M276318 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種檢測機台，尤指一種晶圓盒檢測機 台0 【先前技術】 二十世紀末人類正式邁入數位資訊網路時代，舉凡資 訊的產生、傳遞以及存取，莫不透過數位化網路方式進行。 資訊的數位化，促使數位化產品，例如電腦、網路，以及 10 提供數位服務的相關產業蓬勃發展，進一步地帶動國内半 導體產業快速發展。而台灣半導體產業這幾年在台灣的工 業市％上，佔領著很大的市場和優勢，也是帶領台灣經濟 的龍頭產業，在半導體產業經營的環境中，由於面臨國際 化與多角化的競爭壓力下，為了使半導體晶圓的生產線能 15順利生產，該應用於半導體生產用的晶圓盒檢測及管理， 則為一項重要的課題。習知晶圓盒的檢測是採取人工單項 測忒的方式，此種操作方式不但有人為操作誤差之產生， 更無法確保量測之一致性，造成資料收集的困難，不利於 後續進行分析利，實造成使用上之-大困擾。 20 σ創作人緣因於此，本於積極發明創作之精神，亟思一 種可以解決上述問題之「晶圓盒檢測機台」，幾經研究實 驗、、至凡成此項嘉惠世人之本創作。 【新型内容】 M276318 10 15 本創作之-種晶圓盒檢測機台’係對一晶圓盒做檢測 晶圓盒包括有-殼體其係開設有-下開下開口 之環週内緣形成有-内緣部；其中，晶圓盒檢測機台包括： -標準底盤，包括有一上表面、及一下表面，纟由上表面 向上凸设有一標準平台’標準平台係有與一晶圓盒之標準 内緣部相同尺寸之標準形狀，且標準平台之外週緣係與上 表面形成有-肩部，晶圓盒之下開口係跨置於上表面上、 且内緣部並對應罩蓋於標準平台之肩部上，標準底盤另貫 設有至少一氣體入口、及至少—氣體出口。此外，更包括 一氣壓計’係外接於標準底盤之至少-氣體出口外；以及 -氣聽，係連通至至少—氣體人口，並提供_氣體流入 晶圓盒内。上述氣壓計可透過一中空導管連通至上述之至 少-氣體出口。因&，藉由本創作可檢測晶圓盒之下開口 或内緣是否有破損《變形的情形發纟，並可_併檢測晶圓 體的密封程度’如晶圓盒發生破損或變形則立即將此=圓 盒停用，以增加生產線之生產效率。 此外，本創作之標準平台上更組設有—定位支架，且 於：定位支架並標設有一定位標記，因此，當晶圓盒對應 罩盍於標準平台上時，可檢測晶圓盒頂端之夾件是否有對 應於此定位標記，藉此檢測晶圓盒之夾件是否有異位或壓 著力不足之情形產生，如有異位或夾件壓著力不足之情形 發生’則表示此晶圓盒無法完整夾住晶圓匣，無法達成曰 圓盒該有的功能。並且，此晶圓盒檢測機台更包含一微粒 20 M276318 福，器（particle counter)，其可用來偵測晶圓盒内部之微粒 數量，並確保晶圓盒内部之潔淨程度。 再者’本創作之標準底盤之下表面固設有一滑座、及 -動力裝置’滑座上滑設有_滑塊，且滑塊並向上凸伸有 至少一㈣’其巾動力裝㈣驅動滑塊沿著該滑座相對滑 移。上述滑塊包括有第一滑塊、第二滑塊 '以及一彈箬， 此彈”連接於第―滑塊及第：滑塊之間，且彈簧並定義 有一預設拉力，其中’勾部係組設於第-滑塊，且動力裝 置係連結於滑塊之第二滑塊。因此，#勾部鉤住上述晶圓 盒側板内面之-保持器而進行相對滑移時，並可檢偵此保 持器於超過上述預設拉力時會不會掉落，如掉落則代表此 晶圓盒亦無法再繼續使用。 上述滑塊並包括有-内螺孔，且動力裝置包括有一螺 桿，螺桿可螺入滑塊之内螺孔内。上述動力裝置較佳為一 15 馬達’但亦可為如氣壓缸、油壓缸等具相同功能之動力裝 置皆可。 【實施方式】 有關本創作之晶圓盒檢測機台1〇，請參照圖i所示之 立體圖’並-併參照圖2所示之剖面圖，晶圓盒檢測機台 10 ’是用來對-晶圓盒u做檢測作業’此晶圓盒u包括有 -殼體m，且殼體lu其係開設有一下開口 ιΐ3，此下開口 113之環週内緣並形成有一内緣部112 :其中，晶圓盒檢測 機台ίο包括：-標準底盤12、—氣壓計14以及一氣壓栗13。 M276318 上述標準底盤12,包括有一上表面121、及一下表面122, 且上表面121向上凸設有一標準平台123，而標準平台123 可與晶圓盒11之標準内緣部丨12相同尺寸之標準形狀，且標 準平台123之外週緣可與上表面121形成一肩部124，且晶圓 5盒11之下開口 U3可跨置於上表面121上、且内緣部112並對 應罩盍於標準平台123之肩部124上，以形成一密閉空間， 並且此標準底盤12另設有一氣體入口 131、及一氣體出口 141 ;於本實施例中，氣壓計是透過中空導管142連通至氣 體出口 14，因此當晶圓盒π罩蓋於標準平台123上時，可檢 1〇 測晶圓盒η之週緣112是否和標準平台123之肩部124相密 合’如晶圓盒11罩蓋於標準平台123無法密合於肩部124, 則表示此晶圓盒1 1之殼體111已變形，必須要將此晶圓盒1 i 淘/犬掉，不可以再使用，以免造成生產線上之工作人員操 作上之困擾。 15 再者’當晶圓盒11罩蓋於標準平台123時，可藉由氣 壓泵13將氣體輸入至晶圓盒11内，並保持一預定時間後， 例如：氣體輸入過後三秒鐘，接著讀取氣壓計14的讀數， 如此便可檢測晶圓盒11的下開口 113或内緣部1丨2是否有破 損或變形的情況發生，當有破損或變形的情況下，則氣體 20 無法維持一固定壓力，藉由氣壓計14可察覺晶圓盒11上的 微小裂縫，使工作人員可發現其破損，並以新品置換。 於本實施例中，標準平台123上更組設有一定位支架 15 ’且此定位支架15之頂端並標設有一定位標記15 1，其可 用來檢測晶圓盒11頂板内面的夾件116是否在正常的使用 M276318 位置，當晶圓盒u對應罩蓋於標準平台123上時，於正常的 f月况下，曰曰圓盒11设體111之頂板内面之夾件116恰能對應 至定位支架15上之定位標記115，藉此可檢測夾件116是否 有異位之情形發生，且於本實施例中，定位標記151連接有 5 一壓力感測器152，此壓力感測器152是用來_依附於晶 圓盒1 1上頂端之夾件丨16是否工作正常，其主要功能有當晶 圓盒11夾件116產生固定位置變形時可偵測其作用在感測 器152上的壓力，以判斷夾件116是否有異位或壓力不足情 況產生，此外，其亦可用來偵測晶圓盒〗丨頂端夾件丨16的長 10度，即用來檢測夾件116對於定位標記115的壓著力道是否 足夠，如夾件丨16的長度太長或太短時即代表晶圓盒11夾件 116安裝不良或已彈性疲乏，必須將其更換。因如果檢測夾 件116的壓著力道不足時，則當此晶圓盒丨丨運用於生產線上 時，則無法固定住晶圓匣，則無法使生產線能順利的運作， 15如夾件U6無法正確對應至定位標記115，或無法以足夠的 力道壓著於定位標記115時，則代表此晶圓盒丨丨已不符使 用’須以一新晶圓盒11置換使用。 此外，如圖3所示，標準底盤12之下表面122固設有一 滑座21、、及一動力裝置22，滑座21上滑設有一滑塊23， 20 且忒滑塊23並向上凸伸有至少一勾部233,其中該動力裝置 22係驅動該滑塊23沿著該滑座21相對滑移。上述動力裝置 22於本例中較佳為一馬達22卜但亦可選用如氣壓缸、油壓 缸專具相同功能動力裝置22皆可。於本實施例中，滑塊23 包括有第一滑塊231、第二滑塊232、以及彈簧24，且此彈 M276318 簧24可連接於第一滑塊231及第二滑塊232之間，並且此彈 簧24定義有一預設拉力，其中，勾部233可組設於第一滑塊 231，且馬達221係連結於滑塊23之第二滑塊232。再者，第 二滑塊232並包括有一内螺孔221，且馬達221包括有一螺桿 5 222，此螺桿222可旋入第二滑塊232之内螺孔221内。當馬 達221驅動螺桿222螺旋時，則滑塊23會沿著滑座21前後滑 移，因此第二滑塊232可連接至馬達221並受馬達221之驅 動，且第一滑塊231之勾部233可鉤住晶圓盒11側板内面之 一保持器18(retainer)來進行相對滑移，於本例中，保持器 10 18為一平行四連桿機構。因第二滑塊232可連接至馬達221 並受馬達221之驅動，而於滑座21進行滑移，並當勾部233 勾於保持器18，且當第二滑塊232開始滑移時，若彈簧24 拉力超過預設拉力，而第一滑塊23 1仍無移動，則代表保持 18為正常固定於晶圓盒11上，則表示此晶圓盒u為一正 15 ㊉之晶圓盒11，可繼續使用，不需更換新品。反之，若第 一滑塊231會移動某一距離，則表示保持器18並非穩固地固 疋於日日圓孟11上’則須立即進行檢修或更換。此外，晶圓 盒檢測機台10更包含一頂起器241以及一位置偵測器242， 且此頂起器241亦連接至滑塊23並藉由滑塊23之作動而用 20來將保持器18頂起或放下，然後位置偵測器242可確認保持 器18在放下時能順利放置定位，以確保保持器^可正常使 用。再者，晶圓盒檢測機台1〇更包含一微粒偵測器19，於 本實施例中，微粒偵測器丨9可組設於定位支架15之側邊 上，此微粒偵測器19可用來偵測晶圓盒丨丨内部表面之微粒 M276318 數量’以確保晶圓盒u内部表面之潔淨程度，以避免日後 因晶圓盒η應用於生產線時，因内部不夠微粒數量過多而 造成晶圓受汙染。 因此，藉纟本創作可透過晶圓盒檢測機台⑺來自動檢 5測晶圓盒η之氣密性、夾件、保持件等相關測試，藉此可 減少因人工檢測而造成之誤差，進而可提高生產線上之生 產效率，進而提昇生產上之競爭力。 上述實施例僅係為了方便說明而舉例而已，本創作所 主張之權利範圍自應以申請專利範圍所述為準， 10 於上述實施例。 吸 【圖式簡單說明】 圖1係本創作一較佳實施例之立體圖。 圖2係本創作一較佳實施例之剖面圖。 圖3係本創作一較佳實施例之另一剖面圖 【主要元件符號說明】 〇晶圓盒檢測機台1 1晶圓盒 111殼體 121上表面 124肩部 14氣壓計 15定位支架 22動力裝置 112内緣部 122下表面 13 1氣體入口 13氣壓泵 151定位標記 23滑塊 12標準底盤 113下開口 123標準平台 141氣體出口 142中空導管 21滑座 233勾部 20 M276318 231第一滑塊 18保持器 241頂起器 221馬達 24彈簧 19微粒偵測器 232第二滑塊 152壓力感測器 242位置偵測器 12M276318 8. Description of the new type: [Technical field to which the new type belongs] This creation is about a testing machine, especially a wafer box testing machine 0 [Previous technology] At the end of the 20th century, humans formally entered the era of digital information networks. Ju Fan The generation, transmission and access of information must be carried out through digital networks. The digitization of information has promoted the rapid development of digital products, such as computers, the Internet, and related industries that provide digital services, and further promote the rapid development of the domestic semiconductor industry. In recent years, Taiwan ’s semiconductor industry has occupied a large market and advantage in Taiwan ’s industrial market. It is also a leading industry that leads Taiwan ’s economy. In the environment in which the semiconductor industry operates, due to the pressure of internationalization and polygonal competition Next, in order to enable the smooth production of semiconductor wafer production lines, it is an important issue for the wafer cassette inspection and management applied to semiconductor production. It is known that the detection of the wafer box is performed by a single manual measurement method. This operation method not only causes artificial operation errors, but also cannot ensure the consistency of measurement, which causes difficulties in data collection and is not conducive to subsequent analysis. Use it-big trouble. Because of this, the creative origin of the σ is based on the spirit of actively inventing and creating, and urgently thinking about a "wafer box inspection machine" that can solve the above problems. After many research and experiments, it has become the original creation that benefits the world. [New content] M276318 10 15 The creation of this kind of wafer cassette inspection machine is to inspect a wafer cassette. The wafer cassette includes a casing, which is provided with a lower opening, and a lower opening and a lower opening. Yes-Inner edge part; Among them, the wafer box inspection machine includes:-A standard chassis including an upper surface and a lower surface, and a standard platform is protruded upward from the upper surface. The standard platform is provided with a wafer box. The standard shape of the standard inner edge portion is the same size, and the outer periphery of the standard platform is formed with a shoulder on the upper surface. The lower opening of the wafer box is placed on the upper surface, and the inner edge portion corresponds to the cover on the standard. On the shoulder of the platform, the standard chassis is provided with at least one gas inlet and at least a gas outlet. In addition, it also includes a barometer 'which is externally connected to at least the gas outlet of the standard chassis; and-aural, which is connected to at least the gas population, and provides gas to flow into the wafer cassette. The above-mentioned barometer can be connected to the above-mentioned at least-gas outlet through a hollow pipe. Because of & with this creation, you can detect whether the opening or the inner edge of the wafer box is damaged. Deformation can occur, and the degree of sealing of the wafer body can be detected. If the wafer box is damaged or deformed, it will be immediately Disable this = round box to increase the production efficiency of the production line. In addition, the standard platform of this creation is further provided with a positioning bracket, and the positioning bracket is marked with a positioning mark. Therefore, when the wafer box is covered on the standard platform, the top of the wafer box can be detected. Whether the clip has a positioning mark corresponding to this, so as to detect whether the clip of the wafer box is out of position or the pressure is insufficient. If there is an out of position or the pressure of the clip is insufficient, it means that the wafer The cassette cannot completely hold the wafer cassette, and cannot achieve the functions of a round cassette. In addition, this wafer box inspection machine also contains a particle 20 M276318 particle counter, which can be used to detect the number of particles inside the wafer box and ensure the cleanliness of the inside of the wafer box. Furthermore, a slide seat is fixed on the lower surface of the standard chassis of this creation, and the power device is provided with a slider on the slide seat, and the slider is upwardly protruded by at least one frame, and its towel power equipment is driven. The slider is relatively slid along the slider. The above slider includes a first slider, a second slider ', and an impulse, and the "shot" is connected between the "-" slider and the ": slider", and a preset tension is defined by the spring, and the' hook portion ' The system is set on the first slider, and the power unit is connected to the second slider of the slider. Therefore, when the #hook is hooked to the -retainer on the inner surface of the above side of the wafer box for relative sliding, it can be inspected. Detect whether the holder will fall when it exceeds the preset tension, if it falls, it means that the wafer box can no longer be used. The above slider also includes an internal screw hole, and the power unit includes a screw. The screw can be screwed into the inner screw hole of the slider. The above power device is preferably a 15 motor ', but it can also be a power device with the same function such as a pneumatic cylinder or a hydraulic cylinder. [Embodiment] Related to this creation Wafer cassette inspection machine 10, please refer to the perspective view shown in FIG. I and-and with reference to the sectional view shown in Fig. 2, the wafer cassette inspection machine 10 is used to inspect the wafer cassette u. Operation 'This wafer cassette u includes a casing m, and the casing lu is provided with a lower opening. 3 An inner edge portion 112 is formed on the inner peripheral edge of the lower opening 113. Among them, the wafer box inspection machine includes:-a standard chassis 12,-a barometer 14, and a pneumatic pump 13. M276318 The above-mentioned standard chassis 12, including There is an upper surface 121 and a lower surface 122, and the upper surface 121 is upwardly provided with a standard platform 123, and the standard platform 123 can have a standard shape with the same size as the standard inner edge portion of the wafer box 11 and the standard platform 123 The outer peripheral edge can form a shoulder 124 with the upper surface 121, and the opening U3 under the wafer 5 box 11 can be straddled on the upper surface 121, and the inner edge portion 112 correspondingly covers the shoulder 124 of the standard platform 123 To form a closed space, and the standard chassis 12 is further provided with a gas inlet 131 and a gas outlet 141; in this embodiment, the barometer is connected to the gas outlet 14 through a hollow pipe 142, so when the wafer box π When the cover is on the standard platform 123, it is possible to check whether the peripheral edge 112 of the wafer box η is in close contact with the shoulder 124 of the standard platform 123. Section 124, which represents the housing of the wafer cassette 1 1 111 has been deformed, this wafer box 1 i must be removed / cannot be used again, so as not to cause trouble to the staff on the production line. 15 Furthermore, when the wafer box 11 is covered on the standard platform 123 At this time, the gas can be input into the wafer box 11 by the air pump 13 and held for a predetermined time, for example, three seconds after the gas is input, and then the reading of the barometer 14 is read, so that the wafer box can be detected. Whether the lower opening 113 or the inner edge portion 11 of 11 is damaged or deformed. When the damage or deformation occurs, the gas 20 cannot maintain a fixed pressure, and the wafer box 11 can be detected by the barometer 14. The tiny cracks on it allow the staff to find the damage and replace it with new products. In this embodiment, a positioning bracket 15 ′ is further provided on the standard platform 123, and a positioning mark 15 1 is marked on the top of the positioning bracket 15, which can be used to detect whether the clamp 116 on the inner surface of the top plate of the wafer cassette 11 is in In normal use of the M276318 position, when the wafer box u corresponds to the cover on the standard platform 123, under normal f conditions, the clip 116 on the inner surface of the top plate of the round box 11 set body 111 can correspond to the positioning bracket. The positioning mark 115 on 15 can detect whether the clip 116 is out of position. In this embodiment, the positioning mark 151 is connected to a pressure sensor 152. The pressure sensor 152 is used for __ Whether the clip attached to the top of the wafer box 1 1 16 is working normally. Its main function is to detect the pressure on the sensor 152 when the wafer box 11 clip 116 has a fixed position deformation. In order to determine whether the clamp 116 is out of position or insufficient pressure, it can also be used to detect the wafer cassette. 丨 The top clamp 丨 16 is 10 degrees long, that is, it is used to detect the clamp 116 for the positioning mark 115 Whether the pressing force is sufficient, such as the length of the clip 16 Which represents too long or too short pod 11 when clamp 116 is mounted or elastic fatigue failure, must be replaced. If the pressing force of the detection clamp 116 is insufficient, when the wafer cassette is applied to a production line, the wafer cassette cannot be fixed, and the production line cannot be smoothly operated. 15 If the clamp U6 cannot be used, When it corresponds to the positioning mark 115 correctly or cannot be pressed on the positioning mark 115 with sufficient force, it means that the wafer box 丨 丨 is not used properly. It must be replaced with a new wafer box 11 for use. In addition, as shown in FIG. 3, the lower surface 122 of the standard chassis 12 is fixedly provided with a slide base 21 and a power unit 22, and a slide block 23, 20 is slidably arranged on the slide base 21, and the slide block 23 projects upward. There is at least one hook portion 233, wherein the power unit 22 drives the slider 23 to relatively slide along the slide base 21. The above power unit 22 is preferably a motor 22 in this example, but a power unit 22 having the same function as a pneumatic cylinder or a hydraulic cylinder may also be selected. In this embodiment, the slider 23 includes a first slider 231, a second slider 232, and a spring 24, and the spring M276318 can be connected between the first slider 231 and the second slider 232. In addition, the spring 24 defines a preset pulling force, wherein the hook portion 233 can be set on the first slider 231, and the motor 221 is connected to the second slider 232 of the slider 23. Furthermore, the second slider 232 also includes an internal screw hole 221, and the motor 221 includes a screw 5222, which can be screwed into the internal screw hole 221 of the second slider 232. When the screw of the screw 222 is driven by the motor 221, the slider 23 slides back and forth along the slide 21, so the second slider 232 can be connected to and driven by the motor 221, and the hook portion of the first slider 231 233 can hook a retainer 18 (retainer) on the inner surface of the side plate of the wafer cassette 11 for relative sliding movement. In this example, the retainer 10 18 is a parallel four-link mechanism. Because the second slider 232 can be connected to and driven by the motor 221, it slides on the slider 21, and when the hook 233 hooks on the holder 18, and when the second slider 232 starts to slide, If the pulling force of the spring 24 exceeds the preset pulling force, and the first slider 23 1 has not moved, it means that 18 is normally fixed on the wafer box 11, which means that the wafer box u is a wafer box with a positive 15 ㊉ 11, can continue to use without replacing new products. Conversely, if the first slider 231 moves a certain distance, it means that the retainer 18 is not firmly fixed on the Japanese yen Yen Meng 11 'and must be repaired or replaced immediately. In addition, the wafer cassette inspection machine 10 further includes a jack 241 and a position detector 242, and the jack 241 is also connected to the slider 23 and is maintained by 20 by the action of the slider 23. The holder 18 is lifted or lowered, and then the position detector 242 can confirm that the holder 18 can be placed and positioned smoothly when it is lowered to ensure that the holder ^ can be used normally. Furthermore, the wafer cassette inspection machine 10 further includes a particle detector 19. In this embodiment, the particle detector 9 can be set on the side of the positioning bracket 15. The particle detector 19 It can be used to detect the number of particles M276318 on the inner surface of the wafer box 'to ensure the cleanliness of the inner surface of the wafer box u to avoid crystals caused by the insufficient amount of particles inside the wafer box when it is used in the production line in the future. The circle is contaminated. Therefore, through this creation, the wafer box inspection machine can be used to automatically test the 5 airtightness, clamps, holders and other related tests of the wafer box η, thereby reducing errors caused by manual inspection. It can further improve the production efficiency on the production line, and thus enhance the competitiveness in production. The above embodiments are just examples for the convenience of explanation. The scope of the rights claimed in this creation shall be based on the scope of the patent application. 10 The above embodiments. [Schematic description] Figure 1 is a perspective view of a preferred embodiment of the present invention. FIG. 2 is a cross-sectional view of a preferred embodiment of the present invention. FIG. 3 is another cross-sectional view of a preferred embodiment of the present invention. [Description of main component symbols] 〇 Wafer box inspection machine 1 1 Wafer box 111 Housing 121 Upper surface 124 Shoulder 14 Barometer 15 Positioning bracket 22 Power Device 112 inner edge portion 122 lower surface 13 1 gas inlet 13 air pump 151 positioning mark 23 slider 12 standard chassis 113 lower opening 123 standard platform 141 gas outlet 142 hollow duct 21 slider 233 hook portion 20 M276318 231 first slider 18 Holder 241 Jack 221 Motor 24 Spring 19 Particle detector 232 Second slider 152 Pressure sensor 242 Position detector 12