TWM287818U - Micro-channel apparatus with cross electrodes structure - Google Patents

Description

M287818 VIII. New Description: [New Technical Field] The present invention is related to a micro-channel device, which is particularly suitable for a micro-flow device using a plurality of interleaved electrode units, which can effectively supply a fluid solution. The homogenization of mixing and shortening the mixing time of fluid solution ^ [Previous technology] With the rapid development of human gene decoding engineering in the 21st century, the series - including new drug development, DNA and protein analysis, gene expression, etc. Research has also opened up the development of biochips. However, biochips have been developed to solve the problem of small and complex biological processes. Microfluidic channels are formed on the biochip, and the sample solution or the solvent mixed with the drug can be passed through as 'detection, treatment and research. The relevant understanding can be found in the Republic of China Invention Bulletin No. 538〇〇4 “Microfluidic System for Biochips” and No. 558549 “Methods for Producing Wafer-type Microchannels”. The biochip is produced by using transparent glass as a substrate, and is formed by hot press molding technology and sealing bonding, and has a micro flow path having a south resolution and high compatibility with biomolecules. The related manufacturing technology is widely known in the above patents and will not be described here. In the microchannel device of the prior art, the helium fluid is allowed to pass through and be mixed. However, the sample solution through the microchannel or the solution containing the drug cannot be mixed quickly in the flow process, which often requires a long time and a long microchannel length to be effectively mixed:

FE019—P444-TW 5 M287818 The treatment is quick and uniform. Therefore, the prior art disclosed above may have problems affecting the detection time and cost. In order to solve the above problems. The microchannel device has a plurality of interleaved electrode units. The plurality of electrodes arranged on the side of the microchannel unit are effective to shorten the time and distance of mixing of the fluid solution. ° , can be [new content] The purpose of this creation is to provide a micro-channel device = wrong electrode unit can effectively increase the mixing time of the fluid solution, = and the time and distance of mixing the fluid solution. In order to achieve the above object, the present invention proposes a microchannel device. a second hydrophilic substrate 'for carrying a fluid solution; - a microchannel single ^; an inlet end for inputting an unmixed fluid solution; an output terminal for a j mixed fluid solution; and a plurality of interleaved electrode units, Use; shorten the time and distance of mixing of the fluid solution. - The characteristics of the microchannel device according to the present invention, wherein the material of the interleaved electrode unit is a ship (Pt). According to the creation of the microfluidic device for mixing fluids, the parental electrode unit of the parental input is not the parental power source of the frequency. According to the present invention, the magnetic flux device is a combination of a microchannel device, wherein the interleaved electrode unit is deposited using a sputtering method.

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Between right. The number of electrode units of the microchannel device for uniformly mixing the fluid is between 6 pairs and 18

The details are as follows. "The purpose of the present invention is to exemplify the purpose, the features, and the advantages of the preferred embodiments." The invention may be embodied in various forms, but the drawings and the following description are preferred embodiments of the present invention, and it is to be understood that the invention is not considered as an example of the invention. It is not intended to limit the present invention to the drawings and/or the specific embodiments described. FIG. 1 is a preferred embodiment of the microfluidic device 1 according to the present invention. The micro-channel device 1 〇〇# comprises a hydrophilic substrate 110; a micro-channel unit 120; an input-output terminal 122 and a plurality of interleaved electrode units 13A. The hydrophilic substrate 110 There are two surfaces for carrying a fluid solution. The micro flow channel unit 120 is disposed on one surface of the hydrophilic substrate 11 . The input 121 is disposed at one end of the micro flow channel unit 12 , which is used for Enter the unmixed fluid solution. The output 丨22, set The other end of the micro flow channel unit 120 is disposed for outputting the mixed fluid solution. The plurality of interleaved electrode units 130 are disposed in a side region of the micro flow channel unit 120 and form an interlaced arrangement. Used to shorten fluid dissolution

7 FE019 -P444-TW M287818 The date of this mouth ^· between and distance. One of the external power supplies is disposed at the edge of the hydrophilic 2 plate 110 for driving the fluid solution power; it should be noted that the hydrophilic substrate 11 can be made of glass, germanium substrate, acrylic substrate and plastic. In any of the substrates, a preferred embodiment disclosed in the present application employs sodium-containing glass. On the hydrophilic substrate ιι, the sample solution or the solution mixed with the drug can be retained and diffused, and the hydrophilic substrate 110 is used to prepare a carrier fluid solution. In this embodiment, the microchannel unit 12 is fabricated by a semiconductor compatible process. There are mainly two methods that can be realized. The first type is a micro-electromechanical Ele^ro-Mechanical type of micro-machining (Bulk Micr〇machining). And the second is microelectromechanical thermoforming (H〇t Emb〇ssin phantom mating sealing bonding (Bonding) technology. In the field of microelectromechanics, this type of micromachining is a process that is often used. As the name suggests, The body micromachining etches the stone day or the glass material into a piece of processed base material, and most of the body type micromachining process uses wet 'etching' (Wet Etch) or dry etching (Dry). Etch) is carried out in the wet etching (Wet Etch), after the photoresist is applied to the wafer or the glass, after the photoresist is defined, and after exposure and development, the photoresist is used as the mask ( Mask). The area to be etched at this time will be exposed and placed in an etchant of κ〇Η or HF for etching to obtain the desired structure. The etching process is performed by chemical reaction, so the glass material is used. Vertical The equal and horizontal etching will be referred to as an isotropic etching, and then the profile of the microchannel will be defined after etching. Finally, the microchannel unit 12 can be obtained by removing the photoresist. As for

FE019 -P444-TW 8 M287818 Dry Etch Before the dry etching, the U image needs to pass through the process defined by the mask. The purpose is to define the area of the silver engraving. To etch, 4 hunting by particle f (Plasma) to produce particle bombardment, so you can enter the "Anisotropic" etching. Then, after etching, the microfluidic unit is defined by defining the microfluid, the previous profile, and finally removing the photoresist. External 'microelectromechanical hot press forming with sealing joint technology. Another j two heated plates to heat the material to the glass transition temperature _ ^ v^iass Trans

Temperature; Tg). When the material is allowed to soften and not melt, and the pressure is applied to the microstructured mold, the pattern is transferred to the formed material to form the microchannel unit 12A. Among them, the material may be a polyoxyalkylene polymer PDMS or the like. The microstructured mold can be used to achieve the desired pattern using a semiconductor process. Referring to Figure 2, there is shown a plurality of cross-linked electrode structures in accordance with the present invention. The plurality of interleaved electrode units 13A include a first electrode 131 and a second electrode 132. The first electrode is at the bottom of the micro flow channel single A 120, and its input is an alternating current power source. The second electrode 132 is located at the top of the micro flow channel unit 12, and the input is also an alternating current power source. The first electrode 131 and the second electrode 13 are respectively arranged in an upper and lower staggered arrangement for quickly mixing the fluid solution uniformly. The first electrode 131 and the second electrode 132 are connected to an AC power source having a frequency greater than ΙΚΗζ. Please refer to Figure 3 in conjunction with Figure 2 to illustrate how the fluid solution mixes quickly and evenly. Figure 3 shows the use of plurals in accordance with the present invention.

FE019 -P444-TW 9 M287818 Interlaced electrode unit 130 provides a quick and even mixing of the fluid solution. When the hydrophilic substrate 110 is applied with a DC power source 14 , the fluid = liquid is pushed from the input terminal 121 to the output terminal 122. When the fluid solution passes through the interval of the plurality of interleaved electrode units, the solution to be mixed is affected by the alternating electric field, and a flow rate is generated in the interval: a spoiler of the sentence. Fluid solutions such as sample solutions or solutions containing (iv) agents can be uniformly mixed by rapid perturbation, which provides detection, treatment and research. By the action of the plurality of interleaved electrode units 13, the uniformity and time of the fluid solution during mixing can be greatly shortened. It should be noted that the material of the plurality of interleaved electrode units 铂3〇 is platinum (Pt) and deposited by sputtering. The sputtering method uses DC sputtering or RF magnetron sputtering. It should be noted that the substrate temperature should be between 150 C and 200 C; the power should be between 25 W and 5 〇〇 w; the pressure should be between 2 x 10 6Torr~1.8xl (between T3T〇rr. In addition, the number of the plurality of interleaved electrode units 130 is between 6 pairs and 18 pairs. • Refer to Fig. 4 and Fig. 5, respectively, as shown in the figure According to a preferred embodiment of the present invention, a plurality of staggered electrodes 13 are connected to the surface after energization and after energization. According to the test, it takes 2 to 3 hours for the fluid solution to be uniformly mixed after being energized; After that, not only can the mixture be uniformly mixed within 30 minutes, and the length of the microchannel unit i 2 可 can be shortened by more than 40%, which means that the time of mixing the solution can be greatly shortened. In addition, since the microchannel unit 22 is The second end adopts the external power supply 24 ' 'the second input end 252 and the second output end 253 are not externally applied, so that the fluid can only be ensured at the first input end 221 to the first

10 FE019 - P444-TW M287818 The two ends 222 flow ' without erroneously flowing into the second input 252 and the second output 253. The present invention has disclosed in detail the effect of the micro-channel device 1 to: In addition, by means of the plurality of electrodes arranged in a staggered arrangement, the sides of the single-turner 忒U channel have an effect of increasing the uniformity of the fluid solution mixing and shortening the time and distance of the fluid solution mixing. Although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the scope of the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. As explained above, all types of corrections and changes can be made without destroying the spirit of this creation. Therefore, the scope of protection of this creation is subject to the definition of the patent application scope attached. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a wafer structure diagram of a preferred embodiment of a microchannel device according to the present invention; Fig. 2 is a diagram showing a plurality of interleaved electrode structures according to the present invention; A side view of a fluid solution that is rapidly and uniformly mixed using a plurality of interleaved electrodes in accordance with the present invention; FIG. 4 is a view showing a plurality of interleaved electrodes attached to a surface prior to energization in accordance with a preferred embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 5 is a schematic view showing the attachment of molecules to a surface after energization of a plurality of interleaved electrodes in accordance with a preferred embodiment of the present invention.

FE019 -P444-TW M287818 [Description of main component symbols] 100 microchannel device 110 hydrophilic substrate 120 micro channel unit 121 input terminal 122 output terminal 130 plural interleaved electrode units 131 first interleaved electrode 132 second interleaved Electrode 14 0 plus power supply

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Claims (1)

M287818 Nine, the scope of application for patents · · · · A micro-channel device, comprising: a hydrophilic substrate, with two surfaces, for the name ▲, ▲ /, you use to carry a fluid solution; a micro-channel unit Provided on the surface of the hydrophilic substrate, an input end, disposed at one end of the micro flow channel unit, for inputting an unmixed fluid solution into the micro flow channel unit to generate mixing; An output end disposed at the other end of the micro flow channel unit for outputting the mixed fluid solution; and μ plurality of interleaved electrode units disposed in a side region of the micro flow channel unit and interleaved Arranged and connected to an external electrode for shortening the time and distance of mixing of the fluid solution, wherein the external power source is disposed at the edge of the hydrophilic substrate and is used to drive the power required by the fluid solution. 2. A microchannel device according to the first aspect of the invention, wherein the pro-Xf. green substrate is selected from the group consisting of glass, a stone substrate, an acrylic substrate and a plastic substrate. 3. A microchannel device according to the scope of the patent application, wherein the input end can be formed by a plurality of microchannels. 4. A microchannel device according to the first aspect of the patent application, wherein the external power source is a DC power source and an AC power source. 13 FE019-P444-TW M287818. A microchannel device according to item 4 of the patent application, wherein the motor power source is used to push a fluid solution of the microchannel unit. A micro-channel device according to the fourth aspect of the patent application, wherein the service power source is used for pushing and reversing the fluid flow of the micro-flow channel unit, and the micro-channel device of the first item The plurality of interleaved electrode units further includes: a first electrode is located at a bottom of the micro flow channel unit, the first lightning is inputting an alternating current power source; and a first electrode is located at the micro flow channel unit At the top, the second electrode is input to an alternating current power source, and the first electrode and the second electrode are respectively arranged in an upper and lower staggered row for uniformly mixing the fluid solution. Among them: the patent application: Item 7 of the micro-channel device The material of the 电极-type electrode unit is platinum (Pt). FE019-P444-TW 14 M287818. The microchannel device of claim 7, wherein the interleaved electrode unit is deposited using a sputtering method. 11. A microchannel device according to clause 7 of the patent application, wherein the number of the interleaved electrode units is between 6 pairs and 18 pairs. 15 FE019 -P444-TW