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Priority claimed from US17/175,366external-prioritypatent/US11961738B2/en
Application filed by 台灣積體電路製造股份有限公司filedCritical台灣積體電路製造股份有限公司
Publication of TW202232243ApublicationCriticalpatent/TW202232243A/zh
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Publication of TWI845833BpublicationCriticalpatent/TWI845833B/zh