M324200 八、新型說明： 【新型所屬之技術領域】 本創作係有關一種光學裝置，尤指一種用以檢測表面 缺陷之暗場照片檢測裝置。 【先前技術】 > 目刚暗場妝明技術被廣泛運用在檢測具有鏡面結構的 元件或物品上，舉凡寶石表面缺陷的檢測、半導體元件等 鲁，該暗場照明技術係利用設置—光源，經由該光源所產生 之照射光線直接指向該欲檢測之物體上，並經由被檢測物 體所具有的擴散反射或折射特性，將照射光線反射或折射 成像，透過成像以檢測表面是否有缺陷存在。 而一般習知所常見的暗場檢測裝置，如第一圖所示， 係包括-腔體10 ’該腔㈣内部表面皆為吸光面，該腔體 10頂端具有一開口 101 ，且對應該開口 1〇1位置則設有一 板體20，另該腔體10内之底部位置設有一發光元件3〇，並 .於鄰近該發光元件30的周緣設有複數導光管4〇，該複數導 -光管40自該發光元件30位置將光源引導至該欲檢測物體5〇 上，同時該檢測物體50置放於一平纟1〇2上，利用該平台 1〇2阻擋自發光元件30所照射的光源，俾使自導光管仙導 引的光源直接照射於該檢測物體50，透過該光源照射後， 經由該檢測物體50所具有的反射或折射特性，將光源匯隽 於該板體20表面上成像，藉由該光成像以判別該檢測、物= 50的表面是否存有缺陷。 然而，習知的檢測裝置利用導光管4〇作為導光路徑， 5 M324200 二=暗場照明的光源來源，由於該檢測物體5{)直接置放 平台⑽上，欲檢測不同位置的表面缺陷時，必須透 翻！或轉動，才能使該導光管40的光源照射到欲檢 〆/衫響到其檢測的效率，且利用導光管4〇作為導光 路控係為間接的昭射方式 、、、 及射… 易造成光量不足而無法透過 :或折射形成足夠的光成像，造成 .影響到檢測的結果，成為熟悉此技藝者欲解決的二所在 【新型内容】 ^上述之缺失，本創作之主要目的在於提供一種具 度之暗場照明檢測裝置，經由環 直接μwΛ 件之帶體’以使發光元件之光線 接扣向被私測物體，且自不同角度直 體，並於腔體外亩接出後μ 丧…射被&測物 面之缺陷。 象，便於快速檢測該被檢測物體表 檢測目的，本創作係主要提供-種暗場照明 腔體，於該腔體内部環周面係為-吸 上設"體’於=;:=體内部之環周* 次▼版上5又有稷數發光元件， 體上之各發光元件係相 σ ^ 位置上設有，，藉由:===趙開： 向被檢測物體表面，經由嗲物 …十光線才曰 並於該板體表面成像，以;；==射或折射特性， 及其位置。 β別该被檢測物體表面是否缺陷 6 M324200 【實施方式】 茲將本創作之内容配合圖式來加以說明： 請參閱第二圖，係為本創作之立體結構分解圖。如圖 所示，本創作之檢測裝置係包括一腔體i，該腔體^内部 表面係為-吸光面n，如第三圖之剖視圖所示，該吸光面 11係由黑色材質所構成，於本實施例中該材f係為黑色顏 ，’該吸光面11亦可如第五圖所卜以黑色布料構成該吸 光面η;另該腔體！係具有—開σ12，於本實施例中該開 口 12位置係於該腔體！之正上方位置，另於該腔體^内部 之吸光面η上環設有一帶體2，於該帶體2上分別設有複 數發光元件3，於本實施例中該發光元件3係為發光二極 體，且設於該帶體2之該些發光元件3係相互電性連接； 於該U之開口 12上方位置設有一板體4，該板體4係 用以阻播自腔體1内部所反射出來之光線，同時使由腔體 1内部所反射出來之光線成像於該板體4上。 明i閱第一圖，係為本創作之操作示意剖視圖。如圖 所不，本創作之檢測裝置係用以檢測具鏡面或曲面之檢測 物體5，且該檢測物體5具有擴散反射或折射作用，如寶 石或具鏡面之半導體元件，將該檢測物體5懸掛於該腔體 1之内σ卩中’並提供電力至鄰近於該檢測物體5之帶體2 上’使該帶體2上所設之複數發光元件3所產生之照射光 線直接指向該檢測物體5之表面，經由該檢測物體5所具 有之擴散反射或折射光線特性，將該照射於該檢測物體5 之光反射或折射出去，除了被腔體1内部之吸光面11所吸 M324200 收之光線外，被反射或折射之光線（如箭頭所示）則匯， 於㈣體1之開口 12位置上之板體4並形成光成像，透過 光成像之觀察以判別該檢測物體5之表面是杏有缺陷存M324200 VIII. New description: [New technical field] This creation is related to an optical device, especially a dark field photo detecting device for detecting surface defects. [Prior Art] > The dark field makeup technology is widely used in the detection of components or articles with a mirror structure, such as the detection of surface defects of gems, semiconductor components, etc., the dark field illumination technology uses the set-light source, The illuminating light generated by the light source directly points to the object to be detected, and reflects or refracts the illuminating light through the diffuse reflection or refraction characteristic of the detected object, and transmits an image to detect whether the surface has a defect. The dark field detecting device commonly used in the prior art, as shown in the first figure, includes a cavity 10'. The inner surface of the cavity (4) is a light absorbing surface, and the top end of the cavity 10 has an opening 101 corresponding to the opening. A plate body 20 is disposed at a position of 1〇1, and a light-emitting element 3〇 is disposed at a bottom position of the cavity 10, and a plurality of light guide tubes 4〇 are disposed adjacent to a periphery of the light-emitting element 30, and the plurality of light guides The light pipe 40 guides the light source from the position of the light-emitting element 30 to the object to be detected 5〇, and the detecting object 50 is placed on a flat plate 1〇2, and the platform 1〇2 blocks the illumination from the light-emitting element 30. The light source directly illuminates the light source guided by the light guide tube to the detecting object 50, and after being irradiated through the light source, the light source is collected on the surface of the board body 20 through the reflection or refraction characteristic of the detecting object 50. The upper image is imaged by the light to discriminate whether the surface of the detection, object = 50 is defective. However, the conventional detecting device uses the light guide tube 4 as a light guiding path, 5 M324200 2 = the source of the light source of the dark field illumination, since the detecting object 5{) is directly placed on the platform (10), and the surface defects at different positions are to be detected. When you have to turn it over! Or turning, the light source of the light pipe 40 can be irradiated to the efficiency of the detection/shirt to the detection thereof, and the light guide tube 4 is used as the light guiding path control system for indirect reflection mode, ... It is easy to cause insufficient light to pass through: or refraction to form enough light imaging, resulting in the effect of detection, becoming the second place that the artist wants to solve [new content] ^The above-mentioned lack, the main purpose of this creation is to provide A dark field illumination detecting device with a degree, directly through the ring of the μw device, so that the light of the light-emitting element is buckled to the object to be measured, and is straight from different angles, and is removed after being exposed in the cavity. ...shooting & measuring the defects of the object surface. For the purpose of quickly detecting the object to be detected, the present invention mainly provides a dark field illumination cavity, in which the inner circumferential surface of the cavity is - suctioned on the body &body; in the body; The inner ring circumference * times ▼ version has 5 number of light-emitting elements, and the light-emitting elements on the body are located at the position σ ^ , by: === Zhao Kai: to the surface of the object to be detected, via 嗲Ten light rays are imaged and imaged on the surface of the plate to;; ==shooting or refraction characteristics, and their position. β Does the surface of the object to be inspected be defective 6 M324200 [Embodiment] The content of this creation is described in conjunction with the drawing: Please refer to the second figure, which is an exploded view of the three-dimensional structure of the creation. As shown in the figure, the detecting device of the present invention includes a cavity i, and the inner surface of the cavity is a light absorbing surface n. As shown in the cross-sectional view of the third figure, the light absorbing surface 11 is made of a black material. In the embodiment, the material f is a black color, and the light absorbing surface 11 can also be formed with a black cloth as shown in the fifth figure; the cavity! The system has - σ12, and in the embodiment, the opening 12 is located in the cavity! A strip body 2 is disposed on the upper surface of the cavity, and a plurality of light-emitting elements 3 are respectively disposed on the strip body 2, and the light-emitting element 3 is light-emitting in the embodiment. The light-emitting elements 3 disposed on the strip body 2 are electrically connected to each other; a plate body 4 is disposed above the opening 12 of the U, and the plate body 4 is used to block the interior of the cavity 1 The reflected light is simultaneously imaged on the plate 4 by the light reflected from the inside of the cavity 1. Ming i read the first picture, which is a schematic cross-sectional view of the operation of the creation. As shown in the figure, the detecting device of the present invention is for detecting a detecting object 5 having a mirror surface or a curved surface, and the detecting object 5 has a diffuse reflection or refraction effect, such as a gemstone or a mirror-shaped semiconductor component, and the detecting object 5 is suspended. Within the cavity 1 of the cavity 1 and providing power to the strip 2 adjacent to the detecting object 5, the illumination light generated by the plurality of light-emitting elements 3 disposed on the strip 2 is directed to the detecting object. The surface of the surface 5 is reflected or refracted by the detected object 5 having the characteristics of diffuse reflection or refracting light, and the light irradiated to the detecting object 5 is reflected or refracted, except that the light is absorbed by the light absorbing surface 11 of the cavity 1 In addition, the reflected or refracted light (as indicated by the arrow) merges with the plate 4 at the position of the opening 12 of the body (4) and forms a light image, and the observation of the light image is used to discriminate that the surface of the detecting object 5 is apricot. Defective
·· 請參閱第四圖，係為本創作之另一實施例立體示意圖 J另外’該帶體2之設計除了可如前述之單一帶體2並環 叹於该腔體1之吸光面n上外’亦可如第四圖所示，該帶 體2係可設計成—環型帶體2 ’並於該腔體^内之吸光面 11上設置複數間隔排列之環型帶體2，且設於同一帶體2 上之複數發光元件3相互電性連接，藉由㈣不同帶體2 2發光7G件3發光’以產生不同角度之光線指向該檢測 物體5 ’致使檢查不同表面是否有缺陷。 处惟以上所述之實施方式，是為較佳之實施實例，當不 匕、此限疋本創作貫施範目，若依本創作申請專利範圍及 ，明書，所作之等效變化或修飾，皆應屬本創作下述之 專利涵蓋範圍。 -【圖式簡單說明】 第一圖、係為習知之結構剖視圖。 =圖、係、為本創作之立體結構分解目。 :二圖、係為本創作之操作示意剖視圖。 ^四圖、係為本創作之另_實施例立體示意圖。 Γ圖、係為本創作之吸光面另—實施例局部放大示意 【主要元件符號說明】 8 M324200 (習知） 腔體ίο 平台102 發光元件30 檢測物體50 (本創作） 腔體1 “開口 12 > 發光元件3 檢測物體5 開口 101 板體20 導光管40 吸光面11 環型帶體2 板體4Please refer to the fourth figure, which is a perspective view of another embodiment of the present invention. In addition, the design of the strip 2 can be smothered on the light absorbing surface n of the cavity 1 except for the single strip 2 as described above. Alternatively, as shown in the fourth figure, the strip 2 can be designed as a ring-shaped strip 2' and a plurality of annular strips 2 arranged at intervals on the light-absorbing surface 11 in the cavity, and The plurality of light-emitting elements 3 disposed on the same strip 2 are electrically connected to each other, and (4) different strips 2 2 emit light 7G pieces 3 emit light 'to generate different angles of light pointing to the detecting object 5' to cause inspection of different surfaces for defects . The above-mentioned implementation manners are preferred implementation examples. When it is not limited to this, the scope of the creation is subject to the scope of the application, and if the scope of the application for the creation of the patent and the equivalent changes or modifications are made, All should be covered by the following patents of this creation. - [Simplified description of the drawings] The first figure is a cross-sectional view of a conventional structure. = diagram, system, and the three-dimensional structure decomposition of the creation. : The second figure is a schematic cross-sectional view of the operation of the creation. ^四图, is a three-dimensional schematic diagram of another embodiment of the creation. Γ 图 , , , , , 吸 创作 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 M M M M M M M M M M M M M M M M M M M M M M M M M M M M 8 8 8 8 8 8 8 8 8 8 8 8 > Light-emitting element 3 Detection object 5 Opening 101 Plate 20 Light pipe 40 Light-absorbing surface 11 Ring-shaped belt 2 Plate 4