TWI829601B - Manufacturing method of metal roller having seamless pattern - Google Patents
Manufacturing method of metal roller having seamless pattern Download PDFInfo
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- TWI829601B TWI829601B TW112122119A TW112122119A TWI829601B TW I829601 B TWI829601 B TW I829601B TW 112122119 A TW112122119 A TW 112122119A TW 112122119 A TW112122119 A TW 112122119A TW I829601 B TWI829601 B TW I829601B
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 115
- 239000002184 metal Substances 0.000 title claims abstract description 115
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 238000005530 etching Methods 0.000 claims abstract description 69
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 33
- 238000001312 dry etching Methods 0.000 claims abstract description 4
- 238000005096 rolling process Methods 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000012788 optical film Substances 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 1
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Abstract
Description
本發明涉及一種滾壓輪的製造方法,尤其涉及一種無版縫金屬滾壓輪的製造方法。The present invention relates to a manufacturing method of a rolling wheel, and in particular to a manufacturing method of a seamless metal rolling wheel.
現有滾壓輪的製造方法是以金屬滾輪作為承載體,據以在所述金屬滾輪之上形成有用於滾壓光學膜的一滾壓層。也就是說,現有滾壓輪的製造方法難以在所述金屬滾輪直接形成有用於滾壓光學膜的結構。於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。The existing method of manufacturing a rolling wheel uses a metal roller as a carrier, whereby a rolling layer for rolling optical films is formed on the metal roller. That is to say, it is difficult to directly form a structure for rolling optical films on the metal roller using the existing rolling wheel manufacturing method. Therefore, the inventor believed that the above-mentioned defects could be improved, so he devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects.
本發明實施例在於提供一種無版縫金屬滾壓輪的製造方法,其能有效地改善現有滾壓輪的製造方法所可能產生的缺陷。An embodiment of the present invention provides a method for manufacturing a seamless metal rolling wheel, which can effectively improve the possible defects caused by the existing manufacturing method of the rolling wheel.
本發明實施例公開一種無版縫金屬滾壓輪的製造方法,其包括:一前置步驟:提供一金屬滾輪及形成於所述金屬滾輪外表面的一光阻層;其中,所述金屬滾輪的材質為銅金屬或鉻金屬,並且所述光阻層包含:一基底層,其形成於所述金屬滾輪的所述外表面,並且所述基底層的厚度不小於3微米(μm);及一預製圖案層,其一體成型於所述基底層,並且所述預製圖案層的厚度不大於所述基底層的所述厚度;其中,所述預製圖案層具有一預設立體圖案,其包含有彼此相連的多個預製突起;一光阻蝕刻步驟:對所述光阻層以一非等向性(anisotropic)蝕刻方式進行蝕刻,以去除所述預製圖案層、並使所述基底層成形為位於所述金屬滾輪之上且彼此分離設置的多個中介突起;其中,所述金屬滾輪的所述外表面具有裸露於多個所述中介突起之外的一第一成形區、及相連於多個所述中介突起的一第二成形區;每個所述中介突起的外型對應於一個所述預製突起的頂部;一金屬蝕刻步驟:對所述金屬滾輪的所述外表面以一乾式蝕刻方式進行蝕刻,以使所述金屬滾輪於所述第一成形區凹設形成有多個凹槽;其中,多個所述凹槽的內壁面切齊於多個所述中介突起的表面,以共同構成一中介立體圖案,其對應於所述預設立體圖案;以及一成形蝕刻步驟:自所述中介立體圖案進行蝕刻,去除多個所述中介突起、並使所述金屬滾輪的所述外表面凹設形成有一滾壓立體圖案,其對應於所述中介立體圖案。An embodiment of the present invention discloses a method for manufacturing a seamless metal rolling wheel, which includes: a pre-step: providing a metal roller and a photoresist layer formed on the outer surface of the metal roller; wherein, the metal roller The material is copper metal or chromium metal, and the photoresist layer includes: a base layer formed on the outer surface of the metal roller, and the thickness of the base layer is not less than 3 microns (μm); and A prefabricated pattern layer, which is integrally formed on the base layer, and the thickness of the prefabricated pattern layer is no greater than the thickness of the base layer; wherein, the prefabricated pattern layer has a preset three-dimensional pattern, which includes A plurality of prefabricated protrusions connected to each other; a photoresist etching step: etching the photoresist layer in an anisotropic etching manner to remove the prefabricated pattern layer and shape the base layer into A plurality of intermediary protrusions located on the metal roller and separated from each other; wherein, the outer surface of the metal roller has a first forming area exposed outside the plurality of intermediary protrusions, and is connected to a plurality of intermediary protrusions. a second forming area of the intermediary protrusion; the appearance of each intermediary protrusion corresponds to the top of one of the prefabricated protrusions; a metal etching step: dry etching the outer surface of the metal roller Etching is performed in such a manner that the metal roller is concavely formed with a plurality of grooves in the first forming area; wherein the inner wall surfaces of the plurality of grooves are flush with the surfaces of the plurality of intermediary protrusions. Together, an intermediate three-dimensional pattern is formed, which corresponds to the preset three-dimensional pattern; and a forming etching step: etching from the intermediate three-dimensional pattern, removing a plurality of the intermediate protrusions, and making the outer surface of the metal roller The surface is concavely formed with a rolling three-dimensional pattern, which corresponds to the intermediate three-dimensional pattern.
本發明實施例也公開一種無版縫金屬滾壓輪的製造方法,其包括:一前置步驟:提供一金屬滾輪及形成於所述金屬滾輪外表面的一光阻層;其中,所述金屬滾輪的材質為銅金屬或鉻金屬,並且所述光阻層包含:一基底層,其形成於所述金屬滾輪的所述外表面,並且所述基底層的厚度不小於3微米;及一預製圖案層,其一體成型於所述基底層,並且所述預製圖案層的厚度不大於所述基底層的所述厚度;其中,所述預製圖案層具有一預設立體圖案,其包含有彼此相連的多個預製突起;一光阻蝕刻步驟:對所述光阻層以一非等向性蝕刻方式進行蝕刻,以去除所述預製圖案層、並使所述基底層成形為位於所述金屬滾輪之上且彼此分離設置的多個中介突起;其中,所述金屬滾輪的所述外表面具有裸露於多個所述中介突起之外的一第一成形區、及相連於多個所述中介突起的一第二成形區;每個所述中介突起的外型對應於一個所述預製突起的頂部;一金屬蝕刻步驟:對所述金屬滾輪的所述外表面以一濕式蝕刻方式進行蝕刻,以使所述金屬滾輪於所述第一成形區凹設形成有多個凹槽;其中,多個所述凹槽的內壁面切齊於多個所述中介突起的表面,以共同構成一中介立體圖案,其頂部區域對應於所述預設立體圖案;以及一成形蝕刻步驟:自所述中介立體圖案進行蝕刻,去除多個所述中介突起、並使所述金屬滾輪的所述外表面凹設形成有一滾壓立體圖案,其對應於所述中介立體圖案。Embodiments of the present invention also disclose a method for manufacturing a seamless metal rolling wheel, which includes: a pre-step: providing a metal roller and a photoresist layer formed on the outer surface of the metal roller; wherein, the metal The material of the roller is copper metal or chromium metal, and the photoresist layer includes: a base layer formed on the outer surface of the metal roller, and the thickness of the base layer is not less than 3 microns; and a prefabricated A pattern layer, which is integrally formed on the base layer, and the thickness of the prefabricated pattern layer is no greater than the thickness of the base layer; wherein the prefabricated pattern layer has a preset three-dimensional pattern, which includes interconnected A plurality of prefabricated protrusions; a photoresist etching step: etching the photoresist layer in an anisotropic etching manner to remove the prefabricated pattern layer and shape the base layer to be located on the metal roller A plurality of intermediary protrusions are provided above and separated from each other; wherein, the outer surface of the metal roller has a first forming area exposed outside the plurality of intermediary protrusions, and is connected to a plurality of said intermediary protrusions. a second forming area; the appearance of each intermediary protrusion corresponds to the top of one of the prefabricated protrusions; a metal etching step: etching the outer surface of the metal roller in a wet etching manner, The metal roller is recessed in the first forming area to form a plurality of grooves; wherein the inner wall surfaces of the plurality of grooves are flush with the surfaces of the plurality of intermediary protrusions to jointly form an intermediary a three-dimensional pattern, the top area of which corresponds to the preset three-dimensional pattern; and a shaping etching step: etching from the intermediate three-dimensional pattern, removing a plurality of the intermediate protrusions, and making the outer surface of the metal roller concave A rolling three-dimensional pattern is formed, which corresponds to the intermediate three-dimensional pattern.
綜上所述,本發明實施例所公開的無版縫金屬滾壓輪的製造方法,其通過採用較厚的所述光阻層及特定材質的所述金屬滾輪來搭配具有不同功效的多個蝕刻步驟(如:所述光阻蝕刻步驟、所述金屬蝕刻步驟、及所述成形蝕刻步驟),據以能夠在所述金屬滾輪的所述外表面形成有所述滾壓立體圖案,進而克服現有滾壓輪製造方法的技術偏見。In summary, the method for manufacturing a seamless metal rolling wheel disclosed in the embodiment of the present invention uses a thicker photoresist layer and a metal roller of a specific material to match multiple rollers with different functions. The etching step (such as the photoresist etching step, the metal etching step, and the shaping etching step) can form the rolling three-dimensional pattern on the outer surface of the metal roller, thereby overcoming the problem of Technical biases in existing rolling wheel manufacturing methods.
為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention and do not make any reference to the protection scope of the present invention. limit.
以下是通過特定的具體實施例來說明本發明所公開有關“無版縫金屬滾壓輪的製造方法”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。The following is a specific example to illustrate the implementation of the "seamless metal rolling wheel manufacturing method" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。It should be understood that although terms such as “first”, “second” and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used in this article shall include any one or combination of multiple associated listed items, depending on the actual situation.
[實施例一][Example 1]
請參閱圖1至圖7所示,其為本發明的實施例一。如圖1所示,本實施例公開一種無版縫金屬滾壓輪的製造方法S100,其依序包含(或實施)一前置步驟S110、一光阻蝕刻步驟S130、一金屬蝕刻步驟S150、及一成形蝕刻步驟S170,但本發明不以此為限。舉例來說,在本發明未繪示的其他實施例中,以上多個所述步驟可以依據設計需求而增加或調整。以下進一步說明所述無版縫金屬滾壓輪的製造方法S100於本實施例中的具體實施方式。Please refer to FIG. 1 to FIG. 7 , which is
所述前置步驟S110:如圖2和圖3所示,提供一金屬滾輪1及形成於所述金屬滾輪1外表面11的一光阻層2。其中,所述金屬滾輪1的材質為銅金屬或鉻金屬;也就是說,非屬於銅金屬或鉻金屬的任何滾輪都不同於本實施例所限定的所述金屬滾輪1。The pre-step S110: As shown in Figures 2 and 3, a
更詳細地說,所述光阻層2包含一基底層21及一體成型於所述基底層21的一預製圖案層22。其中,所述基底層21形成於所述金屬滾輪1的所述外表面11,並且所述基底層21的厚度T21不小於3微米(μm)且其較佳是不大於5微米。再者,所述預製圖案層22的厚度T22不大於所述基底層21的所述厚度T21,並且所述預製圖案層22(的表面)具有一預設立體圖案221,其包含有彼此相連的多個預製突起222。In more detail, the
於本實施例中,任兩個相鄰所述預製突起222的間距D222介於0.8微米~1.2微米(如:1微米),並且每個所述預製突起222的高度H222介於0.2微米~0.6微米。再者,多個所述預製突起222是由所述光阻層2表面於多個方向上各形成有正弦圖案(sinusoidal pattern)所構成的立體構造,但本發明不以此為限。In this embodiment, the distance D222 between any two adjacent
所述光阻蝕刻步驟S130:如圖3和圖4所示,對所述光阻層2以一非等向性(anisotropic)蝕刻方式進行蝕刻,以去除所述預製圖案層22、並使所述基底層21成形為位於所述金屬滾輪1之上且彼此分離設置的多個中介突起211。其中,所述非等向性蝕刻方式於本實施例中可以是電漿(plasma)蝕刻,並且所述金屬滾輪1的所述外表面11具有裸露於多個所述中介突起211之外的一第一成形區111、及相連於多個所述中介突起211的一第二成形區112。The photoresist etching step S130: As shown in FIGS. 3 and 4 , the
也就是說,所述光阻層2於所述光阻蝕刻步驟S130之中相當於是被逐漸遞減薄,以使所述預設立體圖案221能夠朝向所述金屬滾輪1的方向逐漸向下位移,直到所述金屬滾輪1的所述外表面11裸露出所述第一成形區111,而所述預設立體圖案221的頂部區域形成在所述基底層21且落在所述第二成形區112之上。That is to say, the
換個角度來說,每個所述中介突起211的外型對應於(如:大致相同於)一個所述預製突起222的頂部2221(如:每個所述中介突起211成形於相對應所述預製突起222的正下方),並且每個所述中介突起211的高度H211為相對應所述預製突起222的所述高度H222的40%~60%,而任兩個相鄰所述中介突起211的間距D211則是相同於與其相對應的兩個所述預製突起222的所述間距D222(如:介於0.8微米~1.2微米)。To put it another way, the shape of each
所述金屬蝕刻步驟S150:如圖4和圖5所示,對所述金屬滾輪1的所述外表面11以一乾式蝕刻方式進行蝕刻,以使所述金屬滾輪1於所述第一成形區111凹設形成有多個凹槽12。其中,多個所述凹槽12的內壁面121切齊於多個所述中介突起211的表面2111,以共同構成一中介立體圖案M,其對應於(如:大致相同於)所述預設立體圖案221(如:圖3)。The metal etching step S150: As shown in Figures 4 and 5, the
進一步地說,位於任兩個相鄰所述凹槽12之間的所述金屬滾輪1的部位,其外型對應於(如:大致相同於)一個所述預製突起222的底部2222(如:圖3)。也就是說,每個所述中介突起211的所述高度H211及其相鄰的所述凹槽12的深度H12,其總合大致等同於相對應所述預製突起222的所述高度H222(如:圖3),但本發明不以此為限。Furthermore, the appearance of the part of the
所述成形蝕刻步驟S170:如圖5至圖7所示,自所述中介立體圖案M進行蝕刻,去除多個所述中介突起211、並使所述金屬滾輪1的所述外表面11凹設形成有一滾壓立體圖案13,其對應於(如:大致相同於)所述中介立體圖案M(或圖3所示的所述預設立體圖案221)。其中,所述金屬滾輪1於所述第二成形區112因通過蝕刻而成形的一部位,其外型對應於(如:大致相同於)多個所述中介突起211。The forming etching step S170: As shown in FIGS. 5 to 7 , etching is performed from the intermediate three-dimensional pattern M to remove a plurality of the
更詳細地說,所述滾壓立體圖案13包含有彼此相連的多個金屬突起131,其外型分別對應於多個所述預製突起222。於本實施例中,任兩個相鄰所述金屬突起131的間距D131介於0.8微米~1.2微米,並且每個所述金屬突起131的高度H131介於0.2微米~0.6微米。In more detail, the rolling three-
依上所述,如圖1至圖7所示,所述無版縫金屬滾壓輪的製造方法S100於本實施例中通過採用較厚的所述光阻層2及特定材質的所述金屬滾輪1來搭配具有不同功效的多個蝕刻步驟(如:所述光阻蝕刻步驟S130、所述金屬蝕刻步驟S150、及所述成形蝕刻步驟S170),據以能夠在所述金屬滾輪1的所述外表面11形成有所述滾壓立體圖案13、以形成用於滾壓光學膜的一滾壓輪100,進而克服現有滾壓輪製造方法的技術偏見。As mentioned above, as shown in FIGS. 1 to 7 , the seamless metal rolling wheel manufacturing method S100 in this embodiment adopts a thicker
[實施例二][Example 2]
請參閱圖8和圖9所示,其為本發明的實施例二。由於本實施例類似於上述實施例一,所以兩個實施例的相同處不再加以贅述(如:前置步驟與光阻蝕刻步驟),而本實施例相較於上述實施例一的差異大致說明如下:Please refer to FIG. 8 and FIG. 9 , which is
於本實施例中,所述無版縫金屬滾壓輪的製造方法主要是進一步調整實施例一所載的所述金屬蝕刻步驟S150及所述成形蝕刻步驟S170。以下接著介紹所述無版縫金屬滾壓輪的製造方法於本實施例中所採用的金屬蝕刻步驟S250及成形蝕刻步驟S270。In this embodiment, the manufacturing method of the seamless metal rolling wheel mainly involves further adjusting the metal etching step S150 and the forming etching step S170 of the first embodiment. Next, the metal etching step S250 and the forming etching step S270 adopted in this embodiment of the seamless metal rolling wheel manufacturing method will be introduced.
所述金屬蝕刻步驟S250:如圖8所示,對所述金屬滾輪1的所述外表面11以一濕式蝕刻方式進行蝕刻,以使所述金屬滾輪1於所述第一成形區111凹設形成有多個凹槽12。其中,多個所述凹槽12的內壁面121切齊於多個所述中介突起211的表面2111,以共同構成一中介立體圖案M,其頂部區域(如:大致相同於)對應於所述預設立體圖案(如:圖3)。其中,所述中介立體圖案M的所述頂部區域由多個所述中介突起211的所述表面2111所構成。The metal etching step S250: As shown in Figure 8, the
再者,由多個所述凹槽12的所述內壁面121所構成的所述中介立體圖案M的一底部區域,其非對應於(或不同於)所述預設立體圖案(如:圖3)。其中,每個所述凹槽12是通過所述濕式蝕刻方式所形成,因而使其具有較寬且較平坦的槽底,因而導致每個所述凹槽12的外型不同於所述預設立體圖案(如:圖3)的相對應部位。Furthermore, a bottom area of the intermediate three-dimensional pattern M composed of the
所述成形蝕刻步驟S270:如圖8和圖9所示,自所述中介立體圖案M進行蝕刻,去除多個所述中介突起211、並使所述金屬滾輪1的所述外表面11凹設形成有一滾壓立體圖案13,其對應於(如:大致相同於)所述中介立體圖案M(、但不同於圖3所示的所述預設立體圖案221)。其中,所述金屬滾輪1於所述第二成形區112因通過蝕刻而成形的一部位,其外型對應於(如:大致相同於)多個所述中介突起211。The forming etching step S270: As shown in FIGS. 8 and 9 , etching is performed from the intermediate three-dimensional pattern M to remove a plurality of the
再者,所述滾壓立體圖案13包含有彼此相連的多個金屬突起131,並且每個所述金屬突起131的頂部的外型對應於一個所述預製突起的所述頂部(如:圖3),但每個所述金屬突起131的底部的外型則不同於相對應所述預製突起的底部(如:圖3)。Furthermore, the rolled three-
[本發明實施例的技術效果][Technical effects of the embodiments of the present invention]
綜上所述,本發明實施例所公開的無版縫金屬滾壓輪的製造方法,其通過採用較厚的所述光阻層及特定材質的所述金屬滾輪來搭配具有不同功效的多個蝕刻步驟(如:所述光阻蝕刻步驟、所述金屬蝕刻步驟、及所述成形蝕刻步驟),據以能夠在所述金屬滾輪的所述外表面形成有所述滾壓立體圖案,進而克服現有滾壓輪製造方法的技術偏見。In summary, the method for manufacturing a seamless metal rolling wheel disclosed in the embodiment of the present invention uses a thicker photoresist layer and a metal roller of a specific material to match multiple rollers with different functions. The etching step (such as the photoresist etching step, the metal etching step, and the shaping etching step) can form the rolling three-dimensional pattern on the outer surface of the metal roller, thereby overcoming the problem of Technical biases in existing rolling wheel manufacturing methods.
進一步地說,本發明實施例所公開的無版縫金屬滾壓輪的製造方法,其還能通過進一步限定多個所述預製突起的尺寸與間距,據以利於多個所述預製突起的外型能夠被盡可能準確地凹設成形在所述金屬滾輪的所述外表面。Furthermore, the manufacturing method of the seamless metal rolling wheel disclosed in the embodiment of the present invention can also further limit the size and spacing of the plurality of prefabricated protrusions, thereby facilitating the outer appearance of the plurality of prefabricated protrusions. The shape can be concavely formed on the outer surface of the metal roller as accurately as possible.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. within.
100:滾壓輪100:Rolling wheel
1:金屬滾輪1:Metal roller
11:外表面11:Outer surface
111:第一成形區111: First forming area
112:第二成形區112: Second forming area
12:凹槽12: Groove
121:內壁面121:Inner wall surface
13:滾壓立體圖案13: Rolling three-dimensional pattern
131:金屬突起131:Metal protrusion
2:光阻層2: Photoresist layer
21:基底層21: Basal layer
211:中介突起211:The rise of intermediaries
2111:表面2111:Surface
22:預製圖案層22: Premade pattern layer
221:預設立體圖案221:Default three-dimensional pattern
222:預製突起222:Prefabricated protrusion
2221:頂部2221:Top
2222:底部2222:Bottom
M:中介立體圖案M: Intermediate three-dimensional pattern
S100:無版縫金屬滾壓輪的製造方法S100: Manufacturing method of seamless metal rolling wheel
S110:前置步驟S110: Preliminary steps
S130:光阻蝕刻步驟S130: Photoresist etching step
S150、S250:金屬蝕刻步驟S150, S250: Metal etching steps
S170、S270:成形蝕刻步驟S170, S270: Forming etching steps
T21、T22:厚度T21, T22: Thickness
D222、D211、D131:間距D222, D211, D131: Spacing
H222、H211、H12、H131:高度H222, H211, H12, H131: height
圖1為本發明實施例一的無版縫金屬滾壓輪的製造方法的流程示意圖。Figure 1 is a schematic flowchart of a manufacturing method of a seamless metal rolling wheel according to
圖2為圖1中的前置步驟的平面示意圖。FIG. 2 is a schematic plan view of the pre-steps in FIG. 1 .
圖3為圖2的區域III的放大示意圖。FIG. 3 is an enlarged schematic diagram of area III in FIG. 2 .
圖4為圖1中的光阻蝕刻步驟的平面示意圖。FIG. 4 is a schematic plan view of the photoresist etching step in FIG. 1 .
圖5為圖1中的金屬蝕刻步驟的平面示意圖。FIG. 5 is a schematic plan view of the metal etching step in FIG. 1 .
圖6為圖1中的成形蝕刻步驟的平面示意圖。FIG. 6 is a schematic plan view of the forming etching step in FIG. 1 .
圖7為圖6的區域VII的放大示意圖。FIG. 7 is an enlarged schematic diagram of area VII in FIG. 6 .
圖8為本發明實施例二的無版縫金屬滾壓輪的製造方法的金屬蝕刻步驟示意圖。8 is a schematic diagram of the metal etching steps of the manufacturing method of a seamless metal rolling wheel according to
圖9為本發明實施例二的無版縫金屬滾壓輪的製造方法的成形蝕刻步驟示意圖。9 is a schematic diagram of the forming and etching steps of the manufacturing method of a seamless metal rolling wheel according to
S100:無版縫金屬滾壓輪的製造方法 S100: Manufacturing method of seamless metal rolling wheel
S110:前置步驟 S110: Preliminary steps
S130:光阻蝕刻步驟 S130: Photoresist etching step
S150:金屬蝕刻步驟 S150: Metal etching step
S170:成形蝕刻步驟 S170: Forming etching step
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TWI765314B (en) * | 2020-08-10 | 2022-05-21 | 光群雷射科技股份有限公司 | Transfer roller, manufacturing method of transfer roller, optical film, and manufacturing method of optical film |
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TWI752844B (en) * | 2021-03-10 | 2022-01-11 | 光群雷射科技股份有限公司 | Transfer roller and manufacturing method thereof |
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