M335007 • 八、新型說明： 【新型所屬之技術領域】 本創作係有關於一種光罩盒，特別是有關於一種具有定位件之光罩盒。 【先前技術】 近代半導體科技發展迅速，其巾光學微影技術（〇ptieal LithQgraphy)扮演 重要的角色’只要是關於圖形(pattern)定義，皆需仰賴光學微影技術。光學微影 技術在半導_應壯，是將設計好的線路製作成具有特定形狀可透光之光罩 (ph〇t〇 mask) 〇 mmm ^ wafer)T# 光顯示特定圖案。由於任何附著於光罩上的塵埃顆粒(如微粒、粉塵或有機物） 都會造成投影成像的品質劣化，用於產生圖形的光罩必須保持絕對潔淨，其中 SMIF系狀目的係城少半導體製程之贿及運送過財較之微粒過量。 如第圖所不，為-習知的光罩盒卜其係由上蓋體u與下蓋體12所組合 而成，其中在上蓋體u與下蓋體12内各角落之位置，設有複數個定位件13， 此，位件13設置的方式為兩兩—對，且大致呈直綠配置，而配置於上蓋體^ 之疋位件13與配置於下蓋體12之定位件13亦大致設於可對應之相對位置。當 光罩置於下蓋體12⑽，光罩盒i之上蓋體„與下蓋體12蓋合，配置於光罩 ^内之定位件13將可頂持並扣壓光罩，將鮮固定攸罩盒i内，以避免移 光罩盒1啦生震動，而導致光罩盒i狀光罩損壞。其巾，由於^位件^ 方式設置於料盒丨内，因此在酸定辦13於光罩盒i之上蓋體u 二、丨2時，不但在兩兩配置時易產生對位的誤差，甚至於在上蓋體11斑 ==位件13之相對位置上，咖 進而影響光因定辦13讀概差’轉致移顯或產生磨損， 良者有崎提供—種移盒之纽件，騎對先驗術加以改 J罩益歧件之座體姐呈L狀，除了可增加讀件之對稱性，降低 5 M335007 .製造過程情位的困難，或是降低對位的誤差外，亦可提高光罩導入光罩盒之 容=度/纽ϋ定光罩，喊少光罩與光罩盒之縣，義減少塵粒形成而 影響良率，使得光罩壽命得以提高。 【新型内容】 祕決先雜狀_，梢雜供—種具有雜狀料盒。光罩盒係 -由上f體與下蓋體組合而成，形成一内部空間可容納光罩，此光罩盒之上蓋體 或下蓋體内之祕設有至少—定位件，其中此定位件的結構包括座體與固定元 _件此座體係以複數個支揮點固接於光罩盒之上蓋體及下蓋體内各角落之位 置大致呈L狀，而此固定元件則係設置於座體上其中固定元件的結構包 括，持面及树面，當光罩盒承載一光罩且蓋合時，此固定元件之頂持面 及扣壓面於蓋合時會與該光罩接觸並固定之。 因此本獅之主要目的在於提供_種鮮盒，其定位件可降低製造過程 中對位的困難。 本創作之另—目的在於提供—種鮮盒，其定位件可降低對位的誤差。 本創作之X-目的在於提供—種光罩盒，其定辦可提高光罩導入光罩盒 之容易度。 釀、本創作之再又-目的在於提供一種光罩盒，其定位件可有效固定光罩，以 減少光罩與光罩盒之摩擦，進而減少塵粒形成而影響良率。 【實施方式】 "由於本創作係揭露—種具有定位件之光罩盒，其巾所利關的—些光罩或 光罩盒之詳細製造或處理過程，係利用現有技術來達成，故在下述說明中，並 不作元整描述。而且下述内文中之圖式，亦並未依據實際之相關尺寸完整繪製， 其作用僅在表達與本創作特徵有關之示意圖。 第二圖係本創作光罩盒之一較佳實施例示意圖，光罩盒2係由上蓋體21與 6 M335007 下蓋體22組合而成，形成一内部空間可容納光罩，此光罩盒2之上蓋體^曳 下蓋體22内的角落設有至少一個定位件3用以固定光罩，而此定位件3為高分 子材料所形成，光罩盒2之材質則大致可為金屬材質或高分子材料所形，其中 金屬材質大致可為不銹鋼、鋁合金或鎂合金，而上述之光罩盒2可為光罩傳送 盒或光罩保存盒。 ^ 第三A圖係本創作定位件之一較佳實施例示意圖，定位件3的結構包括座 體31與固定元件32a，此座體31之固定方式係以複數個支撐點3ιι固接於光罩 盒2之上蓋體21及下蓋體22内各角落之位置，且此座體31大致呈l狀，因此 '曰力疋位件3之對稱性，降低製造過程中對位的困難，或是降低對位的誤差， 而此固定元件仏則係設置於座體31上，其中固定元件32a的結構包括一頂持 面21a及扣壓面322a，當光罩盒2承載一光罩且蓋合時，此固定元件之 頂持面32la具有將光罩導正及定位之功能，而扣壓面3瓜於蓋合時會與該光罩 接觸並固定之，⑽免鮮於運送雜巾產生碰躺損害光罩。” 第三B圖係本創作定位件之另一較佳實施例示意圖，該固定元件微的結 構包括-頂持面㈣及—扣壓面通，其中頂持面纖與扣壓面通為相^ =之平面，且頂持面321b與扣壓面现之夾角約為〇度至約⑽度，當光罩 識2承載-光罩且蓋合時，此固定元件3沈之頂持面32化具有將光罩導正及定 位之功能，而扣壓面通於蓋合時會與該光罩接觸並固定之。 t第三C圖係本創作定位件之又一較佳實施例示意圖，該固定元件32c可為 :彎曲彈性結構33e，其-彎曲之端部331e結合於該座體31上，另—彎曲之 4 33,則呈彈性懸浮狀態於該單或複數個支撐·點mi之間。 一第二D圖係本創作定位件之再一較佳實施例示意圖，其固定元件咖可為 考曲彈性結構33d，其第_f曲之端部遍結合於該座體^上，第二彎曲= 端部遍具有一頂持面321a，第三彎曲之端部333d具有-扣壓面遍。 件3第=圖係本創作定位件之座翻定方式另—較佳實施例示意圖，此定位 之上31係透過定位手段，固定於上蓋體21或下蓋體22内所設置的定位 7 M335007 占上/、座體3i之定位手段為設置於此座體之扣合環祀，以夾緊固定於定 位點上，使該定位件3呈固定狀態。 第四B圖係本創作定位件之座體固定方式又_較佳實施例示意圖，此定位 件3之座體31係透過^位手段，蚊於上蓋體2ι或下蓋體22崎設置的定位 〃座體31之疋位手段為具套接孔S13之定位部，以利用定位部之套接孔 313套接定位點。 第四C圖係本創作定位件之座體固定方式再一較佳實施例示意圖，此定位 件3之座體31係透過粒手段，峡於上蓋體21或下蓋體22内所設置的定位 點上其座體31之定位手段為設置於該座體31之定位孔314，以供固定元件 32穿附細較健上；其舰Ή之定位手段亦可為將綱件3⑷由基部之 頂面穿入定位孔314，以將定位件3細於定位點上；其座體31之定位手段亦 可為將鎖固件3U1由基部之底面穿入定位孔314，以將定位件3鎖固於定位點 上。其中上述之鎖固件3141可為鉚針、螺絲，亦或大致由金屬材料所製成。 根據本創作定位件之座翻定方式再_較佳實施例(未示於圖巾），此定位件 3之座體31係透過定位手段，固定於上蓋體21或下蓋體22崎設置的定位點 上，其座體31之定位手段為透過黏著劑將定位件3黏固於定位點上。 ‘以上所述僅為本創作之較佳實施例而已，並非用以限定本創作之申請專利 權利；同時以上的描述，對於熟知本技術領域之專門人士射明瞭及實施，因 此其他未脫縣辦所麻之精神獨完成的敎改變絲飾，均應包含在下 述之申請專利範圍中。 “ 【圖式簡單說明】 第一圖係光罩盒之示意圖（習知技術）。 第二圖係本創作光罩盒之一實施例示意圖。 第三Α圖至第三D圖係本創作定位件之一實施例示意圖。 第四A圖至第四C圖係本創作定位件座體固定方式之一實施例示意圖。 8 M335007 【主要元件符號說明】 11 12 13 2 21 22 3 • 3! 311 312 313 314 3141 32a 32b • 32c 32d 321a 321b 322a 322b 33c 33d 331c 光罩傳送盒 上蓋體 下蓋體 定位件 光罩盒 上蓋體 下蓋體 定位件 座體 支撐點 扣合環 套接孔 定位孔 鎖固件 固定元件 固定元件 固定元件 固定元件 頂持面 頂持面 扣壓面 扣壓面 彎曲彈性結構 彎曲彈性結構 彎曲端部 9 M335007 331d 第一彎曲端部 332c 彎曲端部 332d 第二彎曲端部 333d 第三彎曲端部M335007 • VIII. New Description: [New Technology Field] This creation is about a reticle case, especially a reticle case with a positioning member. [Prior Art] Modern semiconductor technology has developed rapidly, and its optical lithography technology (〇ptieal LithQgraphy) plays an important role. As long as it is about the definition of a pattern, it depends on optical lithography. The optical lithography technology in the semi-conductor _ should be strong, is to design the circuit into a specific shape permeable light ray (ph〇t〇 mask) 〇 mmm ^ wafer) T# light display specific pattern. Since any dust particles (such as particles, dust or organic matter) attached to the reticle will cause deterioration of the quality of the projection image, the reticle used to produce the pattern must be absolutely clean, and the SMIF system is intended to be a bribe for the semiconductor process. And the excess of particulates transported over the financial period. As shown in the figure, a conventional mask case is formed by combining an upper cover body u and a lower cover body 12, wherein a plurality of positions in the upper cover body u and the lower cover body 12 are provided. The positioning member 13 is disposed in a manner of two-two pairs, and is substantially in a straight green configuration, and the positioning member 13 disposed on the upper cover body and the positioning member 13 disposed on the lower cover body 12 are also substantially Set in the corresponding relative position. When the reticle is placed on the lower cover 12 (10), the cover „ above the reticle i is covered with the lower cover 12, and the positioning member 13 disposed in the reticle can hold and buckle the reticle, and the fresh cover is fixed. Inside the box i, to avoid the vibration of the hood 1 and cause the reticle of the reticle to be damaged. The towel is placed in the magazine due to the position of the holder, so it is set in the acid When the cover u is above the cover u, the 丨 2 is not only easy to produce the alignment error in the two-two configuration, even in the relative position of the upper cover 11 spot == the position member 13, the coffee further affects the light. 13 readings of the difference 'transfer to the display or wear, the good is provided by the Qi - a new type of box, the ride on the a priori to change the cover of the J cover Yi Lian is L-shaped, in addition to can increase reading The symmetry of the piece reduces the difficulty of the manufacturing process, or reduces the error of the alignment. It can also increase the capacity of the reticle into the reticle box, and reduce the reticle and light. The county of the hood box reduces the formation of dust particles and affects the yield, so that the life of the reticle can be improved. [New content] The secret is first mixed _, the tip miscellaneous supply - the species has a miscellaneous The reticle box is formed by combining the upper f body and the lower cover body to form an inner space for accommodating the reticle, and at least the locating member is disposed on the upper cover body or the lower cover body of the reticle case. The structure of the positioning member includes a seat body and a fixed element. The seat system is fixed in a plurality of branch points at a position on the upper cover body of the mask case and the lower cover body, and the fixing element is substantially L-shaped. The structure of the fixing component is disposed on the base body, and the structure of the fixing component includes a holding surface and a tree surface. When the photomask case carries a light cover and is covered, the top surface of the fixing component and the pressing surface are combined with the sealing surface. The reticle is in contact with and fixed. Therefore, the main purpose of the lion is to provide a fresh box, which can reduce the difficulty of alignment during the manufacturing process. The other purpose of this creation is to provide a fresh box with a positioning member. Reduce the error of the alignment. The purpose of this creation is to provide a kind of reticle box, which can improve the ease of introducing the reticle into the reticle. The brewing, the creation of the creation is again - the purpose is to provide a reticle box The positioning member can effectively fix the reticle to reduce the reticle and the mask case Friction, and thus reduce the formation of dust particles and affect the yield. [Embodiment] "Because this creation reveals a kind of photomask box with positioning parts, the details of the mask or mask box Or the process is achieved by using the prior art, and therefore, in the following description, it is not described in detail. Moreover, the drawings in the following texts are not completely drawn according to the actual relevant dimensions, and their functions are only expressed and The second figure is a schematic view of a preferred embodiment of the present photomask case. The mask case 2 is formed by combining the upper cover body 21 and the 6 M335007 lower cover body 22 to form an internal space for accommodating light. The hood, the cover body of the reticle 2 is provided with at least one positioning member 3 for fixing the reticle, and the locating member 3 is formed of a polymer material, and the material of the reticle 2 is formed. The shape of the metal material or the polymer material may be substantially stainless steel, aluminum alloy or magnesium alloy, and the photomask box 2 may be a reticle transfer box or a reticle storage box. The third embodiment is a schematic diagram of a preferred embodiment of the present invention. The structure of the positioning member 3 includes a base 31 and a fixing member 32a. The fixing manner of the base 31 is fixed to the light by a plurality of supporting points 3 ιι. The position of each corner of the cover body 21 and the lower cover body 22 of the cover box 2, and the seat body 31 is substantially l-shaped, so the symmetry of the force clamp member 3 reduces the difficulty of alignment during the manufacturing process, or The fixing component is disposed on the base 31. The structure of the fixing component 32a includes a receiving surface 21a and a pressing surface 322a. When the photomask case 2 carries a mask and covers The supporting surface 32la of the fixing component has the function of guiding and positioning the reticle, and the pressing surface 3 is in contact with and fixed to the reticle when the cover is closed, and (10) is free from the transportation of the rag to cause lie damage. Photomask. The third B is a schematic diagram of another preferred embodiment of the present invention. The micro-structure of the fixing component includes a top holding surface (four) and a buckle pressing surface, wherein the top holding surface fiber and the pressing surface pass through each other. The plane, and the angle between the top holding surface 321b and the pressing surface is about 〇 to about (10) degrees. When the reticle is 2 bearing-mask and closed, the fixing surface 3 of the fixing element 3 has a The function of guiding and positioning the reticle, and the squeezing surface is in contact with and fixed to the reticle when the cover is closed. t third C is a schematic view of another preferred embodiment of the locating positioning member, the fixing member 32c It may be: a curved elastic structure 33e, the curved end portion 331e is coupled to the base body 31, and the other curved portion 433 is elastically suspended between the single or plural support points mi. A second embodiment of the present invention is a schematic diagram of a preferred embodiment of the present invention. The fixing component may be a curved elastic structure 33d, and the end of the _f curved portion is coupled to the base body ^, and the second bending is The end portion has a top holding surface 321a, and the third curved end portion 333d has a pressing surface. The piece 3 is the original positioning member of the present invention. The method of refitting is another embodiment of the preferred embodiment. The positioning of the 31 is transmitted through the positioning means, and is fixed to the positioning of the upper cover 21 or the lower cover 22. The M335007 is occupied by the positioning means of the seat 3i. The snap ring of the base body is clamped and fixed on the positioning point, so that the positioning member 3 is in a fixed state. The fourth B diagram is a fixing manner of the seat body of the present invention, and a schematic diagram of a preferred embodiment. The seat body 31 of the positioning member 3 is transmitted through the positioning means, and the positioning means of the positioning shank body 31 provided by the mosquito upper cover body 2 ι or the lower cover body 22 is a positioning portion having the socket hole S13 to utilize the positioning portion. The sleeve hole 313 is sleeved with the positioning point. The fourth C is a schematic diagram of the fixing method of the seat of the present invention. The seat body 31 of the positioning member 3 is permeable to the granular body and the upper body 21 Or the positioning means of the seat body 31 at the positioning point provided in the lower cover body 22 is a positioning hole 314 disposed in the seat body 31 for the fixing member 32 to be worn tightly; the positioning means of the ship is also The top piece 3(4) can be inserted into the positioning hole 314 from the top surface of the base portion to make the positioning member 3 fine. The positioning means of the seat 31 may also be such that the locking member 3U1 is inserted into the positioning hole 314 from the bottom surface of the base portion to lock the positioning member 3 to the positioning point. The above-mentioned locking member 3141 may be a rivet pin, The screw is also made of a metal material. According to the method of erecting the positioning member of the present invention, the preferred embodiment (not shown in the drawing), the seat body 31 of the positioning member 3 is fixed by positioning means. The positioning means of the base 31 is to adhere the positioning member 3 to the positioning point through the adhesive on the positioning point of the upper cover 21 or the lower cover 22. The above is only a preferred embodiment of the present invention. For example, it is not intended to limit the patent application rights of the present invention; at the same time, the above description is well-known and well-known for those skilled in the art, and thus other 未 敎 敎 敎 , , , , , , All should be included in the scope of the patent application below. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic view of a photomask box (a conventional technique). The second figure is a schematic diagram of an embodiment of the present photomask box. The third to third figures are the original creation positioning. A schematic diagram of one embodiment of the present invention. The fourth through fourth to fourth C drawings are schematic diagrams of one embodiment of the fixing manner of the seat of the present invention. 8 M335007 [Description of main component symbols] 11 12 13 2 21 22 3 • 3! 312 313 314 3141 32a 32b • 32c 32d 321a 321b 322a 322b 33c 33d 331c Photomask transfer box upper cover lower cover body locator reticle upper cover lower cover body locator seat support point snap ring spigot hole locating lock Firming Fixing Element Fixing Element Fixing Element Fixing Element Top Hold Surface Top Holder Buckle Face Pressing Surface Bending Elastic Structure Bending Elastic Structure Curved End 9 M335007 331d First Curved End 332c Curved End 332d Second Curved End 333d Third Bend Ends