CN116324235A - Vacuum sealing apparatus and drive transmission apparatus - Google Patents
Vacuum sealing apparatus and drive transmission apparatus Download PDFInfo
- Publication number
- CN116324235A CN116324235A CN202180069594.XA CN202180069594A CN116324235A CN 116324235 A CN116324235 A CN 116324235A CN 202180069594 A CN202180069594 A CN 202180069594A CN 116324235 A CN116324235 A CN 116324235A
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- housing
- vacuum
- seal
- cooling passage
- rotation transmitting
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
- F16J15/3232—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/324—Arrangements for lubrication or cooling of the sealing itself
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3248—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings provided with casings or supports
- F16J15/3252—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings provided with casings or supports with rigid casings or supports
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Devices (AREA)
- General Details Of Gearings (AREA)
- Auxiliary Devices For And Details Of Packaging Control (AREA)
- Vacuum Packaging (AREA)
- Sealing Of Bearings (AREA)
Abstract
The vacuum sealing apparatus includes a housing (11), a rotation transmission member (12), a sealing member (13), and an outside cooling passage (19). The housing (11) is disposed so as to span the vacuum side and the atmosphere side of the vacuum chamber. The rotation transmission member (12) penetrates the housing (11) and transmits rotational power from the atmosphere side to the vacuum side. The seal member (13) is in sliding contact with the outer peripheral surface of the rotation transmission member (12) and seals the space between the housing (11) and the rotation transmission member (12). An outer cooling passage (19) is formed in a radially outer region of a seal support portion (17) of the housing (11) that supports the seal member (13), and a cooling fluid flows inside the outer cooling passage (19).
Description
Technical Field
The present invention relates to a vacuum sealing apparatus and a drive transmission apparatus that suppress entry of atmospheric air into a vacuum chamber and that transmit rotational power from the outside to the inside of the vacuum chamber.
The present application claims priority from japanese patent application No. 2020-180316, filed in japan, 10/28 in 2020, and the contents of which are incorporated herein by reference.
Background
In a manufacturing factory for a semiconductor wafer, a liquid crystal substrate, or the like, fine particles are disliked, and elaborate processing is required. Therefore, the working unit such as the transfer robot may be disposed in a vacuum chamber (a room in which the interior is in a vacuum state). The rotational power of the drive transmission device is transmitted from the outside of the vacuum chamber to the working portion. A driving device such as a motor in the drive transmission device is disposed outside the vacuum chamber. The rotation transmission member of the drive transmission device penetrates through a partition wall of the vacuum chamber, and is connected to the working section in the vacuum chamber. The drive transmission device is provided with a vacuum sealing device to restrict the entry of the atmosphere into the vacuum chamber through a gap between a through hole of a partition wall of the vacuum chamber and the rotation transmission member (for example, refer to patent document 1).
The vacuum sealing apparatus described in patent document 1 includes a housing, a rotation transmitting member, and a sealing member in direct contact. The housing is disposed across the inside and outside (vacuum side and atmosphere side) of the vacuum chamber. The rotation transmission member transmits rotational power from the atmosphere side to the vacuum side through the housing. The seal member is in sliding contact with the outer peripheral surface of the rotation transmission member, and seals the space between the housing and the rotation transmission member. The housing is provided with a cooling passage extending from the atmosphere side surface to a sliding contact portion between the outer peripheral surface of the rotation transmission member and the seal member. A cooling fluid such as cooling air or cooling liquid flows through the cooling passage.
In the vacuum sealing apparatus, a seal member attached to a housing is brought into sliding contact with an outer peripheral surface of a rotation transmitting member in response to driving of the rotation transmitting portion. This can restrict the entry of the atmosphere into the vacuum chamber through between the rotation transmission member and the housing.
The sealing member may be degraded by heat generated in sliding contact with the rotation transmitting member. If the sealing member is degraded, there is a possibility that the sealing performance of the sealing member may be degraded. Therefore, in the vacuum sealing apparatus, the cooling fluid is caused to flow on the outer peripheral surface of the rotation transmitting member and the sliding contact portion of the sealing member, so that deterioration of the sealing member due to heat generation is suppressed.
Prior art literature
Patent literature
Patent document 1: international publication No. 2007/080986
Disclosure of Invention
Problems to be solved by the invention
In the vacuum sealing apparatus described in patent document 1, a cooling flow path is formed in a housing at a position facing a sliding contact portion between a rotation transmitting member and a sealing member on the atmosphere side. Therefore, the portion of the sealing member disposed on the vacuum side is difficult to be cooled by the cooling fluid. In particular, in the case where the sealing member is arranged in multiple layers in the axial direction between the housing and the rotation transmitting member, the cooling fluid does not contact the sealing member arranged on the vacuum side at all. As a result, heat generated by the sliding contact is liable to be retained in a part of the sealing member.
The invention provides a vacuum sealing apparatus and a drive transmission apparatus capable of efficiently removing heat of a sealing member in a wide area of the sealing member spanning from an atmosphere side to a vacuum side.
Solution for solving the problem
(1) The vacuum sealing apparatus according to an aspect of the present invention includes: a housing disposed so as to span an inner side of a vacuum chamber, that is, a vacuum side, and an outer side of the vacuum chamber, that is, an atmosphere side; a rotation transmission member configured to penetrate the housing, the rotation transmission member transmitting rotational power from the atmosphere side to the vacuum side by rotating around a central axis; and a seal member disposed in sliding contact with an outer peripheral surface of the rotation transmission member, the seal member sealing between the housing and the rotation transmission member, the housing including a seal support portion that supports the seal member, an outer cooling passage through which a cooling fluid flows being formed in a region of the housing radially outward of the seal support portion.
According to the above configuration, the rotation transmission member to which the rotation power is input from the atmosphere side transmits the rotation power to the required portion in the vacuum chamber. At this time, the sealing member maintains a closed state between the housing and the rotation transmitting member. The radially outer region of the seal support of the housing is cooled by a cooling fluid flowing in an outer cooling passage. Therefore, the frictional heat easily accumulated in the vacuum side base of the seal member can be removed by the cooling fluid flowing through the outer cooling flow path.
(2) An inner cooling passage through which a cooling fluid flows may be provided in the housing, and the inner cooling passage may be configured to face a sliding contact portion of the seal member, which is in contact with the rotation transmitting member, and the rotation transmitting member from the atmosphere side.
(3) A liquid may be introduced into the outer cooling passage as the cooling fluid, and a gas may be introduced into the inner cooling passage as the cooling fluid.
(4) The seal member may be disposed between the housing and the rotation transmission member in plural along an axial direction of the rotation transmission member.
(5) The sealing member may include: a base portion fixed to the seal support portion; an annular seal portion extending radially inward from the base portion and in sliding contact with an outer peripheral surface of the rotation transmitting member; and a metal core embedded so as to span from the sealing portion to the base portion.
(6) The metal core may be in contact with the housing.
(7) The seal support portion may include: an inner peripheral wall facing an outer peripheral surface of the rotation transmitting member; and an end wall extending radially inward from an axial end of the inner peripheral wall, the metal core being in contact with the end wall.
(8) The housing may include: a 1 st housing having a groove open at one end side in an axial direction; and a 2 nd housing closing an opening of the groove, the 2 nd housing constituting the outside cooling passage together with the groove, the 2 nd housing including: a peripheral wall that constitutes a part of the inner cooling passage; and a projection provided at one end of the peripheral wall and tightly fitted into at least a radially inner surface of an inner surface forming the groove.
(9) The drive transmission device according to an aspect of the present invention includes: a driving device disposed outside the vacuum chamber, i.e., on the atmosphere side; and a vacuum sealing apparatus that transmits power of the driving apparatus to a driven portion disposed inside the vacuum chamber, that is, on a vacuum side, and restricts entry of atmospheric air into the vacuum chamber, the vacuum sealing apparatus comprising: a housing disposed across the vacuum side and the atmosphere side of the vacuum chamber; a rotation transmission member that is disposed so as to penetrate the housing, and that transmits rotational power from the driving device to the driven portion by rotating around a central axis; and a seal member disposed in sliding contact with an outer peripheral surface of the rotation transmission member, the seal member sealing between the housing and the rotation transmission member, the housing including a seal support portion that supports the seal member, an outer cooling passage through which a cooling fluid flows being formed in a region of the housing radially outward of the seal support portion.
ADVANTAGEOUS EFFECTS OF INVENTION
The vacuum seal device described above causes the cooling fluid to flow through the outer cooling passage provided in the radially outer region of the seal support portion of the housing. Therefore, heat of the sealing member is efficiently removed in a wide area of the sealing member spanning from the atmosphere side to the vacuum side. Therefore, in the case of using the above-described vacuum sealing apparatus, the sealing performance of the sealing member is maintained well for a long period of time.
The above-described drive transmission device can efficiently remove heat from the sealing member in a wide area of the sealing member spanning from the atmosphere side to the vacuum side by using the vacuum sealing device. Therefore, the sealing performance of the sealing member can be maintained well for a long period of time, and the power of the driving device can be transmitted to the driven portion in the vacuum chamber.
Drawings
Fig. 1 is a partial cross-sectional side view of a drive transmission device employing a vacuum sealing apparatus of an embodiment.
Fig. 2 is an enlarged sectional view of a portion of fig. 1.
Fig. 3 is a cross-sectional view of the vacuum sealing apparatus of the embodiment taken along line III-III of fig. 2.
Fig. 4 is an enlarged view of section IV of fig. 2.
Detailed Description
Next, embodiments of the present invention will be described based on the drawings.
Fig. 1 is a partially cross-sectional side view of a drive transmission device 1 employing a vacuum sealing apparatus 10 of an embodiment.
The drive transmission device 1 is attached to a part of a partition wall 3 that separates the inside and outside of a vacuum chamber 2 (a room in a vacuum state). A working device (a conveyor robot or the like) not shown is provided inside the vacuum chamber 2. The power (rotational force) of the drive transmission device 1 is transmitted to a driven part of the working device in the vacuum chamber 2. The working device receives power from the drive transmission device 1 and operates an operation portion (arm portion or the like) in the vacuum chamber 2.
The drive transmission device 1 includes a drive device 4 and a vacuum sealing device 10. The driving device 4 is disposed on the atmosphere side (outside the vacuum chamber 2). The vacuum sealing apparatus 10 restricts entry of the atmosphere into the vacuum chamber 2 and transmits power of the driving apparatus 4 to the working apparatus (driven portion) in the vacuum chamber 2.
The driving device 4 includes: an electric motor 5 that generates a rotational driving force; and a speed reducer 6 that reduces the rotational force of the motor 5 at a predetermined reduction ratio and outputs the reduced rotational force from an output shaft 6a. O1 in the drawing is the central axis of the output shaft 6a.
In the following description, a direction along the central axis o1 is referred to as an "axial direction", and a direction orthogonal to the central axis o1 is referred to as a "radial direction". The atmosphere side with respect to the partition wall 3 in the axial direction is referred to as "axially outside", and the opposite side thereof is referred to as "axially inside". The side facing the central axis o1 in the radial direction is referred to as "radially inner side", and the opposite side thereof is referred to as "radially outer side".
In the present embodiment, the driving device 4 is constituted by the motor 5 and the speed reducer 6, but the driving device 4 may be constituted by only the motor 5. The motor 5 is not limited to an electric motor, and may be a pneumatic or hydraulic motor.
Fig. 2 is a sectional view showing a part of the vacuum sealing apparatus 10 of fig. 1 in an enlarged manner. Fig. 3 is a cross-sectional view taken along line III-III of fig. 2.
The vacuum sealing apparatus 10 includes a substantially cylindrical housing 11, a rotation transmitting member 12, and a sealing member 13. The housing 11 is disposed so as to span the inside and outside (vacuum side and atmosphere side) of the vacuum chamber 2. The rotation transmission member 12 penetrates the housing 11 in the axial direction to transmit rotational power from the atmosphere side (outside the vacuum chamber 2) to the vacuum side (inside the vacuum chamber 2). The sealing member 13 seals the space between the housing 11 and the rotation transmitting member 12.
The housing 11 includes: a 1 st housing 11A fixed to the partition wall 3 in a state of penetrating a part of the partition wall 3; and a 2 nd housing 11B integrally joined to an axially outer end portion of the 1 st housing 11A. The 1 st housing 11A and the 2 nd housing 11B are formed of a metal material.
The 1 st housing 11A has: a circular plate-shaped bottom wall 14 with holes, which is fitted into the through holes 3a of the partition wall 3 (see fig. 1); and a cylindrical wall 15 protruding axially outward from the bottom wall 14. The space between the bottom wall 14 and the through hole 3a of the partition wall 3 is sealed by a sealing member 90 (see fig. 1). A through hole 16 penetrating the bottom wall 14 and the cylindrical wall 15 in the axial direction is formed in the center region in the radial direction of the 1 st housing 11A. The inner diameter of the axial center region 16c of the through hole 16 is smaller than the inner diameter of the axial inner region (region on the vacuum chamber 2 side) of the through hole 16. The inner diameter of the axially outer region of the through hole 16 is formed so as to be enlarged stepwise with respect to the inner diameter of the axially central region 16 c. The axially outer region of the through hole 16 is provided as a seal support portion 17 for supporting the seal member 13.
A groove 18 is formed in the 1 st housing 11A. The groove 18 is arranged in a region of the 1 st housing 11A radially outside the seal support 17. The recess 18 is formed in a substantially letter C shape when viewed from the front. The groove 18 opens at an axially outer end face (axially one end side) of the cylindrical wall 15. The groove 18 is formed to be deeper than the formation region of the seal support portion 17 in the axial direction, and is formed to be a sufficient radial height (a radial height sufficiently higher than the radial height of the seal member 13). The groove 18 is closed by an axially inner end of the 2 nd housing 11B. The space surrounded by the groove 18 and the end portion of the 2 nd case 11B constitutes an outside cooling passage 19. A cooling liquid (liquid) is introduced into the outside cooling passage 19 as a cooling fluid.
As shown in fig. 3, the end portions of the groove 18 in the circumferential direction are partitioned by a partition wall 76. A groove (not shown) is formed in an axially outer end portion of the partition wall 76. The grooves connect the radially inner circumferential surfaces of the inner surfaces forming the grooves 18 in a ring shape (connect the portions of the grooves 18 broken by the partition walls 76 in the circumferential direction).
As shown in fig. 3, the outer cooling passage 19 is formed in a substantially letter C shape. An introduction hole 20a is provided at one end in the circumferential direction of the outer cooling passage 19. A discharge hole 20b is provided at the other end portion in the circumferential direction of the outer cooling passage 19. The introduction hole 20a and the discharge hole 20b penetrate the cylindrical wall 15 in the radial direction. A cooling pipe for cooling liquid is connected to the introduction hole 20a. A discharge pipe for the coolant is connected to the discharge hole 20b. The introduction hole 20a and the discharge hole 20b are disposed at positions circumferentially close to each other on the outer peripheral surface of the cylindrical wall 15. Therefore, the supply pipe and the discharge pipe are concentrated at one portion on the outer peripheral surface of the cylindrical wall 15.
As shown in fig. 2, the 2 nd housing 11B has a cylindrical peripheral wall 21 and an end coupling portion 22 coupled to an end of the cylindrical wall 15.
The end coupling portion 22 is formed integrally with an axially inner end of the peripheral wall 21. The end joining portion 22 has a joining flange 23 and a closing portion 24. The joint flange 23 is fastened to the cylindrical wall 15 by bolts in a state of abutting against the end face of the cylindrical wall 15. The closing portion 24 is formed in an annular shape. The closing portion 24 closes the opening of the groove 18. A protrusion 25 having a circular ring shape when viewed from the front is integrally formed on the inner peripheral edge of the closing portion 24. The protruding portion 25 protrudes from the closing portion 24 toward the axially inner side. The protrusion 25 is tightly fitted so as to span the circumferential surface and the groove on the radially inner side in the inner surface forming the groove 18. The opening of the groove 18 is closed by an end junction 22. Reference numeral 91 in fig. 2 is a seal member that seals between the 1 st housing 11A and the 2 nd housing 11B at a radially inner position and an outer position of the groove 18.
A housing of the speed reducer 6 is fitted inside the peripheral wall 21. The 2 nd housing 11B is fixed to the speed reducer 6. The space portion inside the peripheral wall 21 constitutes an inner cooling passage 26 facing the sliding contact portion of the seal member 13. The axially outer side of the inner cooling passage 26 is closed by the speed reducer 6. A cooling gas (e.g., cooling air) is introduced into the inner cooling passage 26 as a cooling fluid. An introduction hole 27a for introducing the cooling gas into the inner cooling passage 26 and a discharge hole 27b for discharging the cooling gas from the inner cooling passage 26 are formed at two positions separated in the circumferential direction of the peripheral wall 21.
The introduction hole 27a and the discharge hole 27b are formed at positions separated by approximately 180 ° on the circumference of the peripheral wall 21. The inner cooling passage 26 may be formed in a substantially C-shape when viewed from the front, as in the outer cooling passage 19. In this case, the introduction hole 27a and the discharge hole 27b are formed at positions close to each other on the circumference of the peripheral wall 21. Thereby, the supply pipe and the discharge pipe of the cooling gas are concentrated at one portion on the outer peripheral surface of the peripheral wall 21.
The rotation transmitting member 12 is constituted by a bottomed cylindrical metal block. The output shaft 6a of the speed reducer 6 is coupled to the rotation transmitting member 12 via a key 28. The rotation transmission member 12 is configured to be rotatable integrally with the output shaft 6a about the central axis o 1. The rotation transmitting member 12 has a flange portion 30 and a cylindrical portion 31. The flange portion 30 is fastened and fixed to the coupling member 29 on the bottom side (axially inner side) of the rotation transmitting member 12. The coupling member 29 is coupled to a driven portion of the working device in the vacuum chamber 2. The cylindrical portion 31 protrudes axially outward from the base portion of the flange portion 30. The rotation transmission member 12 is inserted into the through hole 16 of the housing 11 (1 st housing 11A) while being coupled to the output shaft 6a. The outer peripheral surface of the cylindrical portion 31 is radially opposed to the axial center region 16c of the through hole 16 and the seal support portion 17.
Fig. 4 is an enlarged cross-sectional view showing the IV part of fig. 2.
As shown in fig. 4, the seal support 17 includes: an inner peripheral wall 17a radially opposed to the outer peripheral surface of the tubular portion 31; and an end wall 17b extending radially inward from an axially inner end of the inner peripheral wall 17 a. In the present embodiment, the two seal members 13 are mounted in an axially aligned manner on the seal support portion 17. The seal member 13 seals between the 1 st housing 11A and the outer peripheral surface of the tube 31. The two seal members 13 are of the same construction.
The seal member 13 includes a cylindrical base portion 13a, an annular seal portion 13b, and a spring 13c. The base 13a is fitted inside the inner peripheral wall 17 a. The seal portion 13b extends radially inward from an axially inner end of the base portion 13a and then extends axially outward. The inner peripheral surface of the seal portion 13b is in sliding contact with the outer peripheral surface of the rotation transmitting member 12 (the cylindrical portion 31). The portion of the seal portion 13b that is in sliding contact with the outer peripheral surface of the rotation transmitting member 12 (hereinafter referred to as "sliding contact portion") is constituted by a multi-layered annular lip portion. The spring portion 13c presses the lip portion of the seal portion 13b against the outer peripheral surface of the rotation transmitting member 12.
The base portion 13a and the main portion of the sealing portion 13b of the sealing member 13 are formed of rubber-like elastic members. A metal core 32 (metal member) having a substantially L-shaped cross section is embedded in the elastic member. The metal core 32 extends so as to span from the sealing portion 13b to the base portion 13 a. The radially extending portion of the metal core 32 is exposed to the outside on the axially inner side.
The exposed portion of the metal core 32 of the seal member 13 disposed axially inward of the two seal members 13 abuts against the end wall 17b of the seal support 17 (housing 11). The seal member 13 disposed axially inward can transfer heat generated in the sliding contact portion to the inner peripheral wall 17a of the seal support portion 17 via a direct contact portion where the metal core 32 and the end wall 17b are in direct contact. The vacuum pressure in the vacuum chamber 2 acts on the seal member 13 disposed axially inside through the gap between the through hole 16 of the 1 st housing 11A and the outer peripheral surface of the rotation transmitting member 12.
The sliding contact portion of the seal portion 13b of the seal member 13 disposed on the axially outer side of the two seal members 13 faces the inside cooling passage 26 together with the outer peripheral surface of the rotation transmitting member 12 (the cylindrical portion 31). The axially outer seal member 13 is cooled together with the outer peripheral surface of the rotation transmitting member 12 (the cylindrical portion 31) by the cooling gas flowing in the inner cooling passage 26.
The drive transmission device 1 operates as follows.
When the motor 5 of the driving device 4 is driven, the rotation of the motor 5 is transmitted from the output shaft 6a to the rotation transmitting member 12 after being decelerated by the decelerator 6. The space between the rotation transmitting member 12 and the housing 11 is closed by two sealing members 13, and the rotation transmitting member 12 rotates about the center axis o 1. The rotation of the rotation transmitting member 12 is also transmitted to the working device in the vacuum chamber 2 via the coupling member 29.
While the rotation transmitting member 12 rotates, the cooling liquid is introduced into the outer cooling passage 19, and the cooling gas is introduced into the inner cooling passage 26. Thereby, the seal support portion 17 is cooled by the cooling liquid flowing in the outside cooling passage 19 on the outer peripheral side of the seal support portion 17. The sliding contact portion of the axially inner seal member 13 is directly cooled together with the outer peripheral surface of the rotation transmitting member 12 by the cooling gas flowing in the inner cooling passage 26. Accordingly, frictional heat generated at the sliding contact portion of the seal member 13 in accordance with the rotation of the rotation transmission member 12 is removed by the coolant flowing through the outer cooling passage 19 and the cooling gas flowing through the inner cooling passage 26.
As described above, in the vacuum sealing apparatus 10 of the present embodiment, the cooling fluid (coolant) flows through the outer cooling passage 19 provided in the radially outer region of the seal support portion 17. Therefore, heat of the sealing member 13 is efficiently removed in a wide area of the sealing member 13 spanning from the atmosphere side to the vacuum side.
Therefore, when the vacuum sealing apparatus 10 of the present embodiment is used, the sealing performance of the sealing member 13 can be maintained satisfactorily for a long period of time.
The drive transmission device 1 using the vacuum sealing apparatus 10 according to the present embodiment can efficiently remove heat from the sealing member 13, and therefore can transmit power of the driving device 4 to the working device (driven portion) in the vacuum chamber 2 while maintaining the sealing performance of the sealing member 13 for a long period of time.
In the vacuum sealing apparatus 10 of the present embodiment, an inner cooling passage 26 is provided in an atmospheric region of the housing 11 facing the sliding contact portion between the outer peripheral surface of the rotation transmitting member 12 and the sealing member 13. Therefore, the vicinity of the sliding contact portion that is likely to generate heat can be efficiently cooled by the cooling fluid (cooling gas) flowing through the inner cooling passage 26.
Thus, the vacuum sealing apparatus 10 of the present embodiment can cool a wide area of the sealing member 13 that spans from the atmosphere side to the vacuum side by the cooling fluid flowing through the outside cooling passage 19. The sealing device 10 can directly and efficiently remove heat at the sliding contact portion of the seal member 13 having the greatest heat generation degree by the cooling fluid flowing through the inner cooling passage 26.
In the vacuum sealing apparatus 10 of the present embodiment, the cooling liquid is introduced into the outer cooling passage 19 as the cooling fluid, and the cooling gas is introduced into the inner cooling passage 26 as the cooling fluid. Therefore, in the outer cooling passage 19 that does not directly face the sliding contact portion of the seal member 13, heat of the seal member 13 can be efficiently removed by the coolant (liquid) having high heat absorption efficiency with respect to the heat absorbing object. In the inner cooling passage 26 facing the sliding contact portion of the seal member 13, gas which is unlikely to be high pressure when flowing is introduced, so that heat of the sliding contact portion can be efficiently removed, and unnecessary deformation of the seal member 13 is suppressed to suppress entry of the cooling fluid from the sliding contact portion to the vacuum side.
In the vacuum sealing apparatus 10 of the present embodiment, a plurality of seal members 13 are disposed along the axial direction between the seal support portion 17 of the housing 11 and the outer peripheral surface of the rotation transmitting member 12. Therefore, in the case of using the vacuum sealing apparatus 10 of the present embodiment, the inflow of the atmosphere to the vacuum side can be more reliably restricted by the plurality of seal members 13, and the axially inner seal member 13, in which heat is easily retained, can be reliably cooled by the cooling fluid flowing through the outer cooling passage 19.
The sealing member 13 employed in the vacuum sealing apparatus 10 of the present embodiment includes: a base 13a fixed to the seal support 17 of the housing 11; and an annular seal portion 13b extending radially inward from the base portion 13a and in sliding contact with the outer peripheral surface of the rotation transmitting member 12. The rubber-like elastic member constituting the base portion 13a and the seal portion 13b is embedded with a metal core 32 so as to span from the seal portion 13b to the base portion 13 a. Therefore, heat generated by sliding contact of the seal portion 13b with the outer peripheral surface of the rotation transmission member 12 can be efficiently transmitted to the seal support portion 17 of the housing 11 via the metal core 32 made of metal. Therefore, when the vacuum sealing apparatus 10 of the present embodiment is used, heat generated in the sliding contact portion of the seal member 13 can be efficiently removed by the cooling fluid flowing through the outer cooling passage 19.
In the vacuum sealing apparatus 10 of the present embodiment, the metal core 32 of the seal member 13 is in direct contact with the housing 11. Therefore, heat generated at the sliding contact portion of the seal member 13 can be efficiently dissipated to the seal support portion 17.
In the vacuum sealing apparatus 10 of the present embodiment, the radially inner end of the end wall 17b is disposed at a position close to the outer peripheral surface of the rotation transmitting member 12. The metal core 32 of the seal member 13 is in surface contact with the end wall 17b. Therefore, heat generated at the sliding contact portion of the seal member 13 can be efficiently dissipated to the seal support portion 17.
In the vacuum sealing apparatus 10 of the present embodiment, the outer cooling passage 19 is formed by being surrounded by the groove 18 of the 1 st housing 11A and the 2 nd housing 11B. Therefore, the outer cooling passage 19 disposed in the radially outer region of the seal support portion 17 can be easily and highly accurately formed by cutting or the like. The 2 nd case 11B is formed with a projection 25 so as to be continuous with the partial peripheral wall 21 constituting the inner cooling passage 26. The protrusion 25 is tightly fitted into the radially inner region of the groove 18 of the 1 st housing 11A. Therefore, leakage of the cooling fluid between the outer cooling passage 19 and the inner cooling passage 26 can be more reliably restricted.
The present invention is not limited to the above-described embodiments, and various design changes can be made without departing from the spirit and scope of the present invention.
For example, in the above-described embodiment, the pair of seal members 13 are arranged between the seal support portion 17 of the housing 11 and the outer peripheral surface of the rotation transmitting member 12, but the number of seal members 13 is not limited to two, and may be three or more.
In the above embodiment, the following configuration is adopted: the outer cooling passage 19 is introduced with liquid as a cooling fluid and the inner cooling passage 26 is introduced with gas as a cooling fluid, but either one of the liquid and the gas may be introduced into both cooling passages. The gas may be introduced into the outer cooling passage 19 and the liquid may be introduced into the inner cooling passage 26.
Description of the reference numerals
1. A drive transmission device; 2. a vacuum chamber; 3. a partition wall; 4. a driving device; 10. a vacuum sealing device; 11. a housing; 11A, 1 st shell; 11B, 2 nd housing; 12. a rotation transmitting member; 13. a sealing member; 13a, a base; 13b, a sealing part; 17. a seal support; 17a, an inner peripheral wall; 17b, end walls; 18. a groove; 19. an outer cooling passage; 21. a peripheral wall; 25. a protruding portion; 26. an inboard cooling passage.
Claims (9)
1. A vacuum sealing apparatus, wherein,
the vacuum sealing apparatus includes:
a housing disposed so as to span an inner side of a vacuum chamber, that is, a vacuum side, and an outer side of the vacuum chamber, that is, an atmosphere side;
a rotation transmission member configured to penetrate the housing, the rotation transmission member transmitting rotational power from the atmosphere side to the vacuum side by rotating around a central axis; and
a seal member disposed in sliding contact with an outer peripheral surface of the rotation transmitting member, the seal member sealing between the housing and the rotation transmitting member,
the housing includes a seal support portion that supports the seal member,
an outer cooling passage through which a cooling fluid flows is formed in the housing in a region radially outward of the seal support portion.
2. The vacuum sealing apparatus according to claim 1, wherein,
the housing is provided with an inner cooling passage for flowing a cooling fluid therein,
the inner cooling passage faces a sliding contact portion of the seal member that contacts the rotation transmitting member and the rotation transmitting member from the atmosphere side.
3. The vacuum sealing apparatus according to claim 2, wherein,
introducing a liquid as the cooling fluid into the outer cooling passage,
and introducing gas into the inner cooling passage as the cooling fluid.
4. A vacuum sealing apparatus according to any one of claims 1 to 3, wherein,
the seal member is disposed between the housing and the rotation transmitting member in plural along an axial direction of the rotation transmitting member.
5. The vacuum sealing apparatus according to any one of claims 1 to 4, wherein,
the sealing member includes:
a base portion fixed to the seal support portion;
an annular seal portion extending radially inward from the base portion and in sliding contact with an outer peripheral surface of the rotation transmitting member; and
a metal core embedded so as to span from the sealing portion to the base portion.
6. The vacuum sealing apparatus according to claim 5, wherein,
the metal core is in contact with the housing.
7. The vacuum sealing apparatus according to claim 6, wherein,
the seal support portion has:
an inner peripheral wall facing an outer peripheral surface of the rotation transmitting member; and
an end wall extending radially inward from an axial end of the inner peripheral wall,
the metal core is in contact with the end wall.
8. A vacuum sealing apparatus according to claim 2 or 3, wherein,
the housing includes:
a 1 st housing having a groove open at one end side in an axial direction; and
a 2 nd housing closing an opening of the groove, the 2 nd housing together with the groove constituting the outside cooling passage,
the 2 nd housing includes:
a peripheral wall that constitutes a part of the inner cooling passage; and
a projection provided at one end of the peripheral wall and closely fitted to at least a radially inner face of an inner face forming the groove.
9. A drive transmission device, wherein,
the drive transmission device includes:
a driving device disposed outside the vacuum chamber, i.e., on the atmosphere side; and
a vacuum sealing device that transmits power of the driving device to a driven portion disposed in the vacuum chamber, that is, on a vacuum side, and restricts entry of the atmosphere into the vacuum chamber,
the vacuum sealing apparatus includes:
a housing disposed across the vacuum side and the atmosphere side of the vacuum chamber;
a rotation transmission member that is disposed so as to penetrate the housing, and that transmits rotational power from the driving device to the driven portion by rotating around a central axis; and
a seal member disposed in sliding contact with an outer peripheral surface of the rotation transmitting member, the seal member sealing between the housing and the rotation transmitting member,
the housing includes a seal support portion that supports the seal member,
an outer cooling passage through which a cooling fluid flows is formed in the housing in a region radially outward of the seal support portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020180316 | 2020-10-28 | ||
| JP2020-180316 | 2020-10-28 | ||
| PCT/JP2021/031338 WO2022091550A1 (en) | 2020-10-28 | 2021-08-26 | Vacuum sealing device and drive transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116324235A true CN116324235A (en) | 2023-06-23 |
Family
ID=81382292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180069594.XA Pending CN116324235A (en) | 2020-10-28 | 2021-08-26 | Vacuum sealing apparatus and drive transmission apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7485778B2 (en) |
| KR (1) | KR20230070290A (en) |
| CN (1) | CN116324235A (en) |
| TW (1) | TWI824286B (en) |
| WO (1) | WO2022091550A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023173068A (en) * | 2022-05-25 | 2023-12-07 | ナブテスコ株式会社 | Rotation introduction machine |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0648698B1 (en) * | 1992-07-07 | 1998-01-07 | Ebara Corporation | Magnetically levitated carrying apparatus |
| JP2004084920A (en) * | 2002-07-03 | 2004-03-18 | Ts Corporation | Vacuum gear device |
| US8156840B2 (en) * | 2006-01-13 | 2012-04-17 | Nabtesco Corporation | Drive apparatus of substrate carrying robot including cooling circulation path |
| US8293066B2 (en) * | 2006-09-19 | 2012-10-23 | Brooks Automation, Inc. | Apparatus and methods for transporting and processing substrates |
| JP6307220B2 (en) * | 2013-03-19 | 2018-04-04 | 株式会社日立ハイテクノロジーズ | Plasma processing apparatus and plasma processing method |
| JP6302758B2 (en) * | 2014-06-10 | 2018-03-28 | 株式会社ディスコ | Chuck table |
| CN106373907B (en) * | 2015-07-22 | 2019-01-08 | 中微半导体设备(上海)有限公司 | A kind of vacuum lock system and its processing method to substrate |
| KR102060400B1 (en) * | 2018-02-13 | 2020-02-11 | 씰링크 주식회사 | Linear movable rotary union |
| JP3217649U (en) * | 2018-06-12 | 2018-08-23 | Nok株式会社 | Universal joint seal |
| JP2020144068A (en) * | 2019-03-08 | 2020-09-10 | 内山工業株式会社 | Magnetic encoder and sealing device including the same |
-
2021
- 2021-08-26 CN CN202180069594.XA patent/CN116324235A/en active Pending
- 2021-08-26 WO PCT/JP2021/031338 patent/WO2022091550A1/en active Application Filing
- 2021-08-26 KR KR1020237013426A patent/KR20230070290A/en unknown
- 2021-08-26 JP JP2022558877A patent/JP7485778B2/en active Active
- 2021-09-02 TW TW110132570A patent/TWI824286B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| TWI824286B (en) | 2023-12-01 |
| TW202217172A (en) | 2022-05-01 |
| WO2022091550A1 (en) | 2022-05-05 |
| JP7485778B2 (en) | 2024-05-16 |
| KR20230070290A (en) | 2023-05-22 |
| JPWO2022091550A1 (en) | 2022-05-05 |
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