TWI826808B - Electromagnetic wave transmission board and method for manufacturing the same - Google Patents

Electromagnetic wave transmission board and method for manufacturing the same Download PDF

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Publication number
TWI826808B
TWI826808B TW110126882A TW110126882A TWI826808B TW I826808 B TWI826808 B TW I826808B TW 110126882 A TW110126882 A TW 110126882A TW 110126882 A TW110126882 A TW 110126882A TW I826808 B TWI826808 B TW I826808B
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layer
conductive
bump
board
electroplating
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TW110126882A
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Chinese (zh)
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TW202306457A (en
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廖中興
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先豐通訊股份有限公司
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Priority to US17/389,605 priority patent/US20230025696A1/en
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Publication of TWI826808B publication Critical patent/TWI826808B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00Waveguides; Transmission lines of the waveguide type
    • H01P3/12Hollow waveguides
    • H01P3/121Hollow waveguides integrated in a substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q9/00Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04Resonant antennas
    • H01Q9/0407Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H01Q9/045Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means
    • H01Q9/0457Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means electromagnetically coupled to the feed line
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00Coupling devices of the waveguide type
    • H01P5/08Coupling devices of the waveguide type for linking dissimilar lines or devices
    • H01P5/10Coupling devices of the waveguide type for linking dissimilar lines or devices for coupling balanced with unbalanced lines or devices
    • H01P5/107Hollow-waveguide/strip-line transitions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/12Supports; Mounting means
    • H01Q1/22Supports; Mounting means by structural association with other equipment or articles
    • H01Q1/2283Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q9/00Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04Resonant antennas
    • H01Q9/0407Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H01Q9/045Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4697Manufacturing multilayer circuits having cavities, e.g. for mounting components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0364Conductor shape
    • H05K2201/0367Metallic bump or raised conductor not used as solder bump
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0364Conductor shape
    • H05K2201/037Hollow conductors, i.e. conductors partially or completely surrounding a void, e.g. hollow waveguides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/07Electric details
    • H05K2201/0707Shielding
    • H05K2201/0723Shielding provided by an inner layer of PCB
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09981Metallised walls
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09985Hollow waveguide combined with printed circuit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10098Components for radio transmission, e.g. radio frequency identification [RFID] tag, printed or non-printed antennas
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10431Details of mounted components
    • H05K2201/10507Involving several components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06Lamination
    • H05K2203/061Lamination of previously made multilayered subassemblies
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/429Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination

Abstract

An electromagnetic wave transmission board includes an inner plate, a first outer plate, a second outer plate, a first plated bump, a first conductive bump, a second plated bump and a second conductive bump. The inner plate defines a through hole, a plated metal layer is disposed on the hole wall of the through hole. The first plated bump and the first conductive bump each is disposed between the first outer plate and the inner plate and surrounds the hole. The second plated bump and the second conductive bump each is disposed between the second outer plate and the inner plate and surrounds the hole. The plated metal layer, the first plated bump, the first conductive bump, the first outer plate, the second outer plate, the second conductive bump, and the second plated bump surroundingly defines a chamber filled with air. The electromagnetic wave transmission board is configured to transmit electromagnetic wave signal through the chamber.

Description

電波傳輸板及其製作方法 Radio wave transmission board and manufacturing method thereof

本申請涉及電路板技術領域,尤其涉及一種由複數電路板連接形成的電路板組件及其製作方法。 The present application relates to the technical field of circuit boards, and in particular to a circuit board assembly formed by connecting a plurality of circuit boards and a manufacturing method thereof.

常用的能夠用來傳輸電波信號的複合板內部形成有空腔,所述電波信號藉由所述空腔進行傳輸。所述複合板一般藉由將外層板壓合在具有通孔的內層板的兩側並封閉該通孔製得。然而,在壓合形成所述複合板的過程中,用於黏合所述外層板和所述內層板的膠體易流向所述通孔內,且所述膠體不能阻擋藉由所述空腔進行傳輸的電波信號。 Commonly used composite panels that can be used to transmit radio wave signals have a cavity formed inside them, and the radio wave signals are transmitted through the cavity. The composite panel is generally made by laminating an outer panel on both sides of an inner panel with a through hole and sealing the through hole. However, during the process of laminating the composite board, the colloid used to bond the outer layer board and the inner layer board easily flows into the through hole, and the colloid cannot block the flow through the cavity. transmitted radio signals.

有鑑於此,有必要提供一種能夠解決上述技術問題的電波傳輸板及其製作方法。 In view of this, it is necessary to provide a radio wave transmission board and a manufacturing method thereof that can solve the above technical problems.

本申請一方面提供一種電波傳輸板,包括:內層板,設有通孔,所述通孔的孔壁設置有金屬鍍層;第一外層板,設置於所述內層板的一側並遮蓋所述通孔的一端;第二外層板,設置於所述內層板背離所述第一外層板的一側並遮蓋所述通孔的另一端;第一電鍍凸塊,設置於所述內層板和所述第一外層板之間並環繞所述通孔設置; 第一導電凸塊,夾設於所述內層板和所述第一外層板之間並環繞所述第一電鍍凸塊設置;第一膠層,夾設於所述內層板和所述第一外層板之間並位於所述第一導電凸塊遠離所述第一電鍍凸塊的一側;第二電鍍凸塊,設置於所述內層板和所述第二外層板之間並環繞所述通孔設置;第二導電凸塊,夾設於所述內層板和所述第二外層板之間並環繞所述第二電鍍凸塊設置;第二膠層,夾設於所述內層板和所述第二外層板之間並位於所述第二導電凸塊遠離所述第二電鍍凸塊的一側;其中,所述金屬鍍層、所述第一電鍍凸塊、所述第一導電凸塊、所述第一外層板、所述第二電鍍凸塊、所述第二導電凸塊和所述第二外層板包圍形成有佈滿空氣的空腔,所述電波傳輸板能以所述空腔內的空氣作為傳導介質來傳遞電波信號。 On the one hand, the present application provides a radio wave transmission board, including: an inner layer board provided with a through hole, the hole wall of the through hole is provided with a metal plating layer; a first outer layer board disposed on one side of the inner layer board and covering it One end of the through hole; a second outer layer plate, disposed on a side of the inner layer plate away from the first outer layer plate and covering the other end of the through hole; a first electroplating bump, disposed on the inner layer disposed between the layer board and the first outer layer board and surrounding the through hole; A first conductive bump is sandwiched between the inner layer board and the first outer layer board and is arranged around the first electroplating bump; a first adhesive layer is sandwiched between the inner layer board and the first outer layer board. between the first outer layer plates and located on the side of the first conductive bump away from the first electroplating bump; a second electroplating bump located between the inner layer plate and the second outer layer plate and is arranged around the through hole; a second conductive bump is sandwiched between the inner layer board and the second outer layer board and is arranged around the second electroplating bump; a second adhesive layer is sandwiched between the between the inner layer board and the second outer layer board and located on the side of the second conductive bump away from the second electroplating bump; wherein, the metal plating layer, the first electroplating bump, the The first conductive bump, the first outer layer plate, the second electroplating bump, the second conductive bump and the second outer layer plate are surrounded by a cavity filled with air, and the radio wave transmission The board can use the air in the cavity as a conductive medium to transmit electric wave signals.

本申請另一方面提供一種電波傳輸板的製作方法,包括以下步驟:提供內層板,所述內層板設有貫通其相對的兩側的通孔,所述通孔的孔壁形成有金屬鍍層;提供第一基板,在所述第一基板和所述內層板中的一者上電鍍形成第一電鍍凸塊,並在所述第一基板和所述內層板中的另一者上印刷形成第一導電凸塊;提供第二基板,在所述第二基板和所述第內層板中的一者上電鍍形成第二電鍍凸塊,並在所述第二基板和所述第內層板中的另一者上印刷形成第二導電凸塊;提供開設有第一開口的第一膠層和開設有第二開口的第二膠層,其中,所述第一開口用於供所述第一導電凸塊和所述第一電鍍凸塊穿過,所述第二開口用於供所述第二導電凸塊和所述第二電鍍凸塊穿過; 將所述第一基板、所述第一膠層、所述內層板、所述第二膠層和所述第二基板依序壓合在一起,其中,所述第一電鍍凸塊位於所述第一基板和所述內層板之間並環繞所述通孔設置,所述第一導電凸塊夾設於所述第一基板和所述內層板之間並環繞所述第一電鍍凸塊設置,所述第二電鍍凸塊位於所述第二基板和所述內層板之間並環繞所述通孔設置,所述第二導電凸塊夾設於所述第二基板和所述內層板之間並環繞所述通孔設置;對所述第一基板和所述第二基板分別進行線路製作得到第一外層板和第二外層板。 Another aspect of the present application provides a method for manufacturing a radio wave transmission board, which includes the following steps: providing an inner layer board, the inner layer board is provided with through holes penetrating its opposite sides, and the wall of the through hole is formed with a metal Plating; providing a first substrate, electroplating to form a first plating bump on one of the first substrate and the inner layer board, and electroplating on the other of the first substrate and the inner layer board First conductive bumps are formed by printing on one of the second substrate and the inner layer board; a second substrate is provided, and a second electroplating bump is formed on one of the second substrate and the inner layer board; Second conductive bumps are printed on the other of the inner layers; a first glue layer with a first opening and a second glue layer with a second opening are provided, wherein the first opening is used for The first conductive bump and the first plating bump are allowed to pass through, and the second opening is used to allow the second conductive bump and the second plating bump to pass through; The first substrate, the first adhesive layer, the inner layer board, the second adhesive layer and the second substrate are sequentially pressed together, wherein the first electroplating bump is located at The first conductive bump is disposed between the first substrate and the inner layer board and surrounds the through hole, and the first conductive bump is sandwiched between the first substrate and the inner layer board and surrounds the first electroplating Bumps are arranged, the second electroplating bumps are located between the second substrate and the inner layer board and are arranged around the through holes, and the second conductive bumps are sandwiched between the second substrate and the inner layer board. The inner layer boards are arranged between and around the through holes; circuits are produced on the first substrate and the second substrate respectively to obtain a first outer layer board and a second outer layer board.

本申請提供的電波傳輸板及其製作方法中,藉由設置位於所述內層板和所述第一外層板之間的所述第一導電凸塊和所述第一電鍍凸塊,可有效阻擋所述第一膠層流入所述空腔中;藉由設置位於所述內層板和所述第二外層板之間的所述第二導電凸塊和所述第二電鍍凸塊,可有效阻擋所述第二膠層流入所述空腔中;且所述第一導電凸塊、所述第一電鍍凸塊、所述第二導電凸塊和所述第二電鍍凸塊定義出部分空腔,可有效阻擋藉由所述空腔進行傳輸的電波信號。 In the radio wave transmission board and its manufacturing method provided by this application, by arranging the first conductive bump and the first electroplating bump between the inner layer board and the first outer layer board, it can effectively Block the first glue layer from flowing into the cavity; by arranging the second conductive bump and the second plating bump between the inner layer board and the second outer layer board, it is possible to prevent the first glue layer from flowing into the cavity. Effectively blocking the second glue layer from flowing into the cavity; and the first conductive bump, the first plating bump, the second conductive bump and the second plating bump define a portion The cavity can effectively block the radio signal transmitted through the cavity.

100:電波傳輸板 100: Radio wave transmission board

10:內層板 10:Inner layer board

20:第一外層板 20:First outer layer board

30:第二外層板 30:Second outer layer board

41:第一膠層 41: First glue layer

42:第二膠層 42:Second glue layer

51:第一電鍍凸塊 51: First plating bump

52:第二電鍍凸塊 52: Second plating bump

61:第一導電凸塊 61: First conductive bump

62:第二導電凸塊 62: Second conductive bump

11:第一導電層 11: First conductive layer

12:第二導電層 12: Second conductive layer

13:絕緣層 13:Insulation layer

14:第三導電層 14:Third conductive layer

101:通孔 101:Through hole

16:金屬鍍層 16:Metal plating

111:第一屏蔽部 111:First shielding department

121:第二屏蔽部 121:Second shielding department

21:第一基層 21:First grassroots level

22:第一導電線路層 22: First conductive circuit layer

23:第二導電線路層 23: Second conductive circuit layer

24:第一導電結構 24: First conductive structure

31:第二基層 31:The second grassroots level

32:第三導電線路層 32: The third conductive circuit layer

33:第四導電線路層 33: The fourth conductive circuit layer

34:第二導電結構 34: Second conductive structure

221:第一凹槽 221: first groove

321:第二凹槽 321: Second groove

201:貫通孔 201:Through hole

90:填充件 90: Filling parts

110:電鍍孔 110: Plating hole

70:主動元件 70:Active components

80:天線 80:Antenna

11a:第三凹槽 11a: Third groove

12a、32a:第四凹槽 12a, 32a: fourth groove

210:層疊結構 210:Laminated structure

211:第一金屬層 211: First metal layer

212:第二金屬層 212: Second metal layer

220:第一基板 220: First substrate

230:第二基板 230: Second substrate

222:第三金屬層 222: The third metal layer

232:第四金屬層 232: The fourth metal layer

401:第一開口 401:First opening

402:第二開口 402:Second opening

圖1A為本申請第一實施方式提供的電波傳輸板的截面示意圖。 FIG. 1A is a schematic cross-sectional view of the radio wave transmission board provided in the first embodiment of the present application.

圖1B為本申請第二實施方式提供的電波傳輸板的截面示意圖。 FIG. 1B is a schematic cross-sectional view of the radio wave transmission board provided in the second embodiment of the present application.

圖2為本申請一實施方式提供的層疊結構的截面示意圖。 Figure 2 is a schematic cross-sectional view of a stacked structure provided by an embodiment of the present application.

圖3為在圖2所示層疊結構上形成內層板後的截面示意圖。 FIG. 3 is a schematic cross-sectional view after forming an inner layer plate on the laminated structure shown in FIG. 2 .

圖4為在圖3所示內層板的兩側分別提供第一基板和第二基板後的截面示意圖。 FIG. 4 is a schematic cross-sectional view of a first substrate and a second substrate respectively provided on both sides of the inner layer board shown in FIG. 3 .

圖5A為在圖4所示第一基板和內層板上形成電鍍凸塊後的截面示意圖。 FIG. 5A is a schematic cross-sectional view after forming electroplating bumps on the first substrate and the inner layer board shown in FIG. 4 .

圖5B-1為本申請第一實施方式的第一基板的仰視圖。 FIG. 5B-1 is a bottom view of the first substrate according to the first embodiment of the present application.

圖5B-2為本申請第二實施方式的第一基板的仰視圖。 Figure 5B-2 is a bottom view of the first substrate according to the second embodiment of the present application.

圖5C為在圖5A所示內層板和第二基板上形成凹槽後的截面示意圖。 FIG. 5C is a schematic cross-sectional view after forming grooves on the inner layer plate and the second substrate shown in FIG. 5A.

圖6為在圖5A所示內層板和第二基板上印刷形成導電塊後的截面示意圖。 FIG. 6 is a schematic cross-sectional view after printing and forming conductive blocks on the inner layer board and the second substrate shown in FIG. 5A.

圖7為圖6所示第二基板的俯視圖。 FIG. 7 is a top view of the second substrate shown in FIG. 6 .

圖8為將圖6所示內層板、第一基板和第二基板壓合在一起後的截面示意圖。 FIG. 8 is a schematic cross-sectional view after the inner layer plate, the first substrate and the second substrate shown in FIG. 6 are pressed together.

圖9為在圖8所示結構上形成電鍍孔後的截面示意圖。 FIG. 9 is a schematic cross-sectional view after forming plating holes on the structure shown in FIG. 8 .

下面將對本發明實施方式中的技術方案進行清楚、完整地描述,顯然,所描述的實施方式僅僅是本發明一部分實施方式,而不是全部的實施方式。基於本發明中的實施方式,本領域普通技術人員在沒有付出創造性勞動前提下所獲得的所有其他實施方式,都屬於本發明保護的範圍。 The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

需要說明的是,除非另有定義,本文所使用的所有的技術和科學術語與屬於本發明的技術領域的技術人員通常理解的含義相同。在本發明實施方式中使用的術語是僅僅出於描述特定實施方式的目的,而非旨在限制本發明。 It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meanings as commonly understood by those skilled in the technical field belonging to the present invention. The terminology used in the embodiments of the present invention is for the purpose of describing particular embodiments only and is not intended to limit the present invention.

請參閱圖1A,本申請一實施例的電波傳輸板100包括內層板10、第一外層板20、第二外層板30、第一膠層41、第二膠層42、第一電鍍凸塊51、第二電鍍凸塊52、第一導電凸塊61和第二導電凸塊62。 Please refer to Figure 1A. The radio wave transmission board 100 according to an embodiment of the present application includes an inner layer board 10, a first outer layer board 20, a second outer layer board 30, a first glue layer 41, a second glue layer 42, and a first electroplating bump. 51. The second electroplating bump 52, the first conductive bump 61 and the second conductive bump 62.

所述內層板10包括位於外側的第一導電層11和第二導電層12以及位於所述第一導電層11和所述第二導電層12之間的絕緣層13。所述第一導電層11和所述第二導電層12相對設置。在一些實施方式中,所述內層板10具有多層板結構,其還可位於所述第一導電層11和所述第二導電層12之間的複數第三導電層14,所述內層板10中相鄰的二導電層藉由所述絕緣層13相隔離。 The inner layer board 10 includes a first conductive layer 11 and a second conductive layer 12 located on the outside and an insulating layer 13 located between the first conductive layer 11 and the second conductive layer 12 . The first conductive layer 11 and the second conductive layer 12 are arranged opposite to each other. In some embodiments, the inner layer board 10 has a multi-layer board structure, which may also have a plurality of third conductive layers 14 located between the first conductive layer 11 and the second conductive layer 12. The inner layer Two adjacent conductive layers in the board 10 are isolated by the insulating layer 13 .

所述內層板10設置有通孔101,所述通孔101貫通所述第一導電層11、所述第二導電層12和所述絕緣層13。所述通孔101的側壁上設置有金屬鍍層16。所述第一導電層11包括鄰近所述通孔101設置的第一屏蔽部111,所述第二導電層12包括鄰近所述通孔101設置的第二屏蔽部121。所述第一屏蔽部111和所述第二屏蔽部121分別與所述金屬鍍層16的兩端相連接。 The inner layer board 10 is provided with a through hole 101 that penetrates the first conductive layer 11 , the second conductive layer 12 and the insulating layer 13 . A metal plating layer 16 is provided on the side wall of the through hole 101 . The first conductive layer 11 includes a first shielding portion 111 disposed adjacent to the through hole 101 , and the second conductive layer 12 includes a second shielding portion 121 disposed adjacent to the through hole 101 . The first shielding part 111 and the second shielding part 121 are respectively connected to both ends of the metal plating layer 16 .

所述第一外層板20和所述第二外層板30分別設置於所述第一導電層11和所述第二導電層12上,並遮蓋所述通孔101相對的兩端。所述第一外層板20、所述第二外層板30以及所述內層板10可藉由堆疊壓合而結合。 The first outer layer board 20 and the second outer layer board 30 are respectively disposed on the first conductive layer 11 and the second conductive layer 12 and cover opposite ends of the through hole 101 . The first outer panel 20 , the second outer panel 30 and the inner panel 10 can be combined by stacking and pressing.

所述第一外層板20包括第一基層21和設置於所述第一基層21相對的二表面的第一導電線路層22和第二導電線路層23。所述第一外層板20還包括第一導電結構24,所述第一導電結構24電連接所述第一導電線路層22和所述第二導電線路層23。本實施方式中,所述第一導電結構24為導電孔。 The first outer layer board 20 includes a first base layer 21 and a first conductive circuit layer 22 and a second conductive circuit layer 23 disposed on two opposite surfaces of the first base layer 21 . The first outer layer board 20 further includes a first conductive structure 24 , and the first conductive structure 24 is electrically connected to the first conductive circuit layer 22 and the second conductive circuit layer 23 . In this embodiment, the first conductive structure 24 is a conductive hole.

所述第二外層板30包括第二基層31和設置於所述第二基層31相對的二表面上的第三導電線路層32和第四導電線路層。所述第二外層板30還包括第二導電結構34,所述第二導電結構34電連接所述第三導電線路層32和所述第四導電線路層33。本實施方式中,所述第二導電結構34為導電孔。 The second outer layer board 30 includes a second base layer 31 and third conductive circuit layers 32 and fourth conductive circuit layers disposed on two opposite surfaces of the second base layer 31 . The second outer layer board 30 further includes a second conductive structure 34 , and the second conductive structure 34 is electrically connected to the third conductive circuit layer 32 and the fourth conductive circuit layer 33 . In this embodiment, the second conductive structure 34 is a conductive hole.

所述絕緣層13、所述第一基層21和所述第二基層31的材質均可以為剛性材料,例如為玻璃纖維預浸材料(Glass fiber prepreg)、碳纖維預浸材料(Carbon fiber prepreg)、環氧樹脂等。所述絕緣層13、所述第一基層21和所述第二基層31的材質還可以柔性材料,例如為聚酯、聚醯亞胺等。 The insulating layer 13, the first base layer 21 and the second base layer 31 can all be made of rigid materials, such as glass fiber prepreg, carbon fiber prepreg, Epoxy resin, etc. The insulation layer 13 , the first base layer 21 and the second base layer 31 may also be made of flexible materials, such as polyester, polyimide, etc.

所述第一電鍍凸塊51設置於所述第一導電層11和所述第一導電線路層22之間,並環繞所述通孔101設置。所述第一電鍍凸塊51藉由電鍍形成於所述第一導電線路層22上使得所述第一電鍍凸塊51與所述第一導電線路層22緊密結合,且所述第一電鍍凸塊51遠離所述第一導電線路層22的一端與所述第一導電層11相接觸或不相接觸。所述第一導電凸塊61環繞所述第一電鍍凸塊51設置,且所述第一導電凸塊61夾設於所述第一導電層11和所述第一導電線 路層22之間。所述第一導電凸塊61與所述第一電鍍凸塊51可以間隔設置也可以相連接。所述第一導電凸塊61藉由印刷工藝形成於所述第一導電層11上使得所述第一導電凸塊61與所述第一導電層11緊密結合,並藉由壓合工藝使得所述第一導電凸塊61遠離所述第一導電層11的一端與所述第一導電線路層22相接觸。本實施方式中,所述第一導電凸塊61設置於所述第一屏蔽部111上。 The first plating bump 51 is disposed between the first conductive layer 11 and the first conductive circuit layer 22 and surrounds the through hole 101 . The first electroplated bumps 51 are formed on the first conductive circuit layer 22 by electroplating so that the first electroplated bumps 51 are closely combined with the first conductive circuit layer 22, and the first electroplated bumps One end of the block 51 away from the first conductive circuit layer 22 may or may not be in contact with the first conductive layer 11 . The first conductive bump 61 is arranged around the first electroplating bump 51 , and the first conductive bump 61 is sandwiched between the first conductive layer 11 and the first conductive line. between road layers 22. The first conductive bumps 61 and the first electroplating bumps 51 may be spaced apart or connected. The first conductive bumps 61 are formed on the first conductive layer 11 through a printing process so that the first conductive bumps 61 are closely combined with the first conductive layer 11, and are formed through a lamination process. One end of the first conductive bump 61 away from the first conductive layer 11 is in contact with the first conductive circuit layer 22 . In this embodiment, the first conductive bump 61 is provided on the first shielding part 111 .

所述第二電鍍凸塊52設置於所述第二導電層12和所述第三導電線路層32之間,並環繞所述通孔101設置。所述第二電鍍凸塊52藉由電鍍形成於所述第二導電層12上使得所述第二電鍍凸塊52與所述第二導電層12緊密結合,且所述第二電鍍凸塊52遠離所述第二導電層12的一端與所述第三導電線路層32相接觸或不相接觸。所述第二導電凸塊62環繞所述第二電鍍凸塊52設置,且所述第二導電凸塊62夾設於所述第二導電層12和所述第三導電線路層32之間。所述第二導電凸塊62與所述第二電鍍凸塊52可以間隔設置也可以相連接。所述第二導電凸塊62藉由印刷工藝形成於所述第三導電線路層32上使得所述第二導電凸塊62與所述第三導電線路層32緊密結合,並藉由壓合工藝使得所述第二導電凸塊62遠離所述第三導電線路層32的一端與所述第二導電層12相接觸。本實施方式中,所述第二導電凸塊70設置於所述第二屏蔽部121上。 The second plating bump 52 is disposed between the second conductive layer 12 and the third conductive circuit layer 32 and surrounds the through hole 101 . The second electroplating bumps 52 are formed on the second conductive layer 12 by electroplating so that the second electroplating bumps 52 are closely combined with the second conductive layer 12, and the second electroplating bumps 52 One end away from the second conductive layer 12 may or may not be in contact with the third conductive circuit layer 32 . The second conductive bumps 62 are arranged around the second electroplating bumps 52 , and the second conductive bumps 62 are sandwiched between the second conductive layer 12 and the third conductive circuit layer 32 . The second conductive bumps 62 and the second electroplating bumps 52 may be spaced apart or connected. The second conductive bumps 62 are formed on the third conductive circuit layer 32 through a printing process so that the second conductive bumps 62 and the third conductive circuit layer 32 are closely combined, and through a lamination process The end of the second conductive bump 62 away from the third conductive circuit layer 32 is in contact with the second conductive layer 12 . In this embodiment, the second conductive bump 70 is disposed on the second shielding part 121 .

在一些實施方式中,所述電波傳輸板100還可包括複數第一電鍍凸塊51、複數第二電鍍凸塊52、複數第一導電凸塊61以及複數第二導電凸塊62,所述複數第一電鍍凸塊51相互間隔設置並環繞所述通孔101設置,所述複數第二電鍍凸塊52相互間隔設置並環繞所述通孔101設置,所述複數第一導電凸塊61相互間隔設置並環繞所述複數第一電鍍凸塊51設置,所述複數第二導電凸塊62相互間隔設置並環繞所述複數第二電鍍凸塊52設置。 In some embodiments, the radio wave transmission board 100 may further include a plurality of first electroplating bumps 51 , a plurality of second electroplating bumps 52 , a plurality of first conductive bumps 61 and a plurality of second conductive bumps 62 . The first electroplating bumps 51 are spaced apart from each other and arranged around the through hole 101 . The plurality of second electroplating bumps 52 are spaced apart from each other and arranged around the through hole 101 . The plurality of first conductive bumps 61 are spaced apart from each other. The plurality of first electroplating bumps 51 are arranged and arranged around them. The plurality of second conductive bumps 62 are arranged at intervals from each other and are arranged around the plurality of second electroplating bumps 52 .

在一些實施方式中,所述第一電鍍凸塊51和所述第二電鍍凸塊52的厚度均為30μm~80μm,寬度均為0.2mm~0.5mm;所述第一導電凸塊61和所述第二導電凸塊62的厚度均為0.008mm~0.125mm,寬度為0.25mm~0.35mm。 In some embodiments, the thickness of the first electroplating bump 51 and the second electroplating bump 52 are both 30 μm ~ 80 μm, and the width is 0.2 mm ~ 0.5 mm; the first conductive bump 61 and the The thickness of the second conductive bumps 62 is 0.008mm~0.125mm, and the width is 0.25mm~0.35mm.

在一些實施方式中,所述第一導電凸塊61和所述第二導電凸塊62的材質為導電膏。 In some embodiments, the first conductive bump 61 and the second conductive bump 62 are made of conductive paste.

所述第一外層板20的第一導電線路層22、所述第一電鍍凸塊51、所述第一導電凸塊61、所述第一導電層11的第一屏蔽部111、所述金屬鍍層16、所述第二導電層12的第二屏蔽部121、所述第二電鍍凸塊52、所述第二導電凸塊62以及所述第二外層板30的第三導電線路層32包圍形成一空腔102。所述空腔102所容納的介質為空氣,所述電波傳輸板10能夠以所述空腔102內的空氣作為傳導介質來傳遞電波信號。所述第一電鍍凸塊51、所述第一導電凸塊61、所述第一屏蔽部111、所述金屬鍍層16、所述第二屏蔽部121、所述第二電鍍凸塊52以及所述第二導電凸塊62能夠對所述空腔102中的電波信號進行阻擋,提供電磁屏蔽效果。 The first conductive circuit layer 22 of the first outer layer board 20, the first electroplating bump 51, the first conductive bump 61, the first shielding portion 111 of the first conductive layer 11, the metal The plating layer 16 , the second shielding portion 121 of the second conductive layer 12 , the second plating bumps 52 , the second conductive bumps 62 and the third conductive circuit layer 32 of the second outer layer plate 30 surround A cavity 102 is formed. The medium contained in the cavity 102 is air, and the radio wave transmission board 10 can use the air in the cavity 102 as a conductive medium to transmit radio wave signals. The first electroplating bump 51, the first conductive bump 61, the first shielding part 111, the metal plating layer 16, the second shielding part 121, the second electroplating bump 52 and the The second conductive bump 62 can block the radio wave signal in the cavity 102 and provide an electromagnetic shielding effect.

由於所述第一電鍍凸塊51電鍍形成於所述第一外層板20的第一導電線路層22上,且所述第一導電凸塊61印刷形成於所述內層板10的第一導電層11上,使得在所述空腔102中傳輸的電波信號不易從所述第一電鍍凸塊51與所述第一外層板20之間的結合處以及所述第一導電凸塊61與所述內層板10之間的結合處泄露,減少電波信號從第一外層板20和內層板10之間的空間泄露的現象。由於所述第二電鍍凸塊52電鍍形成於所述內層板10的第二導電層12上,且所述第二導電凸塊62印刷形成於所述第二外層板30的第三導電線路層32上,使得在所述空腔102中傳輸的電波信號不易從所述第二電鍍凸塊52與所述內層板10之間的結合處以及所述第二導電凸塊62與所述第二外層板30之間的結合處泄露,減少了電波信號從第二外層板30和內層板10之間的空間泄露的現象。 Because the first electroplated bumps 51 are electroplated and formed on the first conductive circuit layer 22 of the first outer layer board 20 , and the first conductive bumps 61 are printed and formed on the first conductive layer of the inner layer board 10 on the layer 11 , so that the radio wave signal transmitted in the cavity 102 is difficult to pass from the joint between the first electroplating bump 51 and the first outer layer plate 20 and the first conductive bump 61 and the The leakage at the joint between the inner layer boards 10 reduces the leakage of radio wave signals from the space between the first outer layer board 20 and the inner layer board 10 . Because the second electroplated bumps 52 are electroplated and formed on the second conductive layer 12 of the inner layer board 10 , and the second conductive bumps 62 are printed and formed on the third conductive lines of the second outer layer board 30 on the layer 32 , so that the radio wave signal transmitted in the cavity 102 is difficult to pass from the joint between the second electroplating bump 52 and the inner layer board 10 and the second conductive bump 62 and the Leakage at the joint between the second outer layer boards 30 reduces the leakage of radio wave signals from the space between the second outer layer board 30 and the inner layer board 10 .

在其他實施方式中,所述第一電鍍凸塊51可電鍍形成於所述內層板10上,其遠離所述內層板10的一端與所述第一外層板20可接觸或不接觸;同時,所述第一導電凸塊61印刷形成於所述第一外層板20上,其遠離所述第一外層板20的一端藉由壓合工藝與所述內層板10相接觸。所述第二電鍍凸塊52 可電鍍形成於所述第二外層板30上,其遠離所述第二外層板30的一端與所述內層板10可接觸或不接觸;同時,所述第二導電凸塊62印刷形成於所述內層板10上,其遠離所述內層板10的一端藉由壓合工藝與所述第二外層板30相接觸。 In other embodiments, the first electroplating bump 51 can be electroplated and formed on the inner layer board 10, and its end away from the inner layer board 10 may or may not be in contact with the first outer layer board 20; At the same time, the first conductive bump 61 is printed and formed on the first outer layer board 20 , and its end away from the first outer layer board 20 is in contact with the inner layer board 10 through a lamination process. The second plating bump 52 It can be electroplated and formed on the second outer layer board 30, and its end away from the second outer layer board 30 can be in contact with the inner layer board 10 or not; at the same time, the second conductive bumps 62 are printed and formed on On the inner layer board 10, one end thereof away from the inner layer board 10 is in contact with the second outer layer board 30 through a lamination process.

所述第一導電線路層22上設置有第一凹槽221。所述第一基層21的部分從所述第一凹槽221中露出。所述第三導電線路層32上設置有第二凹槽321,所述第二凹槽321暴露所述第二基層31的部分。所述第一凹槽221和所述第二凹槽321均與所述空腔102相連通。所述空腔102能分別以所述第一凹槽221和所述第二凹槽321來接收與輸出一電波信號。 A first groove 221 is provided on the first conductive circuit layer 22 . A portion of the first base layer 21 is exposed from the first groove 221 . A second groove 321 is provided on the third conductive circuit layer 32 , and the second groove 321 exposes a portion of the second base layer 31 . Both the first groove 221 and the second groove 321 are connected with the cavity 102 . The cavity 102 can receive and output an electric wave signal through the first groove 221 and the second groove 321 respectively.

所述第一膠層41設置於所述第一外層板20和所述內層板10之間,並位於所述第一導電凸塊61背離所述第一電鍍凸塊51的一側。所述第一膠層41黏接所述第一外層板20和所述內層板10。所述第一膠層41被所述第一導電凸塊50所阻擋,使得其不能流入所述空腔102中。 The first glue layer 41 is disposed between the first outer layer board 20 and the inner layer board 10 , and is located on the side of the first conductive bump 61 away from the first electroplating bump 51 . The first glue layer 41 bonds the first outer layer board 20 and the inner layer board 10 . The first glue layer 41 is blocked by the first conductive bump 50 so that it cannot flow into the cavity 102 .

所述第二膠層42設置於所述第二外層板30和所述內層板10之間,並位於所述第二導電凸塊62背離所述第二電鍍凸塊52的一側。所述第二膠層42黏接所述第二外層板30和所述內層板10。所述第二膠層42被所述第二導電凸塊62所阻擋,使得其不能流入所述空腔102中。 The second glue layer 42 is disposed between the second outer layer board 30 and the inner layer board 10 , and is located on the side of the second conductive bump 62 away from the second electroplating bump 52 . The second glue layer 42 adheres the second outer panel 30 and the inner panel 10 . The second glue layer 42 is blocked by the second conductive bump 62 so that it cannot flow into the cavity 102 .

所述第一外層板20還開設有貫通孔201,所述貫通孔201連通所述空腔102與外部環境。在組裝形成所述電波傳輸板100的過程中,所述空腔102中因高溫膨脹的空氣藉由所述貫通孔201逸出至所述外部環境。本實施方式中,所述貫通孔201與第一凹槽221相連通。 The first outer layer plate 20 is also provided with a through hole 201, and the through hole 201 connects the cavity 102 with the external environment. During the process of assembling the radio wave transmission board 100, the air in the cavity 102 expanded due to high temperature escapes to the external environment through the through holes 201. In this embodiment, the through hole 201 is connected with the first groove 221 .

所述電波傳輸板100還包括填充件90,所述填充件90填充於所述貫通孔201中,以密封所述空腔102。 The radio wave transmission board 100 further includes a filling piece 90 that is filled in the through hole 201 to seal the cavity 102 .

所述電波傳輸板100還包括電鍍孔110。所述電鍍孔110依次貫通所述第一外層板20、所述第一膠層41、所述內層板10、所述第二膠層42和所述第二外層板30,並電連接所述第一外層板20、所述內板10和所述第二外層板30。 The radio wave transmission board 100 also includes electroplated holes 110 . The plating holes 110 sequentially penetrate the first outer layer board 20 , the first glue layer 41 , the inner layer board 10 , the second glue layer 42 and the second outer layer board 30 , and are electrically connected to them. The first outer panel 20 , the inner panel 10 and the second outer panel 30 .

所述電波傳輸板100還包括主動元件70和天線80。所述主動元件70設置於第二導電線路層23上。所述天線80設置於所述第二基層31背離所述內層板10的表面上,並與所述第四導電線路層33電連接。所述天線80接收的外界的電波信號藉由所述空腔102傳輸至所述主動元件70,或者所述主動元件70發射的電波信號藉由所述空腔102傳輸至所述天線80。在一些實施方式中,所述主動元件70的位置和所述天線80的位置均與所述空腔102的位置相對應。所述天線80可以為貼片天線。 The radio wave transmission board 100 also includes an active element 70 and an antenna 80 . The active component 70 is disposed on the second conductive circuit layer 23 . The antenna 80 is disposed on the surface of the second base layer 31 away from the inner layer board 10 and is electrically connected to the fourth conductive circuit layer 33 . The external radio wave signal received by the antenna 80 is transmitted to the active element 70 through the cavity 102 , or the radio wave signal emitted by the active element 70 is transmitted to the antenna 80 through the cavity 102 . In some embodiments, the position of the active element 70 and the position of the antenna 80 both correspond to the position of the cavity 102 . The antenna 80 may be a patch antenna.

請參閱圖1B,在一些實施例中,所述第一導電層11上設置有第三凹槽11a,所述第二導電層12上設置有第四凹槽12a。所述第三凹槽11a和所述第四凹槽12a均能夠裸露所述絕緣層13的部分。所述第一導電凸塊61和所述第二導電凸塊62分別印刷形成於所述第一導電層11和所述第二導電層12上。所述第一電鍍凸塊51電鍍形成於所述第一導電線路層22上,其遠離所述第一外層板20的一端容納於所述第三凹槽11a中,以進一步阻擋所述第一膠層41流入所述空腔102中。所述第二電鍍凸塊52電鍍形成於所述第三導電線路層32上,其遠離所述第二外層板30的一端容置於所述第四凹槽12a中,以進一步阻擋所述第二膠層42流入所述空腔102中。其中,所述第一電鍍凸塊51和所述第二電鍍凸塊52的寬度可大於0.15mm~0.25mm。 Referring to FIG. 1B , in some embodiments, the first conductive layer 11 is provided with a third groove 11 a , and the second conductive layer 12 is provided with a fourth groove 12 a . Both the third groove 11 a and the fourth groove 12 a can expose part of the insulating layer 13 . The first conductive bumps 61 and the second conductive bumps 62 are printed and formed on the first conductive layer 11 and the second conductive layer 12 respectively. The first electroplated bump 51 is electroplated and formed on the first conductive circuit layer 22 , and one end of the bump 51 away from the first outer layer board 20 is received in the third groove 11 a to further block the first electroplated bump 51 . The glue layer 41 flows into the cavity 102 . The second electroplated bump 52 is electroplated and formed on the third conductive circuit layer 32 , and one end thereof away from the second outer layer board 30 is accommodated in the fourth groove 12 a to further block the third conductive circuit layer 32 . The second glue layer 42 flows into the cavity 102 . Wherein, the width of the first electroplating bump 51 and the second electroplating bump 52 may be greater than 0.15mm~0.25mm.

本申請實施方式還提供上述電波傳輸板100的製作方法,其包括以下步驟。 The embodiment of the present application also provides a method for manufacturing the above-mentioned radio wave transmission board 100, which includes the following steps.

步驟S1,請參閱圖2,提供層疊結構210。所述層疊結構210包括第一金屬層211、第二金屬層212、以及位於所述第一金屬層211和所述第二金屬層212之間的複數第三導電層14和複數絕緣層13。所述複數第三導電層14之間、所述第三導電層14與所述第一金屬層211和所述第二金屬層212之間均藉由所述絕緣層13相隔離。 Step S1, please refer to FIG. 2, providing a stacked structure 210. The stacked structure 210 includes a first metal layer 211 , a second metal layer 212 , and a plurality of third conductive layers 14 and a plurality of insulating layers 13 located between the first metal layer 211 and the second metal layer 212 . The plurality of third conductive layers 14 are isolated from each other, and the third conductive layer 14 is isolated from the first metal layer 211 and the second metal layer 212 by the insulating layer 13 .

步驟S2,請參閱圖3,在所述層疊結構上形成通孔101,在所述第一金屬層和所述第二金屬層上進行線路製作形成第一導電層11和第二導電層12, 並對所述通孔101的孔壁進行電鍍形成金屬鍍層16,得到內層板10。所述第一導電層11包括鄰近所述通孔101設置的第一屏蔽部111,所述第二導電層12包括鄰近所述通孔101設置的第二屏蔽部121。 Step S2, please refer to Figure 3, forming a through hole 101 on the laminated structure, performing circuit fabrication on the first metal layer and the second metal layer to form a first conductive layer 11 and a second conductive layer 12, The hole wall of the through hole 101 is electroplated to form a metal plating layer 16 to obtain the inner layer plate 10 . The first conductive layer 11 includes a first shielding portion 111 disposed adjacent to the through hole 101 , and the second conductive layer 12 includes a second shielding portion 121 disposed adjacent to the through hole 101 .

步驟S3,請參閱圖4,在所述內層板10相對的兩側提供第一基板220和第二基板230。 In step S3, please refer to FIG. 4. A first substrate 220 and a second substrate 230 are provided on opposite sides of the inner layer board 10.

所述第一基板220包括第一基層21、設置於所述第一基層21一側的第一導電線路層22以及設置於所述第一基層21另一側的第三金屬層222。所述第一導電線路層22上形成有第一凹槽221,暴露所述第一基層21的一部分。 The first substrate 220 includes a first base layer 21 , a first conductive circuit layer 22 disposed on one side of the first base layer 21 , and a third metal layer 222 disposed on the other side of the first base layer 21 . A first groove 221 is formed on the first conductive circuit layer 22 to expose a portion of the first base layer 21 .

所述第二基板230包括第二基層31、設置於所述第二基層31一側的第三導電線路層32以及設置於所述第二基層31另一側的第四金屬層232。所述第三導電線路層32上形成有第二凹槽321,暴露所述第二基層31的一部分。 The second substrate 230 includes a second base layer 31 , a third conductive circuit layer 32 disposed on one side of the second base layer 31 , and a fourth metal layer 232 disposed on the other side of the second base layer 31 . A second groove 321 is formed on the third conductive circuit layer 32 to expose a portion of the second base layer 31 .

步驟S4,請參閱圖5A,在所述第一導電線路層22上電鍍形成第一電鍍凸塊51,並在所述第二導電層12上電鍍形成第二電鍍凸塊52。 Step S4 , please refer to FIG. 5A , electroplating is performed on the first conductive circuit layer 22 to form first electroplating bumps 51 , and electroplating is performed on the second conductive layer 12 to form second electroplating bumps 52 .

請參閱圖5B-1,所述第一電鍍凸塊51呈環形設置於所述第一導電線路層22上。所述第二電鍍凸塊也呈環形設置於所述第二導電層上。 Referring to FIG. 5B-1 , the first electroplating bumps 51 are annularly disposed on the first conductive circuit layer 22 . The second electroplated bumps are also annularly disposed on the second conductive layer.

請參閱圖5B-2,所述第一導電線路層22上電鍍形成複數第一電鍍凸塊51,複數第一電鍍凸塊51呈環形排列。所述第二導電層上也可電鍍形成複數第二電鍍凸塊,複數第二電鍍凸塊呈環形排列。 Referring to FIG. 5B-2 , a plurality of first electroplating bumps 51 are formed by electroplating on the first conductive circuit layer 22 , and the plurality of first electroplating bumps 51 are arranged in a ring. A plurality of second electroplating bumps can also be formed on the second conductive layer by electroplating, and the plurality of second electroplating bumps are arranged in a ring.

請參閱圖5C,在所述第一導電層11上形成第三凹槽11a,並在所述第三導電線路層32上形成第四凹槽32a。所述第三凹槽11a用於容納所述第一電鍍凸塊51的一部分,所述第四凹槽32a用於容納所述第二電鍍凸塊52的一部分。 Referring to FIG. 5C , a third groove 11 a is formed on the first conductive layer 11 , and a fourth groove 32 a is formed on the third conductive circuit layer 32 . The third groove 11 a is used to accommodate a part of the first electroplating bump 51 , and the fourth groove 32 a is used to accommodate a part of the second electroplating bump 52 .

步驟S5,請參閱圖6,在所述第一導電層11和所述第三導電線路層32上分別印刷形成第一導電凸塊61和第二導電凸塊62。所述第一導電凸塊61和所述第二導電凸塊62呈環形。請參閱圖7,在所述第三導電線路層32上印刷形成了複數第二導電凸塊62,複數第二導電凸塊62相互間隔並呈環形排列。 所述第一導電層上也可電鍍形成相互間隔並呈環形排列的複數第一導電凸塊61。 Step S5 , please refer to FIG. 6 , printing first conductive bumps 61 and second conductive bumps 62 on the first conductive layer 11 and the third conductive circuit layer 32 respectively. The first conductive bump 61 and the second conductive bump 62 are annular. Referring to FIG. 7 , a plurality of second conductive bumps 62 are printed on the third conductive circuit layer 32 . The plurality of second conductive bumps 62 are spaced apart from each other and arranged in a ring. The first conductive layer may also be electroplated to form a plurality of first conductive bumps 61 spaced apart from each other and arranged in a ring.

步驟S6,請參閱圖8,提供第一膠層41和第二膠層42,將所述第一基板220、所述第一膠層41、所述內層板10、所述第二膠層42和所述第二基板230依序壓合在一起。所述第一膠層41開設有第一開口401,以在壓合時供所述第一導電凸塊61和所述第一電鍍凸塊51穿過。所述第二膠層42開設有第二開口402,以在壓合時供所述第二導電凸塊62和所述第二電鍍凸塊52穿過。 Step S6, please refer to Figure 8, provide a first glue layer 41 and a second glue layer 42, and combine the first substrate 220, the first glue layer 41, the inner layer board 10, and the second glue layer. 42 and the second substrate 230 are pressed together in sequence. The first adhesive layer 41 has a first opening 401 for allowing the first conductive bump 61 and the first plating bump 51 to pass through during lamination. The second adhesive layer 42 has a second opening 402 for allowing the second conductive bump 62 and the second plating bump 52 to pass through during lamination.

壓合後,所述第一電鍍凸塊51環繞所述通孔101設置,所述第一導電凸塊61環繞所述第一電鍍凸塊51設置且所述第一導電凸塊61遠離所述內層板10的一端與所述第一導電線路層22相接觸,所述第二電鍍凸塊52環繞所述通孔101設置,所述第二導電凸塊62環繞所述第二電鍍凸塊61設置且所述第二導電凸塊62遠離所述第二基板230的一端與所述第二導電層12相接觸。所述第一導電線路層22、所述第一電鍍凸塊51、所述第一導電凸塊61、所述第一導電層11的第一屏蔽部111、所述金屬鍍層16、所述第二導電層12的第二屏蔽部121、所述第二電鍍凸塊52、所述第二導電凸塊62以及所述第三導電線路層32包圍形成一空腔102。 After pressing, the first electroplating bump 51 is arranged around the through hole 101 , the first conductive bump 61 is arranged around the first electroplating bump 51 and the first conductive bump 61 is away from the One end of the inner layer board 10 is in contact with the first conductive circuit layer 22, the second electroplating bumps 52 are arranged around the through holes 101, and the second conductive bumps 62 surround the second electroplating bumps 61 is disposed and one end of the second conductive bump 62 away from the second substrate 230 is in contact with the second conductive layer 12 . The first conductive circuit layer 22, the first electroplating bump 51, the first conductive bump 61, the first shielding portion 111 of the first conductive layer 11, the metal plating layer 16, the first A cavity 102 is formed around the second shielding portion 121 of the two conductive layers 12 , the second plating bumps 52 , the second conductive bumps 62 and the third conductive circuit layer 32 .

步驟S7,請參閱圖9,對所述第一基板的第三金屬層和所述第二基板的第四金屬層進行線路製作分別形成第二導電線路層23和第四導電線路層33,得到第一外層板20和第二外層板30;並形成依次貫通所述第一外層板20、所述第一膠層41、所述內層板10、所述第二膠層42、所述第二外層板30的電鍍孔110。 Step S7, please refer to Figure 9, perform circuit fabrication on the third metal layer of the first substrate and the fourth metal layer of the second substrate to form a second conductive circuit layer 23 and a fourth conductive circuit layer 33, respectively, to obtain The first outer layer plate 20 and the second outer layer plate 30; and form a structure that sequentially penetrates the first outer layer plate 20, the first glue layer 41, the inner layer plate 10, the second glue layer 42, the third Two plating holes 110 of the outer layer board 30 .

步驟S8,請參閱圖1A,在所述第一外層板20上形成貫通孔201,並將主動元件70和天線80分別組裝於所述第一外層板20和所述第二外層板30上,得到所述電波傳輸板100。 Step S8, please refer to FIG. 1A, forming a through hole 201 on the first outer layer board 20, and assembling the active element 70 and the antenna 80 on the first outer layer board 20 and the second outer layer board 30, respectively. The radio wave transmission board 100 is obtained.

本申請實施方式提供的電波傳輸板100及其製作方法中,藉由設置所述第一導電凸塊61和所述第一電鍍凸塊51,可有效阻擋所述第一膠層41 流入所述空腔102中;藉由設置所述第二導電凸塊62和所述第二電鍍凸塊52,可有效阻擋所述第二膠層42流入所述空腔102中。且所述第一導電凸塊61和所述第一電鍍凸塊51中的一者直接形成於所述內層板10和所述第一外層板20中的一者上,另一者直接形成於所述內層板10和所述第一外層板20中的另一者上;所述第二導電凸塊62和所述第二電鍍凸塊52中的一者直接形成於所述內層板10和所述第二外層板30中的一者上,另一者直接形成於所述內層板10和所述第二外層板30中的另一者上,可減少所述空腔102中傳遞的電波信號從所述內層板10和所述第一外層板20/所述第二外層板30之間的空間泄露的風險。 In the radio wave transmission board 100 and its manufacturing method provided in the embodiment of the present application, by providing the first conductive bump 61 and the first electroplating bump 51, the first adhesive layer 41 can be effectively blocked Flow into the cavity 102; by providing the second conductive bump 62 and the second electroplating bump 52, the second glue layer 42 can be effectively blocked from flowing into the cavity 102. And one of the first conductive bumps 61 and the first electroplating bumps 51 is directly formed on one of the inner layer board 10 and the first outer layer board 20 , and the other one is directly formed on On the other of the inner layer board 10 and the first outer layer board 20; one of the second conductive bumps 62 and the second electroplating bumps 52 is directly formed on the inner layer One of the plate 10 and the second outer plate 30 is formed directly on the other of the inner plate 10 and the second outer plate 30 , which can reduce the cavity 102 There is a risk that the radio wave signal transmitted in the circuit leaks from the space between the inner layer board 10 and the first outer layer board 20 / the second outer layer board 30 .

另外,本領域技術人員還可在本發明精神內做其它變化,當然,這些依據本發明精神所做的變化,都應包含在本發明所要求保護的範圍內。 In addition, those skilled in the art can also make other changes within the spirit of the present invention. Of course, these changes made based on the spirit of the present invention should be included in the scope of protection claimed by the present invention.

100:電波傳輸板 100: Radio wave transmission board

10:內層板 10:Inner layer board

20:第一外層板 20:First outer layer board

30:第二外層板 30:Second outer layer board

41:第一膠層 41: First glue layer

42:第二膠層 42:Second glue layer

51:第一電鍍凸塊 51: First plating bump

52:第二電鍍凸塊 52: Second plating bump

61:第一導電凸塊 61: First conductive bump

62:第二導電凸塊 62: Second conductive bump

11:第一導電層 11: First conductive layer

12:第二導電層 12: Second conductive layer

13:絕緣層 13:Insulation layer

14:第三導電層 14:Third conductive layer

101:通孔 101:Through hole

16:金屬鍍層 16:Metal plating

111:第一屏蔽部 111:First shielding department

121:第二屏蔽部 121:Second shielding department

21:第一基層 21:First grassroots level

22:第一導電線路層 22: First conductive circuit layer

23:第二導電線路層 23: Second conductive circuit layer

24:第一導電結構 24: First conductive structure

31:第二基層 31:The second grassroots level

32:第三導電線路層 32: The third conductive circuit layer

33:第四導電線路層 33: The fourth conductive circuit layer

34:第二導電結構 34: Second conductive structure

221:第一凹槽 221: first groove

321:第二凹槽 321: Second groove

201:貫通孔 201:Through hole

90:填充件 90: Filling parts

110:電鍍孔 110: Plating hole

70:主動元件 70:Active components

80:天線 80:Antenna

Claims (9)

一種電波傳輸板,其中,包括:內層板,設有通孔,所述通孔的孔壁設置有金屬鍍層;第一外層板,設置於所述內層板的一側並遮蓋所述通孔的一端;第二外層板,設置於所述內層板背離所述第一外層板的一側並遮蓋所述通孔的另一端;第一電鍍凸塊,設置於所述內層板和所述第一外層板之間並環繞所述通孔設置;第一導電凸塊,夾設於所述內層板和所述第一外層板之間並環繞所述第一電鍍凸塊設置;第一膠層,夾設於所述內層板和所述第一外層板之間並位於所述第一導電凸塊遠離所述第一電鍍凸塊的一側;第二電鍍凸塊,設置於所述內層板和所述第二外層板之間並環繞所述通孔設置;第二導電凸塊,夾設於所述內層板和所述第二外層板之間並環繞所述第二電鍍凸塊設置;第二膠層,夾設於所述內層板和所述第二外層板之間並位於所述第二導電凸塊遠離所述第二電鍍凸塊的一側;其中,所述金屬鍍層、所述第一電鍍凸塊、所述第一導電凸塊、所述第一外層板、所述第二電鍍凸塊、所述第二導電凸塊和所述第二外層板包圍形成有佈滿空氣的空腔,所述電波傳輸板能以所述空腔內的空氣作為傳導介質來傳遞電波信號;所述內層板包括第一導電層、第二導電層和位於所述第一導電層和所述第二導電層之間的絕緣層,所述第一外層板包括第一基層和設置於所述第一基層相對二表面上的第一導電線路層和第二導電線路層;所述第一導電凸塊的兩端分別與所述第一導電層和所述第一導電線路層相連接。 A radio wave transmission board, which includes: an inner layer board provided with a through hole, the hole wall of the through hole is provided with a metal plating layer; a first outer layer board provided on one side of the inner layer board and covering the through hole One end of the hole; a second outer layer plate, disposed on the side of the inner layer plate away from the first outer layer plate and covering the other end of the through hole; a first electroplating bump, disposed on the inner layer plate and A first conductive bump is sandwiched between the inner layer plate and the first outer layer plate and is arranged around the first electroplating bump; The first glue layer is sandwiched between the inner layer board and the first outer layer board and is located on the side of the first conductive bump away from the first electroplating bump; the second electroplating bump is provided is disposed between the inner layer board and the second outer layer board and surrounds the through hole; a second conductive bump is sandwiched between the inner layer board and the second outer layer board and surrounds the through hole. A second electroplating bump is provided; a second glue layer is sandwiched between the inner layer board and the second outer layer board and is located on the side of the second conductive bump away from the second electroplating bump; Wherein, the metal plating layer, the first electroplating bump, the first conductive bump, the first outer layer plate, the second electroplating bump, the second conductive bump and the second The outer layer board is surrounded by a cavity filled with air, and the radio wave transmission board can use the air in the cavity as a conductive medium to transmit radio wave signals; the inner layer board includes a first conductive layer, a second conductive layer and An insulating layer is located between the first conductive layer and the second conductive layer. The first outer layer board includes a first base layer and a first conductive circuit layer and a third conductive circuit layer disposed on opposite surfaces of the first base layer. Two conductive circuit layers; both ends of the first conductive bump are connected to the first conductive layer and the first conductive circuit layer respectively. 如請求項1所述的電波傳輸板,其中,所述第二外層板包括第二基層和設置於所述第二基層相對二表面上的第三導電線路層和第四導電線路層,所述第二導電凸塊的兩端分別與所述第二導電層和所述第三導電線路層相連接。 The radio wave transmission board according to claim 1, wherein the second outer layer board includes a second base layer and a third conductive circuit layer and a fourth conductive circuit layer disposed on opposite surfaces of the second base layer, Two ends of the second conductive bump are connected to the second conductive layer and the third conductive circuit layer respectively. 如請求項2所述的電波傳輸板,其中,所述第一導電線路層上設置有暴露所述第一基層的部分的第一凹槽,所述第一凹槽與所述空腔相連通;所述第三導電線路層上設置有暴露所述第二基層的部分的第二凹槽,所述第二凹槽與所述空腔相連通。 The radio wave transmission board according to claim 2, wherein the first conductive circuit layer is provided with a first groove that exposes a portion of the first base layer, and the first groove is connected to the cavity. ; The third conductive circuit layer is provided with a second groove that exposes a portion of the second base layer, and the second groove is connected to the cavity. 如請求項2所述的電波傳輸板,其中,所述第一導電層或所述第一導電線路層上開設有第三凹槽,所述第一電鍍凸塊的一端容置於所述第三凹槽中;所述第二導電層或所述第三導電線路層上開設有第四凹槽,所述第二電鍍凸塊的一端容置於所述第四凹槽中。 The radio wave transmission board according to claim 2, wherein a third groove is opened on the first conductive layer or the first conductive circuit layer, and one end of the first electroplating bump is accommodated in the third groove. Among the three grooves, a fourth groove is provided on the second conductive layer or the third conductive circuit layer, and one end of the second electroplated bump is accommodated in the fourth groove. 如請求項1所述的電波傳輸板,其中,所述電波傳輸板包括複數第一電鍍凸塊,所述複數第一電鍍凸塊環繞所述通孔間隔設置;或者,所述電波傳輸板包括複數第一導電凸塊,所述複數第一導電凸環繞所述第一電鍍凸塊間隔設置;或者,所述電波傳輸板包括複數第二電鍍凸塊,所述複數第二電鍍凸塊環繞所述通孔間隔設置;或者,所述電波傳輸板包括複數第二導電凸塊,所述複數第二導電凸塊環繞所述第二電鍍凸塊間隔設置。 The radio wave transmission board according to claim 1, wherein the radio wave transmission board includes a plurality of first electroplating bumps, and the plurality of first electroplating bumps are spaced around the through holes; or, the radio wave transmission board includes A plurality of first conductive bumps, the plurality of first conductive bumps are arranged at intervals around the first electroplating bumps; or the radio wave transmission plate includes a plurality of second electroplating bumps, the plurality of second electroplating bumps surround the The through holes are arranged at intervals; or, the radio wave transmission board includes a plurality of second conductive bumps, and the plurality of second conductive bumps are arranged at intervals around the second electroplating bumps. 如請求項1所述的電波傳輸板,其中,所述第一外層板上開設有貫通孔,所述貫通孔連通所述空腔與外部環境,且所述貫通孔中設置有填充件以密封所述空腔。 The radio wave transmission board according to claim 1, wherein the first outer layer plate is provided with a through hole, the through hole connects the cavity and the external environment, and a filling piece is provided in the through hole for sealing the cavity. 如請求項1所述的電波傳輸板,其中,所述電波傳輸板還包括主動元件和天線,所述主動元件和所述天線分別設置於所述第一外層板和所述第二外層板背離所述內層板的一側,且所述主動元件的位置和所述天線的位置均與所述空腔的位置相對應。 The radio wave transmission board according to claim 1, wherein the radio wave transmission board further includes an active element and an antenna, and the active element and the antenna are respectively arranged on the first outer layer board and the second outer layer board away from each other. One side of the inner layer board, the position of the active element and the position of the antenna all correspond to the position of the cavity. 一種電波傳輸板的製作方法,其中,包括以下步驟: 提供內層板,所述內層板設有貫通其相對的兩側的通孔,所述通孔的孔壁形成有金屬鍍層;提供第一基板,在所述第一基板和所述內層板中的一者上電鍍形成第一電鍍凸塊,並在所述第一基板和所述內層板中的另一者上印刷形成第一導電凸塊;提供第二基板,在所述第二基板和所述第內層板中的一者上電鍍形成第二電鍍凸塊,並在所述第二基板和所述第內層板中的另一者上印刷形成第二導電凸塊;提供開設有第一開口的第一膠層和開設有第二開口的第二膠層,其中,所述第一開口用於供所述第一導電凸塊和所述第一電鍍凸塊穿過,所述第二開口用於供所述第二導電凸塊和所述第二電鍍凸塊穿過;將所述第一基板、所述第一膠層、所述內層板、所述第二膠層和所述第二基板依序壓合在一起,其中,所述第一電鍍凸塊位於所述第一基板和所述內層板之間並環繞所述通孔設置,所述第一導電凸塊夾設於所述第一基板和所述內層板之間並環繞所述第一電鍍凸塊設置,所述第二電鍍凸塊位於所述第二基板和所述內層板之間並環繞所述通孔設置,所述第二導電凸塊夾設於所述第二基板和所述內層板之間並環繞所述通孔設置;對所述第一基板和所述第二基板分別進行線路製作得到第一外層板和第二外層板。 A method for making a radio wave transmission board, which includes the following steps: Provide an inner layer board, the inner layer board is provided with through holes penetrating its opposite sides, and the hole wall of the through hole is formed with a metal plating layer; provide a first substrate, between the first substrate and the inner layer A first electroplating bump is formed by electroplating on one of the boards, and a first conductive bump is formed by printing on the other of the first substrate and the inner layer board; a second substrate is provided, and the first electroplating bump is formed on the second substrate. Electroplating to form a second electroplating bump on one of the two substrates and the third inner layer board, and printing to form a second conductive bump on the other of the second substrate and the third inner layer board; A first glue layer with a first opening and a second glue layer with a second opening are provided, wherein the first opening is used for the first conductive bump and the first plating bump to pass through , the second opening is used for the second conductive bump and the second plating bump to pass through; connect the first substrate, the first adhesive layer, the inner layer board, the third The two adhesive layers and the second substrate are pressed together in sequence, wherein the first electroplating bump is located between the first substrate and the inner layer board and is arranged around the through hole, and the first plating bump is A conductive bump is sandwiched between the first substrate and the inner layer board and is arranged around the first electroplating bump. The second electroplating bump is located between the second substrate and the inner layer board. The second conductive bump is sandwiched between the second substrate and the inner layer board and arranged around the through hole; the first substrate and the The second substrate is separately manufactured with circuits to obtain a first outer layer board and a second outer layer board. 如請求項8所述的電波傳輸板的製作方法,其中,還包括:在所述第一基板和所述內層板中未形成所述第一電鍍凸塊的一者上形成第一凹槽,所述第一電鍍凸塊的一端容置於所述第一凹槽中;在所述第二基板和所述內層板中未形成所述第二電鍍凸塊的一者上形成第二凹槽,所述第二電鍍凸塊的一端容置於所述第二凹槽中。 The manufacturing method of a radio wave transmission board according to claim 8, further comprising: forming a first groove on one of the first substrate and the inner layer board on which the first plating bump is not formed. , one end of the first electroplating bump is accommodated in the first groove; and a second electroplating bump is formed on one of the second substrate and the inner layer board where the second electroplating bump is not formed. A groove, one end of the second electroplating bump is accommodated in the second groove.
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TW202017441A (en) * 2018-10-17 2020-05-01 先豐通訊股份有限公司 Electric wave transmission board

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