TWM310091U - Plate holding device - Google Patents

Plate holding device Download PDF

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Publication number
TWM310091U
TWM310091U TW95217590U TW95217590U TWM310091U TW M310091 U TWM310091 U TW M310091U TW 95217590 U TW95217590 U TW 95217590U TW 95217590 U TW95217590 U TW 95217590U TW M310091 U TWM310091 U TW M310091U
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TW
Taiwan
Prior art keywords
arm
arms
drive
fixing
flat
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Application number
TW95217590U
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Chinese (zh)
Inventor
Jung-Mou Jang
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Forever Group Prec Ind Co Ltd
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Priority to TW95217590U priority Critical patent/TWM310091U/en
Publication of TWM310091U publication Critical patent/TWM310091U/en

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Description

M310091 - 八、新型說明: 【新型所屬之技術領域】 本新型是有關於一種支撐裝置,特別是指一種安裝於 機械手臂上之平板支撐裝置。 【先前技術】 平板狀物件’例如玻璃基板、晶圓、面板等產品 /、 ;卡匣内時,疋利用機械手臂等機構來進行搬運 I 動作。 多閱圖1、2,習知機械手臂1,包含一手臂單元11, 及一樞設於該手臂單元11上之手腕單元12 ’該手腕單元12 具有兩支位於同一平面且可相對移動之支撐帛12卜-平板 狀物件^可置放於該手腕單元12上之該二支撐架i2i上 _ °亥手臂早疋11則藉由一動力源13驅動,而帶動該手腕單 元12於在一卡匣(圖未示)内進行存取動作。 參閱圖2 ’倘若該平板狀物件14之面積較大,並且該 .二支撐架ι21之間距較小而僅能支餘該平板狀物件14 ^ I央部分,此時’該平板狀物件14之兩㈣分便會因為缺 少、支撐力’而受到重力的影響,產生向下垂墜並且彎 現象。 、為了避免上述情況產生,該手腕單元12可隨著該平板 狀物件14之面積大小,而改變該二支樓架ΐ2ΐ之間隔距離 ,使得該平板狀物件14可以被該二支撐架121所分散支撐 然而,一旦該平板狀物件14之面積過大,而該二支撐架 ⑵又是分別支撐於該平板狀物件14之兩側底部,此時了 M310091 該平板狀物件14之中央部分同樣會因為缺少支撐而產生向 下垂墜並且彎曲之現象,使得該平板狀物件14的品質大為 降低,因此,對於高精密產品如液晶板、晶圓等,便喪失 了產業上之利用性,無形中造成了不少的損失。M310091 - VIII. New description: [New technical field] The present invention relates to a supporting device, in particular to a flat supporting device mounted on a robot arm. [Prior Art] When a flat article [e.g., a product such as a glass substrate, a wafer, or a panel] is used in a cassette, a mechanism such as a robot arm is used to carry the operation. Referring to Figures 1 and 2, the conventional robot arm 1 includes an arm unit 11 and a wrist unit 12 pivotally mounted on the arm unit 11. The wrist unit 12 has two supports that are in the same plane and are relatively movable.帛12卜-plate member ^ can be placed on the two support frames i2i on the wrist unit 12, and the wrist unit is driven by a power source 13 to drive the wrist unit 12 on a card. The access operation is performed in 匣 (not shown). Referring to FIG. 2 'If the area of the flat member 14 is large, and the distance between the two supporting frames ι 21 is small, only the central portion of the flat member 14 can be retained, at this time, the flat member 14 Two (four) points will be affected by gravity due to lack of support, and will result in a downward sag and a bend. In order to avoid the above situation, the wrist unit 12 can change the distance between the two towers according to the size of the flat member 14, so that the flat member 14 can be dispersed by the two supports 121. However, once the area of the flat member 14 is too large, and the two support frames (2) are respectively supported on the bottom sides of the flat member 14, respectively, the central portion of the flat member 14 of M310091 is also lacking. The phenomenon of the downward sag and the bending of the support causes the quality of the flat member 14 to be greatly reduced. Therefore, for high-precision products such as liquid crystal panels, wafers, etc., the industrial use is lost, which is invisible. A lot of losses.

㈣® 3 ’另—種設計方式’則是習知機械手臂!之手 腕單元12具有四支位於同一平面且呈固定狀態的支撐架 12卜然而此種設計,雖然可以適用於面積較大的平板狀物 件U’而使其龍良好切效果,但是,—旦該平板狀物 件14之面積較小且只能橫跨置放於中央兩支支撐架121, 而無法被外側兩支支撐架121所接觸支撐時,該平板狀物 件14之兩側部分同樣也會因為缺少支撐,而產生向下垂墜 彎曲之現象,進而降低該平板狀物件14的品質。 【新型内容】 因此,本新型之目的,即在提供一種平板支撐裝置, 可以適用於支撐各種不同面積大小的平板物體,使其不易 產生向下垂墜彎曲之現象。 於是,本新型之平板支撐裝置,安裝於一機械手臂上 ’該機械手臂用以驅動該平板支撐裝置移動,而該平板支 揮裝置則用以支撐一平板物體,該平板支撐裝置包含一第 ~動力源,及一用以供該平板物體置放於其上的支臂單元 β亥支臂早元具有互相間隔且位於同一平面之一第一支臂 、一第二支臂、一第三支臂,及一第四支臂,該第一、四 支臂是位於外側,該第二、三支臂則是位於内側,且該第 —動力源可驅動該第一、四支臂在相同平面上分別以相反 M310091 方向移動。 本新型之功效在於,當該平板物體之中央部分置放於 該第二、三支臂上時,藉由該第一、四支臂可分別以相反 方向移動,使得該平板物體之兩側部分可分別被該第一、 四支#所支撐,因此,該平板物體無論在中央部分或是兩 侧部分皆可獲得良好的支撐效果,使其不易產生向下垂墜 f曲’而有效保持該平板物體之產品品質。(4)® 3 ‘Another design method’ is a conventional robotic arm! The wrist unit 12 has four support frames 12 which are in the same plane and are in a fixed state. However, this design can be applied to a large-sized flat member U' to make the dragon have a good cutting effect, but When the area of the flat member 14 is small and can only be placed across the two central support frames 121, and cannot be supported by the outer two support frames 121, the two sides of the flat member 14 are also The lack of support results in a downward sag, which in turn reduces the quality of the flat member 14. [New content] Therefore, the object of the present invention is to provide a flat plate supporting device which can be applied to support flat objects of various sizes and sizes, so that it is not easy to cause downward sag. Therefore, the tablet supporting device of the present invention is mounted on a robot arm for driving the tablet supporting device to move, and the tablet supporting device is for supporting a flat object, and the tablet supporting device includes a first a power source, and an arm unit for placing the flat object thereon, having a first arm, a second arm, and a third branch spaced apart from each other and located in the same plane An arm and a fourth arm, the first and fourth arms are located on the outer side, the second and third arms are located on the inner side, and the first power source can drive the first and fourth arms in the same plane Move up in the opposite direction of M310091. The utility model has the advantages that when the central portion of the flat object is placed on the second and third arms, the first and fourth arms can be respectively moved in opposite directions, so that the two sides of the flat object are It can be supported by the first and fourth branches respectively. Therefore, the flat object can obtain a good supporting effect in both the central portion and the two sides, so that it is not easy to produce a downward sag and effectively maintain the flat plate. The product quality of the object.

【實施方式】 有關本新型之前述及其他技術内容、特點與功效,在 以下配合參考圖式之兩個較佳實施例的詳細說明中,將可 清楚的呈現。 在本新型被詳細描述之前,要注意的是,在以下的說 明中,類似的元件是以相同的編號來表示。 參閱圖4、5,本新型平板支撐裝置2之第—較佳實施 例’安裝於-機械手臂3上,該機械手臂3用以驅動該平 板支撐裝i 2移動’而該平板支撐裝置2則用以支撐一平 板物體4。 碌十敬叉撐裝置2包含不―籾 、, 乃你21、一用以供該 平板物體4置放於其上的支臂單元23、一 肘该弟一動力源 21之動力傳遞至該支臂單元23的第—傳動組25,及一用 以供該第一動力源21與第一傳動組25灾罟 合罝於其中的中空 狀外殼24。 該支臂單元23具有互相間隔且位於同一平面之一―一 支I 231、一第二支臂232、一第三支臂 233、—第四支臂 M310091 、 234 ’及多數個分別設於該第…一、: 頂面的吸附件235,楚ώ ^ 四支臂231〜234 、中’該第一、四彡劈《 於外側,該第二、三去辟 煮231、234疋位 定狀態而不會相對移動,該23第2二2、33二則,位於内側並且呈固 係由該外殼24内向外延伸而突_外二殼:i臂231〜234 =-傳動組25具有兩個位於該外殼 置之外傳動輪251、—環設 ^又 件252、一用以 卜得動輪上251之外循環The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Figures 4 and 5, the first preferred embodiment of the present type of tablet support device 2 is mounted on a robot arm 3 for driving the plate support device i 2 to move 'the plate support device 2 Used to support a flat object 4. The ten-way forklift device 2 includes no, and is, 21, an arm unit 23 for placing the flat object 4 thereon, and an elbow, the power of the power source 21 is transmitted to the branch The first transmission group 25 of the arm unit 23 and a hollow outer casing 24 for damaging the first power source 21 and the first transmission group 25 therein. The arm unit 23 has one of the same planes and one of the same plane - an I 231, a second arm 232, a third arm 233, a fourth arm M310091, 234 ' and a plurality of The first one: the top adsorption member 235, Chuώ ^ four arms 231~234, the middle 'the first, the fourth one' on the outer side, the second and the third to cook the 231, 234 position Without moving relatively, the 23nd 2nd, 2nd, and 33nd are located on the inner side and are solidly extended from the inside of the outer casing 24 to protrude outwardly. The outer two shells: the i-arms 231 to 234 = - the transmission group 25 has two Located outside the outer casing of the outer casing, the transmission wheel 251, the ring assembly 252, and the outer wheel 251 are circulated.

^一〜弟~支臂231與外循環件252互相固定 白、弟m疋件253、-用以使該第四支臂234肖外循環件 T:相:定的第二固定件254,及一受該第-動力源21 戶馬£ ffiW動该第二固定件254移動的外連動件255,其中 ’該外循環件252為一傳動皮帶’該二外傳動輪251則為 與該外循環件252互相搭配作動的皮帶輪。 藉由上述設計,該第一動力源21可驅動該外連動件 255以▼動该第一固定件254沿著該外循環件252移動, 同時使該外循環件252環繞該二外傳動輪251循環旋轉, 藉以帶動該第一固定件253以相反於該第二固定件乃4之 方向移動,進而驅動該第一、四支臂231、234在相同平面 上分別以相反方向移動。 在本實施例中,雖然是採用該第一傳動組25之動力傳 遞結構設計,但是此種結構設計為所屬技術領域中具有通 常知識者參考先前技術顯能輕易達成,並且也不是本新型 之重要技術特徵,再者,仍有其他種類的習知動力傳遞結 構設計,同樣能夠達成該第一、四支臂231、234在相同平 M310091 面^刀別以相反方向移動之目的,所以不應以本實施例所 揭示第-傳動組2 5之動力傳遞結構設計為限。 參閱圖5 ’藉由上錢計,假若該平板物體4之面積較 大,當該平板物體4置放於該支臂單^3上時,該平板物 體4之中央部分雖然可以藉由第二、三支臂支撐 ,但是該平板物體4之兩側部分便會因為缺少支撐, 容易向下彎曲,此時,便可如 T便j如圖5所不,將該第一、四支^一多弟~The arm 231 and the outer circulation member 252 are fixed to each other, the white member 253, the fourth arm 234 is used to circulate the member T: the second fixing member 254, and An external linkage 255 that is moved by the first power source 21 to ffiW, wherein the outer circulation member 252 is a transmission belt, and the outer outer transmission wheel 251 is the outer circulation member 252 pulleys that work together. With the above design, the first power source 21 can drive the outer linkage 255 to move the first fixing member 254 along the outer circulation member 252 while circulating the outer circulation member 252 around the outer outer transmission wheel 251. Rotating, thereby driving the first fixing member 253 to move in a direction opposite to the second fixing member 4, thereby driving the first and fourth arms 231, 234 to move in opposite directions on the same plane. In the present embodiment, although the power transmission structure design of the first transmission group 25 is adopted, such a structural design is easily achieved by those having ordinary knowledge in the prior art, and is not important to the present invention. Technical features, in addition, there are still other kinds of conventional power transmission structure design, and the first and fourth arms 231, 234 can also be moved in the opposite direction on the same flat M310091 surface, so it should not be The power transmission structure design of the first transmission group 25 disclosed in this embodiment is limited. Referring to FIG. 5', by the meter, if the area of the flat object 4 is large, when the flat object 4 is placed on the arm unit 3, the central portion of the flat object 4 can be used by the second The three arms are supported, but the two sides of the flat object 4 will be easily bent downward due to lack of support. At this time, the first and fourth branches can be as shown in FIG.

’ 31 234刀別以相反方向移動,使得該平板物體4之兩 侧部分可分別被該第-、四支臂231、234所支撑,並且配 合該平板物體4可被所述吸附件235所產生的真心及附力 所吸附,而可以穩定地置放於該第一、二、三、四支臂 231〜234上,藉此方式,該平板物體4無論在中央部分或是 兩侧部分皆可獲得良好的支撺效果,使其不易產生向下垂 墜曾曲之現象,而能保持一致的水平態樣 該平板物^之產品μ ;再者,由於該平板物心不易夺 產生向下垂墜_曲之現象,所以該平板物體4與吸附件奶 兩者之間是緊密貼附而不會產生空隙,進而使得兩者之間 不致發生真空破壞而降低所述吸附件235對該平板物體4 之吸附力’藉此可使該平板物體4不易產生位移,避免該 平板物體4於一卡Ε(圖未示)内進行取放動作時產i與該卡 匣碰撞之意外狀況,同時使得該平板物體4置放於該卡匣 ㈣位置非常準確’該第一、二、三、四支臂231〜W於 下次托移取出該平板物體4時,便不易因為該平板物體4 置放位置不準而產生碰撞意外。 M310091 參閱圖6,本新5L平_支撐裝置2 <弟一車父佳實施例, 大致類似於前述第一較佳實施例,不同 卜U之處在於··該平板 支撐裝置2更包含一位於該外殼24内 π <弟一動力源22,及 一同樣位於外殼24内之第二傳動組 寻動、、且26。該第二傳動組26 具有兩個間隔設置且位於該二外傳動於 丨得動輪251之間的内傳動 輪261、一 ί衣设於5亥一内傳動輪261卜夕m 柳ζ〇ί上之内循環件262、一 用以使該第二支臂232貞内循環件262互相固定的第三固 定件263、-用以使該第三支臂233與内循環件加互相固 定的第四固定件264,及一受該第一翻士 又/弟一動力源22所驅使而帶 動該第三固定件263移動的内連動件265。 一該第二動力源22可驅動該内連動件265,以帶動該第 三固定件263沿著該内循環件26?弒說 π , 自衣忏262移動,同時使該内循環 件—262環繞該二内傳動輪261循環旋轉,藉以帶動該第四 固定件264以相反於該第三固定件263之方向移動,進而 艇動6亥第二、三支臂232、233兩者在相同平面上分別以相 反方向移動,且該兩者232、233之移動範圍係侷限於該第 一、四支臂231、234之間。 二々在本實施例中,該第二傳動組26之結構設計是相同於 忒第傳動組25之結構設計,而在前述該第一傳動組25 為其所屬技術領域中具有通常知識者參考先前技術顯能輕 易達成,且又非本新型之重要技術特徵的情況下,再者, 仍有其他種類的習知動力傳遞結構設計,同樣能夠使該第 —支臂232、233藉由該第二傳動組20之結構設計, 、、χ苐一、二支臂232、233在相同平面上分別以相反'31 234 is moved in the opposite direction so that the two sides of the flat object 4 can be respectively supported by the first and fourth arms 231, 234, and the flat object 4 can be produced by the adsorbing member 235 The true heart and the attached force are adsorbed, and can be stably placed on the first, second, third, and fourth arms 231 to 234. By this means, the flat object 4 can be in the central portion or both sides. Obtaining a good supporting effect, making it difficult to produce the phenomenon of downward sag, and maintaining a consistent horizontal pattern of the product of the flat sheet; in addition, since the flat object is not easy to take down, it hangs down _ The phenomenon is that the flat object 4 and the adsorbent milk are closely attached without generating a gap, so that vacuum damage is not caused between the two, and the adsorption of the flat object 4 by the adsorbing member 235 is reduced. The force 'by this can make the flat object 4 less likely to be displaced, and avoid the accidental situation that the flat object 4 collides with the cassette when the pick-and-place action is performed in a cassette (not shown), and at the same time makes the flat object 4 placed in the card (four) The position is very accurate. When the first, second, third, and fourth arms 231 to W are removed for the next time, the flat object 4 is removed, and the collision of the flat object 4 is not easily caused. M310091 Referring to FIG. 6, the new 5L flat_support device 2 <the brother-car parent embodiment is substantially similar to the first preferred embodiment described above, and the difference is that the tablet support device 2 further includes a Located in the outer casing 24, π < a power source 22, and a second transmission set, also located in the outer casing 24, and 26. The second transmission set 26 has two inner transmission wheels 261 which are disposed at intervals and are located between the outer transmissions 251 and the outer transmission wheels 251, and are disposed on the inner transmission wheel 261 a circulation member 262, a third fixing member 263 for fixing the second arm 232 and the inner circulation member 262 to each other, and a fourth fixing member for fixing the third arm 233 and the inner circulation member to each other The fixing member 264 and an inner linking member 265 driven by the first yoke/fan-power source 22 to drive the third fixing member 263 to move. The second power source 22 can drive the inner linking member 265 to drive the third fixing member 263 to move along the inner circulation member 26, and the inner casing 262 moves while the inner circulation member 262 is surrounded. The two inner transmission wheels 261 are cyclically rotated, thereby driving the fourth fixing member 264 to move in a direction opposite to the third fixing member 263, so that the second and third arms 232 and 233 of the boat are on the same plane. Moving in opposite directions, respectively, and the range of movement of the two 232, 233 is limited to between the first and fourth arms 231, 234. In the present embodiment, the structural design of the second transmission set 26 is the same as that of the first transmission set 25, and in the prior art, the first transmission set 25 has a reference to the prior art. Where technical abilities are easily achieved and are not an important technical feature of the present invention, there are still other types of conventional power transmission structure designs that also enable the first arms 232, 233 to be The structural design of the transmission set 20, and the first and second arms 232, 233 are respectively reversed on the same plane.

10 M310091 f向移動之目的,所以自不應侷限於本實施例t對於該第 二傳動組26之結構設計說明。 參閱圖7,當該平板物體4之面積較小時,該第一、二 、三、四切231〜234四者可向内移動聚集,以使該平板 物體^之中央部分與兩側部分都會同時被該四者 所支撐,並且配合該平板物體4可被所述吸附件…所產 生的真空吸附力所吸附,而可以敎地置放於該第一、二 、二、四支臂231〜234上,該平板物體4便不易產生向下 垂墜弯曲之現象,有效保持該平板物體4之產品品質,而 且該:板物體4與吸附件235兩者之間是緊密貼附而不會 產生空隙’進而使得兩者之間不致發生真空破壞而降低所 述吸附件235對該平板物體4之吸附力,藉此可使該平板 體4不易產生位移,該平板物體4於取放運送過程中便 不易與所儲放的卡匣產生碰撞意外。 參閱圖8,倘若該平板物體4之面積較大時,該第一、 四支# 231〜234四者便可向外移動,以符合該平 上物體4之中央部分被該第二、三支臂232、233所支撐, =板物體4之兩側部分則被該第一、四支臂231、234所 …撐同時δ亥平板物體4是被所述吸附件235吸附,而穩 二地置放於該第一、二、三、四支臂231〜234 Ji,藉此方 式,同樣可使該平板物體4不易產生向下垂墜彎曲、位移 等現象。 由上述之說明可知,本新型平板支撐裝置2,藉由該第 四支臂231、234可彼此以相反方向移動,使得該平板 11 M310091 物版4之兩側部分可分別被談第一、四支臂231、234所支 撐,再配合該平板物體4之中央部分是被該第二、三支臂 232 ^ 233 所 叉揮,因此,該平板物體4可以獲得良好的支 接效果’所以本新型平板支撑裝置2,可以制於支撐各種 不同面積大小的平板物體4,並且配合該平板物體4是被所 述吸附件235所產生的真空吸附力所吸附,而可以穩定地10 M310091 f moves toward the purpose, so it should not be limited to the structural design description of the second transmission set 26 in this embodiment t. Referring to FIG. 7, when the area of the flat object 4 is small, the first, second, third, and fourth cuts 231 to 234 can be moved inwardly so that the central portion and both sides of the flat object are At the same time, it is supported by the four, and the flat object 4 can be adsorbed by the vacuum adsorption force generated by the adsorption member, and can be placed on the first, second, second and fourth arms 231~ 234, the flat object 4 is not easy to produce a downward sag, which effectively maintains the product quality of the flat object 4, and the plate object 4 and the absorbing member 235 are closely attached without gaps. 'There is no vacuum damage between the two to reduce the adsorption force of the adsorbing member 235 on the flat object 4, thereby making the flat body 4 less likely to be displaced, and the flat object 4 is in the process of picking up and transporting It is not easy to collide with the stored cassette. Referring to FIG. 8, if the area of the flat object 4 is large, the first and fourth branches #231 to 234 can be moved outward to conform to the central portion of the flat object 4 by the second and third portions. The arms 232, 233 are supported, and the two sides of the plate object 4 are supported by the first and fourth arms 231, 234 while the δ hai plate object 4 is adsorbed by the absorbing member 235, and is stably placed. The first, second, third and fourth arms 231 to 234 Ji are placed in this way, and in this way, the flat object 4 is also less likely to cause downward sag bending, displacement and the like. It can be seen from the above description that the fourth support arm 2 of the present invention can be moved in opposite directions from each other by the fourth arms 231, 234, so that the two sides of the flat plate 11 M310091 can be talked about first and fourth respectively. Supported by the arms 231, 234, and the central portion of the flat object 4 is forked by the second and third arms 232 ^ 233, so that the flat object 4 can obtain a good supporting effect. The flat plate supporting device 2 can be formed to support the flat object 4 of various different sizes, and the flat plate object 4 is adsorbed by the vacuum adsorption force generated by the adsorbing member 235, and can be stably

置放於遠第一、二、三、四支臂231〜234上,因此,該平 板物版4不僅不易產生向下垂墜胃曲之現象,有效保持該 、’ 體4之產品質,而且因為該平板物體4與吸附件 、兩者之間不致發生真空破壞而降低所述吸附件235對該 平板物體4 <吸附力,藉此可使該平板物體4 +易產生位 移,於取放運送過程中不易與所儲放的卡匣產生碰撞,所 以確實能達到本新型之功效。 惟以上所述者,僅為本新型之較佳實施例而已,當不 能以此限定本新型實施之範圍,即大凡依本新型申請專利 範圍及新型說明内容所作之簡單的等效變化與修飾,皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一俯視示意圖,說明習知機械手臂,承载平板 狀物件之狀態; 圖2是一端視示意圖,說明只利用圖i所示之兩支活 動式支撐架,支撐面積較大的平板狀物件的態樣; 圖3是一端視示意圖,說明另一種習知機械手臂,利 用四支固定式支撐架,支撐面積較小的平板狀物件的態樣 12 M310091 圖4疋一俯視不意圖’說明本新型平板支撐裝置之第 一較佳實施例’承載平板物體之狀態,其中,省略繪出外 豸頂面’藉以直接觀察該外殼内部各構件之配置狀態; 圖5是一作動過程示意圖,輔助說明圖4所示之第— 較佳實施例,平均分散支撐平板物體之狀態; 圖6是-俯視示意圖,說明本新型平板支撐裝置之第 • 1較佳實施例’承載平板物體之狀態,其中,省略繪出外 殼頂面; 圖7是一端視示意圖,辅助說明圖6所示之第二較佳 實施例,平均分散支撐面積較小的平板物體;及 乂 圖8是一端視不意圖,辅助說明圖6所示之第二較佳 貫施例,平均分散支撐面積較大的平板物體。It is placed on the first, second, third and fourth arms 231 to 234. Therefore, the flat plate 4 is not only difficult to produce a downward sag, but effectively maintains the product quality of the body 4, and because The flat object 4 and the adsorbing member, and the vacuum damage are not caused between the two, and the adsorbing member 235 is reduced in the suction force of the flat object 4, so that the flat object 4+ is easily displaced, and the pick-and-place transport is performed. In the process, it is not easy to collide with the stored cassette, so it can really achieve the effect of the present invention. However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the simple equivalent change and modification made by the novel patent application scope and the novel description content, All remain within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a top plan view showing a state in which a conventional mechanical arm carries a flat member; FIG. 2 is a schematic end view showing only two movable support frames shown in FIG. Figure 3 is a schematic view of one end, showing another conventional mechanical arm, using four fixed support frames to support a small-sized flat member. 12 M310091 Figure 4 It is not intended to describe the state of the first preferred embodiment of the present type of tablet supporting device for carrying a flat object, wherein the outer top surface is omitted, so that the configuration state of each member inside the outer casing is directly observed; FIG. 5 is an operation A schematic diagram of a process for assisting the description of the state of the first embodiment shown in FIG. 4 to uniformly disperse the support of the flat object; FIG. 6 is a top plan view showing the first embodiment of the present invention. The state in which the top surface of the outer casing is omitted; FIG. 7 is a schematic end view showing the second preferred embodiment shown in FIG. A flat object having a small area; and 乂 Fig. 8 is a flat object in which the end portion is not intended to explain the second preferred embodiment shown in Fig. 6, and the average dispersed support area is large.

13 M310091 【主要元件符號說明】 2 平板支撐裝置 252 外循環件 21 第一動力源 253 第一固定件 22 第二動力源 254 第二固定件 23 支臂單元 255 外連動件 231 第一支臂 26 第二傳動組 232 第二支臂 261 内傳動輪 233 第三支臂 262 内循環件 234 第四支臂 263 第三固定件 235 吸附件 264 第四固定件 24 外殼 265 内連動件 25 第一傳動組 3 機械手臂 251 外傳動輪 4 平板物體13 M310091 [Main component symbol description] 2 Flat support device 252 External circulation member 21 First power source 253 First fixing member 22 Second power source 254 Second fixing member 23 Arm unit 255 External linkage 231 First arm 26 Second transmission group 232 Second arm 261 Inner transmission wheel 233 Third arm 262 Inner circulation member 234 Fourth arm 263 Third fixing member 235 Adsorption member 264 Fourth fixing member 24 Housing 265 Inner linkage 25 First transmission Group 3 Robot arm 251 Outer drive wheel 4 Flat object

1414

Claims (1)

M310091 九、申請專利範圍·· 1· 一種平板支撐署 用以驅動該平板支偉ΠΤ機械:臂上’該機械手臂 a 、置私動,而该平板支撐裝置則用 支撑Γ板物體,該平板支撐裝置包含: 一第一動力源;及 臂單元,用以供該平板物體置放於其上,該支 第二支臂、—第J二;位於同-平面之-第-支臂、- 臂是位於外側,;第及一第四支臂’該第-、四支 Μ弟一、二支臂則是位於内侧,且該第 一動力源可驅動該第—、 /弟 反方向移動。 支’在相同平面上分別以相 2.依據申請專利範圍笛 -第ιΐ、: 項所述之平板支撐裝置,更包含 ::動力源’可驅動該第二、三支臂兩者在相同平面 刀別以相反方向移動, 且该兩者之移動範圍係侷限於 涊弟一、四支臂之間。 3·依據申請專利範圍第? 一# 固弟項所述之平板支撐裝置,更包含 一第一傳動組,具有雨徊Μ广# w /、碉雨個間隔設置之外傳動輪、一 於該t外傳動輪上之外循環件一用以使該第-支臂與 外循環件互相固定的第_ a 、 心日]弗固疋件、一用以使該第四支臂 ,、外循環件互相固定的第二固定件,及-受該第-動力 源所驅使而帶動該第二固定件移動的外連動件,該第一 動力源可驅動該外連動件,以帶動該第二固定件沿著該 夕循%件移動,同時使該外循環件環繞該二外傳動輪循 環旋轉,藉以帶動該第-固定件以相反於該第二固定件 15 M310091 四支臂在相同平面上分 方向私動’進而驅動該第一 別以相反方向移動。 4.依據申請專利範 -第二傳動組,呈有兩::斤述之平板支撐裝置,更包含 之間的内傳動輪、^ B隔設置且位於該二外傳動輪 、-用以使該該二内傳動輪上之内循環件 件、一用以使:内猶環件互相固定的第三固定 定件,及一受該 :、循衣件互相固定的第四固 ^ ^. 一 源所驅使而帶動該第三固定件 才夕動的内連動件,該第二 帶動$笼-π 一 源可驅動該内連動件,以 環件環繞該二内傳動=二:件移動’同時使該内循 件w “ 轉,藉以帶動該第四固定 = 於該第三固定件之方向移動,進而驅動該第二 5二支#在相同平面上分別以相反方向移動。 .依據申請專利範圍第2或4項所述之平板支樓裝置,更 3中工狀外设,β亥第一、二動力源係位於該外殼内 ^該第-、二、三、四支臂則由該外殼内向外延伸而突 出於該外殼外。 16M310091 IX. Scope of Application for Patention····························································································· The supporting device comprises: a first power source; and an arm unit for the flat object to be placed thereon, the second arm, the second arm; the same-plane-the first arm, The arm is located on the outer side; the first and fourth arms 'the first and fourth arms are located on the inner side, and the first power source can drive the first and second sides to move in the opposite direction. The plate supporting device according to the patent application scope flute- ιΐ,:, in the same plane, further includes: the power source 'can drive the second and third arms in the same plane The knife does not move in the opposite direction, and the range of movement of the two is limited to between the first and fourth arms of the younger brother. 3. According to the scope of the patent application? The flat support device described in the #固弟项, further includes a first transmission group, having a rain 徊Μ广# w /, a rain wheel spaced apart from the transmission wheel, and a circulation member on the outer drive wheel a second fixing member for fixing the first arm and the outer circulation member to each other, a second fixing member for fixing the fourth arm and the outer circulation member to each other, and An external linkage driven by the first power source to drive the second fixing member to move, the first power source driving the outer linkage to drive the second fixing member to move along the unit At the same time, the outer circulation member is cyclically rotated around the outer outer transmission wheel, so as to drive the first fixing member to be opposite to the second fixing member 15 M310091, and the four arms are privately moved in the same plane to drive the first one. Move in the opposite direction. 4. According to the patent application model-second transmission group, there are two:: a tablet supporting device, which further comprises an inner transmission wheel, and is disposed at the second outer transmission wheel, for enabling the An inner circulation member on the inner inner transmission wheel, a third fixed fixed member for fixing the inner inner ring member to each other, and a fourth solid fixed by the same: the sewing member is fixed to each other. Driving the inner connecting member of the third fixing member, the second driving $cage-π source can drive the inner linking member, and the ring member surrounds the two inner transmissions=two: the member moves 'while The inner switch w "turns, so as to drive the fourth fixing = move in the direction of the third fixing member, thereby driving the second 5 two branches # to move in opposite directions on the same plane respectively. According to the patent application scope 2 Or the flat-panel device of the above-mentioned item 4, and the other three working peripherals, the first and second power sources of the β-hai are located in the outer casing, and the first, second, third and fourth arms are outwardly and outwardly of the outer casing. Extends and protrudes beyond the outer casing. 16
TW95217590U 2006-10-02 2006-10-02 Plate holding device TWM310091U (en)

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Application Number Priority Date Filing Date Title
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TWM310091U true TWM310091U (en) 2007-04-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382904B (en) * 2007-06-19 2013-01-21 Ulvac Inc Method for transferring substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382904B (en) * 2007-06-19 2013-01-21 Ulvac Inc Method for transferring substrates

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