TWI840753B - Rotary distribution device and rotary connection mechanism thereof - Google Patents
Rotary distribution device and rotary connection mechanism thereof Download PDFInfo
- Publication number
- TWI840753B TWI840753B TW111105616A TW111105616A TWI840753B TW I840753 B TWI840753 B TW I840753B TW 111105616 A TW111105616 A TW 111105616A TW 111105616 A TW111105616 A TW 111105616A TW I840753 B TWI840753 B TW I840753B
- Authority
- TW
- Taiwan
- Prior art keywords
- connection mechanism
- pod
- rotary
- channel
- hull
- Prior art date
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 66
- 230000007246 mechanism Effects 0.000 title claims abstract description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910002804 graphite Inorganic materials 0.000 claims description 15
- 239000010439 graphite Substances 0.000 claims description 15
- 238000007789 sealing Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 11
- 230000000712 assembly Effects 0.000 description 10
- 238000000429 assembly Methods 0.000 description 10
- 239000002775 capsule Substances 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 3
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 3
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229920005560 fluorosilicone rubber Polymers 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 1
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000005654 stationary process Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Abstract
Description
本揭露關於一種旋轉連接機構,特別是關於一種可提供穩定負壓的旋轉連接機構。 The present disclosure relates to a rotary connection mechanism, and in particular to a rotary connection mechanism that can provide a stable negative pressure.
目前習知的電子元件或半導體元件,在裝入載帶前都需要經過方向辨別、接向、電性參數測試、表面打標、視覺引腳檢測、分料盒處理等步驟,而元件在各階段步驟中的輸送主要是藉由配送裝置來實現。轉盤式的配送裝置是現代電子製造業中後段製程的關鍵設備,具有速度快、配送效率高等優點,其中的旋轉連接機構更是轉盤式配送裝置完成元件配送及取放的關鍵部件。 Currently known electronic components or semiconductor components need to go through steps such as direction identification, connection, electrical parameter testing, surface marking, visual pin detection, and material box processing before being loaded into the carrier. The transportation of components in each stage is mainly achieved by the delivery device. The turntable delivery device is a key equipment in the middle and back-end process of modern electronic manufacturing industry. It has the advantages of fast speed and high delivery efficiency. The rotating connection mechanism is the key component of the turntable delivery device to complete component delivery and placement.
隨著科技日新月異的發展,積體電路晶片的封裝形式越來越小,對積體電路配送裝置的精度及速度的要求也越來越高。現有配送裝置的旋轉連接機構於旋轉過程中無法有效地提供工作轉盤上的吸提組件持續且穩定的負壓,僅能在旋轉停止時提供負壓,造成晶片在吸提組件上存在偏移的可能性,發生偏移的晶片到達各個工位時不能準確定位,故裝置在加工及組裝的精度要求上相對地高,導致成本過高。 With the rapid development of technology, the packaging form of integrated circuit chips is getting smaller and smaller, and the requirements for the precision and speed of integrated circuit delivery devices are getting higher and higher. The rotary connection mechanism of the existing delivery device cannot effectively provide continuous and stable negative pressure to the suction and extraction components on the working turntable during the rotation process. It can only provide negative pressure when the rotation stops, causing the chip to be offset on the suction and extraction component. The offset chip cannot be accurately positioned when it reaches each station. Therefore, the device has relatively high precision requirements in processing and assembly, resulting in excessive costs.
因此,本領域亟需可克服上述負壓不穩定及裝置成本過高等間題的旋轉連接機構及一種使用該旋轉連接機構的旋轉配送裝置。 Therefore, the field urgently needs a rotating connection mechanism that can overcome the above-mentioned problems such as unstable negative pressure and excessively high device cost, and a rotating delivery device using the rotating connection mechanism.
有鑑於此,本揭露提供一種能在旋轉或旋轉停止時持續維持穩定負壓且成本較低的旋轉連接機構,其包括第一艙體及第二艙體,第二艙體套設於該第一艙體中,以使該第二艙體之第一表面與該第一艙體之殼體間形成氣路。 In view of this, the present disclosure provides a low-cost rotary connection mechanism that can continuously maintain a stable negative pressure when rotating or stopping the rotation, which includes a first pod and a second pod, and the second pod is sleeved in the first pod so that an air path is formed between the first surface of the second pod and the shell of the first pod.
於本揭露之至少一具體實施例中,該第一艙體具有連接孔,該第二艙體則具有噴嘴、第一開口、第二開口、第一通道及第二通道,其中,該噴嘴對應於該連接孔並設置於該第二艙體之第一表面,且該噴嘴突出於該氣路中;該第一通道及第二通道設置於該第二艙體中,該第一通道經配置以連通該第一開口與該氣路,且該第二通道經配置以連通該第二開口與該噴嘴。 In at least one specific embodiment of the present disclosure, the first hull has a connecting hole, and the second hull has a nozzle, a first opening, a second opening, a first channel, and a second channel, wherein the nozzle corresponds to the connecting hole and is disposed on the first surface of the second hull, and the nozzle protrudes in the gas path; the first channel and the second channel are disposed in the second hull, the first channel is configured to connect the first opening with the gas path, and the second channel is configured to connect the second opening with the nozzle.
於本揭露之至少一具體實施例中,該第二艙體鎖固於該第一艙體中。 In at least one specific embodiment of the present disclosure, the second cabin is locked in the first cabin.
於本揭露之至少一具體實施例中,第一艙體及第二艙體具有相同之旋轉軸,且該第一艙體及該第二艙體係配置為沿該旋轉軸旋轉時,維持該氣路中之氣壓的恆定。 In at least one specific embodiment of the present disclosure, the first pod and the second pod have the same rotation axis, and the first pod and the second pod are configured to maintain a constant air pressure in the air path when rotating along the rotation axis.
於本揭露之至少一具體實施例中,第二通道包括對應於噴嘴的水平區段及對應於第二開口的垂直區段。 In at least one specific embodiment of the present disclosure, the second channel includes a horizontal section corresponding to the nozzle and a vertical section corresponding to the second opening.
於本揭露之至少一具體實施例中,復包括配氣盤組件,其包括頂層配氣盤,其中,該頂層配氣盤以能相對旋轉的方式耦接至第二艙體,以密封該第二艙體。 In at least one specific embodiment of the present disclosure, a gas distribution plate assembly is further included, which includes a top gas distribution plate, wherein the top gas distribution plate is coupled to the second hull in a relatively rotatable manner to seal the second hull.
於本揭露之至少一具體實施例中,頂層配氣盤包括對應於第二通道的第三通道以及對應於第一通道的第四通道。 In at least one specific embodiment of the present disclosure, the top gas distribution plate includes a third channel corresponding to the second channel and a fourth channel corresponding to the first channel.
於本揭露之至少一具體實施例中,頂層配氣盤包括石墨盤。 In at least one specific embodiment of the present disclosure, the top gas distribution plate includes a graphite plate.
於本揭露之至少一具體實施例中,復包括具有旋轉軸的支撐組件,以支撐配氣盤組件,該支撐組件包括支撐臂及彈簧元件,其中,該配氣盤組件藉由該彈簧元件之彈力與第二艙體緊密接合。 In at least one specific embodiment of the present disclosure, a support assembly having a rotating shaft is further included to support the valve plate assembly, and the support assembly includes a support arm and a spring element, wherein the valve plate assembly is tightly connected to the second cabin by the elastic force of the spring element.
於本揭露之至少一具體實施例中,連接孔係等間距地環設於第一艙體,噴嘴係等間距地環設於第二艙體之第一表面。 In at least one specific embodiment of the present disclosure, the connection holes are arranged around the first hull at equal intervals, and the nozzles are arranged around the first surface of the second hull at equal intervals.
本揭露復提供一種旋轉配送裝置,其包括:本揭露之旋轉連接機構;工作轉盤,其係與該旋轉連接機構耦接的;驅動模組,其經配置以驅使該旋轉連接機構及該工作轉盤轉動;吸提組件,其設置於該工作轉盤上,並藉由管線連接至該旋轉連接機構;以及負壓產生模組,其耦接至該旋轉連接機構,以於該驅動模組致動或靜止時供應該吸提組件穩定的負壓。 The present disclosure further provides a rotary dispensing device, which includes: the rotary connection mechanism disclosed herein; a working turntable, which is coupled to the rotary connection mechanism; a driving module, which is configured to drive the rotary connection mechanism and the working turntable to rotate; a suction assembly, which is disposed on the working turntable and connected to the rotary connection mechanism through a pipeline; and a negative pressure generating module, which is coupled to the rotary connection mechanism to provide a stable negative pressure to the suction assembly when the driving module is activated or stationary.
於本揭露之至少一具體實施例中,旋轉連接機構復包括具有旋轉軸的支撐組件,以支撐該旋轉連接機構、該工作轉盤及該驅動模組,並使三者依序配置於該旋轉軸上。 In at least one specific embodiment of the present disclosure, the rotary connection mechanism further includes a support assembly having a rotary shaft to support the rotary connection mechanism, the working turntable and the drive module, and the three are sequentially arranged on the rotary shaft.
本揭露的旋轉連接機構可在旋轉或旋轉停止時持續提供穩定的負壓,使位於工作轉盤上且連接至旋轉連接機構的吸提組件能穩固的吸住元件。此外,本揭露的旋轉連接機構體積小、成本低,且組裝精度要求相對低,故可降低組裝及加工精度對於實際功能的影響。 The rotary connection mechanism disclosed herein can continuously provide a stable negative pressure when rotating or stopping the rotation, so that the suction assembly located on the working turntable and connected to the rotary connection mechanism can firmly hold the component. In addition, the rotary connection mechanism disclosed herein is small in size, low in cost, and has relatively low assembly precision requirements, so it can reduce the impact of assembly and processing precision on actual functions.
1:旋轉配送裝置 1: Rotating distribution device
10:第一艙體 10: First cabin
11:頂面 11: Top
12:殼體 12: Shell
13:連接孔 13: Connection hole
14:負壓氣路 14: Negative pressure air circuit
19:第一軸承口 19: First bearing mouth
20:第二艙體 20: Second cabin
21:第一表面 21: First surface
22:噴嘴 22: Spray nozzle
23:第一通道 23: First channel
24:凹槽 24: Groove
25:密封元件 25: Sealing element
26:第二表面 26: Second surface
27:第二通道 27: Second channel
271:水平區段 271: Horizontal section
272:垂直區段 272: Vertical section
281:第二開口 281: Second opening
282:第一開口 282: First opening
29:第二軸承口 29: Second bearing mouth
30:配氣盤組件 30: Valve plate assembly
31:頂層配氣盤 31: Top air distribution plate
311,321:第三通道 311,321: The third channel
312,322:第四通道 312,322: Fourth channel
313,323,333:第三軸承口 313,323,333: The third bearing mouth
32:底層配氣盤 32: Bottom air distribution plate
33:連接件 33: Connectors
331:第一開孔 331: First opening
332:第二開孔 332: Second opening
40:支撐組件 40: Support assembly
41:基底盤 41: Base plate
411:支撐臂 411: Support arm
412:彈簧元件 412: Spring element
42:底座 42: Base
421:連接部位 421:Connection part
50:旋轉軸 50: Rotation axis
60:工作轉盤 60: Working turntable
61:吸提組件 61: Suction and extraction components
611:氣管元件 611: Tracheal components
612:吸嘴部 612: Nozzle
613:堵頭部 613: Plug head
614:連接元件 614: Connecting element
615:復位元件 615: Reset element
70:驅動模組 70:Drive module
71:驅動馬達 71: Driving motor
72:下壓組件 72: Press down assembly
圖1是本揭露其中一具體實施例之第一艙體及第二艙體的立體分解示意圖。 Figure 1 is a three-dimensional exploded schematic diagram of the first cabin and the second cabin of one of the specific embodiments of the present disclosure.
圖2是本揭露其中一具體實施例之第一艙體及第二艙體彼此套接後之側視剖面示意圖。 Figure 2 is a side cross-sectional schematic diagram of the first pod and the second pod after being nested with each other in one of the specific embodiments of the present disclosure.
圖3是本揭露其中一具體實施例之旋轉連接機構的配氣盤組件及支撐組件的立體分解示意圖。 FIG3 is a three-dimensional exploded schematic diagram of the gas plate assembly and the support assembly of the rotary connection mechanism of one specific embodiment of the present disclosure.
圖4是本揭露其中一具體實施例之配氣盤組件、支撐組件及旋轉軸組裝後之側視剖面示意圖。 FIG4 is a schematic side cross-sectional view of the assembly of the valve plate assembly, the support assembly and the rotating shaft of one specific embodiment of the present disclosure.
圖5是本揭露其中一具體實施例之旋轉配送裝置的立體示意圖。 Figure 5 is a three-dimensional schematic diagram of a rotary dispensing device according to one specific embodiment of the present disclosure.
圖6是本揭露其中一具體實施例之旋轉配送裝置之工作轉盤的立體示意圖。 Figure 6 is a three-dimensional schematic diagram of the working turntable of the rotary dispensing device in one specific embodiment of the present disclosure.
圖7是本揭露其中一具體實施例之旋轉配送裝置的側視剖面示意圖。 FIG7 is a schematic side cross-sectional view of a rotary dispensing device according to one specific embodiment of the present disclosure.
以下係藉由特定的具體實施例說明本揭露之實施方式,本揭露所屬技術領域中具有通常知識者可根據本文所載內容輕易地瞭解本揭露之精神、優點及功效。然而,本文所載之具體實施例並非用以限定本揭露,本揭露亦可藉由其它不同之實施方式加以實現或應用,本文所載各項細節亦可根據不同的觀點與應用,在不悖離本揭露之精神下賦予不同的變化或修飾。 The following is a specific embodiment to illustrate the implementation of the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs can easily understand the spirit, advantages and effects of the present disclosure based on the content contained in this article. However, the specific embodiments contained in this article are not used to limit the present disclosure. The present disclosure can also be implemented or applied through other different implementation methods. The details contained in this article can also be given different changes or modifications based on different viewpoints and applications without deviating from the spirit of the present disclosure.
本文所附圖式中所顯示之比例、結構、大小等特徵,僅係用於配合本文所揭示之內容,以供本揭露所屬技術領域中具有通常知識者閱讀及瞭解 本揭露,而非用以限定本揭露可實施之範圍,故任何比例關係之改變、結構之修飾、或大小之調整,在不影響本揭露所能達成之目的及所能產生之功效的情形下,均應屬於本文所揭示之技術內容得能涵蓋的範圍。 The proportions, structures, sizes and other features shown in the attached figures are only used to match the content disclosed in this article, so that people with ordinary knowledge in the technical field to which this disclosure belongs can read and understand this disclosure, and are not used to limit the scope of implementation of this disclosure. Therefore, any changes in the proportion relationship, modification of the structure, or adjustment of the size should be within the scope of the technical content disclosed in this article without affecting the purpose and effect that can be achieved by this disclosure.
本文中所使用的近似語言可用以修改任意定量的表達,其可在允許範圍內變動而不會導致與其相關的基本功能的變化。因此,由一個或多個術語例如「約」修飾的值不限於所指定的精確值。在一些具體實施例中,該近似語言可對應用以測量值的儀器的精度。 As used herein, approximating language may be used to modify any quantitative expression that may vary within a permissible range without causing a change in the basic function to which it is associated. Thus, a value modified by one or more terms such as "about" is not limited to the exact value specified. In some embodiments, the approximating language may correspond to the precision of the instrument used to measure the value.
本文所述「包括」、「包含」或「具有」特定要件時,除非另有說明,否則可另包含其他元件、組成分、結構、區域、部位、裝置、系統、步驟、連接關係等要件,而非排除該等其他要件。 When "includes", "comprising" or "having" specific elements are mentioned in this article, unless otherwise stated, other elements, components, structures, regions, parts, devices, systems, steps, connection relationships, etc. may also be included, rather than excluding such other elements.
在本文所述「頂」、「底」、「側」、「內」、「外」、「上」、「上方」、「下」、「下方」、「水平」及「垂直」等具有空間相對性的用語,僅係便於闡明本揭露之具體實施例中用一個元件或特徵與其他元件或特徵之間的相對位置及關係,而非用於限定本揭露可實施之範圍,其相對位置及關係之調整、互換及改變,在不實質變更本揭露之技術內容的條件下,應當視為本揭露可實施之範圍。此外,本文所述「水平」係指基本上平行,其包含二個元件、二個軸線或二個平面之間的角度處於0度角之-10度至+10度間的情形,例如-5度至5度;本文所述「垂直」係指基本上垂直,其包含二個元件、二個軸線或二個平面之間的角度處於90度角之-10度至+10度間的情形,例如85度至95度。 The spatially relative terms such as “top”, “bottom”, “side”, “inside”, “outside”, “up”, “above”, “down”, “below”, “horizontal” and “vertical” described in this document are only used to facilitate the relative position and relationship between one element or feature and other elements or features in the specific embodiments of the present disclosure, and are not used to limit the scope of the implementation of the present disclosure. The adjustment, exchange and change of the relative position and relationship should be regarded as the scope of the implementation of the present disclosure under the condition that the technical content of the present disclosure is not substantially changed. In addition, the term "horizontal" as used herein means substantially parallel, which includes the case where the angle between two elements, two axes or two planes is between -10 and +10 degrees of 0 degrees, such as -5 to 5 degrees; the term "vertical" as used herein means substantially vertical, which includes the case where the angle between two elements, two axes or two planes is between -10 and +10 degrees of 90 degrees, such as 85 to 95 degrees.
本文所述「第一」或「第二」等具有順序性的用語,僅係便於敘述或區別元件、組成分、結構、區域、部位、裝置、系統等要件,而非用於限定本揭露可實施之範圍,亦非用於限定該等要件在空間上的順序。此外,除非本文 另有明確說明,否則本文所述單數形式之「一」及「該」亦包含複數形式,且本文所述「或」與「及/或」可互換使用。 The terms "first" or "second" and other terms with sequential meanings described herein are only used to facilitate the description or distinction of elements, components, structures, regions, parts, devices, systems and other elements, and are not used to limit the scope of implementation of the present disclosure, nor are they used to limit the spatial order of these elements. In addition, unless otherwise expressly stated herein, the singular forms "one" and "the" described herein also include plural forms, and the terms "or" and "and/or" described herein can be used interchangeably.
本文所述之數值範圍係包含及可合併的,落在本文所述數值範圍內之任何數值,都可作為最大值或最小值以導出次範圍;舉例而言,「0.25mm至3.75mm」之數值範圍應可理解為包含最小值0.25mm及最大值3.75mm之間的任何次範圍,例如:0.25mm至1mm、3mm至3.75mm及1mm至3mm等次範圍。 The numerical ranges described in this article are inclusive and combinable. Any numerical value falling within the numerical range described in this article can be used as the maximum or minimum value to derive a sub-range; for example, the numerical range of "0.25mm to 3.75mm" should be understood to include any sub-range between the minimum value of 0.25mm and the maximum value of 3.75mm, such as: 0.25mm to 1mm, 3mm to 3.75mm and 1mm to 3mm.
本文中的術語「耦接」係指複數個元件直接或間接地以機械性、化學性、電性、磁性或其中兩者以上之組合的方式結合在一起,「直接耦接」為指複數個元件之間直接接觸而結合在一起,而「間接耦接」為指複數個元件之間藉由至少一耦接件而結合在一起。達成本文所述「耦接」的手段包含但不限於緊密地或有縫隙地連接、樞接、連結、縫合、接合、黏合、嵌合、螺合、扣合、釘合、夾合、附著、穿設、鉗夾、安置、套設、鎖固、一體成型或其中兩者以上之組合。本文中的術語「耦接件」為指可達成上述「耦接」手段之元件。 The term "coupling" herein refers to multiple elements being directly or indirectly connected together mechanically, chemically, electrically, magnetically or a combination of two or more thereof. "Direct coupling" refers to multiple elements being connected together by direct contact, while "indirect coupling" refers to multiple elements being connected together by at least one coupling member. The means of achieving the "coupling" described herein include but are not limited to tightly or gap-connected, hinged, linked, sewn, joined, bonded, embedded, screwed, buckled, nailed, clamped, attached, penetrated, clamped, placed, sleeved, locked, integrally formed or a combination of two or more thereof. The term "coupling member" herein refers to an element that can achieve the above-mentioned "coupling" means.
圖1是本揭露其中一具體實施例之旋轉連接機構的第一艙體10及第二艙體20的立體分解示意圖。如圖1所示,旋轉連接機構包括第一艙體10及第二艙體20,其中,第一艙體10係配置成可將第二艙體20套設於其中。於本揭露之至少一具體實施例中,第二艙體20係套設並鎖固於第一艙體10之中,使得第一艙體10及第二艙體20之間無相對運動。
FIG1 is a three-dimensional exploded schematic diagram of a
如圖1所示,第一艙體10具有頂面11及殼體12,其中第一艙體10之殼體12上設有複數個連接孔13,在每個連接孔13上可分別設置有導管連接元件(未圖示),而第二艙體20具有第一表面21、複數個第一通道23及設置於第一表面21上的複數個噴嘴22,噴嘴22之形狀可例如為但不限於錐狀、針狀等任何可供
氣體噴出之結構。於本揭露之至少一具體實施例中,複數個噴嘴22可以一體成型之方式形成於第二艙體20之第一表面21上,或以可拆卸式的配置於第二艙體20之第一表面21上,但本揭露不以此為限。
As shown in FIG. 1 , the
於本揭露之至少一具體實施例中,第一艙體10之複數個連接孔13係等間距地設置於第一艙體10之殼體12上,第二艙體20之複數個噴嘴22係等間距地設置於第二艙體20之第一表面21上,且複數個噴嘴22係分別對應於複數個連接孔13設置。
In at least one specific embodiment of the present disclosure, the plurality of connection holes 13 of the
此外,於本揭露之至少一具體實施例中,第二艙體20之第一表面21上還可設置有圍繞在第一表面21上的凹槽24,以容納密封元件25,而密封元件25可用於降低第一艙體10及第二艙體20之間氣體洩漏之可能性,進而保持負壓之安定性。在一些具體實施例中,密封元件25可為密封環,其套設於凹槽24中,以增加氣密程度,該密封環之材質包括但不限於矽膠、丁腈橡膠(NBR)、三元乙丙膠(EPDM)、氟橡膠(FKM)、全氟化橡膠(FFKM)或氟矽橡膠(FVMQ)。
In addition, in at least one specific embodiment of the present disclosure, a
圖2是本揭露其中一具體實施例之第一艙體10及第二艙體20彼此套接後之側視剖面示意圖。如圖2所示,第二艙體20係套接於第一艙體10之中,且第二艙體20之第二表面26係無間隙地貼合於第一艙體10之殼體12的內側,藉此第一艙體10之殼體12與第二艙體20之第一表面21之間形成負壓氣路14。第一艙體10及第二艙體20之間形成的負壓氣路14可藉由形成於第二艙體20之中的複數個第一通道23(如圖1所示)連接至第二艙體20之底部的複數個第一開口282。於本揭露之至少一具體實施例中,該複數個第一開口282可連接至負壓產生模組,當該負壓產生模組進行抽氣時,負壓氣路14即呈負壓狀態。
FIG2 is a side cross-sectional schematic diagram of a
如圖2所示,第二艙體20具有形成於其中的複數個第二通道27,用於將第二艙體20之底部的複數個第二開口281連通至複數個噴嘴22,且複數個噴嘴22係向外突出在負壓氣路14中。因此,於本揭露之至少一具體實施例中,複數個噴嘴22可藉由連接至複數個第二開口281的正壓產生源向對應於複數個噴嘴22之複數個連接孔13提供暫時性的正壓,從而短暫性地增加對應的複數個連接孔13的負壓值。於一些具體實施例中,位於複數個連接孔13處的負壓值可分別藉由其所對應的噴嘴22提供之正壓來增加,藉此可選擇性地控制所欲增加之連接孔13的壓力值,而無須於所有連接孔13處同時增壓。
As shown in FIG2 , the
如圖2所示,於本揭露之至少一具體實施例中,第二艙體20之第二通道27具有對應於噴嘴22的水平區段271,以及對應於第二開口281的垂直區段272。於一些具體實施例中,第二通道27之水平區段271係部分地水平伸入噴嘴22中,且水平區段271伸入噴嘴22中之開口端係與噴嘴22之噴嘴口緊密地配合;換言之,水平區段271之開口端的外徑大約等於噴嘴22之噴嘴口的內徑。於一些具體實施例中,第二通道27之垂直區段272的開口端係耦接至第二艙體20之第二開口281,第二通道27之水平區段271的另一端(非開口端)係與垂直區段272的另一端(非開口端)垂直地耦合。於本揭露之至少一具體實施例中,第二通道27之水平區段271及垂直區段272可一體成型地配置於第二艙體20中,且第二通道27僅在水平區段271與垂直區段272相連接處具有一個垂直轉角的部位。
As shown in FIG. 2 , in at least one specific embodiment of the present disclosure, the
於本揭露之至少一具體實施例中,第二艙體20之水平區段271的管徑大小可小於第二艙體20之垂直區段272的管徑大小。於一些具體實施例中,水平區段271及垂直區段272的管徑大小可分別對應於噴嘴22之噴嘴口及第二開口
281的尺寸,亦即,噴嘴口之尺寸小於第二開口281之尺寸,藉此於噴嘴22處提供更穩定的正壓。
In at least one specific embodiment of the present disclosure, the diameter of the
如圖1及圖2所示,第一艙體10及第二艙體20還分別具有第一軸承口19及第二軸承口29。於本揭露之至少一具體實施例中,第一艙體10之第一軸承口19的直徑與第二艙體20之第二軸承口29的口徑相符,藉由尺寸相符的旋轉軸穿設於第一軸承口19及第二軸承口29之中,第一艙體10及第二艙體20即可在旋轉軸上相對於旋轉軸轉動。
As shown in FIG. 1 and FIG. 2 , the
圖3是本揭露其中一具體實施例之旋轉連接機構的配氣盤組件30及支撐組件40的立體分解示意圖。如圖3所示,配氣盤組件30包括頂層配氣盤31及底層配氣盤32。於本揭露之至少一具體實施例中,頂層配氣盤31係與第二艙體20接觸(例如圖7所示),以支撐第一艙體10及第二艙體20之旋轉,並增加第一艙體10及第二艙體20於旋轉時的真空度,於一些具體實施例中,頂層配氣盤31為可替換式的組件。如圖3所示,底層配氣盤32為用於支撐頂層配氣盤31之組件,頂層配氣盤31可藉由底層配氣盤32耦接至支撐組件40上。於本揭露之至少一具體實施例中,頂層配氣盤31可配置成由複數個組合件所組成,藉此頂層配氣盤31可在不移動下方之底層配氣盤32的情況下,從頂層配氣盤31所穿設於的旋轉軸50上取下,以便於替換磨損過的頂層配氣盤31。
FIG3 is a three-dimensional exploded schematic diagram of a gas
於本揭露之至少一具體實施例中,頂層配氣盤31可為石墨所構成的石墨盤,由石墨所構成的頂層配氣盤31可減少其與第二艙體20於旋轉時接觸之表面的摩擦力,藉此有效降低第一艙體10及第二艙體20旋轉時所需的力矩(轉矩),進而降低驅動第一艙體10及第二艙體20旋轉的驅動模組的運作負載及溫度。於本揭露的一些實施例中,藉由使用上述石墨盤,驅動模組於驅動第一艙體10及
第二艙體20時的運作溫度小於41℃,故無須額外加裝降溫裝置(例如吹氣裝置),即可避免旋轉配送裝置1之每小時的產能(units per hour,UPH)因驅動模組過熱而衰減。
In at least one specific embodiment of the present disclosure, the
本文中的術語「驅動模組」係指將各種能量或動力來源轉換成機械動能以驅使物體、裝置或系統運動之動力裝置。該驅動模組根據該能量或動力來源之類型不同而有不同之實施態樣,於本揭露的至少一個實施例中,該驅動模組包括但不限於氣壓致動器(例如,氣壓缸)、液壓致動器(例如,液壓缸)、電氣致動器(例如,直流馬達、交流馬達或步進馬達)、機電混合致動器(例如,電磁閥)。於本揭露的至少一個實施例中,該驅動模組係用以驅使物體、裝置或系統轉動。於本揭露的至少一個實施例中,該驅動模組包括驅動馬達,例如但不限於直驅馬達。 The term "drive module" herein refers to a power device that converts various energy or power sources into mechanical kinetic energy to drive an object, device or system to move. The drive module has different implementations depending on the type of the energy or power source. In at least one embodiment of the present disclosure, the drive module includes but is not limited to a pneumatic actuator (e.g., a pneumatic cylinder), a hydraulic actuator (e.g., a hydraulic cylinder), an electric actuator (e.g., a DC motor, an AC motor or a stepper motor), and an electromechanical hybrid actuator (e.g., an electromagnetic valve). In at least one embodiment of the present disclosure, the drive module is used to drive an object, device or system to rotate. In at least one embodiment of the present disclosure, the drive module includes a drive motor, such as but not limited to a direct drive motor.
如圖3所示,頂層配氣盤31及底層配氣盤32具有複數個第三通道311、321及複數個第四通道312、322,複數個第三通道311、321可對應於第二艙體20之複數個第二開口281,複數個第四通道312、322可對應於第二艙體20之複數個第一開口282。於本揭露的至少一個實施例中,複數個第三通道311、321可在第二艙體20與配氣盤組件30相對靜止時對齊複數個第二開口281,藉此在旋轉停止時使複數個第三通道311、321與第二艙體20之複數個第二通道27之間的氣體流通。此外,複數個第四通道312、322可在第二艙體20與配氣盤組件30相對轉動或靜止時導通至第二艙體20與頂層配氣盤31之間形成的氣室,使得複數個第四通道312、322與第二艙體20之複數個第一通道23之氣體持續流通,進而得到負壓氣路14於第一艙體10及第二艙體20旋轉或靜止時能保持穩定的負壓狀態。
As shown in FIG3 , the top
於本揭露之至少一具體實施例中,第二艙體20與頂層配氣盤31所接觸的接觸面具有一環形凹槽,第二艙體20之複數個第一開口282係配置於該環形凹槽中,且頂層配氣盤31之複數個第四通道312亦可對應於該環形凹槽(例如,該環形凹槽可配置成完全涵蓋於第四通道312之開口上),藉由上述複數個第一開口282、環形凹槽及複數個第四通道312之間的相對配置,無論第二艙體20是否相對於頂層配氣盤31旋轉,皆不會影響第二艙體20之複數個第一通道23與配氣盤組件30之間的氣體導通,亦即,第一艙體10及第二艙體20之間的負壓氣路14與配氣盤組件30之複數個第四通道312、322的氣壓狀況將能穩定地保持相同。
In at least one specific embodiment of the present disclosure, the contact surface of the
如圖3所示,於本揭露之至少一具體實施例中,配氣盤組件30還包括連接件33,其可設置於頂層配氣盤31及底層配氣盤32之間,用於增加頂層配氣盤31與底層配氣盤32之間鎖固的氣密程度,且連接件33亦具有能導通第三通道311和321的第一開孔331以及能導通第四通道312和322的第二開孔332。
As shown in FIG. 3 , in at least one specific embodiment of the present disclosure, the gas
如圖3所示,配氣盤組件30之頂層配氣盤31、底層配氣盤32及連接件33還分別具有第三軸承口313、323及333。第三軸承口313、323及333可對應於第一艙體10之第一軸承口19及第二艙體20之第二軸承口29,藉此第一艙體10、第二艙體20、頂層配氣盤31、底層配氣盤32及連接件33可以穿設的方式耦接於旋轉軸50上。此外,底層配氣盤32之第四通道322位於底層配氣盤32的一端可配置有對應於每個第四通道322的導管連接元件(未圖示),以使外部的任一導管可與底層配氣盤32之第四通道322中的氣體導通。
As shown in FIG3 , the
圖4是本揭露其中一具體實施例之配氣盤組件30、支撐組件40及旋轉軸50經組裝後之側視剖面示意圖。如圖3及圖4所示,支撐組件40包括基底盤41及底座42。底座42具有用於耦接旋轉軸50之連接部位421,連接部位421可為能穿
設於旋轉軸50之中的柱狀結構(例如但不限於螺桿結構),或者連接部位421可為供旋轉軸50穿設於其中的管狀結構,又或者連接部位421可為能使旋轉軸50耦接於底座42之任一結構。
FIG. 4 is a schematic side cross-sectional view of the assembly of the
如圖3、圖4及圖7所示,支撐組件40之基底盤41具有複數個支撐臂411及複數個彈簧元件412。支撐臂411的主要用於支撐穿設於旋轉軸50上的所有組件(例如但不限於配氣盤組件30、第二艙體20或第一艙體10等),支撐臂411係耦接至配氣盤組件30之底層配氣盤32,以將配氣盤組件30配置於基底盤41上,從而避免配氣盤組件30隨著第一艙體10及第二艙體20的旋轉而轉動(例如第二艙體20與頂層配氣盤31之接觸面的摩擦力所引起之轉動)。於本揭露之至少一具體實施例中,配置於基底盤41上的配氣盤組件30仍與基底盤41之間在旋轉軸50之縱向軸線上具有相對的自由度。
As shown in Fig. 3, Fig. 4 and Fig. 7, the
如圖3、圖4及圖7所示,彈簧元件412主要用於維持第二艙體20與頂層配氣盤31之間的緊密程度。舉例而言,複數個彈簧元件412以持有預緊力的方式從基底盤41耦接至配氣盤組件30之底層配氣盤32,並藉由夾在基底盤41與底層配氣盤32之間的複數個彈簧元件412所持有的預緊力,使配氣盤組件30與第二艙體20之間的接觸能更加的緊密,從而防止於旋轉過程中的負壓氣路14、第一通道23及第四通道312、322產生負壓洩漏的問題。
As shown in Figures 3, 4 and 7, the
再者,複數個彈簧元件412除上述功用之外,於本揭露之至少一具體實施例中,頂層配氣盤31為一種磨損消耗的元件,第二艙體20的旋轉將會從其與頂層配氣盤31的接觸面開始磨耗,使得頂層配氣盤31的厚度減少,上述情況可能會產生負壓洩漏、旋轉時額外的振動等影響裝置運作效果的副作用,因此,複數個彈簧元件412所持有的預緊力將會推動配氣盤組件30以彌補頂層配氣盤31所
消耗掉的厚度,而使彈簧元件412能彌補耗損的頂層配氣盤31所造成的負壓洩漏問題。
Furthermore, in addition to the above functions, the plurality of
於本揭露之至少一具體實施例中支撐組件40之基底盤41能以任何形式耦接在底座42上,而使基底盤41與底座42不存在相對移動或旋轉,於一些具體實施例中,支撐組件40之基底盤41及底座42是以一體成型的方式構成。
In at least one specific embodiment of the present disclosure, the
圖5是本揭露其中一具體實施例之旋轉配送裝置1的立體示意圖。如圖5所示,旋轉配送裝置1包括旋轉連接機構、工作轉盤60及驅動模組70。驅動模組70包括驅動馬達71及至少一個下壓組件72,驅動馬達71可藉由工作轉盤60耦接至旋轉連接機構之第一艙體10的頂面11,以使工作轉盤60及旋轉連接機構之第一艙體10與第二艙體20隨著驅動馬達71的致動而轉動。
FIG5 is a three-dimensional schematic diagram of a
圖6是本揭露其中一具體實施例之工作轉盤60的立體示意圖。如圖5及圖6所示,工作轉盤60包括複數個吸提組件61,其具有可下壓的氣管元件611,且氣管元件611的其中一端具有吸嘴部612,而另一端則具有堵頭部613。在工作轉盤60耦接至驅動馬達71的情況下,下壓組件72可選擇性地對準複數個吸提組件61中任一個之堵頭部613,並可控制下壓組件72藉由抵壓堵頭部613以提供氣管元件611下壓力,藉此氣管元件611之吸嘴部612可接觸到所欲吸提之目標物,此目標物可例如但不限於任何電子元件或物件等。此外,於本揭露之至少一實施例中,吸提組件61還包括連接元件614(如圖7所示)。
FIG6 is a three-dimensional schematic diagram of a working
如圖5及圖6所示,吸提組件61還包括復位元件615,其具有一定程度之彈性,並可沿著氣管元件611的縱向軸線配置於氣管元件611上,故當下壓組件72釋放提供在堵頭部613的下壓力時,氣管元件611可藉由復位元件615之彈性
恢復到初始位置。於本揭露之至少一具體實施例中,復位元件615可為彈簧結構,但本揭露不以此為限。
As shown in FIG. 5 and FIG. 6 , the
圖7是本揭露其中一具體實施例之旋轉配送裝置1的側視剖面示意圖。如圖7所示,於本揭露之至少一實施例中,沿著旋轉軸50由上而下依序配置有驅動模組70、工作轉盤60、第一艙體10、鎖固於第一艙體10之中的第二艙體20、配氣盤組件30及支撐組件40。工作轉盤60、第一艙體10及第二艙體20為隨著驅動模組70致動之旋轉組件,配氣盤組件30係配置為藉由外部之負壓產生模組提供第二艙體20及第一艙體10一負壓,以使第二艙體20及第一艙體10之內部呈現負壓狀態,而支撐組件40則配置為支撐其上方的配氣盤組件30,並使得配氣盤組件30與第二艙體20及第一艙體10之間的耦接更加緊密。藉由上述實施例中旋轉配送裝置1的各組件之配置,第二艙體20及第一艙體10可於旋轉或靜止過程中持續提供工作轉盤60上之複數個吸提組件61穩定的負壓。
Fig. 7 is a side cross-sectional schematic diagram of a
如圖7所示,藉由任一可供氣體通過之導管的兩端分別耦接至連接元件614及第一艙體10之連接孔13上。於本揭露之至少一具體實施例中,複數個吸提組件61可個別獨立地耦接至第一艙體10,因此第一艙體10可各別提供負壓至每個吸提組件61,亦即,複數個吸提組件61之其中處的壓力變化不影響其他吸提組件61處之壓力。
As shown in FIG. 7 , the two ends of any conduit through which gas can pass are respectively coupled to the connecting
以下藉由具體實施例對本揭露作進一步說明,以使本揭露所屬技術領域中具有通常知識者可更加理解本揭露之優點及功效,並能據以實施,但所舉具體實施例不應作為對本揭露之限定。 The present disclosure is further explained below through specific embodiments, so that those with common knowledge in the technical field to which the present disclosure belongs can better understand the advantages and effects of the present disclosure and implement them accordingly, but the specific embodiments cited should not be used as a limitation of the present disclosure.
實施例1(Seal type)-不具備由石墨所構成的頂層配氣盤的旋轉配送裝置Example 1 (Seal type) - Rotary distribution device without top gas distribution plate made of graphite
於本實施例中,旋轉配送裝置1包括第一艙體10、第二艙體20、配氣盤組件30、支撐組件40、工作轉盤60及驅動模組70。第一艙體10及工作轉盤60係配置為由驅動模組70所驅動的旋轉(Rotary)組件,而第二艙體20、配氣盤組件30及支撐組件40則配置為相對於該等旋轉組件不旋轉的固定(Fixed)組件。須說明的是,本實施例之配氣盤組件30未具備由石墨所構成的頂層配氣盤31,而本實施例則是由複數個密封元件耦接第一艙體10及第二艙體20。如下表1所示,本實施例之旋轉配送裝置1於旋轉啟動時須提供2.7kgf的初始力,其驅動模組70所需提供的力矩為3.91Nm,而藉由複數個密封元件耦接的第一艙體10及第二艙體20中的真空度能達到79kpa以上。
In this embodiment, the
實施例2(Graphite type)-具備由石墨所構成的頂層配氣盤的旋轉配送裝置Example 2 (Graphite type) - Rotary distribution device with a top gas distribution plate made of graphite
如圖5及圖7所示,旋轉配送裝置1包括第一艙體10、第二艙體20、配氣盤組件30、支撐組件40、工作轉盤60及驅動模組70,其中,第一艙體10、第二艙體20及工作轉盤60係配置為由驅動模組70所驅動的旋轉組件,而配氣盤組件30及支撐組件40則配置為相對於該等旋轉組件而不旋轉的固定組件。與實施例1不同的是,本實施例之配氣盤組件30具備由石墨所構成的頂層配氣盤31,支撐組件40具備能使頂層配氣盤31與第二艙體20之間更加氣密配合的彈簧元件412,且本實施例僅須單一密封元件25耦接第一艙體10及第二艙體20。如表1所示,本實施例之旋轉配送裝置1於旋轉啟動僅須提供1.5kgf的初始力,其驅動模組70所需提供的力矩為2.08Nm,而藉由頂層配氣盤31及彈簧元件412的配合,第一艙體10及第二艙體20中的真空度能達到79kpa以上。
As shown in Figures 5 and 7, the
[表1]
由上表1中所示的數據可知,在真空度方面,實施例1之密封型的旋轉配送裝置係藉由複數個密封元件來達到79kpa以上的真空度;而實施例2之石墨型的旋轉配送裝置僅需一個密封元件即達到79kpa以上的真空度。實施例1之旋轉配送裝置能提供約40k的每小時的產能(units per hour,UPH),然而,由於實施例1之複數個密封元件於旋轉過程中所產生的摩擦力將使得驅動模組承受較大的旋轉負載(需提供3.91Nm的力矩),進而降低旋轉配送裝置的UPH。此外,為了使實施例1中的複數個密封元件能達到效果,艙體之間的同心度及圓度需要精密的配合,故在組裝上較複雜繁瑣。相較之下,實施例2中利用由石墨所構成之頂層配氣盤31的旋轉配送裝置1僅於艙體間配置一個密封元件25,故於旋轉時可避免對驅動模組70造成額外的負載(僅需提供2.08Nm的力矩,約為實施例1的一半),因此相較於實施例1,實施例2之旋轉配送裝置1能提供43k以上之UPH,且無須精密配合艙體間的同心度及圓度,在組裝上相對簡易。
From the data shown in Table 1 above, it can be seen that in terms of vacuum degree, the sealed rotary dispensing device of Example 1 achieves a vacuum degree of more than 79 kPa by using a plurality of sealing elements; while the graphite rotary dispensing device of Example 2 only requires one sealing element to achieve a vacuum degree of more than 79 kPa. The rotary dispensing device of Example 1 can provide a production capacity of about 40 k units per hour (UPH). However, due to the friction generated by the plurality of sealing elements of Example 1 during the rotation process, the drive module will bear a larger rotation load (a torque of 3.91 Nm is required), thereby reducing the UPH of the rotary dispensing device. In addition, in order for the plurality of sealing elements in Example 1 to achieve the effect, the concentricity and roundness between the cabins need to be precisely matched, so the assembly is more complicated and cumbersome. In contrast, the
表2為實施例1及實施例2於實際運作時之吸提組件偏移量、裝置溫度及UPH的比較表。由下表可知,實施例1於運作後,吸提組件61的偏移量為0.07
mm,而使用石墨製之頂層配氣盤31的實施例2於運作後,吸提組件61所產生的偏移量則僅為0.04mm,由上可知,相較於實施例1,實施例2的裝置在運作時的振動較小,故能更穩固且精準地運送元件。至於在運作過程中裝置溫度的部分,實施例2之裝置溫度僅為40.5℃,而實施例1之裝置溫度則達到70℃,因此相較於實施例2,實施例1之裝置在實際操作時尚須耗費成本加裝降溫裝置(例如吹氣裝置)以避免過熱而導致UPH衰減。此外,在UPH方面,由於裝置溫度的有效抑制,具有石墨製之頂層配氣盤31的實施例2在三小時後仍具有43k的產能,明顯高於實施例1所能提供的33.5k的產能。
Table 2 is a comparison table of the displacement of the suction assembly, the device temperature and the UPH of Example 1 and Example 2 during actual operation. As can be seen from the table below, after the operation of Example 1, the displacement of the
綜上所述,本揭露之旋轉連接機構藉由將第一艙體10與第二艙體20鎖固在一起,並藉由配氣盤組件30搭配支撐組件40所提供的氣密效果及穩定負壓,使得第一艙體10及第二艙體20相對於配氣盤組件30旋轉或靜止時能穩定地保持在相同的負壓狀況。此外,本揭露之旋轉連接機構的第一艙體10及第二艙體20的體積小且組裝簡易,還可輕易避免負壓洩漏之問題。因此,具有本揭露之旋轉連接機構的旋轉配送裝置1能在裝置旋轉或停止時,穩定提供吸提組件61持續負壓,進而提高旋轉配送裝置1配送元件的穩定性及效率。
In summary, the rotary connection mechanism disclosed herein locks the
10:第一艙體 10: First cabin
11:頂面 11: Top
12:殼體 12: Shell
13:連接孔 13: Connection hole
19:第一軸承口 19: First bearing mouth
20:第二艙體 20: Second cabin
21:第一表面 21: First surface
22:噴嘴 22: Spray nozzle
23:第一通道 23: First channel
24:凹槽 24: Groove
25:密封元件 25: Sealing element
29:第二軸承口 29: Second bearing mouth
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW111105616A TWI840753B (en) | 2022-02-16 | Rotary distribution device and rotary connection mechanism thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW111105616A TWI840753B (en) | 2022-02-16 | Rotary distribution device and rotary connection mechanism thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202335156A TW202335156A (en) | 2023-09-01 |
TWI840753B true TWI840753B (en) | 2024-05-01 |
Family
ID=
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016084407A1 (en) | 2014-11-28 | 2016-06-02 | 上野精機株式会社 | Sorting device |
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016084407A1 (en) | 2014-11-28 | 2016-06-02 | 上野精機株式会社 | Sorting device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20140366808A1 (en) | Gas processing apparatus | |
JP2012089625A (en) | Joining apparatus | |
CN102217055B (en) | Substrate processing method and substrate processing apparatus | |
CN114141691B (en) | Semiconductor processing equipment | |
WO2018229884A1 (en) | Vacuum joint and vacuum utilization device using same | |
TWI840753B (en) | Rotary distribution device and rotary connection mechanism thereof | |
KR102640515B1 (en) | Plasma processing apparatus | |
WO2021239055A1 (en) | Rotating platform for ion beam etching | |
JP6527684B2 (en) | Valve, fluid control device, semiconductor control device, and semiconductor manufacturing method | |
CN102956431B (en) | Ring shielding parts, its constituent part and substrate-placing platform | |
TW201409599A (en) | Conveyor | |
US20140224176A1 (en) | Mocvd apparatus | |
TW201820503A (en) | Processing chamber and semiconductor device | |
WO2019061574A1 (en) | Vacuum suction disc | |
TWM630661U (en) | Rotary distribution device and rotary connection mechanism thereof | |
TW202335156A (en) | Rotary distribution device and rotary connection mechanism thereof | |
US20220005727A1 (en) | Temperature control device | |
KR101930829B1 (en) | Semiconductor device including chamber unit | |
US11315823B2 (en) | Substrate suction-holding structure and substrate transfer robot | |
CN117577575B (en) | Bearing device and semiconductor process equipment | |
CN112823429A (en) | Temperature regulating device | |
WO2018205822A1 (en) | Wafer suction device | |
US20230061423A1 (en) | Substrate processing apparatus | |
WO2017071307A1 (en) | Mounting assembly of electric switches for power distribution cabinet | |
KR102342918B1 (en) | Plasma processing apparatus and maintenance method thereof |