TWM630661U - Rotary distribution device and rotary connection mechanism thereof - Google Patents

Abstract

Provided is a rotary connection mechanism including a first chamber with connecting holes and a second chamber locked in the first chamber, so that an air path is formed between the first chamber and the second chamber. The second chamber has first channels for connecting first openings of the second chamber to the air path, and the second chamber also has nozzles projecting outward in the air path and second channels for connecting second openings of the second chamber to the nozzles. Also provided is a rotary distribution device including the rotary connection mechanism.

Description

Rotary distribution device and its rotary connection mechanism

The present disclosure relates to a rotary connection mechanism, in particular, to a rotary connection mechanism that can provide stable negative pressure.

Currently known electronic components or semiconductor components need to go through the steps of orientation identification, orientation, electrical parameter testing, surface marking, visual pin detection, and material box processing before being loaded into the carrier tape. The transport in the stage steps is mainly achieved by means of distribution devices. The turntable distribution device is the key equipment in the middle and back-end process of the modern electronic manufacturing industry. It has the advantages of high speed and high distribution efficiency.

With the rapid development of science and technology, the package form of integrated circuit chips is getting smaller and smaller, and the requirements for the precision and speed of the integrated circuit distribution device are also higher and higher. The rotary connection mechanism of the existing distribution device cannot effectively provide a continuous and stable negative pressure for the suction and lift components on the working turntable during the rotation process, and can only provide negative pressure when the rotation stops, resulting in the wafers being offset on the suction and lift components. Possibly, the offset wafer cannot be positioned accurately when it reaches each station, so the device requires relatively high precision in processing and assembly, resulting in high cost.

Therefore, there is an urgent need in the art for a rotary connection mechanism and a rotary distribution device using the rotary connection mechanism that can overcome the above problems of unstable negative pressure and high device cost.

In view of this, the present disclosure provides a low-cost rotary connection mechanism capable of continuously maintaining a stable negative pressure during rotation or rotation stop, comprising a first cabin body and a second cabin body, and the second cabin body is sleeved on the first cabin body. In a cabin, an air passage is formed between the first surface of the second cabin and the shell of the first cabin.

In at least one specific embodiment of the present disclosure, the first cabin has a connecting hole, the second cabin has a nozzle, a first opening, a second opening, a first channel and a second channel, wherein the nozzle corresponds to The connecting hole is arranged on the first surface of the second cabin, and the nozzle protrudes from the air passage; the first channel and the second channel are arranged in the second cabin, and the first channel is configured The first opening and the air passage are communicated with each other, and the second channel is configured to communicate with the second opening and the nozzle.

In at least one embodiment of the present disclosure, the second cabin is locked in the first cabin.

In at least one specific embodiment of the present disclosure, the first cabin body and the second cabin body have the same rotation axis, and the first cabin body and the second cabin body are configured to rotate along the rotation axis to maintain the air flow. constant air pressure on the road.

In at least one embodiment of the present disclosure, the second channel includes a horizontal section corresponding to the nozzle and a vertical section corresponding to the second opening.

In at least one specific embodiment of the present disclosure, a gas distribution plate assembly is further included, which includes a top gas distribution plate, wherein the top gas distribution plate is coupled to the second cabin in a relatively rotatable manner to seal the first air distribution plate. Two cabins.

In at least one embodiment of the present disclosure, the top gas distribution plate includes a third channel corresponding to the second channel and a fourth channel corresponding to the first channel.

In at least one embodiment of the present disclosure, the top gas distribution disk includes a graphite disk.

In at least one specific embodiment of the present disclosure, a support assembly having a rotating shaft is further included to support the gas distribution plate assembly, and the support assembly includes a support arm and a spring element, wherein the gas distribution plate assembly is connected by the spring element. The elastic force is tightly engaged with the second cabin.

In at least one specific embodiment of the present disclosure, the connecting holes are arranged around the first cabin body at equal intervals, and the nozzles are arranged around the first surface of the second cabin body at equal intervals.

The present disclosure further provides a rotary distribution device, comprising: the rotary connection mechanism of the present disclosure; a work turntable coupled to the rotary connection mechanism; a driving module configured to drive the rotary connection mechanism and the work turntable Rotation; suction and lift assembly, which is arranged on the working turntable and connected to the rotary connection mechanism by pipelines; and a negative pressure generating module, which is coupled to the rotary connection mechanism for actuating or A steady negative pressure is supplied to the suction-lift assembly at rest.

In at least one specific embodiment of the present disclosure, the rotary connection mechanism further includes a support component with a rotary shaft to support the rotary coupling mechanism, the work turntable and the driving module, and the three are sequentially arranged on the rotary shaft superior.

The rotating connection mechanism of the present disclosure can continuously provide stable negative pressure when the rotation or the rotation stops, so that the suction-lifting assembly located on the working turntable and connected to the rotating connection mechanism can stably suck the components. In addition, the rotary connection mechanism of the present disclosure is small in size, low in cost, and requires relatively low assembly accuracy, so the influence of assembly and machining accuracy on actual functions can be reduced.

1: Rotary distribution device

10: The first cabin

11: Top surface

12: Shell

13: Connection hole

14: Negative pressure air circuit

19: The first bearing port

20: Second cabin

21: First surface

22: Nozzle

23: The first channel

24: Groove

25: Sealing element

26: Second Surface

27: Second channel

271: Horizontal Section

272: Vertical Section

281: Second Opening

282: The first opening

29: Second bearing port

30: Gas distribution plate assembly

31: Top air distribution plate

311, 321: Third channel

312, 322: Fourth channel

313, 323, 333: The third bearing port

32: Bottom gas distribution plate

33: Connectors

331: The first opening

332: Second opening

40: Support components

41: base plate

411: Support Arm

412: Spring element

42: Base

421: Connection part

50: Rotary axis

60: Work Turntable

61: Extraction components

611: Tracheal components

612: Nozzle

613: Plug head

614: Connection element

615: Reset element

70: drive module

71: Drive motor

72: Press down components

FIG. 1 is a schematic exploded perspective view of a first cabin body and a second cabin body according to an embodiment of the present disclosure.

FIG. 2 is a schematic cross-sectional side view of the first cabin body and the second cabin body after the first cabin body and the second cabin body are sleeved together according to one embodiment of the present disclosure.

3 is a perspective exploded schematic view of a gas distribution plate assembly and a support assembly of a rotary connection mechanism according to an embodiment of the present disclosure.

4 is a schematic side cross-sectional view of the gas distribution plate assembly, the support assembly and the rotating shaft assembled in one embodiment of the present disclosure.

FIG. 5 is a schematic perspective view of a rotary distribution device according to an embodiment of the present disclosure.

FIG. 6 is a perspective view of a work turntable of a rotary distribution device according to an embodiment of the present disclosure.

FIG. 7 is a schematic cross-sectional side view of a rotary distribution device according to an embodiment of the present disclosure.

The following describes the implementation of the present disclosure by means of specific embodiments. Those skilled in the art to which the present disclosure pertains can easily understand the spirit, advantages and effects of the present disclosure based on the contents herein. However, the specific embodiments set forth herein are not intended to limit the present disclosure, and the present disclosure can also be implemented or applied by other different embodiments, and the details set forth herein can also be based on different viewpoints and applications. Various changes or modifications are given within the spirit of this disclosure.

The proportions, structures, sizes and other features shown in the drawings attached herein are only used to cooperate with the contents disclosed herein, so as to be read and understood by those with ordinary knowledge in the technical field to which the present disclosure pertains This disclosure is not intended to limit the scope of implementation of this disclosure. Therefore, any change in proportional relationship, structural modification, or size adjustment will not affect the objectives and effects of this disclosure. , shall belong to the scope that the technical content disclosed in this article can cover.

Approximate language as used herein can be used to modify any quantitative expression, which can be varied within permissible limits without causing a change in the basic function with which it is associated. Thus, a value modified by a term or terms such as "about" is not limited to the precise value specified. In some embodiments, the approximation language may correspond to the precision of the instrument used to measure the value.

When "comprising", "comprising" or "having" a specific element described herein, unless otherwise specified, other elements, components, structures, regions, parts, devices, systems, steps, connection relationships and other elements may be included, rather than excluding such other elements.

There is space for "top", "bottom", "side", "inside", "outside", "upper", "above", "below", "below", "horizontal" and "vertical" as described herein Relative terms are only used to clarify the relative position and relationship between one element or feature and other elements or features in the specific embodiments of the present disclosure, but are not used to limit the scope of the present disclosure, the relative positions and the relationship between them. The adjustment, exchange and change of the relationship shall be regarded as the scope of the implementation of this disclosure, provided that the technical content of this disclosure is not substantially changed. In addition, "horizontal" as used herein refers to substantially parallel, including the situation where the angle between two elements, two axes or two planes is between -10 degrees and +10 degrees of an angle of 0 degrees, such as -5 degrees degrees to 5 degrees; "perpendicular" as used herein means substantially vertical, which includes the situation where the angle between two elements, two axes or two planes is between -10 degrees and +10 degrees of a 90 degree angle, For example 85 degrees to 95 degrees.

Sequential terms such as "first" or "second" mentioned herein are only for convenience in describing or distinguishing elements, components, structures, regions, parts, devices, systems, etc., and are not used to limit the scope of the present disclosure. The scope of implementation is not intended to limit the spatial order of these elements. In addition, unless this Otherwise, the singular forms "a" and "the" described herein also include the plural forms, and "or" and "and/or" are used interchangeably herein, unless expressly stated otherwise.

The numerical ranges stated herein are inclusive and combinable, and any value falling within the numerical range stated herein can be taken as the maximum or minimum value to derive a subrange; for example, "0.25mm to 3.75mm" Numerical ranges should be understood to include any sub-range between a minimum value of 0.25 mm and a maximum value of 3.75 mm, for example: 0.25 mm to 1 mm, 3 mm to 3.75 mm and 1 mm to 3 mm, etc. sub-ranges.

The term "coupled" as used herein means that a plurality of elements are directly or indirectly joined together, mechanically, chemically, electrically, magnetically, or a combination of both, and "directly coupled" refers to a plurality of The elements are connected together by direct contact, and "indirectly coupled" means that a plurality of elements are connected together by at least one coupling member. Means to achieve "coupling" as described herein include, but are not limited to, tightly or gapped connecting, pivoting, joining, stitching, joining, adhering, fitting, screwing, snapping, stapling, clipping, attaching, Threading, clamping, placing, nesting, locking, integral molding, or a combination of two or more of them. The term "coupling" herein refers to an element that achieves the above-mentioned means of "coupling".

FIG. 1 is an exploded perspective view of a first cabin body 10 and a second cabin body 20 of a rotary connection mechanism according to an embodiment of the present disclosure. As shown in FIG. 1 , the rotating connection mechanism includes a first cabin body 10 and a second cabin body 20 , wherein the first cabin body 10 is configured so that the second cabin body 20 can be sleeved therein. In at least one embodiment of the present disclosure, the second cabin body 20 is sleeved and locked in the first cabin body 10 , so that there is no relative movement between the first cabin body 10 and the second cabin body 20 .

As shown in FIG. 1 , the first cabin 10 has a top surface 11 and a casing 12 , wherein the casing 12 of the first cabin 10 is provided with a plurality of connecting holes 13 , and each connecting hole 13 may be respectively provided with a A conduit connecting element (not shown), and the second cabin 20 has a first surface 21, a plurality of first channels 23 and a plurality of nozzles 22 disposed on the first surface 21, the shape of the nozzles 22 can be, for example, but not Limited to any available cones, needles, etc. The structure of gas ejection. In at least one embodiment of the present disclosure, the plurality of nozzles 22 can be integrally formed on the first surface 21 of the second cabin 20 , or can be detachably arranged on the first surface of the second cabin 20 . surface 21, but the present disclosure is not limited thereto.

In at least one specific embodiment of the present disclosure, the plurality of connecting holes 13 of the first cabin body 10 are arranged on the casing 12 of the first cabin body 10 at equal intervals, and the plurality of nozzles 22 of the second cabin body 20 are The nozzles 22 are arranged on the first surface 21 of the second cabin body 20 at equal intervals, and the plurality of nozzles 22 are respectively arranged corresponding to the plurality of connecting holes 13 .

In addition, in at least one specific embodiment of the present disclosure, the first surface 21 of the second housing 20 may further be provided with a groove 24 surrounding the first surface 21 to accommodate the sealing element 25, and the sealing element 25 It can be used to reduce the possibility of gas leakage between the first cabin 10 and the second cabin 20, thereby maintaining the stability of negative pressure. In some embodiments, the sealing element 25 can be a sealing ring, which is sleeved in the groove 24 to increase the air tightness. The material of the sealing ring includes but is not limited to silicone, nitrile butadiene rubber (NBR), ternary Ethylene propylene rubber (EPDM), fluorine rubber (FKM), perfluorinated rubber (FFKM) or fluorosilicone rubber (FVMQ).

FIG. 2 is a schematic cross-sectional side view of the first cabin body 10 and the second cabin body 20 in one embodiment of the present disclosure after being sleeved with each other. As shown in FIG. 2 , the second cabin body 20 is sleeved into the first cabin body 10 , and the second surface 26 of the second cabin body 20 is fitted to the shell 12 of the first cabin body 10 without gaps. The inner side of the first cabin body 10 and the first surface 21 of the second cabin body 20 form a negative pressure air path 14 . The negative pressure air path 14 formed between the first cabin 10 and the second cabin 20 can be connected to the second cabin through a plurality of first passages 23 (as shown in FIG. 1 ) formed in the second cabin 20 . A plurality of first openings 282 at the bottom of the cabin 20 . In at least one specific embodiment of the present disclosure, the plurality of first openings 282 can be connected to the negative pressure generating module. When the negative pressure generating module is pumping, the negative pressure air path 14 is in a negative pressure state.

As shown in FIG. 2 , the second cabin 20 has a plurality of second passages 27 formed therein for connecting a plurality of second openings 281 at the bottom of the second cabin 20 to a plurality of nozzles 22, and a plurality of The nozzle 22 protrudes outward in the negative pressure air passage 14 . Therefore, in at least one embodiment of the present disclosure, the plurality of nozzles 22 can provide temporary pressure to the plurality of connection holes 13 corresponding to the plurality of nozzles 22 through the positive pressure generating source connected to the plurality of second openings 281 . positive pressure, thereby temporarily increasing the negative pressure value of the corresponding plurality of connection holes 13 . In some specific embodiments, the negative pressure values at the plurality of connecting holes 13 can be respectively increased by the positive pressure provided by the corresponding nozzles 22, so that the pressure of the connecting holes 13 to be increased can be selectively controlled. pressure value without having to pressurize all the connection holes 13 at the same time.

As shown in FIG. 2 , in at least one embodiment of the present disclosure, the second passage 27 of the second cabin 20 has a horizontal section 271 corresponding to the nozzle 22 and a vertical section 272 corresponding to the second opening 281 . In some specific embodiments, the horizontal section 271 of the second channel 27 partially extends horizontally into the nozzle 22, and the open end of the horizontal section 271 extending into the nozzle 22 is closely matched with the nozzle opening of the nozzle 22; In other words, the outer diameter of the open end of the horizontal section 271 is approximately equal to the inner diameter of the nozzle opening of the nozzle 22 . In some embodiments, the open end of the vertical section 272 of the second passage 27 is coupled to the second opening 281 of the second cabin 20, and the other end (non-open end) of the horizontal section 271 of the second passage 27 ) is vertically coupled to the other end (non-open end) of the vertical section 272 . In at least one specific embodiment of the present disclosure, the horizontal section 271 and the vertical section 272 of the second channel 27 can be integrally formed in the second cabin 20 , and the second channel 27 is only formed between the horizontal section 271 and the vertical section 272 . The vertical sections 272 have a vertical corner where they are connected.

In at least one embodiment of the present disclosure, the pipe diameter of the horizontal section 271 of the second cabin body 20 may be smaller than the pipe diameter size of the vertical section 272 of the second cabin body 20 . In some specific embodiments, the pipe diameters of the horizontal section 271 and the vertical section 272 may correspond to the nozzle opening and the second opening of the nozzle 22 respectively. The size of the nozzle 281 , that is, the size of the nozzle opening is smaller than the size of the second opening 281 , thereby providing a more stable positive pressure at the nozzle 22 .

As shown in FIG. 1 and FIG. 2 , the first cabin body 10 and the second cabin body 20 further have a first bearing port 19 and a second bearing port 29 , respectively. In at least one specific embodiment of the present disclosure, the diameter of the first bearing port 19 of the first cabin 10 is consistent with the diameter of the second bearing port 29 of the second cabin Among the first bearing port 19 and the second bearing port 29 , the first cabin body 10 and the second cabin body 20 can rotate relative to the rotating shaft on the rotating shaft.

FIG. 3 is an exploded perspective view of the gas distribution plate assembly 30 and the support assembly 40 of the rotary connection mechanism according to one embodiment of the present disclosure. As shown in FIG. 3 , the gas distribution plate assembly 30 includes a top gas distribution plate 31 and a bottom gas distribution plate 32 . In at least one specific embodiment of the present disclosure, the top gas distribution plate 31 is in contact with the second cabin body 20 (eg, as shown in FIG. 7 ) to support the rotation of the first cabin body 10 and the second cabin body 20 and increase the The vacuum degree of the first chamber body 10 and the second chamber body 20 during rotation, in some embodiments, the top gas distribution plate 31 is a replaceable component. As shown in FIG. 3 , the bottom gas distribution plate 32 is a component for supporting the top gas distribution plate 31 , and the top gas distribution plate 31 can be coupled to the supporting component 40 through the bottom gas distribution plate 32 . In at least one specific embodiment of the present disclosure, the top gas distribution plate 31 can be configured to be composed of a plurality of assemblies, whereby the top gas distribution plate 31 can be moved from the bottom gas distribution plate 32 without moving the underlying gas distribution plate 32 The top gas distribution plate 31 is removed from the rotating shaft 50 through which the top gas distribution plate 31 is worn, so as to replace the worn top gas distribution plate 31 .

In at least one specific embodiment of the present disclosure, the top gas distribution plate 31 can be a graphite plate composed of graphite, and the top gas distribution plate 31 composed of graphite can reduce the surface of the top gas distribution plate 31 that is in contact with the second cabin 20 during rotation. Therefore, the torque (torque) required for the rotation of the first cabin body 10 and the second cabin body 20 can be effectively reduced, thereby reducing the friction force of the driving module that drives the rotation of the first cabin body 10 and the second cabin body 20. Operating load and temperature. In some embodiments of the present disclosure, by using the above-mentioned graphite disk, the driving module drives the first cabin 10 and the The operating temperature of the second cabin 20 is less than 41°C, so there is no need to install an additional cooling device (such as an air blowing device) to avoid the units per hour (UPH) of the rotating distribution device 1 due to the drive module. Overheated and decayed.

The term "drive module" as used herein refers to a power device that converts various energy or power sources into mechanical kinetic energy to drive the movement of an object, device or system. The driving module has different implementations according to the type of the energy or power source. In at least one embodiment of the present disclosure, the driving module includes, but is not limited to, a pneumatic actuator (for example, a pneumatic cylinder), Hydraulic actuators (eg, hydraulic cylinders), electrical actuators (eg, DC motors, AC motors, or stepper motors), electromechanical hybrid actuators (eg, solenoid valves). In at least one embodiment of the present disclosure, the driving module is used to drive the object, device or system to rotate. In at least one embodiment of the present disclosure, the drive module includes a drive motor, such as but not limited to a direct drive motor.

As shown in FIG. 3, the top gas distribution panel 31 and the bottom gas distribution panel 32 have a plurality of third channels 311, 321 and a plurality of fourth channels 312, 322, and the plurality of third channels 311, 321 may correspond to the second cabin The plurality of second openings 281 and the plurality of fourth passages 312 and 322 of the body 20 may correspond to the plurality of first openings 282 of the second cabin body 20 . In at least one embodiment of the present disclosure, the plurality of third passages 311, 321 can be aligned with the plurality of second openings 281 when the second housing 20 and the gas distribution plate assembly 30 are relatively stationary, thereby enabling the plurality of second openings 281 when the rotation stops. The gas flows between the third passages 311 and 321 and the plurality of second passages 27 of the second cabin 20 . In addition, the plurality of fourth passages 312 and 322 can be conducted to the air chamber formed between the second cabin body 20 and the top gas distribution plate 31 when the second cabin body 20 and the gas distribution plate assembly 30 are relatively rotated or stationary, so that the plurality of The gases of the fourth passages 312 and 322 and the plurality of first passages 23 of the second cabin body 20 are continuously circulated, so that the negative pressure gas path 14 can be maintained when the first cabin body 10 and the second cabin body 20 are rotating or stationary. Stable negative pressure state.

In at least one embodiment of the present disclosure, the contact surface of the second cabin 20 and the top gas distribution plate 31 has an annular groove, and the plurality of first openings 282 of the second cabin 20 are disposed in the annular groove. In the groove, and the plurality of fourth channels 312 of the top gas distribution plate 31 can also correspond to the annular groove (for example, the annular groove can be configured to completely cover the opening of the fourth channel 312), by the above The relative arrangement of the plurality of first openings 282 , the annular grooves and the plurality of fourth passages 312 will not affect the plurality of the second cabin body 20 regardless of whether the second cabin body 20 rotates relative to the top gas distribution plate 31 or not. The gas conducts between the first passage 23 and the gas distribution plate assembly 30 , that is, the negative pressure gas path 14 between the first cabin 10 and the second cabin 20 and the plural fourths of the gas distribution plate assembly 30 The air pressure conditions of the channels 312, 322 will remain the same stably.

As shown in FIG. 3 , in at least one embodiment of the present disclosure, the gas distribution plate assembly 30 further includes a connecting member 33 , which can be disposed between the top gas distribution plate 31 and the bottom gas distribution plate 32 for adding a top layer The degree of air tightness between the gas distribution plate 31 and the bottom gas distribution plate 32, and the connecting member 33 also has a first opening 331 that can conduct the third channels 311 and 321 and a second channel that can conduct the fourth channels 312 and 322. Two openings 332 .

As shown in FIG. 3 , the top gas distribution plate 31 , the bottom gas distribution plate 32 and the connecting member 33 of the gas distribution plate assembly 30 also have third bearing ports 313 , 323 and 333 respectively. The third bearing openings 313, 323 and 333 may correspond to the first bearing opening 19 of the first housing body 10 and the second bearing opening 29 of the second housing body 20, whereby the first housing body 10, the second housing body 20, The top gas distribution plate 31 , the bottom gas distribution plate 32 and the connecting member 33 can be coupled to the rotating shaft 50 in a way of passing through. In addition, one end of the fourth channel 322 of the bottom gas distribution plate 32 located at the bottom gas distribution plate 32 may be provided with a conduit connecting element (not shown) corresponding to each fourth channel 322, so that any external conduit can be connected to The gas in the fourth channel 322 of the bottom gas distribution plate 32 is conducted.

FIG. 4 is a schematic side cross-sectional view of the gas distribution plate assembly 30 , the support assembly 40 and the rotating shaft 50 after being assembled according to one embodiment of the present disclosure. As shown in FIGS. 3 and 4 , the support assembly 40 includes a base plate 41 and a base 42 . The base 42 has a connecting portion 421 for coupling to the rotating shaft 50, and the connecting portion 421 may be wearable A columnar structure (such as but not limited to a screw structure) provided in the rotating shaft 50 , or the connecting portion 421 can be a tubular structure through which the rotating shaft 50 is inserted, or the connecting portion 421 can be capable of enabling the rotating shaft 50 to pass through. It is coupled to any structure of the base 42 .

As shown in FIGS. 3 , 4 and 7 , the base plate 41 of the support assembly 40 has a plurality of support arms 411 and a plurality of spring elements 412 . The support arm 411 is mainly used to support all components (such as but not limited to the gas distribution plate assembly 30, the second cabin 20 or the first cabin 10, etc.) passing through the rotating shaft 50, and the support arm 411 is coupled to the The bottom air distribution plate 32 of the air distribution plate assembly 30 is used to arrange the air distribution plate assembly 30 on the base plate 41 to prevent the air distribution plate assembly 30 from rotating with the rotation of the first cabin body 10 and the second cabin body 20 (For example, the rotation caused by the frictional force of the contact surface between the second cabin 20 and the top gas distribution plate 31 ). In at least one embodiment of the present disclosure, the gas distribution plate assembly 30 disposed on the base plate 41 and the base plate 41 still have relative degrees of freedom on the longitudinal axis of the rotation shaft 50 .

As shown in FIG. 3 , FIG. 4 and FIG. 7 , the spring element 412 is mainly used to maintain the tightness between the second cabin body 20 and the top gas distribution plate 31 . For example, a plurality of spring elements 412 are coupled from the base plate 41 to the bottom gas plate 32 of the gas plate assembly 30 in a manner of holding a preload, and are sandwiched between the base plate 41 and the bottom gas plate 32 The pre-tightening force held by the plurality of spring elements 412 in between makes the contact between the gas distribution plate assembly 30 and the second cabin body 20 tighter, thereby preventing the negative pressure gas path 14, The first channel 23 and the fourth channels 312 and 322 have the problem of negative pressure leakage.

Furthermore, in addition to the above-mentioned functions of the plurality of spring elements 412, in at least one specific embodiment of the present disclosure, the top gas distribution plate 31 is a wear-and-tear element, and the rotation of the second cabin 20 will rotate from the top layer to the top layer. The contact surface of the gas distribution plate 31 begins to wear, so that the thickness of the top gas distribution plate 31 is reduced. The above situation may produce negative pressure leakage, additional vibration during rotation and other side effects that affect the operation of the device. Therefore, the plurality of spring elements 412 The held preload will push the gas plate assembly 30 to compensate for the top gas plate 31. The wasted thickness allows the spring element 412 to compensate for the negative pressure leakage problem caused by the wasted top gas distribution plate 31 .

In at least one embodiment of the present disclosure, the base plate 41 of the support assembly 40 can be coupled to the base 42 in any form, so that there is no relative movement or rotation between the base plate 41 and the base 42. In some embodiments, The base plate 41 and the base 42 of the support assembly 40 are formed in one piece.

FIG. 5 is a three-dimensional schematic diagram of a rotary distribution device 1 according to one embodiment of the present disclosure. As shown in FIG. 5 , the rotary distribution device 1 includes a rotary connection mechanism, a work turntable 60 and a drive module 70 . The driving module 70 includes a driving motor 71 and at least one pressing component 72. The driving motor 71 can be coupled to the top surface 11 of the first cabin body 10 of the rotary connection mechanism through the working turntable 60, so as to make the working turntable 60 and the rotary connection The first capsule 10 and the second capsule 20 of the mechanism rotate with the actuation of the drive motor 71 .

FIG. 6 is a three-dimensional schematic diagram of a work turntable 60 according to one embodiment of the present disclosure. As shown in FIG. 5 and FIG. 6 , the working turntable 60 includes a plurality of suction and lift components 61, which have a depressible air tube element 611, and one end of the air tube element 611 has a suction nozzle 612, and the other end has a plug Section 613. When the working turntable 60 is coupled to the driving motor 71 , the pressing member 72 can selectively align with the plug portion 613 of any one of the plurality of suction-lifting members 61 , and the pressing member 72 can be controlled to press against The blocking part 613 provides downward pressure on the tracheal element 611, whereby the suction nozzle 612 of the tracheal element 611 can contact the target to be sucked, such as but not limited to any electronic components or objects. In addition, in at least one embodiment of the present disclosure, the suction and lift assembly 61 further includes a connecting element 614 (as shown in FIG. 7 ).

As shown in FIGS. 5 and 6 , the suction and lift assembly 61 further includes a restoring element 615 , which has a certain degree of elasticity and can be disposed on the tracheal element 611 along the longitudinal axis of the tracheal element 611 , so that the pressing element 72 is released to provide Under the downward pressure of the plug part 613 , the tracheal element 611 can be adjusted by the elasticity of the reset element 615 return to the original position. In at least one embodiment of the present disclosure, the reset element 615 may be a spring structure, but the present disclosure is not limited thereto.

FIG. 7 is a schematic cross-sectional side view of the rotary distribution device 1 according to one embodiment of the present disclosure. As shown in FIG. 7 , in at least one embodiment of the present disclosure, a drive module 70 , a work turntable 60 , a first cabin body 10 , a drive module 70 , a work turntable 60 , a first cabin body 10 , and a first cabin are arranged in sequence along the rotating shaft 50 from top to bottom. The second cabin body 20 , the gas distribution plate assembly 30 and the support assembly 40 in the body 10 . The working turntable 60 , the first cabin 10 and the second cabin 20 are rotating components actuated by the driving module 70 , and the gas distribution plate assembly 30 is configured to provide the second cabin through an external negative pressure generating module 20 and the first cabin body 10 are under negative pressure, so that the inside of the second cabin body 20 and the first cabin body 10 are in a negative pressure state, and the support assembly 40 is configured to support the gas distribution plate assembly 30 above it, and make the The coupling between the gas distribution plate assembly 30 and the second cabin body 20 and the first cabin body 10 is tighter. With the configuration of the components of the rotary distribution device 1 in the above-mentioned embodiment, the second cabin 20 and the first cabin 10 can continuously provide a stable negative pressure for the plurality of suction and lift components 61 on the working turntable 60 during rotation or stationary. pressure.

As shown in FIG. 7 , the two ends of any conduit through which gas can pass are respectively coupled to the connecting element 614 and the connecting hole 13 of the first cabin 10 . In at least one specific embodiment of the present disclosure, a plurality of suction and lift assemblies 61 can be independently coupled to the first chamber 10, so the first chamber 10 can provide negative pressure to each suction and lift assembly 61, respectively, That is, the pressure change at one of the plurality of suction and lift assemblies 61 does not affect the pressure at other suction and lift assemblies 61 .

The present disclosure will be further described below through specific embodiments, so that those with ordinary knowledge in the technical field of the present disclosure can better understand the advantages and effects of the present disclosure, and can implement them accordingly, but the specific embodiments should not be used as a reference to the present disclosure. Disclosure restrictions.

Example 1 (Seal type) - Rotary distribution device without top gas distribution plate made of graphite

In this embodiment, the rotary distribution device 1 includes a first cabin 10 , a second cabin 20 , a gas distribution plate assembly 30 , a support assembly 40 , a working turntable 60 and a drive module 70 . The first cabin body 10 and the working turntable 60 are configured as rotary components driven by the driving module 70 , while the second cabin body 20 , the gas distribution plate component 30 and the support component 40 are configured to rotate relative to these components. Fixed components that do not rotate. It should be noted that the gas distribution plate assembly 30 in this embodiment does not have a top-layer air distribution plate 31 made of graphite, and in this embodiment, a plurality of sealing elements are used to couple the first cabin body 10 and the second cabin body 20. As shown in Table 1 below, the rotary distribution device 1 of this embodiment needs to provide an initial force of 2.7kgf when it starts to rotate, and the torque required to drive the module 70 is 3.91Nm. The degree of vacuum in the first chamber 10 and the second chamber 20 can reach more than 79 kpa.

Example 2 (Graphite type) - Rotary distribution device with top gas distribution plate made of graphite

As shown in FIG. 5 and FIG. 7 , the rotary distribution device 1 includes a first cabin 10 , a second cabin 20 , a gas distribution plate assembly 30 , a support assembly 40 , a work turntable 60 and a drive module 70 , wherein the first cabin is The body 10, the second cabin body 20 and the working turntable 60 are configured as rotating components driven by the driving module 70, while the gas distribution plate component 30 and the supporting component 40 are configured as fixed relative to these rotating components that do not rotate. components. Different from Embodiment 1, the gas distribution plate assembly 30 of this embodiment is provided with a top-level gas distribution plate 31 made of graphite, and the support assembly 40 is provided with a top-level gas distribution plate 31 and a second cabin body 20 to allow more air The spring elements 412 are tightly fitted, and only a single sealing element 25 is required to couple the first cabin body 10 and the second cabin body 20 in this embodiment. As shown in Table 1, the rotary distribution device 1 of this embodiment only needs to provide an initial force of 1.5kgf when it starts to rotate, and the torque required to provide the driving module 70 is 2.08Nm. With the cooperation of the elements 412, the vacuum degree in the first chamber 10 and the second chamber 20 can reach more than 79 kPa.

From the data shown in Table 1 above, it can be seen that in terms of vacuum degree, the sealed rotary distribution device of Example 1 achieves a vacuum degree of more than 79 kpa by means of a plurality of sealing elements; The dispensing device needs only one sealing element to achieve a vacuum of more than 79kpa. The rotary distribution device of Example 1 can provide a unit per hour (UPH) of about 40k. However, due to the frictional force generated by the plurality of sealing elements of Example 1 during the rotation process, the driving module will suffer Larger rotating load (3.91Nm torque is required), which in turn reduces the UPH of the rotating dispensing device. In addition, in order to achieve the effect of the plurality of sealing elements in the first embodiment, the concentricity and roundness between the cabins need to be precisely matched, so the assembly is complicated and cumbersome. In contrast, the rotary distribution device 1 using the top gas distribution plate 31 made of graphite in the second embodiment is only provided with one sealing element 25 between the cabins, so that additional damage to the drive module 70 can be avoided during rotation. load (it only needs to provide a torque of 2.08Nm, which is about half of Example 1), so compared with Example 1, the rotary distribution device 1 of Example 2 can provide a UPH of more than 43k Concentricity and roundness are relatively easy to assemble.

Table 2 is a comparison table of the offset of the suction and extraction components, the device temperature and the UPH of Example 1 and Example 2 in actual operation. It can be seen from the table below that after the operation of Example 1, the offset of the suction and lift components 61 is 0.07 mm, while the offset of the suction and lift components 61 in Example 2 using the top gas distribution plate 31 made of graphite after the operation The displacement is only 0.04mm. It can be seen from the above that, compared with the first embodiment, the device of the second embodiment has less vibration during operation, so it can transport the components more stably and accurately. As for the temperature of the device during operation, the temperature of the device of Example 2 is only 40.5°C, while the temperature of the device of Example 1 reaches 70°C. Therefore, compared with Example 2, the device of Example 1 is in actual operation. It is costly to install cooling devices (such as air blowing devices) to avoid overheating and lead to UPH decay. In addition, in terms of UPH, due to the effective suppression of the device temperature, Example 2 with the top gas distribution plate 31 made of graphite still has a production capacity of 43k after three hours, which is significantly higher than the production capacity of 33.5k provided by Example 1. .

To sum up, the rotary connection mechanism of the present disclosure provides air tightness and stability by locking the first cabin body 10 and the second cabin body 20 together, and by combining the gas distribution plate assembly 30 with the support assembly 40 . Negative pressure, so that the first cabin body 10 and the second cabin body 20 can be stably maintained in the same negative pressure condition when rotating or stationary relative to the gas distribution plate assembly 30 . In addition, the first cabin body 10 and the second cabin body 20 of the rotary connection mechanism of the present disclosure are small in volume and easy to assemble, and can easily avoid the problem of negative pressure leakage. Therefore, the rotary dispensing device 1 with the rotating connection mechanism of the present disclosure can stably provide continuous negative pressure to the suction and lift assembly 61 when the device rotates or stops, thereby improving the stability and efficiency of the dispensing components of the rotary dispensing device 1 .

10: The first cabin

11: Top surface

12: Shell

13: Connection hole

19: The first bearing port

20: Second cabin

21: First surface

22: Nozzle

23: The first channel

24: Groove

25: Sealing element

29: Second bearing port

Claims (10)

A rotary connection mechanism, comprising: a first pod, which has a connection hole; The second cabin is sleeved in the first cabin, so that an air passage is formed between the first surface of the second cabin and the shell of the first cabin, and the second cabin has: a nozzle corresponding to the connecting hole, which is disposed on the first surface and protrudes from the air path; a first opening and a second opening; and A first channel and a second channel formed in the second cabin, wherein the first channel is configured to communicate with the first opening and the gas path, and the second channel is configured to communicate with the second opening and the nozzle. The swivel connection mechanism of claim 1, wherein the first and second pods are locked to each other and have the same axis of rotation, and the first and second pods are configured to extend along the When the rotating shaft rotates, the air pressure system in the air path remains constant. The rotary connection mechanism of claim 1, wherein the second channel includes a horizontal section corresponding to the nozzle and a vertical section corresponding to the second opening. The rotary connection mechanism of claim 1, further comprising a gas distribution plate assembly comprising a top gas distribution plate, wherein the top gas distribution plate is coupled to the second cabin in a relatively rotatable manner to seal the Second cabin. The rotary connection mechanism of claim 4, wherein the top gas distribution plate includes a third channel corresponding to the second channel and a fourth channel corresponding to the first channel. The rotary connection mechanism of claim 4, wherein the top gas distribution plate comprises a graphite plate. The rotary connection mechanism according to claim 4, further comprising a support assembly having a rotating shaft to support the gas distribution plate assembly, and the support assembly includes a support arm and a spring element, wherein the gas distribution plate assembly is supported by the spring element The elastic force is tightly connected with the second cabin. The rotary connection mechanism according to claim 1, wherein the connection holes are arranged on the first housing body at equal intervals, and the nozzles are arranged at the first surface of the second housing body at equal intervals. A rotary distribution device, comprising: The rotary connection mechanism as described in claim 1; a work turntable, which is coupled with the rotary connection mechanism; a drive module configured to drive the rotary connection mechanism and the working turntable to rotate; a suction and lift assembly, which is arranged on the working turntable and is connected to the rotary connection mechanism by a pipeline; and The negative pressure generating module is coupled to the rotating connection mechanism to supply negative pressure to the suction and lift assembly when the driving module is actuated or stationary. The rotary dispensing device as claimed in claim 9, wherein the rotary connection mechanism further comprises a support component with a rotary shaft to support the rotary coupling mechanism, the work turntable and the driving module and are sequentially arranged on the rotary shaft .

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