TWI824286B - Vacuum sealing device and drive transmission device - Google Patents

Abstract

The vacuum sealing device of the present invention includes a housing (11), a rotation transmission member (12), a sealing member (13), and an outer cooling passage (19). The casing (11) is arranged across the vacuum side and the atmosphere side inside and outside the vacuum chamber. The rotation transmission member (12) penetrates the housing (11) to transmit rotational power from the atmosphere side to the vacuum side. The sealing member (13) is in sliding contact with the outer peripheral surface of the rotation transmission member (12) to seal between the housing (11) and the rotation transmission member (12). The outer cooling passage (19) is formed in a radially outer region of the seal support portion (17) of the housing (11) supporting the seal member (13), and a cooling fluid flows therein.

Description

Vacuum sealing device and drive transmission device

The present invention relates to a vacuum sealing device and a drive transmission device that suppress the entry of atmosphere into a vacuum chamber and transmit rotational power from the outside to the inside of the vacuum chamber. This application claims priority to Japanese Patent Application No. 2020-180316 filed on October 28, 2020, and the content is incorporated herein by reference.

In manufacturing plants such as semiconductor wafers or liquid crystal substrates, particles are not preferred and require delicate handling. Therefore, the operating unit of a transfer robot or the like may be disposed in a vacuum chamber (a room in which the inside is in a vacuum state). The rotational power of the drive transmission device is transmitted from the outside of the vacuum chamber to the actuating part. A driving device such as a motor in the drive transmission device is arranged outside the vacuum chamber. The rotation transmission member in the drive transmission device penetrates the partition wall between the vacuum chambers and is connected to the actuating part in the vacuum chamber. In order to restrict atmospheric air from entering the inside of the vacuum chamber through the gap between the through hole of the partition wall between the vacuum chambers and the rotation transmission member, the drive transmission device is equipped with a vacuum sealing device (for example, see Patent Document 1).

The vacuum sealing device described in Patent Document 1 includes a housing, a rotation transmission member, and a direct contact sealing member. The casing is arranged across the inside and outside of the vacuum chamber (vacuum side and atmosphere side). The rotation transmission member penetrates the housing to transmit rotational power from the atmosphere side to the vacuum side. The sealing member is in sliding contact with the outer peripheral surface of the rotation transmission member to seal the space between the housing and the rotation transmission member. A cooling passage is formed in the housing so as to face the sliding contact portion between the outer peripheral surface of the rotation transmission member and the sealing member from the atmospheric side. Cooling fluid such as cooling air or coolant flows through the cooling passage.

In the vacuum sealing device, as the rotation transmission part is driven, the sealing member mounted on the housing comes into sliding contact with the outer peripheral surface of the rotation transmission member. Thereby, the atmosphere can be restricted from entering the vacuum chamber through between the rotation transmission member and the housing. The sealing member may deteriorate due to heat generated from sliding contact with the rotation transmission member. If the sealing member deteriorates, the sealing performance of the sealing member may be reduced. Therefore, in the vacuum sealing device, by flowing the cooling fluid through the sliding contact portion between the outer peripheral surface of the rotation transmission member and the sealing member, deterioration of the sealing member due to heat generation is suppressed in advance. [Prior technical literature] [Patent Document]

[Patent Document 1] International Publication No. 2007/080986

[Problem to be solved by the invention]

The vacuum sealing device described in Patent Document 1 has a cooling flow path formed on the atmospheric side of the casing at a position facing the sliding contact portion between the rotation transmission member and the sealing member. Therefore, the portion of the sealing member disposed on the vacuum side is difficult to be cooled by the cooling fluid. In particular, when a plurality of sealing members are arranged in the axial direction between the housing and the rotation transmission member, the cooling fluid cannot contact the sealing member arranged on the vacuum side at all. As a result, heat due to sliding contact is likely to accumulate in a part of the sealing member.

The present invention provides a vacuum sealing device and a drive transmission device that can efficiently remove heat from a sealing member in a large area spanning the atmosphere side and the vacuum side of the sealing member. [Technical means to solve problems]

(1) A vacuum sealing device according to one aspect of the present invention includes: a casing disposed across the inside of the vacuum chamber, that is, the vacuum side, and the outside of the vacuum chamber, that is, the atmosphere side; and a rotation transmission member that penetrates the above-mentioned A housing is configured to rotate around a central axis to transmit rotational power from the atmosphere side to the vacuum side; and a sealing member is configured to be in sliding contact with the outer peripheral surface of the rotation transmission member to connect the housing to the rotation The transmission members are sealed; the housing is provided with a seal support portion that supports the seal member; and an outer cooling passage for cooling fluid to flow is formed in a region located radially outward of the seal support portion in the housing.

With the above-mentioned structure, the rotation transmission member into which the rotation power is input from the atmosphere side transmits the rotation power to necessary parts in the vacuum chamber. At this time, the sealed state is maintained between the housing and the rotation transmission member by the sealing member. The radially outer region of the seal support portion of the housing is cooled by cooling fluid flowing through the outer cooling passages. Therefore, the frictional heat easily accumulated in the base portion on the vacuum side of the sealing member can be removed by the cooling fluid flowing through the outer cooling channel.

(2) The housing may be provided with an inner cooling passage for allowing cooling fluid to flow inside, and the inner cooling passage may face from the atmospheric side the sliding contact portion of the sealing member that is in contact with the rotation transmission member, and the rotation transmission member. Pass components.

(3) A liquid may be introduced into the outer cooling passage as the cooling fluid, and a gas may be introduced into the inner cooling passage as the cooling fluid.

(4) A plurality of the sealing members may be arranged between the housing and the rotation transmission member along the axial direction of the rotation transmission member.

(5) The sealing member may include: a base portion fixed to the seal support portion; an annular sealing portion extending radially inward from the base portion and in sliding contact with the outer peripheral surface of the rotation transmission member; and The core rod is embedded from the sealing part to the base part.

(6) The core rod may be in contact with the housing.

(7) The seal support part may include: an inner peripheral wall facing the outer peripheral surface of the rotation transmission member; and an end wall extending radially inward from one axial end of the inner peripheral wall; and The core rod is in contact with the end wall.

(8) The above-mentioned housing may include: a first housing having a groove opening toward one end side in the axial direction; and a second housing that blocks the opening of the groove and forms the outer side together with the groove Cooling passage; the second housing is provided with: a peripheral wall that constitutes a part of the inner cooling passage; and a protruding portion that is provided at one end of the peripheral wall and is closely embedded in the inner surface forming the groove, at least on the radially inner side. face.

(9) A drive transmission device according to one aspect of the present invention includes: a drive device disposed outside the vacuum chamber, that is, on the atmosphere side; and a vacuum sealing device, which seals the quilt disposed inside the vacuum chamber, that is, on the vacuum side. The driving part transmits the power of the driving device and restricts the entry of atmosphere into the vacuum chamber; the vacuum sealing device includes: a casing arranged across the vacuum side and the atmosphere side of the vacuum chamber; and a rotation transmission member with and a sealing member arranged in sliding contact with the outer circumferential surface of the rotation transmission member to rotate around the central axis and transmit rotational power from the driving device to the driven part; It is sealed with the rotation transmission member; the housing has a seal support portion that supports the seal member; and an outer cooling passage for cooling fluid to flow is formed in a region located radially outward of the seal support portion in the housing. [Effects of the invention]

The above-mentioned vacuum seal device causes the cooling fluid to flow through the outer cooling passage outside the radially outer region of the seal support portion provided in the housing. Therefore, the heat of the sealing member is efficiently removed in a larger area of the sealing member spanning from the atmosphere side to the vacuum side. Therefore, when the above-mentioned vacuum sealing device is used, the sealing performance of the sealing member can be maintained well for a long time.

The above-mentioned drive transmission device can efficiently remove the heat of the sealing member through the vacuum sealing device in a larger area spanning the atmosphere side and the vacuum side of the self-sealing member. Therefore, the sealing performance of the sealing member can be maintained well for a long time, and the power of the driving device can be transmitted to the driven part in the vacuum chamber.

Next, embodiments of the present invention will be described based on the drawings.

FIG. 1 is a partially sectional side view of the drive transmission device 1 of the vacuum sealing device 10 according to the embodiment. The drive transmission device 1 is installed in a part of the partition wall 3 that separates the inside and outside of the vacuum chamber 2 (a room in a vacuum state). An actuating device (not shown in the figure) (transport robot, etc.) is provided inside the vacuum chamber 2 . The power (rotational force) of the drive transmission device 1 is transmitted inside the vacuum chamber 2 to the driven part of the actuator. The actuator receives power from the drive transmission device 1 and operates an actuating part (a robot arm, etc.) in the vacuum chamber 2 .

The drive transmission device 1 includes a drive device 4 and a vacuum sealing device 10 . The drive device 4 is arranged on the atmosphere side (outside the vacuum chamber 2). The vacuum sealing device 10 restricts the atmosphere from entering the vacuum chamber 2 and transmits the power of the driving device 4 to the actuating device (driven part) in the vacuum chamber 2 .

The drive device 4 includes an electric motor 5 that generates rotational driving force, and a speed reducer 6 that decelerates the rotational force of the motor 5 at a specific reduction ratio and outputs it from the output shaft 6a. O1 in the figure is the central axis of the output shaft 6a. In the following description, the direction along the central axis o1 is called "axial direction" and the direction orthogonal to the central axis o1 is called "radial direction". With respect to the axially intermediate partition wall 3, the atmospheric side is called the "axial outside" and the opposite side is called the "axial inside". The side facing the central axis o1 in the radial direction is called the "radial inner side", and the opposite side is called the "radial outer side".

In this embodiment, the driving device 4 is composed of the motor 5 and the reducer 6 , but the driving device 4 may be composed of the motor 5 only. The motor 5 is not limited to an electric motor, and may also be a pneumatic or hydraulic motor.

FIG. 2 is a partially enlarged cross-sectional view of the vacuum sealing device 10 of FIG. 1 . Figure 3 is a cross-sectional view along line III-III of Figure 2. The vacuum sealing device 10 includes a substantially cylindrical housing 11 , a rotation transmission member 12 , and a sealing member 13 . The casing 11 is disposed across the inside and outside of the vacuum chamber 2 (the vacuum side and the atmosphere side). The rotation transmission member 12 penetrates the housing 11 in the axial direction and transmits rotational power from the atmosphere side (outside of the vacuum chamber 2) to the vacuum side (inside the vacuum chamber 2). The sealing member 13 seals between the housing 11 and the rotation transmission member 12 .

The housing 11 includes a first housing 11A fixed to the partition wall 3 in a state of penetrating a part of the partition wall 3, and a second housing 11B integrally connected to the axially outer end of the first housing 11A. The first housing 11A and the second housing 11B are formed of metal materials.

The first housing 11A has a perforated disk-shaped base wall 14 that is fitted into the through hole 3 a of the partition wall 3 (see FIG. 1 ), and a cylindrical wall 15 that protrudes axially outward from the base wall 14 . The space between the base wall 14 and the through hole 3 a of the partition wall 3 is sealed by a sealing member 90 (see FIG. 1 ). A through hole 16 axially penetrating the base wall 14 and the cylindrical wall 15 is formed in the radial central region of the first housing 11A. The inner diameter of the axial center region 16 c of the through hole 16 is smaller than the axial inner region of the through hole 16 (region on the vacuum chamber 2 side). The inner diameter of the axially outer region of the through-hole 16 is enlarged in a step-like manner relative to the axially central region 16c. The axially outer area of the through hole 16 is a seal support portion 17 that supports the seal member 13 .

A groove 18 is formed in the first housing 11A. The groove 18 is arranged in a radially outer region of the seal support portion 17 in the first housing 11A. The groove 18 is formed in a substantially C-shape when viewed from the front. The groove 18 opens at the axially outer end surface (one axial end side) of the cylindrical wall 15 . The groove 18 is formed axially deeper than the formation area of the seal support portion 17 and has a sufficient radial height (a radial height that is sufficiently higher than the radial height of the sealing member 13 ). The groove 18 is closed by the axially inner end of the second housing 11B. The outer cooling passage 19 is formed by the space portion surrounded by the groove 18 and the end portion of the second housing 11B. Coolant (liquid) is introduced into the outside cooling passage 19 as a cooling fluid. As shown in FIG. 3 , both circumferential ends of the groove 18 are separated by partition walls 76 . A groove (not shown) is formed at an axially outer end of the partition wall 76 . The groove annularly connects the radially inner circumferential surface of the inner surface forming the groove 18 (the portion of the groove 18 divided by the partition wall 76 is connected in the circumferential direction).

The outer cooling passage 19 is formed in a substantially C-shape as shown in FIG. 3 . An introduction hole 20a is provided at one end of the outer cooling passage 19 in the circumferential direction. A discharge hole 20b is provided at the other end of the outer cooling passage 19 in the circumferential direction. The introduction hole 20a and the discharge hole 20b penetrate the cylindrical wall 15 in the radial direction. A cooling pipe for the coolant is connected to the inlet hole 20a. A coolant discharge pipe is connected to the discharge hole 20b. The introduction hole 20a and the discharge hole 20b are arranged on the outer peripheral surface of the cylindrical wall 15 at positions close to each other in the circumferential direction. Therefore, the supply pipe and the discharge pipe are concentrated at one location on the outer peripheral surface of the cylindrical wall 15 .

As shown in FIG. 2 , the second housing 11B has a cylindrical peripheral wall 21 and an end connecting portion 22 connected to the end of the cylindrical wall 15 .

The end connecting portion 22 is integrally formed on the axially inner end of the peripheral wall 21 . The end connection part 22 has a joining flange 23 and a blocking part 24. The joint flange 23 is bolt-fastened to the cylindrical wall 15 in a state of contacting the end surface of the cylindrical wall 15 . The blocking portion 24 is formed in an annular shape. The closing portion 24 closes the opening of the groove 18 . An annular protrusion 25 in front view is integrally formed on the inner peripheral edge of the blocking portion 24 . The protruding portion 25 protrudes axially inward from the blocking portion 24 . The protruding portion 25 spans the radially inner circumferential surface and the groove of the inner surface forming the groove 18 and is tightly fitted into the groove. The opening of the groove 18 is closed by the end connecting portion 22 . Reference numeral 91 in FIG. 2 is a sealing member that seals between the first housing 11A and the second housing 11B at the radially inner and outer positions of the groove 18 .

Inside the peripheral wall 21, a housing of the reducer 6 is embedded. The second housing 11B is fixed to the speed reducer 6 . The inner space portion of the peripheral wall 21 forms an inner cooling passage 26 facing the sliding contact portion of the sealing member 13 . The axial outer side of the inner cooling passage 26 is blocked by the speed reducer 6 . In the inner cooling passage 26, cooling gas (for example, cooling air) is introduced as a cooling fluid. An introduction hole 27 a for introducing cooling gas into the inner cooling passage 26 and a discharge hole 27 b for discharging the cooling gas from the inner cooling passage 26 are formed at two positions spaced apart in the circumferential direction of the peripheral wall 21 .

The introduction hole 27a and the discharge hole 27b are formed at positions separated by approximately 180° on the circumference of the peripheral wall 21. Like the outer cooling passage 19 , the inner cooling passage 26 may be formed into a substantially C-shape in front view. At this time, the introduction hole 27a and the discharge hole 27b are formed at positions close to each other on the circumference of the peripheral wall 21. Thereby, the supply pipe and the discharge pipe of the cooling gas are concentrated at one location on the outer peripheral surface of the peripheral wall 21 .

The rotation transmission member 12 is composed of a bottomed cylindrical metal block. The output shaft 6 a of the speed reducer 6 is connected to the rotation transmission member 12 via the key 28 . The rotation transmission member 12 is configured to be rotatable integrally with the output shaft 6a around the central axis o1. The rotation transmission member 12 has a flange portion 30 and a cylinder portion 31 . The flange portion 30 is fastened to the coupling member 29 on the bottom side (axially inner side) of the rotation transmission member 12 . The coupling member 29 is connected to the driven part of the actuator in the vacuum chamber 2 . The cylindrical portion 31 protrudes axially outward from the root of the flange portion 30 . The rotation transmission member 12 is inserted into the through hole 16 of the housing 11 (first housing 11A) in a state connected to the output shaft 6a. The outer peripheral surface of the cylindrical portion 31 is radially opposed to the axial central region 16 c of the through hole 16 and the seal support portion 17 .

FIG. 4 is an enlarged cross-sectional view of part IV of FIG. 2 . As shown in FIG. 4 , the seal support portion 17 has an inner peripheral wall 17 a that faces the outer peripheral surface of the cylinder portion 31 in the radial direction, and an end wall 17 b that faces in the radial direction from the axially inner end of the inner peripheral wall 17 a. Medial extension. In this embodiment, the two seal members 13 are installed on the seal support part 17 so as to be aligned in the axial direction. The sealing member 13 seals between the first housing 11A and the outer peripheral surface of the cylindrical portion 31 . The two sealing members 13 have the same structure.

The sealing member 13 includes a cylindrical base portion 13a, an annular sealing portion 13b, and a spring 13c. The base 13a is embedded inside the inner peripheral wall 17a. The sealing portion 13b extends radially inward from the axially inner end of the base portion 13a, and then extends axially outward. The inner peripheral surface of the sealing portion 13b is in sliding contact with the outer peripheral surface of the rotation transmission member 12 (tube portion 31). The portion of the sealing portion 13b that is in sliding contact with the outer peripheral surface of the rotation transmission member 12 (hereinafter referred to as the "sliding contact portion") is composed of a plurality of stages of annular lip portions. The spring part 13c presses the lip part of the sealing part 13b to the outer peripheral surface of the rotation transmission member 12.

The base portion 13a of the sealing member 13 and the main portion of the sealing portion 13b are formed of rubber-like elastic members. A core rod 32 (metal member) with a substantially L-shaped cross section is embedded in the elastic member. The core rod 32 extends from the sealing portion 13b to the base portion 13a. The radially extending portion of the core rod 32 is exposed to the outside in the axial direction.

Among the two seal members 13 , the exposed portion of the core rod 32 of the seal member 13 disposed on the axial inner side is in contact with the end wall 17 b of the seal support part 17 (casing 11 ). The sealing member 13 arranged axially inward can transfer the heat generated in the sliding contact portion to the inner peripheral wall 17a of the seal support portion 17 through the direct contact portion between the core rod 32 and the end wall 17b. Through the gap between the through hole 16 of the first housing 11A and the outer peripheral surface of the rotation transmission member 12, the vacuum pressure in the vacuum chamber 2 acts on the sealing member 13 arranged axially inward.

The sliding contact portion of the seal portion 13 b of the seal member 13 disposed on the axial outer side of the two seal members 13 faces the inside cooling passage 26 together with the outer peripheral surface of the rotation transmission member 12 (tube portion 31 ). The axially outer sealing member 13 is cooled together with the outer peripheral surface of the rotation transmission member 12 (tube portion 31 ) by the cooling gas flowing in the inner cooling passage 26 .

The drive transmission device 1 operates as follows. When the motor 5 of the driving device 4 is driven, the rotation of the motor 5 is decelerated by the speed reducer 6 and then transmitted from the output shaft 6 a to the rotation transmission member 12 . The rotation transmission member 12 seals the space between the rotation transmission member 12 and the housing 11 through two sealing members 13 and rotates around the central axis o1. The rotation of the rotation transmission member 12 is also transmitted to the actuator in the vacuum chamber 2 through the coupling member 29 .

While the rotation transmission member 12 rotates, the cooling liquid is introduced into the outer cooling passage 19 and the cooling gas is introduced into the inner cooling passage 26 . Thereby, the seal support part 17 is cooled by the coolant flowing in the outer cooling passage 19 on the outer peripheral side of the seal support part 17 . The sliding contact portion of the axially inner sealing member 13 is directly cooled by the cooling gas flowing through the inner cooling passage 26 together with the outer peripheral surface of the rotation transmission member 12 . Therefore, as the rotation transmission member 12 rotates, the frictional heat generated in the sliding contact portion of the sealing member 13 is removed by the cooling liquid flowing through the outer cooling passage 19 or the cooling gas flowing in the inner cooling passage 26 .

As described above, in the vacuum seal device 10 of this embodiment, the cooling fluid (coolant) flows through the outer cooling passage 19 located outside the radially outer region of the seal support portion 17 . Therefore, the heat of the sealing member 13 is efficiently removed in a larger area of the sealing member 13 spanning from the atmosphere side to the vacuum side. Therefore, when the vacuum sealing device 10 of this embodiment is used, the sealing performance of the sealing member 13 can be maintained well for a long period of time.

The drive transmission device 1 of the vacuum sealing device 10 of this embodiment can efficiently remove the heat of the sealing member 13, thereby maintaining the sealing performance of the sealing member 13 well for a long time, and transmit the power of the driving device 4 to the vacuum chamber 2. The actuating device (driven part).

The vacuum sealing device 10 of this embodiment is provided with an inner cooling passage 26 in a region of the housing 11 facing the atmosphere side of the sliding contact portion between the outer peripheral surface of the rotation transmission member 12 and the sealing member 13 . Therefore, the vicinity of the sliding contact portion that easily generates heat can be efficiently cooled by the cooling fluid (cooling gas) flowing in the inner cooling passage 26 . Therefore, the vacuum sealing device 10 of this embodiment can cool a wide area of the sealing member 13 spanning from the atmosphere side to the vacuum side by the cooling fluid flowing in the outer cooling passage 19 . The sealing device 10 can directly and efficiently remove the heat from the sliding contact portion of the sealing member 13 that generates the most heat by using the cooling fluid flowing in the inner cooling passage 26 .

In the vacuum sealing device 10 of this embodiment, cooling liquid is introduced into the outer cooling passage 19 as the cooling fluid, and cooling gas is introduced into the inner cooling passage 26 as the cooling fluid. Therefore, in the outer cooling passage 19 of the sliding contact portion that does not directly face the sealing member 13 , the heat of the sealing member 13 can be efficiently removed by the cooling liquid (liquid) with high heat absorption efficiency for the heat absorption object. In the inner cooling passage 26 facing the sliding contact portion of the sealing member 13, by introducing a gas that is not likely to become high pressure when flowing, not only can the heat of the sliding contact portion be efficiently removed, but unnecessary deformation of the sealing member 13 and cooling can be suppressed. The fluid enters the vacuum side from the sliding contact part.

In the vacuum sealing device 10 of this embodiment, a plurality of sealing members 13 are arranged in the axial direction between the sealing support portion 17 of the housing 11 and the outer peripheral surface of the rotation transmission member 12 . Therefore, according to the vacuum sealing device 10 of this embodiment, the plurality of sealing members 13 can more reliably restrict the flow of atmospheric air into the vacuum side, and the cooling fluid flowing in the outer cooling passage 19 can reliably seal the shaft where heat easily accumulates. The inner sealing member 13 is cooled.

The sealing member 13 used in the vacuum sealing device 10 of this embodiment includes: a base portion 13a, which is fixed to the seal support portion 17 of the housing 11; and an annular sealing portion 13b, which extends radially inward from the base portion 13a and rotates with the base portion 13a. The outer peripheral surface of the transmission member 12 is in sliding contact. The core rod 32 is embedded in the rubber-like elastic member constituting the base portion 13a and the sealing portion 13b so as to span from the sealing portion 13b to the base portion 13a. Therefore, the heat of the sealing portion 13b which is in sliding contact with the outer circumferential surface of the rotation transmission member 12 and generates heat can be efficiently transmitted to the sealing support portion 17 of the housing 11 via the metal core rod 32. Therefore, when the vacuum sealing device 10 of this embodiment is used, the heat generated in the sliding contact portion of the sealing member 13 can be efficiently removed by the cooling fluid flowing through the outer cooling passage 19 .

In the vacuum sealing device 10 of this embodiment, the metal core rod 32 of the sealing member 13 is in direct contact with the outer shell 11 . Therefore, the heat generated in the sliding contact portion of the sealing member 13 can be dissipated to the seal support portion 17 more efficiently.

The radially inner end of the end wall 17 b of the vacuum sealing device 10 of this embodiment is disposed close to the outer peripheral surface of the rotation transmission member 12 . The core rod 32 of the sealing member 13 is in surface contact with the end wall 17b. Therefore, the heat generated in the sliding contact portion of the sealing member 13 can be dissipated to the seal support portion 17 more efficiently.

The vacuum sealing device 10 of this embodiment is composed of the groove 18 of the first housing 11A and the second housing 11B surrounding the outer cooling passage 19 . Therefore, the outer cooling passage 19 arranged outside the radially outer region of the seal support portion 17 can be easily and accurately formed by cutting processing or the like. The second housing 11B has a protruding portion 25 formed continuously with the peripheral wall 21 constituting a part of the inner cooling passage 26 . The protruding portion 25 is tightly fitted into the radially inner region of the groove 18 of the first housing 11A. Therefore, the leakage of the cooling fluid between the outer cooling passage 19 and the inner cooling passage 26 can be more reliably restricted.

In addition, the present invention is not limited to the above-described embodiment, and various design changes can be made without departing from the scope of the invention. For example, in the above embodiment, a pair of sealing members 13 is arranged between the sealing support part 17 of the housing 11 and the outer peripheral surface of the rotation transmission member 12. However, the number of sealing members 13 is not limited to two, and may also be three. More than one. In the above embodiment, the liquid is introduced into the outer cooling passage 19 as the cooling fluid, and the gas is introduced into the inner cooling passage 26 as the cooling fluid. However, either the liquid or the gas may be introduced into both cooling passages. Gas may be introduced into the outer cooling passage 19 and liquid may be introduced into the inner cooling passage 26 .

1: Drive transmission device 2: Vacuum chamber 3: partition wall 3a:Through hole 4:Driving device 5: Motor 6:Reducer 6a:Output shaft 10: Vacuum sealing device 11: Shell 11A: 1st shell 11B: 2nd shell 12: Rotation transmission member 13:Sealing components 13a: base 13b:Sealing part 13c: spring 14: Basal wall 15:Tubular wall 16:Through hole 16c: Axial central area 17:Seal support part 17a: Inner peripheral wall 17b: End wall 18: Groove 19:Outside cooling passage 20a:Inlet hole 20b: Discharge hole 21: Surrounding wall 22: End joint 23:joint flange 24:Occlusive part 25:Protrusion 26:Inner cooling passage 27a:Inlet hole 27b: Discharge hole 28:Key 29:Coupling components 30:Flange part 31: Barrel part 32: core rod 76:Partition wall 90:Sealing component 91:Sealing component o1: central axis

Fig. 1 is a partial cross-sectional side view of a drive transmission device of the vacuum sealing device according to the embodiment. FIG. 2 is an enlarged cross-sectional view of a part of FIG. 1 . FIG. 3 is a cross-sectional view of the vacuum sealing device of the embodiment along line III-III of FIG. 2 . Figure 4 is an enlarged view of part IV of Figure 2.

6:Reducer

6a:Output shaft

10: Vacuum sealing device

11: Shell

11A: 1st shell

11B: 2nd shell

12: Rotation transmission member

13:Sealing components

14: Basal wall

15:Tubular wall

16:Through hole

16c: Axial central area

17:Seal support part

18: Groove

19:Outside cooling passage

20a:Inlet hole

21: Surrounding wall

22: End joint

23:joint flange

24:Occlusive part

25:Protrusion

26:Inner cooling passage

27a:Inlet hole

27b: Discharge hole

28:Key

29:Coupling components

30:Flange part

31: Barrel part

91:Sealing component

o1: central axis

Claims (11)

A vacuum sealing device, which is provided with: a casing arranged across the inside of the vacuum chamber, that is, the vacuum side, and the outside of the vacuum chamber, that is, the atmosphere side; and a rotation transmission member, which is arranged to penetrate the above-mentioned casing and surround the center. The axis rotates to transmit rotational power from the atmosphere side to the vacuum side; and a sealing member is arranged in sliding contact with the outer peripheral surface of the rotation transmission member to seal between the housing and the rotation transmission member; the above-mentioned The casing includes a seal support portion that supports the seal member; and an outer cooling passage through which cooling fluid flows is formed in a region located radially outward of the seal support portion in the casing. The vacuum sealing device of claim 1, wherein the outer shell is provided with an inner cooling passage for allowing cooling fluid to flow inside; the inner cooling passage faces from the atmospheric side the sliding contact portion of the sealing member that is in contact with the rotation transmission member, and The above-mentioned rotation transmission member. The vacuum sealing device according to claim 2, wherein a liquid is introduced into the outer cooling passage as the cooling fluid, and a gas is introduced into the inner cooling passage as the cooling fluid. The vacuum sealing device of claim 1, wherein a plurality of the sealing members are arranged between the housing and the rotation transmission member along the axial direction of the rotation transmission member. The vacuum sealing device according to claim 2, wherein a plurality of the sealing members are arranged between the housing and the rotation transmission member along the axial direction of the rotation transmission member. The vacuum sealing device according to claim 3, wherein a plurality of the sealing members are arranged between the housing and the rotation transmission member along the axial direction of the rotation transmission member. The vacuum sealing device according to any one of claims 1 to 6, wherein the sealing member includes: a base fixed to the seal support; an annular seal extending radially inward from the base and connected to the sealing support; The outer circumferential surface of the rotation transmission member is in sliding contact; and a core rod is inserted in such a manner as to span from the sealing portion to the base portion. The vacuum sealing device of claim 7, wherein the core rod is in contact with the outer shell. The vacuum sealing device of claim 8, wherein the seal support portion has: an inner peripheral wall facing the outer peripheral surface of the rotation transmission member; and an end wall radially inward from one axial end of the inner peripheral wall Extend; and the above-mentioned core rod is in contact with the above-mentioned end wall. The vacuum sealing device of claim 2 or 3, wherein the above-mentioned housing is provided with: a first housing having a groove opening toward one end side in the axial direction; and a second housing that blocks the opening of the groove and is connected to the groove. grooves together form the outer cooling passage; and the above-mentioned second housing is provided with: a peripheral wall that constitutes a part of the above-mentioned inner cooling passage; and a protrusion part that is provided at one end of the above-mentioned peripheral wall and is closely embedded in the inner surface forming the above-mentioned groove at least in the radial direction. The inner side. A drive transmission device comprising: a drive device disposed outside the vacuum chamber, that is, on the atmosphere side; and a vacuum sealing device, which transmits the power of the drive device to a driven portion disposed inside the vacuum chamber, that is, on the vacuum side. power, and restricts the entry of atmospheric air into the vacuum chamber; and the vacuum sealing device includes: a casing arranged across the vacuum side and the atmospheric side of the vacuum chamber; a rotation transmission member arranged to penetrate the casing , rotates around the central axis, and transmits rotational power from the above-mentioned driving device to the above-mentioned driven part; and a sealing member, which is arranged in sliding contact with the outer peripheral surface of the above-mentioned rotation transmission member, and connects the above-mentioned housing and the above-mentioned rotation transmission member. The housing is sealed; and the housing is provided with a seal support portion that supports the seal member; an outer cooling passage for cooling fluid to flow is formed in a region located radially outward of the seal support portion in the housing.