TWI847086B - 記憶體裝置及其製造方法 - Google Patents

記憶體裝置及其製造方法

Info

Publication number
TWI847086B
TWI847086B TW111100530A TW111100530A TWI847086B TW I847086 B TWI847086 B TW I847086B TW 111100530 A TW111100530 A TW 111100530A TW 111100530 A TW111100530 A TW 111100530A TW I847086 B TWI847086 B TW I847086B
Authority
TW
Taiwan
Prior art keywords
manufacturing
methods
memory devices
memory
devices
Prior art date
Application number
TW111100530A
Other languages
English (en)
Other versions
TW202230635A (zh
Inventor
陳建盈
楊耀仁
黃家恩
Original Assignee
台灣積體電路製造股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US17/482,094 external-priority patent/US20220238540A1/en
Application filed by 台灣積體電路製造股份有限公司 filed Critical 台灣積體電路製造股份有限公司
Publication of TW202230635A publication Critical patent/TW202230635A/zh
Application granted granted Critical
Publication of TWI847086B publication Critical patent/TWI847086B/zh

Links

TW111100530A 2021-01-22 2022-01-06 記憶體裝置及其製造方法 TWI847086B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163140323P 2021-01-22 2021-01-22
US63/140,323 2021-01-22
US17/482,094 2021-09-22
US17/482,094 US20220238540A1 (en) 2021-01-22 2021-09-22 Memory devices and methods of manufacturing thereof

Publications (2)

Publication Number Publication Date
TW202230635A TW202230635A (zh) 2022-08-01
TWI847086B true TWI847086B (zh) 2024-07-01

Family

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715649B (zh) 2015-10-12 2021-01-11 日商半導體能源研究所股份有限公司 電子裝置、半導體裝置的製造方法、以及使用其製造之電晶體

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715649B (zh) 2015-10-12 2021-01-11 日商半導體能源研究所股份有限公司 電子裝置、半導體裝置的製造方法、以及使用其製造之電晶體

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