限 籲於運送基板之磁性導引無人搬運車（AGV)或有軌式搬運車（RGV)動線 的配置限制。此外，利用本創作之複合式自動光學檢測設備的設置可將原 先分作為三個AO I檢測設備的機台中的相同元件部分共用，因而能有效 的減少工廠配置在檢測儀器上的成本花費。 接續’下列說明係針對上述本創作之精神所提出之具體實施例說明， 但須陳明的是下列說明僅是為使熟悉該項技術更清楚、明白本創作，而並 不忐以此具體實施例來作為本創作之權利範圍的侷限。 首先，請一併參閱第2圖，其係本創作之主要架構示意圖。本創作之 複合式自動光學檢測設備2〇包含有一自動檢測用的掃瞄式攝像鏡頭22， _其係使用掃瞒式電荷#合元件（scan CCD); 一量測攝像鏡頭24，其係使 用量測式電荷輕合元件（measuPed CCD);—用以接收掃喊攝像鏡頭 ，22所擷取到的影像，以進行LCD面板上污染粒子檢測的瑕疵檢查主機 26 ’以及一权準檢查主機28，其係接收量測攝像鏡頭24經定位、對焦後 所擷2到之影像與校準檢查主機内的資料參數進行比較分析並記錄。 藉由這樣的設㈣可料綱帛掃喊攝像鏡頭22對LCD面板上污 染粒子進行檢測，並可利用量測用的量測攝像鏡頭24的自動對焦系統，來 對污染粒子進行放大取像，以利分析。 再者，透過軟體設定，將量測用攝像鏡頭24自動移至設定位置並自動 對焦，以對LCD面板的框膠線寬進行量測檢測與/或進行LC[)面板對組精 7 M341200 度量測，人員僅需由量測用的量測攝像鏡頭24所取之影像進行判定分析。 接續，請參閱第3〜5圖，其係利用本創作之複合式自動光學檢測設備 進行LCD面板污染粒子檢測、LCD面板框膠線寬量測檢測或進行LCD面 板對組精度檢測的示意圖。 首先，輸送帶（conveyor)(圖中未示）搬送LCD面板23進入本發 明之複合式自動光學檢測設備之檢測區域時，靠位機器（圖中未示）自動 會整列LCD面板23至定位，並由錄像機（圖中未示）讀取基板的識別碼 (ID)。讀取完畢後，基板兩側的真空裝置（圖中未示）吸附lcd面板23， 於LCD面板23下方使用空氣漂浮（air floating)使LCD面板23呈均勻 鲁水平並搭配移載組移動於複合式自動光學檢測設備之檢測區域範圍内作 LCD面板23檢測，並將檢測後的相關資料儲存於相對應之主機内並於顯 不上顯不受檢測基板的相關資訊。 在掃瞄式攝像鏡頭22中所使用的打光方式為反射式，採亮場（b|1ght field)取像方式取像，掃瞄式攝像鏡頭22取經由LC[)面板23所反射的光， 而取得待測物影像，並將影像傳送至瑕疵檢查主機26，以供人員透過瑕疵 檢查主機26之顯示器或自動標誌把缺陷顯示/標示出來，以供維修人員進 行修整，並還能把生產過程中所出現的缺陷類型加以收集，產生統計資料， 以供製程控制人員分析和管理，並確認機台保養管理⑽）後機台清潔度。 再者，更可透過設定，將量測攝像鏡頭24自動移至LCD面板23^上 的污染粒子位置並自動難，以娜ώ污練子的影像。此—污染粒 測結果係可用以確認機台保養管理（PM)後的機台清潔度。…欢 當對LCD面板23之框膠線寬進行量測檢測與域進行對植精度 以紐設定欺點，將量麵像_ 24自動移至設定㈣並進行對 …、取像’並將取像結果顯示於校雜查主機28之顯示器上 需由置測攝像鏡頭24所取像之影像，進行對準精度的判定。、 在比對框膠線寬的部分，是_量測攝像鏡頭2又4對二寬 衫像與校準檢查主機28之資料庫中的合格參數進杆 ^又、于 析後的轉錄齡紐靴查域28=7析’並將比對分 裔M獲知框膠線寬，或者 8 M341200 將資料儲存於資料系統中，產生統計資料，以供製程控制人員分析和管理。 利用本創作之複合式自動光學檢測設備，單一組對後的Lcd基板23 將可於同一設備進行框膠線寬量測與對準精度量測，鑑此，可大幅度簡化 產品量測與檢測流程。 睛再參閱第6圖與第7圖，其為分別本創作之複合式自動光學檢測設 備的機台立體示意圖與侧視圖。由圖中可視，本創作之複合式自動光學檢 測没備20只需-個載入（LD)區域30/卸載（ULD)區域32，即可進行 LCD面板之框膠線寬量測檢測、污染粒子檢測與對組精度的檢測，因此， 能夠大幅度縮小自動光學檢測設備在無塵室的空間佔用率，進而使得無塵 鲁室的空間能更有效地靈活應用。而人員的操作位置34則設定於本創作之複 合式自動光學檢測設備20之兩侧，如第8圖所示。 综上所述，本創作係基於簡化檢測與量測流程，而進行設備功能之結 合所產生_新複合式自動光學檢測設備，其包含有—驗自動檢測用的 掃目苗式攝像鏡頭、-量測用的量測攝像鏡頭、一用以呈現出掃瞒式攝像鏡 頭所擷取出的影像並記錄的瑕錄查主機、一用以將量測攝像鏡頭所娜 之於像進行比較分析、記錄與呈現的校準檢查主機以及一用以載入或卸載 LCD面板的載入/卸載區域。 本創作之複合式自動光學檢測設備將LCD面板之框膠線寬量測檢 鲁測、π錄子檢職對_度的檢腦合在—機台，藉此大幅度縮小自動 光子檢測&備在無塵室的空間侧率，進而使得無塵室的空間能更有有效 ‘地應用，使運送基板之磁性導引無人搬運車(AGV)或有軌式搬運車⑽… 動線的配置更具彈性。 此外用AOU又備後能將[CD面板之框膠線寬量測檢測、污染粒 子檢測與對組精度的檢測機台中相同元件的部分省略，能有效的減少工廠 配置在檢測儀器上的成本花費。 —唯^上所述者，僅為本創作之較佳實施例而已，並非用來限定本創作 實施之範圍。故即凡依本創作中請範_述之特徵及精神所為之均等變化 或修飾，均應包括於本創作之申請專利範圍内。 9 M341200 【圖式間單說明】 Ϊ 利用掃瞄式攝像鏡頭進行待測物之污染粒子檢測的示意圖。 _為_量測式攝像鏡頭進行對組精度量測的示意圖。 f 圖係為人工以放大鏡進行膠框量測的示意圖。 S 創作之複合式自動光學檢測設備之主要架構示意圖。 …目係為咖本創作之複合式自就學檢測 ^、框雜寬量·顺進行對崎度魏審_示_。綠子 L圖係為本創作之複合式自動光學設備 f 7圖係為本創作之複合式自動光學檢職備的機台侧視圖了圖 自缺輸__㈣觸作示_。 10掃瞒式攝像鏡頭 12 LCD面板 14量測攝像鏡頭 16放大鏡 20複合式自動光學檢測設備 22掃瞄式攝像鏡頭 23 LCD面板 鲁24量測攝像鏡頭 26瑕疲檢查主機 -28校準檢查主機 30載入區域 32卸載區域 34操作位置The purpose of Lrntf is to provide a hybrid automatic optical inspection device, which has the functions of gamma, frame glue line width measurement and group precision detection. Eight-loading (LD) / unloading and multi-feeding automatic fresh _, which only needs to be configured for measurement and polluting particle detection, and can have LCD panel frame line width inspection substrate ready, which can make shipping restrictions more Miscellaneous. The configuration line of the Lin Pei truck (RGV) moving line can avoid the loading and unloading of the copper-bearing manned area; - the unloading cake ^ from the ^ inspection check-supplied 'the broom between the inclusion and the unloading area Camera lens; a S3,; a host mounted on the image of the loading area and recorded; and a scale inspection host that is extracted or compared and recorded and recorded. The image of the image of the 嶋 镜 兹 为 为 为 为 为 为 为 为 为 为 为 为 审查 审查 佐 佐 佐 佐 佐 佐 佐 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 啸 详细 详细 详细After the panel assembly site, the required assembly accuracy measurement and particle inspection A0丨 device integration form a new composite automatic optical inspection device, and the conventional need to observe through a manual magnifying glass The detection part of the glue width is carried out by the artificial automatic optical detecting device of the present invention, and the created composite automatic optical detecting device achieves the purpose of multi-purpose. Furthermore, with the creation of the composite automatic optical inspection device of the present invention, only one loading (LD)/unloading (uld) area is required, so that the relative optical scanning device can be greatly reduced in the clean room occupancy rate. In turn, the space of the clean room can be more effectively applied, and the configuration restrictions of the magnetic guided automated guided vehicle (AGV) or the rail-mounted truck (RGV) moving line for transporting the substrate are not limited. In addition, the setting of the composite automatic optical detecting device of the present invention can share the same component parts in the machine which are originally divided into three AO I detecting devices, thereby effectively reducing the cost of the factory configuration on the detecting instrument. Continuation of the following description of the specific embodiments of the present invention, but it should be noted that the following description is only to make the creation of the technology clearer and clearer, and not to implement it. This is a limitation of the scope of the rights of this creation. First of all, please refer to Figure 2, which is the main structure diagram of this creation. The composite automatic optical detecting device 2 of the present invention includes a scanning type imaging lens 22 for automatic detection, which uses a broom type charge (scan CCD); a measuring camera lens 24, which is used A measurable charge-and-light component (measuPed CCD); - a sputum inspection host 26' for receiving a squeaking camera lens, 22 captured images for contamination particle detection on the LCD panel, and a right inspection host 28 The image is received and measured, and the image obtained by the positioning and focusing is compared with the data parameters in the calibration inspection host for comparison and recording. By means of such a design, the contaminated particles on the LCD panel can be detected by the camera lens 22, and the autofocus system of the measuring camera 24 for measuring can be used to magnify and image the contaminated particles. Eli analysis. Furthermore, through the software setting, the measuring lens 24 for measurement is automatically moved to the set position and automatically focused to measure and measure the line width of the LCD panel and/or perform LC[] panel pairing. For the measurement, the person only needs to perform the determination analysis by the image taken by the measurement camera lens 24 for measurement. For the connection, please refer to Figures 3~5, which is a schematic diagram of the composite automatic optical inspection device of the present invention for detecting the contamination of the LCD panel, the line width measurement of the LCD panel, or the accuracy of the LCD panel. First, when a conveyor (not shown) transports the LCD panel 23 into the detection area of the composite automatic optical inspection apparatus of the present invention, the positioning machine (not shown) automatically aligns the LCD panel 23 to the positioning. The identification code (ID) of the substrate is read by a video recorder (not shown). After the reading is completed, the vacuum device (not shown) on both sides of the substrate adsorbs the lcd panel 23, and the air floating is used under the LCD panel 23 to make the LCD panel 23 have a uniform level and move with the transfer group to the composite. The detection of the LCD panel 23 is performed within the detection area of the automatic optical detecting device, and the related data after the detection is stored in the corresponding host and the relevant information of the detecting substrate is not displayed. The light-emitting method used in the scanning type imaging lens 22 is a reflection type, and the light-receiving field (b|1 ght field) image capturing mode is taken, and the scanning type imaging lens 22 takes light reflected by the LC [) panel 23. And obtaining the image of the object to be tested, and transmitting the image to the inspection host 26 for the person to display/mark out the defect through the display or the automatic mark of the inspection host 26 for maintenance personnel to perform the trimming, and can also produce The types of defects that occur during the process are collected to generate statistical data for analysis and management by the process control personnel, and to confirm the cleanliness of the machine after the machine maintenance management (10). Moreover, the measurement camera lens 24 can be automatically moved to the position of the contaminated particles on the LCD panel 23^ through the setting, and it is automatically difficult to use the image of the smear. This—contamination particle measurement results can be used to confirm machine cleanliness after machine maintenance management (PM). ...will take the measurement and detection of the frame line width of the LCD panel 23 and set the bullying point to the planting precision button, automatically move the measuring surface image _ 24 to the setting (4) and perform the pairing, taking the image and taking As the result is displayed on the display of the main inspection host 28, the image taken by the image-capturing lens 24 is required to determine the alignment accuracy. In the part of the comparison frame glue line, it is the measurement parameter of the measurement camera lens 2 and the 4 pairs of the second wide shirt image and the calibration check host 28. Check the domain 28 = 7 analysis 'and compare the pair of M to get the glue line width, or 8 M341200 to store the data in the data system, generate statistical data for process control personnel analysis and management. By using the composite automatic optical detecting device of the present invention, a single group of Lcd substrates 23 can be used for measuring the line width measurement and alignment precision of the same device, thereby greatly simplifying product measurement and detection. Process. Referring again to Figures 6 and 7, it is a perspective view and a side view of the machine of the composite automatic optical inspection device of the present invention. As can be seen from the figure, the composite automatic optical inspection of the present invention does not require 20 loading (LD) area 30/unloading (ULD) area 32, and can perform the inspection and contamination of the frame line width of the LCD panel. Particle detection and detection of group accuracy, therefore, can greatly reduce the space occupancy of the automatic optical detection equipment in the clean room, and thus make the space of the clean room can be more effectively and flexibly applied. The operating position 34 of the person is set on both sides of the combined automatic optical detecting device 20 of the present invention, as shown in Fig. 8. In summary, the creation is based on a simplified detection and measurement process, combined with the combination of equipment functions _ new composite automatic optical inspection equipment, including the inspection of the automatic detection of the sweeping camera lens, - The measuring camera lens for measuring, the 瑕 recording host for presenting the image taken by the broom-type camera lens and recording, and the method for comparing and analyzing the image of the measuring camera lens The calibration check host with the presentation and a load/unload area for loading or unloading the LCD panel. The composite automatic optical detecting device of the present invention combines the frame width of the LCD panel with the test of the width of the frame, and the inspection of the π-recorder is performed on the machine, thereby greatly reducing the automatic photon detection & The space side rate of the clean room is made, so that the space of the clean room can be more effectively applied, so that the magnetic guided unmanned vehicle (AGV) or the rail-mounted truck (10) that transports the substrate is configured. More flexible. In addition, after the AOU is prepared, the part of the same component in the inspection machine of the CD panel can be effectively eliminated, which can effectively reduce the cost of the factory configuration on the inspection instrument. The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Therefore, any changes or modifications to the characteristics and spirit of the application in this creation should be included in the scope of the patent application for this creation. 9 M341200 [Illustration between drawings] 示意图 A schematic diagram of the detection of contaminated particles of the object to be tested using a scanning imaging lens. _ is a schematic diagram of measuring the accuracy of the group for the _ measuring camera. f The diagram is a schematic diagram of artificially measuring the frame with a magnifying glass. The main structure of the composite automatic optical inspection equipment created by S. ... The project is a composite self-study test for the creation of coffee, ^, the frame width and the amount of shun. The green L-picture is the composite automatic optical device of the creation. The f 7 picture is the side view of the machine for the composite automatic optical inspection of the creation. The self-deficient __(4) touches the display _. 10 broom camera lens 12 LCD panel 14 measurement camera lens 16 magnifier 20 composite automatic optical detection equipment 22 scan camera lens 23 LCD panel Lu 24 measurement camera lens 26 fatigue check host -28 calibration check host 30 Incoming area 32 unloading area 34 operating position