M307753 八、新型說明： 【新型所屬之技術領域】 本創作係與基板檢測裝置有關，特別是有關於一種可 快速地完成微調作業之基板檢測裝置。 ^ 5【先前技術】 - 在液晶顯示器的製作過程中，必須藉由一檢測裝置來檢測 ^ 液晶顯示器之一玻璃基板是否有瑕疵。 檢測裝置主要包含有一檢測平台，用以承載玻璃基板，檢 測平台的周圍設有若干組探針，用以檢測玻璃基板。當玻璃基 10板輸送至檢測平台後，利用一光源照射在玻璃基板周緣之定位 標圮，使玻璃基板完成定位之後，才能透過探針進行檢測。 然而，為了大量生產液晶顯示器，原始的玻璃基板尺 寸都相當大，若玻璃基板輸送至檢測平台的位置有偏差， 造成光源的光線無法準確地照射在玻璃基板之定位標記 15時，必須再藉由一調整裝置來進行微調的動作，但是:於 • 玻璃基板的尺寸很大，導致微調作業會非常麻煩，且進行 微調作業的調整裝置結構也會相當複雜。 【新型内容】 20斤^創作之主要目的在於提供一種基板檢測裝置，其結 構簡單，並可快速地完成微調作業，用以方便進行檢測基 板的動作。 為達成上述目的，本創作之基板檢測裝置包含有一檢 測平台、至少-檢測單元與至少一定位單元；該檢測平台 4 M307753 用以承載一基板；該檢測單元設於該檢 具有一工作平面， 面::於!檢測平台的上方’該檢測㈣ 向移動弟一方向、一第二方向與-第三方 行該工作;:該=3行該工作平面，該第二樹 直該工作平面、㈡直=方向，該第三方向則分別垂 十由邊罘一方向與該第二方向；該定位單开吸M307753 VIII. New description: [New technical field] This creation is related to the substrate inspection device, and in particular to a substrate detection device that can quickly perform fine adjustment work. ^ 5 [Prior Art] - In the manufacturing process of a liquid crystal display, it is necessary to detect whether a glass substrate of one of the liquid crystal displays is defective by a detecting device. The detecting device mainly comprises a detecting platform for carrying the glass substrate, and a plurality of sets of probes are arranged around the detecting platform for detecting the glass substrate. After the glass substrate 10 is transported to the inspection platform, the light source is irradiated on the periphery of the glass substrate to position the glass substrate, and then the probe can be detected through the probe. However, for a large number of liquid crystal displays, the original glass substrate is quite large in size. If the position of the glass substrate to the detection platform is deviated, and the light of the light source cannot be accurately irradiated on the positioning mark 15 of the glass substrate, it must be further An adjustment device is used to perform fine adjustment, but: • The size of the glass substrate is large, which makes the fine adjustment work very troublesome, and the structure of the adjustment device for fine adjustment work is also quite complicated. [New content] The main purpose of 20 kg^ creation is to provide a substrate detecting device which is simple in structure and can quickly perform fine adjustment work for facilitating the detection of the substrate. In order to achieve the above object, the substrate detecting device of the present invention comprises a detecting platform, at least a detecting unit and at least one positioning unit; the detecting platform 4 M307753 is configured to carry a substrate; the detecting unit is disposed on the detecting surface and has a working plane :: On the top of the detection platform 'The detection (4) to the mobile brother one direction, one second direction and - the third party line the work;: the = 3 lines of the work plane, the second tree straight to the work plane, (b) straight = direction, the third direction is perpendicular to the direction of the side and the second direction;
10 測平台=周緣，並位於該檢測平台的上方，該定位 ^乂、私轉％電性連接，使該定位單元可同步 测早几沿該第-方向與該第二方向移動。 ^ ，此，本創作之基板檢測裝置可透過該檢測單元與該 疋位單元沿該第—方向與該第二方向的移動，使該定位單 凡可快連地對準該基板之—定位標記，用以方便該檢測單 凡進行後續的檢測動作。 15【實施方式】 茲配合圖式列舉以下較佳實施例，用以對本創作之結 構及功效進行詳細說明；其中所用圖式先簡要說明如下·· 第一圖為本創作一較佳實施例之局部立體圖； 第二圖為第一圖之俯視圖。 2〇 第二圖為第二圖沿3-3剖線的剖視圖； 第四圖為本創作一較佳實施例之局部側視圖； 第五圖為本創作一較佳實施例之使用示意圖； 第六圖為本創作一較佳實施例之動作示意圖，主要顯 不檢測單元與定位單元沿第一方向之狀態； 5 M307753 第七圖為本創作一較佳實施例之動 示檢=單元與定位單元沿第二方向之狀態要顯 第八圖為本創作一較佳實施例之動作 示檢測單it沿第三方向之狀態；以及〜回 第九^本巍實_所提供讀解元與定 4早兀相對工作平面旋轉之示意圖。 "、 請參閱第一圖、第二圖及第五圖，為本創作—較 =所提供之基板檢測裝置⑽，該基板檢職置⑽= 有-檢測平台(20)、四檢測單元⑽與叹位單元⑽。 15 忒檢測平台(20)為概呈矩形的框體，其具有一工作平面 =02) ’該工作平面⑽)的上方可用以承載—基板⑽，如 第五圖所示。該檢測平台(20)的四個角落分別設有一第一驅 動裝，(21)與-第—滑執(22)，其中該第—驅動裝置⑼具 有-第-馬達(212)與-第-螺桿(214)，該第一滑執(22)分 別平行該工作平面(202)與該第一螺桿(214)的軸向，該檢測 平口（20)於该弟一滑執(22)上設有一第一移動座(23)，該第 一移動座(23)係與該第一螺桿(214)連接，使該第一移動座 (23)可受该第一螺桿(214)的驅動而沿著該第一滑執(22)朝 一第一方向(Ρ1)移動(如第七圖所示）。該檢測平台（2〇)於該 第一移動座(23)的一側邊設有一第二驅動裝置(24)與一第 二移動座(25)，其中該第二驅動裝置(24)具有一第二馬達 (242)與一第二螺桿(244)，該第二移動座(25)係與該第二馬 達(242)連接，且該第二移動座(25)與該第一移動座(23)之間 設有一第二滑軌(26)(如第三圖所示），該第二滑執(26)垂直 6 20 M307753 該第一滑執(22)，使該第二移動座(25)可隨該第一移動座(23) 朝該第一方向(P1)移動，並可受該第二馬達(242)的驅動而 沿著該第二滑軌(26)朝一第二方向（P2)移動（如第六圖所 示）。該檢測平台（20)於該第一移動座(23)的一侧面設有一第 5二驅動裝置(27)與一第三移動座(28)，其中該第三驅動裝置 (27)具有一第三馬達(272)與一第三螺桿(274)，該第三移動 座(28)係與該第三馬達(272)連接，且該第三移動座(28)與該 第二移動座(25)之間設有一第三滑執(29)，該第三滑軌(29) 分別垂直該第一滑軌(22)與該第二滑執(26),使該第三移動 1〇座(28)除了可隨著該第一移動座(23)與該第二移動座(25)朝 該第一方向(P1)與該第二方向(P2)移動之外，還可受該第三 馬達(272)的驅動而沿著該第三滑執(29)朝一第三方向（p3) 移動(如第八圖所示）。 各该檢測單元(30)分別裝設於該檢測平台（2〇)的第三 b移動座(28)，並位於該工作平面(2〇2)的上方，使各該檢測 單，(30)兩兩相對，並可隨著該第三移動座(28)的移動而朝 該第一方向(P1)、該第二方向(p2)與該第三方向(p3)移動。 各該，測單元(30)具有轩探針(32)，#各該檢測單元(3〇) 朝及苐一方向(P3)而靠近該工作平面(2〇2)時，可透過該等 2〇楝針(32)碰觸該基板(12)，用以進行檢測基板(12)的動作。 各邊疋位單元(40)裝設於該檢測平台（2〇)的第一移動 座並與該第二移動座(25)連接，使各該定位單元(40) 可隨著該第-移動座(23)與該第二移動座(25)而朝該第一 方向(Ρ1)與該第二方向(Ρ2)移動。各該定位單元(4〇)包含有 7 M307753 一電街麵合元件(Charge Coupled Device，CCD)(42)、一連接 该電荷搞合元件(42)之鏡頭(44)與一連接該鏡頭(44)之反射 鏡(46)，如第四圖所示，其中該反射鏡(46)係與該電荷耦合 元件(42)及該鏡頭(44)呈45度的夾角。該電荷耦合元件(42) 5可將一光源照射至該基板（12)之一定位標記（14)的影像透 過该反射鏡(46)與該鏡頭(44)而加以擷取，用以完成定位的 動作。 經由上述結構，當該基板（12)輸送至該檢測平台（2〇) 後，各該檢測單元(3〇)與各該定位單元(4〇)會先隨著各該 ίο第二移動座(25)而朝該第二方向（P2)移動至該基板（12)的 上方，如第五圖所示。若該基板（12)輸送至該檢測平台（2〇) 的位置有所偏差，造成各該定位單元(4〇)無法對準該基板 (12)之定位標記（14)，此時，各該第二移動座(25)會再受 該第二驅動裝置（24)的驅動而連帶各該檢測單元（3〇)與 15各該定位單元(40)朝該第二方向（P2)移動，如第六圖所 示，若各該定位單元(4〇)仍無法對準該基板（12)之定位標 記（1句，各該第一移動座(23)會再帶動各該檢測單元(3〇) 與各該定位單元(4〇)朝該第一方向（P1)移動，如第七圖所 示，當各該定位單元(40)對準該基板（12)之定位標記（14) 2〇之後’各該定位單元(4〇)即可將該光源的光線照射至各該 定位標記（14)的影像透過該反射鏡(46)的反射，並經由該 鏡頭（44)而加以擷取，用以完成定位的動作，此時，各該 檢測單元（30)即可隨著各該第三移動座（28)朝該第三方 向（P3)移動，如第八圖所示，直至各該檢測單元(3〇)的探 8 M307753 針(32)碰觸該基板(12)，用以進行後續檢測基板（12)的動 作。另外，若該基板（12)的尺寸相當大，使得該基板（12) 輸送至該檢測平台（20)的位置容易有歪斜的狀況發生，如 第九圖所示，將造成各該檢測單元（3〇)的部份探針（32) 5無法碰觸到該基板（12)，此時，各該檢測單元(30)與各該 疋位單元（40)可以該第三方向（p3)為軸心旋轉一角度 (0 )，使各該檢測單元（3〇)的探針（32)可碰觸到該基板 (12) ’以完成檢測的動作。10 The measuring platform=perimeter is located above the detecting platform, and the positioning is 电, privately connected to the electrical connection, so that the positioning unit can synchronously move along the first direction and the second direction. ^, the substrate detecting device of the present invention can be aligned with the positioning unit by the movement of the detecting unit and the second direction in the first direction and the second direction, so that the positioning unit can be quickly aligned with the positioning mark of the substrate. In order to facilitate the detection of the test, the subsequent detection action. [Embodiment] The following preferred embodiments are described in conjunction with the drawings to explain the structure and function of the present invention in detail. The drawings are briefly described as follows: The first figure is a preferred embodiment of the present invention. Partial perspective view; The second figure is a top view of the first figure. 2 is a cross-sectional view of the second embodiment taken along line 3-3; the fourth drawing is a partial side view of a preferred embodiment of the present invention; and the fifth drawing is a schematic view of the use of a preferred embodiment of the present invention; 6 is a schematic diagram of the action of a preferred embodiment of the present invention, mainly showing the state of the detecting unit and the positioning unit in the first direction; 5 M307753 The seventh drawing is a dynamic detection of the preferred embodiment of the present invention. The state of the unit in the second direction is shown in the eighth figure. The action of the preferred embodiment of the present invention shows the state of the detection unit it along the third direction; and the back of the ninth 4 Schematic diagram of the relative rotation of the working plane. ", please refer to the first picture, the second picture and the fifth picture, which is the substrate detecting device (10) provided by the creation-comparison=substrate inspection device (10)=the detection platform (20) and the four detection unit (10) With the sigh unit (10). The 忒 detection platform (20) is a substantially rectangular frame having a working plane = 02) 'above the working plane (10)) for carrying the substrate (10) as shown in the fifth figure. The four corners of the detecting platform (20) are respectively provided with a first driving device, (21) and a -th sliding device (22), wherein the first driving device (9) has a -first motor (212) and a -first a screw (214), the first sliding handle (22) is parallel to the working plane (202) and the axial direction of the first screw (214), and the detecting flat opening (20) is disposed on the first sliding handle (22) There is a first moving seat (23), and the first moving seat (23) is connected with the first screw (214), so that the first moving seat (23) can be driven by the first screw (214) The first slipper (22) moves toward a first direction (Ρ1) (as shown in the seventh figure). The detecting platform (2〇) is provided with a second driving device (24) and a second moving seat (25) on one side of the first moving seat (23), wherein the second driving device (24) has a a second motor (242) and a second screw (244), the second moving seat (25) is coupled to the second motor (242), and the second moving seat (25) and the first moving seat ( 23) is provided with a second sliding rail (26) (as shown in the third figure), the second sliding (26) is vertical 6 20 M307753 the first sliding (22), so that the second moving seat ( 25) moving toward the first direction (P1) with the first moving seat (23), and being driven by the second motor (242) along the second sliding rail (26) toward a second direction ( P2) Move (as shown in Figure 6). The detecting platform (20) is provided with a fifth driving device (27) and a third moving seat (28) on one side of the first moving base (23), wherein the third driving device (27) has a first a third motor (272) and a third screw (274), the third moving seat (28) is coupled to the third motor (272), and the third moving seat (28) and the second moving seat (25) Between the two is provided with a third sliding (29), the third sliding rail (29) is perpendicular to the first sliding rail (22) and the second sliding (26) respectively, so that the third moving 1 seat ( 28) in addition to being movable in the first direction (P1) and the second direction (P2) along with the first moving seat (23) and the second moving seat (25), The drive of (272) moves along the third slip (29) in a third direction (p3) (as shown in the eighth figure). Each of the detecting units (30) is respectively mounted on the third b moving seat (28) of the detecting platform (2〇), and is located above the working plane (2〇2), so that each of the detecting orders, (30) The two are opposite each other and are movable toward the first direction (P1), the second direction (p2), and the third direction (p3) as the third moving seat (28) moves. Each of the measuring units (30) has a Xuan probe (32), and each of the detecting units (3) can pass through the working plane (2〇2) in a direction (P3) and in the first direction (P3). The cymbal (32) touches the substrate (12) for detecting the operation of the substrate (12). Each side clamping unit (40) is mounted on the first moving seat of the detecting platform (2〇) and connected to the second moving seat (25), so that each positioning unit (40) can follow the first moving The seat (23) and the second moving seat (25) move in the first direction (Ρ1) and the second direction (Ρ2). Each positioning unit (4〇) includes a 7 M307753, a Charge Coupled Device (CCD) (42), a lens (44) connected to the charge engaging component (42), and a lens (44) connected thereto. 44) A mirror (46), as shown in the fourth figure, wherein the mirror (46) is at an angle of 45 degrees to the charge coupled element (42) and the lens (44). The charge-coupled component (42) 5 can extract an image of a positioning mark (14) irradiated by a light source to the substrate (12) through the mirror (46) and the lens (44) for positioning. Actions. Through the above structure, after the substrate (12) is transported to the detecting platform (2〇), each of the detecting units (3〇) and each of the positioning units (4〇) will first follow each of the second moving seats ( 25) moving to the upper side of the substrate (12) in the second direction (P2) as shown in the fifth figure. If the position of the substrate (12) conveyed to the detecting platform (2〇) is deviated, each positioning unit (4〇) cannot be aligned with the positioning mark (14) of the substrate (12). The second moving base (25) is further driven by the second driving device (24) to move the detecting unit (3〇) and each of the positioning units (40) toward the second direction (P2), such as In the sixth figure, if the positioning unit (4〇) still cannot align the positioning mark of the substrate (12) (one sentence, each of the first moving seats (23) will drive each detecting unit again (3〇). And moving the positioning unit (4〇) toward the first direction (P1), as shown in the seventh figure, when each positioning unit (40) is aligned with the positioning mark (14) of the substrate (12). Then, each of the positioning units (4〇) can illuminate the light of the light source to the reflection of each of the positioning marks (14) through the mirror (46), and capture the image through the lens (44). In order to complete the positioning operation, at this time, each of the detecting units (30) can move toward the third direction (P3) with each of the third moving seats (28), as shown in the eighth figure, until each The detection unit (3〇) probe 8 M307753 pin (32) touches the substrate (12) for subsequent detection of the substrate (12). In addition, if the substrate (12) is relatively large in size, the substrate (12) The position of the detection platform (20) is prone to skewing. As shown in the figure 9, the partial probe (32) 5 of each detection unit (3〇) cannot be touched. The substrate (12), at this time, each of the detecting unit (30) and each of the clamping units (40) can be rotated by an angle (0) in the third direction (p3), so that each detecting unit (3) The probe (32) of the 〇) can touch the substrate (12)' to complete the detecting action.
板（12)輸送至該檢測平台（2〇)的位 地進行調整而完成定位的動作， 業。 、置有所偏差，仍可快速 用以方便後續的檢測作 M307753 【圖式簡單說明】 作—較佳實施例之局部立體圖。 弟一圖為弟一圖之俯視圖。 :三圖為第二圖沿3_3剖線的剖視圖。 f四圖為本創作—較佳實施例之局部側視圖。 =圖為本創作—較佳實施例之使用示意圖。 弟=圖為本創作—較佳實施例之動 不制單元與定位單元沿第-方向之狀態。 要顯 -认第Ϊ圖為本創作—較佳實關之動作示意圖，主要顯 不榀，早7〇與定位單元沿第二方向之狀態。 、、 第八圖為本創作一較佳實施例之動作示意圖，主 不檢測單元沿第三方向之狀態。 ’“、 第九圖為本創作一較佳實施例所提供之檢測單元與定 位單元相對工作平面旋轉之示意圖。 15 M307753The plate (12) is conveyed to the position of the detection platform (2〇) to adjust and complete the positioning operation. If there is a deviation, it can be quickly used to facilitate the subsequent detection. M307753 [Simplified description of the drawings] is a partial perspective view of the preferred embodiment. The picture of the younger brother is a top view of the picture of the younger brother. : The three figures are the cross-sectional view of the second figure along the line 3_3. f is a partial side view of the creation of the preferred embodiment. = Figure is a schematic representation of the use of the preferred embodiment. The younger one is the state of the creation-the preferred embodiment of the moving unit and the positioning unit along the first direction. It is necessary to display the picture of the second picture in the direction of the second direction. The eighth figure is a schematic diagram of the action of a preferred embodiment of the present invention, and the main unit does not detect the state of the unit in the third direction. The ninth diagram is a schematic diagram of the rotation of the detecting unit and the positioning unit relative to the working plane provided by a preferred embodiment of the present invention. 15 M307753
【主要元件符號說明】 基板檢測裝置(10) 基板(12) 定位標記(14) 檢測平台(20) 工作平面(202) 第一驅動裝置(21) 5 第一馬達(212) 第一螺桿(214) 第一滑執(22) 第一移動座(23) 第一方向(P1) 第二驅動裝置(24) 第二馬達(242) 第二螺桿(244) 第二移動座(25) 第二滑執(26) 10 第二方向(P2) 第三驅動裝置(27) 第三馬達(272) 第三螺桿(274) 第三移動座(28) 第三滑軌(29) 第三方向(P3) 檢測單元(30) 探針(32) 定位單元(40) 15 電荷柄合元件(42) 反射鏡(46) 鏡頭(44) 11[Main component symbol description] Substrate detecting device (10) Substrate (12) Positioning mark (14) Detection platform (20) Working plane (202) First driving device (21) 5 First motor (212) First screw (214) ) First slide (22) First mover (23) First direction (P1) Second drive (24) Second motor (242) Second screw (244) Second mover (25) Second slide Hold (26) 10 Second direction (P2) Third drive (27) Third motor (272) Third screw (274) Third mover (28) Third slide (29) Third direction (P3) Detection unit (30) Probe (32) Positioning unit (40) 15 Charge handle assembly (42) Mirror (46) Lens (44) 11