TWM242696U - Modular probe card with coaxial transmitter - Google Patents

Description

M242696 V. Creative Instructions (2) ----- It has a connection end. The ring plate has a plurality of through holes, and each through hole is provided with a microwave connector. The microwave connectors are Coaxial thin wire (ca X 丨 & 1 c & b 1 e) is electrically connected to the probe. The trowel probe is connected to the connection end of the printed circuit board with a wire for high f or low frequency. For the use of signals, a flat plate with an upper cover is provided on the ring plate to seal the inside of the ring plate and shield radio interference (RF ') and electromagnetic wave interference (EM1), so that the coaxial probe card can shield microwave f Conductor wafers are tested. However, non-modular coaxial probe cards cannot be easily assembled and replaced. Once a fault occurs, it is more difficult to repair and repair. [Creation purpose and summary] ^ The main purpose of this creation is to provide a modular detection card with a coaxial transmission device, which is modularly installed between a first printed circuit board and a second printed circuit board. At least one coaxial transmission device. When it is necessary to test semiconductor devices with different pad distributions for the same electrical function, another first, brush circuit board is assembled, and the second printed circuit board is combined with a corresponding one to be tested. The detection head of the semiconductor device makes the detection card have better versatility. Λ The second purpose of this creation is to provide a modular detection card with a coaxial transmission device. The two ends of the coaxial transmission line of the coaxial transmission device are respectively connected to a connector. The upper and lower connectors are assembled and fixed. Multiple coaxial transmission lines of the coaxial transmission device can be plugged and connected to the first printed circuit board, the second printed circuit board and the second printed circuit board, so there will be no problems such as coaxial transmission line connection errors, and the detection card can be quickly assembled.

M242696 V. Creation Instructions (3) Another purpose of this creation is to receive a broadcast and riA modular probe card 'The probe card is a module with a K-transmission axis transmission device which has good electrical properties and will not It is also easier to repair when the cause = Bao Tong and the probe card fails. Generated, = a model with "transmission device" 3 has at least one coaxial transmission device, a first brush circuit board and a detector, and = board, a second printed circuit board The shaft transmission device consists of a first

Assembly i :: It is composed of a plurality of coaxial transmission lines of 2i, and its mode is between the ρ brush circuit board and the second printed circuit board to form the transmission path of the two m!:, The-end of these coaxial transmission lines. Is the second connection device, and the other end of the * coaxial transmission line is connected to the brother: connector, and is electrically connected to the second printed circuit board correspondingly pluggable = the connection device, the second printed circuit The board is combined with a detecting head, the two measuring heads are electrically connected to the second printed circuit board, and a plurality of detecting contacts are formed on one surface thereof for probing a semiconductor device. [Detailed description of creation] Please refer to the attached drawings. 'This creation will list the following embodiment descriptions: According to the first specific embodiment of this creation, as shown in Figure 1, a modular detection card 100 series The probe card 1 is provided in a test head 170 and is electrically connected to a test machine 180 for electrically contacting a semiconductor device (such as a wafer, etc.) during the test. 〇 system includes a first printed circuit board 11 (printed circuit board, PCB), a first

M242696 V. Creation instructions (4) Two printed circuit boards 120, a probe head 130 (prObe head) and at least one shaft transmission device 1 40, wherein the first printed circuit board 丨 丨 〇 is used as test equipment The connection interface with the probe card can be combined with the test head of the test equipment. The first printed circuit board 110 is formed with a plurality of first connection devices 111, such as electrical conductive holes or slots. The first connector HI of the coaxial transmission device 140 is inserted, and the first printed circuit board 110 has a plurality of conductive lines (not shown in the figure) to electrically connect the first connection device 1 U to the first connector HI. Test head 丨 7. The second printed circuit board 丨 20 is used as a transmission interface between the probe head 130 [probe head] and the first printed circuit board 110. The second printed circuit board 丨 20 is formed with a plurality of second connection devices 121. For example, the electrical connection hole or slot is used to pluggably connect the second connector 143 of the coaxial transmission device 140. In this embodiment, the second connection device 1 21 is an electrical connection hole. The arrangement density of these second connectors 43 on the second printed circuit board 120 is higher than the arrangement density of the first connectors 14 ι on the first printed circuit board 1, and the second connection devices 121 are arranged in a ring. Around the probe head 130, the probe head 130 is coupled to the second printed circuit board 120, and preferably, the second printed circuit board 2 is formed with a cavity 1 2 2 The probe head 130 is fixed and accommodated. The probe head 301 is a stone substrate, and a surface 131 of the probe head 132 is formed with a plurality of probe contacts 132, such as probe needles or bumps. ), Etc., for contacting a pad (not shown) of a semiconductor device, in this embodiment, as in the third As shown, a plurality of connection pads 1 3 3 are formed around the surface 131 of the probe head 130. The connection pads 1 3 3 are electrically connected to the corresponding detection contacts 3 2, and the connection pads 133 are Electrically connected to the second seal with the electrical connection device 15

M242696

The second connection device 121 of the circuit board 120 is brushed. The electrical connection devices 15 can be metal wires or flexible printed circuits. In this embodiment, these electrical connection devices The 150 series uses a flexible circuit board, which mainly includes a flexible insulating layer 151, such as polyimide (PI), etc. A metal circuit 152 is formed on one surface of the flexible insulating layer 151. The connection pad 133 of the probe 130 is connected to the second connection device 121 of the second printed circuit board 120, and the metal circuit 152 is covered with a protective layer 153 (⑶ver layer) to strengthen the structure of the electrical connection device 15 . As shown in FIGS. 1 and 2, in this embodiment, a plurality of coaxial transmission devices 1 4 0 ′ are provided between the first printed circuit board 110 and the second printed circuit board 120 as the detection card. The transmission circuit of the 100 test circuit. A transmission device U0 is composed of a first connector 141 and a second connection: 143 gates and a plurality of coaxial transmission lines 145. The first connector 141 or the second connector 143 is It can be a plug connector [piUg c〇nnect〇r], pin type or card type, and these coaxial transmission lines 145 can effectively prevent signal interference caused by the Faraday effect (s iaw), and It completely obstructs cross-talk phenomena caused by excessively dense circuits or high-frequency tests. In this embodiment, the first connector 141 and the second connector 143 are arc-shaped, where the A plurality of pins 142 are formed on one surface of the first connector 141, and one end of the coaxial transmission lines 145 is fixedly coupled to the first connector 41 and electrically connected to the corresponding pins 142. The second The connector 143 is formed with a plurality of pins 144 or a card. The other end of the coaxial transmission line 145 is coupled to the second connector 143 and is electrically connected.

Page 10 Ά £ M242696

V. Creation instructions (7) It is not necessary to assemble individual coaxial transmission lines 145 on the first printed circuit board 11 or the second printed circuit board 120, making the troubleshooting and repair of the probe card 100 easy and quick. The coaxial transmission line 145 has the positioning of the first connector 141 and the first connector 143, and no coaxial transmission line 丨 45 connection error ^ etc. & Question 0 According to the second specific embodiment of this creation, as shown in FIG. 4 As shown, a modular probe card 200 is provided on a test head 260 and is electrically connected to a test machine 270 for electrically contacting a semiconductor device during a test. The probe card 200 The system includes a first printed circuit board 21, a second printed circuit board 220, a probe 230, and at least one coaxial transmission device 24. The first printed circuit board 210 is formed with a plurality of first connection devices. 2'n, ~ the first connector 241 for inserting the coaxial transmission device 240, such as a pin-type plug connector, the second printed circuit board 2 2 0 is formed with a plurality of second connection devices 221, such as Slot for inserting the second connector 243 of the coaxial transmission device 24 In this embodiment, the probe head 230 is a multilayer ceramic circuit board, which is coupled and electrically connected to the second printed circuit board 220 by its connection pad 233, and a surface of the probe head 230 231 is formed with a plurality of detection contacts 232 for contacting a pad of a semiconductor device. As shown in FIGS. 4 and 5, in this embodiment, a coaxial transmission device 2 4 0 is provided between the first printed circuit board 21 0 and the second printed circuit board 2 2 0 as the detection card 2 The transmission path of the test circuit. The coaxial transmission device 240 is composed of a first connector 241, a second connector 243, and a plurality of f coaxial transmission lines 2 4 5. In this embodiment, the first The connector 241 and the second connector 243 are circular or other, and the coaxial

Brief description of the drawings on page 12 [Illustration of the drawings] 1st 2nd 2 ¾¾ · Figures · Figures: Modular model of the device according to the present invention, perspective view of the first module according to the present invention; sectional view of the detection card in a specific embodiment In a specific embodiment η FIG. 3 · A partial enlarged view of the first embodiment of the present invention, = a cross-sectional view of a modular detection card of the device in the second embodiment of the present invention; A perspective view of the second embodiment. [Illustration of the drawing number] 1 00 Probe card Figure 4 Figure 5 has coaxial transmission coaxial transmission device Modular probe card has coaxial transmission coaxial transmission device 11 The first printed circuit board ln the first connection device 120 Second printed circuit board 121 Second connection device 122 Cavity 1 3 〇 Surface of probe 131 140 Coaxial transmission device 141 First connector 143 Second connector 150 Electrical connection device 151 Soft insulating layer 1 3 2 Detection contact 142 Pin 144 Pin 1 5 2 Metal line 133 145 Connection pad Coaxial transmission line 153 Protective layer M242696 Simple illustration of the drawing 1 8 0 Test machine 1 6 0 Housing 1 7 0 Test head 2 0 0 Probe card 2 1 0 A printed circuit board 2 11 First connection device 2 2 0 Second printed circuit board 221 Second connection device 2 3 0 Probe head 233 Connection pad 245 Coaxial transmission line 270 Test machine 2 31 Surface 2 3 2 Probing contact 240 Coaxial Transmission device 241 First connector 243 Second connector 2 5 0 Housing 2 6 0 Test head

Claims (1)

M242696 Ά 91216882% year $ month? ί Day 6. Patent application scope [Scope of patent application] 1. A modular detection card with a coaxial transmission device, including: a first printed circuit board provided with a plurality of first connection devices; The second printed circuit board is provided with a plurality of second connection devices;-, the probe head is electrically connected to the second printed circuit board and connected to the second printed circuit board, and one of the probe heads Table = is formed with a plurality of detection contacts for touch testing two semiconductor devices, and * at least one coaxial transmission device, which is composed of a first connection, a second connector and a plurality of coaxial transmission lines The two connectors are fixedly connected to the ends of the coaxial transmission lines for the first connection of the printed circuit board, and the second connector is fixed to the other end of the coaxial transmission lines. One of the second printed wiring 4 & connection devices, and the second connector is pluggably connected to the second connection device. 2 The module with a coaxial transmission device as described in item 1 of the 11th patent scope = industrial wood test card, wherein the coaxial transmission device is disposed between the first printed circuit board and the second printed circuit board. 3:11 凊 The module with coaxial transmission device described in item 2 of the patent scope = I; Π card, which also contains a case to fix the first printed circuit board, the second printed circuit board, and accommodate the Coaxial transmission device. : t! 4 The first scope of the patent range described by the J member has a coaxial transmission device and a parallel detection device, in which the second connector of the coaxial transmission device has an arrangement density higher than that on the first printed circuit board. First connector at IHK1 p. 16 M242696 Arrangement density on circuit boards. :: f:: A j-type probe card with a coaxial transmission device as described in item 丨 of the scope of the patent application, wherein the first connector or the second connection device is a plug or a plug connector. 0. A modular probe card with a coaxial transmission device as described in item 4 of the scope of patent application, wherein the first connector or the second connection device has a plug, but has a coaxial device as described in item 6 of the scope of patent application The module type detection card of the transmission device, wherein the pins are arranged staggered. : The modular probe card with a coaxial transmission device as described in item 1 of the scope of the patent application, wherein the first connector and the second connector of the coaxial transmission device are circular or arc-shaped. 9. The die and coaxial probe with a coaxial transmission device as described in item 1 of the scope of the patent application, wherein the second printed circuit board is formed with a recess to combine the probe. A modular detection card with a coaxial transmission device as described in item 1 of the scope of patent application, wherein the detection head is electrically connected to the second printed circuit board by a metal wire or a flexible circuit board. 11. The modular detection card with a coaxial transmission device as described in item 1 of the scope of patent application, wherein the detection head is a silicon substrate or a ceramic circuit ΙΙΗ page 17