CN220627774U

CN220627774U - Wafer clamping mechanism

Info

Publication number: CN220627774U
Application number: CN202322184715.4U
Authority: CN
Inventors: 刘双全; 高智伟; 母凤文; 郭超
Original assignee: Tianjin Zhongke Jinghe Electronic Technology Co ltd
Current assignee: Tianjin Zhongke Jinghe Electronic Technology Co ltd
Priority date: 2023-08-15
Filing date: 2023-08-15
Publication date: 2024-03-19
Anticipated expiration: 2033-08-15

Abstract

The utility model belongs to the technical field of wafer clamping and conveying, and discloses a wafer clamping mechanism. The wafer clamping mechanism comprises a support, an air pipe joint, a piston rod, a pretightening force adjusting piece and an elastic piece, wherein a plurality of cavities which are uniformly distributed along the circumferential direction and a plurality of air pipelines which are in one-to-one correspondence with the cavities are arranged on the support, a fixed block is arranged at an orifice of each cavity, and a channel for communicating the cavities with the outside is arranged on the fixed block; the air pipe joint is arranged at the center of the support and is provided with a plurality of pipe orifices; the plurality of piston rods are arranged, the piston rods are arranged on the fixed block in a sliding penetrating manner, a push plate is arranged at one end of each piston rod, which is positioned in the cavity, and a clamping jaw is arranged at the other end of each piston rod; the pretightening force adjusting piece is sleeved on the piston rod in a sliding way and is connected to the fixed block in a threaded way. The elastic piece is sleeved on the piston rod, one end of the elastic piece is abutted against the push plate, and the other end of the elastic piece is abutted against the pretightening force adjusting piece. The wafer clamping mechanism provided by the utility model has a simple structure and is stable in clamping.

Description

Wafer clamping mechanism

Technical Field

The utility model relates to the technical field of wafer clamping and conveying, in particular to a wafer clamping mechanism.

Background

In the process of producing large-scale integrated circuits, wafers are subjected to multiple processes such as thin film deposition, etching, polishing, etc., to finally form the product. In each process, and during wafer transfer, the wafer is held by the clamping mechanism and is held in a certain state or moved in a certain manner.

The existing clamping mechanism clamps a wafer through a driving assembly, for example, an executing mechanism such as a motor is used for driving clamping parts to clamp the wafer, the structure is complex, and the problem of low stability exists. The other is that the rotating clamping mechanism clamps the wafer through the centrifugal force of the part, when the rotation starts and stops, the clamping force is very small, and due to the inertia of the wafer, the wafer and the clamping part can slide relatively, the surface of the wafer can be abraded, and meanwhile friction particle pollution can be generated.

Therefore, a wafer clamping mechanism is needed to solve the above-mentioned problems.

Disclosure of Invention

The utility model aims to provide a wafer clamping mechanism which is used for clamping and fixing wafers among multiple procedures such as film deposition, etching and polishing in the semiconductor processing process, has a simple structure, effectively reduces the processing cost and the processing difficulty, and ensures the stability and reliability of the wafer fixing.

To achieve the purpose, the utility model adopts the following technical scheme:

a wafer clamping mechanism comprising:

the support is provided with a plurality of cavities which are uniformly distributed along the circumferential direction and a plurality of gas pipelines which are in one-to-one correspondence with the cavities, a fixed block is arranged at the cavity opening of the cavity, and the fixed block is provided with a channel for communicating the cavity with the outside;

the air pipe joint is arranged at the center of the support, is provided with a plurality of pipe orifices, and is correspondingly communicated with the plurality of gas pipelines one by one;

the piston rods are arranged in a plurality, the piston rods are in one-to-one correspondence with the fixed blocks, the piston rods are arranged on the fixed blocks in a sliding penetrating mode, a push plate is arranged at one end, located in the cavity, of each piston rod, the push plate is in sealing sliding contact with the cavity wall of the cavity, and a clamping jaw is arranged at the other end of each piston rod;

the pretightening force adjusting piece is sleeved on the piston rod in a sliding way and is screwed on the fixed block;

the elastic piece is sleeved on the piston rod, one end of the elastic piece is abutted to the push plate, and the other end of the elastic piece is abutted to the pretightening force adjusting piece.

Optionally, the wafer clamping mechanism further includes a rubber gasket, where the rubber gasket is disposed on the fixed block and between the fixed block and the push plate.

Optionally, a rubber sealing ring is arranged between the fixed block and the support.

Optionally, the clamping jaw comprises a connecting part and a clamping part which are connected with each other, the connecting part is detachably connected with the piston rod, and the clamping part is used for contacting with the edge of the wafer.

Optionally, the connecting portion is U type structure, the piston rod inserts and locates between the both sides wall of U type structure to through first screw spare locking in on the connecting portion.

Optionally, the clamping part includes clamping post and supports the circle and hold in the palm, clamping post's one end with connecting portion connects, clamping post's the other end is equipped with support the circle holds in the palm.

Optionally, six cavities are provided, and the six cavities are uniformly distributed along the circumferential direction of the support.

Optionally, the elastic element is a spring.

Optionally, the tracheal tube is detachably connected to the support.

Optionally, the cavity is columnar, the fixed block includes cylinder main part and protruding locating the go-between of cylinder main part outer peripheral face, part the cylinder main part inserts in the cavity, the go-between butt in on the support, and through the second screw spare with the support is connected.

The utility model has the beneficial effects that: when the wafer clamping mechanism provided by the utility model is used, the air pipe connector is connected with the air pipeline of the external compressor, compressed air enters the cavity through the air pipe connector and the air pipeline to push the push plate to slide along the cavity wall of the cavity, the push plate drives the piston rod to slide along the fixed block, the elastic piece is compressed, the plurality of piston rods drive the corresponding plurality of clamping jaws to be mutually far away so that the wafer clamping mechanism is in an open state, then the external compressor slowly releases pressure, the push plate drives the piston rod to move under the elastic action of the elastic piece, so that the plurality of clamping jaws are mutually close to clamp a wafer, and the wafer clamping mechanism has a simple structure and reduces the processing cost and the processing difficulty; the initial pretightening force of the elastic piece can be adjusted by screwing the pretightening force adjusting piece, and the clamping force of the wafer in the clamping process can also be adjusted, so that the wafer is prevented from being damaged due to overlarge clamping force or falling off due to overlarge clamping force.

Drawings

FIG. 1 is a top view of a wafer clamping mechanism provided in an embodiment of the present utility model;

FIG. 2 is a cross-sectional view I at A-A of FIG. 1;

FIG. 3 is a second cross-sectional view at A-A in FIG. 1;

FIG. 4 is a third cross-sectional view at A-A in FIG. 1;

fig. 5 is a three-dimensional view of a wafer clamping mechanism provided in an embodiment of the present utility model.

In the figure:

100. a support; 110. a gas conduit; 120. a cavity; 200. a fixed block; 210. a cylindrical body; 220. a connecting ring; 300. an air pipe joint; 400. a piston rod; 500. a push plate; 600. a clamping jaw; 610. a connection part; 620. a clamping part; 621. clamping the column; 622. a supporting round support; 700. a pretightening force adjusting member; 800. an elastic member; 900. a rubber gasket; 1000. a rubber seal ring; 1100. a first screw; 1200. and (3) a wafer.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

The embodiment provides a wafer clamping mechanism which is used for clamping and fixing wafers among multiple procedures such as film deposition, etching and polishing in the semiconductor processing process, has a simple structure, effectively reduces processing cost and processing difficulty, and ensures that the wafers are fixed stably and reliably.

As shown in fig. 1 to 5, the wafer clamping mechanism comprises a support 100, an air pipe joint 300, a piston rod 400, a pretightening force adjusting member 700 and an elastic member 800, wherein the support 100 is provided with a plurality of cavities 120 which are uniformly distributed along the circumferential direction and a plurality of air pipelines 110 which are in one-to-one correspondence with the cavities 120, the cavity mouth of the cavity 120 is provided with a fixing block 200, and the fixing block 200 is provided with a channel for communicating the cavity 120 with the outside. The air pipe joint 300 is disposed at the center of the support 100, and the air pipe joint 300 is provided with a plurality of pipe openings, which are in one-to-one correspondence with the plurality of gas pipes 110. To improve the convenience of disassembly and assembly, the air tube connector 300 is detachably connected to the holder 100. For example, the air tube connector 300 is connected with the support 100 by a screw. The piston rods 400 are arranged in a plurality, the plurality of piston rods 400 are in one-to-one correspondence with the fixed blocks 200, the piston rods 400 are arranged on the fixed blocks 200 in a sliding penetrating mode, a push plate 500 is arranged at one end, located in the cavity 120, of each piston rod 400, the push plate 500 is in sealing sliding contact with the cavity wall of the cavity 120, and the clamping jaw 600 is arranged at the other end of each piston rod 400. Preferably, six cavities 120 are provided, and six cavities 120 are uniformly distributed along the circumferential direction of the support 100, and each cavity 120 is correspondingly provided with a fixing block 200, a piston rod 400 and a clamping jaw 600, so as to ensure that enough clamping points are contacted with the wafer 1200, and improve the reliability of clamping. In other embodiments, the cavities 120 may be provided in other numbers, such as eight, etc., as desired. The pretightening force adjusting member 700 is slidably sleeved on the piston rod 400 and is screwed on the fixing block 200. The elastic member 800 is sleeved on the piston rod 400, one end of the elastic member 800 is abutted against the push plate 500, and the other end of the elastic member 800 is abutted against the pretightening force adjusting member 700. The elastic member 800 can be a spring, and the spring has simple structure, easy processing and good stability.

When the wafer clamping mechanism provided by the embodiment is used, the air pipe connector 300 is connected with the air pipeline of the external compressor, compressed air enters the cavity 120 through the air pipe connector 300 and the air pipeline 110, the push plate 500 is pushed to slide along the cavity wall of the cavity 120, the push plate 500 drives the piston rod 400 to slide along the fixed block 200, the elastic piece 800 is compressed, the plurality of piston rods 400 drive the corresponding plurality of clamping jaws 600 to be mutually away so that the wafer clamping mechanism is in an open state, then the external compressor is properly depressurized, the push plate 500 drives the piston rod 400 to move under the elastic action of the elastic piece 800, so that the plurality of clamping jaws 600 are mutually close to clamp the wafer 1200, the structure is simple, and the processing cost and the processing difficulty are reduced; by screwing the pretightening force adjusting member 700, the initial pretightening force of the elastic member 800 can be adjusted, and the clamping force of the wafer 1200 in the clamping process can also be adjusted, so that the wafer 1200 is prevented from being damaged due to overlarge clamping force or the wafer 1200 is prevented from falling off due to overlarge clamping force. Illustratively, when the wafer clamping mechanism is in a non-operating state, referring to fig. 2, the pretension adjustment member 700 is adjusted to deform the elastic member 800 to have an initial force F0. After the wafer clamping mechanism is in an open state, the external compressor is properly depressurized, referring to fig. 3, after the elastic member 800 pushes the push plate 500 to move to a proper position, the clamping jaw 600 clamps the wafer 1200, and then the clamping force of the wafer clamping mechanism on the wafer 1200 is f=f0+kl, and K is the elastic coefficient of the elastic member 800. Referring to fig. 4, after the external transport assembly drives the wafer clamping mechanism into position, the external compressor supplements the gas, which pushes the push plate 500, the piston rod 400, and the clamping jaws 600 to move away from each other, releasing the wafer 1200.

Referring to fig. 5, in the present embodiment, the clamping jaw 600 includes a connection portion 610 and a clamping portion 620 connected to each other, the connection portion 610 is detachably connected to the piston rod 400, and the clamping portion 620 is used to contact with the edge of the wafer 1200. During assembly, the corresponding clamping jaw 600 can be installed according to the specific specification of the wafer 1200 to be clamped, so that the clamping jaw is high in compatibility and convenient to assemble and disassemble, and after the clamping jaws 600 are close to each other, the edge of the wafer 1200 abuts against the clamping part 620 to complete clamping and fixing.

Further, the connecting portion 610 has a U-shaped structure, and the piston rod 400 is inserted between two sidewalls of the U-shaped structure and locked to the connecting portion 610 by the first screw 1100. For example, the first screw member 1100 is screwed through the connecting portion 610 and the piston rod 400, so that the operation is simple.

Optionally, the clamping portion 620 includes a clamping post 621 and a supporting wafer support 622, one end of the clamping post 621 is connected with the connecting portion 610, the other end of the clamping post 621 is provided with the supporting wafer support 622, and the edge of the wafer 1200 abuts against the connecting portion of the clamping post 621 and the supporting wafer support 622, so that a smaller contact area is formed between the wafer 1200 and the clamping portion 620, unnecessary damage to the wafer 1200 is avoided, and the supporting wafer support 622 supports the wafer 1200, thereby preventing the wafer 1200 from falling.

Preferably, the cavity 120 is cylindrical, the fixing block 200 includes a cylindrical body 210 and a connecting ring 220 protruding from the outer circumferential surface of the cylindrical body 210, a part of the cylindrical body 210 is inserted into the cavity 120, and the connecting ring 220 is abutted to the support 100 and connected with the support 100 through a second screw member, so that the assembly is facilitated.

Optionally, the wafer clamping mechanism further includes a rubber gasket 900, the rubber gasket 900 is disposed on the fixed block 200 and located between the fixed block 200 and the push plate 500, and the compressed gas pushes the push plate 500 to move, so that the push plate 500 abuts against the rubber gasket 900, and the push plate 500 and the rubber gasket 900 are completely contacted to prevent the push plate 500 from rebound and resetting.

In this embodiment, a rubber sealing ring 1000 is disposed between the fixing block 200 and the support 100, so as to ensure the air tightness of the connection between the fixing block 200 and the support 100.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. Wafer fixture, its characterized in that includes:

the support (100) is provided with a plurality of cavities (120) which are uniformly distributed along the circumferential direction and a plurality of gas pipelines (110) which are in one-to-one correspondence with the cavities (120), a fixed block (200) is arranged at an orifice of each cavity (120), and the fixed block (200) is provided with a channel for communicating the cavities (120) with the outside;

the air pipe joint (300) is arranged at the center of the support (100), the air pipe joint (300) is provided with a plurality of pipe orifices, and the pipe orifices are communicated with the gas pipelines (110) in a one-to-one correspondence manner;

the piston rods (400) are arranged in a plurality, the piston rods (400) are in one-to-one correspondence with the fixed blocks (200), the piston rods (400) are arranged on the fixed blocks (200) in a sliding penetrating mode, a push plate (500) is arranged at one end, located in the cavity (120), of each piston rod (400), the push plate (500) is in sealing sliding contact with the cavity wall of the cavity (120), and a clamping jaw (600) is arranged at the other end of each piston rod (400);

the pretightening force adjusting piece (700) is sleeved on the piston rod (400) in a sliding manner and is screwed on the fixed block (200);

the elastic piece (800) is sleeved on the piston rod (400), one end of the elastic piece (800) is abutted to the push plate (500), and the other end of the elastic piece (800) is abutted to the pretightening force adjusting piece (700).

2. The wafer clamping mechanism of claim 1 further comprising a rubber gasket (900), the rubber gasket (900) being disposed on the fixed block (200) and between the fixed block (200) and the push plate (500).

3. Wafer clamping mechanism according to claim 1, characterized in that a rubber sealing ring (1000) is arranged between the fixed block (200) and the support (100).

4. The wafer clamping mechanism of claim 1, wherein the clamping jaw (600) comprises an interconnecting connection portion (610) and a clamping portion (620), the connection portion (610) being detachably connected to the piston rod (400), the clamping portion (620) being adapted to contact an edge of a wafer (1200).

5. The wafer clamping mechanism as recited in claim 4, wherein the connecting portion (610) has a U-shaped configuration, and the piston rod (400) is interposed between two sidewalls of the U-shaped configuration and is locked to the connecting portion (610) by a first screw (1100).

6. The wafer clamping mechanism of claim 5, wherein the clamping portion (620) includes a clamping post (621) and a supporting circular support (622), one end of the clamping post (621) is connected to the connecting portion (610), and the other end of the clamping post (621) is provided with the supporting circular support (622).

7. Wafer clamping mechanism according to claim 1, wherein six cavities (120) are provided, the six cavities (120) being evenly distributed along the circumference of the carrier (100).

8. The wafer clamping mechanism of claim 1 wherein the resilient member (800) is a spring.

9. Wafer clamping mechanism according to claim 1, wherein the gas pipe joint (300) is detachably connected to the carrier (100).

10. The wafer clamping mechanism according to claim 1, wherein the cavity (120) is columnar, the fixing block (200) comprises a cylindrical body (210) and a connecting ring (220) protruding from an outer circumferential surface of the cylindrical body (210), a part of the cylindrical body (210) is inserted into the cavity (120), and the connecting ring (220) abuts against the support (100) and is connected with the support (100) through a second screw.