TWI822452B - Non-photosensitive surface modifiers, laminates, printed circuit boards and electronic devices - Google Patents

Non-photosensitive surface modifiers, laminates, printed circuit boards and electronic devices Download PDF

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TWI822452B
TWI822452B TW111142807A TW111142807A TWI822452B TW I822452 B TWI822452 B TW I822452B TW 111142807 A TW111142807 A TW 111142807A TW 111142807 A TW111142807 A TW 111142807A TW I822452 B TWI822452 B TW I822452B
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layer
resin
photosensitive surface
heterocyclic compound
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TW202335538A (en
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有田浩了
御子柴恵美子
原淳
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日商柯尼卡美能達股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D231/00Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings
    • C07D231/02Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings not condensed with other rings
    • C07D231/10Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings not condensed with other rings having two or three double bonds between ring members or between ring members and non-ring members
    • C07D231/12Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings not condensed with other rings having two or three double bonds between ring members or between ring members and non-ring members with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to ring carbon atoms
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D231/00Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings
    • C07D231/54Heterocyclic compounds containing 1,2-diazole or hydrogenated 1,2-diazole rings condensed with carbocyclic rings or ring systems
    • C07D231/56Benzopyrazoles; Hydrogenated benzopyrazoles
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D249/00Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms
    • C07D249/02Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms not condensed with other rings
    • C07D249/041,2,3-Triazoles; Hydrogenated 1,2,3-triazoles
    • C07D249/061,2,3-Triazoles; Hydrogenated 1,2,3-triazoles with aryl radicals directly attached to ring atoms
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D249/00Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms
    • C07D249/02Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms not condensed with other rings
    • C07D249/081,2,4-Triazoles; Hydrogenated 1,2,4-triazoles
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D401/00Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom
    • C07D401/02Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings
    • C07D401/04Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings directly linked by a ring-member-to-ring-member bond
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D201/00Coating compositions based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2363/00Epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Laminated Bodies (AREA)
  • Plural Heterocyclic Compounds (AREA)

Abstract

本發明之非感光性表面改質劑為於金屬層與樹脂層之間形成表面改質層的非感光性表面改質劑,其中至少含有一種以上之具有通式(1)、(2)、(3)或(4)表示之結構的雜環化合物; [R 1表示氫原子、芳基或雜芳基,可進一步具有取代基;R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基、雜芳基或鹵素原子;n、m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數)]。 The non-photosensitive surface modifying agent of the present invention is a non-photosensitive surface modifying agent that forms a surface modifying layer between a metal layer and a resin layer, which contains at least one or more compounds having general formulas (1), (2), Heterocyclic compounds with the structure represented by (3) or (4); [R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent; R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, a amide group, a hetero an aryl group or a halogen atom; n and m are each an integer from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding general formula (1), it is an integer from 0 to 4)].

Description

非感光性表面改質劑、積層體、印刷電路板及電子裝置Non-photosensitive surface modifiers, laminates, printed circuit boards and electronic devices

本發明係關於一種非感光性表面改質劑、積層體、印刷電路板及電子裝置,尤其關於一種可進一步提升金屬層與樹脂層之間的密接性的非感光性表面改質劑等。The present invention relates to a non-photosensitive surface modifying agent, a laminate, a printed circuit board and an electronic device, and in particular to a non-photosensitive surface modifying agent that can further improve the adhesion between a metal layer and a resin layer.

近年來因數據社會化的進展,而要求配線為高密度且高精細的印刷配線板(亦稱「印刷電路板」)。 在印刷配線板之製造步驟中,於金屬層或金屬配線的表面接合蝕刻光阻、抗鍍劑、阻焊劑、預浸體等的樹脂材料。於印刷配線板之製造步驟及製造後的製品,係要求金屬層與樹脂層之間的高接著性。 因此,為提高金屬層與樹脂層的接著性,已知有在金屬層的表面形成提升接著性用之被膜的方法,其提升與樹脂層的接著性(例如參照專利文獻1);於感光性樹脂中含有含硫化合物及含氮化合物而提升接著性的方法(例如參照專利文獻2)。 In recent years, due to the progress of data society, high-density and high-definition printed wiring boards (also called "printed circuit boards") are required. In the manufacturing process of printed wiring boards, resin materials such as etched photoresist, plating resist, solder resist, prepreg, etc. are bonded to the surface of the metal layer or metal wiring. In the manufacturing process of printed wiring boards and the manufactured products, high adhesion between the metal layer and the resin layer is required. Therefore, in order to improve the adhesion between the metal layer and the resin layer, a method of forming an adhesion-enhancing film on the surface of the metal layer to improve the adhesion with the resin layer is known (see, for example, Patent Document 1); in terms of photosensitivity A method of improving adhesiveness by containing sulfur-containing compounds and nitrogen-containing compounds in the resin (for example, see Patent Document 2).

然而,上述專利文獻1及2之技術,雖某種程度提升金屬層與樹脂層的密接性,但仍無法獲得充分的密接性。尤其近年來行動通信之5G或半導體封裝之高密度安裝技術發展,印刷配線板之金屬層的低粗面化或金屬配線之窄線條化之要求提高;隨之,較以往更要求金屬層與樹脂層的密接性。 [先前技術文獻] [專利文獻] However, although the techniques of the above-mentioned Patent Documents 1 and 2 improve the adhesion between the metal layer and the resin layer to some extent, they still cannot obtain sufficient adhesion. Especially in recent years, with the development of 5G mobile communications or high-density mounting technology in semiconductor packaging, the requirements for low roughness of the metal layer of printed wiring boards or narrow lines of metal wiring have increased. With this, more metal layers and resins are required than before. layer tightness. [Prior technical literature] [Patent Document]

[專利文獻1]日本特開2017-203073號公報 [專利文獻2]日本特開2020-34933號公報 [Patent Document 1] Japanese Patent Application Publication No. 2017-203073 [Patent Document 2] Japanese Patent Application Publication No. 2020-34933

[發明所欲解決之課題][Problem to be solved by the invention]

本發明為有鑑於上述問題及狀況而完成者,其解決課題在於提供一種可進一步提升金屬層與樹脂層之間的密接性的非感光性表面改質劑、使用該非感光性表面改質劑之積層體、印刷電路板及電子裝置。 [解決課題之手段] The present invention was completed in view of the above-mentioned problems and situations, and its problem to be solved is to provide a non-photosensitive surface modifying agent that can further improve the adhesion between the metal layer and the resin layer, and to provide a non-photosensitive surface modifying agent using the non-photosensitive surface modifying agent. Laminated bodies, printed circuit boards and electronic devices. [Means to solve the problem]

本案發明人在為了解決上述課題而針對上述問題的原因等而進行研究的過程中發現,作為形成金屬層與樹脂層之間的表面改質層的非感光性表面改質劑,使其含有具特定結構的雜環化合物,藉此可進一步提升金屬層與樹脂層的密接性,而臻至完成本發明。 亦即,本發明之上述課題係藉由以下手段來解決: In order to solve the above-mentioned problems, the inventors of the present invention conducted research into the causes of the above-mentioned problems and found that as a non-photosensitive surface modifying agent forming the surface modifying layer between the metal layer and the resin layer, it contains The heterocyclic compound with a specific structure can further improve the adhesion between the metal layer and the resin layer, thereby completing the present invention. That is, the above-mentioned problems of the present invention are solved by the following means:

1.一種非感光性表面改質劑,其為於金屬層與樹脂層之間形成表面改質層的非感光性表面改質劑,其中, 至少含有一種以上之具有下述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物; [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基; R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基、雜芳基或鹵素原子; n及m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數);有多個取代基R 2時,各取代基R 2可彼此相同或相異;又,有多個n時,各個n可彼此相同或相異,而且,有多個m時,各個m可彼此相同或相異]。 1. A non-photosensitive surface modifying agent, which is a non-photosensitive surface modifying agent that forms a surface modifying layer between a metal layer and a resin layer, wherein it contains at least one type of agent having the following general formula (1) , Heterocyclic compounds with the structure represented by (2), (3) or (4); [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent; R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, or an amide group. group, heteroaryl group or halogen atom; n and m are respectively an integer from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding general formula (1), it is an integer from 0 to 4); there are When there are multiple substituents R2 , each substituent R2 can be the same or different from each other; also, when there are multiple n, each n can be the same or different from each other, and when there are multiple m, each m can be the same as each other. or different].

2.如第1項之非感光性表面改質劑,其中前述雜環化合物係具有前述通式(1)表示之結構。2. The non-photosensitive surface modifying agent according to item 1, wherein the heterocyclic compound has a structure represented by the general formula (1).

3.如第2項之非感光性表面改質劑,其中前述雜環化合物為具有下述通式(5)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基]。 3. The non-photosensitive surface modifier of item 2, wherein the aforementioned heterocyclic compound is a heterocyclic compound having a structure represented by the following general formula (5): [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent].

4.如第1項至第3項中任一項之非感光性表面改質劑,其至少含有水或醇類。4. The non-photosensitive surface modifying agent according to any one of items 1 to 3, which contains at least water or alcohol.

5.一種積層體,其為於金屬層上依序設有表面改質層及樹脂層的積層體,其中, 前述表面改質層至少含有一種以上之具有下述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基; R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基、雜芳基或鹵素原子; n及m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數);有多個取代基R 2時,各取代基R 2可彼此相同或相異;又,有多個n時,各個n可彼此相同或相異,而且,有多個m時,各個m可彼此相同或相異]。 5. A laminated body in which a surface modification layer and a resin layer are sequentially provided on a metal layer, wherein the surface modification layer contains at least one or more materials having the following general formulas (1) and (2) ), (3) or (4) heterocyclic compounds: [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent; R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, or an amide group. group, heteroaryl group or halogen atom; n and m are respectively an integer from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding general formula (1), it is an integer from 0 to 4); there are When there are multiple substituents R2 , each substituent R2 can be the same or different from each other; also, when there are multiple n, each n can be the same or different from each other, and when there are multiple m, each m can be the same as each other. or different].

6.如第5項之積層體,其中前述雜環化合物為具有前述通式(1)表示之結構的雜環化合物。6. The laminate according to item 5, wherein the heterocyclic compound is a heterocyclic compound having a structure represented by the general formula (1).

7.如第6項之積層體,其中前述雜環化合物為具有下述通式(5)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基]。 7. The laminate of item 6, wherein the heterocyclic compound is a heterocyclic compound having a structure represented by the following general formula (5): [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent].

8.如第5項至第7項中任一項之積層體,其中前述樹脂層為含有鹼可溶性樹脂的感光性樹脂組成物。8. The laminated body according to any one of items 5 to 7, wherein the resin layer is a photosensitive resin composition containing an alkali-soluble resin.

9.如第5項至第7項中任一項之積層體,其中前述樹脂層為至少含有具環氧結構之樹脂的熱硬化性樹脂組成物。9. The laminated body according to any one of items 5 to 7, wherein the resin layer is a thermosetting resin composition containing at least a resin having an epoxy structure.

10.一種印刷電路板,其係使用如第5項至第9項中任一項之積層體。10. A printed circuit board using the laminate according to any one of items 5 to 9.

11.一種電子裝置,其係使用如第5項至第9項中任一項之積層體。 [發明之效果] 11. An electronic device using the laminated body according to any one of items 5 to 9. [Effects of the invention]

藉由本發明之上述手段,可提供一種可進一步提升金屬層與樹脂層之間的密接性的非感光性表面改質劑、使用該非感光性表面改質劑之積層體、印刷電路板及電子裝置。 就本發明效果之展現機制或作用機制仍不明確,但如下推察。 本發明之非感光性表面改質劑由於至少含有一種以上之具有前述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物,存在於前述雜環化合物結構中的氮原子(N原子)會與金屬進行交互作用,且酚性羥基會與樹脂進行交互作用。從而,藉由由此種非感光性表面改質劑所形成的表面改質層存在於金屬層與樹脂層之間,藉此金屬層與樹脂層便藉由具有前述交互作用的表面改質層而提升密接性。 酚性羥基可與存在於樹脂之極性基進行氫鍵或與環氧基所代表之聚合性樹脂進行共價鍵,可以較π-π交互作用或凡得瓦力更強的交互作用力而密接。 尤其藉由前述雜環化合物的結構中之氮原子與酚性羥基存在於分子骨架的對角,便如圖1所示,前述雜環化合物(例如圖1之例示化合物(1-1))的分子骨架朝垂直方向(表面改質層30的厚度方向)配位,氮原子(N)與金屬層10的金屬進行交互作用,且酚性羥基(OH)可接近樹脂層20,推斷可獲得更強的交互作用。 此外,圖1所示各原子係表示與圖2相同者。 By the above means of the present invention, it is possible to provide a non-photosensitive surface modifying agent that can further improve the adhesion between the metal layer and the resin layer, a laminate, a printed circuit board and an electronic device using the non-photosensitive surface modifying agent. . The display mechanism or action mechanism of the effect of the present invention is still unclear, but it can be inferred as follows. The non-photosensitive surface modifier of the present invention contains at least one or more heterocyclic compounds having the structure represented by the aforementioned general formula (1), (2), (3) or (4), and exists in the structure of the aforementioned heterocyclic compound. The nitrogen atoms (N atoms) in will interact with metals, and the phenolic hydroxyl groups will interact with resin. Therefore, the surface modification layer formed by this non-photosensitive surface modification agent exists between the metal layer and the resin layer, whereby the metal layer and the resin layer are modified by the surface modification layer having the aforementioned interaction. And improve the closeness. The phenolic hydroxyl group can hydrogen bond with the polar group present in the resin or covalently bond with the polymeric resin represented by the epoxy group, and can be closely connected with a stronger interaction force than π-π interaction or van der Waals force. . Especially because the nitrogen atoms and phenolic hydroxyl groups in the structure of the aforementioned heterocyclic compound exist at opposite corners of the molecular skeleton, as shown in Figure 1, the aforementioned heterocyclic compound (such as the exemplary compound (1-1) in Figure 1) The molecular skeleton is coordinated in the vertical direction (the thickness direction of the surface modification layer 30), nitrogen atoms (N) interact with the metal of the metal layer 10, and the phenolic hydroxyl group (OH) can be close to the resin layer 20. It is inferred that a better Strong interaction. In addition, each atomic system shown in FIG. 1 represents the same as that in FIG. 2 .

[實施發明之形態][Form of carrying out the invention]

本發明之非感光性表面改質劑為於金屬層與樹脂層之間形成表面改質層的非感光性表面改質劑,其中至少含有一種以上之具有前述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物。 此特徵為與下述各實施形態共通或對應的技術特徵。 The non-photosensitive surface modifying agent of the present invention is a non-photosensitive surface modifying agent that forms a surface modifying layer between a metal layer and a resin layer, which contains at least one or more compounds having the aforementioned general formulas (1) and (2). , heterocyclic compounds with the structure represented by (3) or (4). This feature is a technical feature common to or corresponding to each of the following embodiments.

作為本發明之實施樣態,前述雜環化合物較佳為具有前述通式(1)表示之結構的雜環化合物;尤其以提升金屬層與樹脂層的密接性而言,前述雜環化合物較佳為具有前述通式(5)表示之結構的雜環化合物。 又,以溶解性而言,較佳為至少含有水或醇類。 As an embodiment of the present invention, the aforementioned heterocyclic compound is preferably a heterocyclic compound having a structure represented by the aforementioned general formula (1); especially in order to improve the adhesion between the metal layer and the resin layer, the aforementioned heterocyclic compound is preferred It is a heterocyclic compound having a structure represented by the aforementioned general formula (5). Moreover, in terms of solubility, it is preferable to contain at least water or alcohols.

本發明之積層體為於金屬層上依序設有表面改質層及樹脂層的積層體,其中, 前述表面改質層至少含有一種以上之具有前述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物。藉此,可提供金屬層與樹脂層之間的密接性提升的積層體。 The laminated body of the present invention is a laminated body in which a surface modification layer and a resin layer are sequentially provided on a metal layer, wherein: The aforementioned surface modification layer contains at least one or more heterocyclic compounds having a structure represented by the aforementioned general formula (1), (2), (3) or (4). Thereby, a laminated body with improved adhesion between the metal layer and the resin layer can be provided.

以提升與前述雜環化合物所含之酚性羥基的交互作用所產生之密接性而言,前述樹脂層較佳為含有鹼可溶性樹脂的感光性樹脂組成物,或者至少含有具環氧結構之樹脂的熱硬化性樹脂組成物。In order to improve the adhesion resulting from the interaction with the phenolic hydroxyl group contained in the heterocyclic compound, the resin layer is preferably a photosensitive resin composition containing an alkali-soluble resin, or at least a resin with an epoxy structure. thermosetting resin composition.

又,本發明之積層體可適用於印刷電路板或電子裝置。Moreover, the laminated body of this invention can be suitably used for a printed circuit board or an electronic device.

以下就本發明與其構成要素及用於實施本發明之形態及樣態加以說明。此外,本案中,「~」係以包含其前後所記載之數值作為下限值及上限值的意義使用。The present invention, its constituent elements, and forms and aspects for implementing the present invention will be described below. In addition, in this case, "~" is used in the sense of including the numerical values described before and after it as the lower limit value and the upper limit value.

[非感光性表面改質劑] 本發明之非感光性表面改質劑係於金屬層與樹脂層之間形成表面改質層的非感光性表面改質劑,其中至少含有一種以上之具有下述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物。 [Non-photosensitive surface modifier] The non-photosensitive surface modifying agent of the present invention is a non-photosensitive surface modifying agent that forms a surface modifying layer between a metal layer and a resin layer, which contains at least one type of the following general formulas (1) and (2) ), (3) or (4).

前述通式(1)中,R 1表示氫原子、芳基或雜芳基,尤其表示芳基為佳,亦可進一步具有取代基。 前述取代基可舉出例如羥基、醯胺基等。 In the aforementioned general formula (1), R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, preferably an aryl group, and may further have a substituent. Examples of the substituent include hydroxyl group, amide group, and the like.

前述通式(1)~(4)中,R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基或鹵原子、雜芳基,尤其表示烷基為佳。 In the aforementioned general formulas (1) to (4), R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, an amide group or a halogen atom, or a heteroaryl group, and in particular Alkyl groups are preferred.

前述通式(1)~(4)中,前述n及m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數)。 又,各通式中,有多個取代基R 2時,各取代基R 2可彼此相同或相異;又,有多個n時,各個n可彼此相同或相異,而且,有多個m時,各個m可彼此相同或相異。 In the aforementioned general formulas (1) to (4), the aforementioned n and m are respectively integers from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding the general formula (1), it is an integer from 0 to 4. integer). Furthermore, in each general formula, when there are multiple substituents R 2 , each substituent R 2 may be the same or different from each other; and when there are multiple n, each n may be the same or different from each other, and there are multiple n When m, each m can be the same or different from each other.

本發明之雜環化合物為具有前述通式(1)~(4)表示之結構的雜環化合物當中具有前述通式(1)表示之結構的雜環化合物,藉由金屬層與表面改質層及表面改質層與樹脂層的交互作用,結果以提升金屬層與樹脂層的密接性而言較佳。The heterocyclic compound of the present invention is a heterocyclic compound having a structure represented by the aforementioned general formula (1) among the heterocyclic compounds having a structure represented by the aforementioned general formulas (1) to (4). And the interaction between the surface modification layer and the resin layer, the result is better in terms of improving the adhesion between the metal layer and the resin layer.

又,本發明之雜環化合物為具有下述通式(5)表示之結構的雜環化合物,以提升金屬層與樹脂層的密接性而言較佳。 In addition, the heterocyclic compound of the present invention is preferably a heterocyclic compound having a structure represented by the following general formula (5) in order to improve the adhesion between the metal layer and the resin layer.

前述通式(5)中,R 1表示氫原子、芳基或雜芳基,尤其表示芳基為佳,亦可進一步具有取代基。 前述取代基可舉出例如羥基、醯胺基等。 In the aforementioned general formula (5), R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, preferably an aryl group, and may further have a substituent. Examples of the substituent include hydroxyl group, amide group, and the like.

以下舉出具有前述通式(1)~(5)表示之結構的雜環化合物的實例,惟本發明之雜環化合物不限定於此等。Examples of heterocyclic compounds having structures represented by the aforementioned general formulas (1) to (5) are listed below, but the heterocyclic compounds of the present invention are not limited to these.

本發明之非感光性表面改質劑所含有的前述雜環化合物可僅為1種或為2種以上。The non-photosensitive surface modifying agent of the present invention may contain only one type or two or more types of the aforementioned heterocyclic compounds.

本發明之非感光性表面改質劑,基於溶解性觀點,作為溶劑較佳至少含有水或醇類。該醇可舉出例如甲醇、乙醇、2-丙醇等。以溶劑而言,亦可並用2種以上的水或醇類。 具體而言,較佳將水與醇的質量比(質量%)設為100:0~50:50的範圍內,更佳設為100:0~75:25的範圍內。 The non-photosensitive surface modifier of the present invention preferably contains at least water or alcohol as a solvent from the viewpoint of solubility. Examples of the alcohol include methanol, ethanol, and 2-propanol. As a solvent, two or more types of water or alcohol may be used in combination. Specifically, the mass ratio (mass %) of water and alcohol is preferably in the range of 100:0 to 50:50, more preferably in the range of 100:0 to 75:25.

由皮膜形成性而言,較佳為前述芳香族雜環化合物,相對於非感光性表面改質劑全體,以0.00001(0.1ppm)~0.1(1000ppm)質量%的範圍內含有;尤以0.00001(0.1ppm)~0.01(100ppm)質量%的範圍內含有為宜。In terms of film-forming properties, the aromatic heterocyclic compound is preferably contained in the range of 0.00001 (0.1 ppm) to 0.1 (1000 ppm) mass % relative to the entire non-photosensitive surface modifier; in particular, 0.00001 ( It is suitable to contain it within the range of 0.1ppm) to 0.01 (100ppm) mass %.

又,本發明之非感光性表面改質劑亦可含有上述以外的其他成分,惟係僅由不含聚合物、聚合性單體或寡聚物,即不含樹脂的非聚合性材料所構成。 前述其他成分可舉出界面活性劑、防腐劑、穩定化劑、酸、鹼、pH調整劑等。 In addition, the non-photosensitive surface modifier of the present invention may also contain other components other than the above, but it is composed only of non-polymerizable materials that do not contain polymers, polymerizable monomers or oligomers, that is, do not contain resin. . Examples of the aforementioned other components include surfactants, preservatives, stabilizers, acids, alkalis, and pH adjusters.

[積層體] 本發明之積層體係於金屬層上依序設有表面改質層及樹脂層的積層體,其中,前述表面改質層至少含有一種以上之具有前述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物。 [Laminated body] The laminate system of the present invention is a laminate in which a surface modification layer and a resin layer are sequentially provided on a metal layer, wherein the surface modification layer contains at least one or more compounds having the above general formulas (1), (2), (3) ) or a heterocyclic compound with a structure represented by (4).

具有前述通式(1)~(4)表示之結構的雜環化合物係如前述,故省略其說明。The heterocyclic compounds having the structures represented by the general formulas (1) to (4) are as described above, and therefore their description is omitted.

又,基於藉由金屬層與表面改質層及表面改質層與樹脂層的交互作用,結果提升金屬層與樹脂層的密接性而言,前述雜環化合物較佳為具有前述通式(1)~(4)表示之結構的雜環化合物當中具有前述通式(1)表示之結構的雜環化合物。 尤其由提升金屬層與樹脂層的密接性而言,前述雜環化合物較佳為具有前述通式(5)表示之結構的雜環化合物。 Furthermore, in terms of improving the adhesion between the metal layer and the resin layer through the interaction between the metal layer and the surface modification layer and the surface modification layer and the resin layer, the aforementioned heterocyclic compound preferably has the aforementioned general formula (1 ) to (4) include a heterocyclic compound having a structure represented by the aforementioned general formula (1). Especially from the viewpoint of improving the adhesion between the metal layer and the resin layer, the heterocyclic compound is preferably a heterocyclic compound having a structure represented by the general formula (5).

本發明之積層體,係前述雜環化合物的雜環朝對前述金屬層略垂直的方向配向,且前述雜環化合物的酚性羥基朝對前述樹脂層略垂直的方向配向,可使酚性羥基更接近樹脂層,可獲得更強的交互作用,以提升密接性而言較佳。In the laminate of the present invention, the heterocyclic rings of the heterocyclic compound are aligned in a direction that is approximately perpendicular to the metal layer, and the phenolic hydroxyl groups of the heterocyclic compound are aligned in a direction that is approximately perpendicular to the resin layer, so that the phenolic hydroxyl groups can be aligned Being closer to the resin layer can achieve stronger interaction, which is better for improving adhesion.

就前述雜環化合物的配向性,係例如使用量子化學計算軟體Gaussian16(Gaussian公司製),以DFT計算,利用B3LYP(密度泛函理論)來進行結構最佳化。 作為基函數,銅係使用SDD(Stuttgart/Dresden ECP)來進行計算,其他元素係使用6-31G(d)。然後,以schrodinger公司製軟體Material Science Suite之Grid scan模組,於配基四周的空間,以銅離子成為再穩定的位置作為初期配置。 針對上述所計算之最佳結構,例如若舉例示化合物(1-1)為例加以說明,則如圖2所示,以化合物(例示化合物(1-1))與(Cu)的交互作用部位為軸向,於化合物的中心位置拉出相對前述軸方向成為垂直的中心線A時,較佳為相對於該中心線A,與銅(Cu)之交互作用部位及酚性羥基(OH)彼此朝相反側配向。 具體而言,將上述所計算之最佳化結構於Winmostar呈現時,選擇銅原子(Cu)-氮原子(N)-氧原子(O)-而表示的角度至少一個較佳為140°以上(參照圖2)。 例如,例示化合物(1-1)中,銅原子-氮原子-氧原子所致角度為169°;例示化合物(2-2)為168°;例示化合物(3-8)為71°。 藉由如此配位,從前述雜環化合物的結構中之氮原子(N)與酚性羥基(OH)存在於分子骨架的對角來看,氮原子(N)存在於相對金屬層10垂直的方向,可使酚性羥基(OH)更接近樹脂層20,而可獲得更強的交互作用(參照圖1)。 For the alignment of the aforementioned heterocyclic compound, for example, the quantum chemical calculation software Gaussian16 (manufactured by Gaussian Corporation) is used, DFT calculation is performed, and B3LYP (density functional theory) is used to optimize the structure. As the basis function, copper system uses SDD (Stuttgart/Dresden ECP) for calculation, and other element systems use 6-31G(d). Then, using the Grid scan module of Material Science Suite, a software produced by Schrodinger, an initial position is placed where copper ions become restabilized in the space around the ligand. Regarding the optimal structure calculated above, for example, taking Exemplary Compound (1-1) as an example to illustrate, as shown in Figure 2, the interaction site of the compound (Exemplary Compound (1-1)) and (Cu) In the axial direction, when the center line A perpendicular to the aforementioned axial direction is drawn from the center of the compound, it is preferable that the interaction site with copper (Cu) and the phenolic hydroxyl group (OH) interact with each other relative to the center line A. Oriented toward the opposite side. Specifically, when the optimized structure calculated above is presented in Winmostar, at least one of the angles represented by copper atoms (Cu)-nitrogen atoms (N)-oxygen atoms (O)- is preferably 140° or above ( Refer to Figure 2). For example, in the illustrated compound (1-1), the angle caused by the copper atom-nitrogen atom-oxygen atom is 169°; in the illustrated compound (2-2), it is 168°; and in the illustrated compound (3-8), it is 71°. Through such coordination, from the perspective that the nitrogen atom (N) and the phenolic hydroxyl group (OH) in the structure of the aforementioned heterocyclic compound exist at diagonal angles of the molecular skeleton, the nitrogen atom (N) exists perpendicularly to the metal layer 10 direction, the phenolic hydroxyl group (OH) can be brought closer to the resin layer 20, and stronger interaction can be obtained (see Figure 1).

本發明之積層體可適用於例如印刷電路板(印刷配線板)或電子裝置。 前述印刷電路板可如後述,藉由光微影所致之金屬配線圖型之形成方法而形成。 又,前述電子裝置可舉出例如智慧型手機、平板終端、個人電腦、伺服器、路由器、通訊基地台、顯示裝置、家電等。 The laminated body of this invention can be suitably used for a printed circuit board (printed wiring board) or an electronic device, for example. The aforementioned printed circuit board can be formed by a method of forming a metal wiring pattern by photolithography as will be described later. Examples of the electronic device include smartphones, tablet terminals, personal computers, servers, routers, communication base stations, display devices, home appliances, and the like.

以下就本發明之積層體的構成加以說明。 本發明之積層體為於金屬層上依序設有表面改質層及樹脂層的積層體。亦即,金屬層與表面改質層相鄰,表面改質層與樹脂層相鄰。 Next, the structure of the laminated body of this invention is demonstrated. The laminated body of the present invention is a laminated body in which a surface modification layer and a resin layer are provided in this order on a metal layer. That is, the metal layer is adjacent to the surface modification layer, and the surface modification layer is adjacent to the resin layer.

<金屬層> 金屬層為以金屬為主成分的層。於此,主成分係指含有50質量%以上的成分。 <Metal layer> The metal layer is a layer mainly composed of metal. Here, the main component means a component containing 50% by mass or more.

用於前述金屬層之金屬可使用例如金、銀、鉑、鋅、鈀、銠、鋨、釕、銥、銅、鎳、鈷、鐵、錫、鉻、鈦、鉭、鎢、銦、鋁、鉛、鉬等金屬或此等之合金。此等當中,基於加工性或導電性觀點,較佳以銅或銅合金為主成分。Examples of metals used for the aforementioned metal layer include gold, silver, platinum, zinc, palladium, rhodium, osmium, ruthenium, iridium, copper, nickel, cobalt, iron, tin, chromium, titanium, tantalum, tungsten, indium, aluminum, Lead, molybdenum and other metals or their alloys. Among these, from the viewpoint of workability or electrical conductivity, copper or a copper alloy is preferably used as the main component.

前述金屬層可藉由金屬箔、鍍敷、真空成膜法形成。The aforementioned metal layer can be formed by metal foil, plating, or vacuum film forming methods.

金屬層的厚度不特別限定,若設為例如配合待形成之金屬配線圖型等的厚度之厚度即可。The thickness of the metal layer is not particularly limited, and may be a thickness that matches the thickness of the metal wiring pattern to be formed, for example.

於前述金屬配線圖型的形成中,從使用絕緣層上形成有金屬層的覆金屬積層板來看,本發明之積層體,較佳於金屬層下方具有絕緣層。絕緣層不特別限定,可使用一般作為絕緣層使用的樹脂片或預浸體。In the formation of the aforementioned metal wiring pattern, from the viewpoint of using a metal-clad laminate with a metal layer formed on the insulating layer, the laminate of the present invention preferably has an insulating layer below the metal layer. The insulating layer is not particularly limited, and a resin sheet or prepreg generally used as an insulating layer can be used.

若圖示上述之具有絕緣層的積層體,則屬於顯示後述光阻層形成步驟之圖5中的積層體6。If the above-mentioned laminated body with an insulating layer is shown in the figure, it belongs to the laminated body 6 in FIG. 5 which shows the formation step of the photoresist layer mentioned later.

<表面改質層> 表面改質層可藉由在前述金屬層的表面塗佈本發明之非感光性表面改質劑,使其乾燥而形成。 <Surface modification layer> The surface modification layer can be formed by coating the non-photosensitive surface modification agent of the present invention on the surface of the metal layer and drying it.

表面改質層的厚度不特別限定,基於本發明效果之觀點,較佳為0.1~20nm的範圍內。The thickness of the surface modification layer is not particularly limited, but from the viewpoint of the effects of the present invention, it is preferably in the range of 0.1 to 20 nm.

<樹脂層> 本發明中使用之樹脂層不特別限定,可舉出丙烯腈/苯乙烯共聚樹脂(AS樹脂)、丙烯腈/丁二烯/苯乙烯共聚樹脂(ABS樹脂)、氟樹脂、聚醯胺、聚乙烯、聚對苯二甲酸乙二酯、聚偏二氯乙烯、聚氯乙烯、聚碳酸酯、聚苯乙烯、聚碸、聚丙烯、環聚烯烴樹脂、液晶聚合物等熱塑性樹脂;環氧樹脂、酚樹脂、聚醯亞胺、聚胺基甲酸酯、雙馬來醯亞胺/三嗪樹脂、改性聚苯醚、氰酸酯等熱硬化性樹脂,或者紫外線硬化性環氧樹脂、紫外線硬化性丙烯酸樹脂等紫外線硬化性樹脂等。此等樹脂可由官能基改性,亦可經玻璃纖維、芳綸纖維、其他纖維等強化。 <Resin layer> The resin layer used in the present invention is not particularly limited, and examples thereof include acrylonitrile/styrene copolymer resin (AS resin), acrylonitrile/butadiene/styrene copolymer resin (ABS resin), fluororesin, polyamide, and polyamide. Thermoplastic resins such as ethylene, polyethylene terephthalate, polyvinylidene chloride, polyvinyl chloride, polycarbonate, polystyrene, polypropylene, cyclopolyolefin resin, liquid crystal polymer; epoxy resin , phenol resin, polyimide, polyurethane, bismaleimide/triazine resin, modified polyphenylene ether, cyanate ester and other thermosetting resins, or ultraviolet curable epoxy resin, Ultraviolet curable resin such as ultraviolet curable acrylic resin, etc. These resins can be modified with functional groups or reinforced with glass fiber, aramid fiber, other fibers, etc.

本發明之積層體為印刷電路板積層時(為印刷電路板積層體時),樹脂層可使用市售樹脂薄膜或預浸體(含浸有液狀樹脂之片狀纖維),較佳使用氟樹脂或環聚烯烴樹脂、液晶聚合物、環氧樹脂、酚樹脂、聚醯亞胺、雙馬來醯亞胺/三嗪樹脂、改性聚苯醚、含氰酸酯之樹脂。 又,本發明之積層體形成印刷電路板的配線時(為金屬配線圖型時),樹脂層可使用市售液體光阻或乾膜光阻,較佳使用包含鹼可溶性樹脂之紫外線硬化性環氧樹脂、紫外線硬化性丙烯酸樹脂、聚醯亞胺。 When the laminate of the present invention is a printed circuit board laminate (when it is a printed circuit board laminate), a commercially available resin film or prepreg (sheet fiber impregnated with liquid resin) can be used for the resin layer, and fluororesin is preferably used. Or cyclopolyolefin resin, liquid crystal polymer, epoxy resin, phenolic resin, polyimide, bismaleimide/triazine resin, modified polyphenylene ether, and cyanate-containing resin. In addition, when the laminate of the present invention forms the wiring of a printed circuit board (when it is a metal wiring pattern), a commercially available liquid photoresist or a dry film photoresist can be used for the resin layer, and an ultraviolet curable ring containing an alkali-soluble resin is preferably used. Oxygen resin, UV curable acrylic resin, polyimide.

本發明之金屬配線圖型之形成方法為光微影所致之金屬配線圖型之形成方法,較佳具有使用本發明之非感光性表面改質劑,於金屬層與光阻之間形成表面改質層之步驟。The method of forming a metal wiring pattern of the present invention is a method of forming a metal wiring pattern caused by photolithography. Preferably, the non-photosensitive surface modifier of the present invention is used to form a surface between the metal layer and the photoresist. Steps to modify the layer.

<金屬配線圖型之形成方法> 具體而言,藉由具有以下步驟(A)~(F)而形成金屬配線圖型。 步驟(A):將絕緣層上形成有金屬層的覆金屬積層板進行酸洗淨之步驟 步驟(B):於前述覆金屬積層板的前述金屬層上,使用本發明之非感光性表面改質劑形成表面改質層之步驟 步驟(C):於前述表面改質層上形成含有感光性樹脂的光阻層之步驟 步驟(D):將前述光阻層藉由曝光及顯像進行圖型化之步驟 步驟(E):隔著前述光阻層,將前述表面改質層及前述金屬層進行蝕刻之步驟 步驟(F):自前述覆金屬積層板剝離前述光阻層之步驟 <Metal wiring pattern formation method> Specifically, the metal wiring pattern is formed by having the following steps (A) to (F). Step (A): Pickling the metal-clad laminate with a metal layer formed on the insulating layer Step (B): The step of forming a surface modification layer using the non-photosensitive surface modification agent of the present invention on the aforementioned metal layer of the aforementioned metal-clad laminate. Step (C): The step of forming a photoresist layer containing photosensitive resin on the aforementioned surface modification layer Step (D): Patterning the aforementioned photoresist layer through exposure and development Step (E): The step of etching the aforementioned surface modification layer and the aforementioned metal layer through the aforementioned photoresist layer. Step (F): peeling off the photoresist layer from the metal-clad laminate

邊利用圖3~圖8邊說明各步驟。Each step will be described using Figures 3 to 8.

於步驟(A)中,將絕緣層1上形成有金屬層2的覆金屬積層板5(參照圖3)進行酸洗淨。藉此,可去除妨害非感光性表面改質劑與金屬層的交互作用之附著於金屬表面的髒汙或抗氧化劑、氧化被膜等。酸洗淨液不特別限定,可使用現行品。又,可於酸洗淨後進行水洗。In step (A), the metal-clad laminate 5 (see FIG. 3 ) with the metal layer 2 formed on the insulating layer 1 is pickled. This can remove dirt, antioxidants, oxide films, etc. attached to the metal surface that hinder the interaction between the non-photosensitive surface modifier and the metal layer. The acid cleaning solution is not particularly limited, and current products can be used. In addition, water washing can be carried out after acid washing.

絕緣層1為成為金屬配線圖型之基材的絕緣性的層。絕緣層1可為由樹脂等絕緣材料所構成,且於紙或玻璃等基材中含浸有樹脂的預浸體。The insulating layer 1 is an insulating layer that serves as the base material of the metal wiring pattern. The insulating layer 1 may be made of an insulating material such as resin, and may be a prepreg in which a base material such as paper or glass is impregnated with resin.

金屬層2為與上述積層體之金屬層相同。The metal layer 2 is the same as the metal layer of the above-mentioned laminated body.

於步驟(B)中,於覆金屬積層板5的金屬層2上,使用本發明之非感光性表面改質劑形成表面改質層3(參照圖4)。具體而言,於金屬層2上塗佈非感光性表面改質劑,而形成表面改質層3。表面改質層3的厚度不特別限定,基於本發明效果之觀點,較佳為0.1~20nm的範圍內。In step (B), the non-photosensitive surface modifying agent of the present invention is used to form a surface modification layer 3 on the metal layer 2 of the metal-clad laminate 5 (see FIG. 4 ). Specifically, a non-photosensitive surface modifying agent is coated on the metal layer 2 to form the surface modifying layer 3 . The thickness of the surface modification layer 3 is not particularly limited, but from the viewpoint of the effects of the present invention, it is preferably in the range of 0.1 to 20 nm.

於步驟(B)與次一步驟(C)之間,較佳具有將形成有表面改質層3的覆金屬積層板5進行水洗之步驟。藉此,可去除多餘的非感光性表面改質劑,其會使與金屬層的交互作用不充分。Between step (B) and the next step (C), there is preferably a step of washing the metal-clad laminate 5 on which the surface modification layer 3 is formed. In this way, excess non-photosensitive surface modifier can be removed, which would lead to insufficient interaction with the metal layer.

於步驟(C)中,於表面改質層3上形成含有感光性樹脂的光阻層4(參照圖5)。此狀態之積層體6由於具備金屬層2、表面改質層3及光阻層4,而屬本發明之積層體。In step (C), a photoresist layer 4 containing photosensitive resin is formed on the surface modification layer 3 (see FIG. 5 ). Since the laminated body 6 in this state includes the metal layer 2, the surface modification layer 3 and the photoresist layer 4, it belongs to the laminated body of the present invention.

光阻層4若為與上述積層體之光阻層相同地含有可進行光微影所致之圖型化的感光性樹脂者則不特別限定,可藉由貼合乾膜光阻或塗佈液狀光阻材料而形成。The photoresist layer 4 is not particularly limited as long as it contains a photosensitive resin that can be patterned by photolithography like the photoresist layer of the above-mentioned laminated body. It can be formed by laminating dry film photoresist or coating. Liquid photoresist material.

於步驟(D)中,將光阻層4藉由曝光及顯像進行圖型化(參照圖6)。具體而言,使用可將光阻層4曝光成任意圖型狀的光罩將光阻層4進行曝光,其後使用顯像液溶解去除光阻層4當中多餘的部分而進行圖型化。於顯像後較佳進行水洗。In step (D), the photoresist layer 4 is patterned by exposure and development (see FIG. 6 ). Specifically, the photoresist layer 4 is exposed using a photomask that can expose the photoresist layer 4 into any pattern shape, and then a developer is used to dissolve and remove the excess portion of the photoresist layer 4 to perform patterning. It is best to wash with water after development.

曝光條件及顯像條件不特別限定,可適用現行品。Exposure conditions and development conditions are not particularly limited, and current products can be applied.

於步驟(E)中,隔著光阻層4,將表面改質層3及金屬層2進行蝕刻(參照圖7)。具體而言,藉由使用蝕刻液之濕蝕刻,將去除光阻層4的部分表面改質層3及金屬層2溶解,而將表面改質層3及金屬層2進行圖型化。In step (E), the surface modification layer 3 and the metal layer 2 are etched through the photoresist layer 4 (see FIG. 7 ). Specifically, by wet etching using an etching solution, the portion of the surface modification layer 3 and the metal layer 2 that has been removed from the photoresist layer 4 is dissolved, and the surface modification layer 3 and the metal layer 2 are patterned.

蝕刻條件不特別限定,可適用現行品。The etching conditions are not particularly limited, and current products can be applied.

於步驟(F)中,自覆金屬積層板5剝離光阻層4(參照圖8)。此時,藉由本發明之效果,表面改質層3更容易與光阻層4剝離,因此表面改質層3更容易存留於覆金屬積層板5的金屬層2上,惟表面改質層3可存留於金屬層2上,亦可與光阻層4同時剝離。In step (F), the photoresist layer 4 is peeled off from the metal-clad laminate 5 (see FIG. 8 ). At this time, through the effect of the present invention, the surface modification layer 3 is more easily peeled off from the photoresist layer 4, so the surface modification layer 3 is more likely to remain on the metal layer 2 of the metal-clad laminate 5, but the surface modification layer 3 It can remain on the metal layer 2 and can also be peeled off at the same time as the photoresist layer 4 .

光阻層4之剝離方法不特別限定,較佳使用剝離液來剝離。該剝離液不特別限定,可適用現行品。The method for peeling off the photoresist layer 4 is not particularly limited. It is preferable to use a peeling liquid for peeling off. The stripping liquid is not particularly limited, and current products can be applied.

根據以上步驟,可形成金屬配線圖型7。According to the above steps, the metal wiring pattern 7 can be formed.

就前述金屬配線圖型之形成方法,由於可形成高密度且高精細的金屬配線圖型,藉由對該金屬配線圖型安裝所需之電子零件,可製造高密度且高精細的本發明之印刷電路板(印刷配線板)。Since the above-mentioned method of forming a metal wiring pattern can form a high-density and high-definition metal wiring pattern, by mounting the required electronic components on the metal wiring pattern, it is possible to manufacture a high-density and high-definition metal wiring pattern according to the present invention. Printed circuit board (printed wiring board).

<印刷電路板積層體之形成方法> 本發明之積層體(印刷電路板積層體)之形成方法為於金屬層上形成樹脂層之方法,其中具有使用本發明之非感光性表面改質劑,於金屬層與樹脂層之間形成表面改質層之步驟。 金屬層可為原版或經配線圖型化,積層方法可使用熱壓等周知之方法。 樹脂層可使用市售樹脂薄膜或預浸體(含浸有液狀樹脂之片狀纖維),較佳使用氟樹脂或環聚烯烴樹脂、液晶聚合物、環氧樹脂、酚樹脂、聚醯亞胺、雙馬來醯亞胺/三嗪樹脂、改性聚苯醚、含氰酸酯之樹脂,亦可於積層前對樹脂層的貼合面實施電暈處理或電漿處理等的表面處理。 [實施例] <Method for forming printed circuit board laminate> The method for forming a laminate (printed circuit board laminate) of the present invention is a method of forming a resin layer on a metal layer, which includes using the non-photosensitive surface modifier of the present invention to form a surface between the metal layer and the resin layer. Steps to modify the layer. The metal layer may be original or patterned, and the lamination method may use a well-known method such as hot pressing. For the resin layer, commercially available resin films or prepregs (sheet fibers impregnated with liquid resin) can be used. Preferably, fluororesin or cyclopolyolefin resin, liquid crystal polymer, epoxy resin, phenolic resin, or polyimide are used. , bismaleimide/triazine resin, modified polyphenylene ether, and cyanate-containing resin. Surface treatments such as corona treatment or plasma treatment can also be performed on the bonding surface of the resin layer before lamination. [Example]

以下舉出實施例具體地說明本發明,惟本發明不限定於此等。此外,下述實施例中,若非特別記述,則操作係於室溫(25℃)下進行。又,若非特別記述,則「%」及「份」係分別意指「質量%」及「質量份」。 以下示出實施例中使用之化合物。 The present invention will be described in detail below with reference to examples, but the present invention is not limited thereto. In addition, in the following examples, unless otherwise stated, the operation was performed at room temperature (25°C). In addition, unless otherwise stated, "%" and "part" mean "mass %" and "mass part" respectively. The compounds used in the examples are shown below.

[實施例1] 針對下述表I及表II所記載之各化合物,評估配向性。 具體而言,使用量子化學計算軟體Gaussian16 (Gaussian公司製),以DFT計算,利用B3LYP(密度泛函理論)來進行結構最佳化。作為基函數,銅係使用SDD(Stuttgart/Dresden ECP)來進行計算,其他元素係使用6-31G(d)。 以schrodinger公司製軟體Material Science Suite之Grid scan模組,於配基四周的空間,以銅離子成為再穩定的位置作為初期配置。將上述所計算之最佳結構於Winmostar呈現時,將選擇銅原子(Cu)-氮原子(N)-氧原子(O)-而表示的角度,依循下述基準評估其配向性。 (基準) AA:銅原子-氮原子-氧原子的角度:140°以上 A:銅原子-氮原子-氧原子的角度為0°以上且未達140° B:化合物的結構內無酚性羥基。 [Example 1] For each compound described in Table I and Table II below, the alignment properties were evaluated. Specifically, the quantum chemical calculation software Gaussian16 (manufactured by Gaussian Corporation) was used, DFT calculation was performed, and B3LYP (density functional theory) was used to optimize the structure. As the basis function, copper system uses SDD (Stuttgart/Dresden ECP) for calculation, and other element systems use 6-31G(d). Using the Grid scan module of the Material Science Suite of Schrodinger's software, the initial configuration is to position copper ions in the space around the ligand where they become re-stabilized. When the optimal structure calculated above is presented in Winmostar, the angle represented by copper atom (Cu)-nitrogen atom (N)-oxygen atom (O)- will be selected, and its alignment will be evaluated according to the following criteria. (baseline) AA: Angle of copper atom-nitrogen atom-oxygen atom: more than 140° A: The angle between copper atom-nitrogen atom-oxygen atom is more than 0° and less than 140° B: There is no phenolic hydroxyl group in the structure of the compound.

[實施例2] <非感光性表面改質劑的調製> 對由乙醇20質量%及離子交換水80質量%所構成的溶劑,以成為20質量ppm的方式添加下述表I之各化合物,分別調製非感光性表面改質劑1~8及12~15。又,對於非感光性表面改質劑10及11,以成為下述表I的方式變更乙醇及離子交換水的比率,且非感光性表面改質劑9,以成為下述表I的方式變更化合物(1-1)的濃度,除此之外係同樣地進行來調製。 [Example 2] <Preparation of non-photosensitive surface modifier> To a solvent composed of 20 mass% of ethanol and 80 mass% of ion-exchanged water, each compound in the following Table I was added so as to become 20 mass ppm, and non-photosensitive surface modifiers 1 to 8 and 12 to 15 were prepared respectively. . In addition, the ratios of ethanol and ion-exchanged water were changed for the non-photosensitive surface modifying agents 10 and 11 so as to be shown in Table I below, and the non-photosensitive surface modifying agent 9 was changed so as to be shown in Table I below. Except for the concentration of compound (1-1), it was prepared in the same manner.

<金屬配線圖型(積層體)1的形成> 進行下述步驟(A)~(F),形成金屬配線圖型1。 (步驟(A)) 將絕緣層上形成有金屬層的覆銅積層板(Panasonic公司製 MEGTRON 7 R-5785),使用酸洗淨液(Sanwa化學工業公司製CP-30)與噴霧型洗淨裝置進行酸洗淨,接著進行水洗。 <Formation of metal wiring pattern (laminated body) 1> The following steps (A) to (F) are performed to form the metal wiring pattern 1. (Step (A)) A copper-clad laminated board (MEGTRON 7 R-5785 manufactured by Panasonic Corporation) with a metal layer formed on the insulating layer is acid-cleaned using an acid cleaning solution (CP-30 manufactured by Sanwa Chemical Industry Co., Ltd.) and a spray-type cleaning device. Then wash with water.

(步驟(B)) 在經酸洗淨及水洗之覆銅積層板的金屬層上,使用噴霧方式之塗佈裝置塗佈上述調製之非感光性表面改質劑1,其後進行水洗。水洗後,以PVA輥去水,以80℃之氣刀加以乾燥,而形成厚度5nm的表面改質層。 (Step (B)) On the metal layer of the acid-cleaned and water-washed copper-clad laminate, use a spray coating device to apply the non-photosensitive surface modifier 1 prepared above, and then wash it with water. After washing with water, remove water with a PVA roller and dry with an air knife at 80°C to form a surface modification layer with a thickness of 5 nm.

(步驟(C)) 於表面改質層上,將作為樹脂層之乾膜光阻(旭化成公司製AK-4034)(含鹼可溶性樹脂之光硬化性丙烯酸樹脂),藉由熱軋層壓機,以輥溫度105℃、空氣壓力0.35MPa、及層壓速度1.5m/min之條件進行層壓,而形成光阻層。此外,使用之乾膜光阻(旭化成公司製AK-4034)為於其中一面具有由聚對苯二甲酸乙二酯薄膜所構成的支持體,且於另一面具有由聚乙烯薄膜所構成的保護層者。層壓係以一邊剝離保護層,一邊使具有保護層的面經由表面改質層與金屬層接著的方式進行。 (Step (C)) On the surface modification layer, dry film photoresist (AK-4034 manufactured by Asahi Kasei Co., Ltd.) (photo-curable acrylic resin containing alkali-soluble resin) as the resin layer was heated with a hot-rolling laminator at a roll temperature of 105°C. , air pressure 0.35MPa, and lamination speed 1.5m/min for lamination to form a photoresist layer. In addition, the dry film photoresist used (AK-4034 manufactured by Asahi Kasei Co., Ltd.) has a support composed of a polyethylene terephthalate film on one side and a protection composed of a polyethylene film on the other side. Layers. Lamination is performed by peeling off the protective layer and bonding the surface with the protective layer to the metal layer via the surface modification layer.

(步驟(D)) 使用鉻玻璃遮罩,藉由平行光曝光機(Oak公司製HMW-801),對光阻層進行曝光。曝光條件係採用乾膜光阻的建議條件之60mj/cm 2。 自曝光後的光阻層剝離支持體。其後,使用由1質量%之碳酸鈉(Na 2CO 3)的水溶液所構成的顯像液、及鹼顯像機,以30℃之條件溶解去除光阻層的未曝光部分,接著進行水洗、顯像。 藉由以上操作,將光阻層進行圖型化。 (Step (D)) Using a chromium glass mask, the photoresist layer was exposed with a parallel light exposure machine (HMW-801 manufactured by Oak Corporation). The exposure conditions are 60mj/cm 2 which is the recommended condition for dry film photoresist. The support is peeled off from the exposed photoresist layer. Thereafter, a developer consisting of an aqueous solution of 1 mass % sodium carbonate (Na 2 CO 3 ) and an alkali developer were used to dissolve and remove the unexposed portion of the photoresist layer at 30°C, followed by water washing. , imaging. Through the above operations, the photoresist layer is patterned.

(步驟(E)) 於浸漬方式,使用由2質量%之鹽酸(HCl)及2質量%之氯化鐵(FeCl 3)的水溶液所構成的蝕刻液,以溫度30℃、浸漬時間(1分鐘)之條件將表面改質層及金屬層進行蝕刻。 (Step (E)) In the immersion method, use an etching solution composed of an aqueous solution of 2 mass % hydrochloric acid (HCl) and 2 mass % ferric chloride (FeCl 3 ), with a temperature of 30°C and an immersion time of 1 minute. ) conditions to etch the surface modification layer and metal layer.

(步驟(F)) 使用由3質量%之氫氧化鈉(NaOH)的水溶液所構成的剝離液,以溫度50℃之條件,自覆銅積層板剝離光阻層。 (Step (F)) The photoresist layer was peeled off from the copper-clad laminate using a stripping solution composed of a 3 mass% aqueous solution of sodium hydroxide (NaOH) at a temperature of 50°C.

<金屬配線圖型2~15的形成> 除在前述金屬配線圖型1的形成中分別將非感光性表面改質劑1變更為下述表I所示各非感光性表面改質劑2~15以外係同樣地進行,形成金屬配線圖型2~15。 <Formation of metal wiring patterns 2 to 15> The metal wiring pattern was formed in the same manner except that the non-photosensitive surface modifying agent 1 was changed to each of the non-photosensitive surface modifying agents 2 to 15 shown in Table I below in the formation of the metal wiring pattern 1. Type 2~15.

[評估] <光阻接著性> 將上述所形成之各金屬配線圖型,以顯微鏡進行觀察,以下述基準評估光阻接著性(細線形成性)。評估之結果為如下述表I所示。將下述基準之「AAA」、「AA」及「A」作為實用上無問題。 (基準) AAA:金屬配線的殘留率為99%以上。 AA:金屬配線的殘留率為97%以上且未達99%。 A:金屬配線的殘留率為95%以上且未達97%。 B:金屬配線的殘留率未達95%。 [evaluate] <Photoresist Adhesion> Each metal wiring pattern formed above was observed with a microscope, and the photoresist adhesiveness (thin line forming ability) was evaluated based on the following criteria. The results of the evaluation are shown in Table I below. There is no practical problem in taking the following standards as "AAA", "AA" and "A". (baseline) AAA: The residual rate of metal wiring is over 99%. AA: The residual rate of metal wiring is 97% or more and less than 99%. A: The residual rate of metal wiring is 95% or more and less than 97%. B: The residual rate of metal wiring is less than 95%.

[實施例3] <非感光性表面改質劑的調製> 調製與實施例2同樣的非感光性表面改質劑1~15。 [Example 3] <Preparation of non-photosensitive surface modifier> The same non-photosensitive surface modifying agents 1 to 15 as in Example 2 were prepared.

<印刷電路板積層體(積層體)1的形成> 進行下述步驟(I)~(III),形成印刷電路板積層體1。 (步驟(I)) 將絕緣層上形成有金屬層的覆銅積層板(Panasonic公司製R-1766),使用酸洗淨液(Sanwa化學工業公司製CP-30)與噴霧型洗淨裝置進行酸洗淨,接著進行水洗。 <Formation of printed circuit board laminate (laminated body) 1> The following steps (I) to (III) are performed to form the printed wiring board laminated body 1 . (Step (I)) A copper-clad laminated board (R-1766 manufactured by Panasonic Corporation) with a metal layer formed on the insulating layer is acid-cleaned using an acid cleaning solution (CP-30 manufactured by Sanwa Chemical Industry Corporation) and a spray-type cleaning device, and then Wash.

(步驟(II)) 在經酸洗淨及水洗之覆銅積層板的金屬層上,使用噴霧方式之塗佈裝置塗佈上述調製之非感光性表面改質劑1,其後進行水洗。水洗後,以PVA輥去水,以80℃之氣刀加以乾燥,而形成厚度5nm的表面改質劑層。 (Step (II)) On the metal layer of the acid-cleaned and water-washed copper-clad laminate, use a spray coating device to apply the non-photosensitive surface modifier 1 prepared above, and then wash it with water. After washing with water, remove water with a PVA roller and dry with an air knife at 80°C to form a surface modifier layer with a thickness of 5 nm.

(步驟(III)) 以在表面改質劑層上疊合預浸體(Panasonic公司製R-1661)(環氧系樹脂)的方式積層,以3.0MPa的壓力自常溫(25℃)以10℃/min的升溫速度加熱至120℃並保持30分鐘,且以10℃/min的升溫速度加熱至190℃並保持2小時藉此進行積層接著,而製成印刷電路板積層體1。 (Step (III)) The prepreg (R-1661 manufactured by Panasonic Corporation) (epoxy resin) was laminated on the surface modifier layer, and the temperature was increased from normal temperature (25°C) to 10°C/min at a pressure of 3.0 MPa. Heating to 120° C. and holding for 30 minutes, and heating to 190° C. at a temperature rising rate of 10° C./min and holding for 2 hours were performed to perform lamination adhesion, and a printed circuit board laminate 1 was produced.

<印刷電路板積層體2~15的製作> 除在前述印刷電路板積層體1的製作中,分別將非感光性表面改質劑1變更為下述表II所示各非感光性表面改質劑2~15以外係同樣地進行,製成印刷電路板積層體2~15。 <Production of printed circuit board laminates 2 to 15> In the preparation of the printed wiring board laminated body 1, the process was carried out in the same manner except that the non-photosensitive surface modifying agent 1 was changed to the non-photosensitive surface modifying agents 2 to 15 shown in the following Table II. Printed circuit board laminates 2 to 15.

[評估] <預浸體接著性的評估> 將上述所製作之各印刷電路板積層體切出成寬10mm的長條狀,使用Tensilon(ORIENTEC股份有限公司製),以90度剝離測定剝離強度,並依循下述基準評估預浸體接著性。評估之結果為如下述表II所示。將下述基準之「AA」及「A」作為實用上無問題。 (基準) AA:接著強度 為0.65kN/m以上 A:接著強度 為0.5kN/m以上且未達0.65kN/m B:接著強度 未達0.5kN/m [evaluate] <Evaluation of prepreg adhesion> Each of the printed wiring board laminates produced above was cut into strips with a width of 10 mm, and the peel strength was measured at 90 degrees using Tensilon (manufactured by ORIENTEC Co., Ltd.), and the prepreg adhesion was evaluated according to the following criteria. . The results of the evaluation are shown in Table II below. There is no practical problem in taking "AA" and "A" as the following standards. (baseline) AA: Bonding strength: 0.65kN/m or more A: Bonding strength: 0.5kN/m or more and less than 0.65kN/m B: Bonding strength: less than 0.5kN/m

如上述結果所示,可知本發明之非感光性表面改質劑所含有之雜環化合物,其結構中的氮原子與酚性羥基存在於分子骨架的對角,分子骨架朝垂直方向配位。 而且,可看出藉由使用含有此種配向性雜環化合物的本發明之非感光性表面改質劑,與使用比較例之表面改質劑時相比,光阻接著性及預浸體接著性優良。 As shown in the above results, it can be seen that the nitrogen atoms and phenolic hydroxyl groups in the structure of the heterocyclic compound contained in the non-photosensitive surface modifier of the present invention exist at opposite corners of the molecular skeleton, and the molecular skeleton is coordinated in the vertical direction. Furthermore, it can be seen that by using the non-photosensitive surface modifying agent of the present invention containing such an aligned heterocyclic compound, the photoresist adhesiveness and prepreg adhesion are improved compared to when the surface modifying agent of the comparative example is used. Excellent sex.

1:絕緣層 2:金屬層 3:表面改質層 4:光阻層 5:覆金屬積層板 6:積層體 7:金屬配線圖型 10:金屬層 20:樹脂層 30:表面改質層 A:中心線 1: Insulation layer 2:Metal layer 3: Surface modification layer 4: Photoresist layer 5:Metal clad laminate 6: Laminated body 7: Metal wiring pattern 10:Metal layer 20:Resin layer 30: Surface modification layer A: Center line

[圖1]為表示存在於本發明之雜環化合物之結構中的氮原子與酚性羥基的配位狀態的示意圖 [圖2]為用以說明本發明之雜環化合物的配向性的圖 [圖3]為表示金屬配線圖型之形成步驟的圖(覆金屬積層板) [圖4]為表示金屬配線圖型之形成步驟的圖(表面改質層的形成) [圖5]為表示金屬配線圖型之形成步驟的圖(光阻層的形成) [圖6]為表示金屬配線圖型之形成步驟的圖(光阻層的圖型化) [圖7]為表示金屬配線圖型之形成步驟的圖(表面改質層及金屬層的蝕刻) [圖8]為表示金屬配線圖型之形成步驟的圖(光阻層的剝離) [Fig. 1] A schematic diagram showing the coordination state of a nitrogen atom and a phenolic hydroxyl group present in the structure of the heterocyclic compound of the present invention. [Fig. 2] A diagram illustrating the alignment of the heterocyclic compound of the present invention. [Fig. 3] A diagram showing the steps of forming a metal wiring pattern (metal-clad laminate) [Fig. 4] A diagram showing the steps of forming a metal wiring pattern (formation of the surface modification layer) [Fig. 5] A diagram showing the steps of forming a metal wiring pattern (formation of photoresist layer) [Fig. 6] A diagram showing the steps of forming a metal wiring pattern (patterning of the photoresist layer) [Fig. 7] A diagram showing the steps of forming a metal wiring pattern (surface modification layer and etching of the metal layer) [Fig. 8] A diagram showing the steps of forming a metal wiring pattern (peeling off the photoresist layer)

10:金屬層 20:樹脂層 30:表面改質層 10:Metal layer 20:Resin layer 30: Surface modification layer

Claims (11)

一種非感光性表面改質劑,其為於金屬層與樹脂層之間形成表面改質層的非感光性表面改質劑,其中, 至少含有一種以上之具有下述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物; [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基; R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基、雜芳基或鹵素原子; n及m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數);有多個取代基R 2時,各取代基R 2可彼此相同或相異;又,有多個n時,各個n可彼此相同或相異,而且,有多個m時,各個m可彼此相同或相異]。 A non-photosensitive surface modifying agent, which is a non-photosensitive surface modifying agent that forms a surface modifying layer between a metal layer and a resin layer, wherein it contains at least one type of agent having the following general formula (1), ( Heterocyclic compounds with the structures represented by 2), (3) or (4); [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent; R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, or an amide group. group, heteroaryl group or halogen atom; n and m are respectively an integer from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding general formula (1), it is an integer from 0 to 4); there are When there are multiple substituents R2 , each substituent R2 can be the same or different from each other; also, when there are multiple n, each n can be the same or different from each other, and when there are multiple m, each m can be the same as each other. or different]. 如請求項1之非感光性表面改質劑,其中前述雜環化合物係具有前述通式(1)表示之結構。The non-photosensitive surface modifying agent of claim 1, wherein the aforementioned heterocyclic compound has a structure represented by the aforementioned general formula (1). 如請求項2之非感光性表面改質劑,其中前述雜環化合物為具有下述通式(5)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基]。 The non-photosensitive surface modification agent of claim 2, wherein the aforementioned heterocyclic compound is a heterocyclic compound having a structure represented by the following general formula (5): [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent]. 如請求項1至3中任一項之非感光性表面改質劑,其至少含有水或醇類。The non-photosensitive surface modifying agent according to any one of claims 1 to 3, which contains at least water or alcohols. 一種積層體,其為於金屬層上依序設有表面改質層及樹脂層的積層體,其中, 前述表面改質層至少含有一種以上之具有下述通式(1)、(2)、(3)或(4)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基; R 2表示氫原子、烷基、芳基、烷氧基、芳氧基、羧基、酯基、醯胺基、雜芳基或鹵素原子; n及m分別為0~5之整數,且表示n+m=0~5之整數(惟,關於通式(1),為0~4之整數);有多個取代基R 2時,各取代基R 2可彼此相同或相異;又,有多個n時,各個n可彼此相同或相異,而且,有多個m時,各個m可彼此相同或相異]。 A laminated body in which a surface modification layer and a resin layer are sequentially provided on a metal layer, wherein the surface modification layer contains at least one or more compounds having the following general formulas (1), (2), Heterocyclic compounds with structures represented by (3) or (4): [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent; R 2 represents a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a carboxyl group, an ester group, or an amide group. group, heteroaryl group or halogen atom; n and m are respectively an integer from 0 to 5, and n+m=an integer from 0 to 5 (however, regarding general formula (1), it is an integer from 0 to 4); there are When there are multiple substituents R2 , each substituent R2 can be the same or different from each other; also, when there are multiple n, each n can be the same or different from each other, and when there are multiple m, each m can be the same as each other. or different]. 如請求項5之積層體,其中前述雜環化合物為具有前述通式(1)表示之結構的雜環化合物。The laminated body of claim 5, wherein the heterocyclic compound is a heterocyclic compound having a structure represented by the general formula (1). 如請求項6之積層體,其中前述雜環化合物為具有下述通式(5)表示之結構的雜環化合物: [式中,R 1表示氫原子、芳基或雜芳基,可進一步具有取代基]。 The laminated body of claim 6, wherein the aforementioned heterocyclic compound is a heterocyclic compound having a structure represented by the following general formula (5): [In the formula, R 1 represents a hydrogen atom, an aryl group or a heteroaryl group, and may further have a substituent]. 如請求項5至7中任一項之積層體,其中前述樹脂層為含有鹼可溶性樹脂的感光性樹脂組成物。The laminated body according to any one of claims 5 to 7, wherein the resin layer is a photosensitive resin composition containing an alkali-soluble resin. 如請求項5至7中任一項之積層體,其中前述樹脂層為至少含有具環氧結構之樹脂的熱硬化性樹脂組成物。The laminated body according to any one of claims 5 to 7, wherein the resin layer is a thermosetting resin composition containing at least a resin having an epoxy structure. 一種印刷電路板,其係使用如請求項5至9中任一項之積層體。A printed circuit board using the laminate according to any one of claims 5 to 9. 一種電子裝置,其係使用如請求項5至9中任一項之積層體。An electronic device using the laminate according to any one of claims 5 to 9.
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